CN112345459A - Receiving and transmitting integrated optical fiber ultrasonic probe and ultrasonic excitation and detection system - Google Patents
Receiving and transmitting integrated optical fiber ultrasonic probe and ultrasonic excitation and detection system Download PDFInfo
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- CN112345459A CN112345459A CN202011178744.4A CN202011178744A CN112345459A CN 112345459 A CN112345459 A CN 112345459A CN 202011178744 A CN202011178744 A CN 202011178744A CN 112345459 A CN112345459 A CN 112345459A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
Abstract
The invention discloses a receiving and transmitting integrated optical fiber ultrasonic probe and an ultrasonic excitation and detection system, and belongs to the technical field of ultrasonic excitation and detection. The sensor comprises a guide optical fiber, a sensing polymer film, a wavelength selective transmission film and an excitation polymer film; the sensing polymer film, the wavelength selective transmission film and the excitation polymer film are sequentially covered on the guide optical fiber; the excitation light penetrates through the sensing polymer film and the wavelength selective transmission film, is absorbed by the excitation polymer film and generates an ultrasonic signal; the signal light penetrates through the sensing polymer film and is reflected by the wavelength selective transmission film to serve as a detection signal; the sensing polymer film is used for changing the optical path of the reflected detection signal and realizing the phase modulation of the detection signal. The sensing polymer film, the wavelength selective transmission film and the excitation polymer film are sequentially covered on the near-end surface of the guide optical fiber to form an integral structure, so that the optical fiber ultrasonic probe can simultaneously realize ultrasonic excitation and ultrasonic detection.
Description
Technical Field
The invention belongs to the technical field of ultrasonic excitation and detection, and particularly relates to a receiving and transmitting integrated optical fiber ultrasonic probe and an ultrasonic excitation and detection system.
Background
The ultrasonic wave is a sound wave with the frequency of more than 20kHz, and has strong penetrability due to the short wavelength, so the ultrasonic wave has wide application prospect in the fields of high-resolution medical images, nondestructive testing and the like. The ultrasonic probe generates an ultrasonic pulse and measures an ultrasonic signal reflected by the object to be detected, so that imaging or structural analysis of the object to be detected can be realized.
The optical fiber ultrasonic probe has received wide attention due to its advantages of electromagnetic interference resistance, small size and high flexibility. Currently, optical fiber ultrasonic probes are mainly classified into two types: the first type is a fiber ultrasound excitation probe, which is different from a conventional piezoelectric ultrasound transducer in that in order to efficiently convert light energy into ultrasonic energy, the fiber ultrasound excitation probe needs to be coated with a material having high optical absorption and an elastic layer material having rapid thermal diffusion and high thermoelastic expansion at its end surface. Polydimethylsiloxane (PDMS) is considered the most desirable elastomeric layer material because of its high coefficient of thermal expansion. In recent years, research has been mainly focused on materials having high optical absorption, such as graphene, gold nanoparticles, carbon black, carbon nanotubes, and the like. However, such a probe cannot detect an incident ultrasonic signal, and ultrasonic detection still relies on an external ultrasonic sensor, which makes it difficult to further reduce the size of the probe. The second type is an optical fiber ultrasonic sensing probe, the optical fiber ultrasonic sensing probe obtains an ultrasonic signal to be detected by measuring the shape or physical parameter change of the probe caused by ultrasonic waves, and the current main detection scheme comprises a Mach-Zehnder interference type, a low-coherence Michelson type, a Fabry-Perot type interferometer and a resonant cavity type. However, such probes can only be used for detecting incident ultrasonic waves, cannot convert light energy into ultrasonic signals, cannot generate ultrasonic signals, still need additional ultrasonic source assistance to be used for ultrasonic imaging or nondestructive testing and the like, and are also difficult to miniaturize.
Disclosure of Invention
Aiming at the defects or improvement requirements of the prior art, the invention provides a receiving-transmitting integrated optical fiber ultrasonic probe and an ultrasonic excitation and detection system, so that the technical problem that the conventional optical fiber ultrasonic probe cannot realize ultrasonic excitation and ultrasonic detection at the same time is solved.
