CN112430797A - Method for loading reverse force in net tensioning equipment - Google Patents
Method for loading reverse force in net tensioning equipment Download PDFInfo
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- CN112430797A CN112430797A CN202110101027.XA CN202110101027A CN112430797A CN 112430797 A CN112430797 A CN 112430797A CN 202110101027 A CN202110101027 A CN 202110101027A CN 112430797 A CN112430797 A CN 112430797A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The invention relates to a method for loading reverse force in a net tensioning device, which comprises the following steps: acquiring a deformation function representing the mathematical relationship between the magnitude of deformation generated by the mask frame after external force is applied to the mask frame and the magnitude and position of the applied force; acquiring stretching parameters of each mask to be welded, and determining a first deformation quantity of the mask frame caused by all the masks which are not welded according to the deformation function and the stretching parameters; acquiring a fitting function of a second deformation quantity generated by the mask frame by the reverse force device according to the deformation quantity function and the loading parameters of the reverse force device; fitting the first mask frame deformation quantity by adopting a fitting function of a second mask frame deformation quantity to obtain the reverse force exerted on the mask frame by each reverse force device in the fitting function, repeatedly executing the steps after welding one mask plate, and sequentially obtaining the reverse force required to be exerted on the mask frame by each reverse force device before welding each mask plate; the whole determination process of the optimal solution of the net opening is fast and accurate.
Description
Technical Field
The invention relates to the field of display panel manufacturing equipment, in particular to a method for loading reverse force in a screen tensioning device.
Background
Display screens based on organic light-Emitting diodes (OLEDs) have become popular products in recent years. In the preparation of an organic film layer of an OLED screen, a fine metal mask is required to shield evaporation materials at specific positions to generate a film layer with a designed pattern.
Before vapor deposition, the two sides of a plurality of fine metal mask plates need to be aligned and welded on a mask frame after a certain mesh tension is applied in sequence, namely, the mesh stretching process. As shown in fig. 1, which is a schematic structural diagram of an embodiment of a mask frame and a fine metal mask, with reference to fig. 1, since the fine metal mask is welded on the mask frame in a stretched state, the fine metal masks will have a reaction force on the mask frame, and the reaction force will cause the mask frame to generate a small compression deformation, which will adversely affect the shape of the fine metal mask, thereby reducing the stretching precision. In order to reduce the influence of the deformation of the mask frame on the fine metal mask plate, a certain pressure, i.e. a counter force F, needs to be applied to several symmetrical positions of the mask frame during the screen-stretching processcThe device capable of providing the above-mentioned counter force is a counter force device.
Fig. 2-4 are schematic diagrams showing a structure of an embodiment of a counter force device and a mask frame, a top view of an embodiment of a counter force device and a mask frame, and a schematic diagram showing a structure of an embodiment of a counter force device, respectively, and in combination with fig. 2-4, a counter force device is used to simulate a deformation of a mask frame caused by a fine metal mask that is not yet welded to the mask frame. Before the expanded mesh welding, a certain reverse force is applied to the mask frame by a reverse force device, and the reverse force needs to simulate the influence of all fine metal masks to be welded on the mask frame to the mask frame as good as possible; then after welding a fine metal mask each time, removing a part of the reverse force, and enabling the remaining reverse force to simulate the deformation of the mask frame caused by the fine metal mask left to be welded but not welded on the mask frame after removing the part of the reverse force; and (3) removing the final reverse force until the final fine metal mask plate is welded, wherein the reverse force is just zero, and the reverse force device does not apply any force to the mask frame.
That is, in the web-spreading process, when the fine metal masks are not welded, or after all the fine metal masks are welded, or when each fine metal mask is welded and a part of the reverse force is removed, all the design of the "loading-removing" reverse force needs to be such that: the reverse force device and the actually welded fine metal mask plate jointly cause deformation of the mask frame to be as consistent as possible; and after all the fine metal mask plates are welded, the counter force device does not apply any force to the mask frame.
