CN112462484A - Flexible supporting structure of metal reflector - Google Patents

Flexible supporting structure of metal reflector Download PDF

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Publication number
CN112462484A
CN112462484A CN202011416750.9A CN202011416750A CN112462484A CN 112462484 A CN112462484 A CN 112462484A CN 202011416750 A CN202011416750 A CN 202011416750A CN 112462484 A CN112462484 A CN 112462484A
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CN
China
Prior art keywords
flexible
reflector
stress
groove
unloading groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011416750.9A
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Chinese (zh)
Inventor
谭双龙
张新
史广维
王灵杰
付强
刘洋
吴洪波
胡铭钰
闫磊
赵尚男
刘铭鑫
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN202011416750.9A priority Critical patent/CN112462484A/en
Publication of CN112462484A publication Critical patent/CN112462484A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors

Abstract

The invention provides a metal reflector integrated design and low-stress installation flexible supporting structure suitable for a strong mechanical environment, which comprises a reflector, a supporting back plate and a fan-shaped light-weight structure, wherein the reflector and the supporting back plate are designed in an integrated structure, and a flexible supporting lug, a stress isolation groove and a weight-reducing rectangular groove are processed on the supporting back plate.

Description

Flexible supporting structure of metal reflector
Technical Field
The invention relates to the field of reflector designs and supporting structures thereof, in particular to a metal reflector integrated design and low-stress installation flexible supporting structure suitable for a strong chemical environment.
Background
With the gradual development of aerospace optical system loads towards light weight, high rigidity, high stability and high cost performance, the design of an optical reflector needs to be lighter and more integrated. Generally, when a reflector is manufactured by adopting a glass material or a ceramic material, a metal material with a matched linear expansion coefficient close to that of the reflector is often used as a supporting back plate of the reflector, and the linear expansion coefficients of the reflector and the back of the selected material cannot be matched in a large temperature range, so that the environmental adaptability of an optical system is poor, and better imaging quality cannot be realized in a wide temperature range.
In order to increase the use temperature range of an optical system, particularly a low-temperature optical system, a mirror needs to be processed at room temperature, and a metal mirror has the advantage of being extremely thick when used in a low-temperature environment. With the continuous improvement of single-point diamond turning (SPDT) technology, metal materials represented by aluminum alloys have good machinability, and the reflector and the support structure can be made of the same material. Because the reflector and the supporting material are made of the same material, the environmental adaptability of the optical system is greatly improved. The metal reflector can be directly processed in a turning mode to meet the use requirement of the infrared optical system, the manufacturing efficiency of the optical reflector can be greatly improved, and the mass production of equipment is easy to realize. Compared with the traditional optical glass and ceramic material, the metal reflector has the advantages of low cost, quick manufacture, easy processing, simple installation and high integration.
Since a metal material typified by an aluminum alloy has a low elastic modulus, the optical mirror manufactured by the method is easily affected by thermal stress in an assembly environment, and thus, the mirror surface shape is degraded. In addition, when the reflector is applied to working conditions of strong impact, vibration and the like, the mounting torque of the screw is required to be larger, and the large mounting torque of the screw can introduce screw pre-tightening stress, so that the surface shape of the reflector is reduced.
The prior art discloses a micro-stress assembly flexible support method for a small-caliber microcrystalline glass material reflector, wherein the micro-stress assembly flexible support of the small-caliber microcrystalline reflector is described, as shown in fig. 1, the structure comprises a reflector and a flexible mandrel, the technology firstly carries out light weight processing on the back of the reflector, and a central column is processed in the center of the back; then, an equilateral triangle flexible mandrel is processed, a hollow cylinder is processed in the middle of the flexible mandrel, three corners of the flexible mandrel are respectively processed to form a connecting part with a cuboid structure, three rectangular through holes are processed between the cylinder and the connecting part, and two groups of flexible unloading grooves which are parallel to each other, mounting holes and pin holes are processed on the connecting part. And finally, directly bonding the cylindrical outer surface of the flexible mandrel with the inner surface of the central column at the back of the reflector.
The disadvantages of this support method are as follows:
1. poor temperature stability
