CN112337230A - Semiconductor production is with self-reminding sleeve of auto-eject filter screen - Google Patents
Semiconductor production is with self-reminding sleeve of auto-eject filter screen Download PDFInfo
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- CN112337230A CN112337230A CN202011225258.3A CN202011225258A CN112337230A CN 112337230 A CN112337230 A CN 112337230A CN 202011225258 A CN202011225258 A CN 202011225258A CN 112337230 A CN112337230 A CN 112337230A
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- Prior art keywords
- air
- filter screen
- sleeve
- pipe
- fixedly connected
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/88—Replacing filter elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0084—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours provided with safety means
- B01D46/0086—Filter condition indicators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention relates to the technical field of semiconductor production, and discloses a self-reminding sleeve for automatically popping out a filter screen for semiconductor production. This semiconductor production is with self-reminding sleeve of auto-eject filter screen, through air pressure extrusion air spring motion, and then make air spring extrusion piece motion to make the connecting rod begin to remove to the top under movable guide's cooperation, and then make the filter screen popped out, air spring extrusion piece motion also can make the inside air current that produces of urging storehouse, thereby make wind ball and sound production mechanism sound production under the cooperation of air current, and then make the filter screen can pop out automatically and in time remind, and then improved the work efficiency of changing.
Description
Technical Field
The invention relates to the technical field of semiconductor production, in particular to a self-reminding sleeve for automatically popping a filter screen in the semiconductor production.
Background
The importance of semiconductors, which refers to materials having conductivity between conductors and insulators at normal temperature, is very great from the viewpoint of technological or economic development, wherein the treatment of wind filtration in semiconductor production is related to the impurity problem of semiconductor materials.
The invention discloses an air filtering rectifying device for semiconductor equipment, which is disclosed in Chinese patent with the publication number of CN111696899A and the publication number of 2020, 9 and 22, and structurally comprises a rectifying box, a rectifying cavity, an air inlet, an air filtering net, an air outlet, rectifying blades and a clamping mechanism.
Aiming at the problems, the invention provides a self-reminding sleeve for automatically popping out a filter screen for semiconductor production, which has the advantages of convenience in use and quickness in reminding.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides the self-reminding sleeve for automatically popping out the filter screen for semiconductor production, which has the advantages of convenience and quickness in use and reminding, and solves the problems of inconvenience and slowness in reminding.
(II) technical scheme
In order to solve the technical problems, the invention provides the following technical scheme:
a self-reminding sleeve for automatically popping out a filter screen for semiconductor production comprises a sleeve main body, wherein the left side and the right side of the sleeve main body are fixedly connected with a fixing part, the inner side of the fixing part is fixedly connected with a filter pipe, the middle part of the filter pipe is movably connected with the filter screen, the left side and the right side of the filter screen are fixedly connected with an air duct, the inner side of the air duct is movably connected with a wind screen, the inner side of the wind screen is movably connected with a piston, the inner side of the piston is movably connected with a spring, the piston is movably connected with an inflation block through the spring, the inner side of the inflation block is fixedly connected with an air duct, the bottom of the air duct is fixedly connected with an air collecting bin, the bottom of the air collecting bin is movably connected with a one-way ball, the bottom of a movable plate is, the equal fixedly connected with extrusion piece in upper and lower both sides of air spring, the top fixedly connected with movable guide rail of upside extrusion piece, movable guide rail's top swing joint has the connecting rod, the top swing joint of connecting rod has the slide, the equal swing joint in the left and right sides of slide has the dead lever, the outside fixedly connected with of dead lever hides the wind board, the outside of air spring is equipped with the hasten the animal storehouse, the inside swing joint in hasten the animal storehouse has the wind ball, the bottom swing joint in wind ball has the inlet column, the bottom fixedly connected with vocal mechanism of inlet column.
Preferably, the fixing pieces are symmetrically distributed about a center line of the sleeve body, and an inner side of each fixing piece is provided with a thread.
Preferably, the opening directions of the air flow pipe and the air filtering pipe are the same, and the diameter of the air filtering pipe is larger than that of the air flow pipe.