In the existing net tensioning technology, the number and the positions of the counter force devices in the net tensioning equipment are determined by experience or finite element simulation, and are not the optimal solution of the number and the positions of the counter force devices. The reverse force value designed by the net tensioning equipment is determined by the product of a given coefficient and the net tensioning force, the method has strong limitation on the net tensioning process, the accuracy which can be finally achieved by the reverse force is low, and the net tensioning accuracy can be indirectly reduced. In order to obtain the stretching accuracy within the specification, the user has to spend a long time additionally to perform additional simulation work by using third-party industrial simulation software, but the reverse force obtained by using the third-party industrial simulation software is not always an optimal solution of the reverse force. In the prior art, a scheme of improving the net tensioning precision by adding more pairs of counter force devices is provided, but the more pairs of counter force devices can increase the assembly difficulty and the assembly precision, and simultaneously can increase the difficulty of searching for the optimal net tensioning solution.
Disclosure of Invention
The invention provides a method for loading a reverse force in a net tensioning device, aiming at the technical problems in the prior art, and solving the problem of finding the optimal solution of the reverse force during the net tensioning in the prior art.
The technical scheme for solving the technical problems is as follows: a method of loading a reverse force in a screening apparatus, comprising:
step 1, obtaining a deformation function of a mask frame, wherein the deformation function represents the mathematical relationship between the size of a deformation generated after an external force is applied to the mask frame and the size and position of the applied force;
step 2, acquiring the screen tensioning parameters of each mask to be welded, wherein the screen tensioning parameters comprise the position of the mask and the screen tensioning force;
step 3, determining a first deformation quantity of the mask frame caused by all unwelded masks according to the deformation quantity function and the tensioning parameters;
step 4, acquiring a fitting function of a second deformation quantity generated by the mask frame by the reverse force device according to the deformation quantity function and loading parameters of the reverse force device, wherein the loading parameters of the reverse force device comprise the number of pre-loaded reverse force devices, the installation positions and the corresponding applied reverse force magnitude;
step 5, fitting the mask frame deformation quantity I by adopting a fitting function of a mask frame deformation quantity II to obtain the magnitude of the reverse force applied to the mask frame by each reverse force device in the fitting function;
and 6, after welding one mask plate, repeatedly executing the steps 3-5, and sequentially obtaining the magnitude of the reverse force which needs to be applied to the mask frame by each reverse force device before welding each mask plate.
The invention has the beneficial effects that: the invention provides a method for loading reverse force in a screen tensioning device, which comprises the steps of firstly, obtaining a deformation variable value, a deformation function of the force application size and the force application position of a mask frame with given size and material mechanical properties through mechanical simulation, and predicting the deformation of the mask frame caused by a fine metal mask to be welded based on the deformation function and in combination with screen tensioning parameters input before screen tensioning; establishing a model of deformation of the mask frame caused by the loaded reverse force by combining the parameters of the reverse force device; and finally, rapidly calculating in a data fitting mode to obtain the magnitude of the reverse force during each step of net tensioning, obtaining the optimal solution of the reverse force loaded by the reverse force device, and rapidly and accurately determining the whole optimal solution of the net tensioning.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the deformation function of the mask frame obtained through the mechanical simulation in the step 1 is as follows:
；
wherein the content of the first and second substances,
for different positions of the mask frame
The amount of deformation that occurs at the site,
in order for the location of the external force to be applied,
in order to apply the magnitude of the external force,
representing the position impact factor.
Further, the method for acquiring the positions of the masks to be welded in the step 2 comprises the following steps:
the position distribution range of the ith to-be-welded mask plate is obtained as
；
Further, the process of determining the deformation amount one in the step 3 includes:
calculating the deformation quantity of the mask frame caused by the ith mask plate
；
Representing the acting force of the ith mask plate on the mask frame, which is obtained according to the preset tension of the tensioning net;
calculating the deformation quantity I of the mask frame caused by all the unwelded masks before the m-th mask is welded
(ii) a M represents the total number of reticles to be soldered.
Further, the process of obtaining the fitting function in step 4 includes:
the reverse force devices are N pairs which are symmetrically arranged, before the mth mask plate is welded, the jth pair of the reverse force devices respectively deform different positions on two opposite long edges of the mask frame
；
，
Is the position coordinate of the j-th pair of counter force devices,
showing the magnitude of force respectively applied to the mask frame by the jth pair of reverse force devices before the mth mask plate is welded by the reverse force devices;
establishing a fitting function of the deformation quantity two of the mask frame caused by all the preloaded reverse force devices before the mth piece of the mask plate is welded, wherein the fitting function is as follows:
further, the method for obtaining the magnitude of the reverse force exerted by each reverse force device on the mask frame in the fitting function in the step 5 includes:
for the deformation quantity one of the mask frame with known specific value
Fitting the data to meet the requirement as far as possible
By the force exerted by each of said counter-force means
The value of (c).
