CN112414671B - Fluid system component mechanical property detection device, detection system and detection method - Google Patents
Fluid system component mechanical property detection device, detection system and detection method Download PDFInfo
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- CN112414671B CN112414671B CN202011387495.XA CN202011387495A CN112414671B CN 112414671 B CN112414671 B CN 112414671B CN 202011387495 A CN202011387495 A CN 202011387495A CN 112414671 B CN112414671 B CN 112414671B
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Abstract
The invention discloses a device, a system and a method for detecting the mechanical properties of components of a fluid system, which comprises a detection table rack, wherein an uplink disturbance detection mechanism is arranged at the top of the detection table rack, an immersion unit main body mechanism and a downlink disturbance detection mechanism are arranged below the uplink disturbance detection mechanism, a supporting seat mechanism for strengthening the support and reducing the external disturbance of the mechanisms is arranged at the bottom of the detection table rack, the inherent orientation and the stress characteristic of the components of the fluid system in the fluid system are reserved by establishing an effective simulation scene of the fluid system and simultaneously detecting the mechanical properties of disturbance force or vibration of the components related to a plurality of fluid systems, and the excessive loss of effective signals of the disturbance signals due to a transmission path or a structure under a complex structure is avoided on the layout design of related sensors and flow paths, so that the sensors can quickly and accurately measure the disturbance with high precision.
Description
Technical Field
The invention relates to mechanical property detection of a fluid system component, in particular to a device, a system and a method for detecting the mechanical property of the fluid system component used in an immersion lithography machine system.
Background
In an immersion lithography system, filling and forming a fluid system with a stable flow in an immersion unit between a projection objective and a substrate are achieved by supplying and recovering an immersion liquid in the immersion unit disposed between the projection objective and the substrate. In the flowing process of a fluid system in the immersion unit, disturbance force can be generated on the projection objective lens, the substrate table for bearing the substrate and the whole photoetching machine frame, and in the gas-liquid two-phase separation process of recycling mixed gas-liquid generated by maintaining the flowing of the fluid in the immersion unit by the flow dividing block beside the immersion unit, although a vibration reduction or shock absorption structure is correspondingly arranged, disturbance force can be generated on the projection objective lens, the substrate table for bearing the substrate and the whole photoetching machine frame; the disturbance forces of the fluid system and the fluid system can change along with the flow of the fluid system, and the disturbance forces can be mutually superposed, so that the exposure and positioning processes of the photoetching machine can be obviously influenced, and the exposure quality is finally influenced, so that the detection of the mechanical property of components in the fluid system, particularly in the immersion system, needs fine design and verification detection.
Disclosure of Invention
The invention provides a detection device, a detection system and a detection method for mechanical properties of components of a fluid system, which can better simulate the working environment of an immersion lithography machine, detect the disturbance force or vibration of a plurality of components of the fluid system, improve the flowing stability of the fluid system in the lithography machine and improve the exposure quality, and aims to solve the problem that in an immersion lithography machine system, the disturbance force generated by the fluid system in the flowing process of the fluid system in the lithography machine can obviously influence the exposure and positioning processes of the lithography machine and finally influence the exposure quality.
The invention adopts the following specific technical scheme for solving the technical problems: the utility model provides a fluid system components and parts mechanical properties detection device which characterized in that: the device comprises a detection table rack, a first triaxial regulator is installed on the lower side of the top of the detection table rack, an uplink disturbance detection mechanism is fixedly connected to the lower end of the first triaxial regulator, the plane orientation of the plane where the first triaxial regulator is located is adjusted by adjusting the plane orientation of the plane where the first triaxial regulator is located, an immersion unit main mechanism and a downlink disturbance detection mechanism are arranged below the uplink disturbance detection mechanism, the positions of the centers of the uplink disturbance detection mechanism, the immersion unit main mechanism and the downlink disturbance detection mechanism are all located on the same central vertical connecting line, the lower end portion of the uplink disturbance detection mechanism extends into the inner side of the central portion of the immersion unit main mechanism, the upper end of the downlink disturbance detection mechanism abuts against the lower side of the lower end of the central portion of the immersion unit main mechanism and is spaced by a narrow slit distance, a gas-liquid two-phase classification mechanism for separating mixed gas and liquid is arranged on the outer side of the immersion unit main mechanism, the lower sides of the immersion unit main mechanism, the downlink disturbance detection mechanism and the gas-liquid classification mechanism are fixedly installed on the bottom end face of the detection table rack, a support seat mechanism for strengthening the support and reducing the external disturbance mechanism is fixedly installed below the effective fluid dynamic coupling relationship between a plurality of fluid detection systems and the fluid dynamic detection system is established, and the detection of the photoetching machine is improved, and the stability of the dynamic fluid dynamic detection system is improved.
Preferably, the uplink disturbance detection mechanism comprises a first measurement sensor and a projection objective, wherein the first measurement sensor is fixedly installed at the bottom end of the first three-axis adjuster, the bottom of the first measurement sensor is connected with the projection objective, the positions of a measurement part in the first measurement sensor and the center of the projection objective are both located on the same central vertical connecting line, and the first measurement sensor is arranged between the first three-axis adjuster and the projection objective, so that the inherent orientation and the stress characteristic of the projection objective in the fluid system are retained, excessive loss of effective signals of disturbance signals due to a transmission path or a structure under a complex structure is avoided, rapid and high-precision accurate measurement of the disturbance by the sensor is realized, and the reliability and the accuracy of simulation transmission and measurement of the fluid system on the disturbance of the projection objective are improved by practically simulating the actual working condition of the projection objective.
Preferably, the immersion unit main body mechanism comprises a simulation platform fixedly installed above the end face of the bottom of the detection platform frame, the immersion unit is installed in the center of the simulation platform and located at a position right below the projection objective, a liquid inlet flow channel, a liquid discharge flow channel and a two-phase flow discharge flow channel are arranged in the immersion unit, a liquid supply module, a liquid discharge module and a gas supply module are arranged on the outer side of the simulation platform, the liquid supply module is communicated with the liquid inlet flow channel in the immersion unit through an external pipeline, the liquid discharge module is communicated with the liquid discharge flow channel in the immersion unit through an external pipeline, and the gas supply module enables a gas injection end of the gas supply module to be in opposite communication with a narrow gap between the immersion unit main body mechanism and the downlink disturbance detection mechanism through the external pipeline, so that the real simulation effectiveness of the actual working condition of the immersion unit is improved, and the disturbance transmission detection judgment effectiveness generated by the actual working condition of the simulation immersion unit is improved.
