CN112428464B - Single crystal bar connects material feeding unit - Google Patents
Single crystal bar connects material feeding unit Download PDFInfo
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- CN112428464B CN112428464B CN202011449357.XA CN202011449357A CN112428464B CN 112428464 B CN112428464 B CN 112428464B CN 202011449357 A CN202011449357 A CN 202011449357A CN 112428464 B CN112428464 B CN 112428464B
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- feeding
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- 239000000463 material Substances 0.000 title claims abstract description 61
- 239000013078 crystal Substances 0.000 title claims description 44
- 230000007246 mechanism Effects 0.000 claims abstract description 115
- 238000006073 displacement reaction Methods 0.000 claims abstract description 25
- 230000008093 supporting effect Effects 0.000 claims abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 57
- 229910052710 silicon Inorganic materials 0.000 claims description 57
- 239000010703 silicon Substances 0.000 claims description 57
- 239000010985 leather Substances 0.000 claims description 45
- 238000001514 detection method Methods 0.000 claims description 22
- 230000033001 locomotion Effects 0.000 claims description 18
- 230000002457 bidirectional effect Effects 0.000 claims description 17
- 230000001050 lubricating effect Effects 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 4
- 238000005253 cladding Methods 0.000 claims 2
- 239000011257 shell material Substances 0.000 claims 1
- 238000005520 cutting process Methods 0.000 abstract description 21
- 230000001681 protective effect Effects 0.000 description 27
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 18
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 6
- 238000005461 lubrication Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
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- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention relates to the technical field of hard and brittle material cutting, in particular to a receiving and feeding device, which comprises a round bar clamping mechanism, a round bar displacement driving mechanism, a square bar receiving mechanism, a square bar displacement driving mechanism, a feeding sliding frame and a bottom frame; the round bar clamping mechanism comprises a round bar clamping unit, a roller support frame, a two-axis sliding frame and a clamping unit moving driving assembly, wherein the roller support frame is fixed on the two-axis sliding frame; the round bar displacement driving mechanism is used for driving the two-axis supporting frame to move in a feeding way along the horizontal direction; the square rod receiving mechanism is arranged on the feeding sliding frame. In this scheme transport efficient, the centre gripping is stable, and the security is higher.
Description
Technical Field
The invention relates to the technical field of cutting of hard and brittle materials, in particular to a single crystal bar material receiving and feeding device.
Background
The utility model ZL201821888906.1 in China discloses a single crystal silicon rod squaring clamping device, in the scheme, a round rod before single crystal silicon rod cutting and a rod moving mechanism behind squaring cutting are integrally arranged, the structure is simple, but because bar clamping and transferring are positioned above equipment, bar clamping and transferring are required to be carried out for a long distance, in the process, if the clamping mechanism fails, workpiece damage is easy to cause, and the safety coefficient is low. And the clamping jaw position can not be adjusted along the axis, so that the center of the monocrystalline silicon rod is difficult to quickly position during grabbing, repeated adjustment is needed, and the efficiency is low. Moreover, the protection structure of the existing round bar clamping mechanism is unreasonable, and because the silicon crystal bars can be sprayed with liquid and cut scraps in the processing process, the situation of rust and blockage in the driving layout of the round bar clamping driving unit is very easy to cause, and the normal operation of the whole equipment is influenced.
In addition, in the scheme of the utility model, after the monocrystalline silicon rod is subjected to squaring and cutting, the monocrystalline silicon rod is firstly rotated by 45 degrees so as to be convenient for a manipulator to clamp, and the safety coefficient is low.
In addition, in the scheme of the utility model, the leather receiving mechanism is arranged on a frame of the cutting operation wheel train, after the square cutting of the monocrystalline silicon rod is completed, the leather clamped by the leather clamping mechanism can be loosened along with the cutting operation wheel train, the leather falls on the material receiving baffle freely, and the leather is collected and cleaned manually after a certain amount of leather is accumulated. With the current silicon crystal bar material cut larger and larger, the leather material generated with the silicon crystal bar material is heavier and heavier, and if the collection structure is adopted, the following problems are generated: firstly, the impact force is large when the device falls freely, equipment is damaged, and the cutting precision of the square can be influenced after the device is used for a long time; second, manual collection of waste is time consuming and laborious.
Disclosure of Invention
Therefore, it is necessary to provide a single crystal bar material receiving and feeding device to solve the problems of long transfer time and lower safety factor of the existing single crystal silicon bar cutting equipment that the clamping of the round bar before single crystal silicon bar cutting and the square bar after the square bar is opened is carried out material receiving and feeding through an integrated grabbing device.