And further, determining the optimal position and logarithm of the counter force device according to the comparison between the force application size of the counter force device which is fitted for one time or multiple times and the influence of the mask plate on the deformation of the mask frame.
Further, the optimal number range of the counter force devices is 3-7 pairs.
Further, when the number of the counter force devices is 3 pairs, the optimal position of the counter force devices is a position (0.15,0.5,0.85) times of the length of the long edge of the inner frame of the mask frame, and the optimal distribution range is +/-0.02 times of the length of the mask frame near the optimal position;
when the number of the reverse force devices is 4 pairs, the optimal position of the reverse force devices is the position (0.1,0.34,0.66 and 0.9) times of the length of the long edge of the inner frame of the mask frame, and the optimal distribution range is +/-0.05 times of the length of the mask frame near the optimal position;
when the number of the reverse force devices is 5 pairs, the optimal position of the reverse force device is the position (0.08,0.26,0.5,0.74 and 0.92) times of the length of the long edge of the inner frame of the mask frame, and the optimal distribution range is +/-0.05 times of the length of the mask frame near the optimal position;
when the number of the reverse force devices is 7 pairs, the optimal position of the reverse force devices is the position (0.05,0.12,0.29,0.5,0.71,0.88 and 0.95) times of the length of the long edge of the inner frame of the mask frame, and the optimal solution distribution range is +/-0.05 times of the length of the mask frame near the optimal position.
The beneficial effect of adopting the further scheme is that: and finding the optimal position and number of the reverse force device group according to the comparison of the influence of the fitted reverse force on the mask frame deformation and the influence of the fine metal mask on the mask frame deformation, and providing a basis for setting and installing the reverse force device in the subsequent net-opening process.
Drawings
FIG. 1 is a schematic structural diagram of a mask frame and a fine metal mask according to the present invention;
FIG. 2 is a schematic structural diagram of an embodiment of a counter force device and a mask frame according to the present invention;
FIG. 3 is a top view of an embodiment of a counter force device and mask frame provided by the present invention;
FIG. 4 is a schematic structural diagram of an embodiment of a counter force apparatus provided in the present invention;
fig. 5 is a flowchart of a method for loading a reverse force in a tensioning device according to the present invention;
fig. 6 is a flowchart of an embodiment of a method for loading a reverse force in a tensioning device according to the present invention;
FIG. 7 is a schematic diagram of the deformation of the mask frame due to the force applied thereto.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
Fig. 5 shows a method for loading a reverse force in a tensioning device according to the present invention, as can be seen from fig. 5, the method includes:
step 1, obtaining a deformation function of the mask frame, wherein the deformation function represents the mathematical relation between the size of a deformation generated after the mask frame is applied with an external force and the size and the position of the applied force.
And 2, acquiring the tensioning parameters of each fine metal mask to be welded, wherein the tensioning parameters comprise the position distribution and the tensioning force of the mask.
And 3, determining a deformation quantity I of the mask frame caused by all the fine metal masks which are not welded according to the deformation quantity function and the stretching parameters.
And 4, acquiring a fitting function of a second deformation quantity generated by the mask frame by the reverse force device according to the deformation quantity function and the loading parameters of the reverse force device, wherein the loading parameters of the reverse force device comprise the number of the preloaded reverse force devices, the installation position and the corresponding applied reverse force.
And 5, fitting the mask frame deformation quantity I by adopting a fitting function of the mask frame deformation quantity II to obtain the reverse force applied to the mask frame by each reverse force device in the fitting function.
And 6, after welding one mask plate, repeatedly executing the steps 3-5, and sequentially obtaining the magnitude of the reverse force which needs to be applied to the mask frame by each reverse force device before welding each fine metal mask plate.
The whole net stretching process is realized by sequentially welding each fine metal mask, so that before each pair of fine metal masks is welded, corresponding deformation quantity I caused by all the fine metal masks which are not welded to the mask frame needs to be calculated, and then a preloaded reverse force device is obtained again based on the deformation quantity to enable the mask frame to generate a new deformation quantity II, namely the mask frame needs to be loaded and adjusted for multiple times through the reverse force device in the net stretching process, and the loading times are equal to the total number of the fine metal masks which need to be welded.
