CN112331552A - Excimer lamp - Google Patents

Excimer lamp Download PDF

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Publication number
CN112331552A
CN112331552A CN202011333728.8A CN202011333728A CN112331552A CN 112331552 A CN112331552 A CN 112331552A CN 202011333728 A CN202011333728 A CN 202011333728A CN 112331552 A CN112331552 A CN 112331552A
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CN
China
Prior art keywords
dielectric film
electrode
film layer
light
excimer lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011333728.8A
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Chinese (zh)
Inventor
孙钱
汤文君
赵征途
冯美鑫
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Suzhou Institute of Nano Tech and Nano Bionics of CAS
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Suzhou Institute of Nano Tech and Nano Bionics of CAS
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Application filed by Suzhou Institute of Nano Tech and Nano Bionics of CAS filed Critical Suzhou Institute of Nano Tech and Nano Bionics of CAS
Priority to CN202011333728.8A priority Critical patent/CN112331552A/en
Publication of CN112331552A publication Critical patent/CN112331552A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/38—Devices for influencing the colour or wavelength of the light
    • H01J61/40—Devices for influencing the colour or wavelength of the light by light filters; by coloured coatings in or on the envelope

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

The invention discloses an excimer lamp, which comprises a light-transmitting container, at least one pair of electrodes and a dielectric film layer with a filtering function, wherein discharge gas is encapsulated in the light-transmitting container, an electric field for ionizing the discharge gas can be formed between the at least one pair of electrodes, and the dielectric film layer is arranged on the outer surface of the light-transmitting container. The dielectric film with the filtering function is added on the outer side of the high electric field area of the excimer lamp, so that the excimer lamp has the advantages of good monochromaticity, high output power, good stability and reliability and the like, and is beneficial to widening the application field of the excimer lamp.