To achieve the above object, according to one aspect of the present invention, there is provided a transceiver-integrated fiber ultrasound probe including: a guide optical fiber, a sensing polymer film, a wavelength selective transmission film and an excitation polymer film;
the output end of the guide optical fiber is a flat end face, and the sensing polymer film, the wavelength selective transmission film and the excitation polymer film are sequentially covered on the flat end face;
the guide optical fiber is used for transmitting the excitation light incident from the input end of the guide optical fiber, and the excitation light sequentially penetrates through the sensing polymer film and the wavelength selective transmission film and is finally absorbed by the excitation polymer film to generate an ultrasonic signal;
the guiding optical fiber is also used for guiding the transmission of signal light incident from the input end of the guiding optical fiber, and the signal light penetrates through the sensing polymer film and is finally reflected back to the guiding optical fiber by the wavelength selective transmission film to serve as a detection signal;
when the sensing polymer film is excited by ultrasonic waves, the thickness of the sensing polymer film is changed, the change frequency is equal to the frequency of incident ultrasonic waves, so that the optical path of a reflection detection signal passing through the sensing polymer film is changed, the phase modulation is carried out on the detection signal, the detected ultrasonic signal is obtained by monitoring the phase change of the detection signal, and the detection of the ultrasonic signal is realized.
Preferably, the sensing polymer film is made of a polymer material with Young modulus of 100MPa to 100GPa, has the transmittance of more than 90 percent at the wavelength of excitation light and signal light, and has the thermal expansion coefficient of less than 10-4The film thickness is 1 μm to 1mm at/° C.
Preferably, the guide optical fiber is a double-clad optical fiber, and comprises a fiber core, an inner cladding and an outer cladding which are arranged from inside to outside;
the transmission mode of the fiber core at the signal light wavelength is single-mode transmission and is used for transmitting the signal light;
the transmission mode of the inner cladding at the wavelength of the excitation light is multimode transmission and is used for transmitting the excitation light;
the outer cladding is for confining the excitation light and the signal light.
Preferably, the signal light is a narrow linewidth laser, and the excitation light is pulsed light or modulated continuous light.
Preferably, the wavelength selective transmission film is a dielectric thin film formed by alternately depositing two different inorganic materials with refractive indexes of 1.3-3, and has a reflectivity of 90% or more for a signal light wavelength and a transmittance of 90% or more for an excitation light wavelength.
Preferably, the excited polymer film has a light absorption rate of 90% or more with respect to the wavelength of the excitation light, and has a thermal expansion coefficient of more than 10-4V. C. The material of the excitation polymer film is a composite material formed by a light absorption material with high optical absorption and particle size of 10 nanometers to 10 micrometers in an excitation light waveband and a polymer with rapid thermal diffusion and high thermoelastic expansion coefficient, and the composite material and the wavelength selective transmission film have good adsorbability.
According to another aspect of the present invention, there is provided an ultrasonic excitation and detection system comprising the integrated transceiver fiber-optic ultrasonic probe as described above, further comprising: the device comprises an excitation laser, a space optical coupling device, a narrow linewidth laser, a first optical fiber coupler, a circulator, a second optical fiber coupler, a phase stabilizing device, a third optical fiber coupler, a photoelectric balance detector, a data acquisition device and a detection box;
the output end of the excitation laser is connected to the input end of the spatial light coupling device, and the output end of the spatial light coupling device is connected to the first input end of the second optical fiber coupler;
the output end of the narrow linewidth laser is connected to the input end of the first optical fiber coupler, the first output end of the first optical fiber coupler is connected to the first port of the circulator, and the second output end of the first optical fiber coupler is connected to the input end of the phase stabilizing device;
a second port of the circulator is connected to a second input end of the second optical fiber coupler, and an output end of the second optical fiber coupler is connected to an input end of the optical fiber ultrasonic probe; the third port of the circulator is connected to the second input end of the third optical fiber coupler;
the input end of the phase stabilizing device is connected to the first input end of the third optical fiber coupler, and two output ends of the third optical fiber coupler are respectively connected with two input ends of the photoelectric balance detector;
the output end of the photoelectric balance detector is respectively connected with the input end of the data acquisition device and the control end of the phase stabilizing device;
the optical fiber ultrasonic probe is arranged in the detection box;
the excitation laser is used for generating excitation light; the space optical coupling device is used for coupling the excitation light into the second optical fiber coupler; the narrow linewidth laser is used for generating continuous narrow linewidth laser; the first optical fiber coupler is used for dividing the narrow-linewidth laser into signal light and reference light, inputting the signal light to a first port of the circulator and inputting the reference light to the phase stabilizing device; the circulator is used for inputting the signal light to the second optical fiber coupler; the second coupler is used for coupling the signal light with the excitation light and transmitting the signal light to the optical fiber ultrasonic probe; a detection signal reflected by the fiber ultrasonic probe passes through the second fiber coupler and the circulator and enters the third fiber coupler through a third port of the circulator; the third optical fiber coupler is used for enabling the detection signal to interfere with the reference light and converting the phase difference between the detection signal and the reference light into light intensity change; the photoelectric balance detector is used for converting the light intensity change into a voltage signal to be output; the phase stabilizing device is used for processing the output voltage signal in real time and modulating the phase of the reference light; the data acquisition device is used for receiving the voltage signal, quantitatively storing and displaying the voltage signal, and acquiring the ultrasonic signal to be detected by monitoring the system light intensity change caused by the phase change of the detection signal.
