CN112461729A - Ultra-clean room environment monitoring method and device, electronic equipment and storage medium - Google Patents
Ultra-clean room environment monitoring method and device, electronic equipment and storage medium Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
The application relates to an ultra-clean room environment monitoring method, an ultra-clean room environment monitoring device, electronic equipment and a storage medium, which belong to the technical field of environment monitoring, and the method comprises the following steps: acquiring the pressure difference of two sides of the filter; and comparing the pressure difference with a preset pressure difference, and if the pressure difference is greater than the preset pressure difference, sending a first maintenance signal to the client. The system has the effects of being convenient to maintain in time, saving energy and protecting environment.
Description
Technical Field
The present disclosure relates to the field of environmental monitoring technologies, and in particular, to a method and an apparatus for monitoring an environment in an ultra-clean room, an electronic device, and a storage medium.
Background
At present, the precision requirement of some precision manufacturing industries on production equipment is more and more strict, and besides the process level of the equipment needs to meet the production requirement, the production environment, namely an ultra-clean room, in which the equipment is located also has a strict requirement. The ultra clean room is a specially designed room for removing the pollutants such as micro-particles, harmful air, bacteria, etc. in the air within a certain space range and controlling the temperature, humidity, airflow rate, airflow distribution, and static electricity within a certain required range.
Referring to fig. 1, the environment monitoring system of the ultra-clean room includes an air inlet duct 10 and an air return duct 20, the air inlet duct 10 is communicated with the air return duct 20, the air inlet duct 10 is sequentially provided with a filter 30, a blower 40, a cold and heat control mechanism 50, a temperature sensor 60 and a humidity sensor 70, and the blower 40, the cold and heat control mechanism 50, the temperature sensor 60 and the humidity sensor 70 are all electrically connected with an environment monitoring host.
With respect to the related art among the above, the inventors consider that the following drawbacks exist: if a large amount of dust is accumulated on the filter 30, the ventilation of the air inlet pipeline 10 is affected, and the filter 30 is difficult to find and maintain in time; when the airflow rate of the air duct falls outside the required range, the environment monitoring host increases the airflow rate of the air inlet duct 10 by increasing the operating power of the blower 40, and the blower 40 operates at high power for a long time, which increases the energy consumption.
Disclosure of Invention
In order to facilitate timely maintenance of the filter, the application provides an ultra-clean room environment monitoring method and device, electronic equipment and a storage medium.
In a first aspect, the present application provides a method for monitoring an environment between ultraclean rooms, which adopts the following technical scheme:
an ultra-clean room environment monitoring method comprises the following steps:
acquiring the pressure difference of two sides of the filter;
and comparing the pressure difference with a preset pressure difference, and if the pressure difference is greater than the preset pressure difference, sending a first maintenance signal to the client.
Through adopting above-mentioned technical scheme, when having amasss more dust on the filter, lead to the ventilation variation of filter, the forced draught blower during operation, the air is difficult to follow the filter flow direction forced draught blower, leads to the wind pressure increase of filter intake side, and the wind pressure of side reduces at the filter air-out. And measuring the pressure difference between the two sides of the filter, when the pressure difference between the two sides of the filter is greater than a preset pressure difference, indicating that more dust is accumulated on the filter at the moment, maintaining the filter, and sending a first maintenance signal to the client side, so that the filter can be conveniently found and cleaned by a worker in time. Through in time maintaining the filter, reduce the condition that the forced draught blower is long-time with high-power operation, reducible power consumption, and then play energy-concerving and environment-protective effect.
Further: the acquiring of the pressure difference across the filter comprises the following steps:
acquiring first air pressure at the air inlet side of the filter and second air pressure at the air outlet side of the filter;
and comparing the first air pressure with the second air pressure to obtain a difference value between the first air pressure and the second air pressure.
Through adopting above-mentioned technical scheme, through the first wind pressure that detects filter air inlet side, the second wind pressure of filter air-out side, carry out the difference operation with two numerical values, can obtain filter both sides pressure differential.
Further: obtain the first wind pressure of filter air inlet side, obtain the second wind pressure of filter air-out side, including following step:
acquiring real-time air inlet pressure at the air inlet side of the filter, and calculating the average value of the air inlet pressure in unit time to obtain first air pressure;
and acquiring the real-time air outlet pressure of the air outlet side of the filter, and calculating the average value of the air outlet pressure in unit time to obtain a second air pressure.