The reflector and the back plate are made of different materials, so that the thermal stability in a larger temperature range cannot be realized;
2. poor mounting reliability
The reflector and the back plate are connected in a gluing mode, and the glue layer may fail under extreme environmental conditions, so that the reflector and the back plate are separated;
3. poor assembly manufacturability
When the assembly and bonding of the reflector and the back plate have large stress, the reflector and the back plate are difficult to disassemble, and the assembly manufacturability is poor;
4. low processing efficiency
The reflector is processed in a traditional grinding and polishing mode, and the reflector and the back plate are required to be combined after being processed respectively, so that rapid low-cost batch production cannot be realized, and equipment research and development are not required;
5. assembly datum and optical datum have poor consistency
After the reflector and the back plate are assembled, the back reference of the back plate is possibly inconsistent with the mirror surface reference of the reflector, and the back reference of the back plate needs to be additionally ground, so that the back mounting reference of the back plate is vertical to the mirror surface optical axis;
6. poor stress relief capability
The flexible design of the supporting structure only considers the flexible unloading in the aspect of installation flatness, neglects the stress introduction around the rotation direction of the screw when the screw is pre-tightened, so that the reflector cannot bear larger pre-tightening force of the screw, and when the pre-tightening force of the screw needs to be increased to resist extreme force thermal working conditions, the stress unloading capacity is poor.
Disclosure of Invention
The invention aims to solve the problem of thermal stability of a wide temperature range caused by different materials of a reflector and a back plate, and discloses an integrated support structure for low-stress installation of a metal reflector.
In order to achieve the purpose, the invention adopts the following specific technical scheme:
a metal mirror flexible support structure, comprising: the back part is provided with a reflector with a fan-shaped light-weight structure, a circular support back plate with a leading-out end, three flexible support lugs and three stress isolation grooves, wherein the circular support back plate is processed on the back surface of the reflector and provided with the leading-out end;
the three flexible supporting lugs are uniformly distributed at 120 degrees, and the diameters of circles formed by connecting the centers of the through holes processed on the three flexible supporting lugs are larger than the diameter of the reflector.
Preferably, the mirror and the support backplate are of unitary construction.
Preferably, a flexible structure group for unloading flatness stress and a flexible hinge group for unloading installation stress are arranged on the flexible supporting lug; the surface of the flexible support lug, which is far away from the reflector, is an installation surface, the depth direction of the notch of the flexible structure group is vertical to the installation surface, and the extending direction of the notch of the flexible structure group is parallel to the installation surface; the depth direction of the grooves of the flexible hinge structures is the same as the extending direction of the grooves of the flexible structure group, and the extending direction of the grooves of the flexible hinge structures is the same as the depth direction of the grooves of the flexible structure group.
Preferably, the flexible structure group comprises: the stress unloading device comprises a first stress unloading groove and a second stress unloading groove, wherein the first stress unloading groove and the second stress unloading groove are parallel to each other, a notch of the first stress unloading groove is positioned on the mounting surface of a flexible supporting lug, and the depth direction of the notch is perpendicular to the mounting surface of the flexible supporting lug; the notch of the second stress unloading groove is positioned on the back surface opposite to the mounting surface, and the slotting direction is vertical to the mounting surface of the flexible support lug; the depth of the first stress unloading groove and the second stress unloading groove is smaller than the thickness of the flexible supporting lug.
Preferably, the flexible hinge set comprises: and two groups of flexible hinges are processed on two sides of the flexible supporting lug in parallel.
Preferably, the flexible support lug is further provided with a rectangular lightening groove, so that the two groups of flexible hinges are respectively positioned at two sides of the rectangular lightening groove.
Preferably, a weight-reducing rectangular groove is further machined in the leading-out end of the support back plate in the direction close to the circle center of the support back plate.
Preferably, the mirror is a metal mirror of circular, square or elliptical shape.
Preferably, the reflector is made of at least one of aluminum alloy, beryllium-aluminum alloy and silicon-aluminum alloy.
The invention can obtain the following technical effects:
1. the reflector and the support back plate are made of the same metal material, so that the problem of thermal stability in a wide temperature range caused by the fact that the reflector and the back plate are made of different materials is solved;
