CN112435976A - Ultralow flow resistance micro-channel radiator based on bionic fractal structure and manufacturing method thereof - Google Patents
Ultralow flow resistance micro-channel radiator based on bionic fractal structure and manufacturing method thereof Download PDFInfo
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- 230000017525 heat dissipation Effects 0.000 claims abstract description 49
- 238000005516 engineering process Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 7
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2029—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
- H05K7/20336—Heat pipes, e.g. wicks or capillary pumps
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D10/00—Energy efficient computing, e.g. low power processors, power management or thermal management
Abstract
The ultra-low flow resistance micro-channel radiator based on the bionic fractal structure and the manufacturing method thereof comprise a radiating cover plate, a partition plate and a liquid supply bottom plate which are arranged from top to bottom, wherein the radiating cover plate, the partition plate and the liquid supply bottom plate are all bonded and sealed; the heat dissipation cover plate is provided with a working medium inlet hole, a plurality of bionic fractal micro-channel channels and an annular working medium gathering groove, the annular working medium gathering groove is positioned at the periphery of the micro-channel, one end of each bionic fractal micro-channel is connected with the micro-channel inlet hole, and the other end of each bionic fractal micro-channel is connected with the annular working medium gathering groove; the partition board is provided with a liquid supply hole and a liquid discharge hole, the liquid supply hole corresponds to the inlet hole of the micro-channel on the heat dissipation bottom plate, and the liquid discharge hole is symmetrically positioned at two sides of the liquid supply hole and connected with the annular working medium collecting groove. The multi-stage branch microchannel network structure imitates a natural high-efficiency low-resistance substance transportation network, an inlet section pressure recovery effect exists at each branch, and compared with the traditional linear and serpentine microchannels, the multi-stage branch microchannel network structure has lower flowing pressure loss and pumping power consumption.
Description
Technical Field
The invention belongs to a heat dissipation technology of a micro-channel with ultrahigh heat flow density, relates to a high-efficiency low-resistance cooling technology suitable for a microelectronic device with ultrahigh heat flow density, and particularly relates to an ultralow flow resistance micro-channel heat radiator based on a bionic fractal structure and a manufacturing method thereof.
Background
At present, electronic components are developing towards integration, high frequency and function complication, and along with the reduction of chip characteristic size and the improvement of power, the problem of heat generation gradually becomes the main bottleneck limiting the performance improvement. The average heat flux density of the normal work of the power device exceeds 1kW/cm2The local hot spot heat flux density may exceed 20kW/cm2. Generally, the working temperature of a silicon-based chip is below 85 ℃, the working temperature of a GaN chip is below 175 ℃, and if the heat productivity of the chip cannot be derived in time, the temperature of the working environment can be continuously increased, thereby seriously affecting the working performance and the service life of the chip. The research result shows that the performance of the chip is reduced by 50% when the temperature of the chip is increased by 10 ℃. Therefore, how to efficiently conduct heat in a limited space becomes a key to solve the problem of chip thermal management.
The micro-channel liquid cooling heat dissipation technology has the remarkable advantages of high heat exchange coefficient, compact structure, capability of realizing embedded integration and the like, and is the optimal choice for heat dissipation of the conventional ultrahigh heat flow density electronic device. However, because the characteristic dimension of the microchannel is in the micrometer level, the influence of the wall roughness of the channel on the flow resistance cannot be ignored, the flow resistance and the pressure drop are increased rapidly along with the increase of the flow velocity, the power consumption of the driving fluid is also increased greatly, and the large-scale application of the microchannel heat dissipation technology is greatly limited. Therefore, how to reduce the flow resistance while maintaining the high heat exchange efficiency of the microchannel radiator becomes the focus of research on the microchannel liquid cooling heat dissipation technology. The chip heat dissipation technology not only needs to remove heat in time, but also can ensure the temperature uniformity of the chip surface. The closer the heat exchange working medium in the traditional linear or snake-shaped microchannel is to the outlet, the smaller the temperature difference between the heat exchange working medium and a heat source is, the worse the heat exchange effect is, and the extremely uneven temperature distribution on the surface of the chip is caused. Because the chip is a multilayer structure formed by connecting various materials through bonding, welding and other processes, the thermal expansion coefficient difference exists among different materials, and the thermal stress generated by uneven temperature has great influence on the reliability and the service life of the chip. In particular, the thermal stress problem is particularly severe for high power, large size chips.
Disclosure of Invention
Aiming at the problems of large flow resistance and uneven surface temperature distribution of the conventional micro-channel liquid cooling heat exchanger, the ultra-low flow resistance micro-channel radiator based on the bionic fractal structure and the manufacturing method thereof are provided.