In order to achieve the above object, the inventors provide a single crystal bar receiving and feeding device, which comprises a round bar clamping mechanism, a round bar displacement driving mechanism, a square bar receiving mechanism, a square bar displacement driving mechanism, a feeding sliding frame and a bottom frame, wherein the round bar clamping mechanism and the square bar receiving mechanism are respectively positioned at two sides of the bottom frame;
the round bar clamping mechanism comprises a round bar clamping unit, a roller support frame, two shaft sliding frames and a clamping unit moving driving assembly, wherein the roller support frame is fixed on the two shaft sliding frames, the two shaft sliding frames comprise an upper sliding frame, an upper sliding assembly, a lower sliding frame and a lower sliding assembly, the upper sliding assembly is arranged at the top of the upper sliding frame along the vertical direction, the upper sliding frame is fixed on the lower sliding frame, the lower sliding frame is assembled on a bottom frame through the lower sliding assembly arranged along the horizontal direction, the round bar clamping unit is fixed with the upper sliding assembly, a left clamping jaw and a right clamping jaw of the round bar clamping unit are respectively positioned at two sides of the roller support frame, and the clamping unit moving driving assembly is used for driving the round bar clamping unit to move along the vertical direction on the upper sliding assembly;
The round bar displacement driving mechanism is used for driving the two-axis supporting frame to move in a feeding manner along the horizontal direction;
the square rod receiving mechanism is arranged on the feeding sliding frame, and the feeding sliding frame is assembled on the underframe;
The square rod displacement driving mechanism is used for driving the feeding sliding frame to move in a feeding mode along the horizontal direction.
As a preferable structure of the invention, the round bar clamping unit comprises round bar clamping jaws, clamping jaw sliding seats, a mounting bottom plate, a protection outer cover and a clamping jaw driving assembly, wherein the round bar clamping jaws comprise left clamping jaws and right clamping jaws, the left clamping jaws and the right clamping jaws are respectively fixed on the two clamping jaw sliding seats, the protection outer cover is arranged on the mounting bottom plate to form a containing cavity, the protection outer cover comprises a protection cover plate and two protection side plates, the protection cover plate is a rectangular body with an open bottom surface, the protection cover plate is covered on the protection side plates, the protection side plates are connected with the mounting bottom plate, a sliding gap is arranged between the protection side plates and the protection cover plate, the clamping jaw sliding seats are slidably sleeved on the protection cover plate through the sliding gap, the clamping jaw driving assembly comprises a bidirectional screw rod, a movable slide block and a clamping jaw driving motor, the bidirectional screw rod is arranged in the containing cavity, the two fixing seats are respectively connected with opposite thread sections of the bidirectional screw rod through the movable slide block, and the clamping jaw driving motor is in transmission connection with the bidirectional screw rod.
As a preferable structure of the invention, the round bar clamping units are two groups, and the two groups of round bar clamping units are fixed with the upper sliding component.
As a preferable structure of the invention, the square rod receiving mechanism comprises a long roller support, a jacking driving unit and a pressure detection sensor, wherein the telescopic end of the jacking driving unit is connected with the bottom surface of the long roller support and is used for driving the long roller support to move up and down, and the pressure detection sensor is arranged on the long roller support and is used for detecting the jacking pressure when the silicon square rod contacts with the long roller support.
As an optimized structure of the square rod receiving mechanism, the square rod receiving mechanism further comprises a jacking sliding unit and a sliding mechanism mounting plate, wherein the jacking sliding unit comprises a jacking sliding shaft and a jacking sliding sleeve, the jacking sliding shaft is fixed on the sliding mechanism mounting plate, the jacking sliding shaft is sleeved in the jacking sliding sleeve in a sliding manner, and the top end of the jacking sliding shaft is connected with the bottom of the long roller bracket.
As a preferable structure of the invention, the jacking sliding unit further comprises a lubricating piece and a sealing gasket, wherein the lubricating piece is sleeved outside the jacking sliding shaft and fixed with the jacking sliding sleeve, two ends of an inner cavity of the lubricating piece are provided with lubricating grooves, and the sealing gasket is arranged outside the lubricating grooves.
As an optimized structure of the invention, the material receiving and sending device further comprises a material receiving mechanism, wherein the material receiving mechanism is arranged on the feeding sliding frame and is positioned on the same side of the square rod receiving mechanism, the material receiving mechanism comprises a material conveyer, limiting plates and first material receiving baffles, the material conveyer is provided with a conveying platform, the limiting plates are arranged on two sides of the conveying platform, the limiting plates are provided with long slots arranged along the conveying direction, two side walls of the first material receiving baffles are locked on the limiting plates through fastening screws, the first material receiving baffles transversely span the conveying platform, a material passing gap is reserved between the first material receiving baffles and the conveying platform, and the first material receiving baffles are provided with material receiving inclined planes.
As a preferable structure of the invention, the leather receiving mechanism further comprises a second material receiving baffle plate, wherein the second material receiving baffle plate is fixed on one side of the limiting plate, the second material receiving baffle plate stretches across the conveying platform and has a movement gap with the conveying platform, and the second material receiving baffle plate is provided with a material receiving inclined plane.
As a preferable structure of the invention, the leather receiving mechanism further comprises a leather detecting sensor, and the leather detecting sensor is arranged on a limiting plate in front of the first receiving baffle.
As a preferable structure of the invention, the underframe is provided with a feeding moving slide rail, and the two-axis sliding frame and the sliding frame are both assembled on the feeding moving slide rail.