Description

Excimer lamp
Technical Field
The invention belongs to the technical field of excimer lamps, and particularly relates to an excimer lamp capable of effectively improving monochromaticity of an output spectrum of the excimer lamp.
Background
Excimer lamps mainly use high voltage and high frequency outside the lamp tube to excite the gas in the lamp tube, thereby emitting short wavelength ultraviolet light, which has the characteristics of short wavelength, large energy and the like, and has important application in the fields of integrated circuit photoetching, material processing, medical research, sterilization and disinfection and the like, thus having wide attention in academia and industry.
However, the output spectrum of the current excimer lamp has a plurality of peak wavelengths, which leads to poor monochromaticity and severely limits the application prospect in the fields of medical research, sterilization and disinfection and the like. Such as a 222nm excimer lamp, which outputs ultraviolet light at 235nm and 257nm in addition to 222 nm.
Recent research results show that the ultraviolet light of 222nm can destroy viruses in the air without causing damage to human skin. And the ultraviolet light with the light emitting wavelength of 235nm and 257nm can cause damage to human skin, eyes and the like, and the application field of the excimer lamp is severely limited.
Therefore, there is a strong need to improve the monochromaticity of the excimer lamp, and the prior art focuses on improving the output power of the excimer lamp.
Disclosure of Invention
It is a primary object of the present invention to provide an excimer lamp which overcomes the deficiencies of the prior art.
In order to achieve the purpose, the technical scheme adopted by the invention comprises the following steps:
an excimer lamp comprising:
a light-transmitting container having a sealed space in which a gas for discharge is sealed;
the sealing space is arranged between the first electrode and the second electrode;
the excimer lamp also comprises a dielectric film layer arranged corresponding to the wall of the light-transmitting container, wherein the dielectric film layer comprises a first dielectric film layer, and the first dielectric film layer can at least filter out light rays except light rays with set wavelength in light emitted by gas for discharging.
In one embodiment, the dielectric film layer is coated on the outer wall of the light-transmitting container, and at least one of the first electrode and the second electrode is disposed between the dielectric film layer and the light-transmitting container.
In one embodiment, at least one of the first electrode and the second electrode is disposed on an outer wall of the light-transmitting container, and the at least one is covered by the dielectric film layer so as to be isolated from the external atmosphere.
In an embodiment, an accommodating space is further formed in the light-transmitting container, one of the first electrode and the second electrode is disposed in the accommodating space, and the other is disposed on an outer wall of the light-transmitting container.
In an embodiment, an accommodating space is further formed in the light-transmitting container, one of the first electrode and the second electrode is disposed in the accommodating space, and the other is disposed on an outer wall of the light-transmitting container.
In one embodiment, the first electrode is disposed coaxially with the second electrode.
In one embodiment, the first electrode and the second electrode are both arranged on the outer wall of the light-transmitting container, and are arranged oppositely. .
In one embodiment, the first electrode and the second electrode are both coated by the dielectric film layer.
In an embodiment, the dielectric film layer further includes a second dielectric film layer, and the first dielectric film layer and the second dielectric film layer are both disposed on the outer wall of the light-transmitting container and are disposed opposite to each other.
In one embodiment, the first dielectric film layer is an antireflection film, the second dielectric film layer is an antireflection film or a high-reflection film, and when the second dielectric film layer is a high-reflection film, light incident on the second dielectric film layer can be partially or completely reflected to the first dielectric film layer.
In one embodiment, one of the first electrode and the second electrode is covered by a first dielectric film layer, and the other is covered by a second dielectric film layer.
In one embodiment, different portions of any one of the first electrode and the second electrode are respectively coated by the first dielectric film layer and the second dielectric film layer.
In one embodiment, the dielectric film layer material includes one or a combination of two or more of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum gallium nitride, gallium oxide, magnesium fluoride, titanium oxide, thallium oxide, and zirconium oxide, but is not limited thereto.
In an embodiment, the material of the first electrode and the second electrode includes one or a combination of two or more of nickel, titanium, chromium, palladium, platinum, gold, aluminum, and gold-germanium-nickel alloy, and is not limited thereto.
In one embodiment, the discharge gas includes one or a combination of two or more of helium, neon, argon, krypton, xenon, radon, fluorine, chlorine, bromine, and the like, but is not limited thereto.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the dielectric film with the filtering function is added at the outer side of the high electric field area of the excimer lamp, so that other stray spectra except for the main output wavelength can be effectively removed, and the monochromaticity of the output spectrum of the excimer lamp is effectively improved.
2. The dielectric film added in the invention is an antireflection film, so that the transmittance of the output light with the main wavelength in the output spectrum of the excimer lamp can be effectively enhanced, and the output power of the device is improved.
3. The dielectric film is arranged on the outer side of the metal electrode, so that the metal electrode can be protected, the metal electrode is isolated from the external atmosphere, and oxygen in the air is prevented from being ionized under the strong electric field of the metal electrode to generate ozone; and the metal electrode can be prevented from being oxidized and the like, so that the reliability of the device is effectively improved.
4. The dielectric film is arranged on the outer side of the metal electrodes, so that the dielectric film does not need to work under a strong electric field between the metal electrodes, the reliability of the dielectric film can be effectively improved, and the reliability of a device is improved.
5. The excimer lamp provided by the invention has the advantages of good monochromaticity, high output power, good stability and reliability and the like, and is beneficial to widening the application field of the excimer lamp.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of an excimer lamp according to embodiment 1 of the present invention;
FIG. 2 is a schematic structural view of an excimer lamp according to embodiment 2 of the present invention;
FIG. 3 is a graph comparing the output spectra of the excimer lamp of the present invention with that of the conventional excimer lamp.
Reference numerals:
1/1', a light-transmitting container, 11, a containing space, 2, gas for discharge, 3, a first electrode, 4, a second electrode, 5, a first dielectric film layer, 6 and a second dielectric film layer.
Detailed Description
The present invention will be more fully understood from the following detailed description, which should be read in conjunction with the accompanying drawings. Detailed embodiments of the present invention are disclosed herein; however, it is to be understood that the disclosed embodiments are merely exemplary of the invention, which can be embodied in various forms. Therefore, specific functional details disclosed herein are not to be interpreted as limiting, but merely as a basis for the claims and as a representative basis for teaching one skilled in the art to variously employ the present invention in virtually any appropriately detailed embodiment.
The excimer lamp disclosed by the invention, in particular to a narrow linewidth excimer lamp, has the advantages of good monochromaticity, high output power, good stability and reliability and the like by adding the dielectric film with the filtering function outside a high electric field area of the excimer lamp, and is beneficial to widening the application field of the excimer lamp.
The structure of the excimer lamp of the present invention will be specifically described below in several embodiments.
Embodiment 1 as shown in fig. 1, an excimer lamp disclosed in this embodiment includes a light-transmitting container 1, a first electrode 3, a second electrode 4, a first dielectric film 5, and a second dielectric film 6. The inner cavity of the transparent container 1 is filled with the gas 2 for discharge, and the first electrode 3 and the second electrode 4 are respectively arranged on the outer walls of two sides of the transparent container 1 and are oppositely arranged. The first dielectric film 5 and the second dielectric film 6 are also disposed on the outer wall of the transparent container 1, wherein the first dielectric film 5 and the second dielectric film 6 respectively cover the first electrode 3 and the second electrode 4, and can isolate the first electrode 3 and the second electrode 4 from the outside atmosphere, so as to prevent oxygen in the air from ionizing under the strong electric field of the electrodes to generate ozone, and prevent the electrodes made of metal materials from being oxidized.