In order to achieve the purpose, the invention adopts the following technical scheme:
the ultralow flow resistance microchannel radiator based on the bionic fractal structure comprises a radiating cover plate, a partition plate and a liquid supply bottom plate which are arranged from top to bottom, wherein the radiating cover plate, the partition plate and the liquid supply bottom plate are sealed by adopting a bonding technology;
a microchannel inlet hole, an annular working medium gathering groove and a bionic fractal micro-channel are processed on the heat dissipation cover plate, and n bionic fractal micro-channels are annularly arranged along the circle center of the microchannel inlet hole;
each bionic fractal microchannel comprises a plurality of same bionic fractal microchannel clusters, each bionic fractal microchannel cluster comprises m-level channels which are respectively 0 th, 1 st, 2 … … th and (m-1) th level channels, wherein the 0 th level channel is communicated with a microchannel inlet hole, and the m-1 th level channel is connected with an annular working medium collecting groove;
a liquid supply hole is formed in the center of the partition plate, the liquid supply hole is located right below the inlet hole of the micro-channel, liquid discharge holes are symmetrically formed in the two sides of the liquid supply hole, and the liquid discharge holes are located right below the annular working medium collecting groove;
the liquid supply bottom plate is provided with a working medium inlet, a liquid supply micro-channel, a liquid discharge micro-channel, a liquid collection area and a working medium outlet; the working medium inlet and the working medium outlet are respectively positioned at two ends of the liquid supply bottom plate; the working medium inlet is communicated with the liquid supply micro-channel, and the working medium outlet is communicated with the liquid collecting area; the tail end of the liquid supply micro-channel is positioned right below the liquid supply hole on the partition plate; one end of the liquid drainage micro-channel is positioned right below the liquid drainage hole on the partition plate, and the other end of the liquid drainage micro-channel is connected with the liquid collection area.
The invention has the further improvement that the whole of the n bionic fractal micro-channels is circular; the diameter Da of the circle is 20-40 mm; diameter D of inlet hole of microchannelb＝βDaThe value range of beta is 5-10%.
The invention has the further improvement that n is 10-20; m is 4 to 7.
The invention has the further improvement that arc transition is adopted between the working medium inlet and the liquid supply micro-channel, between the liquid discharge micro-channel and the liquid collecting area and between the liquid collecting area and the working medium outlet;
the quantity of outage is 2, and flowing back microchannel is the V font, and V font upper portion both ends are located two outage respectively under, and the bottom is connected with the collecting space.
The invention is further improved in that the number of microchannels from the microchannel inlet holes to the annular working medium collecting groove is 2xThe power is increased in a geometric series step by step, wherein x is a positive integer.
The invention has the further improvement that each level of channel except the 0 th level channel of the bionic fractal micro-channel consists of two sections, namely a channel ka pointing to the circle center and a channel kb connecting the tail end of the channel ka and the initial end of the channel (k +1) a together; design length L of k-th channelkThe length of channel ka plus the projected length of channel kb on radius R satisfies: l isk+1＝Lk×2-1/DAnd
wherein L iskDenotes the design length, L, of the kth channelk+1The design length of a k +1 th-level channel is shown, the length fractal dimension D is 2-3, and the actual length L of the k-th-level channelksThe length of the channel ka plus the length of the channel kb satisfies
Wherein alpha iskIs the angle between two adjacent ka channels, alphak＝2π(n×2k) Theta is a bifurcation angle between two adjacent kb channels, the bifurcation angle theta between any two kb channels is equal, and the numeric area of theta is 20-150 degrees.
The invention is further improved in that the hydraulic diameter d of each stage of the channelkSatisfy dk+1＝dk×2-1/ΔAnd
wherein d iskDenotes the hydraulic diameter of the k-th stage channel, dk+1The hydraulic diameter of a k +1 th channel is shown, delta represents the hydraulic diameter fractal dimension, and is 2-3, wkDenotes the width of the k-th channel and the 0-th channel as w0＝πDbN, the width of the last branch satisfies wm-1＜2πR/(2m×n)。
The invention has the further improvement that the height h of each stage of channel is equal, and h is 100-300 mu m; the diameter B of the annular working medium gathering groove is 26-50 mm, the length C of the working medium inlet is 5-15 mm, and the length E of the working medium outlet is 5-15 mm; thickness H of heat dissipation cover plate10.5-2 mm, and the thickness H of the separator20.5-1.5 mm thick liquid supply bottom plate H3＝1～2mm；
The heights of the bionic fractal microchannel and the annular working medium collecting groove are both h equal to 100-300 mu m, and the diameters of the inlet hole and the liquid supply hole of the microchannel are both Db＝1～4mm，
The invention is further improved in that the diameters of the arcs at the two ends above the two liquid discharge holes 2-2 and the V-shaped liquid discharge micro-channel 3-3 are S2The diameter S of the arc-shaped tail end of the liquid supply micro-channel 3-2 is 6-10 mm11.5-4.5 mm; the heat dissipation cover plate and the liquid supply bottom plate are made of silicon, silicon carbide, aluminum, copper or stainless steel, and the partition plate is made of poly N, N-dimethylacrylamide, quartz glass aluminum or copper.