2. the reflector and the back plate are integrally designed, so that the precise transmission of the optical mirror surface and the back plate reference can be realized, an additional connecting mechanism is not needed, the design complexity is simplified, and the manufacturing efficiency and the reliability of the optical reflector are improved;
3. the flexible supporting structure of the reflector not only can adapt to the mirror surface stress deformation caused by the difference of the installation planes, but also can adapt to the mirror surface stress deformation caused by the installation of the reflector needing large moment, has stronger stress unloading capacity, realizes the low-stress installation of the reflector, and can be suitable for the installation working condition of a strong chemical environment;
4. the reflector has compact structure and small axial size, can realize the molding of the reflector by adopting the traditional machining mode, has high processing efficiency and is easy to realize quick batch manufacturing.
Drawings
FIG. 1 is a schematic diagram of a micro-stress assembled flexible support for a small-caliber micro-crystal mirror in the prior art;
FIG. 2 is a schematic view of a mirror surface of a metal mirror support structure according to one embodiment of the present invention;
FIG. 3 is a rear view of FIG. 2;
FIG. 4 is a block diagram of a flexible support ear;
FIG. 5 is an enlarged view of a portion of FIG. 4;
fig. 6 is a side view of fig. 2.
Wherein the reference numerals include:
a reflector 1, a support back plate 2, a fan-shaped lightweight structure 3,
A flexible supporting lug 4,
A flexible structure group 41, a first stress relief groove 411, a second stress relief groove 412,
A flexible hinge group 42, a first flexible relief groove 421, a second flexible relief groove 422, a third flexible relief groove 423, a fourth flexible relief groove 424,
A rectangular lightening groove 43, a through hole 44,
Stress isolation groove 5, subtract heavy rectangular channel 6.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
The integrated design and flexible supporting structure of the metal reflector provided by the invention will be described in detail through specific embodiments.
Fig. 2 and 4 show the structure of the integrated design and flexible support structure of the metal reflector of the present invention, which includes a circular reflector 1 with a fan-shaped light-weight structure 3 on the back, a support back plate 2 integrally formed with the reflector 1, flexible support lugs 4 formed on the support back plate 2, and stress isolation grooves 5 for isolating stress between the support back plate 2 and the reflector 1.
In a preferred embodiment of the present invention, the three flexible supporting ears 4 are uniformly distributed at 120 ° on the leading-out end of the supporting backboard 2, and the diameter of the circle formed by connecting the centers of the through holes 44 on the three flexible supporting ears 4 is larger than the diameter of the reflector 1.
In another embodiment of the present invention, a stress isolation groove 5 is directly disposed between each flexible support lug 4 and the reflector 1, so that the flexible support lugs 4 are parallel to the reflector 1 and have a certain spacing, and the depth of the stress isolation groove is determined according to the requirements of optical machine design, generally, the deeper the depth of the stress isolation groove 5 is, the lower the first-order mode of the reflector assembly is, the poorer the dynamic stiffness of the reflector assembly is, but the stronger the stress unloading capability of the flexible support lugs 4 of the reflector 1 is; the flexible supporting ears 4 and the supporting backboard 2 are also integrally processed and formed.
In the process of machining, the stress isolation groove 5 can realize stress-free machining in a wire-passing cutting mode, extra machining stress is not introduced during machining, and the stability of the reflector 1 is facilitated.
In another embodiment of the present invention, the back of the reflector 1 is milled into the fan-shaped light-weight structure 3 by a machining center, so as to realize the light weight of the reflector 1.
Fig. 4 shows a specific structure of the flexible support ear 4, which includes a flexible structure group 41 for unloading flatness stress, a flexible hinge group 42 for unloading installation stress, a rectangular lightening groove 43 located in the middle of the two flexible hinge groups 42, and a through hole 44 for assembling the reflector 1 with an external installation surface; wherein, a group of flexible hinges formed by the first flexible unloading groove 421 and the second flexible unloading groove 422, and another group of flexible hinges formed by the third flexible unloading groove 423 and the fourth flexible unloading groove 424, the two groups of flexible hinges are processed in parallel at two sides of the flexible supporting ear 4 to form a group of complete flexible hinge group 42.
In the present embodiment, the flexible support ears 4 are flat and include an upper surface and a mounting surface parallel to the reflector 1, and two side surfaces perpendicular to the reflector 1 on both sides of the flexible support ears 4. The provision of the rectangular lightening slots 43 allows the flexible support ears 4 to have two inner sides.
