CN112461183A - Evaluation method for dynamic characteristics of scanning probe for three-dimensional thread measuring machine - Google Patents
Evaluation method for dynamic characteristics of scanning probe for three-dimensional thread measuring machine Download PDFInfo
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- CN112461183A CN112461183A CN202011243230.2A CN202011243230A CN112461183A CN 112461183 A CN112461183 A CN 112461183A CN 202011243230 A CN202011243230 A CN 202011243230A CN 112461183 A CN112461183 A CN 112461183A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
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Abstract
The invention relates to the field of scanning measuring heads for three-dimensional thread measuring machines, and discloses an evaluation method for the dynamic characteristics of a scanning measuring head for a thread measuring machine, which comprises the following steps: (1) installing a grating ruler module with resolution less than or equal to 10nm at an internal elastic guide mechanism of a scanning measuring head for a thread measuring machine; (2) mounting a scanning measuring head on a thread measuring machine to enable a measuring end to be in a free state; (3) knocking the measuring end of the measuring head by using a force hammer; (4) and reading and calculating the natural frequency of the scanning measuring head for the three-dimensional thread measuring machine through the data measured by the grating ruler. The method solves the problems of complexity and inaccuracy of the traditional theoretical calculation method by reading and calculating the vibration reference curve in the evaluation process, simplifies the traditional evaluation method of the dynamic characteristics of the measuring head by combining the characteristics of the scanning measuring head internal elastic mechanism for the thread measuring machine in the evaluation process, is simple to operate and improves the measuring efficiency.
Description
Technical Field
The invention relates to the technical field of scanning measuring heads, in particular to an evaluation method for the dynamic characteristics of a scanning measuring head for a three-dimensional thread measuring machine.
Background
In the thread measuring industry, two-dimensional measuring technologies such as a universal tool microscope based on an image method for measuring basic parameters of threads, a laser triangulation method for measuring the cross section profile of a thread shaft and then calculating thread parameters, a three-coordinate measuring method, a contact pin scanning type contourgraph method and the like cannot embody the real three-dimensional characteristics of the threads, and the urgent requirement of advanced manufacturing fields such as petroleum, aerospace, nuclear power, automobiles and the like on comprehensive measurement of geometrical parameters of precise threads cannot be met.
The improvement of the measurement accuracy can be realized from the aspects of structural or principle design, error compensation and characteristic research. The design of the three-dimensional measurement contact type measuring head is diversified, the measuring head and a coordinate machine are comprehensively compensated and calibrated, and in recent years, a dynamic error compensation model is established by using a neural network. The measurement precision can be improved to a certain extent in the two aspects, and the current measuring head can achieve a good effect in the aspect of static characteristics in characteristic research, but the influence of multiple factors is comprehensive in dynamic measurement, and the research needs to be carried out on the measuring head. The natural frequency, the vibration mode and the like of the scanning probe for the thread measuring machine are important parameters for describing dynamic characteristics, and have important significance for evaluation and analysis of the parameters. Generally speaking, the frequency range of the natural frequency of the system can be estimated through theoretical and numerical calculation, but is time-consuming and inaccurate, and in recent years, ANSYS finite element software replaces a complex calculation method, but parameter setting needs to be carried out on each part after modeling, and the method is time-consuming. Two types of methods are generally used to measure the natural frequency of a system: free vibration methods and forced vibration methods. The forced vibration method is essentially to use the characteristic of resonance to measure the natural frequency of the probe system, namely the frequency at resonance is the natural frequency of the system, but when the contact scanning probe measures near the natural frequency, the resonance is not obvious. The free vibration method is divided into an initial displacement method and a knocking method, but an oscilloscope is needed to record waveforms, the attenuation coefficient of the system is also tested, and the natural frequency of the measuring head system can be obtained through calculation.
In summary, the evaluation and measurement of the dynamic characteristics of the natural frequency of the conventional system are complicated, and have high requirements on measurement conditions, so that a convenient and simple evaluation method for the scanning probe of the three-dimensional thread measuring machine is urgently needed.
Disclosure of Invention
The invention provides an evaluation method of the dynamic characteristic of a scanning measuring head for a thread measuring machine, aiming at the defects of the dynamic characteristic measuring method of the scanning measuring head of the existing three-dimensional thread measuring machine.