Preferably, the detection box comprises an ultrasonic reflector and a sound insulation water tank;
the ultrasonic reflector is arranged in the sound insulation water tank and is oppositely arranged on the optical fiber ultrasonic probe; deionized water is filled in the sound insulation water tank.
Preferably, the dc output voltage of the photo balance detector is 0V.
Preferably, the first input end of the second optical fiber coupling device is a multimode optical fiber, and the second input end thereof is a single-mode optical fiber;
and the output end optical fiber of the second optical fiber coupling device is a double-clad optical fiber with the same parameters as the guide optical fiber.
Preferably, the phase stabilization device comprises a signal processor and a phase modulator; the signal processor is used for processing the voltage signal output by the photoelectric balance detector and feeding back a processing result to the phase modulator; the phase modulator is used for modulating the phase of the reference light according to the processing result.
Preferably, the sound pressure of the incident ultrasonic wave is in direct proportion to the voltage of the electric signal output by the photoelectric balance detector according to a formula
Obtaining the sound pressure information of the light incident ultrasonic waves, wherein beta is the sound pressure-voltage sensitivity of an ultrasonic wave excitation and detection system, k is the optical power-voltage gain coefficient of a photoelectric balance detector, and IsFor the intensity of the detected light coupled into the third fiber coupler, IfFor the intensity of the reference light coupled into the third fiber coupler,
is the phase change quantity of the detection signal of the optical fiber ultrasonic probe caused by the ultrasonic wave action.
In general, compared with the prior art, the above technical solution contemplated by the present invention can achieve the following beneficial effects:
1. the sensing polymer film, the wavelength selective transmission film and the excitation polymer film are sequentially covered on the near-end surface of the guide optical fiber to form an integral structure, so that the optical fiber ultrasonic probe can simultaneously realize ultrasonic excitation and ultrasonic detection.
2. According to the invention, the wavelength selective transmission film is introduced into the optical fiber ultrasonic probe, on one hand, the light absorption material absorbs the energy of the excitation light by transmitting the excitation light and irradiating the excitation light onto the excited polymer film doped with the light absorption material, the temperature rises and is transferred to the polymer material to generate thermal expansion and generate ultrasonic waves; and on the other hand, the signal light is reflected, and the ultrasonic signal is modulated to the phase of the reflected signal light through the regulation and control of the incident ultrasonic wave on the thickness of the sensing polymer film, so that the detection of the ultrasonic wave is realized. And the ultrasonic excitation and detection device is integrated to the same end face of the guide optical fiber, so that small-size receiving and transmitting integration is realized.
3. The invention adopts the polymer film as the sensing transduction structure of the optical fiber ultrasonic probe, and can regulate and control the sensitivity and the acoustic frequency response curve of the ultrasonic probe by changing the thickness and the shape of the polymer film.
4. The double-clad optical fiber is adopted as the guide optical fiber, and the signal light is transmitted in the fiber core, so that single-mode transmission can be realized, the interference between the modes is avoided, and the noise of the sensor is reduced; the excitation light is transmitted by the inner cladding, and the large effective area of the inner cladding is utilized, so that the transmission of the high-energy excitation light below the damage threshold of the optical fiber is realized, and the intensity of the ultrasonic wave generated by the optical fiber ultrasonic probe is improved.