By adopting the technical scheme, the accuracy of the detection of the inlet air pressure can be improved by recording the inlet air pressure of the air inlet side of the filter in unit time, and calculating the average value of the unit time according to the numerical value in the unit time; by recording the air outlet pressure of the air outlet side of the filter in unit time and calculating the average value of the unit time according to the numerical value in the unit time, the accuracy of air outlet pressure detection can be improved, and the influence of the instantaneous air pressure value on the detection result is reduced.
Further: further comprising:
acquiring an air flow value of an air outlet of a blower;
the working power of the blower comprises a first power and a second power, the second power is larger than the first power, the first power is the normal working power of the blower, the air flow value is compared with a preset flow value, if the first air flow is smaller than the preset flow value, a second maintenance signal is sent to the client, and a control signal for controlling the blower to work at the second power is sent to the blower.
By adopting the technical scheme, the preset flow value is the lower limit value of the specified range of the ultra-clean room, the air flow at the air outlet of the air feeder is detected, if the air flow is smaller than the preset flow value, the fact that more dust is accumulated on the filter and part of air is difficult to flow into the ultra-clean room results in that the air flow flowing into the ultra-clean room does not meet the standard, and then the working power of the air feeder is increased to increase the air flow at the air outlet so as to meet the standard of the air flow of the ultra-clean room. The dust on the filter influences the standard of the ultra-clean room and is cleaned, and the cleaning frequency can be reduced to a certain extent. Meanwhile, secondary detection is realized by sending a second maintenance signal, and the detection accuracy can be improved. Meanwhile, the filter is cleaned in time, the time that the air feeder works at the second power can be reduced, and the effects of energy conservation and environmental protection are achieved.
Further: obtain the air flow value of forced draught blower air outlet, include:
and acquiring the real-time air flow of the air outlet of the air feeder, and calculating the average value of the air flow in unit time to obtain an air flow value.
By adopting the technical scheme, the air flow value of the air outlet of the air feeder in unit time is recorded, and the average value of the unit time is calculated according to the numerical value in the unit time, so that the accuracy of detecting the air flow value of the air outlet of the air feeder can be improved.
Further: further comprising:
acquiring the particle content of the air outlet side of the filter;
and comparing the particle content with a preset content, and if the particle content is greater than the preset content, sending a third maintenance signal to the client.
Through adopting above-mentioned technical scheme, through the particle content value that acquires the filter air-out side, obtain the particle content of the air of filter air-out side, the particle content in the air is greater than predetermined content value, shows that the filter appears damaging, and the filter can't play the filter effect, protects the signal in order to remind the staff through sending the third, and the staff of being convenient for in time changes the filter.
In a second aspect, the present application provides an environment monitoring device between ultraclean rooms, which adopts the following technical scheme:
an ultra-clean room environment monitoring device comprises,
the pressure difference acquisition module is used for acquiring the pressure difference on two sides of the filter;
and the processing module is used for comparing the pressure difference with a preset pressure difference, and if the pressure difference is greater than the preset pressure difference, sending a first maintenance signal to the client.
Through adopting above-mentioned technical scheme, when having amasss more dust on the filter, lead to the ventilation variation of filter, the forced draught blower during operation, the air is difficult to follow the filter flow direction forced draught blower, leads to the wind pressure increase of filter intake side, and the wind pressure of side reduces at the filter air-out. And measuring the pressure difference between the two sides of the filter, when the pressure difference between the two sides of the filter is greater than a preset pressure difference, indicating that more dust is accumulated on the filter at the moment, maintaining the filter, and sending a first maintenance signal to the client side, so that the filter can be conveniently found and cleaned by a worker in time. Through in time maintaining the filter, reduce the condition that the forced draught blower is long-time with high-power operation, reducible power consumption, and then play energy-concerving and environment-protective effect.
In a third aspect, the present application provides an electronic device, which adopts the following technical solutions:
an electronic device comprising a memory and a processor, the memory having stored thereon a computer program that can be loaded by the processor and executed to perform the above-described method.
In a fourth aspect, the present application provides a computer storage medium, which adopts the following technical solutions:
a computer-readable storage medium storing a computer program that can be loaded by a processor and executes the above-mentioned method.
In summary, the present application includes at least one of the following beneficial technical effects:
1. and measuring the pressure difference between the two sides of the filter, when the pressure difference between the two sides of the filter is greater than a preset pressure difference, indicating that more dust is accumulated on the filter at the moment, maintaining the filter, and sending a first maintenance signal to the client side, so that the filter can be conveniently found and cleaned by a worker in time. Through in time maintaining the filter, reduce the condition that the forced draught blower is long-time with high-power operation, reducible power consumption, and then play energy-concerving and environment-protective effect.