Compared with the prior art, the technical scheme has the following advantages: the invention relates to a single crystal bar receiving and feeding device, which comprises a round bar clamping mechanism, a round bar displacement driving mechanism, a square bar receiving mechanism, a square bar displacement driving mechanism, a feeding sliding frame and a bottom frame, wherein an opened single silicon crystal bar, namely a silicon wafer bar, is firstly placed on a roller support frame of the round bar clamping mechanism, and when feeding and conveying are required, the round bar clamping unit clamps the silicon wafer bar, so that falling is prevented in the conveying process. The setting of diaxon carriage for when cutting pay-off, feed the slip along the horizontal direction under the drive of round bar displacement actuating mechanism, and then realize round bar clamping unit and follow horizontal direction feed motion, the clamping unit removes drive assembly simultaneously and can drive round bar clamping unit and remove along vertical direction at last slip subassembly, realizes diaxon motion, realizes the position adjustment to round bar clamping unit, so that according to the different length fast adjustment of silicon wafer stick and centre position to the silicon wafer stick of centre gripping, ensure that the centre gripping is stable. The square rod displacement driving mechanism drives the square rod receiving mechanism to move to the lower part of the square rod of the silicon crystal through the driving of the feeding sliding frame to receive and transport the square rod of the silicon crystal, thereby realizing receiving and feeding materials in the process of square cutting of the silicon crystal. In this scheme, silicon wafer stick and silicon crystal square bar in the single silicon crystal bar evolution process are transported through round bar fixture and square bar access mechanism respectively, and transport efficiency is high, and the centre gripping is stable, and the security is higher.
Drawings
FIG. 1 is a schematic diagram of a perspective view of a single crystal bar receiving and feeding device according to an embodiment;
FIG. 2 is a schematic diagram showing an oblique view of a round bar clamping mechanism in the single crystal bar receiving and feeding device according to the embodiment;
FIG. 3 is a schematic diagram showing an oblique view of the round bar clamping unit according to the embodiment;
FIG. 4 is a schematic cross-sectional view of the round bar holding unit according to the embodiment;
fig. 5 is a schematic diagram of a perspective view of a roller support frame in the round bar clamping mechanism according to the embodiment;
FIG. 6 is a schematic diagram of an oblique view of the square bar receiving mechanism before receiving materials in the embodiment;
FIG. 7 is a schematic diagram of an oblique view of the square bar receiving mechanism according to the embodiment;
FIG. 8 is a schematic cross-sectional view of the square bar receiving mechanism according to the embodiment;
Fig. 9 is an oblique view of the leather receiving mechanism in the embodiment.
Reference numerals illustrate:
100. Round bar clamping mechanism;
110. A round bar clamping unit;
111. round bar clamping jaws; 1111. a sensor; 1112. a cushion block;
112. A clamping jaw sliding seat;
113. a mounting base plate;
114. a protective outer cover; 1141. a receiving chamber; 1142. a protective cover plate; 1143. a protective side plate; 1144. a first riser; 1145. a sloping plate; 1146. a second riser;
115. A jaw drive assembly; 1151. a two-way screw rod; 1152. moving the slide block; 1153. a jaw drive motor; 1154. the clamping jaw moves the slide rail;
116. a sliding gap;
117. An end plate;
120. a roller support;
121. an axial limiting block A;
122. A detection sensor;
130. a two-axis sliding frame;
131. An upper carriage;
132. an upper slide assembly;
133. A lower carriage;
134. A lower slide assembly;
140. The clamping unit moves the driving assembly;
200. A round bar displacement driving mechanism;
300. A square rod receiving mechanism;
310. a long roller bracket;
311. a lateral limiting block;
312. An axial limiting block B;
320. A jack-up driving unit;
330. A pressure detection sensor;
340. A jack-up sliding unit;
341. Jacking the sliding shaft;
342. Jacking the sliding sleeve;
343. A lubricating member;
344. A sealing gasket;
350. A sliding mechanism mounting plate;
360. A buffer;
400. a square bar displacement driving mechanism;
500. A feed carriage;
600. A chassis;
610. Feeding a movable slide rail;
700. A leather receiving mechanism;
710. a sheath material conveyor;
711. A conveying platform;
720. a limiting plate;
721. A long slot;
730. A first material receiving baffle;
731. a material receiving inclined plane;
740. A fastening screw;
750. a material passing gap;
760. a second material receiving baffle;
770. A leather detection sensor;
780. and a receiving hole.
Detailed Description
In order to describe the technical content, constructional features, achieved objects and effects of the technical solution in detail, the following description is made in connection with the specific embodiments in conjunction with the accompanying drawings.
Referring to fig. 1 to 9, the present invention provides a single crystal bar receiving and feeding device, which includes a round bar clamping mechanism 100, a round bar displacement driving mechanism 200, a square bar receiving mechanism 300, a square bar displacement driving mechanism 400, a feeding carriage 500 and a bottom frame 600, wherein the round bar clamping mechanism 100 and the square bar receiving mechanism 300 are respectively located at two sides of the bottom frame 600;
The round bar clamping mechanism 100 comprises a round bar clamping unit 110, a roller support frame 120, a two-axis sliding frame 130 and a clamping unit moving driving assembly 140, wherein the roller support frame 120 is fixed on the two-axis sliding frame 130, the two-axis sliding frame 130 comprises an upper sliding frame 131, an upper sliding assembly 132, a lower sliding frame 133 and a lower sliding assembly 134, the upper sliding assembly 132 is arranged at the top of the upper sliding frame 131 along the vertical direction, the upper sliding frame 131 is fixed on the lower sliding frame 133, the lower sliding frame 133 is assembled on the underframe 600 through the lower sliding assembly 134 arranged along the horizontal direction, the round bar clamping unit 110 is fixed with the upper sliding assembly 132, a left clamping jaw and a right clamping jaw of the round bar clamping unit 110 are respectively positioned at two sides of the roller support frame 120, and the clamping unit moving driving assembly 140 is used for driving the round bar clamping unit 110 to move along the vertical direction at the upper sliding assembly 132; the roller support 120 is used for placing the monocrystalline silicon rod to be processed, namely the silicon wafer rod, and plays a role in auxiliary clamping. The round bar clamping unit 110 clamps the silicon wafer bar when feeding and conveying are needed after the silicon wafer bar is placed on the roller supporting frame 120, and prevents the silicon wafer bar from falling off in the conveying process. Specifically, the clamping unit moving driving assembly 140 is a driving device composed of a motor and a ball screw.