Notches of the first flexible unloading groove 421 and the fourth flexible unloading groove 424 are respectively positioned on the left side surface and the right side surface of the flexible supporting lug 4, and the notches are the side surfaces of which the depth direction is vertical to the flexible supporting lug 4; notches of the second flexible unloading groove 422 and the third flexible unloading groove 423 are respectively positioned on two inner side surfaces of the flexible supporting lug 4, the positions of the notches are respectively opposite to the positions of the first flexible unloading groove 421 and the fourth flexible unloading groove 424, and the depth directions of the notches are respectively opposite to the depth directions of the notches of the first flexible unloading groove 421 and the fourth flexible unloading groove 424; namely, the first flexible unloading groove 421 and the second flexible unloading groove 422 are positioned at one side of the rectangular lightweight groove 43, and the slotting positions are in the same horizontal plane but opposite directions; the third flexible unloading groove 423 and the fourth flexible unloading groove 424 are positioned at the other side of the rectangular lightening groove 43, and the grooving positions are in the same horizontal plane and opposite in direction.
In a preferred embodiment of the present invention, see fig. 5, the notches of the first stress relief slots 411 are located on the mounting surface of the flexible support ears 4, and the direction of the notches is perpendicular to the mounting surface of the flexible support ears 4; the notch of the second stress relief groove 412 is positioned on the back side opposite to the mounting surface, and the slotting direction is perpendicular to the mounting surface of the flexible support lug 4; the first stress unloading groove 411 and the second stress unloading groove 412 are parallel to each other, the two stress unloading grooves are close to the bottom of the flexible supporting lug 4, and the two stress unloading grooves and the stress isolation groove 5 between the reflector 1 and the supporting back plate 2 realize the unloading of the stress generated by the installation flatness;
in another embodiment of the present invention, the first stress relief groove 411 and the second stress relief groove 412 are formed by wire cutting, the width of the wire cutting groove is generally greater than 0.2mm, and the remaining thickness of the hinge after cutting is 1.5-4 mm;
as shown in fig. 6, the first stress relief groove 411 and the second stress relief groove 412 form an S-shaped structure when viewed from the side of the flexible support tab 4, the cutting depths of the first stress relief groove 411 and the second stress relief groove 412 can be reasonably designed according to the flatness adaptation requirement of the reflector 1, and the S-shaped structure formed by the first stress relief groove 411 and the second stress relief groove 412 can also adapt to the thermal stress caused by the temperature change of the reflector mounting interface.
In another embodiment of the present invention, the assembly of the reflector 1 with the external installation surface can be realized through the through hole 44, three screws are respectively installed on the main frame structure interface of the optical system through the upper through holes 44 of the three flexible supporting ears 4, and the effective release of the screw tightening stress can be realized through the positions of the second flexible unloading groove 422 and the third flexible unloading groove 423 close to the through hole 44;
during assembly, Loctite series anaerobic thread glue can be coated on the length of the screw thread 1/3 for anti-loose treatment, and room temperature curing silicon rubber GD-414 can be coated on the end part of the screw for sealing and anti-loose.
In another embodiment of the present invention, when the first flexible unloading groove 421, the second flexible unloading groove 422, the third flexible unloading groove 423 and the fourth flexible unloading groove 424 are processed, the space of the rectangular lightening groove 43 is used for threading, so as to ensure better manufacturability when the flexible groove is cut by wire;
generally, the width of the linear cutting groove is generally larger than 0.2mm, and the residual thickness of each group of flexible hinges is 1.5-4 mm.
In a preferred embodiment of the present invention, as shown in fig. 4, a weight-reducing rectangular groove 6 is further processed on the leading-out end of the support back plate 2 in the direction close to the center of the support back plate 2, so as to facilitate the weight reduction from the back of the reflector 1 to the direction of the mirror through the through holes 44 on the flexible support lugs 4.
In another embodiment of the present invention, the metal-based reflector can be made of aluminum alloy, beryllium aluminum alloy, silicon aluminum alloy, or other metal materials that can serve as both a reflector and a support structure.
In another embodiment of the present invention, the metal reflector may be a circular coaxial reflector, or may be a metal reflector with other shapes such as a rectangle, an ellipse, etc.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.