5. The invention adopts coherent detection technology to convert the phase change of the signal light returned by the optical fiber ultrasonic probe into light intensity change, thereby greatly improving the sensitivity of the system and realizing the ultrasonic detection of low-noise equivalent pressure.
6. The invention adopts the phase stabilizing device, adjusts and controls the phase of the reference light by analyzing and processing the output signal of the optical balance detector in real time, can effectively compensate the influence of environmental noise on a measuring system, and can realize long-time stable measurement.
Drawings
FIG. 1 is a schematic structural diagram of a transmitting-receiving integrated fiber-optic ultrasonic probe according to the present invention;
FIG. 2 is a schematic diagram of the ultrasonic excitation and detection system of the present invention;
fig. 3 is a waveform diagram of the ultrasonic waves excited and detected in the embodiment of the present invention, in which (a) in fig. 3 is a waveform diagram of the ultrasonic waves generated by the fiber-optic ultrasonic probe, and (b) in fig. 3 is a waveform diagram of the ultrasonic waves generated by the fiber-optic ultrasonic probe, which are reflected by the ultrasonic reflector and captured by the fiber-optic ultrasonic probe again.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: an excitation laser 1; a spatial light coupling device 2; a narrow linewidth laser 3; a first fiber coupler 4; a circulator 5; a second fiber coupler 6; a fiber-optic ultrasonic probe 7; a guide optical fiber 71; a sensing polymer film 72; a wavelength selective transmission film 73; excited polymer film 74; the excitation light 75; the signal light 76; a phase stabilization device 8; a third fiber coupler 9; a photoelectric balance detector 10; a data acquisition device 11; an ultrasonic reflector 12; a sound-proof water tank 13.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Fig. 1 is a schematic structural diagram of a transceiver-integrated fiber ultrasound probe according to the present invention. As shown in fig. 1, the present invention provides a transceiver-integrated fiber ultrasound probe, which includes a guide fiber 71, a sensing polymer film 72, a wavelength selective transmission film 73, and an excitation polymer film 74. The guiding fiber 71 is a double-clad fiber, the inner cladding of which is used for transmitting the excitation light 75 and the core of which is used for transmitting the signal light 76. The proximal end face of the guiding fiber 71 is polished or cut flat and a layer of cured uv glue is deposited on the proximal end face of the guiding fiber 71 as the sensing polymer film 72 and at the same time as the substrate for the wavelength selective transmission film 73. A dielectric film having wavelength selective transmission characteristics is deposited on the surface of the sensing polymer thin film 72 as the wavelength selective transmission film 73 for reflecting signal light and transmitting excitation light. The excitation polymer film 74 is deposited on the surface of the dielectric film for absorbing the excitation light and generating the ultrasonic signal using the photoacoustic effect.
Specifically, the diameter of the fiber core is less than 10 microns, the transmission mode is single-mode transmission, and the signal light 76 is transmitted in the fiber core. The diameter of the inner cladding is greater than 10 microns, the transmission mode is multimode transmission, and the excitation light 75 is transmitted in the inner cladding. To be more specific, the outer cladding layer is used to bind the excitation light and the signal light, and the output signal light is a narrow linewidth laser, and the excitation light is a pulse light or a modulated continuous light.
Preferably, the guiding fiber has an outer cladding diameter of 125 microns, an inner cladding diameter of 105 microns, and a core diameter of 8 microns.
Preferably, the sensing polymer film 72 is made of a polymer material having a young's modulus of 100MPa to 100GPa, which has high transmittance at both excitation light and signal light wavelengths, a low thermal expansion coefficient, and good adsorptivity with the end face of the guiding fiber.
Preferably, the wavelength selective transmission film 73 is a dielectric film, is formed by sequentially and alternately depositing materials with different refractive indexes, has high transmittance for excitation light wavelength, has high reflectance for signal light wavelength, and has good adsorbability with the sensing polymer film 72 material.
Preferably, the material of the excitation polymer film 74 is a composite material composed of a light absorption material having high optical absorption in the excitation light band and a particle size of 10 nm to 10 μm and a polymer having a rapid thermal diffusion and a high thermoelastic expansion coefficient, and the composite material has good adsorptivity with the wavelength selective transmission film, and the thickness of the excitation polymer film 74 is 1 μm to 500. mu.m.