Preferably, the inside of wind pipe front end is equipped with three deep bead, and the distance of every deep bead is the same, and every deep bead all articulates the inner wall at wind pipe.
Preferably, the inner side of the piston is provided with an extrusion head, the length of the extrusion head is the same as that of the inflation block, and the number of the pistons is the same as that of the inflation block.
Preferably, the inner side of the air inflation block is provided with a cavity, the air inflation block is made of rubber materials, and the air collection bin and the buffer bin are symmetrically distributed around the center line of the air spring.
Preferably, the one-way pipe is movably connected with the one-way ball through a movable plate arranged inside the one-way pipe, and the diameter of the upper part of the one-way pipe is smaller than that of the lower part of the one-way pipe.
Preferably, the bottom of the lower side extrusion block is provided with an inflation block, the inflation block passes through the connecting pipe and the urging cabin, and grooves are unevenly distributed on the surface of the pneumatic ball.
(III) advantageous effects
Compared with the prior art, the invention provides a self-reminding sleeve for automatically popping out a filter screen for semiconductor production, which has the following beneficial effects:
1. this semiconductor production is with self-reminding sleeve of auto-eject filter screen, through air pressure extrusion air spring motion, and then make air spring extrusion piece motion to make the connecting rod begin to remove to the top under movable guide's cooperation, and then make the filter screen popped out, air spring extrusion piece motion also can make the inside air current that produces of urging storehouse, thereby make wind ball and sound production mechanism sound production under the cooperation of air current, and then make the filter screen can pop out automatically and in time remind, and then improved the work efficiency of changing.
2. This semiconductor production is with self-reminding sleeve of auto-eject filter screen, through the processing of deep bead, make the wind-force of extrusion piston weaken, after the wind-force of handling passed the deep bead, can extrude the piston and move to the inboard, thereby make the piston extrusion promote the inflation piece and contract to inside, thereby make the inflation piece can aerify to collection wind storehouse inside, through the cooperation of deep bead and collection wind storehouse, make popping out of filter screen pop out for the intermittent type, thereby ensured that the filter screen can change in time after using a period.
3. This semiconductor production is with self-reminding sleeve of auto-eject filter screen installs the end of ventilation pipe additional with the sleeve main part through the inboard screw thread of mounting, makes the inside that needs filterable air to pass through the sleeve main part and get into semiconductor production equipment, makes pneumatic tube inside also have the air admission simultaneously, and then makes the sleeve main part can be in time to the filtration reaction of entering.
Drawings
Fig. 1 is a cross-sectional view of the sleeve mechanism of the present invention.
Fig. 2 is an enlarged schematic view of a portion a in fig. 1.
Fig. 3 is an enlarged schematic view of a portion B in fig. 1.
Fig. 4 is an enlarged schematic structural view of a portion C in fig. 1.
FIG. 5 is a schematic diagram of the connection of the self-alert mechanism.
In the figure: 1. a sleeve body; 2. a fixing member; 3. filtering the air duct; 4. filtering with a screen; 5. a wind pipe; 6. a wind deflector; 7. a piston; 8. a spring; 9. an inflation block; 10. a wind delivery pipe; 11. a wind collecting bin; 12. a one-way ball; 13. a movable plate; 14. mounting blocks; 15. a one-way tube; 16. a buffer bin; 17. an air spring; 18. extruding the block; 19. a movable guide rail; 20. a connecting rod; 21. a slide base; 22. fixing the rod; 23. a wind shield plate; 24. a promotion cabin; 25. a pneumatic ball; 26. an air inlet column; 27. a sound producing mechanism.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, a self-reminding sleeve for automatically popping out a filter screen for semiconductor production comprises a sleeve main body 1, wherein fixing parts 2 are fixedly connected to the left side and the right side of the sleeve main body 1, a filter pipe 3 is fixedly connected to the inner side of the fixing parts 2, a filter screen 4 is movably connected to the middle of the filter pipe 3, pneumatic pipes 5 are fixedly connected to the left side and the right side of the filter screen 4, wind shields 6 are movably connected to the inner sides of the pneumatic pipes 5, pistons 7 are movably connected to the inner sides of the wind shields 6, and springs 8 are movably connected to the inner sides of the pistons 7.
