CN112433274A - Liquid lens, preparation method thereof and optical device - Google Patents
Liquid lens, preparation method thereof and optical device Download PDFInfo
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- CN112433274A CN112433274A CN202011264023.5A CN202011264023A CN112433274A CN 112433274 A CN112433274 A CN 112433274A CN 202011264023 A CN202011264023 A CN 202011264023A CN 112433274 A CN112433274 A CN 112433274A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
- G02B3/14—Fluid-filled or evacuated lenses of variable focal length
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
- G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
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Abstract
The invention provides a liquid lens, a preparation method thereof and an optical device. The liquid lens includes: the liquid carrying device comprises a first electrode and a second electrode, wherein the first electrode and the second electrode surround to form a liquid carrying cavity, and an insulating material layer is arranged between the first electrode and the second electrode on the periphery of the liquid carrying cavity; optical liquid is loaded in the liquid carrying cavity; the first electrode comprises a first glass substrate and a first ITO conductive film located on the surface of the first glass substrate, the second electrode comprises a second glass substrate and a second ITO conductive film located on the surface of the second glass substrate, and the first glass substrate and the second glass substrate are both located on the surfaces departing from the liquid carrying cavity. The liquid lens can be manufactured by a WLO process due to the adoption of the glass electrode, the production efficiency can be greatly improved, the processing precision is high, the product consistency is good, the glass does not worry about the problems of surface oxidation corrosion and the like in the cleaning process, the quality of the liquid lens is improved, the production cost is reduced, and the large-scale popularization and application of the liquid lens are facilitated.
Description
Technical Field
The invention relates to the field of optics, in particular to a liquid lens, a preparation method thereof and an optical device.
Background
The liquid lens is a lens using liquid, and the focal length is changed by changing the curvature of the liquid. The liquid lens product which is mature in the market at present is a variable focus optical lens which utilizes the electrowetting on dielectric (EWOD) principle, the shape of liquid drops can be changed through external voltage, and further the focal length of the liquid drops is changed. It is expected that, with the development of liquid lens technology, liquid lenses will be more and more widely applied in the field of optical imaging, such as optical systems of cameras, scanners, mobile phones, machine vision, medical endoscopy and the like.
Liquid lens products that have been commercialized are from varioptical, france. The liquid lens of varioptical company uses metal as electrode material, for example, the first electrode uses stainless steel, the second electrode uses brass, and the surface of the brass electrode is plated with metal nickel as a protective layer, so as to prevent the brass electrode from being oxidized and corroded in the cleaning process after processing. In a specific preparation method, the varioptical company processes the metal electrode into a required shape by a machining mode, so that the production efficiency is low, the cost is high, the precision is low, the product consistency is poor, and the requirement of low surface roughness can be met only by secondary processing because the surface roughness of the metal electrode is large.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention is directed to a novel liquid lens, a method for manufacturing the same, and an optical device, so as to solve the problems of low production efficiency, high cost, low precision, poor product uniformity, and the requirement of secondary processing for meeting the low surface roughness due to the large surface roughness of the metal electrode in the conventional commercialized liquid lens product using metal as an electrode material.
To achieve the above and other related objects, the present invention provides a liquid lens comprising at least:
the liquid carrying device comprises a first electrode and a second electrode for applying voltage, wherein the first electrode and the second electrode surround to form a liquid carrying cavity, and an insulating material layer is arranged between the first electrode and the second electrode on the periphery of the liquid carrying cavity so as to electrically isolate the first electrode and the second electrode from each other;
optical liquid is carried in the liquid carrying cavity, the optical liquid at least comprises nonpolar liquid and polar liquid positioned above the nonpolar liquid, and a liquid interface is formed between the nonpolar liquid and the polar liquid;
the first electrode comprises a first glass substrate and a first ITO conductive film located on the surface of the first glass substrate, the second electrode comprises a second glass substrate and a second ITO conductive film located on the surface of the second glass substrate, and the first glass substrate and the second glass substrate are both located on the surfaces departing from the liquid carrying cavity.
Optionally, a groove is arranged in the first electrode, the groove forms the liquid carrying cavity, and the second electrode covers the groove.
Optionally, the groove is a rectangular groove, the width of the groove is 2-3 mm, the height of the groove is 0.5-0.7 mm, and the thickness of the liquid lens is 0.9-1.1 mm.
Optionally, a buffer cavity is formed in a portion, corresponding to the liquid carrying cavity, of the second electrode, and the buffer cavity extends in a direction away from the liquid carrying cavity.