Preferably, the descending disturbance detection mechanism comprises a substrate which is arranged below the immersion unit and is separated from the immersion unit to form the narrow slit gap, a substrate table used for holding the substrate is connected below the substrate, a second measurement sensor is fixedly connected to the lower end face of the substrate table, a measurement part in the second measurement sensor and the centers of the substrate and the substrate table are located on the same central vertical connecting line, a second three-axis adjuster is installed at the bottom of the second measurement sensor, and the bottom of the second three-axis adjuster is fixedly installed above the bottom end face of the detection table frame, so that the inherent orientation and the stress characteristics of the substrate in the fluid system are maintained, excessive loss of effective signals of disturbance signals under complex structures due to transmission paths or structures is avoided, the sensor can measure the disturbance fast and accurately, the practical working condition of the projection objective lens is simulated, and the reliability and the accuracy of the simulation transmission and the measurement of the fluid system to the substrate are improved.
Preferably, the downlink disturbance detection mechanism further comprises a plurality of laser range finders which penetrate through the simulation platform and are arranged above the substrate, the laser range finders are distributed in an annular array mode, laser emitting ends of the laser range finders can all downwards irradiate the upper end face of the substrate, multi-direction accurate measurement of the distance from the bottom end face of the immersion unit to the upper end face of the substrate is achieved, and reliability and accuracy of measurement of the rigidity characteristic of the fluid system in the subsequent immersion unit are guaranteed.
Preferably, the gas-liquid two-phase classification mechanism comprises a fixed table fixedly mounted above the end surface of the bottom of the detection table frame and positioned at the outer side of the immersion unit main body mechanism, and a liquid discharge module and a gas discharge module which are arranged at the outer side of the fixed table, a fixed table cavity with a volume space is arranged in one side of the fixed table close to the upper side, a plurality of flange parts extend from the inner side wall of the fixed table to the inner part of the fixed table cavity, the flange parts positioned on the same horizontal plane are mutually symmetrical in pairs, a shock absorption plate is fixedly connected to the upper end surface of each flange part, a third measurement sensor is fixedly mounted on the shock absorption plate, a vibration transmission block is connected to the top of the third measurement sensor, a split flow block for realizing mixed gas-liquid separation is fixedly mounted between the vibration transmission blocks which are mutually symmetrical in pairs, the bottom of the split flow block is communicated with a two-phase flow discharge flow channel in the immersion unit through an external pipeline, the top of the split flow block is respectively communicated with the liquid discharge module and the gas discharge module through the external pipeline, not only can realize accurate measurement of the disturbance characteristics of the disturbance in the gas-liquid separation process in the fluid system, but also can simulate the characteristics of disturbance still be diffused and can be accurately measured, and can realize the effectiveness of other components in the gas-liquid separation process.
Preferably, the supporting seat mechanism comprises a plurality of vibration reduction modules fixedly mounted at the lower position of the end face of the bottom of the detection table frame, the bottom end of each vibration reduction module is connected with a bearing support, connecting rib plates for enhancing the bearing and deformation resistance are fixedly connected between the bearing supports, the bearing and deformation resistance of the bottom of the device is enhanced through the connecting rib plates, the testing error caused by the testing of the external environment is reduced through the vibration reduction modules, and the stability, reliability and effectiveness of the supporting structure are improved.
Another object of the present invention is to provide a system for detecting mechanical properties of components of a fluid system, comprising: the fluid system component mechanical property detection device comprises a data acquisition card, a data processing terminal and one of the technical schemes, wherein various sensors arranged in the fluid system component mechanical property detection device are connected with the data acquisition card through an external cable, signals acquired by the sensors are transferred and transmitted to the data processing terminal through the data acquisition card through the external cable, and the reliability and effectiveness of data acquisition, processing, judgment and analysis obtained by detection are improved.
Another object of the present invention is to provide a method for detecting mechanical properties of a component of a fluid system, which includes: comprises the following detection steps
A1. Debugging preparation work before detection;
through the first three-axis regulator and the second three-axis regulator in one of the technical schemes, the uplink disturbance detection mechanism and the downlink disturbance detection mechanism are debugged and positioned on the same central vertical connecting line with the immersion unit main body mechanism;
A2. a fluid system simulation forming step before detection;
according to the fluid system component mechanical property detection device in one of the technical schemes, a fluid system with a stable state is simulated and formed by adjusting the liquid supply module, the liquid discharge module, the gas supply module and the gas discharge module;
A3. carrying out a detection step of detecting disturbance force of the fluid system on the projection objective;
through the measurement and detection of the first measurement sensor in the uplink disturbance detection mechanism in one of the above technical solutions, the measurement and detection judges whether the disturbance force and fluctuation of the projection objective lens in the uplink disturbance detection mechanism by the fluid system flowing in the immersion unit main body mechanism are within the designed safety standard range;
A4. carrying out a detection step of detecting the disturbance force of the fluid system to the substrate;
through the measurement and detection of the second measurement sensor in the downlink disturbance detection mechanism in one of the above technical solutions, the measurement and detection judges whether the disturbance force and fluctuation of the fluid system flowing in the immersion unit main body mechanism to the substrate in the downlink disturbance detection mechanism are within the designed safety standard range;
A5. carrying out a detection step of detecting the rigidity of a fluid system flowing in the immersion unit;
the substrate is subjected to laser irradiation measurement detection through the laser range finder in the downlink disturbance detection mechanism in one of the technical schemes, the distance between the substrate and the laser range finder changes along with the flow of a fluid system in the immersion unit, and the rigidity of the fluid system flowing in the immersion unit is analyzed and judged whether in a designed safety standard range or not through the distance value measured by the laser range finder and the measurement data of the fluid system on the disturbance force of the substrate;
A6. carrying out a detection step of detecting disturbance force of other components in the fluid system in the gas-liquid separation process in the fluid system; the disturbance generated when the gas-liquid two-phase flow is subjected to gas-liquid separation in the flow splitting block is transferred through the vibration transfer block in the gas-liquid two-phase classification mechanism in one of the technical schemes, and the disturbance is detected through the third measuring sensor, and whether the disturbance force and fluctuation of other components in the fluid system in the gas-liquid separation process in the fluid system are within the designed safety standard range or not is judged through measurement and detection;
note: in the above-mentioned steps A3 to A6, the order of executing the detection steps is not strictly performed according to the above-mentioned step order, and the actual detection order may be determined according to the detection requirement, or even only some of the detection steps may be executed or some of the detection steps may be repeatedly executed. By establishing an effective simulation scene of the fluid system and simultaneously detecting the mechanical property of disturbance force or vibration of components associated with the multiple fluid systems, the detection effectiveness of the coupling relation of the disturbance force between the fluid system and the multiple components is improved, the flowing stability of the fluid system in the photoetching machine is improved, and the exposure quality is improved.