Further, the present invention provides a method for preparing the above-mentioned transceiver-integrated optical fiber ultrasonic probe, which comprises the following steps:
and S1, cutting or polishing one end of the guide optical fiber to be flat, immersing the flat end into liquid ultraviolet glue, and irradiating ultraviolet light until the ultraviolet glue is completely cured to form the sensing polymer film.
It should be noted that the guiding fiber immersed in the liquid uv gel is extracted from the uv gel at a suitable speed and the irradiation time with the uv lamp is two hours.
And S2, sequentially and alternately depositing multiple layers of zinc sulfide and sodium hexafluoroaluminate on the surface of the sensing polymer film by using a magnetron sputtering method to form a dielectric film serving as a wavelength selective transmission film.
S3, immersing one end of the guiding optical fiber with the wavelength selective transmission film into a mixture of PDMS polymer and carbon black, standing, taking out, and irradiating with an ultraviolet lamp until the end is completely cured to form an excited polymer film.
Specifically, a PDMS prepolymer mixed in a ratio of 10:1 was mixed with carbon black in a mass ratio of 5:1, and stirred uniformly, the proximal end face of the guiding optical fiber having the dielectric film already provided was immersed in the mixture, was left to stand for two minutes, was pulled out at an appropriate speed, and was irradiated with an ultraviolet lamp for two hours until the PDMS prepolymer was completely cured.
In a further description, the wavelength selective transmission film is a dielectric film formed by sequentially and alternately depositing a plurality of layers of zinc sulfide and sodium hexafluoroaluminate, and is a structure with periodic refractive index modulation, and can generate high reflectivity for light with a specific wavelength and high transmissivity for light with another specific wavelength. By designing the parameters of the dielectric film, when the excitation light and the signal light are transmitted along the guide optical fiber, the excitation light can penetrate through the dielectric film and irradiate the excitation polymer film, but the signal light has high reflectivity and can be totally reflected by the dielectric film to generate a beam of light signal transmitted reversely.
When excitation light is injected into the optical fiber ultrasonic probe, the excitation light sequentially penetrates through the guide optical fiber, the cured ultraviolet glue film and the dielectric film and finally irradiates the PDMS film doped with the carbon black, the PDMS film doped with the carbon black absorbs the excitation light and heats up, and the PDMS film is expanded due to heating up to compress surrounding media to generate ultrasonic waves which are transmitted outwards.
When signal light is injected into the optical fiber ultrasonic probe, the signal light can sequentially pass through the guide optical fiber and the solidified ultraviolet adhesive film and is completely reflected by the dielectric film to generate a reflected light signal, the thickness of the solidified ultraviolet adhesive film is changed due to the action of ultrasonic waves, the optical path of the reflected light signal passing through the ultraviolet adhesive film is changed, and the phase modulation of the reflected light signal passing through the ultraviolet adhesive film is realized.
The cured uv glue film acts as an ultrasonic detection transducer and the uv glue is adhered to the proximal face of the guiding fiber. Incident signal light passes through the guide optical fiber and the ultraviolet glue film, and is completely reflected by the dielectric film to return to the guide optical fiber. When an external ultrasonic signal acts on the ultraviolet adhesive film, the thickness of the polymer film is changed due to the action of sound pressure, the change frequency is equal to the incident ultrasonic frequency, and the vibration causes the optical path of the signal light which passes through the ultraviolet adhesive film and is reflected by the dielectric film to be changed, so that the phase of the reflected signal light is changed. When the ultraviolet adhesive film is deformed under the action of ultrasonic waves, the relation between the film thickness variation d and the sound pressure P is as follows:
the phase change of the corresponding signal light is:
wherein E is Young's modulus of the sensing polymer film material, n is refractive index, l is thickness thereof, λ is wavelength of the signal light, λaFor the wavelength of the ultrasonic signal to be measured, the phase change of the optical signal is proportional to the sound pressure, and the ultrasonic sensing sensitivity is obtained
Only with sensingThe material and the axial thickness of the polymer film are related, the transverse structure size of the sensing polymer film is irrelevant, the size of the ultrasonic probe is only dependent on the size of the guide optical fiber, and the ultrasonic probe with the ultra-small size can be manufactured by using the structure. The sensing polymer film may also be polydimethylsiloxane, epoxy, poly-p-dichlorotoluene or poly-ethylene terephthalate.
