CN112393746B - Interference angle measuring system in vacuum cryogenic environment - Google Patents
Interference angle measuring system in vacuum cryogenic environment Download PDFInfo
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- CN112393746B CN112393746B CN202011314601.1A CN202011314601A CN112393746B CN 112393746 B CN112393746 B CN 112393746B CN 202011314601 A CN202011314601 A CN 202011314601A CN 112393746 B CN112393746 B CN 112393746B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C1/00—Measuring angles
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Abstract
An interference angle measuring system in a vacuum cryogenic environment comprises a pyramid prism assembly, a pyramid prism constant-temperature mounting plate, a pyramid prism constant-temperature protective cover, an interference mirror group, a laser source adjusting frame, a laser source thermostat, a laser source pressure-maintaining pipe and a system constant-temperature supporting frame; the invention has stable temperature interface, and simultaneously prevents the deep cooling background in the vacuum tank from directly radiating on the surface of the glass. The interference lens group is arranged on the system constant temperature support frame, the laser light source is arranged on the laser light source adjusting frame, and the interference lens group is integrally arranged on the system constant temperature support frame after being placed in the laser light source constant temperature box. And a laser light source pressure-maintaining pipe is arranged on the surface of the incubator and communicated with the atmosphere after being communicated with the outside of the vacuum tank. The laser light source is in a constant-temperature and constant-pressure environment, the testing requirement of vacuum adaptability is met, the device has the advantages of stable temperature, strong applicability, low cost and the like, and the measuring function of the device under the vacuum cryogenic environment can be realized without carrying out cryogenic space environment adaptability customization on the high-precision interference goniometer.
Description
Technical Field
The technology belongs to the field of aerospace testing, and relates to a laser interference angle measuring system suitable for a vacuum cryogenic environment.
Background
The high-precision star sensor generally refers to a fixed star sensor with the attitude measurement precision superior to 1 arc second. In recent years, with the increasingly wide application of the star sensor technology, high-precision earth observation, astronomical observation, high-precision spacecraft control and other technologies all put forward high-precision requirements on the star sensor.
The 0.3' star sensor is an extremely high-precision star sensor of the world advanced level. The precision evaluation and test technology under the ground environment is the key for verifying the realization level of the product. In order to meet the requirements of high-precision calibration test and precision test of the product, a star sensor development and verification system in a vacuum cryogenic environment needs to be established in a ground environment, and the system has the capability of measuring angle precision superior to 0.1 'so as to meet the ground calibration and precision verification requirements of a 0.3' high-precision star sensor.
Among goniometers, the equipment with angular accuracy better than 0.1 "is the interferometric goniometer. The device realizes the angle precision measurement of the measured target by an optical interference measurement principle. Because the star sensor to be measured is positioned in a vacuum cryogenic environment simulated on the ground, the vacuum degree is lower than 10 < -3 > Pa, the environment temperature is-173 ℃, and the conventional interference goniometer can not adapt to the severe working environment.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the technical defect that the existing interference goniometer cannot be used in a vacuum low-temperature environment is overcome, a set of interference goniometer system capable of being applied to the vacuum cryogenic environment is designed, the problem that the interference goniometer cannot be applied to the vacuum low-temperature environment is solved, and the angle measuring precision of the interference goniometer is ensured.
The technical scheme of the invention is as follows: an interferometric angle measurement system for a vacuum cryogenic environment, located in a vacuum tank, the system comprising: the device comprises a pyramid prism assembly (2), a pyramid prism constant-temperature mounting plate (1), a pyramid prism constant-temperature protection cover (3), an interference mirror group (4), a laser light source (7), a laser light source adjusting frame (8), a laser light source thermostat (5), a laser light source pressure-maintaining pipe (6) and a system constant-temperature support frame (9); the pyramid prism assembly (2), the pyramid prism constant-temperature mounting plate (1) and the pyramid prism constant-temperature protective cover (3) are integrally assembled, so that the pyramid prism assembly (2) is guaranteed to have a temperature interface after being mounted on the surface of a target of a measured corner, and meanwhile, the 100K deep cooling background in the vacuum tank is prevented from directly radiating on the surface of the pyramid prism assembly (2); the interference lens group (4) is arranged on a system constant temperature support frame (9), the laser light source (7) is arranged on a laser light source adjusting frame (8), and after being put into the laser light source thermostat (5) together, the laser light source (7), the laser light source adjusting frame (8) and the laser light source thermostat (5) form a whole which is arranged on the system constant temperature support frame (9); a laser light source pressure-maintaining pipe (6) is arranged on the laser light source thermostat (5) and communicated with the atmosphere through the outside of the vacuum tank, so that the laser light source (7) is in a constant-temperature and constant-pressure environment, and the requirement of vacuum adaptability test is met.