Piston 7 passes through spring 8 and inflation piece 9 swing joint, the inboard fixedly connected with defeated tuber pipe 10 of inflation piece 9, the bottom fixedly connected with collection wind storehouse 11 of defeated tuber pipe 10, the bottom swing joint in collection wind storehouse 11 has one-way ball 12, the bottom swing joint of fly leaf 13 has installation piece 14, the bottom fixedly connected with one-way pipe 15 of installation piece 14, the bottom fixedly connected with surge bin 16 of one-way pipe 15, the inboard fixedly connected with air spring 17 of surge bin 16, the equal fixedly connected with extrusion piece 18 in upper and lower both sides of air spring 17, the top fixedly connected with movable guide 19 of upside extrusion piece 18.
The top of the movable guide rail 19 is movably connected with a connecting rod 20, the top of the connecting rod 20 is movably connected with a sliding seat 21, the left side and the right side of the sliding seat 21 are respectively movably connected with a fixed rod 22, the outer side of the fixed rod 22 is fixedly connected with a wind shielding plate 23, the outer side of the air spring 17 is provided with a motivating cabin 24, the inner part of the motivating cabin 24 is movably connected with an air ball 25, the bottom of the air ball 25 is movably connected with an air inlet column 26, and the bottom of the air inlet column 26 is fixedly connected.
Wherein, mounting 2 all is equipped with the screw thread about the central line symmetric distribution of sleeve main part 1, and the inboard of every mounting 2 to when being convenient for use, connect the vent in with sleeve main part 1 and the semiconductor production through the screw thread, and then be convenient for daily use.
Wherein, the opening direction of pneumatic tube 5 and straining tuber pipe 3 is the same, and strain the diameter of tuber pipe 3 and be greater than the diameter of pneumatic tube 5 to pneumatic tube 5 can begin work when straining tuber pipe 3 ventilation of being convenient for.
Wherein, the inside of wind pipe 5 front end is equipped with three deep bead 6, and every deep bead 6 distance is the same, and every deep bead 6 all articulates the inner wall at wind pipe 5 to be convenient for deep bead 6 can weaken the wind-force that enters wind pipe 5.
Wherein, the inside of piston 7 is equipped with the extrusion head, and the length of extrusion head is the same with the length of inflation piece 9, and the piston 7 is the same with the figure of inflation piece 9 to when being convenient for the extrusion head activity, can promote the motion of inflation piece 9.
The inner side of the air inflation block 9 is provided with a cavity, the air inflation block 9 is made of rubber materials, and the air collection bin 11 and the buffer bin 16 are symmetrically distributed around the center line of the air spring 17, so that the sleeve main body 1 can be used when being installed in a forward and reverse mode.
The one-way pipe 15 is movably connected with the one-way ball 12 through a movable plate 13 arranged inside the one-way pipe 15, and the diameter of the upper part of the one-way pipe 15 is smaller than that of the lower part of the one-way pipe 15, so that the wind collecting bin 11 can collect wind pressure conveniently.
The bottom of the lower side extrusion block 18 is provided with an inflation block 9, the inflation block 9 passes through a connecting pipe and an urging bin 24, and grooves are unevenly distributed on the surface of the pneumatic ball 25, so that the pneumatic ball 25 can be matched with a sound production mechanism 27 to produce sound conveniently.
The working principle is as follows:
when needs use, install the end of ventilation pipe additional with sleeve main part 1 through the inboard screw thread of mounting 2, make the inside that needs filterable air gets into semiconductor production equipment through sleeve main part 1, make simultaneously that wind pipe 5 is inside also has the air admission, and then make sleeve main part 1 can in time react to the air filtration of entering.