FIG. 2 is a schematic diagram of the ultrasonic excitation and detection system of the present invention. As shown in fig. 2, the invention further provides an ultrasonic excitation and detection system of an optical fiber ultrasonic probe prepared based on the preparation method, which includes an excitation laser 1, a spatial light coupling device 2, a narrow linewidth laser 3, a first optical fiber coupler 4, a circulator 5, a second optical fiber coupler 6, an optical fiber ultrasonic probe 7, a phase stabilizing device 8, a third optical fiber coupler 9, a photoelectric balance detector 10, a data acquisition device 11, an ultrasonic reflector 12 and a sound insulation water tank 13.
Stated further, the output end of the excitation laser 1 is connected to the input end of the spatial light coupling device 2, and the output end of the spatial light coupling device 2 is connected to the first input end of the second optical fiber coupler 6; the output end of the narrow linewidth laser 3 is connected to the input end of the first optical fiber coupler 4, the first output end of the first optical fiber coupler 4 is connected to the first port of the circulator 5, and the second output end of the first optical fiber coupler 4 is connected to the input end of the phase stabilizing device 8; a second port of the circulator 5 is connected to a second input end of the second optical fiber coupler 6, and an output end of the second optical fiber coupler 6 is connected to an input end of the optical fiber ultrasonic probe 7; the third port of the circulator 5 is connected to the second input end of the third optical fiber coupler 9; the input end of the phase stabilizing device 8 is connected to the first input end of the third optical fiber coupler 9, and two output ends of the third optical fiber coupler 9 are respectively connected to two input ends of the photoelectric balance detector 10; the output end of the photoelectric balance detector 10 is respectively connected with the input end of the data acquisition device 11 and the control end of the phase stabilizing device 8; the optical fiber ultrasonic probe 7 is arranged opposite to the ultrasonic reflector 12 and is arranged in the sound insulation water tank 13.
Specifically, the excitation laser 1 generates a high-energy pulse laser having a wavelength corresponding to the high transmittance wavelength of the wavelength selective transmission film 73 in the fiber ultrasonic probe 7. Is coupled into the multimode input port of the second fiber coupler 6 by the spatial light coupling device 2. The narrow linewidth laser 3 generates continuous narrow linewidth laser, and the wavelength of the narrow linewidth laser is consistent with the wavelength of the high reflectivity of the wavelength selective transmission film 73 in the optical fiber ultrasonic probe 7. The narrow linewidth laser has single longitudinal mode output and good coherence, and meets the requirements of coherent detection. The narrow linewidth laser 3 is divided into two paths under the action of the first optical fiber coupler 4, wherein one path is used as signal light to be input into the circulator 5, and the other path is used as reference light to be input into the phase stabilizing device 8; the signal light enters through the port a of the circulator 5, is output to the single-mode input end of the second optical fiber coupler 6 from the port b, and is injected into the optical fiber ultrasonic probe 7 together with the excitation light through the second optical fiber coupler 6; the signal light is reflected back to the port b of the circulator 5 through the wavelength selective transmission film 73 of the fiber-optic ultrasonic probe 7 and is output to the third fiber coupler 9 from the port c; the reference light is modulated by the phase stabilizing device 8, so that the phase difference between the reference light and the signal light is stabilized at pi/2, the system is ensured to work at the optimal working point, the reference light is output to the third optical fiber coupler 9, the reflected signal light interferes with the reference light, the phase change of the signal light is converted into the change of light intensity, the change of light intensity is received by the photoelectric balance detector 10 and converted into a voltage signal, a part of the output of the photoelectric balance detector 10 is input to the phase stabilizing device 8 as a feedback signal, and a part of the output of the photoelectric balance detector 10 is received by the data acquisition device 11 and displayed in real time.
Preferably, the wavelength of the excitation light is 1064nm, the wavelength of the narrow linewidth laser is 1550nm, the splitting ratio of the first optical fiber coupler is 50:50, and the second optical fiber coupler is a double-clad optical fiber coupler.