The invention provides a method for loading reverse force in a tensioning device, which is based on a mask frame with given size and material mechanical property, obtains a deformation function of a deformation variable value, the magnitude of applied force and the position of applied force related to the deformation variable function through mechanical simulation, and predicts the deformation of the mask frame caused by a fine metal mask to be welded based on the deformation function and tensioning process parameters; establishing a model of the deformation of the mask frame caused by the loaded reverse force by combining the loading parameters of the reverse force device; and finally, rapidly calculating in a data fitting mode to obtain the magnitude of the reverse force required to be applied when each mask plate is tensioned, obtaining the optimal solution of the reverse force loaded by the reverse force device, and rapidly and accurately determining the optimal solution of the whole tensioning network.
Example 1
Embodiment 1 provided by the present invention is an embodiment of a method for loading a reverse direction in a tensioning device provided by the present invention, and as shown in fig. 6, is a flowchart of an embodiment of a method for loading a reverse direction in a tensioning device provided by the present invention, and as can be seen by referring to fig. 5 and fig. 6, the embodiment includes:
step 1, obtaining a deformation function of a mask frame through mechanical simulation.
Preferably, as shown in fig. 7, which is a schematic diagram of the deformation generated by applying force to the mask frame provided by the present invention, the deformation function of the mask frame obtained through mechanical simulation is:
。
wherein the content of the first and second substances,
for the amount of deformation occurring at different positions x of the mask frame,
in order for the location of the external force to be applied,
in order to apply the magnitude of the external force,
representing the position impact factor.
For the mask frame with given size and material mechanical property, applying force to the mask frame at any position in the long edge direction of the mask frame in a mechanical simulation mode to obtain any position of the long edge of the mask frame
To exert a pair of external forces
Amount of deformation of mask frame
Obtaining different positions x and deformation of the mask frame
Functional relationship of (a):
。
further, all the different positions in the long side direction of the mask frame
Repeating the above operations to obtain different positions on the mask frame
Exert a pair of external forces
After that, the mask frame is notCo-located
Amount of deformation of
。
And 2, acquiring the stretching parameters of each fine metal mask plate to be welded based on the known stretching process setting, wherein the stretching parameters comprise the position distribution and the stretching force of all mask plates needing stretching welding.
Preferably, the method for obtaining the position of each fine metal mask to be welded includes:
the position distribution range of the ith to-be-welded fine metal mask is obtained
。
And 3, determining the deformation quantity I of the mask frame caused by all the unwelded fine metal masks according to the deformation quantity function tensioning parameters.
Further, the process of determining the deformation amount one includes:
by using masksDeformation function of membrane frame
Calculating the deformation quantity of the ith fine metal mask plate to the mask frame
；
And the acting force of the ith fine metal mask plate on the mask frame is obtained according to the preset tension of the stretching net.
Calculating the deformation quantity I of the mask frame caused by all the unwelded fine metal masks before the m-th fine metal mask is welded
；
Representing the total number of fine metal reticles to be soldered. For example, before the 1 st fine metal mask is welded, the deformation quantity, which will be caused to the mask frame by all the M fine metal masks to be welded, is calculated to be one
。
And 4, acquiring a fitting function of the pre-loaded reverse force device to enable the mask frame to generate a second deformation amount according to the deformation amount function and the loading parameters of the pre-loaded reverse force device, wherein the loading parameters of the pre-loaded reverse force device comprise the number of the pre-loaded reverse force devices, the installation positions of the pre-loaded reverse force devices and the magnitude of the corresponding applied reverse force.
In the embodiment of the invention, the common setting
For a symmetrically arranged preloaded counter-force device, an exemplary, left-right symmetric counter-force device is provided, as shown in fig. 2 and 3, with 5 pairsAnd applying a pair of pressures which are same in size and opposite in direction to the force devices, wherein any pair of symmetrical opposite force devices is used for pressing the mask frame, so that the mask frame can keep the relative position unchanged and generate certain compression deformation.
Specifically, the process of obtaining the fitting function of the deformation quantity two generated by the mask frame by the pre-loaded counter force device comprises the following steps:
preferably, the deformation function of the mask frame is used
Before the m-th fine metal mask plate is welded, the j-th counter-force device respectively deforms the two opposite long edges of the mask frame at different positions
，
Is the position coordinate of the j-th pair of counter force devices,
showing the magnitude of the force exerted by the j-th pair of counter-force devices on the mask frame before the m-th fine metal mask is welded by the counter-force devices.