Claims (9)

1. The flexible supporting structure of the metal reflector is characterized by comprising a reflector (1) with a fan-shaped light-weight structure (3) on the back, a circular supporting back plate (2) which is processed on the back of the reflector (1) and is provided with a leading-out end, three flexible supporting lugs (4) which are processed on the leading-out end of the supporting back plate (2), and three stress isolation grooves (5) which are correspondingly arranged between the reflector (1) and the flexible supporting lugs (4);
the three flexible supporting lugs (4) are uniformly distributed at 120 degrees, and the diameters of circles formed by connecting the centers of the through holes (44) processed in the three flexible supporting lugs (4) are larger than the diameter of the reflector (1).
2. The metal mirror flexible support structure according to claim 1, characterized in that the mirror (1) and the support backplate (2) are of one-piece construction.
3. The metal mirror flexible support structure according to claim 1, characterized in that a flexible structure group (41) for the relief of flatness stress and a flexible hinge group (42) for the relief of installation stress are provided on the flexible support ears (4); the surface, far away from the reflector (1), of the flexible support lug (4) is an installation surface, the depth direction of the groove of the flexible structure group (41) is vertical to the installation surface, and the extending direction of the groove opening of the flexible structure group (41) is parallel to the installation surface; the slotting depth direction of the flexible hinge group (42) is the same as the slotting depth direction of the flexible structure group (41), and the slotting depth direction of the flexible hinge group (42) is the same as the slotting depth direction of the flexible structure group (41).
4. The metal mirror flexible support structure according to claim 3, wherein the flexible structure group (41) comprises: a first stress unloading groove (411) and a second stress unloading groove (412), wherein the first stress unloading groove (411) and the second stress unloading groove (412) are parallel to each other, the notch of the first stress unloading groove (411) is positioned on the mounting surface of the flexible supporting lug (4), and the depth direction of the notch is perpendicular to the mounting surface of the flexible supporting lug (4); the notch of the second stress unloading groove (412) is positioned on the back surface opposite to the mounting surface, and the slotting direction of the second stress unloading groove is perpendicular to the mounting surface of the flexible supporting lug (4); the grooving depths of the first stress unloading groove (411) and the second stress unloading groove (412) are both smaller than the thickness of the flexible supporting lug (4).
5. The metal mirror flexible support structure of claim 3, wherein the flexible hinge set (42) comprises: one group of flexible hinges formed by the first flexible unloading groove (421) and the second flexible unloading groove (422), and the other group of flexible hinges formed by the third flexible unloading groove (423) and the fourth flexible unloading groove (424), wherein the two groups of flexible hinges are processed on two sides of the flexible supporting lug (4) in parallel.
6. The metal reflector flexible support structure according to claim 5, wherein the flexible support ear (4) is further provided with a rectangular lightening groove (43), so that the two sets of flexible hinges are respectively located at two sides of the rectangular lightening groove (43).
7. The metal reflector flexible support structure according to claim 1, characterized in that a weight-reducing rectangular groove (6) is further processed on the leading-out end of the support back plate (2) in the direction close to the center of the support back plate (2).
8. The metal mirror flexible support structure according to claim 1, characterized in that the mirror (1) is a circular, square or oval metal mirror.
9. The metal mirror flexible support structure according to any one of claims 1 to 8, wherein the mirror (1) is made of at least one of an aluminum alloy, a beryllium-aluminum alloy, and a silicon-aluminum alloy.
CN202011416750.9A 2020-12-07 2020-12-07 Flexible supporting structure of metal reflector Pending CN112462484A (en)