2. The accuracy of the detection of the inlet air pressure can be improved by recording the inlet air pressure of the air inlet side of the filter in unit time, and calculating the average value of the unit time according to the numerical value in the unit time; by recording the air outlet pressure of the air outlet side of the filter in unit time and calculating the average value of the unit time according to the numerical value in the unit time, the accuracy of air outlet pressure detection can be improved, and the influence of the instantaneous air pressure value on the detection result is reduced.
3. The particle content of the air outlet side of the filter is obtained by obtaining the particle content value of the air outlet side of the filter, the particle content in the air is larger than a preset content value, the damage of the filter is shown, the filter cannot play a filtering role, a worker is reminded by sending a third dimension protection signal, and the worker can replace the filter in time.
Drawings
Fig. 1 is a schematic structural diagram of an environment monitoring system of an ultra clean room in the related art;
FIG. 2 is a schematic flow chart illustrating a method for monitoring an environment in an ultraclean room according to the present application;
fig. 3 is a schematic flow chart of S2 in fig. 1.
In the figure, 10, an air inlet pipeline; 20. a return air duct; 30. a filter; 40. a blower; 50. a cold and heat control mechanism; 60. a temperature sensor; 70. a humidity sensor.
Detailed Description
The present application is described in further detail below with reference to the attached drawings.
An embodiment of the present application provides an environment monitoring method for an ultra-clean room, and referring to fig. 2 and fig. 3, the environment monitoring method includes the following steps:
s1: the pressure differential across the filter is taken.
Specifically, when the air blower works, air flows to the air blower through the filter, the filter can filter dust in the air, and the dust is left on the filter. When more dust is accumulated on the filter, the blower works continuously, the air flow of the air flowing from the filter to the blower is reduced, so that the pressure of one side of the filter, which is far away from the blower, is increased, and the pressure of one side of the filter, which is close to the blower, is reduced, so that pressure difference exists between two sides of the filter, wherein the air flow refers to the air flow of a certain volume passing through the filter in unit time.
S2: and comparing the pressure difference with a preset pressure difference, and if the pressure difference is greater than the preset pressure difference, sending a first maintenance signal to the client.
Specifically, when the dust on the filter reaches the degree needing to be cleaned, the blower works at normal working power, then the pressure on the two sides of the filter is detected, the pressure difference on the two sides of the filter is calculated, the pressure difference is used as the preset pressure difference, and the preset pressure difference is stored in a memory of the monitoring host. If the air flow of the air inlet pipeline is in the range of 10cfm-30cfm according to the requirement of the ultra-clean room, the air blower works at normal working power, and the air flow of the air inlet pipeline is smaller than 10cfm due to the influence of dust on the filter, which indicates that the dust on the filter reaches the required cleaning degree.
The actual pressure difference on the two sides of the filter is detected, the preset pressure difference in the storage is called, the pressure difference is compared with the preset pressure difference, the pressure difference is larger than the preset pressure difference, and a first maintenance signal is sent to a client of a worker to remind the worker to maintain the filter in time. The client can be a mobile phone, a tablet computer, a notebook computer and the like, and when the client is the mobile phone, the monitoring host can inform workers in a short message mode, a mail mode and the like.
In this embodiment, the environment monitoring method further includes:
s3: and acquiring an air flow value of an air outlet of the air feeder.
Specifically, an air flow meter is installed at an air outlet of the air feeder, and the air flow meter sends the detected air flow to the monitoring host machine to obtain an air flow value of the air outlet of the air feeder.
S4: the working power of the blower comprises a first power and a second power, the second power is larger than the first power, the first power is the normal working power of the blower, the air flow value is compared with a preset flow value, if the first air flow is smaller than the preset flow value, a second maintenance signal is sent to the client, and a control signal for controlling the blower to work at the second power is sent to the blower.
Specifically, the air feeder is a variable frequency fan, the air feeder is connected with a frequency converter, the monitoring host sends a control signal to the frequency converter, the frequency converter controls the working frequency of the air feeder to be converted from first power to second power, and the energy consumption of the air feeder at the second power is larger than the energy consumption of the air feeder at the second power. If the air flow of the air inlet duct is in the range of 10cfm to 30cfm according to the demand of the ultra clean room, 10cfm is taken as a predetermined flow value, and the predetermined flow value is stored on the memory of the monitoring host. In a normal state, the air feeder works at a first power, and the air flow meter detects the air flow of the air outlet of the air feeder; when more dust is accumulated on the filter, the air flow of the air inlet pipeline is smaller than 10cfm, the monitoring host sends a second maintenance signal to the client of a worker, and simultaneously sends a control signal to the frequency converter, the blower works at a second power, the blower runs faster, and the air flow of the air inlet pipeline is increased, so that the air flow of the air inlet pipeline is between 10cfm and 30 cfm. The client of the staff receives the first maintenance signal and the second maintenance signal, and the detection accuracy can be improved through twice detection.