The invention is further improved in that during work, working medium enters the radiator from a working medium inlet on the liquid supply bottom plate and enters a liquid supply hole on the partition plate through the liquid supply micro-channel, the working medium enters a micro-channel inlet hole on the heat dissipation cover plate through the liquid supply hole and flows through the bionic fractal micro-through micro-channel to cool the heating electronic element, the working medium is gradually diffused to enter an annular working medium collecting groove after heat dissipation is completed, and the working medium is collected in a liquid collecting area on the liquid supply bottom plate and discharged out of the radiator through a working medium outlet after sequentially passing through a liquid discharge hole on the partition plate and a liquid discharge micro-channel on the liquid.
A manufacturing method of the above ultra-low flow resistance micro-channel radiator based on the bionic fractal structure comprises the following steps:
the method comprises the following steps: designing structural patterns on the heat dissipation cover plate, the partition plate and the liquid supply bottom plate;
step two: manufacturing a mask plate according to the structure of the bionic fractal micro-channel obtained by design;
step three: spin-coating photoresist on the surface of the heat dissipation cover plate, shielding by using a mask plate, transferring the mask pattern of the mask plate obtained in the step two to the surface of the heat dissipation cover plate, and finally adopting a deep reactive ion etching technology to finish the preparation of the micro-channels with the same height;
step four: on the partition board, a liquid supply hole and a liquid discharge hole are processed by using a precision processing technology, and both the liquid supply hole and the liquid discharge hole penetrate through the partition board;
step five: processing a working medium inlet, a liquid supply micro-channel, a liquid discharge micro-channel, a liquid collection area and a working medium outlet on the liquid supply bottom plate by using a dry etching technology;
step six: and bonding and sealing the heat dissipation cover plate, the partition plate and the liquid supply bottom plate by adopting an anodic bonding process.
Compared with the prior art, the invention has the following beneficial effects:
the multi-stage branch microchannel network structure provided by the invention imitates a high-efficiency low-resistance substance transportation network in nature such as a mammal blood circulation network, a lung trachea tree, veins and the like, an inlet section pressure recovery effect exists at each branch, and compared with the traditional linear and serpentine microchannels, the multi-stage branch microchannel network structure has lower flowing pressure loss and pumping power consumption.
The multi-stage bifurcation micro-channel network structure has the self-similarity and symmetry of fractal graphs, and the flow in each stage of branch channel is uniformly distributed; meanwhile, the working medium inlet is positioned in the middle of the micro-channel and corresponds to the most frequently-occurring position of a chip hot spot, the temperature difference of the surface is small, the temperature uniformity is good, the thermal stress is reduced, the working stability of an electronic device is improved, and the service life of the electronic device is prolonged.
The micro-channel network structure has a clear mathematical model, bionic fractal micro-channels with different structure sizes can be formed by adjusting parameters such as a bifurcation angle theta, a height h, a hydraulic diameter fractal dimension delta, a length fractal dimension D and the like, and heat exchange requirements under different conditions can be met.
Drawings
Fig. 1 is an overall structural view of the ultra-low flow resistance microchannel heat sink of the present invention, wherein (a) is an assembly view (in which the heat sink cover plate 1 is placed in an opposite direction for convenience of illustration), and (b) is an expanded view of the structure of fig. (a).
FIG. 2 is a schematic diagram of the structure of the ultra-low flow resistance microchannel heat sink of the present invention. Wherein (a) is a top view of the ultra-low flow resistance microchannel heat sink of the present invention, and (b) is a cross-sectional view of the ultra-low flow resistance microchannel heat sink taken along the direction a-a in the drawing (a).
FIG. 3 is a top view of an ultra-low flow resistance microchannel heat sink of the present invention.
FIG. 4 is a schematic diagram of a bionic fractal micro-channel cluster structure of the ultra-low flow resistance micro-channel radiator of the present invention.
FIG. 5 is a top view of a spacer plate of the ultra-low flow resistance microchannel heat sink of the present invention.
FIG. 6 is a top view of a liquid supply backplane of an ultra low flow resistance microchannel heat sink of the present invention.
Wherein, 1, a heat dissipation cover plate; 1-1, a bionic fractal micro-channel; 1-2, microchannel inlet holes; 1-3, an annular working medium collecting groove; 2. a partition plate; 2-1, a liquid supply hole; 2-2, liquid discharging holes; 3. a liquid supply bottom plate; 3-1, a working medium inlet; 3-2, a liquid supply micro-channel; 3-3, a liquid drainage micro-channel; 3-4, a liquid collecting area; 3-5 and a working medium outlet.
Detailed Description
The present invention is described in further detail below with reference to the accompanying drawings.