Any one of the first dielectric film layer 5 and the second dielectric film layer 6 has a filtering function, which can effectively remove other stray spectra except the main output wavelength (for example, ultraviolet light with a wavelength of 222 nm) in the output spectrum of the excimer lamp. Furthermore, any one of the layers is an antireflection film to effectively enhance the transmittance of the output light with the dominant wavelength in the output spectrum of the excimer lamp. The surface of the antireflection film can have concave-convex shapes so as to improve the light extraction rate.
Alternatively, both the first dielectric film layer 5 and the second dielectric film layer 6 may have the filtering function and may also function as the antireflection film.
Or, the first dielectric film layer 5 has the functions of the filtering and antireflection film, and the second dielectric film layer 6 is a high-reflection film, so that most or all of the light incident on the second dielectric film layer 6 is reflected and emitted from the first dielectric film layer 5, thereby effectively improving the directivity of the output light of the device.
The first dielectric film layer 5 and the second dielectric film layer 6 may be integrally provided.
Embodiment 2 as shown in fig. 2, an excimer lamp disclosed in this embodiment comprises a light-transmitting container 1', a first electrode 3, a second electrode 4, a first dielectric film layer 5 and a second dielectric film layer 6. The partial wall of the transparent container 1 'is recessed to form a containing space 11, the first electrode 3 is inserted into the containing space 11, and the second electrode 4 is disposed around the outer wall of the transparent container 1' and is coaxial with the first electrode 3 (both can be defined as coaxial electrodes). The light-transmitting container 1' also has a discharge gas 2 enclosed in its inner cavity. The first dielectric film layer 5 and the second dielectric film layer 6 are disposed on the outer wall of the light-transmitting container 1' and cover the second electrode 4 to isolate the second electrode 4 from the external atmosphere.
Similar to embodiment 1, the first dielectric film layer 5 and the second dielectric film layer 6 may be configured to have functions of a filter and an antireflection film. In such a case, the first dielectric film layer 5 and the second dielectric film layer 6 may be integrally formed continuous dielectric film layers.
Alternatively, one of the first dielectric film layer 5 and the second dielectric film layer 6 may be provided with a function of a filter and an antireflection film, and the other may be a high-reflection film.
In the above embodiments 1 and 2, the light-transmitting container 1, 1' may be a quartz tube having a sealed space therein, the discharge gas 2 is sealed in the sealed space, and the gas in the quartz tube can be protected by the sealed environment formed therein. In practice, the shape of the quartz tube may be various, such as one or a combination of two or more of a cube, a cuboid, a cone, an ellipsoid, a square, a rectangle, a circle, an ellipse, a trapezoid, a triangle, and the like, which is not limited in the present invention.
In the above embodiments 1 and 2, the discharge gas 2 in the light-transmitting container 1 is ionized in the high-voltage or high-frequency electric field, and emits light of a specific wavelength. In the embodiment, the discharge gas 2 may be helium He, neon Ne, argon Ar, krypton Kr, xenon Xe, radon Rn, fluorine F, chlorine Cl2And bromine Br, and the like.
In the above embodiments 1 and 2, the electrodes 3 and 4 are used for introducing high voltage or high frequency voltage, so that a high voltage or high frequency electric field is formed between the two electrodes 3 and 4, and the gas in the quartz tube is ionized, thereby emitting light. In practice, the positions of the electrodes 3 and 4 on the transparent container 1 may vary according to the structure of the transparent container 1, but the invention is not limited thereto as long as the gas inside the transparent container 1 is ionized. In practice, the materials of the electrodes 3 and 4 include one or a combination of two or more of Ni, Ti, Cr, Pd, Pt, Au, Al, and ge-Ni, but are not limited thereto.
In the above embodiments 1 and 2, the dielectric film layers 5 and 6 are disposed on the outer surface of the light-transmitting container 1 for absorbing light other than the main wavelength, thereby improving the monochromaticity of the excimer lamp. When the excimer lamp is implemented, the first dielectric film layer 5 can be an antireflection film, so that the transmittance of output light with main wavelength in an output spectrum of the excimer lamp, which is emitted from the light-transmitting container 1, can be effectively enhanced, and the output power of the device is improved; the second dielectric film layer 6 can be an antireflection film or a high-reflection film, wherein the main function of the antireflection film is similar to that of the first dielectric film layer 5, and the antireflection film is mainly used for improving the light extraction efficiency of the device so as to improve the output power of the device; and when second dielectric film 6 is the high reflection film, can be with incidenting the light reflection of second dielectric film 6 to make most light all from first dielectric film 5 outgoing, can effectively promote the directionality of device output light, be one-way light-emitting, be applicable to specific application scenario. In practice, the dielectric film layer material comprises mainly SiO2Silicon nitride SiN, silicon oxynitride SiON, aluminum oxide Al2O3AlN nitride, AlGaN, Ga oxide2O3MgF, MgF2Titanium oxide TiO2Thallium oxide Ta2O5Zirconium oxide ZrO2One or a combination of two or more of these materials, without being limited thereto.
Fig. 3 is a graph showing the comparison of the output spectra of an excimer lamp product and a conventional excimer lamp (the former and the latter have substantially the same structure, but the latter is not provided with the dielectric film layer) under the same operating voltage, wherein the abscissa is the Wavelength (Wavelength) and the ordinate is the photoluminescence intensity (intensity) in the graph. As can be seen from fig. 3, in the output spectrum of the conventional excimer lamp, besides the uv light with the peak wavelength of 222nm, there are output lights with the wavelengths of 235nm and 257nm, which are harmful to human body; the excimer lamp product only outputs 222nm light, the full width at half maximum of a spectrum is very narrow and is only 2.7nm, and the output light of other wavelengths is not available, so that the monochromaticity is very good; meanwhile, due to the adoption of the anti-reflection film, compared with the traditional excimer lamp, the excimer lamp product provided by the invention has the advantages that the output power is improved by about 10%, and the electro-optic conversion efficiency of the excimer lamp is effectively improved.
In addition, the dielectric film is arranged on the outer side of the metal electrode, so that the metal electrode can be protected, the metal electrode is isolated from the external atmosphere, and oxygen in the air is prevented from being ionized under the strong electric field of the metal electrode to generate ozone; and the metal electrode can be prevented from being oxidized and the like, so that the reliability of the device is effectively improved. In addition, the dielectric film does not need to work under a strong electric field between the metal electrodes, and the reliability of the dielectric film can be effectively improved, so that the reliability of the device is improved.
Therefore, the excimer lamp provided by the invention has the advantages of good monochromaticity, high output power, good stability and reliability and the like, and is beneficial to widening the application field of the excimer lamp.
The aspects, embodiments, features and examples of the present invention should be considered as illustrative in all respects and not intended to be limiting of the invention, the scope of which is defined only by the claims. Other embodiments, modifications, and uses will be apparent to those skilled in the art without departing from the spirit and scope of the claimed invention.
The use of headings and chapters in this disclosure is not meant to limit the disclosure; each section may apply to any aspect, embodiment, or feature of the disclosure.
Unless specifically stated otherwise, use of the terms "comprising", "including", "having" or "having" is generally to be understood as open-ended and not limiting.
While the invention has been described with reference to illustrative embodiments, it will be understood by those skilled in the art that various other changes, omissions and/or additions may be made and substantial equivalents may be substituted for elements thereof without departing from the spirit and scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from its scope. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed for carrying out this invention, but that the invention will include all embodiments falling within the scope of the appended claims. Moreover, unless specifically stated any use of the terms first, second, etc. do not denote any order or importance, but rather the terms first, second, etc. are used to distinguish one element from another.

