CN1123340A - Surface treatment for precision metallic coupling moving parts - Google Patents
Surface treatment for precision metallic coupling moving parts Download PDFInfo
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- CN1123340A CN1123340A CN 95109744 CN95109744A CN1123340A CN 1123340 A CN1123340 A CN 1123340A CN 95109744 CN95109744 CN 95109744 CN 95109744 A CN95109744 A CN 95109744A CN 1123340 A CN1123340 A CN 1123340A
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- China
- Prior art keywords
- surface treatment
- moving parts
- precision metallic
- ion
- metallic coupling
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Abstract
The surface treatment method uses a high-current metallic ion implantation process to implant the metallic ion selected from Ti, Ta, W and Mo, etc or implant carbon ion at the same time of implantation of metallic ion into both sides of relatively-moving members which are precisely coupled in the course of motion. ADVANTAGE-the coupling member treated by said invented method has the good self-lubricating property, reduced friction coefficient, raised wear resistance and long service life.
Description
The present invention relates to the surface treatment method of precision metallic coupling moving parts, more particularly, the present invention relates to the surface treatment method of the metal vapor vacuum arc source ion injection of precision metallic motion coupling part.
As everyone knows, metallic coupling moving parts is the parts of widespread use in the engineering, for example has the pump class of rotor and stator; Piston of automobile; Worm gear, worm screw; Bearing etc.The surface treatment method that these metallic coupling moving parts are commonly used has at present: (1) adds lubricated, promptly applies the liquid or solid lubricant; (2) applying coating, as gas deposition (PVD or CVD), parts matrix and coating after this method is handled have sharp interface, thereby easily make disbonding, and this method is handled the problem that also there is distortion in the precise motion male part.And some method can't be as last procedure, also will quench as after CVD handles, temper.
To sum up, still do not have in the prior art gratifying to precise motion male part surface-treated method, thereby the life-span of precise motion coupling unit still have much room for improvement, in other words, be exactly that the surface property of precision metallic coupling moving parts such as oilness, wear resistance all need further to improve.
The surface treatment method that the purpose of this invention is to provide a kind of precision metallic coupling moving parts, the precision metallic coupling moving parts that this method is handled has superior self lubricity, low frictional coefficient, high wear resistance.
The surface treatment method of precision metallic coupling moving parts of the present invention adopts intense beam stream metal ion method for implanting, and the both sides of the relative movement part of precision metallic coupling moving parts are injected metal ion, and described metal is selected from Ti, Ta, Hf, W etc.Injection parameter is: vacuum tightness: 2-4 * 10
-3Handkerchief, implantation dosage: 1 * 10
16-5 * 10
18Ion/cm
2, extraction voltage: 10-120kv, beam current density: 10-40 μ A/cm
2The both sides of the relative movement of coupling unit can inject the same metal ion, also can inject different metal ions.
The present invention also has an optimal technical scheme, and promptly the both sides of precision metallic coupling moving parts relative movement part inject carbon ion when injecting metal ion, and the implantation dosage of carbon ion is identical with the implantation dosage of metal ion.
The distinguishing feature of the surface treatment method of precision metallic coupling moving parts of the present invention is that the parts both sides of the relative movement of coupling unit carry out surface treatment, and by inject identical or different metal ion or and carbon ion, they are mated mutually, the result, reduced coupling unit relative movement part both sides' frictional coefficient significantly, frictional force when having reduced relative movement, in addition, the relative movement part both sides' that this method is handled wear resistance improves, and preferable wear resistance coupling is arranged, the coupling unit overall wear resistance is improved, increase work-ing life.
By injecting different metal ions and carbon ion for the relative movement part both sides, can adjust their soft durometer proportioning, make their antifriction, the needs of the more realistic motion of wear resistance, more effectively increase the service life.
In the surface treatment method of precision metallic coupling moving parts of the present invention, can preferably when injecting metal ion, inject carbon ion, the injection of carbon ion makes its surperficial microstructure that variation take place, reduced the frictional coefficient of parts surface significantly, improve self lubricity, and significantly improved surface abrasion resistance.
The surface treatment method of precision metallic coupling moving parts of the present invention has three outstanding characteristics:
1, the concentration of injection element substantially exceeds its solid solubility, is not subjected to the restriction of metal balance phasor.
2, do not change physical dimension, precision and the smooth finish of parts, can be used as last procedure of component processing.
3, do not have tangible interface between input horizon and matrix, do not have the disbonding problem, and the surface layer structure that can be optimized.
Precision metallic coupling moving parts surface treatment method of the present invention is applicable to handles various coupling units, as the pump class of band stator, rotor, piston of automobile, worm gear, worm screw, bearing etc.
The existing metal vapor vacuum arc source injection device of precision metallic coupling moving parts surface treatment method of the present invention utilization can carry out easily.
Further specify precision metallic coupling moving parts surface treatment method of the present invention below in conjunction with specific embodiment.
Embodiment 1:
The surface treatment of the cam on the gyrostat, chuck coupling moving parts.
Adopting existing metal vapor vacuum arc source ion implanter, with intense beam stream metal ion method for implanting, is that the cam on the gyrostat of ferrite type high temperature steel of Cr17 carries out the ion implantation of Ta and C to material, and chuck is carried out the ion implantation of Ti and C.The vacuum tightness of injection process is 3 * 10
-3Pa, extraction voltage: 40KV, beam current density 15 μ A/cm
2, implantation dosage: 3 * 10
-3Ta/cm
2, 3 * 10
17Ti/cm
2, 3 * 10
17C/cm
2
The reduction that the skin friction coefficient of the motion male part of handling through this method does not more inject 2.5 times, wear resistance has improved 30 times.