Optionally, a dielectric film and a hydrophobic film are formed on the surface of the first ITO conductive film, wherein the dielectric film comprises one or more of aluminum oxide, tantalum pentoxide and parylene, and the hydrophobic film comprises one or two of CYTOP and Teflon AF 1600.
The invention also provides an optical device, characterized in that it comprises a liquid lens as described in any of the above aspects.
The invention also provides a preparation method of the liquid lens, which comprises the following steps:
providing a first glass substrate, and forming a first ITO conductive film, a dielectric film and a hydrophobic film on the surface of the first glass substrate in sequence after the shape of a first electrode is formed on the first glass substrate, wherein the first ITO conductive film on the surface of the first glass substrate and the first glass substrate form the first electrode, a groove is formed on the first glass substrate, and the groove forms a liquid carrying cavity;
providing a second glass substrate, forming a second ITO conductive film on the second glass substrate after forming the shape of a second electrode on the second glass substrate, wherein the second electrode is formed by the second glass substrate and the second ITO conductive film on the surface of the second substrate;
injecting optical liquid into the liquid carrying cavity of the first glass substrate, wherein the optical liquid at least comprises a non-polar liquid and a polar liquid positioned above the non-polar liquid, and a liquid interface is formed between the non-polar liquid and the polar liquid;
attaching a first electrode and a second electrode which are injected with optical liquid, wherein the second electrode covers the liquid carrying cavity, the first glass substrate and the second glass substrate are both positioned on the surface departing from the liquid carrying cavity, and UV glue is coated between the first electrode and the second electrode on the periphery of the liquid carrying cavity and is cured so as to electrically isolate the first electrode from the second electrode.
Optionally, the method of forming the shape of the first electrode on the first glass substrate and the method of forming the shape of the second electrode on the second glass substrate each include one or a combination of a hot press molding and an etching method.
Optionally, the hot press forming comprises the steps of:
placing the corresponding glass substrate on a mould platform, and heating the glass substrate in an inert gas atmosphere to soften the glass substrate;
extruding and molding the glass substrate by adopting a mold to prepare a required shape;
the resulting structure is released from the mold platform after annealing and cooling.
Optionally, forming a plurality of first electrodes on the first glass substrate, and cutting the first glass substrate after sequentially forming a first ITO conductive film, a dielectric film, and a water-repellent film to obtain a plurality of first electrodes; and forming a plurality of second electrodes on the second glass substrate, and cutting the second ITO conductive film to obtain the plurality of second electrodes.
As mentioned above, the liquid lens of the invention selects glass as the electrode material, and firstly solves the problem of large roughness existing in the prior art that the metal material is adopted as the electrode, so that the requirement of low roughness is met without secondary processing. And the glass electrode is oxidation resistant and corrosion resistant, and no additional protective layer is needed to be plated. Compared with the defects of low efficiency, high cost, limited productivity and the like in metal machining, the liquid lens provided by the invention can be manufactured by a Wafer Level Optics (WLO) process due to the adoption of the glass electrode, the production efficiency can be greatly improved, the processing precision is high (can reach the nm Level), the product consistency is good, the problems of surface oxidation and corrosion and the like of glass in the cleaning process are not worried, the quality of the liquid lens is improved, the production cost of the liquid lens is reduced, and the large-scale popularization and application of the liquid lens are facilitated.
Drawings
Fig. 1 is a schematic structural diagram of a liquid lens according to the present invention.
FIG. 2 is a schematic view showing a step of hydroforming in the method for manufacturing a liquid lens according to the present invention.