The round bar displacement driving mechanism 200 is used for driving the two-axis support frame to move in a feeding manner along the horizontal direction;
the square bar receiving mechanism 300 is arranged on the feeding sliding frame 500, and the feeding sliding frame 500 is assembled on the bottom frame 600;
The square bar displacement driving mechanism 400 is used for driving the feeding carriage 500 to move in a horizontal direction. Preferably, the chassis is provided with a feeding slide rail 610, and the two-axis sliding frame and the sliding frame are both assembled on the feeding slide rail 610.
The receiving and feeding device for single crystal bar stock comprises a round bar clamping mechanism 100, a round bar displacement driving mechanism 200, a square bar receiving mechanism 300, a square bar displacement driving mechanism 400, a feeding sliding frame 500 and a bottom frame 600, wherein an opened single silicon crystal bar, namely a silicon wafer bar, is firstly placed on a roller support frame 120 of the round bar clamping mechanism 100, and when feeding and conveying are required, the round bar clamping unit 110 clamps the silicon wafer bar, so that falling is prevented in the conveying process. The setting of diaxon carriage 130 for when cutting pay-off, feed the slip along the horizontal direction under the drive of round bar displacement actuating mechanism 200, and then realize round bar clamping unit 110 along horizontal direction feed motion, clamping unit removes actuating assembly 140 simultaneously and can drive round bar clamping unit 110 and remove along vertical direction at last slip subassembly 132, realizes diaxon motion, realizes the position adjustment to round bar clamping unit 110, so that according to the different length fast adjustment of silicon wafer stick and centre position to the silicon wafer stick of centre position is held to the centre gripping, ensures that the centre gripping is stable. After the square silicon wafer rod is cut, the square silicon wafer rod is formed, the square rod displacement driving mechanism 400 drives the square rod receiving mechanism 300 to move to the lower part of the square silicon wafer rod through the feeding sliding frame 500, and the square silicon wafer rod is received and transported, so that receiving and feeding materials in the process of square silicon single crystal rod cutting are realized. In this scheme, silicon wafer stick and silicon crystal square rod in the single silicon crystal rod evolution process are transported through round rod fixture 100 and square rod access mechanism 300 respectively, and transport efficiency is high, and the centre gripping is stable, and the security is higher.
Referring to fig. 2 to 4, as a preferred embodiment of the present invention, the round bar clamping unit 110 is mainly used for feeding and clamping a silicon wafer bar of a single crystal silicon bar before cutting. Specifically, the round bar clamping unit 110 includes a round bar clamping jaw 111, a clamping jaw sliding seat 112, a mounting bottom plate 113, a protective cover 114 and a clamping jaw driving assembly 115, the round bar clamping jaw 111 includes a left clamping jaw and a right clamping jaw, the left clamping jaw and the right clamping jaw are respectively fixed on the two clamping jaw sliding seats 112, the protective cover 114 is disposed on the mounting bottom plate 113 to form a containing cavity 1141, the protective cover 114 includes a protective cover plate 1142 and two protective side plates 1143, the protective cover plate 1142 is a rectangular body with an open bottom surface, the protective cover plate 1142 is covered on the protective side plates 1143, the protective cover plate 1142 completely covers the protective side plates 1143 to prevent spray liquid or a large amount of dust from falling into the containing cavity 1141 from above, the protective side plates 1143 are connected with the mounting bottom plate 113, the protective side plate 1143 and the protective cover plate 1142 are provided with a sliding gap 116, the clamping jaw sliding seat 112 is slidably sleeved on the protective cover plate 1142 through the sliding gap 116, the clamping jaw driving assembly 115 comprises a bidirectional screw rod 1151, a movable sliding block 1152 and a clamping jaw driving motor 1153, the bidirectional screw rod 1151 is arranged in the accommodating cavity 1141, the two clamping jaw fixing seats are respectively connected with opposite thread sections of the bidirectional screw rod 1151 through the movable sliding block 1152, the clamping jaw driving motor 1153 is in transmission connection with the bidirectional screw rod 1151, the clamping jaw driving motor 1153 drives the bidirectional screw rod 1151 to rotate through a speed reducing motor, the movable sliding block 1152 is provided with a screw rod nut, and the rotary motion of the bidirectional screw rod 1151 is converted into linear motion, so that the round bar clamping jaw 111 is finally driven to loosen or clamp a silicon wafer rod.
The round bar clamping jaw 111 is directly used for clamping in contact with the side wall of the silicon wafer bar. The rod clamping jaw 111 includes a left clamping jaw and a right clamping jaw, and the left clamping jaw and the right clamping jaw cooperate to clamp the silicon wafer rod. Preferably, the clamping areas of the left clamping jaw and the right clamping jaw are respectively provided with a cushion block 1112. The pad 1112 is typically a soft pad 1112 such as rubber, and can prevent damage to the sidewall when the silicon wafer rod is clamped.