Preferably, the debugging preparation step includes: adjusting the positions of a measuring part in a first measuring sensor and the center of a projection objective in the uplink disturbance detection mechanism and the positions of a measuring part in a second measuring sensor and the centers of a substrate and a substrate table in the downlink disturbance detection mechanism respectively by adjusting a first triaxial adjuster and a second triaxial adjuster, and adjusting the positions of the measuring part and the center of the immersion unit in the immersion unit main body mechanism to be on the same central vertical connecting line;
the fluid system simulation forming step comprises: opening the liquid supply module, wherein liquid flows out of the liquid supply module and flows into an immersion unit in the immersion unit main body mechanism through an external pipeline and a liquid inlet channel, gas is blown out of the gas supply module and is guided into a narrow gap between the immersion unit main body mechanism and the downward disturbance detection mechanism through the external pipeline, the liquid and the gas interact to form a stably flowing fluid system, the liquid on the upper side of the fluid system in the immersion unit flows into a liquid discharge module through a liquid discharge channel and the external pipeline, the liquid and the gas on the bottom edge of the fluid system in the immersion unit flow into a splitter block in the gas-liquid two-phase classification mechanism through a two-phase flow discharge channel and the external pipeline, the gas flows into the gas discharge module from the top of the splitter block through the external pipeline after the gas-liquid two-phase flow is separated from the inside of the splitter block, and the liquid flows into the liquid discharge module from the top of the splitter block through the external pipeline;
the detection step of the fluid system for the disturbance force of the projection objective comprises the following steps: the projection objective lens immersed in the fluid system in the immersion unit is disturbed due to the continuous flow of the fluid system, the disturbance on the projection objective lens can be well transmitted to the first measuring sensor, the first measuring sensor converts the relevant disturbance into an electric signal, the electric signal is transferred to the data processing terminal through the data acquisition card by the cable, the data processing terminal records the measured data in a period of time, analyzes and processes the data, compares the processed result with the design safety standard, and judges whether the disturbance force and the fluctuation magnitude of the projection objective lens by the fluid system flowing in the immersion unit are within the range of the design safety standard;
the method for detecting the disturbance force of the fluid system on the substrate comprises the following steps: the substrate arranged under the immersion unit is disturbed by the pressure of the fluid system flowing in the immersion unit, the disturbance on the substrate can be well transmitted to the second measuring sensor, the second measuring sensor converts the related pressure disturbance into an electric signal, the electric signal is transferred to the data processing terminal through the data acquisition card, the data processing terminal records the data measured in a period of time, analyzes and processes the data, compares the processed result with the designed safety standard, and judges whether the acting force and the fluctuation of the fluid system flowing in the immersion unit on the substrate are in the range of the designed safety standard or not;
the step of detecting the rigidity of the fluid system flowing in the immersion unit comprises the following steps: laser energy emitted by the laser range finder can directly irradiate the upper end face of the substrate, when a fluid system in the immersion unit flows, the distance between the substrate and the laser range finder can be changed, the laser reflected by the upper end face of the substrate can be collected by the laser range finder again and converted into an electric signal, the electric signal is transferred to the data processing terminal through the data acquisition card by the cable, the data processing terminal records data measured in a period of time, the detection data of the substrate disturbance force is analyzed and processed by combining the fluid system in the device, the rigidity of the fluid system flowing in the immersion unit is obtained by calculation, the detection result of the rigidity of the fluid system flowing in the immersion unit is compared with a designed safety standard, and whether the rigidity of the fluid system flowing in the immersion unit is within a designed safety standard range is judged;
the detection step of disturbance force of other components in the fluid system in the gas-liquid separation process in the fluid system comprises the following steps: liquid and gas at the bottom edge of a fluid system flowing in the immersion unit flow into the shunting block through the two-phase flow discharge flow channel and the external pipeline, when gas-liquid two-phase flow is subjected to gas-liquid separation in the shunting block, the gas-liquid two-phase flow can generate large disturbance on other components in the fluid system, a plurality of vibration transmission blocks arranged outside the shunting block can well transmit the disturbance to a third measuring sensor, the third measuring sensor converts the relevant disturbance into an electric signal and transfers the electric signal to a data processing terminal through a cable via a data acquisition card, the data processing terminal records data measured within a period of time and analyzes and processes the data, the processed result is compared with a designed safety standard, and whether the disturbance force and fluctuation of the other components in the fluid system are within the range of the designed safety standard or not in the gas-liquid separation process in the fluid system is judged;
the same is that: in the above-described steps, the order of executing the detection steps is not strictly performed according to the above-described step order, and the actual execution order of the detection steps may determine an appropriate detection order according to the detection requirement condition, or may even execute only some of the detection steps or repeatedly execute some of the detection steps.
The invention has the beneficial effects that: according to the invention, by establishing an effective simulation scene of the fluid system and simultaneously detecting the mechanical properties of disturbance force or vibration of components associated with a plurality of fluid systems, on the layout design of related sensors and flow paths, the inherent orientation and stress characteristics of the components of the fluid system in the fluid system are retained, excessive loss of effective signals of disturbance signals due to a transmission path or a structure under a complex structure is avoided, the rapid and high-precision accurate measurement of the disturbance by the sensors is realized, the reliability and accuracy of the simulation transmission and measurement of the disturbance of the components of the fluid system by the fluid system are improved, the detection effectiveness of the coupling relationship of the disturbance force between the fluid system and the plurality of components is improved, the stability of the flow of the fluid system in a photoetching machine is improved, and the exposure quality is improved.
Description of the drawings:
the invention is described in further detail below with reference to the figures and the detailed description.
Fig. 1 is a schematic structural diagram of a mechanical property detection device for a fluid system component according to the present invention.
Fig. 2 is a schematic structural diagram of the interior of the fluid system component mechanical property detection device.
Fig. 3 is a schematic view of a flow structure of an immersion flow field in the fluid system component mechanical property detection device of the present invention.
Fig. 4 is a partially enlarged structural view of fig. 3.
Fig. 5 isbase:Sub>A schematic view of the structure in the directionbase:Sub>A-base:Sub>A in fig. 3.