S5: and acquiring the particle content value of the air outlet side of the filter.
Specifically, a particle counter is installed on the air outlet side of the filter, and the particle counter sends detected data to a monitoring host machine to obtain a particle content value on the air outlet side of the filter.
S6: and comparing the particle content value with a preset content value, and if the particle content value is larger than the preset content value, sending a third maintenance signal to the client.
Specifically, when the filter is not damaged, the filter filters the air to reduce the content of particles in the air, detects the content value of the particles in the air at the moment, takes the content value as a preset content value, and stores the preset content value in a memory of the monitoring host. If the filter is damaged, the filter is difficult to play a filtering effect, the content of particles in the air is increased, the particle counter detects the content of the particles, the content is larger than a preset content value, a third protection signal is sent to the client to remind a worker, and the worker can replace the filter conveniently and timely.
In this embodiment, S2 further includes the following steps:
s21: the first air pressure of the air inlet side of the filter is obtained, and the second air pressure of the air outlet side of the filter is obtained.
Specifically, air in the air inlet pipeline flows to the air feeder from the filter, one side of the filter, which is far away from the air feeder, is an air inlet side, and one side of the filter, which is close to the air feeder unit, is an air outlet side. Pressure sensors are installed on two sides of the filter, the air pressure on two sides of the filter is detected through the pressure sensors, the pressure on the air inlet side is first air pressure, and the pressure on the air outlet side is second air pressure.
S22: and comparing the first air pressure with the second air pressure to obtain a difference value between the first air pressure and the second air pressure.
Specifically, a first wind pressure and a second wind pressure are detected through a pressure sensor, difference value operation is carried out on the first wind pressure and the second wind pressure, and the pressure difference between the two sides of the filter is obtained through the difference value of the first wind pressure and the second wind pressure.
The method also includes the following steps in S21: ,
s211: acquiring real-time air inlet pressure at the air inlet side of the filter, and calculating the average value of the air inlet pressure in unit time to obtain first air pressure;
s212: and acquiring the real-time air outlet pressure of the air outlet side of the filter, and calculating the average value of the air outlet pressure in unit time to obtain a second air pressure.
Specifically, the wind pressure of both sides of the filter is detected through the pressure sensor, the internal pressure data in unit time is recorded, the average value of the pressure data in unit time is calculated, the average value is used as the first wind pressure or the second wind pressure, then the first wind pressure and the second wind pressure are compared, the influence of the wind pressure caused by instantaneous change can be reduced, and the precision can be improved.
In this embodiment, S3 further includes the following steps:
s31: and acquiring the real-time air flow of the air outlet of the air feeder, and calculating the average value of the air flow in unit time to obtain an air flow value.
Specifically, the air flow of the air outlet of the air feeder is detected through the air flow meter, the air flow in unit time is recorded, the average value of the air flow in unit time is calculated, the average value is used as an actual air flow value, and the air flow value is compared with a preset flow value, so that errors caused by instantaneous variation of air pressure can be reduced, and the accuracy is improved.
The embodiment of the application also discloses an environment monitoring device between ultra-clean, include:
the pressure difference acquisition module is used for acquiring the pressure difference on two sides of the filter;
and the processing module is used for comparing the pressure difference with a preset pressure difference, and if the pressure difference is greater than the preset pressure difference, sending a first maintenance signal to the client.
The embodiment of the application also discloses an electronic device, which comprises a memory and a processor, wherein the memory stores a computer program which can be loaded and executed by the processor, and the processor executes the computer program to realize the following steps:
s1: the pressure differential across the filter is taken.
S2: and comparing the pressure difference with a preset pressure difference, and if the pressure difference is greater than the preset pressure difference, sending a first maintenance signal to the client.
S3: and acquiring an air flow value of an air outlet of the air feeder.
S4: the working power of the blower comprises a first power and a second power, the second power is larger than the first power, the first power is the normal working power of the blower, the air flow value is compared with a preset flow value, if the first air flow is smaller than the preset flow value, a second maintenance signal is sent to the client, and a control signal for controlling the blower to work at the second power is sent to the blower.