In this embodiment, the protection housing 114 is disposed on the mounting base 113 to form a receiving cavity 1141, the bidirectional screw rod 1151 and the moving slide block 1152 are mounted in the receiving cavity 1141, the protection cover plate 1142 of the protection housing 114 is covered on the protection side plate 1143, a sliding gap 116 is formed between the protection side plate 1143 and the protection cover plate 1142, the clamping jaw sliding seat 112 is slidably sleeved on the protection cover plate 1142 through the sliding gap 116, and the bidirectional screw rod 1151 and the moving slide block 1152 are not influenced to cooperate to drive the round bar clamping jaw 111 to move, meanwhile, the bidirectional screw rod 1151 and the moving slide block 1152 are effectively protected, and the parts are not easy to be corroded, blocked in movement and other movement faults, and the movement reliability of the equipment is high.
Referring to fig. 3 and 4, preferably, the guard side plate 1143 includes a first riser 1144, an inclined plate 1145 and a second riser 1146, the first riser 1144 is connected to the mounting base, the second riser 1146 is disposed parallel to the first riser 1144, the second riser 1146 is located in the inner cavity of the guard cover 1142, and the inclined plate 1145 connects the first riser 1144 and the second riser 1146, which may be integrally formed. The protective side plate 1143 is arranged into the structure, the structure is reasonable, the manufacturing framework is manufactured, the protective effect is better, a certain space can be reserved between the protective cover plate 1142 and the protective side plate 1143 conveniently, and the clamping jaw sliding seat 112 can be in sliding clamping connection with the sliding gap 116 between the protective side plate 1143 and the protective cover plate 1142. In a preferred embodiment, the cross section of the mounting base plate 113 has a U-shaped structure, and the protective housing 114 is fastened to the mounting base plate 113. The protective housing 114 can be installed on the mounting base plate 113, so that the protective housing is convenient to fix and beneficial to improving the protective effect. Preferably, the mounting bottom plate is a box body with an open top surface.
Referring to fig. 4, in the preferred embodiment, two ends of the accommodating chamber 1141 are further provided with end plates 117 for sealing two ends of the accommodating chamber 1141, the jaw driving motor passes through the end plates and is connected with a bi-directional screw rod in a transmission manner, and a rotating sliding sleeve is installed between the end plates of the output shaft of the jaw driving motor. The arrangement of the end plate 117 not only can further ensure the tightness of the accommodating cavity 1141, but also can prevent other impurities of the monocrystalline silicon rod from falling into the accommodating cavity 1141 to influence the work of the clamping driving mechanism.
In the embodiment shown in fig. 3, the jaw driving assembly 115 further includes a jaw moving rail 1154, and the moving slider 1152 is fixed on the jaw moving rail 1154, and the bi-directional screw 1151 rotates to drive the moving slider 1152 to move along the jaw moving rail 1154. The arrangement of the clamping jaw moving slide rail 1154 makes the movement of the round bar clamping jaw 111 more stable and the clamping of the silicon wafer bar more stable.
Referring to the embodiment shown in fig. 2, a sensor 1111 is further disposed in the middle of the left or right clamping jaw. The sensor 1111 is used to cooperate with the squaring clamping mechanism and the roller support 120 in the monocrystalline silicon rod processing device, and adjust the crystal line of the monocrystalline silicon rod and the center line position of the monocrystalline silicon rod, so as to facilitate the wire saw tool setting during squaring cutting and improve the cutting precision. Compared with the prior art, the adjusting efficiency is higher, and the adjusting device is safer and more reliable.
In a further preferred embodiment, as shown in fig. 2, the round bar clamping units are two groups, and the two groups of round bar clamping units 110 are fixed to the upper sliding assembly 132. The two groups of round bar clamping units 110 are arranged to clamp the silicon wafer bars more firmly, so that the single crystal silicon bars are more stable in cutting and feeding processes. Preferably, one end of the roller support member is further provided with an axial limiting block a121 and a detection sensor 122, the axial limiting block a121 is used for preventing the silicon wafer rod from falling out, and the detection sensor 122 is used for detecting whether the silicon wafer square rod is placed in place or not.
Referring to fig. 1, 6, 7 and 8, as a preferred embodiment of the present invention, the square bar receiving mechanism 300 includes a long roller support 310, a lifting driving unit 320, and a pressure detection sensor 330, wherein a telescopic end of the lifting driving unit is connected to a bottom surface of the long roller support 310, and is used for driving the long roller support 310 to move up and down, and the pressure detection sensor 330 is disposed on the long roller support 310, and is used for determining whether the square bar of silicon crystal is in contact with a roller supporting surface of the long roller support. The long roller support 310 is used for receiving the square silicon crystal rod, and specifically, the roller support surface of the long roller support 310 contacts with the bottom surface of the square silicon crystal rod for supporting. The jacking driving unit 320 jacks up when the silicon crystal square bar is required to be fetched, so that the long roller bracket 310 contacts with the bottom surface of the silicon crystal square bar; when the silicon crystal square bar is not required to be accessed, the lifting driving unit 320 drives the long roller bracket 310 to descend so as to perform the next silicon crystal square bar access work. When the monocrystalline square rod falls on the long roller support frame, pressure change is necessarily caused, the pressure detection sensor 330 judges that the monocrystalline square rod falls on the long roller support frame by detecting ejection pressure existing when the monocrystalline square rod contacts with the long roller support frame, so that whether the monocrystalline square rod is stably picked up or not is ensured, and the falling instability of the monocrystalline square rod when the monocrystalline square rod is released by the monocrystalline square rod opening clamping mechanism is prevented. The pressure detection sensor does not directly detect the ejection pressure, but judges that the single crystal square rod falls onto the roller support frame through detecting the ejection pressure. Specifically, the bottom surface of the single crystal square rod falls onto the rotating roller of the pressure detection sensor, and the moment detection of the pressure detection sensor is changed to the ejection pressure.