Fig. 6 is a schematic view of a flow structure of a detection signal in the mechanical property detection device for the fluid system component.
Detailed Description
Example 1:
in the embodiment shown in fig. 1 to 6, a device for detecting mechanical properties of components of a fluid system comprises a detection table frame 22, a first triaxial adjuster 20 is installed on the lower side of the top of the detection table frame 22, the lower end of the first triaxial adjuster 20 is fixedly connected with an upstream disturbance detection mechanism 101, the first triaxial adjuster 20 adjusts the plane orientation of the plane where the upstream disturbance detection mechanism 101 is located by adjusting the plane orientation of the plane where the first triaxial adjuster is located, an immersion unit main body mechanism 102 and a downstream disturbance detection mechanism 103 are arranged below the upstream disturbance detection mechanism 101, the centers of the upstream disturbance detection mechanism 101, the immersion unit main body mechanism 102 and the downstream disturbance detection mechanism 103 are all located on the same central vertical connecting line, the lower end portion of the upstream disturbance detection mechanism 101 extends into the inner side of the central portion of the immersion unit main body mechanism 102, the upper end of the downstream disturbance detection mechanism 103 abuts against the lower side of the lower end of the immersion unit main body mechanism 102 and is separated by a narrow gap 46, a two-phase classification mechanism 104 for realizing separation of a mixture of the immersed, the lower two-phase classification detection mechanism 104 is installed on the lower side of the frame 22, and a gas-liquid classification detection mechanism 105 for reducing the mechanical properties of the detection mechanism 22 and the detection mechanism 100 for supporting the external disturbance detection mechanism.
The uplink disturbance detection mechanism 101 comprises a first measurement sensor 24 and a projection objective 26, wherein the first measurement sensor 24 is fixedly installed at the bottom end of the first triaxial adjuster 20, the bottom of the first measurement sensor 24 is connected with the projection objective 26, and the measurement part in the first measurement sensor 24 and the center of the projection objective 26 are located on the same central vertical connection line.
The immersion unit main body mechanism 102 comprises a simulation platform 27 fixedly installed above the end face of the bottom of the detection platform frame 22, an immersion unit 41 is installed in the center of the simulation platform 27, the immersion unit 41 is located at a position right below the projection objective lens 26, a liquid inlet flow channel 35, a liquid discharge flow channel 36 and a two-phase flow discharge flow channel 37 are arranged in the immersion unit 41, a liquid supply module 60, a liquid discharge module 61 and a gas supply module 63 are arranged on the outer side of the simulation platform 27, the liquid supply module 60 is communicated with the liquid inlet flow channel 35 in the immersion unit 41 through an external pipeline, the liquid discharge module 61 is communicated with the liquid discharge flow channel 36 in the immersion unit 41 through an external pipeline, and the gas supply module 63 enables a gas injection end of the gas supply module to be communicated with a narrow gap 46 between the immersion unit main body mechanism 102 and the downward disturbance detection mechanism 103 through an external pipeline.
The descending disturbance detection mechanism 103 comprises a substrate 38 which is arranged below an immersion unit 41 and is separated from the immersion unit 41 to form a narrow slit 46, a substrate table 39 used for holding the substrate 38 is connected below the substrate 38, a second measurement sensor 29 is fixedly connected to the lower end face of the substrate table 39, a measurement part in the second measurement sensor 29 and the positions of the centers of the substrate 38 and the substrate table 39 are located on the same central vertical connecting line, a second three-axis adjuster 30 is installed at the bottom of the second measurement sensor 29, and the bottom of the second three-axis adjuster 30 is fixedly installed above the bottom end face of the detection table frame 22.
The descending disturbance detection mechanism 103 further includes a plurality of laser range finders 34 penetrating the simulation platform 27 and located above the substrate 38, the laser range finders 34 are distributed in an annular array, and laser emitting ends thereof can all irradiate the upper end surface of the substrate 38 downwards.
The gas-liquid two-phase classification mechanism 104 comprises a fixed table 48 fixedly mounted above the bottom end face of the detection table rack 22 and located at the outer side position of the immersion unit main body mechanism 102, and a liquid discharge module 61 and a gas discharge module 62 which are arranged at the outer side of the fixed table 48, a fixed table cavity 481 with a volume space is arranged inside one side of the fixed table 48, a plurality of flange portions 482 extend towards the inside of the fixed table cavity 481 at the inner side wall of the fixed table 48, the flange portions 482 located at the same horizontal plane are mutually symmetrical in pairs, the upper end face of each flange portion 482 is fixedly connected with a shock absorption plate 21, a third measurement sensor 43 is fixedly mounted on the shock absorption plate 21, the top of the third measurement sensor 43 is connected with a vibration transmission block 42, a diversion block 44 for realizing the separation of mixed gas and liquid is fixedly mounted between the vibration transmission blocks 42 which are mutually symmetrical in pairs, the bottom of the diversion block 44 is communicated with a two-phase flow discharge flow channel 37 in the immersion unit 41 through an external pipeline, and the top of the diversion block 44 is respectively communicated with the liquid discharge module 61 and the gas discharge module 62 through an external pipeline.
The supporting seat mechanism 105 comprises a plurality of vibration reduction modules 32 fixedly installed at the lower position of the bottom end face of the detection table frame 22, a bearing support 33 is connected to the bottom end of each vibration reduction module 32, and a connecting rib plate 40 used for enhancing the bearing and deformation resistance is fixedly connected between the bearing supports 33.
The invention relates to a device for detecting the mechanical property of a fluid system component, which is designed for an immersed flow field system, not only keeps the inherent orientation and the stress characteristic of the fluid system component in the fluid system, but also avoids excessive loss of effective signals of disturbance signals due to a transmission path or a structure under a complex structure, realizes the rapid and high-precision accurate measurement of the disturbance by a sensor, improves the reliability and the accuracy of the simulation transmission and the measurement of the disturbance of the fluid system component, and improves the detection effectiveness of the disturbance power coupling relationship between the fluid system and a plurality of components.
Example 2:
in the embodiments shown in fig. 1 to 6, a system for detecting mechanical properties of components of a fluid system includes a data acquisition card 50, a data processing terminal 51 and the device 100 for detecting mechanical properties of components of a fluid system described in embodiment 1, wherein various sensors disposed in the device 100 for detecting mechanical properties of components of a fluid system are connected to the data acquisition card 50 through external cables, signals acquired by the sensors are transferred and transmitted to the data processing terminal 51 through the data acquisition card 50 through the external cables, and the rest are the same as those in embodiment 1.