The air in the wind pipe 5 can pass through the wind shield 6 firstly, so that the wind force for extruding the piston 7 is weakened, the processed wind force penetrates through the wind shield 6 and then extrudes the piston 7 to move towards the inner side, the piston 7 is extruded to push the inflation block 9 to contract towards the inner side, the inflation block 9 can inflate towards the inner part of the wind collection bin 11, the ejection of the filter screen 4 is ejected intermittently through the matching of the wind shield 6 and the wind collection bin 11, and the filter screen can be replaced in time after being used for a period of time.
After the air pressure in the air collecting bin 11 is increased to a certain degree, the one-way ball 12 starts to move towards the inside of the one-way pipe 15 under the influence of the air pressure, so that the air pressure starts to extrude the air spring 17 to move, and then the air spring 17 extrudes the extrusion block 18 to move, so that the connecting rod 20 starts to move towards the top under the matching of the movable guide rail 19, and further the filter screen 4 is popped up, the air spring 17 extrudes the extrusion block 18 to move, and the air flow generated in the urging bin 24 can be generated, so that the air ball 25 and the sounding mechanism 27 can sound under the matching of the air flow, and then the filter screen 4 can be popped up automatically and remind in time, and further the replacement work.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a semiconductor production is with self-reminding sleeve of auto-eject filter screen, includes sleeve main part (1), its characterized in that: the air filter sleeve is characterized in that fixing parts (2) are fixedly connected to the left side and the right side of the sleeve main body (1), an air filtering pipe (3) is fixedly connected to the inner side of each fixing part (2), a filter screen (4) is movably connected to the middle of the air filtering pipe (3), an air blowing pipe (5) is fixedly connected to the left side and the right side of the filter screen (4), an air blocking plate (6) is movably connected to the inner side of the air blowing pipe (5), a piston (7) is movably connected to the inner side of the air blocking plate (6), a spring (8) is movably connected to the inner side of the piston (7), the piston (7) is movably connected with an air charging block (9) through the spring (8), an air conveying pipe (10) is fixedly connected to the inner side of the air charging block (9), an air collecting bin (11) is fixedly connected to the bottom of the air conveying pipe (, the bottom of the mounting block (14) is fixedly connected with a one-way pipe (15), the bottom of the one-way pipe (15) is fixedly connected with a buffer bin (16), the inner side of the buffer bin (16) is fixedly connected with an air spring (17), the upper side and the lower side of the air spring (17) are both fixedly connected with an extrusion block (18), the top of the upper side extrusion block (18) is fixedly connected with a movable guide rail (19), the top of the movable guide rail (19) is movably connected with a connecting rod (20), the top of the connecting rod (20) is movably connected with a sliding seat (21), the left side and the right side of the sliding seat (21) are both movably connected with a fixed rod (22), the outer side of the fixed rod (22) is fixedly connected with a wind shielding plate (23), the outer side of the air spring (17) is provided with a driving bin (24), the inner part of the driving bin (, the bottom of the air inlet column (26) is fixedly connected with a sound production mechanism (27).
2. The self-reminding sleeve for automatically popping out the filter screen in the semiconductor production according to claim 1, wherein: the fixing pieces (2) are symmetrically distributed about the center line of the sleeve main body (1), and the inner side of each fixing piece (2) is provided with threads.
3. The self-reminding sleeve for automatically popping out the filter screen in the semiconductor production according to claim 1, wherein: the opening directions of the wind pipe (5) and the wind filtering pipe (3) are the same, and the diameter of the wind filtering pipe (3) is larger than that of the wind pipe (5).
4. The self-reminding sleeve for automatically popping out the filter screen in the semiconductor production according to claim 1, wherein: the inside of wind pipe (5) front end is equipped with three deep bead (6), and the distance of every deep bead (6) is the same.
5. The self-reminding sleeve for automatically popping out the filter screen in the semiconductor production according to claim 1, wherein: an extrusion head is arranged on the inner side of the piston (7), and the length of the extrusion head is the same as that of the inflation block (9).
6. The self-reminding sleeve for automatically popping out the filter screen in the semiconductor production according to claim 1, wherein: the inner side of the inflation block (9) is provided with a cavity, and the inflation block (9) is made of rubber materials.