Preferably, the laser light source (7) emits laser light, the laser light is split into two paths through the interference lens group (4), and the two paths of laser light respectively reach the surface of the pyramid prism assembly (2) and then return to the interference lens group (4); two beams of return beams interfere with each other, and the angle of the measured corner target is determined through the condition of interference fringes;
the pyramid prism constant-temperature mounting plate (1) can be mounted on a measured corner target and provides a mounting base for the pyramid prism assembly (2);
the pyramid prism constant-temperature protection cover (3) provides a constant-temperature environment for the pyramid prism assembly (2);
the laser light source adjusting frame (8) is used for adjusting the position relation between the pyramid prism assembly (2) and the interference mirror group (4), so that light beams split by the interference mirror group (4) after laser light emitted by the laser light source (7) reaches the surface of the pyramid prism assembly (2) and can return to the interference mirror group (4);
the laser light source pressure-maintaining pipe (6) is used for communicating the laser light source thermostat (5) with the outside of the vacuum tank, so that the laser light source (7) is positioned in the vacuum tank in a constant-pressure environment;
and the system constant temperature support frame (9) is fixed inside the vacuum tank and serves as a support structure.
Preferably, uniform heating sheets are pasted on the surface of the pyramid prism constant-temperature mounting plate (1), and the surface temperature of the pyramid prism assembly (2) in contact is guaranteed to be 20 +/-1 ℃ through temperature control; the mounting surface of the pyramid prism constant-temperature mounting plate (1) is directly mounted on the surface of a tested corner structure; a heat insulation gasket is arranged between the mounting surface to be tested and the pyramid prism constant temperature mounting plate (1) to isolate the temperature conduction between the mounting surface to be tested and the pyramid prism constant temperature mounting plate (1); the pyramid prism assembly (2) is ensured to be on a constant temperature interface to the maximum extent.
Preferably, the pyramid prism constant-temperature protection cover (3) is arranged outside the pyramid prism assembly (2) and the pyramid prism constant-temperature installation plate (1), and the surface of the pyramid prism constant-temperature protection cover is coated with a plurality of layers of heat insulation materials to prevent the 100K deep cooling background low-temperature radiation in the vacuum tank and ensure that the temperature gradient of the glass surface of the pyramid prism assembly (2) is less than 1 ℃.
Preferably, the interference lens group (4) is arranged on a system constant temperature support frame (9); the surface of the system constant temperature support frame (9) is adhered with uniform heating sheets, active temperature control is carried out, and meanwhile, the outer surface is coated with multiple layers of heat insulation materials, so that the temperature of the system constant temperature support frame (9) is controlled within the range of 25 +/-1 ℃, and a stable support reference is provided for the interference angle measuring system.
Preferably, the laser light source (7), the laser light source adjusting frame (8) and the laser light source thermostat (5) are integrally arranged on a system thermostatic support (9); the laser light source thermostat (5) is installed with the system thermostat bracket (9) in a heat conduction mode, so that the temperature gradient of the laser light source thermostat (5) is kept consistent with that of the system thermostat bracket (9); meanwhile, the outer surface of the laser light source thermostat (5) is coated with a plurality of layers of heat insulating materials, so that the low-temperature radiation of the 100K deep cooling background in the vacuum tank is prevented.