1. The object of the invention is achieved by the following measures: a method for evaluating the dynamic characteristics of a scanning probe for a thread measuring machine comprises the following steps:
(1) a grating ruler module (1-1) with resolution less than or equal to 10nm is arranged at an internal elastic guide mechanism of a scanning measuring head for a thread measuring machine;
(2) mounting a scanning measuring head on a thread measuring machine to enable a measuring end to be in a free state;
(3) knocking the measuring end (1-2) of the measuring head with 10-60 mN by using a force hammer;
(4) obtaining the natural frequency omega of the scanning measuring head for the thread measuring machine through the data measured by the grating ruler1The method comprises the following specific steps:
acquiring raster data, wherein the data is relative displacement digital quantity related to time, and every two data are separated by n milliseconds;
secondly, a time-displacement reference curve is manufactured according to the measured data;
calculating average time difference between (2-11) th peak values in reference curve
The natural frequency ω is calculated as follows1：
In the formula, ω1The natural frequency of the probe system is Δ t, which is the vibration attenuation period.
(5) Method for solving natural frequency omega by utilizing vibration experiment and theoretical calculation method2、ω3The method comprises the following specific steps:
firstly, after obtaining the measured data, calculating the solid by the following formulaHaving a frequency omega2：
Wherein n is the attenuation coefficient, fdIs the frequency of vibration, xi、xi+1The amplitudes in the i-th and i + 1-th periods are shown, and i is the number of periods.
Drawing a three-dimensional drawing of the measuring head system by using a drawing tool, introducing the drawing tool into an ANSYS software workbench module, setting a reference actual material for the material, and performing modal analysis to obtain the natural frequency omega3。
(6) Comparing natural frequencies omega1、ω2、ω3If | ω is large1-ω2︱≤︱ω2-ω3| ω required in step (4)1Namely, the evaluation parameter value of the dynamic characteristic of the measuring head can be used.
The invention at least comprises the following beneficial effects:
(1) the method replaces the traditional calculation method of the dynamic characteristics of the measuring head system, the traditional method is complicated, the error of the result is large, and the method is simple and the result is accurate.
(2) The invention uses the scanning probe internal elastic mechanism for the thread measuring machine to measure the natural frequency, can reduce the measuring error by 7.2 percent and improve the measuring efficiency.
(3) Compared with the traditional method, the calculation method is easier, the measuring tool is easy to obtain, and the measuring cost is low.
Drawings
FIG. 1 is a schematic view of the installation of a grating scale module of a measuring head, wherein 1-1 is the grating scale module, and 1-2 is a measuring end which is in direct contact measurement with a measured thread;
fig. 2 is a time-displacement reference graph of the stylus, wherein the abscissa is the sampling time point, every two data intervals are 5 milliseconds, and the ordinate is the displacement amount of the stylus, i.e., the oscillation amplitude.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below.
Example 1
A method for evaluating the dynamic characteristics of a scanning probe for a thread measuring machine comprises the following steps:
(1) a grating ruler module with resolution less than or equal to 10nm is installed at an internal elastic guide mechanism of a scanning measuring head for a thread measuring machine, as shown in figure 1;
(2) mounting a scanning measuring head on a thread measuring machine to enable a measuring end to be in a free state;
(3) knocking the measuring end of the measuring head with 40mN by using a force hammer;
(4) obtaining the natural frequency omega of the scanning measuring head for the thread measuring machine through the data measured by the grating ruler1The method comprises the following specific steps:
acquiring raster data, wherein the data is relative displacement digital quantity related to time, and every two data are separated by 5 milliseconds;
secondly, a time-displacement reference curve is manufactured according to the measured data, as shown in figure 2;
calculating the average time difference between the (2) th peak and the (11) th peak in the reference curve of fig. 1 to obtain that delta t is 35ms, and calculating the natural frequency omega according to the following formula1：
In the formula, ω is the natural frequency of the probe system, and Δ t is the vibration damping period.
(5) Method for calculating natural frequency omega by using traditional experiment and traditional theory2、ω3：
Firstly, the natural frequency omega is obtained by calculation according to the traditional experiment2：
Wherein n is the attenuation coefficient, fdIs the frequency of vibration, xi、xi+1The amplitude is in the i, i +1 th cycle, i is the cycle number.
② the natural frequency omega is obtained by traditional experiment calculation3Drawing a three-dimensional graph by using a drawing tool for the measuring head system, importing the three-dimensional graph into an ANSYS software workbench module, and setting reference actual materials for the materials as shown in table 1:
TABLE 1 stylus Material parameters
After the parameters are set, modal analysis is carried out, and the natural frequency omega of the elastic mechanism can be known according to the vibration mode3Is 193.91 Hz.