Establishing a fitting function of a second deformation quantity of all pre-loading reverse force devices to the mask frame before the m-th fine metal mask plate is welded, wherein the second deformation quantity is as follows:
. For example, before welding the 1 st fine metal mask, the fitting function of all N pairs of deformation amounts of the pre-loaded counter force device to the mask frame is:
。
and 5, fitting the mask frame deformation quantity I by adopting a fitting function of the mask frame deformation quantity II to obtain the value of the reverse force applied by each reverse force device in the fitting function.
In the embodiment of the invention, a reverse force device is adopted to simulate the deformation influence of a fine metal mask which is not welded on a mask frame on the mask frame, namely, a reverse force device is used to set a certain reverse force for the mask frame before the expanded mesh is welded, and the deformation of the mask frame caused by the reverse force is as close as possible to the deformation quantity one of the mask frame calculated in the step 2
。
Specifically, a pre-loaded counter force device is adopted to enable the deformation quantity of the mask frame to generate a fitting function of two
For the mask frame with known specific value, the deformation amount is one
Fitting the data to meet the requirement as far as possible
By application of force from respective counter-force means
I.e. the force exerted by the jth counter-force device on the mask frame is of the magnitude of
（ 
). Illustratively, a fitting function of N pairs of deformation amounts of a pre-loaded counter-force device to a mask frame is used before welding a 1 st fine metal mask
For the mask frame with known specific value, the deformation amount is one
Fitting the data to meet the requirement as far as possible
While each counter-force device applies force to the mask frame
The value of (c).
When the fine metal mask plate is welded and installed, the installation positions of the counter force devices are determined, so that the force application size of each counter force device can be calculated according to the determined installation positions.
And 6, after welding a mask plate, repeatedly executing the steps 3-5 to obtain the corresponding reverse force required to be applied to the mask frame by each reverse force device.
In the process of stretching the net, a first strip of fine metal mask is welded firstly, and the reverse force applied for the first time by the reverse force device is obtained according to the steps
And then, before the welding installation of the rest fine metal masks, the steps 3-5 can be repeatedly executed to obtain the corresponding reverse force applied by each reverse force device
And the magnitude value can obtain more accurate results through real-time feedback data.
Illustratively, after a certain net tension is applied to two sides of the 1 st fine metal mask plate, aligning and welding the two sides on the mask frame, and before the 2 nd fine metal mask plate is welded, repeating the steps 3-5 to obtain the force applied by each reverse force device to the mask frame
. Specifically, the deformation quantity one caused to the mask frame by the remaining 2 nd to M (M-1 total) fine metal masks which are not welded is obtained
。
The position coordinates of the N pairs of preloaded counter-force devices are
（
) Each counter-force device applies a force to the mask frame of
（
). Using function of deformation
The deformation quantity of the mask frame caused by the jth reverse force device can be obtained
Deformation quantity of mask frame caused by all reverse force devices before 2 nd metal mask plate mesh welding
。
To be provided with
As a fitting function, of
For known experimental data, the data fitting method is used to obtain the data fitting method which satisfies the requirement as much as possible
While each counter-force device applies force to the mask frame
（ 
) The value of (1), i.e., the magnitude of the force applied to the mask frame by the jth counter-force device when the 2 nd fine metal mask has not yet been welded
（ 
）。
In turn order
Repeating the following steps:
by analogy, after applying a certain net tension to the two sides of the M-1 th fine metal mask plate, aligning and welding the M-1 th fine metal mask plate on the mask frame, obtaining the deformation quantity of the mask frame caused by the rest M-M +1 (M-M + 1) th unsoldered fine metal mask plates
Before the mth fine metal mask plate is welded on the expanded screen, a certain reverse force needs to be set for the mask frame by a reverse force device, and the deformation of the mask frame caused by the reverse force needs to be as close as possible to the deformation of the mask frame
。
The position coordinates of the N pairs of counter force devices are
（
) Each counter-force device applies a force to the mask frame of magnitude
（
). Using function of deformation
The deformation quantity of the mask frame caused by the jth reverse force device can be obtained
Deformation of mask frame by all counter-force devices before screen welding
。
To be provided with
Is a fitting function used in fitting to
For known experimental data, the data fitting method is used to obtain the data fitting method which satisfies the requirement as much as possible
Each parameter of
（
) The value of (1), i.e. the magnitude of the force exerted by the jth counter-force device on the mask frame when the mth fine metal mask has not been welded
（ 
）。
Completing the cycle of repeating steps 3-5 (
) Then, the M-1 th fine metal mask is welded, and the last fine metal mask is left, wherein the reverse force is
(ii) a After the last fine metal mask plate to be welded is stretched, aligned and welded on the mask frame, all the remaining reverse force is completely removed, the magnitude of the reverse force is just zero at the moment, namely after all the screen tensioning processes are finished, the reverse force device does not apply any force on the mask frame.