Description of the element reference numerals
11 first electrode
111 first glass substrate
112 first ITO conductive film
12 second electrode
121 second glass substrate
122 second ITO conductive film
123 buffer cavity
131 non-polar liquid
132 polar liquid
133 liquid interface
14 insulating material layer
15 dielectric film
21 glass substrate
22 mould platform
23 mould
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
Please refer to fig. 1-2. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the drawings only show the components related to the present invention rather than being drawn according to the number, shape and size of the components in actual implementation, and the form, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
As shown in fig. 1, the present invention provides a liquid lens, including at least: a first electrode 11 and a second electrode 12 for applying a voltage, wherein the first electrode 11 and the second electrode 12 surround to form a liquid carrying cavity, and an insulating material layer 14 is arranged between the first electrode 11 and the second electrode 12 at the periphery of the liquid carrying cavity to electrically isolate the first electrode 11 and the second electrode 12 from each other, so as to prevent electrical breakdown between the first electrode 11 and the second electrode 12 and avoid the problem of electric leakage of the liquid lens; the liquid carrying cavity carries optical liquid, the optical liquid at least comprises a non-polar liquid 131 and a polar liquid 132 positioned above the non-polar liquid 131, a liquid interface 133 is formed between the non-polar liquid 131 and the polar liquid 132, the liquid interface 133 is preferably an arc interface, the non-polar liquid 131 is positioned below the liquid interface 133, and the polar liquid 132 is positioned in an arc part of the liquid interface 133; the first electrode 11 includes a first glass substrate 111 and a first ITO conductive film 112 located on a surface of the first glass substrate 111, the second electrode 12 includes a second glass substrate 121 and a second ITO conductive film 122 located on a surface of the second glass substrate 121, and both the first glass substrate 111 and the second glass substrate 121 are located on a surface away from the liquid carrying cavity (i.e., can be directly used as a housing of a liquid lens), or the first ITO conductive film 112 and the second ITO conductive film 122 are located inside a structure surrounded by the first glass substrate 111 and the second glass substrate 121, and are adjacent to the optical liquid. The liquid lens of the invention adopts glass as the electrode material, and firstly solves the problem of large roughness existing in the prior art that the metal material is adopted as the electrode, so that the requirement of low roughness is met without secondary processing. And the glass electrode is oxidation resistant and corrosion resistant, and no additional protective layer is needed to be plated. Compared with the defects of low efficiency, high cost, limited productivity and the like in metal machining, the liquid lens provided by the invention can be manufactured by a Wafer Level Optics (WLO) process due to the adoption of the glass electrode, the production efficiency can be greatly improved, the processing precision is high (can reach the nm Level), the product consistency is good, the problems of surface oxidation and corrosion and the like of glass in the cleaning process are not worried, the quality of the liquid lens is improved, the production cost of the liquid lens is reduced, and the large-scale popularization and application of the liquid lens are facilitated.
It should be noted that "first" and "second" in this specification are for convenience of description only and are not in a limiting sense, and for example, an electrode formed with a groove may be defined as the second electrode 12 and the other electrode may be defined as the first electrode 11.
The first glass substrate 111 and the second glass substrate 121 may be any one of soda-lime-based or silicon-boron-based substrate glasses, and a corresponding ITO conductive film may be formed on the corresponding glass substrate by a magnetron sputtering technique (of course, an ITO film may be attached, but magnetron sputtering is preferable).
In this embodiment, as an example, a groove (not labeled) is provided in the first electrode 11, the groove forms the liquid carrying cavity, and the second electrode 12 covers the groove. The design of the structure is beneficial to simplifying the filling of optical liquid and improving the performance of the liquid lens.
In a further example, the grooves are rectangular grooves having a width d1 of 2 to 3mm (inclusive in the description of the numerical ranges referred to in this specification and not separately described hereinafter), preferably 2.5mm, a height d2 of 0.5 to 0.7mm, and a thickness d5 of 0.9 to 1.1 mm. The parameters are established by combining the factors of the difficulty of the electrode preparation process, the zoom range of the comprehensive liquid lens and the like, and experiments show that the liquid lens prepared in the parameter range has good optical performance and high preparation yield. In order to miniaturize the liquid lens as much as possible, the maximum thickness d3 of the second electrode 12 (including the thickness of the second glass substrate 121 and the second ITO conductive film 122) is about 0.2mm, for example.
As an example, the insulating material layer 14 is preferably a material with a good adhesion effect, so as to achieve a good sealing of the liquid-carrying chamber while having an insulating effect. In one example, the insulating material layer 14 is UV glue.
The polar liquid 132 is a conductive liquid including, but not limited to, one or more of water, alcohol, and salt solution, and in the present embodiment, the polar liquid 132 is preferably water. The non-polar liquid 131 is a non-conductive liquid and includes organic solvents such as silicone oil, chlorobenzene, and the like, or a mixture thereof. In the present embodiment, the non-polar liquid 131 is preferably silicone oil.