Preferably, the laser light source thermostat (5) is designed in an airtight manner, and the structure leakage rate is ensured to be less than 1 x 10 < -4 > Pa.L/s; a laser light source pressure-maintaining pipe (6) is arranged on the surface of a laser light source thermostat (5) and communicated with the atmosphere through the outside of a vacuum tank, so that a laser light source (7) is in a constant-temperature and constant-pressure environment, and the requirement of vacuum adaptability testing is met.
Compared with the prior art, the invention has the advantages that:
(1) the invention adopts the temperature control technology combining active temperature control and passive temperature control to the core supporting structure of the system, reduces the temperature gradient of the interference angle measuring system structure, improves the thermal stability of the system and realizes high-precision measurement in the cryogenic radiation environment with low temperature of 100K.
(2) The invention adopts the pressure maintaining structural design for the laser light source which is not suitable for the vacuum environment, improves the air pressure tolerance of the laser light source through a simple and mature closed structural form, and realizes the vacuum working function of the laser light source.
(3) The invention adopts the design concept of communicating with the atmosphere outside the tank, and the atmosphere of the laboratory is communicated with the atmosphere of the pressure maintaining tank through the pressure maintaining pipe of the laser light source, so that the stable pressure maintaining of the working environment of the laser light source after long-term working is realized.
(4) The invention adopts a simple and reliable design method, improves the working environment adaptability of the high-precision interference goniometer for the laboratory, and realizes the 0.1' angle measurement precision under the vacuum cryogenic environment. The application range covers the development requirements of space photoelectric products such as aviation and aerospace, and the method has strong field competitiveness and application prospects.
(5) The invention designs an interference angle measuring system suitable for a ground vacuum cryogenic environment. The laser interference goniometer is applied to the ground simulated vacuum cryogenic environment through structural design, thermal design and constant pressure design, and the high-precision goniometry capability under the ground vacuum cryogenic environment is established.
Drawings
FIG. 1 is a schematic front view of an interferometric angle measuring system in a vacuum cryogenic environment according to the present invention.
FIG. 2 is a schematic view of the back side of an interferometric angle measuring system in a vacuum cryogenic environment according to the present invention.
FIG. 3 is a schematic cross-sectional view of an interferometric angle measuring system in a vacuum cryogenic environment.
Fig. 4 is a schematic view of the pyramid prism constant temperature mounting plate (1).
Fig. 5 is a schematic diagram of the pyramid prism assembly (2).
FIG. 6 is a schematic view of the internal optical path of the interference lens group (4).
FIG. 7 is a schematic structural diagram of the interference lens group (4).
Fig. 8 is a schematic structural view of the laser light source adjusting frame (8).
Fig. 9 is a schematic diagram of the angle measurement of the present invention.
Detailed Description
The invention is described in detail below with reference to the figures and specific embodiments.
The invention relates to an interference angle measuring system in a vacuum cryogenic environment, which comprises a pyramid prism assembly, a pyramid prism constant-temperature mounting plate, a pyramid prism constant-temperature protective cover, an interference mirror group, a laser light source adjusting frame, a laser light source thermostat, a laser light source pressure-maintaining pipe and a system constant-temperature supporting frame. The pyramid prism subassembly is assembled with pyramid prism constant temperature mounting panel, the integrative assembly of pyramid prism constant temperature safety cover, guarantees that the pyramid prism subassembly is installed after being surveyed corner target surface, has stable temperature interface, prevents cryrogenic background direct radiation in the vacuum tank in glass surface simultaneously. As shown in fig. 6 and 7, the interference lens set is mounted on the system constant temperature support, the laser light source is mounted on the laser light source adjusting frame, and the interference lens set is integrally mounted on the system constant temperature support after being placed in the laser light source thermostat. And a laser light source pressure-maintaining pipe is arranged on the surface of the incubator and communicated with the atmosphere after being communicated with the outside of the vacuum tank. The laser light source is in a constant temperature and pressure environment, and the vacuum adaptability test requirement is met. The invention has the advantages of simple structure, stable temperature, strong applicability, low cost and the like, and can realize the measurement function of the high-precision interference goniometer under the vacuum cryogenic environment without customizing the cryogenic space environment adaptability.