The blood circulation network, the pulmonary airway tree, the veins and the like of mammals in the nature gradually evolve into a high-efficiency and low-resistance substance transport network through millions of years of evolution. In the 80 s of the 19 th century, Mandelbrot deeply studied the structure, and found that a high-efficiency low-resistance substance transport network in the nature has a multi-level bifurcation phenomenon and conforms to fractal characteristics. Compared with a linear or snake-shaped flow channel, the bionic fractal flow channel conforms to the flow strategy that the flow resistance of fluid transferred from a point to a surface is minimum, and a new thought is provided for the high-efficiency low-resistance microchannel radiator.
The bionic fractal micro-channel radiator with the multi-stage branched flow channel structure is designed by imitating a high-efficiency low-resistance substance transport network in the natural world such as a mammal blood circulation network, a lung trachea tree, veins and the like, has the advantages of high heat exchange coefficient, low flow resistance, excellent temperature uniformity and the like, can reduce the thermal stress in a chip, and improves the service life and the stability.
Referring to (a) and (b) in fig. 1, the ultralow flow resistance microchannel radiator based on the bionic fractal structure comprises a radiating cover plate 1, a partition plate 2 and a liquid supply bottom plate 3 which are arranged from top to bottom, wherein the radiating cover plate 1, the partition plate 2 and the liquid supply bottom plate 3 are all bonded and sealed.
The heat dissipation cover plate is provided with a working medium inlet hole, a plurality of bionic fractal micro-channel channels and an annular working medium gathering groove, wherein the micro-channel inlet hole is positioned in the center of the heat dissipation base plate, the annular working medium gathering groove is positioned on the periphery of the micro-channel, one end of each bionic fractal micro-channel is connected with the micro-channel inlet hole, and the other end of each bionic fractal micro-channel is connected with the annular working medium gathering groove; the partition board is provided with a liquid supply hole and two liquid discharge holes, the liquid supply hole corresponds to the inlet hole of the micro-channel on the heat dissipation bottom plate, and the two liquid discharge holes are symmetrically positioned at two sides of the liquid supply hole and are connected with the annular working medium collecting groove; the liquid supply bottom plate is provided with a working medium inlet, a working medium outlet, a liquid supply micro-channel and a liquid discharge micro-channel, the working medium inlet is arranged at one end of the liquid supply bottom plate, the working medium outlet is arranged at the other end of the liquid supply bottom plate, the working medium inlet is connected with the liquid supply micro-channel, the tail end of the liquid supply micro-channel is positioned below the liquid supply holes of the partition plates, the working medium outlet is connected with the liquid collection area, the liquid discharge micro-channel is V-shaped, two ends above the V-shaped are respectively positioned below the liquid discharge holes of the two partition plates, and one end of the lower part.
Specifically, referring to fig. 3 and 4, a fractal micro-channel 1-1 is arranged on a heat-dissipating cover plate 1, and the fractal micro-channel is circular in shape and has a diameter Da(radius R)a) The fractal micro-channel cluster is 20-40 mm, and comprises a plurality of same fractal micro-channel clusters, wherein each fractal micro-channel cluster comprises multiple branches which are named as 0 th, 1 st, 2 nd 2 … …, (m-1) th fractions from 0The 0 th-stage branch is communicated with a micro-channel inlet hole 1-2, the m-1 th-stage branch is connected with an annular working medium gathering groove 1-3, the total number m of the branches is 4-7, and the design length of each stage of channel is recorded as LkWidth of wkAnd k is 0, 1, 2 … … (m-1). And (3) circularly arraying n bionic fractal micro-channel clusters along the circle center of the micro-channel inlet hole 1-2 to obtain a complete bionic fractal micro-channel 1-1, wherein n is 10-20.
The diameter D of the inlet hole of the bionic fractal micro-channelb＝βDaThe value range of beta is 5-10%.
The number of the micro-channels from the micro-channel inlet hole to the annular working medium collecting groove of the bionic fractal micro-channel is 2kThe power is increased step by step in a geometric series (k is more than or equal to 0 and is a positive integer), and each channel is distributed with two branch channels with self-similar structures at the next stage.
Except the 0 th level branch channel, each level of channel of the bionic fractal micro-channel consists of two parts, namely a channel ka pointing to the center of a circle and a channel kb for connecting the tail end of the channel ka and the starting end of the (k +1) a together. Design length L of k-th channelkThe length of channel ka plus the projected length of channel kb on radius R satisfies: l isk+1＝Lk×2-1/DAnd
wherein L iskDenotes the design length, L, of the kth channelk+1The design length of a (k +1) th-level channel is shown, and the fractal length D is 2-3. Actual length L of k-th channelksThe length of the channel ka plus the length of the channel kb satisfies
Wherein alpha iskIs the angle between two adjacent ka channels, alphak＝2π/(n×2k) Theta is a bifurcation angle between two adjacent kb channels, the bifurcation angle theta between any two kb channels is equal, and the numeric area of theta is 20-150 degrees.