As an example, a buffer chamber 123 is formed in a portion of the second electrode 12 corresponding to the liquid carrying chamber, and the buffer chamber 123 extends in a direction away from the liquid carrying chamber. The structure of the buffer chamber 123 may be set as desired. In this embodiment, as an example, the buffer cavities 123 are similar to an M-shaped buffer cavity, and the number of the buffer cavities 123 is 2, and the 2 buffer cavities 123 are distributed at intervals and are correspondingly located above the liquid carrying cavity. During the use of the liquid lens, the pressure inside the liquid lens may change due to the change of the environmental temperature or the drop of vibration, and thus part of the liquid may be vaporized to generate bubbles, and the vaporization is irreversible. The invention can effectively unload the pressure change of the device by arranging the buffer structure, thereby preventing bubbles from generating, improving the stability of the liquid lens and prolonging the service life of the liquid lens.
As an example, a dielectric film 15 and a hydrophobic film (not shown) are formed on the surface of the first ITO conductive film 112, and it is preferable that the dielectric film 15 is located on the surface of the first ITO conductive film 112 and the hydrophobic film is located on the surface of the dielectric film 15. The dielectric film 15 comprises one or more of aluminum oxide, tantalum pentoxide, and parylene, such as parylene; the dielectric film 15 may have a thickness of 1 to 10 μm, the hydrophobic film may include one or both of CYTOP and Teflon AF1600, for example, Teflon AF1600, and the thickness of the hydrophobic film may be 20 to 100 nm. The dielectric film 15 is provided to effectively prevent the breakdown of the first electrode 11, and the hydrophobic film is provided to obtain a better electrowetting effect.
As glass is selected as the electrode, the surface of the liquid lens does not need to be plated with anticorrosive layers such as nickel layers and the like, the preparation process can be greatly simplified, the product consistency is good, the preparation cost is favorably reduced, and the large-scale popularization and application of the liquid lens are favorably realized.
The invention also provides an optical device comprising a liquid lens as described in any of the above aspects. The optical device can be a camera, a scanner, a mobile phone, a medical endoscope and other devices requiring a lens. The optical device based on the liquid lens can further reduce the volume and the cost.
The invention also provides a preparation method of the liquid lens, which can be used for preparing the liquid lens in the scheme, so that the description of the liquid lens can be fully incorporated herein, and of course, the liquid lens can also be used for preparing liquid lenses with other structures. Specifically, the preparation method comprises the following steps:
providing a first glass substrate, and forming a first ITO conductive film, a dielectric film and a hydrophobic film on the surface of the first glass substrate in sequence after the shape of a first electrode is formed on the first glass substrate, wherein the first ITO conductive film on the surface of the first glass substrate and the first glass substrate form the first electrode, a groove is formed on the first glass substrate, and the groove forms a liquid carrying cavity (the first ITO conductive film covers the surface of the groove);
providing a second glass substrate, forming a second ITO conductive film on the second glass substrate after forming a shape of a second electrode on the second glass substrate, wherein the second electrode is formed by the second glass substrate and the second ITO conductive film positioned on the surface of the second substrate, and a buffer cavity can be formed in the second electrode;
injecting optical liquid into the liquid carrying cavity of the first glass substrate, wherein the optical liquid at least comprises a non-polar liquid and a polar liquid positioned above the non-polar liquid, and a liquid interface is formed between the non-polar liquid and the polar liquid;
the first electrode and the second electrode that will accomplish optical liquid and pour into are laminated mutually, the second electrode covers carry the liquid cavity, first glass substrate and second glass substrate all are located and deviate from carry the surface of liquid cavity, in carry liquid cavity outlying coating UV glue and through the solidification between first electrode and the second electrode, so that first electrode and second electrode electricity are kept apart, if be formed with the cushion chamber in the second electrode, then the cushion chamber corresponds and is located the top of cushion chamber, through setting up buffer structure, can unload the pressure variation of device effectively to prevent that the bubble from producing, improve the stability and the life of liquid lens.
According to the invention, the liquid lens is prepared by adopting the glass substrate, and the glass has the characteristic of low roughness, so that the requirement of low roughness of the surface of the liquid lens is met without secondary processing, and the glass has a good anti-corrosion effect, so that the worry of oxidation and corrosion in the subsequent cleaning process is avoided. Compared with the prior art, the preparation method of the liquid lens can be greatly simplified, the production efficiency can be greatly improved, the processing precision is high (can reach nm level), and the product consistency is good.
It should be noted that the order of forming the first electrode and the second electrode is not strictly specified, for example, the first electrode and the second electrode may be formed in the same equipment by using different molds in sequence, or formed on different equipment at the same time, and the method is not limited in particular.
As an example, the method of forming the shape of the first electrode on the first glass substrate and the method of forming the shape of the second electrode on the second glass substrate each include one or a combination of a hot press molding method and an etching method, and both methods contribute to improvement in processing accuracy.