In a further description, the excitation polymer film 74 in the fiber-optic ultrasonic probe 7 absorbs the ultrasonic signal generated by the excitation light, transmits the ultrasonic signal to the ultrasonic reflector 12 for reflection, returns to the fiber-optic ultrasonic probe 7, and acts on the sensing polymer film 72 in the fiber-optic ultrasonic probe 7 to generate modulation on the optical phase of the reflected signal. The fiber-optic ultrasonic probe 7 and the ultrasonic reflector 12 were placed in a soundproof water tank 13 filled with deionized water for testing.
FIG. 3 is a graph of ultrasonic waveforms excited and detected in an embodiment of the present invention. Wherein (a) in fig. 3 is a waveform diagram of an ultrasonic wave generated by the fiber-optic ultrasonic probe, and (b) in fig. 3 is a waveform diagram of an ultrasonic wave generated by the fiber-optic ultrasonic probe, which is reflected by the ultrasonic reflector and captured by the fiber-optic ultrasonic probe again.
The receiving and transmitting integrated optical fiber ultrasonic probe provided by the invention can be applied to ultrasonic excitation and detection in different medium environments, is not limited to water, and can also be applied to ultrasonic excitation and detection in air and other liquid environments.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A transceiver-integrated fiber ultrasound probe, comprising: a guide optical fiber (71), a sensing polymer film (72), a wavelength selective transmission film (73), and an excitation polymer film (74);
the output end of the guide optical fiber (71) is a flat end face, and the sensing polymer film (72), the wavelength selective transmission film (73) and the excitation polymer film (74) sequentially cover the flat end face;
the guiding optical fiber (71) is used for transmitting the exciting light (75) incident from the input end of the guiding optical fiber, and the exciting light (75) sequentially penetrates through the sensing polymer film (72) and the wavelength selective transmission film (73) and is finally absorbed by the exciting polymer film (74) to generate an ultrasonic signal;
the guide optical fiber (71) is also used for guiding the transmission of signal light (76) incident from the input end of the guide optical fiber, and the signal light (76) is transmitted through the sensing polymer film (72) and finally reflected back to the guide optical fiber (71) by the wavelength selective transmission film (73) to serve as a detection signal;
when the sensing polymer film (72) is excited by ultrasonic waves, the thickness of the sensing polymer film is changed, the change frequency is equal to the frequency of incident ultrasonic waves, so that the optical path of a reflection detection signal passing through the sensing polymer film (72) is changed, the phase of the detection signal is modulated, the phase change of the detection signal is monitored to obtain a detected ultrasonic signal, and the detection of the ultrasonic signal is realized.
2. The integrated optical fiber ultrasonic probe for transmitting and receiving of claim 1, wherein the sensing polymer film (72) is a polymer material with Young's modulus of 100MPa to 100GPa, has a transmittance of more than 90% at both excitation light and signal light wavelengths, and has a thermal expansion coefficient of less than 10-4The film thickness is 1 μm to 1mm at/° C.
3. The transmit-receive integrated fiber optic ultrasonic probe according to claim 1, wherein the guiding fiber (71) is a double-clad fiber comprising a core, an inner cladding and an outer cladding arranged from inside to outside;
the transmission mode of the fiber core at the wavelength of the signal light is single-mode transmission and is used for transmitting the signal light (76);
the transmission mode of the inner cladding at the wavelength of the excitation light is multimode transmission and is used for transmitting the excitation light (75);
the outer cladding layer is for confining the excitation light (75) and the signal light (76).
4. The integrated optical fiber ultrasonic probe of claim 1, wherein the wavelength selective transmission film is a dielectric thin film formed by alternately depositing two different inorganic materials with refractive indexes of 1.3-3, and has a reflectivity of 90% or more for a signal light wavelength and a transmittance of 90% or more for an excitation light wavelength.