Example 3:
in the embodiment shown in fig. 1 to 6, a method for detecting mechanical properties of components of a fluid system includes the following steps:
A1. debugging preparation work before detection;
the method comprises the steps that an uplink disturbance detection mechanism 101 and a downlink disturbance detection mechanism 103 are debugged to be located on the same central vertical connecting line with an immersion unit main body mechanism 102 through a first three-axis adjuster 20 and a second three-axis adjuster 30 described in embodiment 1 or embodiment 2;
A2. a fluid system simulation forming step before detection;
by the fluid system component mechanical property detection device 100 described in embodiment 1 or embodiment 2, a fluid system with a steady state is simulated by adjusting the liquid supply module 60, the liquid discharge module 61, the gas supply module 63, and the gas discharge module 62;
A3. carrying out a detection step of detecting disturbance force of the fluid system on the projection objective lens 26;
through the measurement detection of the first measurement sensor 24 in the upstream disturbance detection mechanism 101 described in embodiment 1 or embodiment 2, the measurement detection determines whether the disturbance force and the fluctuation magnitude of the projection objective lens 26 in the upstream disturbance detection mechanism 101 by the fluid system flowing in the immersion unit main body mechanism 102 are within the design safety standard range;
A4. carrying out a detection step of detecting the disturbing force of the fluid system on the substrate 38;
through the measurement detection of the second measurement sensor 29 in the downward disturbance detection mechanism 103 described in embodiment 1 or embodiment 2, the measurement detection determines whether the disturbance force and fluctuation of the fluid system flowing in the immersion unit main body mechanism 102 on the substrate 38 in the downward disturbance detection mechanism 103 are within the range of the designed safety standard;
A5. carrying out a detection step of detecting the rigidity of the fluid system flowing in the immersion unit 41;
performing laser irradiation measurement detection on the substrate 38 by using the laser range finder 34 in the downward disturbance detection mechanism 103 described in embodiment 1 or embodiment 2, wherein the distance between the substrate 38 and the laser range finder 34 changes with the flow of the fluid system in the immersion unit 41, and analyzing and judging whether the stiffness of the fluid system flowing in the immersion unit 41 is within the designed safety standard range by using the distance value measured by the laser range finder 34 and the measurement data of the disturbance force of the fluid system on the substrate 38;
A6. carrying out a detection step of detecting disturbance force of a gas-liquid separation process in a fluid system on other components in the fluid system; disturbance generated when gas-liquid two-phase flow is subjected to gas-liquid separation inside the flow splitting block 44 is transmitted through the vibration transmission block 42 in the gas-liquid two-phase classification mechanism 104 described in embodiment 1 or embodiment 2, and the disturbance is detected through the third measurement sensor 43, and measurement detection is performed to determine whether the disturbance force and fluctuation of other components in the fluid system in the gas-liquid separation process in the fluid system are within a designed safety standard range;
note: in the above-mentioned steps A3 to A6, the order of executing the detection steps is not strictly performed according to the above-mentioned step order, and the actual detection order may be determined according to the detection requirement, or even only some of the detection steps may be executed or some of the detection steps may be repeatedly executed.
In the above detection step, the following is further specific:
debugging preparation work steps before detection: the position of the measurement part in the first measurement sensor 24 in the upward disturbance detection mechanism 101 and the center of the projection objective lens 26, and the position of the measurement part in the second measurement sensor 29 in the downward disturbance detection mechanism 103 and the center of the substrate 38 and the substrate stage 39 are adjusted to positions on the same central vertical connecting line as the position of the center of the immersion unit 41 in the immersion unit main body mechanism 102 by adjusting the first triaxial adjuster 20 and the second triaxial adjuster 30, respectively.
A fluid system simulation forming step: when the fluid system component mechanical property detection device 100 related by the invention is used, the liquid supply module 60 and the gas supply module 63 are opened, the liquid Y flows out from the liquid supply module 60, flows into the immersion unit 41 in the immersion unit main body mechanism 102 through the external pipeline and the liquid inlet flow channel 35, the gas Q is blown out from the gas supply module 63, and is guided into the narrow slit gap 46 between the immersion unit main body mechanism 102 and the downward disturbance detection mechanism 103 through the external pipeline, the liquid Y and the gas Q interact to form a stably flowing fluid system, the liquid Y on the upper side of the fluid system in the immersion unit 41 flows into the liquid discharge module 61 through the liquid discharge flow channel 36 and the external pipeline, the liquid Y and the gas Q on the bottom edge of the fluid system in the immersion unit 41 flow into the flow splitting block 44 in the gas-liquid two-phase classification mechanism 103 through the two-phase flow discharge flow channel 37 and the external pipeline, the gas-liquid Q flows into the gas discharge module 62 from the top of the splitting block 44 through the external pipeline after the gas-liquid splitting block 44 completes gas-liquid separation, and the liquid Y flows into the liquid discharge module 61 through the external pipeline from the top of the splitting block 44.
The step of detecting the disturbing force of the fluid system on the projection objective 26 comprises: the projection objective 26 immersed in the fluid system in the immersion unit 41 is disturbed due to the continuous flow of the fluid system, the disturbance on the projection objective 26 can be well transmitted to the first measurement sensor 24, the first measurement sensor 24 converts the relevant disturbance into an electric signal, and the electric signal is transferred to the data processing terminal 51 through the data acquisition card 50, the data processing terminal 51 records the measured data in a period of time, analyzes and processes the data, compares the processed result with the design safety standard, and judges whether the disturbance force and the fluctuation of the projection objective 26 by the fluid system flowing in the immersion unit 41 are within the design safety standard range.
The fluid system perturbing force detection step for the substrate 38 comprises: the substrate 38 arranged right below the immersion unit 41 is disturbed by the pressure of the fluid system flowing in the immersion unit 41, the disturbance of the substrate 38 can be well transmitted to the second measuring sensor 29, the second measuring sensor 29 converts the relevant pressure disturbance into an electric signal, the electric signal is transferred to the data processing terminal 51 through the data acquisition card 50 by the cable, the data processing terminal 51 records the measured data in a period of time, analyzes and processes the data, compares the processed result with the design safety standard, and judges whether the acting force and the fluctuation of the fluid system flowing in the immersion unit 41 on the substrate 38 are within the range of the design safety standard.