As an example, as shown in fig. 2, the hot press molding includes the steps of:
placing the corresponding glass substrate 21 on the mold platform 22, heating under an inert gas atmosphere to soften the glass substrate 21, for example, after placing the glass substrate 21 on the platform, introducing nitrogen gas to remove air in the processing chamber, and then heating the mold platform 22 and the glass substrate 21 by using infrared light to heat the glass substrate 21 to a softening point;
the glass substrate 21 is extruded by the mold 23 to prepare the required shape, in this process, only the mold 23 on the glass substrate 21 moves downwards to extrude the glass substrate 21 together with the mold platform 22 at the bottom of the glass substrate 21 to form the required shape, or the mold platform 22 carries the glass substrate 21 to move upwards, or the mold 23 and the mold platform 22 move towards each other at the same time, in this embodiment, the former is preferred, that is, the mold 23 above the glass substrate 21 moves downwards;
and (2) releasing the obtained structure from the mold platform 22 after annealing and cooling, wherein the process can comprise the steps of slowly cooling to anneal while keeping a small pressure, thereby releasing the internal stress in the formed glass substrate, then rapidly annealing and cooling to room temperature, finally releasing the mold platform 22 to obtain the glass substrate with a given structure, such as a glass substrate with a groove or a substrate with a buffer cavity, and then electroplating the surface of the obtained structure by adopting a magnetron sputtering technology to form an ITO conductive film, so as to obtain a corresponding first electrode and a second electrode.
If the etching method is adopted, a required pattern is defined on the glass substrate, and then one or the combination of chemical etching and laser etching is adopted to obtain a required structure.
As an example, a plurality of first electrodes are formed in a shape on the first glass substrate, and are obtained by cutting after a first ITO conductive film, a dielectric film, and a water-repellent film are formed in this order; and forming a plurality of second electrodes on the second glass substrate, and cutting the second ITO conductive film to obtain the plurality of second electrodes. For example, a plurality of spaced grooves may be formed in the first glass substrate, the spacing between adjacent grooves may be as shown by the spacing d4 in fig. 1, for example, 0.1mm, and then cut to obtain the first electrode of the desired configuration. Due to the adoption of the glass substrate, the invention can be manufactured by a Wafer Level Optics (WLO) process, and the production efficiency can be greatly improved.
Of course, in other examples, after the plurality of first electrodes and the plurality of second electrodes are formed, the optical liquid may be filled first, and then the first electrodes and the second electrodes are attached and then cut to obtain the plurality of liquid lenses, which is not limited in this embodiment.
In summary, the liquid lens, the method for manufacturing the same, and the optical device of the present invention are provided. The liquid lens includes: the liquid carrying device comprises a first electrode and a second electrode for applying voltage, wherein the first electrode and the second electrode surround to form a liquid carrying cavity, and an insulating material layer is arranged between the first electrode and the second electrode on the periphery of the liquid carrying cavity so as to electrically isolate the first electrode and the second electrode from each other; optical liquid is carried in the liquid carrying cavity, the optical liquid at least comprises nonpolar liquid and polar liquid positioned above the nonpolar liquid, and a liquid interface is formed between the nonpolar liquid and the polar liquid; the first electrode comprises a first glass substrate and a first ITO conductive film located on the surface of the first glass substrate, the second electrode comprises a second glass substrate and a second ITO conductive film located on the surface of the second glass substrate, and the first glass substrate and the second glass substrate are both located on the surfaces departing from the liquid carrying cavity. The liquid lens of the invention adopts glass as the electrode material, and firstly solves the problem of large roughness existing in the prior art that the metal material is adopted as the electrode, so that the requirement of low roughness is met without secondary processing. And the glass electrode is oxidation resistant and corrosion resistant, and no additional protective layer is needed to be plated. Compared with the defects of low efficiency, high cost, limited productivity and the like in metal machining, the liquid lens provided by the invention can be manufactured by a Wafer Level Optics (WLO) process due to the adoption of the glass electrode, the production efficiency can be greatly improved, the processing precision is high (can reach the nm Level), the product consistency is good, the problems of surface oxidation and corrosion and the like of glass in the cleaning process are not worried, the quality of the liquid lens is improved, the production cost of the liquid lens is reduced, and the large-scale popularization and application of the liquid lens are facilitated.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A liquid lens, characterized in that the liquid lens comprises at least:
the liquid carrying device comprises a first electrode and a second electrode for applying voltage, wherein the first electrode and the second electrode surround to form a liquid carrying cavity, and an insulating material layer is arranged between the first electrode and the second electrode on the periphery of the liquid carrying cavity so as to electrically isolate the first electrode and the second electrode from each other;
optical liquid is carried in the liquid carrying cavity, the optical liquid at least comprises nonpolar liquid and polar liquid positioned above the nonpolar liquid, and a liquid interface is formed between the nonpolar liquid and the polar liquid;
the first electrode comprises a first glass substrate and a first ITO conductive film located on the surface of the first glass substrate, the second electrode comprises a second glass substrate and a second ITO conductive film located on the surface of the second glass substrate, and the first glass substrate and the second glass substrate are both located on the surfaces departing from the liquid carrying cavity.