7. The self-reminding sleeve for automatically popping out the filter screen in the semiconductor production according to claim 1, wherein: the one-way pipe (15) is movably connected with the one-way ball (12) through a movable plate (13) arranged in the one-way pipe.
8. The self-reminding sleeve for automatically popping out the filter screen in the semiconductor production according to claim 1, wherein: the bottom of the lower side extrusion block (18) is provided with an inflation block (9), and the inflation block (9) passes through a connecting pipe and an urging cabin (24).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011225258.3A CN112337230A (en) | 2020-11-05 | 2020-11-05 | Semiconductor production is with self-reminding sleeve of auto-eject filter screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011225258.3A CN112337230A (en) | 2020-11-05 | 2020-11-05 | Semiconductor production is with self-reminding sleeve of auto-eject filter screen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112337230A true CN112337230A (en) | 2021-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011225258.3A Withdrawn CN112337230A (en) | 2020-11-05 | 2020-11-05 | Semiconductor production is with self-reminding sleeve of auto-eject filter screen |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112337230A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020029736A (en) * | 2000-10-13 | 2002-04-19 | 이계안 | Device for notifying replacement time of air filter for automobile air conditioning |
| CN206965361U (en) * | 2017-07-27 | 2018-02-06 | 安徽天顺环保设备股份有限公司 | A kind of autompulse formula bag-type dust collector |
| CN107812415A (en) * | 2017-11-30 | 2018-03-20 | 苏州奥柯图葳机电科技有限公司 | A kind of air purifier for being easy to filter element replacing with filter core maintenance function |
| CN109966819A (en) * | 2019-03-25 | 2019-07-05 | 烟台知兴知识产权咨询服务有限公司 | A kind of industrial clarifier for being conveniently replaceable strainer |
| KR20190105189A (en) * | 2018-03-02 | 2019-09-16 | (주)쿨트론 | Dust filter device having a automatic filter replacement function |
| CN209828550U (en) * | 2019-04-10 | 2019-12-24 | 苏州米氪激光技术服务有限公司 | Automatic change model cooling device for 3D printer of filter screen |
| CN111437676A (en) * | 2020-05-26 | 2020-07-24 | 钟书明 | Air exhauster for model making with deodorization function |
| CN211635732U (en) * | 2019-12-23 | 2020-10-09 | 南通市滤神环保净化材料有限公司 | Side fastening and mounting structure with replaceable dense-arranged-hole activated carbon filter screen |
-
2020
- 2020-11-05 CN CN202011225258.3A patent/CN112337230A/en not_active Withdrawn
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020029736A (en) * | 2000-10-13 | 2002-04-19 | 이계안 | Device for notifying replacement time of air filter for automobile air conditioning |
| CN206965361U (en) * | 2017-07-27 | 2018-02-06 | 安徽天顺环保设备股份有限公司 | A kind of autompulse formula bag-type dust collector |
| CN107812415A (en) * | 2017-11-30 | 2018-03-20 | 苏州奥柯图葳机电科技有限公司 | A kind of air purifier for being easy to filter element replacing with filter core maintenance function |
| KR20190105189A (en) * | 2018-03-02 | 2019-09-16 | (주)쿨트론 | Dust filter device having a automatic filter replacement function |
| CN109966819A (en) * | 2019-03-25 | 2019-07-05 | 烟台知兴知识产权咨询服务有限公司 | A kind of industrial clarifier for being conveniently replaceable strainer |
| CN209828550U (en) * | 2019-04-10 | 2019-12-24 | 苏州米氪激光技术服务有限公司 | Automatic change model cooling device for 3D printer of filter screen |
| CN211635732U (en) * | 2019-12-23 | 2020-10-09 | 南通市滤神环保净化材料有限公司 | Side fastening and mounting structure with replaceable dense-arranged-hole activated carbon filter screen |
| CN111437676A (en) * | 2020-05-26 | 2020-07-24 | 钟书明 | Air exhauster for model making with deodorization function |
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Application publication date: 20210209 |
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