In the embodiment of the method for loading the reverse force in the screen tensioning equipment, firstly, a deformation function of a mask frame is obtained in advance in a mechanical simulation mode, and then the deformation function of the mask frame is utilized to predict the deformation of a fine metal mask to be welded to the mask frame in combination with confirmed process parameters before the screen tensioning; then, establishing a model of the deformation of the mask frame caused by the loaded reverse force by similarly utilizing the deformation function of the mask frame and combining the loading parameters of the reverse force device; finally, rapidly calculating in a data fitting mode to obtain the magnitude of the reverse force to be applied when each step of net opening is carried out, and obtaining the optimal solution of the reverse force loaded by the reverse force device; and according to the comparison of the influence of the fitted reverse force on the deformation of the mask frame and the influence of the fine metal mask on the deformation of the mask frame, the optimal position and number of the reverse force device group are found, and a basis is provided for setting and installing the reverse force device in the net-tensioning equipment.
The deformation function of the mask frame represents the mathematical relationship between the magnitude of the deformation generated by the mask frame after the external force is applied to the mask frame, the magnitude of the applied force and the position of the applied force. The net-opening process parameters comprise: the width, welding position, net tensioning force, the number of the fine metal masks to be welded and the net tensioning sequence of each fine metal mask. The loading parameters of the counter force device include the number of pre-loaded counter force devices, the installation position and the magnitude of the applied counter force.
The data fitting refers to a process of simulating known target data by finding a fitting function and finally solving unknown parameters in the fitting function. The process in the embodiment of the invention comprises the following steps:
and calculating the deformation of the mask frame caused by sequentially welding different fine metal mask plates in the process of stretching the screen by using the deformation function of the mask frame, and taking the deformation as target data. And calculating a fitting function of the deformation quantity of the mask frame caused by the reverse force device by using the deformation quantity function of the mask frame. The magnitude of the reverse force device is used as an unknown parameter. And solving the magnitude of the reverse force device in different welding stages through a mathematical mode of data fitting, namely an optimal solution of the magnitudes of the reverse forces in different welding stages.
The number and the position of the reverse force devices are different, the application effect of the reverse force is influenced, the influence of the magnitude of the reverse force, which is obtained by fitting the number and the position of the reverse force devices at different times, on the deformation of the mask frame is obtained through data fitting, and the optimal position and the optimal number of the reverse force device set are found according to the comparison of the magnitude of the fitted reverse force on the deformation of the mask frame and the deformation of the fine metal mask on the mask frame. After combining the method of data fitting in the present invention, it was found by comparison that:
if 3 pairs of counter force devices are selected, the optimal position is the position (0.15,0.5 and 0.85) times of the length of the long edge of the inner frame of the mask frame, and the optimal distribution range is +/-0.02 times of the length of the mask frame near the optimal position.
If 4 pairs of counter force devices are selected, the optimal position is (0.1,0.34,0.66,0.9) times of the length of the long edge of the inner frame of the mask frame, and the optimal distribution range is +/-0.05 times of the length of the mask frame near the optimal position.
If 5 pairs of counter force devices are selected, the optimal position is (0.08,0.26,0.5,0.74,0.92) times the length of the long edge of the inner frame of the mask frame, and the optimal distribution range is +/-0.05 times the length of the mask frame near the optimal position.
If 7 pairs of counter force devices are selected, the optimal position is (0.05,0.12,0.29,0.5,0.71,0.88 and 0.95) times the length of the long edge of the inner frame of the mask frame, and the optimal distribution range is +/-0.05 times the length of the mask frame near the optimal position.