Of each level of branch channel of the biomimetic fractal micro-channelHydraulic diameter dkSatisfy dk+1＝dk×2-1/ΔAnd
wherein d iskDenotes the hydraulic diameter of the k-th stage channel, dk+1The hydraulic diameter of a k +1 th channel is shown, delta represents the hydraulic diameter fractal dimension, and is 2-3, wkDenotes the width of the k-th channel and the 0-th channel as w0＝πDbN, the width of the last branch satisfies wm-1＜2πR/(2m×n)。
The height h of each level of branch channel of the bionic fractal micro-channel is equal, and h is 100-300 mu m.
Referring to fig. 2(a), the radiator is a square with equal length and width, and the length a is 30-50 mm. The overall diameter Da of the bionic fractal micro-channel 1-1 processed on the heat dissipation cover plate 1 is 20-40 mm, and the diameter B of the annular working medium gathering groove 1-3 is 26-50 mm. The length C of a working medium inlet 3-1 on the liquid supply bottom plate 3 is 5-15 mm, and the length E of a working medium outlet 3-5 is 5-15 mm. Referring to fig. 2(b), the thickness H of the heat-radiating cover plate 110.5-2 mm, thickness H of the partition board 220.5-1.5 mm thick liquid supply bottom plate H3The heights of the bionic fractal microchannel 1-1 and the annular working medium collecting groove 1-3 are h 100-300 mu m, and the diameters of the microchannel inlet hole 1-2 on the heat dissipation cover plate 1 and the liquid supply hole 2-1 on the partition plate 2 are Db1-4 mm, two liquid discharge holes 2-2 arranged on the partition board 2 and the arc-shaped diameters at two ends above a V-shaped liquid discharge micro-channel 3-3 arranged on the liquid supply bottom board 3 are S2The diameter S of the arc-shaped tail end of a liquid supply micro-channel 3-2 arranged on the liquid supply bottom plate 3 is 6-10 mm1＝1.5～4.5mm。
The heat dissipation cover plate is provided with a working medium inlet hole, a plurality of bionic fractal micro-channel channels and an annular working medium gathering groove, wherein the micro-channel inlet hole is positioned in the center of the heat dissipation base plate, the annular working medium gathering groove is positioned on the periphery of the micro-channel, one end of each bionic fractal micro-channel is connected with the micro-channel inlet hole, and the other end of each bionic fractal micro-channel is connected with the annular working medium gathering groove; the partition board is provided with a liquid supply hole and two liquid discharge holes, the liquid supply hole corresponds to the inlet hole of the micro-channel on the heat dissipation bottom plate, and the two liquid discharge holes are symmetrically positioned at two sides of the liquid supply hole and are connected with the annular working medium collecting groove; the liquid supply bottom plate is provided with a working medium inlet, a working medium outlet, a liquid supply micro-channel and a liquid discharge micro-channel, the working medium inlet is arranged at one end of the liquid supply bottom plate, the working medium outlet is arranged at the other end of the liquid supply bottom plate, the working medium inlet is connected with the liquid supply micro-channel, the tail end of the liquid supply micro-channel is positioned below the liquid supply holes of the partition plates, the working medium outlet is connected with the liquid collection area, the liquid discharge micro-channel is V-shaped, two ends above the V-shaped are respectively positioned below the liquid discharge holes of the two partition plates, and one end of the lower part.
Referring to fig. 5, a partition plate 2 is positioned right below a heat dissipation cover plate 1, a liquid supply hole 2-1 is arranged in the center of the partition plate 2, the liquid supply hole 2-1 is positioned right below a microchannel inlet hole 1-2, the diameters of the liquid supply hole 2-1 and the microchannel inlet hole are equal, two liquid discharge holes 2-2 are symmetrically arranged at two sides of the liquid supply hole 2-1, the liquid discharge holes 2-2 are positioned right below an annular working medium collecting groove 1-3, and the liquid supply hole 2-1 and the liquid discharge holes 2-2 both penetrate through the partition plate 2.
Referring to fig. 6, the liquid supply bottom plate 3 is positioned right below the partition plate 2, and the liquid supply bottom plate 3 is provided with a working medium inlet 3-1, a liquid supply micro-channel 3-2, a liquid discharge micro-channel 3-3, a liquid collection area 3-4 and a working medium outlet 3-5. The working medium inlet 3-1 and the working medium outlet 3-5 are respectively positioned at two ends of the liquid supply bottom plate 3. The working medium inlet 3-1 is communicated with the liquid supply micro-channel 3-2, and the liquid collection area 3-4 is communicated with the working medium outlet 3-5 micro-channel. Arc transition is adopted between the working medium inlet 3-1 and the liquid supply micro-channel 3-2, between the liquid discharge micro-channel 3-3 and the liquid collecting area 3-4 and between the liquid collecting area 3-4 and the working medium outlet 3-5. The tail end of the liquid supply micro-channel 3-2 is positioned right below the liquid supply hole 2-1 on the partition board 2; the structure of the liquid discharge micro-channel 3-3 is V-shaped, two ends of the upper part of the V-shaped are respectively positioned under two liquid discharge holes 2-2 on the partition board 2, one end of the lower part is connected with the liquid collection area 3-4, and two branches of the V-shaped liquid discharge micro-channel 3-3 are in arc transition. The liquid supply micro-channel 3-2 and the liquid discharge micro-channel 3-3 can also adopt other structures.