5. The integrated optical fiber ultrasonic probe of claim 1, wherein the excited polymer film has a light absorption rate of 90% or more with respect to the wavelength of the excitation light, and a thermal expansion coefficient of more than 10-4/℃。
6. An ultrasonic excitation and detection system comprising the transceiver-integrated fiber-optic ultrasound probe of any of claims 1-4, further comprising: the device comprises an excitation laser (1), a spatial light coupling device (2), a narrow-linewidth laser (3), a first optical fiber coupler (4), a circulator (5), a second optical fiber coupler (6), a phase stabilizing device (8), a third optical fiber coupler (9), a photoelectric balance detector (10), a data acquisition device (11) and a detection box;
the output end of the excitation laser (1) is connected to the input end of the spatial light coupling device (2), and the output end of the spatial light coupling device (2) is connected to the first input end of the second optical fiber coupler (6);
the output end of the narrow linewidth laser (3) is connected to the input end of the first optical fiber coupler (4), the first output end of the first optical fiber coupler (4) is connected to the first port of the circulator (5), and the second output end of the first optical fiber coupler (4) is connected to the input end of the phase stabilizing device (8);
a second port of the circulator (5) is connected to a second input end of the second optical fiber coupler (6), and an output end of the second optical fiber coupler (6) is connected to an input end of the optical fiber ultrasonic probe (7); the third port of the circulator (5) is connected to the second input end of the third optical fiber coupler (9);
the input end of the phase stabilizing device (8) is connected to the first input end of the third optical fiber coupler (9), and two output ends of the third optical fiber coupler (9) are respectively connected with two input ends of the photoelectric balance detector (10);
the output end of the photoelectric balance detector (10) is respectively connected with the input end of the data acquisition device (11) and the control end of the phase stabilizing device (8);
the optical fiber ultrasonic probe (7) is arranged in the detection box;
the excitation laser (1) is used for generating excitation light; the spatial light coupling device (2) is used for coupling the excitation light into the second optical fiber coupler (6); the narrow linewidth laser (3) is used for generating continuous narrow linewidth laser; the first optical fiber coupler (4) is used for dividing the narrow-linewidth laser into signal light and reference light, inputting the signal light to a first port of the circulator (5), and inputting the reference light to the phase stabilizing device (8); the circulator (5) is used for inputting the signal light to the second optical fiber coupler (6); the second coupler (6) is used for coupling the signal light with the excitation light and transmitting the signal light to the fiber-optic ultrasonic probe (7); the detection signal reflected by the fiber ultrasonic probe (7) passes through the second fiber coupler (6) and the circulator (5) and enters the third fiber coupler (9) through a third port of the circulator (5); the third optical fiber coupler (9) is used for enabling the detection signal to interfere with the reference light, and converting the phase difference of the detection signal and the reference light into light intensity change; the photoelectric balance detector (10) is used for converting the light intensity change into a voltage signal to be output; the phase stabilizing device (8) is used for processing the output voltage signal in real time and modulating the phase of the reference light; the data acquisition device (11) is used for receiving the voltage signal, quantitatively storing and displaying the voltage signal, and acquiring the ultrasonic signal to be detected by monitoring the system light intensity change caused by the phase change of the detection signal.
7. An ultrasonic excitation and detection system according to claim 6 wherein the DC output voltage of the photo balance detector (10) is 0V.
8. An ultrasonic excitation and detection system according to claim 6 or 7 wherein the first input of the second fibre coupling means (6) is a multimode fibre and the second input is a single mode fibre;
and the output end optical fiber of the second optical fiber coupling device (6) is a double-clad optical fiber with the same parameters as the guide optical fiber.
9. An ultrasonic excitation and detection system according to claim 8 wherein the phase stabilisation means (8) comprises a signal processor and a phase modulator; the signal processor is used for processing the voltage signal output by the photoelectric balance detector (10) and feeding back a processing result to the phase modulator; the phase modulator is used for modulating the phase of the reference light according to the processing result.
10. An ultrasonic excitation and detection system according to claim 9 wherein the incident ultrasonic sound pressure is directly proportional to the voltage of the electrical signal output by the photoelectric balance detector (10) according to the formula
Obtaining the sound pressure information of the light incident ultrasonic waves, wherein beta is the sound pressure-voltage sensitivity of an ultrasonic wave excitation and detection system, k is the optical power-voltage gain coefficient of a photoelectric balance detector, and IsFor the intensity of the detected light coupled into the third fiber coupler (9), IfFor the intensity of the reference light coupled into the third fiber coupler (9),
is the phase change quantity of the detection signal of the optical fiber ultrasonic probe caused by the ultrasonic wave action.
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