2. The liquid lens according to claim 1, wherein a groove is provided in the first electrode, the groove constituting the liquid-carrying chamber, and the second electrode covers the groove.
3. The liquid lens according to claim 2, wherein the groove is a rectangular groove, the groove has a width of 2 to 3mm and a height of 0.5 to 0.7mm, and the liquid lens has a thickness of 0.9 to 1.1 mm.
4. The liquid lens of claim 1, wherein a portion of the second electrode corresponding to the liquid-carrying chamber is formed with a buffer chamber extending away from the liquid-carrying chamber.
5. The liquid lens according to claim 1, wherein a dielectric film and a hydrophobic film are formed on the surface of the first ITO conductive film, the dielectric film comprises one or more of aluminum oxide, tantalum pentoxide and parylene, and the hydrophobic film comprises one or both of CYTOP and Teflon AF 1600.
6. An optical device, characterized in that the optical device comprises a liquid lens according to any one of claims 1-5.
7. A method of making a liquid lens, comprising:
providing a first glass substrate, and forming a first ITO conductive film, a dielectric film and a hydrophobic film on the surface of the first glass substrate in sequence after the shape of a first electrode is formed on the first glass substrate, wherein the first ITO conductive film on the surface of the first glass substrate and the first glass substrate form the first electrode, a groove is formed on the first glass substrate, and the groove forms a liquid carrying cavity;
providing a second glass substrate, forming a second ITO conductive film on the second glass substrate after forming the shape of a second electrode on the second glass substrate, wherein the second electrode is formed by the second glass substrate and the second ITO conductive film on the surface of the second substrate;
injecting optical liquid into the liquid carrying cavity of the first glass substrate, wherein the optical liquid at least comprises a non-polar liquid and a polar liquid positioned above the non-polar liquid, and a liquid interface is formed between the non-polar liquid and the polar liquid;
attaching a first electrode and a second electrode which are injected with optical liquid, wherein the second electrode covers the liquid carrying cavity, the first glass substrate and the second glass substrate are both positioned on the surface departing from the liquid carrying cavity, and UV glue is coated between the first electrode and the second electrode on the periphery of the liquid carrying cavity and is cured so as to electrically isolate the first electrode from the second electrode.
8. The method for manufacturing a liquid lens according to claim 7, wherein the method for forming the shape of the first electrode on the first glass substrate and the method for forming the shape of the second electrode on the second glass substrate each include one or a combination of a hot press molding and an etching method.
9. The method for producing a liquid lens according to claim 8, wherein the thermocompression molding comprises the steps of:
placing the corresponding glass substrate on a mould platform, and heating the glass substrate in an inert gas atmosphere to soften the glass substrate;
extruding and molding the glass substrate by adopting a mold to prepare a required shape;
the resulting structure is released from the mold platform after annealing and cooling.
10. The method for manufacturing a liquid lens according to any one of claims 7 to 9, wherein a plurality of first electrodes are formed in a shape of a first glass substrate, and the plurality of first electrodes are obtained by cutting after a first ITO conductive film, a dielectric film, and a water-repellent film are formed in this order; and forming a plurality of second electrodes on the second glass substrate, and cutting the second ITO conductive film to obtain the plurality of second electrodes.
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| CN104977772A (en) * | 2015-07-13 | 2015-10-14 | 张家港康得新光电材料有限公司 | Surface relief based liquid crystal lenticular array device, manufacturing method and display device |
| CN107526123A (en) * | 2016-06-21 | 2017-12-29 | 乐金显示有限公司 | Liquid lens and liquid lens module |
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| CN111854635A (en) * | 2020-07-06 | 2020-10-30 | 中国科学院光电技术研究所 | Aspheric surface detection method based on liquid lens |
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