Referring to fig. 1(b) and fig. 2(b), during operation, working medium enters the radiator from a working medium inlet 3-1 on the liquid supply bottom plate 3, enters a liquid supply hole 2-1 on the partition plate 2 through the liquid supply micro-channel 3-2, enters a micro-channel inlet hole 1-2 on the heat dissipation cover plate 1 through the liquid supply hole 2-1, flows through the bionic fractal micro-channel 1-1, cools a heating electronic element, gradually diffuses into an annular working medium gathering groove 1-3 after heat dissipation is completed, sequentially passes through a liquid discharge hole 2-2 on the partition plate 2 and a liquid discharge micro-channel 3-3 on the liquid supply bottom plate 3, gathers in a liquid collection area 3-4 on the liquid supply bottom plate 3, and is discharged out of the radiator through a working medium outlet 3-5.
The heat dissipation cover plate 1 and the liquid supply bottom plate 3 are made of silicon, silicon carbide, aluminum or copper, and the partition plate 2 is made of poly N, N-dimethylacrylamide (PDMA), quartz glass, aluminum or copper.
When the heat dissipation cover plate and the liquid supply bottom plate adopt silicon or silicon carbide as base materials, the manufacturing method of the ultralow flow resistance micro-channel heat radiator based on the bionic fractal structure comprises the following steps:
the method comprises the following steps: designing structural patterns and sizes on the heat dissipation cover plate 1, the partition plate 2 and the liquid supply bottom plate 3;
step two: manufacturing a mask plate according to the structure of the bionic fractal micro-channel 1-1 obtained by design;
step three: after deep cleaning is carried out on the heat dissipation cover plate 1, photoresist is coated on the surface of the heat dissipation cover plate in a rotating mode, a mask plate is used for shielding, the mask pattern obtained in the step two is accurately transferred to the surface of the heat dissipation cover plate 1, finally, the deep reactive ion etching technology is adopted, the preparation of micro-channels with the same height (taking the height value of a middle-level channel) is completed by controlling the etching time, and the height h of the bionic fractal micro-channel 1-1 is 100-300 mu m;
step four: processing a liquid supply hole 2-1 and a liquid discharge hole 2-2 required on the partition plate 2 by using a precision processing technology, wherein the liquid supply hole 2-1 and the liquid discharge hole 2-2 both penetrate through the partition plate 2, and deeply cleaning and polishing the front surface and the back surface of the partition plate;
step five: working medium inlets 3-1, liquid supply micro-channels 3-2, liquid discharge micro-channels 3-3, liquid collection areas 3-4 and working medium outlets 3-5 are processed on the liquid supply bottom plate 3 by using a dry etching technology, and the etching depth hdAll are 100-300 mu m;
step six: and (3) respectively finishing bonding and sealing the heat dissipation cover plate 1, the partition plate 2 and the liquid supply bottom plate 3 by adopting an anodic bonding process.
The present invention will be described in detail with reference to examples.
The invention comprises a heat dissipation cover plate 1, a partition plate 2 and a liquid supply bottom plate 3, wherein a bionic fractal microchannel 1-1, a microchannel inlet hole 1-2 and an annular working medium collecting groove 1-3 are arranged on the heat dissipation cover plate 1, a liquid supply hole 2-1 and two liquid discharge holes 2-2 are arranged on the partition plate 2, a working medium inlet 3-1, a liquid supply microchannel 3-2, a liquid discharge microchannel 3-3, a liquid collection area 3-4 and a working medium outlet 3-5 are arranged on the liquid supply bottom plate 3. Referring to fig. 2(a) and (b), the length a of the heat sink (the length and width of the heat sink are equal, and the length of the heat sink cover plate 1, the partition plate 2 and the liquid supply bottom plate 3 are equal) is 30-50 mm. The whole diameter D of the bionic fractal micro-channel 1-1 arranged on the radiating cover plate 1aThe diameter B of the annular working medium gathering groove 1-3 is 26-50 mm, and the heights of the bionic fractal micro-channel 1-1 and the annular working medium gathering groove 1-3 are both 100-300 mu m. The diameters of the inlet holes 1-2 of the micro-channels on the heat dissipation cover plate 1 and the liquid supply holes 2-1 on the partition plate 2 are Db1-4 mm, two liquid discharge holes 2-2 arranged on the partition board 2 and the arc-shaped diameters at two ends above a V-shaped liquid discharge micro-channel 3-3 arranged on the liquid supply bottom board 3 are S2The diameter S of the arc-shaped tail end of a liquid supply micro-channel 3-2 arranged on the liquid supply bottom plate 3 is 6-10 mm1The length C of the working medium inlet 3-1 is 1.5-4.5 mm, and the length E of the working medium outlet 3-5 is 5-15 mm. Working medium inlets 3-1, liquid supply micro-channels 3-2, liquid discharge micro-channels 3-3, liquid collection areas 3-4 and working medium outlets 3-5 arranged on the liquid supply bottom plate 3 are all h in heightd100 to 300 μm. Thickness H of heat radiation cover plate 110.5-2 mm, thickness H of the partition board 220.5-1.5 mm thick liquid supply bottom plate H3＝1～2mm。
Referring to fig. 4, the total number n of channels of the bionic fractal microchannel is 10-20, the number m of branching stages is 4-7, the length fractal dimension D is 2-3, the hydraulic diameter fractal dimension Δ is 2-3, and the included angle between two adjacent kb channels θ is 20-150 °.