The step of detecting the stiffness of the fluid system flowing in the immersion unit 41 comprises: laser energy emitted by the laser range finder 34 directly irradiates the upper end face of the substrate 38, when a fluid system in the immersion unit 41 flows, the distance between the substrate 38 and the laser range finder 34 changes, laser reflected by the upper end face of the substrate 38 is recollected by the laser range finder 34 and converted into an electric signal, the electric signal is transferred to the data processing terminal 51 through the data acquisition card 50 by the cable, the data processing terminal 51 records data measured within a period of time, the detected data of disturbance force of the substrate 38 is analyzed and processed by combining the fluid system in the device of the invention, the rigidity of the fluid system flowing in the immersion unit 41 is obtained by calculation, the detected result of the rigidity of the fluid system flowing in the immersion unit 41 is compared with a designed safety standard, and whether the rigidity of the fluid system flowing in the immersion unit 41 is within the designed safety standard range is judged.
The detection step of disturbance force of other components in the fluid system in the gas-liquid separation process in the fluid system comprises the following steps: liquid Y and gas Q at the bottom edge of a fluid system flowing in the immersion unit 41 flow into the flow splitting block 44 through the two-phase flow discharge flow channel 37 and an external pipeline, when gas-liquid two-phase flow 2XL is subjected to gas-liquid separation in the flow splitting block 44, large disturbance can be generated on other components in the fluid system, the plurality of vibration transmission blocks 42 arranged outside the flow splitting block 44 can well transmit the disturbance to the third measurement sensor 43, the third measurement sensor 43 converts the relevant disturbance into an electric signal and transmits the electric signal to the data processing terminal 51 through the data acquisition card 50, the data processing terminal 51 records the measured data within a period of time and analyzes and processes the data, the processed result is compared with a designed safety standard, and whether the power and fluctuation of other components in the fluid system in the gas-liquid separation process in the fluid system are within the designed safety standard range or not is judged.
In the positional relationship description of the present invention, the appearance of terms such as "inner", "outer", "upper", "lower", "left", "right", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings is merely for convenience of describing the embodiments and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation and operation, and thus, is not to be construed as limiting the present invention.
The foregoing summary and the following detailed description of the invention provide examples of the basic principles, features, and advantages of the invention, as will be apparent to those skilled in the art. The foregoing examples and description have been provided merely to illustrate the principles of the invention and various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The utility model provides a fluid system components and parts mechanical properties detection device which characterized in that: the device comprises a detection table rack, wherein a first three-axis regulator is installed on the lower side of the top of the detection table rack, an uplink disturbance detection mechanism is fixedly connected to the lower end of the first three-axis regulator, the plane orientation of the plane where the first three-axis regulator is located is adjusted by adjusting the plane orientation of the plane where the first three-axis regulator is located, an immersion unit main body mechanism and a downlink disturbance detection mechanism are arranged below the uplink disturbance detection mechanism, the centers of the uplink disturbance detection mechanism, the immersion unit main body mechanism and the downlink disturbance detection mechanism are located on the same central vertical connecting line, the lower end part of the uplink disturbance detection mechanism extends into the inner side of the central part of the immersion unit main body mechanism, the upper end of the downlink disturbance detection mechanism abuts against the lower side of the lower end of the central part of the immersion unit main body mechanism and is spaced by a narrow slit, a gas-liquid two-phase classification mechanism for separating mixed gas and liquid is arranged on the outer side of the immersion unit main body mechanism, the lower sides of the immersion unit main body mechanism, the downlink disturbance detection mechanism and the gas-liquid classification mechanism are fixedly installed on the bottom end face of the detection table rack, and a support seat mechanism for strengthening support and reducing external disturbance is fixedly installed below the bottom end face of the detection table rack.
2. The fluid system component mechanical property detection device of claim 1, wherein: the uplink disturbance detection mechanism comprises a first measurement sensor and a projection objective, wherein the first measurement sensor is fixedly installed at the bottom end of the first triaxial adjuster, the bottom of the first measurement sensor is connected with the projection objective, and a measurement part in the first measurement sensor and the center of the projection objective are located on the same central vertical connecting line.
3. The fluid system component mechanical property detection device of claim 1, wherein: immersion unit main part mechanism include the simulation platform of fixed mounting in the department of examining platform frame bottom terminal surface top, the immersion unit is installed to the simulation platform central part, the immersion unit is located projection objective position department directly below, be equipped with the feed liquor runner in the immersion unit, flowing back runner and two-phase flow discharge runner, the simulation platform outside is equipped with the liquid supply module, liquid discharge module and gaseous supply module, the liquid supply module is linked together through the feed liquor runner in external pipeline and the immersion unit, the liquid discharge module is linked together through the flowing back runner in external pipeline and the immersion unit, gaseous supply module makes its gas injection end just to communicate through the narrow gap between external pipeline and immersion unit main part mechanism and down disturbance detection mechanism mutually.
4. The fluid system component mechanical property detection device of claim 1, wherein: the descending disturbance detection mechanism comprises a substrate which is arranged below the immersion unit and is separated from the immersion unit to form a narrow slit gap, a substrate table used for holding the substrate is connected below the substrate, a second measurement sensor is fixedly connected to the lower end face of the substrate table, a measurement part in the second measurement sensor and the center of the substrate table are located on the same central vertical connecting line, a second three-axis adjuster is installed at the bottom of the second measurement sensor, and the bottom of the second three-axis adjuster is fixedly installed above the end face of the bottom of the detection table frame.
5. The fluid system component mechanical property detection device of claim 4, wherein: the downlink disturbance detection mechanism further comprises a plurality of laser range finders which penetrate through the simulation platform and are located above the substrate, the laser range finders are distributed in an annular array mode, and laser emitting ends of the laser range finders can downwards irradiate the upper end face of the substrate.
6. The fluid system component mechanical property detection device of claim 1, wherein: the gas-liquid two-phase classification mechanism comprises a fixed table, a liquid discharge module and a gas discharge module, wherein the fixed table is fixedly arranged above the end face of the bottom of a detection table frame and positioned at the outer side position of a main mechanism of the immersion unit, the liquid discharge module and the gas discharge module are arranged outside the fixed table, the fixed table is provided with a fixed table cavity with a volume space inside one side, a plurality of flange parts are arranged on the inner side wall of the fixed table and extend towards the inside of the fixed table cavity, the flange parts positioned on the same horizontal plane are symmetrical to each other, the upper end face of each flange part is fixedly connected with a shock absorption plate, a third measurement sensor is fixedly arranged on the shock absorption plate, the top of the third measurement sensor is connected with a vibration transmission block, a shunting block used for realizing mixed gas-liquid separation is fixedly arranged between the vibration transmission blocks which are symmetrical to each other, the bottom of the shunting block is communicated with a two-phase flow discharge flow passage in the immersion unit through an external pipeline, and the top of the shunting block is respectively communicated with the liquid discharge module and the gas discharge module through the external pipeline.