The square rod receiving mechanism 300 of the embodiment receives the silicon crystal square rod below through the long roller support 310, the receiving process is simple and safe, the long roller support 310 is driven by the jacking driving unit 320 to be contacted with or far away from the silicon crystal square rod, meanwhile, the pressure detection sensor is arranged on the long roller support to detect the ejection pressure to judge whether the silicon crystal square rod is contacted with the roller support surface of the long roller support, so that the silicon crystal square rod is ensured to stably fall on the long roller support, and the monocrystalline silicon rod opening clamping mechanism releases the silicon crystal square rod again, so that the receiving safety is greatly improved.
Referring to fig. 6 and 7, the square bar receiving mechanism 300 further includes a lifting sliding unit 340 and a sliding mechanism mounting plate 350, the lifting sliding unit 340 includes a lifting sliding shaft 341 and a lifting sliding sleeve 342, the lifting sliding shaft 341 is fixed on the sliding mechanism mounting plate 350, the lifting sliding shaft is slidably sleeved in the lifting sliding sleeve 342, and the top end of the lifting sliding shaft 341 is connected with the bottom of the long roller bracket 310. The sliding mechanism mounting plate 350 is used for mounting and fixing the lifting sliding unit 340. The lifting movable unit is arranged to enable the lifting driving unit 320 to drive the long roller support 310 to move up and down more stably, and linear lifting movement limiting is performed through the cooperation of the lifting sliding shaft 341 and the lifting sliding sleeve 342.
In the example shown in fig. 8, the jacking sliding unit 340 further includes a lubrication member 343 and a sealing pad 344, the lubrication member 343 is sleeved outside the jacking sliding shaft and is fixed to the jacking sliding sleeve 342, two ends of an inner cavity of the lubrication member 343 are provided with lubrication grooves, and the sealing pad 344 is disposed outside the lubrication grooves. Lubricating oil can be added into the lubricating piece 343 through the grease pump and the oil distributor, so that the jacking sliding shaft 341 and the jacking sliding sleeve 342 are lubricated, the use effect is ensured, and the service life of the jacking sliding unit 340 is prolonged.
Referring to fig. 8, the square bar access mechanism 300 further includes a buffer 360, the buffer 360 is fixed on the sliding mechanism mounting plate 350, and the buffer 360 is located between the long roller bracket 310 and the sliding mechanism mounting plate 350. The buffer 360 mainly plays a role of buffering and shock-absorbing, and can play a role of protecting the jacking driving unit 320.
In the preferred embodiment shown in fig. 7, the jacking driving units 320 are provided with two groups, and the telescopic ends of the two groups of jacking driving units 320 are connected with the bottom surface of the long roller bracket 310. When the two groups of jacking driving units 320 drive the long roller bracket 310 to move, the supporting force is more stable, and the supporting effect is better. While preventing the single jacking drive unit 320 from being overstressed, affecting the service life. In a specific embodiment, the jacking driving unit 320 may be a linear reciprocating device such as a cylinder, a hydraulic cylinder, or a linear motor.
Referring to fig. 6 and 7, as a preferred embodiment of the present invention, lateral limiting blocks 311 are further disposed on two sides of the long roller support 310, for preventing the silicon crystal square rod from sliding laterally. In a further preferred embodiment, the two ends of the long roller support 310 are both provided with axial limiting blocks B312 for preventing the silicon crystal square rod from sliding laterally. In some other embodiments, the roller supporting surface of the long roller support 310 is disposed obliquely, and the lower end of the long roller support 310 is provided with an axial limiting block B312. The higher end of the long roller support 310 can be of a simple open type infinite position structure, the manufacturing cost is low, and the inclination angle can be formed by only setting the roller at the higher end and the roller supporting surface, so that the monocrystal square rod can not slide out from the open end.
Referring to the preferred embodiment shown in fig. 9, the receiving and feeding device further includes a skin receiving mechanism 700, and the skin receiving mechanism 700 is used for receiving and collecting the skin generated after the single crystal silicon rod is cut. Specifically, the leather receiving mechanism is disposed on the feeding carriage 500 and is located on the same side of the square bar receiving mechanism 300, the leather receiving mechanism 700 includes a leather conveyer 710, a limiting plate 720 and a first receiving baffle 730, the leather conveyer 710 has a conveying platform 711, the limiting plate 720 is disposed on two sides of the conveying platform 711, the limiting plate 720 is provided with a slot hole 721 along the conveying direction, two side walls of the first receiving baffle 730 are locked on the limiting plate 720 through fastening screws 740, the first receiving baffle 730 spans over the conveying platform 711, a material passing gap 750 is provided between the first receiving baffle 730 and the conveying platform 711, and the first receiving baffle 730 has a receiving inclined plane 731. The height of the material passing gap 750 can be selected and set according to the thickness of the leather material in actual use.