Aiming at the use environment and the engineering realization of a vacuum cryogenic space, the invention provides an interference angle measuring system of the vacuum cryogenic environment, which is shown in a figure 1, a figure 2 and a figure 3:
the device comprises a pyramid prism assembly (2), a pyramid prism constant-temperature mounting plate (1), a pyramid prism constant-temperature protection cover (3), an interference mirror group (4), a laser light source (7), a laser light source adjusting frame (8), a laser light source thermostat (5), a laser light source pressure-maintaining tube (6) and a system constant-temperature support frame (9).
As shown in fig. 4, the pyramid prism constant temperature mounting plate (1) preferably comprises: the circular invar steel material structural slab is provided with a mounting hole of a pyramid prism component (2), a mounting hole of a rotating platform and a mounting hole of a pyramid prism constant-temperature protective cover (3). A thermal stress release passage is designed on the surface of the pyramid prism constant-temperature mounting plate (1), so that a temperature field for constant mounting of the pyramid prism assembly (2) is guaranteed.
The pyramid prism assembly (2), as shown in fig. 5, has a preferred embodiment: the four pyramid prisms are positioned on the end surface of the cross structure, are symmetrical in pairs and are respectively positioned on the measurement base lines in the pitching direction and the yawing direction. The distance between the vertexes of every two pyramid prisms is 15 cm. The specific length is determined by calibration.
Pyramid prism constant temperature safety cover (3), preferred scheme specifically is: the cylinder metal cover of aluminum alloy material sets up the light path passageway of pyramid prism subassembly (2), installs in pyramid prism constant temperature mounting panel (1).
The invention integrally assembles a pyramid prism component (2), a pyramid prism constant-temperature mounting plate (1) and a pyramid prism constant-temperature protection cover (3). The surface of the pyramid prism constant-temperature mounting plate (1) is pasted with uniform heating sheets, and the surface temperature of the pyramid prism assembly (2) is ensured to be 20 +/-1 ℃ through temperature control. The mounting surface of the pyramid prism constant-temperature mounting plate (1) is directly mounted on the surface of the measured corner structure. And a heat insulation gasket is arranged between the mounting surface to be tested and the pyramid prism constant temperature mounting plate (1) to isolate the temperature conduction between the mounting surface to be tested and the pyramid prism constant temperature mounting plate (1). The pyramid prism assembly (2) is ensured to be on a constant temperature interface to the maximum extent.
The invention installs the pyramid prism constant temperature protective cover (3) outside the pyramid prism component (2) and the pyramid prism constant temperature mounting plate (1), the surface is coated with a plurality of layers of heat insulating materials, the 100K deep cooling background low temperature radiation in the vacuum tank is prevented, and the glass surface temperature gradient of the pyramid prism component (2) is ensured to be less than 1 ℃.
The preferred scheme of the interference mirror group (4) is as follows: and the structure cavity is packaged with the optical fiber and consists of a spectroscope, a reflector and a mechanical structure. The interference lens group (4) is positioned between the pyramid prism component (2) and the laser light source (7). The spectroscope and the reflector in the interference mirror group (4) realize the beam splitting and converging functions of the light path, and the optical interference system is formed by the spectroscope and the reflector, the pyramid prism component (2) and the laser light source (7). The mechanical structure of the interference lens group (4) is made of titanium alloy material with low heat conductivity, so that the temperature influence of an external structure on the interference lens group is reduced while the supporting and temperature protecting effects are realized. Meanwhile, an optical light-passing port is reserved on the mechanical structure, so that light beams can be emitted from the mechanical structure.
The laser light source thermostat (5), the preferred scheme specifically is: and the aluminum alloy frame is sleeved outside the laser light source adjusting frame (8) and the laser light source (7). According to the heat source distribution condition of the laser light source (7), the outer surface of the laser light source thermostat (5) is provided with active temperature control measures, including a heating sheet, a temperature measuring resistor and multilayer coating, and the surface temperature is better than 20 +/-1 ℃, which is an important condition for ensuring the stability of the output wavelength of the laser light source (7).