Embodiment 2:
The rotor in the accurate off-gas pump and the surface treatment of stator.
As embodiment 1 similar approach, be that rotor and the stator in the accurate off-gas pump of T10A steel carries out surface treatment to material, rotor and stator surface are all injected single Ti ion, implantation dosage is 5 * 10
17Ti/cm
2, the processing parameter of injection is: vacuum tightness: 2 * 10
-3Pa, extraction voltage: 70KV, beam current density: 30 μ A/cm
2
The energy consumption 25% that rotor of handling through this method and stator have reduced pump.
Embodiment 3:
The surface treatment of accurate worm and gear.
As the method for embodiment 1, be the worm screw injection Ti+C ion of 38CrMoAl to material, be the worm gear injection Ta+C ion of 4Cr13 to material, implantation dosage is respectively: 3 * 10
17Ta/cm
2, 3 * 10
17Ti/cm
2, 3 * 10
17C/cm
2, injection parameter is: extraction voltage 100KV, beam current density: 20 μ A/cm
2, vacuum tightness is 3 * 10
-3Pa.
0.7 reduce to 0.1 through what the frictional coefficient of the worm gear of above-mentioned processing and worm screw never injected.
Can find out by the foregoing description, handle the precision metallic coupling moving parts surface, have the reduction frictional coefficient, produce technique effects such as self-lubricating, raising wear resistance, thereby have wide prospect in industrial application with method of the present invention.
Claims (6)
1, a kind of surface treatment method of precision metallic coupling moving parts, this method adopts intense beam stream metal ion method for implanting, both sides to the parts of the relative movement of precision metallic coupling moving parts inject metal ion, and described metal ion is selected from Ti, Ta, W, Mo etc.
2, the surface treatment method of the precision metallic coupling moving parts of claim 1, injection parameter wherein is: vacuum tightness: 2-4 * 10
-3Pa, ion implantation dosage: 1 * 10
16-5 * 10
18Ion/cm
2, extraction voltage: 10-120KV, beam current density: 10-40 μ A/cm
2
3, the surface treatment method of the precision metallic coupling moving parts of claim 1, the parts both sides of wherein said coupling unit relative movement inject identical described metal ion.
4, the surface treatment method of the precision metallic coupling moving parts of claim 1, the parts both sides of wherein said coupling unit relative movement inject different described metal ions.
5, the surface treatment method of any precision metallic coupling moving parts among the claim 1-4 wherein injects carbon ion when injecting described metal ion.
6, the surface treatment method of the precision metallic coupling moving parts of claim 5, wherein the implantation dosage of carbon ion is identical with the implantation dosage of metal ion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN95109744A CN1041221C (en) | 1995-08-25 | 1995-08-25 | Surface treatment for precision metallic coupling moving parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN95109744A CN1041221C (en) | 1995-08-25 | 1995-08-25 | Surface treatment for precision metallic coupling moving parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1123340A true CN1123340A (en) | 1996-05-29 |
| CN1041221C CN1041221C (en) | 1998-12-16 |
Family
ID=5077327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN95109744A Expired - Fee Related CN1041221C (en) | 1995-08-25 | 1995-08-25 | Surface treatment for precision metallic coupling moving parts |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1041221C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8269931B2 (en) | 2009-09-14 | 2012-09-18 | The Aerospace Corporation | Systems and methods for preparing films using sequential ion implantation, and films formed using same |
| CN103510062A (en) * | 2012-06-27 | 2014-01-15 | 通用电气公司 | Modified rotor component and method for modifying wear characteristic of rotor component |
| US8946864B2 (en) | 2011-03-16 | 2015-02-03 | The Aerospace Corporation | Systems and methods for preparing films comprising metal using sequential ion implantation, and films formed using same |
| US9324579B2 (en) | 2013-03-14 | 2016-04-26 | The Aerospace Corporation | Metal structures and methods of using same for transporting or gettering materials disposed within semiconductor substrates |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04224670A (en) * | 1990-12-25 | 1992-08-13 | Nissin Electric Co Ltd | Corrosion resisting metallic material |
| CN1030777C (en) * | 1992-11-20 | 1996-01-24 | 哈尔滨工业大学 | Method and apparatus for ion implantation of metal plasma source |
| JPH06228750A (en) * | 1993-02-01 | 1994-08-16 | Nippon Steel Corp | Surface modifying method |
-
1995
- 1995-08-25 CN CN95109744A patent/CN1041221C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8269931B2 (en) | 2009-09-14 | 2012-09-18 | The Aerospace Corporation | Systems and methods for preparing films using sequential ion implantation, and films formed using same |
| US9048179B2 (en) | 2009-09-14 | 2015-06-02 | The Aerospace Corporation | Systems and methods for preparing films using sequential ion implantation, and films formed using same |
| US8946864B2 (en) | 2011-03-16 | 2015-02-03 | The Aerospace Corporation | Systems and methods for preparing films comprising metal using sequential ion implantation, and films formed using same |
| CN103510062A (en) * | 2012-06-27 | 2014-01-15 | 通用电气公司 | Modified rotor component and method for modifying wear characteristic of rotor component |
| US9324579B2 (en) | 2013-03-14 | 2016-04-26 | The Aerospace Corporation | Metal structures and methods of using same for transporting or gettering materials disposed within semiconductor substrates |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1041221C (en) | 1998-12-16 |
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