S5: and acquiring the particle content value of the air outlet side of the filter.
S6: and comparing the particle content value with a preset content value, and if the particle content value is larger than the preset content value, sending a third maintenance signal to the client.
Wherein, in step S2, the method further includes:
s21: the first air pressure of the air inlet side of the filter is obtained, and the second air pressure of the air outlet side of the filter is obtained.
S211: the real-time air inlet pressure of the air inlet side of the filter is obtained, and the average value of the air inlet pressure in unit time is calculated to obtain first air pressure.
S212: and acquiring the real-time air outlet pressure of the air outlet side of the filter, and calculating the average value of the air outlet pressure in unit time to obtain a second air pressure.
S22: and comparing the first air pressure with the second air pressure to obtain a difference value between the first air pressure and the second air pressure.
Wherein, in step S3, the method further includes:
s31: and acquiring the real-time air flow of the air outlet of the air feeder, and calculating the average value of the air flow in unit time to obtain an air flow value.
The embodiment of the application also discloses a computer readable storage medium which stores a computer program capable of being loaded by a processor and executing the method. The computer-readable storage medium includes, for example: various media capable of storing program codes, such as a usb disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk, or an optical disk.
It will be apparent to those skilled in the art that, for convenience and brevity of description, only the above-mentioned division of the functional units and modules is illustrated, and in practical applications, the above-mentioned function distribution may be performed by different functional units and modules according to needs, that is, the internal structure of the apparatus is divided into different functional units or modules, so as to perform all or part of the functions described above.
Claims (9)
1. An ultra-clean room environment monitoring method is characterized by comprising the following steps:
acquiring the pressure difference of two sides of the filter;
and comparing the pressure difference with a preset pressure difference, and if the pressure difference is greater than the preset pressure difference, sending a first maintenance signal to the client.
2. The method for monitoring the environment between the ultra-clean rooms according to claim 1, wherein the step of obtaining the pressure difference between the two sides of the filter comprises the following steps:
acquiring first air pressure at the air inlet side of the filter and second air pressure at the air outlet side of the filter;
and comparing the first air pressure with the second air pressure to obtain a difference value between the first air pressure and the second air pressure.
3. The method for monitoring the environment of the ultra-clean room as claimed in claim 2, wherein the step of obtaining the first wind pressure at the air inlet side of the filter and the second wind pressure at the air outlet side of the filter comprises the steps of:
acquiring real-time air inlet pressure at the air inlet side of the filter, and calculating the average value of the air inlet pressure in unit time to obtain first air pressure;
and acquiring the real-time air outlet pressure of the air outlet side of the filter, and calculating the average value of the air outlet pressure in unit time to obtain a second air pressure.
4. The method for monitoring the environment between ultraclean rooms according to claim 1, further comprising:
acquiring an air flow value of an air outlet of a blower;
the working power of the blower comprises a first power and a second power, the second power is larger than the first power, the first power is the normal working power of the blower, the air flow value is compared with a preset flow value, if the first air flow is smaller than the preset flow value, a second maintenance signal is sent to the client, and a control signal for controlling the blower to work at the second power is sent to the blower.
5. The method for monitoring the environment between the ultra-clean rooms according to claim 4, wherein the obtaining the air flow value of the air outlet of the blower comprises:
and acquiring the real-time air flow of the air outlet of the air feeder, and calculating the average value of the air flow in unit time to obtain an air flow value.
6. The method for monitoring the environment between ultraclean rooms according to claim 1, further comprising:
acquiring the particle content of the air outlet side of the filter;
and comparing the particle content with a preset content, and if the particle content is greater than the preset content, sending a third maintenance signal to the client.
7. An environment monitoring device between ultra-clean room, its characterized in that includes:
the pressure difference acquisition module is used for acquiring the pressure difference on two sides of the filter;
and the processing module is used for comparing the pressure difference with a preset pressure difference, and if the pressure difference is greater than the preset pressure difference, sending a first maintenance signal to the client.
8. An electronic device comprising a memory and a processor, the memory having stored thereon a computer program that can be loaded by the processor and that executes the method according to any of claims 1 to 6.
9. A computer-readable storage medium, in which a computer program is stored which can be loaded by a processor and which executes the method of any one of claims 1 to 6.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116479531A (en) * | 2023-04-25 | 2023-07-25 | 通威微电子有限公司 | Ultra-clean workbench for sticking silicon carbide seed crystals |
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