The leather receiving mechanism 700 of this embodiment includes a leather conveyer 710, a limiting plate 720 and a first receiving baffle 730, the leather conveyer 710 has a conveying platform 711, the limiting plate 720 is disposed on two sides of the conveying platform 711, the falling leather is prevented from falling out of the conveying platform 711, a long slot hole 721 is disposed along the conveying direction is disposed on the limiting plate 720, two side walls of the first receiving baffle 730 are locked on the limiting plate 720 through fastening screws 740, the fixing position of the first receiving baffle 730 on the long slot hole 721 can be adjusted according to the specification of a monocrystalline silicon rod, the leather produced after cutting just falls on a receiving inclined plane 731 of the first receiving baffle 730, and the conveying platform moves to convey and collect the leather to the outside through a material passing gap 750 between the first receiving baffle 730 and the conveying platform 711. In this scheme first material receiving baffle 730 position is adjustable, just falls to the leather material with it and connects the position of material inclined plane 731 on, can effectively reduce the leather material and drop the impact, has guaranteed the life of leather conveyer 710, carries out the transportation substitution manual work through leather conveyer 710 simultaneously and collects, and collection efficiency is high, labour saving and time saving.
Referring to the preferred embodiment shown in fig. 9, the skin receiving mechanism 700 further includes a second receiving baffle 760, the second receiving baffle is fixed on one side of the limiting plate 720, the second receiving baffle spans over the conveying platform 711 and has a movement gap with the conveying platform 711, and the second receiving baffle 760 has a receiving inclined plane 731. Currently, more single silicon crystal bar squarers simultaneously perform bilateral squaring cutting, and two groups of rim charge clamping assemblies perform rim charge clamping. The second receiving baffle 760 is thus provided to accommodate the double-sided receiving. The second receiving baffle 760 and the conveying platform 711 have a movement gap to prevent the second receiving baffle 760 from interfering with the movement of the conveying platform 711. In actual use, the second receiving baffle 760 is firstly arranged below the leather material during installation, so that the leather material can just fall onto the receiving inclined plane 731 of the second receiving baffle 760; the position of the first receiving baffle 730 is then adjusted along the elongated slot 721 of the limiting plate 720 so that the skin can also fall exactly onto the first receiving baffle 730. Thereby being capable of more effectively reducing the falling impact of the leather material and guaranteeing the service life of the leather material conveyor 710.
Referring to fig. 9, in a preferred embodiment, the skin receiving mechanism 700 further includes a skin detecting sensor 770, and the skin detecting sensor 770 is disposed on the limiting plate 720 in front of the first receiving baffle 730. The skin detection sensor 770 is configured to release the second batch of skin after the first batch of dropped skin has passed the skin conveyor 710 a safe distance away from the first receiving baffle 730. Thus, the falling of the leather materials for the front and back times is relatively orderly, no smashing contact is made between the leather materials, fragments are not generated, a certain time difference is generated in conveying, accumulation is not generated, local weight is not too large, and the service life of the leather conveyor 710 is affected. In a preferred embodiment, the limiting plate 720 is provided with a receiving hole 780, and the skin detection sensor 770 is disposed in the receiving hole 780, so as to prevent the skin detection sensor 770 from interfering with the conveying of the skin, and meanwhile, protect the skin detection sensor 770.
Referring to fig. 9, the leather receiving mechanism 700 includes at least two elongated slots 721 on the limiting plate 720, and the elongated slots 721 are disposed at different heights of the limiting plate 720. The plurality of long slot holes 721 are provided to make the first receiving block 730 more firm when being locked by the fastening screw 740. Specifically, the leather conveyer 710 is a belt conveyer, a plate chain conveyer or a crawler conveyer, and the leather conveyer 710 can stably convey the leather.
It should be noted that, although the foregoing embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concepts of the present invention, alterations and modifications to the embodiments described herein, or equivalent structures or equivalent flow transformations made by the present description and drawings, apply the above technical solutions directly or indirectly to other relevant technical fields, all of which are included in the scope of protection of the present patent.