Laser light source pressure-retaining pipe (6), preferred scheme specifically is: one end of the hollow air duct is connected with the vacuum tank, and the other end of the hollow air duct is connected with the laser light source thermostat (5). The connecting end all has the leakproofness, guarantees at the in-process that vacuum tank bled, and laser source (7) are in the constant voltage state all the time.
The laser light source (7) has the preferable scheme that: the commercial interference goniometer head assembly is a commercial standard device for emitting interference laser and receiving interference fringes.
As shown in fig. 8, the laser light source adjusting frame (8) is preferably: the high-precision adjusting platform with a stainless steel structure is positioned at the bottom of the laser light source and used for adjusting the height of the laser light source (7), the pitching angle and the yawing angle. So that the light emitted by the laser light source (7) can be vertically incident into the interference mirror group (4). The schematic diagram is as follows.
According to the invention, a laser light source (7) is arranged on a laser light source adjusting frame (8), and after being put into a laser light source thermostat (5), the light path coherence of the interference goniometer is realized by adjusting the laser light source adjusting frame (8).
The system constant temperature support frame (9), preferred scheme specifically is: one end of the invar steel cylindrical support is used for supporting the interference lens group (4), the laser light source thermostat (5), the laser light source pressure-maintaining tube (6), the laser light source (7) and the laser light source adjusting frame (8) in the vacuum tank. In order to ensure that the interference angle measuring system has good stability test, the surface of the system constant temperature support frame (9) is provided with active temperature control measures, including a heating sheet, a temperature measuring resistor and a plurality of layers of coatings. The surface temperature is ensured to be 20 +/-1 ℃, and the high-precision measurement stability is ensured.
The preferred scheme is as follows: the interference lens group (4) is arranged on a system constant temperature support frame (9). The surface of the system constant temperature support frame (9) is adhered with uniform heating sheets, active temperature control is carried out, and meanwhile, the outer surface is coated with multiple layers of heat insulation materials, so that the temperature of the system constant temperature support frame (9) is controlled within the range of 25 +/-1 ℃, and a stable support reference is provided for the interference angle measuring system.
The preferred scheme is as follows: the laser constant temperature control system is characterized in that a laser light source (7), a laser light source adjusting frame (8) and a laser light source constant temperature box (5) are integrally arranged on a system constant temperature support (9). The laser light source thermostat (5) and the system thermostatic support (9) are installed in a heat conduction mode, and the temperature gradient of the laser light source thermostat (5) is guaranteed to be consistent with that of the system thermostatic support (9). Meanwhile, the outer surface of the laser light source thermostat (5) is coated with a plurality of layers of heat insulating materials, so that the low-temperature radiation of the 100K deep cooling background in the vacuum tank is prevented.
The preferred scheme is as follows: the invention carries out air tightness design on the laser light source thermostat (5) and ensures that the structure leakage rate is less than 1 multiplied by 10 < -4 > Pa.L/s. A laser light source pressure-maintaining pipe (6) is arranged on the surface of a laser light source thermostat (5) and communicated with the atmosphere through the outside of a vacuum tank, so that a laser light source (7) is in a constant-temperature and constant-pressure environment, and the requirement of vacuum adaptability testing is met.
The preferred scheme is as follows: the vacuum environment deflation design is considered in all the bolt connection installation adopted by the invention, and the vacuum degree of the whole vacuum system is not influenced when the system works in the vacuum environment.
The pyramid prism, the pyramid prism constant-temperature mounting plate and the pyramid prism constant-temperature protective cover are integrally assembled, so that the pyramid prism is guaranteed to have a stable temperature interface after being mounted on the surface of a target of a measured corner, and meanwhile, the deep cooling background in the vacuum tank is prevented from directly radiating on the surface of glass. The interference lens group is arranged on the system constant temperature support frame, the laser light source is arranged on the laser light source adjusting frame, and the interference lens group is integrally arranged on the system constant temperature support frame after being placed in the laser light source constant temperature box. And a laser light source pressure-maintaining pipe is arranged on the surface of the incubator and communicated with the atmosphere after being communicated with the outside of the vacuum tank. The laser light source is in a constant temperature and pressure environment, and the vacuum adaptability test requirement is met. The invention has the advantages of simple structure, stable temperature, strong applicability, low cost and the like, and can realize the measurement function of the high-precision interference goniometer under the vacuum cryogenic environment without customizing the cryogenic space environment adaptability.