The invention designs a bionic fractal micro-channel radiator with a multi-stage bifurcation flow channel structure by imitating a high-efficiency low-resistance substance transportation network in the nature such as a blood circulation network, a pulmonary trachea tree, a vein and the like of a mammal. The novel heat exchanger has the advantages of high heat exchange coefficient, low flow resistance, excellent temperature uniformity, remarkable comprehensive performance of the micro-channel heat exchanger, reduction of thermal stress, improvement of the working stability of electronic components and service life of the electronic components.
Claims (10)
1. The ultralow flow resistance microchannel radiator based on the bionic fractal structure is characterized by comprising a heat dissipation cover plate (1), a partition plate (2) and a liquid supply bottom plate (3) which are arranged from top to bottom, wherein the heat dissipation cover plate (1), the partition plate (2) and the liquid supply bottom plate (3) are sealed by adopting a bonding technology;
a microchannel inlet hole (1-2), an annular working medium gathering groove (1-3) and a bionic fractal microchannel (1-1) are processed on the heat dissipation cover plate (1), and n bionic fractal microchannels (1-1) are annularly arranged along the circle center of the microchannel inlet hole (1-2);
each bionic fractal microchannel (1-1) comprises a plurality of same bionic fractal microchannel clusters, each bionic fractal microchannel cluster comprises m-level channels which are respectively 0 th, 1 st, 2 … … th and (m-1) level channels, wherein the 0 th level channel is communicated with a microchannel inlet hole (1-2), and the m-1 level channel is connected with an annular working medium gathering groove (1-3);
a liquid supply hole (2-1) is formed in the center of the partition plate (2), the liquid supply hole (2-1) is located right below the inlet hole (1-2) of the micro-channel, liquid discharge holes (2-2) are symmetrically formed in the two sides of the liquid supply hole (2-1), and the liquid discharge holes (2-2) are located right below the annular working medium collecting groove (1-3);
the liquid supply bottom plate (3) is provided with a working medium inlet (3-1), a liquid supply micro-channel (3-2), a liquid discharge micro-channel (3-3), a liquid collection area (3-4) and a working medium outlet (3-5); the working medium inlet (3-1) and the working medium outlet (3-5) are respectively positioned at two ends of the liquid supply bottom plate (3); the working medium inlet (3-1) is communicated with the liquid supply micro-channel (3-2), and the working medium outlet (3-5) is communicated with the liquid collecting area (3-4); the tail end of the liquid supply micro-channel (3-2) is positioned right below the liquid supply hole (2-1) on the partition plate (2); one end of the liquid drainage micro-channel (3-3) is positioned under the liquid drainage hole (2-2) on the clapboard (2), and the other end is connected with the liquid collection area (3-4).
2. The biomimetic fractal structure-based hyper-segment according to claim 1The low flow resistance microchannel radiator is characterized in that the n bionic fractal microchannels are integrally circular; the diameter Da of the circle is 20-40 mm; diameter D of inlet hole (1-2) of micro-channelb＝βDaThe value range of beta is 5-10%.
3. The ultra-low flow resistance micro-channel radiator based on the bionic fractal structure as claimed in claim 2, wherein n is 10-20; m is 4 to 7.
4. The ultralow flow resistance microchannel heat sink based on the bionic fractal structure as claimed in claim 1, wherein arc transition is adopted between the working medium inlet (3-1) and the liquid supply microchannel (3-2), between the liquid discharge microchannel (3-3) and the liquid collecting region (3-4), and between the liquid collecting region (3-4) and the working medium outlet (3-5);
the number of the liquid discharge holes (2-2) is 2, the liquid discharge micro-channel (3-3) is V-shaped, two ends of the upper part of the V-shaped are respectively positioned under the two liquid discharge holes (2-2), and the bottom end of the V-shaped is connected with the liquid collection area (3-4).
5. The ultra-low flow resistance microchannel heat sink based on the bionic fractal structure as claimed in claim 1, wherein the number of microchannels from the microchannel inlet holes (1-2) to the annular working medium collecting groove (1-3) is 2xThe power is increased in a geometric series step by step, wherein x is a positive integer.