For the current stage of net opening requirements, when 4-7 pairs of loaded reverse force devices are arranged, the selectable range of the loading positions of the reverse force devices can be larger, and the optimal solution of the reverse force is easy to find.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (9)
1. A method of loading a reverse force in a screening apparatus, the method comprising:
step 1, obtaining a deformation function of a mask frame, wherein the deformation function represents the mathematical relationship between the size of a deformation generated after an external force is applied to the mask frame and the size and position of the applied force;
step 2, acquiring the screen tensioning parameters of each mask to be welded, wherein the screen tensioning parameters comprise the position of the mask and the screen tensioning force;
step 3, determining a first deformation quantity of the mask frame caused by all unwelded masks according to the deformation quantity function and the tensioning parameters;
step 4, acquiring a fitting function of a second deformation quantity generated by the mask frame by the reverse force device according to the deformation quantity function and loading parameters of the reverse force device, wherein the loading parameters of the reverse force device comprise the number of pre-loaded reverse force devices, the installation positions and the corresponding applied reverse force magnitude;
step 5, fitting the mask frame deformation quantity I by adopting a fitting function of a mask frame deformation quantity II to obtain the magnitude of the reverse force applied to the mask frame by each reverse force device in the fitting function;
and 6, after welding one mask plate, repeatedly executing the steps 3-5, and sequentially obtaining the magnitude of the reverse force which needs to be applied to the mask frame by each reverse force device before welding each mask plate.
2. The method according to claim 1, wherein the deformation function of the mask frame obtained in step 1 through mechanical simulation is:
；
wherein the content of the first and second substances,
for different positions of the mask frame
The amount of deformation that occurs at the site,
f is the magnitude of the applied external force for the position where the external force is applied,
representing the position impact factor.
3. The method of claim 2, wherein the step 2 of obtaining the position of each reticle to be welded comprises:
the position distribution range of the ith to-be-welded mask plate is obtained as
；
4. The method of claim 3, wherein the step 3 of determining the deformation amount one comprises:
calculating the deformation quantity of the mask frame caused by the ith mask plate
；
Representing the acting force of the ith mask plate on the mask frame, which is obtained according to the preset tension of the tensioning net;
calculating the deformation quantity I of the mask frame caused by all the unwelded masks before the m-th mask is welded
(ii) a M represents the total number of reticles to be soldered.
5. The method of claim 2, wherein the step 4 of obtaining the fitting function comprises:
the reverse force devices are N pairs which are symmetrically arranged, before the mth mask plate is welded, the jth pair of the reverse force devices respectively deform different positions on two opposite long edges of the mask frame
；
，
Is the position coordinate of the j-th pair of counter force devices,
showing the magnitude of force respectively applied to the mask frame by the jth pair of reverse force devices before the mth mask plate is welded by the reverse force devices;
establishing a fitting function of the deformation quantity two of the mask frame caused by all the preloaded reverse force devices before the mth piece of the mask plate is welded, wherein the fitting function is as follows:
6. the method according to claim 5, wherein the step 5 of obtaining the magnitude of the reverse force exerted on the mask frame by each of the reverse force devices in the fitting function comprises:
for the deformation quantity one of the mask frame with known specific value
Fitting the data to meet the requirement as far as possible
By the force exerted by each of said counter-force means
The value of (c).
7. The method according to any one of claims 1 to 6, wherein the optimal position and logarithm of the reverse force device are determined according to the comparison between the magnitude of the reverse force applied by the reverse force device which is subjected to one or more fitting and the influence of the mask plate on the deformation of the mask frame.
8. The method of claim 7, wherein the optimal number of counter force devices is in the range of 3-7 pairs.
9. The method of claim 7,
when the number of the reverse force devices is 3 pairs, the optimal position of the reverse force device is a position (0.15,0.5,0.85) times of the length of the long edge of the inner frame of the mask frame, and the optimal solution distribution range is +/-0.02 times of the length of the mask frame near the optimal position;
when the number of the reverse force devices is 4 pairs, the optimal position of the reverse force devices is the position (0.1,0.34,0.66 and 0.9) times of the length of the long edge of the inner frame of the mask frame, and the optimal distribution range is +/-0.05 times of the length of the mask frame near the optimal position;
when the number of the reverse force devices is 5 pairs, the optimal position of the reverse force device is the position (0.08,0.26,0.5,0.74 and 0.92) times of the length of the long edge of the inner frame of the mask frame, and the optimal distribution range is +/-0.05 times of the length of the mask frame near the optimal position;
when the number of the reverse force devices is 7 pairs, the optimal position of the reverse force devices is the position (0.05,0.12,0.29,0.5,0.71,0.88 and 0.95) times of the length of the long edge of the inner frame of the mask frame, and the optimal solution distribution range is +/-0.05 times of the length of the mask frame near the optimal position.
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