Claims (7)
1. The single crystal bar receiving and feeding device is characterized by comprising a round bar clamping mechanism, a round bar displacement driving mechanism, a square bar receiving and feeding mechanism, a square bar displacement driving mechanism, a feeding sliding frame and a bottom frame, wherein the round bar clamping mechanism and the square bar receiving and feeding mechanism are respectively positioned at two sides of the bottom frame;
The round bar clamping mechanism comprises a round bar clamping unit, a roller support frame, two shaft sliding frames and a clamping unit moving driving assembly, wherein the roller support frame is fixed on the two shaft sliding frames, the two shaft sliding frames comprise an upper sliding frame, an upper sliding assembly, a lower sliding frame and a lower sliding assembly, the upper sliding assembly is arranged at the top of the upper sliding frame along the vertical direction, the upper sliding frame is fixed on the lower sliding frame, the lower sliding frame is assembled on the underframe through the lower sliding assembly arranged along the horizontal direction, the round bar clamping unit is fixed with the upper sliding assembly, and the clamping unit moving driving assembly is used for driving the round bar clamping unit to move along the vertical direction on the upper sliding assembly;
The round bar displacement driving mechanism is used for driving the two-axis supporting frame to move in a feeding manner along the horizontal direction;
the square rod receiving mechanism is arranged on the feeding sliding frame, and the feeding sliding frame is assembled on the underframe;
the square rod displacement driving mechanism is used for driving the feeding sliding frame to move in a feeding mode along the horizontal direction;
The round bar clamping unit comprises round bar clamping jaws, clamping jaw sliding seats, an installation base plate, a protection outer cover and a clamping jaw driving assembly, wherein the round bar clamping jaws comprise left clamping jaws and right clamping jaws, the left clamping jaws and the right clamping jaws are respectively fixed on the two clamping jaw sliding seats, the protection outer cover is arranged on the installation base plate to form a containing cavity, the protection outer cover comprises a protection cover plate and two protection side plates, the protection cover plate is a rectangular body with an open bottom surface, the protection cover plate is covered on the protection side plates, the protection side plates are connected with the installation base plate, a sliding gap is reserved between the protection side plates and the protection cover plate, the clamping jaw sliding seats are slidably sleeved on the protection cover plate through the sliding gap, the clamping jaw driving assembly comprises a bidirectional screw rod, a movable slide block and a clamping jaw driving motor, the bidirectional screw rod is arranged in the containing cavity, the two clamping jaw fixing seats are respectively connected with opposite thread sections of the bidirectional screw rod through the movable slide block, and the clamping jaw driving motor is in transmission connection with the bidirectional screw rod.
The square rod receiving mechanism comprises a long roller support, a jacking driving unit and a pressure detection sensor, wherein the telescopic end of the jacking driving unit is connected with the bottom surface of the long roller support and used for driving the long roller support to move up and down, and the pressure detection sensor is arranged on the long roller support and used for judging whether a silicon crystal square rod is in contact with the roller supporting surface of the long roller support;
The receiving and feeding device further comprises a leather receiving mechanism, the leather receiving mechanism is arranged on the feeding sliding frame and located on the same side of the square bar receiving mechanism, the leather receiving mechanism comprises a leather conveyor, limiting plates and first receiving baffles, the leather conveyor is provided with a conveying platform, the limiting plates are arranged on two sides of the conveying platform, long slot holes are formed in the limiting plates along the conveying direction, two side walls of the first receiving baffles are locked on the limiting plates through fastening screws, the first receiving baffles stretch across the conveying platform, a passing gap is reserved between the first receiving baffles and the conveying platform, and the first receiving baffles are provided with receiving inclined planes.
2. The monocrystalline rod material receiving and feeding device according to claim 1, wherein the round rod clamping units are two groups, and both groups of round rod clamping units are fixed with the upper sliding component.
3. The monocrystalline rod material receiving and feeding device according to claim 1, wherein the square rod material receiving mechanism further comprises a jacking sliding unit and a sliding mechanism mounting plate, the jacking sliding unit comprises a jacking sliding shaft and a jacking sliding sleeve, the jacking sliding shaft is fixed on the sliding mechanism mounting plate, the jacking sliding shaft is sleeved in the jacking sliding sleeve in a sliding manner, and the top end of the jacking sliding shaft is connected with the bottom of the long roller bracket.
4. The single crystal bar material receiving and feeding device according to claim 3, wherein the jacking sliding unit further comprises a lubricating piece and a sealing pad, the lubricating piece is sleeved outside the jacking sliding shaft and fixed with the jacking sliding sleeve, lubricating grooves are formed in two ends of an inner cavity of the lubricating piece, and the sealing pad is arranged outside the lubricating grooves.
5. The monocrystalline rod material receiving and feeding device according to claim 1, wherein the shell material receiving mechanism further comprises a second material receiving baffle plate, the second material receiving baffle plate is fixed on one side of the limiting plate, the second material receiving baffle plate spans over the conveying platform and has a movement gap with the conveying platform, and the second material receiving baffle plate has a material receiving inclined plane.
6. The monocrystalline bar stock receiving and feeding device of claim 1, wherein the cladding receiving mechanism further comprises a cladding detection sensor disposed on a limiting plate in front of the first receiving baffle.
7. The monocrystalline bar stock receiving and feeding device of claim 1, wherein the chassis is provided with a feed motion slide rail, and the two-axis carriage and carriage are both mounted on the feed motion slide rail.
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| CN113306030B (en) * | 2021-05-21 | 2024-07-12 | 福州天瑞线锯科技有限公司 | Squarer |
| CN114275527A (en) * | 2022-01-04 | 2022-04-05 | 宁夏共享机床辅机有限公司 | Load transferring device with weighing function |
| CN117415683A (en) * | 2023-10-31 | 2024-01-19 | 宁夏中欣晶圆半导体科技有限公司 | Barreling method of semiconductor crystal bar barreling machine |
| CN117817869B (en) * | 2024-01-26 | 2024-06-11 | 上海强华实业股份有限公司 | Slotting device and slotting process for quartz boat grooved bars |
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| DE202017107264U1 (en) * | 2017-11-29 | 2017-12-13 | Xianyang Yuan | Faswerkzeugmagazin a mechanical processing device for bar materials |
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