7. The fluid system component mechanical property detection device of claim 1, wherein: the supporting seat mechanism comprises a plurality of vibration reduction modules which are fixedly arranged at the lower position of the end face of the bottom of the detection table frame, the bottom end of each vibration reduction module is connected with a bearing support, and a connecting rib plate for enhancing the bearing and deformation resistance is fixedly connected between the bearing supports.
8. A fluid system components and parts mechanical properties detecting system which characterized in that: the fluid system component mechanical property detection device comprises a data acquisition card, a data processing terminal and the fluid system component mechanical property detection device as claimed in any one of claims 1 to 7, wherein various sensors arranged in the fluid system component mechanical property detection device are connected with the data acquisition card through an external cable, and signals acquired by the sensors are transferred and transmitted to the data processing terminal through the data acquisition card through the external cable.
9. A method for detecting the mechanical property of a fluid system component adopts a detection device as follows: the device comprises a detection table rack, wherein a first three-axis regulator is installed on the lower side of the top of the detection table rack, the lower end of the first three-axis regulator is fixedly connected with an uplink disturbance detection mechanism, the plane orientation of the plane where the first three-axis regulator is located is adjusted by adjusting the plane orientation of the plane where the first three-axis regulator is located, an immersion unit main body mechanism and a downlink disturbance detection mechanism are arranged below the uplink disturbance detection mechanism, the centers of the uplink disturbance detection mechanism, the immersion unit main body mechanism and the downlink disturbance detection mechanism are all located on the same central vertical connecting line, the lower end part of the uplink disturbance detection mechanism extends into the inner side of the central part of the immersion unit main body mechanism, the upper end of the downlink disturbance detection mechanism abuts against the lower side of the lower end of the central part of the immersion unit main body mechanism and is spaced by a narrow gap distance, a gas-liquid two-phase classification mechanism for realizing gas-liquid separation of mixed gas-liquid is arranged on the outer side of the immersion unit main body mechanism, the lower sides of the immersion unit main body mechanism, the downlink disturbance detection mechanism and the gas-liquid two-phase classification mechanism are fixedly installed on the bottom end face of the detection table rack, and a support seat mechanism for strengthening the support and reducing external disturbance is fixedly installed below the bottom end face of the detection table rack; the uplink disturbance detection mechanism comprises a first measurement sensor and a projection objective, wherein the first measurement sensor is fixedly arranged at the bottom end of the first triaxial adjuster, the bottom of the first measurement sensor is connected with the projection objective, and a measurement part in the first measurement sensor and the center of the projection objective are positioned on the same central vertical connecting line; the immersion unit main body mechanism comprises a simulation platform fixedly arranged above the end face of the bottom of the detection platform frame, the immersion unit is arranged at the center of the simulation platform, the immersion unit is positioned right below the projection objective, a liquid inlet flow channel, a liquid discharge flow channel and a two-phase flow discharge flow channel are arranged in the immersion unit, a liquid supply module, a liquid discharge module and a gas supply module are arranged outside the simulation platform, the liquid supply module is communicated with the liquid inlet flow channel in the immersion unit through an external pipeline, the liquid discharge module is communicated with the liquid discharge flow channel in the immersion unit through an external pipeline, and the gas supply module enables a gas injection end of the gas supply module to be directly communicated with a narrow gap between the immersion unit main body mechanism and the downward disturbance detection mechanism through an external pipeline; the descending disturbance detection mechanism comprises a substrate which is arranged below the immersion unit and is separated from the immersion unit to form a narrow slit gap, a substrate table for holding the substrate is connected below the substrate, a second measurement sensor is fixedly connected to the lower end surface of the substrate table, a measurement part in the second measurement sensor and the center of the substrate table are positioned on the same central vertical connecting line, a second triaxial adjuster is arranged at the bottom of the second measurement sensor, and the bottom of the second triaxial adjuster is fixedly arranged above the end surface of the bottom of the detection table frame; the downlink disturbance detection mechanism also comprises a plurality of laser range finders which penetrate through the simulation platform and are positioned above the substrate, the laser range finders are distributed in an annular array, and laser emitting ends of the laser range finders can downwards irradiate the upper end surface of the substrate; the gas-liquid two-phase classification mechanism comprises a fixed table, a liquid discharge module and a gas discharge module, wherein the fixed table is fixedly arranged above the end surface of the bottom of a detection table frame and positioned at the outer side of the main body mechanism of the immersion unit, the liquid discharge module and the gas discharge module are arranged at the outer side of the fixed table, a fixed table cavity with a volume space is arranged in one side of the fixed table, a plurality of flange parts extend from the inner side wall of the fixed table to the inner part of the fixed table cavity, the flange parts positioned on the same horizontal plane are symmetrical with each other in pairs, the upper end surface of each flange part is fixedly connected with a shock absorption plate, a third measurement sensor is fixedly arranged on the shock absorption plate, the top of the third measurement sensor is connected with a vibration transmission block, a shunting block for realizing the separation of mixed gas and liquid is fixedly arranged between the vibration transmission blocks which are symmetrical with each other in pairs, the bottom of the shunting block is communicated with a two-phase flow discharge flow channel in the immersion unit through an external pipeline, and the top of the shunting block is respectively communicated with the liquid discharge module and the gas discharge module through the external pipeline; the supporting seat mechanism comprises a plurality of vibration reduction modules which are fixedly arranged at the lower position of the end face of the bottom of the frame of the detection table, the bottom end of each vibration reduction module is connected with a bearing support, and a connecting rib plate for enhancing the bearing and deformation resistance is fixedly connected between the bearing supports;
the method is characterized by comprising the following detection steps:
a1, debugging preparation work step before detection;
debugging the uplink disturbance detection mechanism and the downlink disturbance detection mechanism to be positioned on the same central vertical connecting line with the immersion unit main body mechanism through the first triaxial adjuster and the second triaxial adjuster;
a2, simulating and forming a fluid system before detection;
through the fluid system component mechanical property detection device, a fluid system with a stable state is simulated and formed by adjusting the liquid supply module, the liquid discharge module, the gas supply module and the gas discharge module;
a3, carrying out a detection step of detecting disturbance force of the fluid system on the projection objective;
through the measurement and detection of the first measurement sensor in the uplink disturbance detection mechanism, whether the disturbance force and fluctuation of a fluid system flowing in the immersion unit main body mechanism on a projection objective lens in the uplink disturbance detection mechanism are within a designed safety standard range or not is measured, detected and judged;
a4, carrying out a detection step of detecting the disturbance force of the fluid system on the substrate;
through the measurement and detection of a second measurement sensor in the descending disturbance detection mechanism, whether the disturbance force and fluctuation of a fluid system flowing in the main body mechanism of the immersion unit on a substrate in the descending disturbance detection mechanism are within the range of a designed safety standard or not is measured, detected and judged;
a5, carrying out a detection step of detecting the rigidity of a fluid system flowing in the immersion unit;
the laser irradiation measurement detection is carried out on the substrate through the laser range finder in the downlink disturbance detection mechanism, the distance between the substrate and the laser range finder can change along with the flow of the fluid system in the immersion unit, and whether the rigidity of the fluid system flowing in the immersion unit is in a designed safety standard range or not is analyzed and judged through the distance value measured by the laser range finder and the measurement data of the fluid system on the disturbance force of the substrate;
a6, carrying out a detection step of detecting disturbance force of other components in the fluid system in the gas-liquid separation process in the fluid system;
the disturbance generated when the gas-liquid two-phase flow is subjected to gas-liquid separation in the flow splitting block is transferred through the vibration transfer block in the gas-liquid two-phase classification mechanism, and the disturbance is detected through the third measurement sensor, and whether the disturbance force and fluctuation of other components in the fluid system in the gas-liquid separation process in the fluid system are within the design safety standard range or not is measured, detected and judged.