(7) Comparing natural frequencies omega1、ω1、ω3| ω1-ω2︱＝0.02Hz< ︱ω2-ω3If | 14.39Hz, 179.5Hz can be used as the parameter value for evaluating the dynamic characteristics of the stylus.
According to the implementation experiment result, the characteristics of the scanning probe internal elastic mechanism for the thread measuring machine are utilized, data are directly read in the measured data graph, the method is simple, the measuring result is more accurate than that of the traditional theoretical calculation method and the simulation method, and the measuring efficiency is greatly improved.
The method changes the traditional evaluation method of dynamic characteristics, so that the method is simpler and clearer, the measurement efficiency is improved, and the cost of a measurement tool is low. Those skilled in the art to which the present invention pertains can also make appropriate alterations and modifications to the above-described embodiments. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and some modifications and variations of the present invention should fall within the scope of the claims of the present invention. Furthermore, although specific terms are employed herein, they are used in a generic and descriptive sense only and not for purposes of limitation.
Claims (1)
1. A method for evaluating the dynamic characteristics of a scanning probe for a three-dimensional thread measuring machine is characterized by comprising the following steps:
(1) a grating ruler module (1-1) with resolution less than or equal to 10nm is arranged at an internal elastic guide mechanism of a scanning measuring head for a thread measuring machine;
(2) mounting a scanning measuring head on a thread measuring machine to enable a measuring end to be in a free state;
(3) knocking the measuring end (1-2) of the measuring head with 10-60 mN by using a force hammer;
(4) obtaining the natural frequency omega of the scanning measuring head for the thread measuring machine through the data measured by the grating ruler1The method comprises the following specific steps:
acquiring raster data, wherein the data is relative displacement digital quantity related to time, and every two data are separated by n milliseconds;
secondly, a time-displacement reference curve is manufactured according to the measured data;
calculating average time difference between (2-11) th peak values in reference curve
The natural frequency ω is calculated as follows1：
In the formula, ω1The natural frequency of the probe system is Δ t, which is the vibration attenuation period.
(5) Using vibration experiments and theoryCalculation method for obtaining natural frequency omega2、ω3The method comprises the following specific steps:
firstly, obtaining measured data and then calculating the natural frequency omega by using the following formula2：
Wherein n is the attenuation coefficient, fdIs the frequency of vibration, xi、xi+1The amplitudes in the i-th and i + 1-th periods are shown, and i is the number of periods.
Drawing a three-dimensional drawing of the measuring head system by using a drawing tool, introducing the drawing tool into an ANSYS software workbench module, setting a reference actual material for the material, and performing modal analysis to obtain the natural frequency omega3。
(6) Comparing natural frequencies omega1、ω2、ω3If | ω is large1-ω2︱≤︱ω2-ω3| ω required in step (4)1Namely, the evaluation parameter value of the dynamic characteristic of the measuring head can be used.
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| CN107782547A (en) * | 2017-10-20 | 2018-03-09 | 广东电网有限责任公司电力科学研究院 | The modal analysis method and device of a kind of transmission belt |
| CN109269745A (en) * | 2018-10-30 | 2019-01-25 | 湖南科技大学 | Large-scale bucket wheel machine cantilever low-frequency vibration test method based on carrying roller excitation method |
| CN209387125U (en) * | 2019-03-05 | 2019-09-13 | 重庆克来智能科技有限公司 | A kind of detection lathe and its device for detecting part intrinsic frequency |
-
2020
- 2020-11-10 CN CN202011243230.2A patent/CN112461183A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003106916A (en) * | 2001-10-02 | 2003-04-09 | Murata Mach Ltd | Tensile force detector |
| CN102998081A (en) * | 2012-12-17 | 2013-03-27 | 黑龙江省博凯科技开发有限公司 | Method for performing bridge monitoring by using multiple strapdown inertial systems |
| CN107782547A (en) * | 2017-10-20 | 2018-03-09 | 广东电网有限责任公司电力科学研究院 | The modal analysis method and device of a kind of transmission belt |
| CN109269745A (en) * | 2018-10-30 | 2019-01-25 | 湖南科技大学 | Large-scale bucket wheel machine cantilever low-frequency vibration test method based on carrying roller excitation method |
| CN209387125U (en) * | 2019-03-05 | 2019-09-13 | 重庆克来智能科技有限公司 | A kind of detection lathe and its device for detecting part intrinsic frequency |
Non-Patent Citations (1)
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| 刘向阳: "《变刚度悬丝支撑微纳测头的结构参数优化与动态特性分析》", 《科学技术与工程》 * |
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