6. The ultra-low flow resistance microchannel heat sink based on the biomimetic fractal structure as claimed in claim 1, wherein each level of the channel, except the 0 th level channel, of the biomimetic fractal microchannel consists of two segments, a segment of channel ka pointing to the center of the circle and a segment of channel kb connecting the end of the channel ka and the beginning of the channel (k +1) a together; design length L of k-th channelkThe length of channel ka plus the projected length of channel kb on radius R satisfies: l isk+1＝Lk×2-1/DAnd
wherein L iskDenotes the design length, L, of the kth channelk+1The design length of a k +1 th-level channel is shown, the length fractal dimension D is 2-3, and the actual length L of the k-th-level channelksThe length of the channel ka plus the length of the channel kb satisfies
Wherein alpha iskIs the angle between two adjacent ka channels, alphak＝2π/(n×2k) Theta is a bifurcation angle between two adjacent kb channels, the bifurcation angle theta between any two kb channels is equal, and the numeric area of theta is 20-150 degrees.
7. The fractal-structure-based ultra-low flow-resistance microchannel heat sink as claimed in claim 1, wherein each stage of the channel has a hydraulic diameter dkSatisfy dk+1＝dk×2-1/ΔAnd
wherein d iskDenotes the hydraulic diameter of the k-th stage channel, dk+1The hydraulic diameter of a k +1 th channel is shown, delta represents the hydraulic diameter fractal dimension, and is 2-3, wkDenotes the width of the k-th channel and the 0-th channel as w0＝πDbN, the width of the last branch satisfies wm-1＜2πR/(2m×n)。
8. The ultra-low flow resistance micro-channel heat sink based on the bionic fractal structure as claimed in claim 1, wherein the height h of each stage of channel is equal, and h is 100-300 μm;
the diameter B of the annular working medium collecting groove (1-3) is 26-50 mm, the length C of the working medium inlet (3-1) is 5-15 mm, and the length E of the working medium outlet (3-5) is 5-15 mm;
thickness H of heat radiation cover plate (1)10.5-2 mm, thickness H of the partition board (2)20.5-1.5 mm, the thickness H of the liquid supply bottom plate (3)3＝1～2mm；
Bionic fractal micro-channel (1-1) The height of the annular working medium collecting groove (1-3) is 100-300 mu m, and the diameters of the inlet hole (1-2) and the liquid supply hole (2-1) of the micro-channel are Db＝1～4mm，
The heat dissipation cover plate (1) and the liquid supply bottom plate (3) are made of silicon, silicon carbide, aluminum, copper or stainless steel, and the partition plate (2) is made of poly N, N-dimethylacrylamide, quartz glass aluminum or copper.
9. The ultralow flow resistance microchannel heat sink based on the bionic fractal structure as claimed in claim 1, wherein during operation, the working medium enters the heat sink from the working medium inlet (3-1) on the liquid supply bottom plate (3), enters the liquid supply holes (2-1) on the partition plate (2) via the liquid supply microchannels (3-2), enters the microchannel inlet holes (1-2) on the heat dissipation cover plate (1) via the liquid supply holes (2-1), flows through the bionic fractal micro through microchannels (1-1), cools the heating electronic components, gradually diffuses into the annular working medium collecting groove (1-3) after heat dissipation, sequentially passes through the liquid discharge holes (2-2) on the partition plate (2) and the liquid discharge microchannels (3-3) on the liquid supply bottom plate (3), and is collected in the liquid collecting area (3-4) on the liquid supply bottom plate (3), is discharged out of the radiator through the working medium outlet (3-5).
10. The manufacturing method of the bionic fractal structure-based ultralow flow resistance microchannel heat sink as claimed in claim 1, is characterized by comprising the following steps:
the method comprises the following steps: structural patterns on the heat dissipation cover plate (1), the partition plate (2) and the liquid supply bottom plate (3) are designed;
step two: manufacturing a mask plate according to the structure of the bionic fractal micro-channel (1-1) obtained by design;
step three: spin-coating photoresist on the surface of the heat dissipation cover plate (1), shielding by using a mask plate, transferring the mask pattern of the mask plate obtained in the step two to the surface of the heat dissipation cover plate (1), and finally adopting a deep reactive ion etching technology to finish the preparation of micro-channels with the same height;
step four: on the partition plate (2), a liquid supply hole (2-1) and a liquid discharge hole (2-2) are processed by utilizing a precision processing technology, and the liquid supply hole (2-1) and the liquid discharge hole (2-2) penetrate through the partition plate (2);
step five: a working medium inlet (3-1), a liquid supply micro-channel (3-2), a liquid discharge micro-channel (3-3), a liquid collection area (3-4) and a working medium outlet (3-5) are processed on the liquid supply bottom plate (3) by using a dry etching technology;
step six: and bonding and sealing the heat dissipation cover plate (1), the partition plate (2) and the liquid supply bottom plate (3) by adopting an anodic bonding process.
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