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN114935808A (en) * 2022-06-08 2022-08-23 中国科学院长春光学精密机械与物理研究所 Be applied to flexible bearing structure of speculum that back single point supported

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CN105242373A (en) * 2015-11-13 2016-01-13 长光卫星技术有限公司 Space camera reflecting mirror center support device
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CN206741071U (en) * 2017-05-09 2017-12-12 长春理工大学 A kind of flexible SiC/Al speculums having compared with heat-flash stability
CN107748427A (en) * 2017-11-16 2018-03-02 中国科学院长春光学精密机械与物理研究所 A kind of dismountable flexible support members
CN110231691A (en) * 2019-07-18 2019-09-13 长光卫星技术有限公司 A kind of intersection hinge type flexible support structure
CN110488454A (en) * 2019-09-06 2019-11-22 中国科学院长春光学精密机械与物理研究所 A kind of reflecting mirror support structure based on flexible hinge
CN110716279A (en) * 2019-11-09 2020-01-21 季华实验室 Flexible aluminum reflector
CN111045186A (en) * 2019-12-30 2020-04-21 长春奥普光电技术股份有限公司 SIC reflector with supporting reference structure
CN111308644A (en) * 2020-03-20 2020-06-19 季华实验室 Silicon carbide reflector

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Publication number Priority date Publication date Assignee Title
CN102200623A (en) * 2011-06-20 2011-09-28 北京空间机电研究所 Micro-stress assembly flexible supporting method of small-calibre micro-crystal glass material reflector
CN105242373A (en) * 2015-11-13 2016-01-13 长光卫星技术有限公司 Space camera reflecting mirror center support device
CN106291867A (en) * 2016-09-29 2017-01-04 中国科学院西安光学精密机械研究所 A kind of support integration reflecting mirror
CN206741071U (en) * 2017-05-09 2017-12-12 长春理工大学 A kind of flexible SiC/Al speculums having compared with heat-flash stability
CN107748427A (en) * 2017-11-16 2018-03-02 中国科学院长春光学精密机械与物理研究所 A kind of dismountable flexible support members
CN110231691A (en) * 2019-07-18 2019-09-13 长光卫星技术有限公司 A kind of intersection hinge type flexible support structure
CN110488454A (en) * 2019-09-06 2019-11-22 中国科学院长春光学精密机械与物理研究所 A kind of reflecting mirror support structure based on flexible hinge
CN110716279A (en) * 2019-11-09 2020-01-21 季华实验室 Flexible aluminum reflector
CN111045186A (en) * 2019-12-30 2020-04-21 长春奥普光电技术股份有限公司 SIC reflector with supporting reference structure
CN111308644A (en) * 2020-03-20 2020-06-19 季华实验室 Silicon carbide reflector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114935808A (en) * 2022-06-08 2022-08-23 中国科学院长春光学精密机械与物理研究所 Be applied to flexible bearing structure of speculum that back single point supported

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