10. The method for detecting the mechanical property of the fluid system component as claimed in claim 9, wherein:
the debugging preparation work step comprises the following steps: adjusting the positions of a measuring part in a first measuring sensor in the uplink disturbance detection mechanism and the center of the projection objective lens by adjusting a first triaxial adjuster, and adjusting the positions of a measuring part in a second measuring sensor in the downlink disturbance detection mechanism and the centers of the substrate and the substrate table by adjusting a second triaxial adjuster to enable the positions of the first two centers and the position of the center of the immersion unit in the immersion unit main body mechanism to be on the same central vertical connecting line;
the fluid system simulation forming step comprises: opening the liquid supply module, wherein liquid flows out of the liquid supply module and flows into an immersion unit in the immersion unit main body mechanism through an external pipeline and a liquid inlet channel, gas is blown out of the gas supply module and is guided into a narrow gap between the immersion unit main body mechanism and the downward disturbance detection mechanism through the external pipeline, the liquid and the gas interact to form a stably flowing fluid system, the liquid on the upper side of the fluid system in the immersion unit flows into a liquid discharge module through a liquid discharge channel and the external pipeline, the liquid and the gas on the bottom edge of the fluid system in the immersion unit flow into a splitter block in the gas-liquid two-phase classification mechanism through a two-phase flow discharge channel and the external pipeline, the gas flows into the gas discharge module from the top of the splitter block through the external pipeline after the gas-liquid two-phase flow is separated from the inside of the splitter block, and the liquid flows into the liquid discharge module from the top of the splitter block through the external pipeline;
the detection step of the fluid system for the disturbance force of the projection objective comprises the following steps: the projection objective lens immersed in the fluid system in the immersion unit is disturbed due to the continuous flow of the fluid system, the disturbance on the projection objective lens can be well transmitted to the first measuring sensor, the first measuring sensor converts the relevant disturbance into an electric signal, the electric signal is transferred to the data processing terminal through the data acquisition card by the cable, the data processing terminal records the measured data in a period of time, analyzes and processes the data, compares the processed result with the design safety standard, and judges whether the disturbance force and the fluctuation magnitude of the projection objective lens by the fluid system flowing in the immersion unit are within the range of the design safety standard;
the fluid system detection step for the disturbance force of the substrate comprises the following steps: the substrate arranged under the immersion unit is disturbed by the pressure of the fluid system flowing in the immersion unit, the disturbance on the substrate can be well transmitted to the second measuring sensor, the second measuring sensor converts the relevant pressure disturbance into an electric signal, the electric signal is transferred to the data processing terminal through the data acquisition card by the cable, the data processing terminal records the measured data in a period of time, analyzes and processes the data, compares the processed result with the design safety standard, and judges whether the acting force and the fluctuation of the fluid system flowing in the immersion unit on the substrate are within the range of the design safety standard or not;
the step of detecting the stiffness of the fluid system flowing in the immersion unit comprises: laser energy emitted by the laser range finder directly irradiates the upper end face of the substrate, when a fluid system in the immersion unit flows, the distance between the substrate and the laser range finder changes, the laser reflected by the upper end face of the substrate is recollected by the laser range finder, converted into an electric signal and transferred to a data processing terminal through a data acquisition card, the data processing terminal records data measured in a period of time, the detection data of the substrate disturbance force is analyzed and processed by combining the fluid system in the device, the rigidity of the fluid system flowing in the immersion unit is obtained by calculation, the detection result of the rigidity of the fluid system flowing in the immersion unit is compared with a designed safety standard, and whether the rigidity of the fluid system flowing in the immersion unit is within the range of the designed safety standard is judged;
the detection step of disturbance force of other components in the fluid system in the gas-liquid separation process in the fluid system comprises the following steps: liquid and gas at the bottom edge of a fluid system flowing in the immersion unit flow into the shunting block through the two-phase flow discharge flow channel and the external pipeline, when gas-liquid two-phase flow is subjected to gas-liquid separation in the shunting block, the gas-liquid two-phase flow can generate large disturbance on other components in the fluid system, the disturbance can be well transmitted to the third measuring sensor by the plurality of vibration transmission blocks arranged outside the shunting block, the third measuring sensor converts the relevant disturbance into an electric signal and transfers the electric signal to the data processing terminal through the cable wire in a transfer mode through the data acquisition card, the data processing terminal records data measured within a period of time and analyzes and processes the data, the processed result is compared with a design safety standard, and whether the disturbance force and fluctuation size of other components in the fluid system in the gas-liquid separation process in the fluid system are within the range of the design safety standard is judged.
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| CN104950586B (en) * | 2014-03-25 | 2017-06-06 | 上海微电子装备有限公司 | A kind of immersion liquid limiting mechanism |
| CN104035290B (en) * | 2014-06-24 | 2015-11-25 | 浙江大学 | A kind of hermetic seal for immersed photoetching machine and two-stage porous gas-liquid retracting device |
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