The preferred scheme is as follows: as shown in fig. 9, the preferred mode of operation of the system of the present invention is: in a low-temperature vacuum environment, a constant-temperature and constant-pressure environment is established, and a laser light source is placed in the established constant-temperature and constant-pressure environment to ensure that the laser light source can work normally. And fixedly connecting the pyramid prism with the measured corner target. Two beams of light emitted by the laser light source enter the interference mirror group, and the rotation angles of the measured rotation angle target under the pitching dimension and the yawing dimension are respectively tested. The measurement principle is illustrated by taking a pitch direction corner test as an example: a beam of laser emitted by the laser source enters the interference mirror group and then is divided into two paths, the two paths of laser respectively irradiate the two pyramid prisms in the pitching direction, and light returns along 180 degrees after being reflected by the pyramid prisms and then interferes after entering the interference mirror group. The optical path difference (delta L) of the two paths of light can be measured by analyzing the interference fringes. And (3) obtaining the deflection angle of the corner cube prism by combining the distance (S) between the corner cube prisms, thereby obtaining the deflection angle (theta) of the measured corner target.
θ＝arcsin(ΔL/S)
The preferable scheme of the measured corner target is as follows: a rotating table placed in the vacuum tank, the rotating table can rotate in both pitching and yawing. The invention mainly realizes the test of the rotation angle of the rotating table.
The invention realizes a further scheme for improving the angle measurement precision: let the influence of the variation of the temperature difference of the pyramid prism on the measurement accuracy be deltaRChange of pyramid prism temperature to DeltaTRMeasuring an angle of
Then
By controlling the size of the delta T, the measurement precision of the system is improved. The system can control the delta T within 1 ℃ and can reach 0.5 ℃ at most, thereby greatly ensuring the angle measurement precision of the system.
The system is a high-precision angle measuring instrument applied to a vacuum system, can adapt to a cryogenic background (100K) low-temperature radiation environment, and can ensure the realization of the angle measuring precision of 0.1'. In a ground verification system of aerospace products, the problem of angle precision measurement under deep cooling vacuum can be solved only by adopting the scheme of the invention, and the ground verification system has the advantages of lower cost and reliable engineering. The application of the system establishes a stable foundation for the high-precision test of the star sensor, and is an indispensable part in the overall performance index evaluation of the high-precision star sensor, particularly the sub-arc-second precision star sensor.
The invention is not described in detail and is within the knowledge of a person skilled in the art.
Claims (7)
1. The utility model provides an interference angle measurement system of vacuum cryrogenic environment which characterized in that: located in a vacuum tank, the system comprising: the device comprises a pyramid prism assembly (2), a pyramid prism constant-temperature mounting plate (1), a pyramid prism constant-temperature protection cover (3), an interference mirror group (4), a laser light source (7), a laser light source adjusting frame (8), a laser light source thermostat (5), a laser light source pressure-maintaining pipe (6) and a system constant-temperature support frame (9); the pyramid prism assembly (2), the pyramid prism constant-temperature mounting plate (1) and the pyramid prism constant-temperature protective cover (3) are integrally assembled, so that the pyramid prism assembly (2) is guaranteed to have a temperature interface after being mounted on the surface of a target of a measured corner, and meanwhile, the 100K deep cooling background in the vacuum tank is prevented from directly radiating on the surface of the pyramid prism assembly (2); the interference lens group (4) is arranged on a system constant temperature support frame (9), the laser light source (7) is arranged on a laser light source adjusting frame (8), and after being put into the laser light source thermostat (5) together, the laser light source (7), the laser light source adjusting frame (8) and the laser light source thermostat (5) form a whole which is arranged on the system constant temperature support frame (9); a laser light source pressure-maintaining pipe (6) is arranged on the laser light source thermostat (5) and communicated with the atmosphere after being communicated with the outside of the vacuum tank, so that the laser light source (7) is in a constant-temperature and constant-pressure environment, and the requirement of vacuum adaptability test is met;
the interference mirror group (4) is positioned between the pyramid prism component (2) and the laser light source (7), the laser light source (7) emits laser, the laser is split into two paths by the interference mirror group (4), and the two paths of laser respectively reach the surface of the pyramid prism component (2) and then return to the interference mirror group (4); two beams of return beams interfere with each other, and the angle of the measured corner target is determined through the condition of interference fringes;
the pyramid prism constant-temperature mounting plate (1) can be mounted on a measured corner target and provides a mounting base for the pyramid prism assembly (2);
the pyramid prism constant-temperature protection cover (3) provides a constant-temperature environment for the pyramid prism assembly (2);
and the laser light source adjusting frame (8) is used for adjusting the position relation between the pyramid prism assembly (2) and the interference mirror group (4), so that after the laser light source (7) emits laser light, the laser light is split into light beams by the interference mirror group (4) and then reaches the surface of the pyramid prism assembly (2), and then the light beams can return to the interference mirror group (4).
2. The interferometric angle measuring system of claim 1, wherein:
the laser light source pressure-maintaining pipe (6) is used for communicating the laser light source thermostat (5) with the outside of the vacuum tank, so that the laser light source (7) is positioned in the vacuum tank in a constant-pressure environment;
and the system constant temperature support frame (9) is fixed inside the vacuum tank and serves as a support structure.
3. The interferometric angle measuring system of claim 1, wherein: uniformly heating plates are pasted on the surface of the pyramid prism constant-temperature mounting plate (1), and the surface temperature of the pyramid prism assembly (2) is ensured to be 20 +/-1 ℃ through temperature control; the mounting surface of the pyramid prism constant-temperature mounting plate (1) is directly mounted on the surface of a tested corner structure; and a heat insulation gasket is arranged between the measured mounting surface and the pyramid prism constant temperature mounting plate (1), so that the temperature conduction between the measured mounting surface and the pyramid prism constant temperature mounting plate (1) is isolated, and the pyramid prism assembly (2) is ensured to be positioned on a constant temperature interface.
4. The interferometric angle measuring system of claim 1, wherein: install pyramid prism constant temperature safety cover (3) in pyramid prism subassembly (2), pyramid prism constant temperature mounting panel (1) outside, surface cladding multilayer thermal insulation material prevents the 100K cryrogenic background low temperature radiation in the vacuum tank, guarantees that the glass surface temperature gradient of pyramid prism subassembly (2) is less than 1 ℃.
5. The interferometric angle measuring system of claim 1, wherein: the interference lens group (4) is arranged on a system constant temperature support frame (9); the surface of the system constant temperature support frame (9) is adhered with uniform heating sheets, active temperature control is carried out, and meanwhile, the outer surface is coated with multiple layers of heat insulation materials, so that the temperature of the system constant temperature support frame (9) is controlled within the range of 25 +/-1 ℃, and a stable support reference is provided for the interference angle measuring system.
6. The interferometric angle measuring system of claim 1, wherein: integrally mounting a laser light source (7), a laser light source adjusting frame (8) and a laser light source thermostat (5) on a system thermostatic support (9); the laser light source thermostat (5) is installed with the system thermostat bracket (9) in a heat conduction mode, so that the temperature gradient of the laser light source thermostat (5) is kept consistent with that of the system thermostat bracket (9); meanwhile, the outer surface of the laser light source thermostat (5) is coated with a plurality of layers of heat insulating materials, so that the low-temperature radiation of the 100K deep cooling background in the vacuum tank is prevented.
7. The interferometric angle measuring system of claim 1, wherein: the laser light source thermostat (5) is designed to be airtight, and the structure leakage rate is ensured to be less than 1 x 10 < -4 > Pa.L/s; a laser light source pressure-maintaining pipe (6) is arranged on the surface of a laser light source thermostat (5) and communicated with the atmosphere through the outside of a vacuum tank, so that a laser light source (7) is in a constant-temperature and constant-pressure environment, and the requirement of vacuum adaptability testing is met.
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