Claims (10)

1. An excimer lamp comprising:
a light-transmitting container having a sealed space in which a gas for discharge is sealed;
the sealing space is arranged between the first electrode and the second electrode;
the method is characterized in that: the excimer lamp also comprises a dielectric film layer arranged corresponding to the wall of the light-transmitting container, wherein the dielectric film layer comprises a first dielectric film layer, and the first dielectric film layer can at least filter out light rays except light rays with set wavelength in light emitted by gas for discharging.
2. An excimer lamp as claimed in claim 1, wherein: the dielectric film layer is covered on the outer wall of the light-transmitting container, and at least one of the first electrode and the second electrode is arranged between the dielectric film layer and the light-transmitting container.
3. An excimer lamp as claimed in claim 2, wherein: at least one of the first electrode and the second electrode is arranged on the outer wall of the light-transmitting container, and the at least one of the first electrode and the second electrode is coated by the dielectric film layer so as to be isolated from the external atmosphere.
4. An excimer lamp as claimed in claim 3, wherein: an accommodating space is formed in the light-transmitting container, one of the first electrode and the second electrode is arranged in the accommodating space, and the other electrode is arranged on the outer wall of the light-transmitting container.
5. An excimer lamp as claimed in claim 4, wherein: the first electrode and the second electrode are coaxially arranged.
6. An excimer lamp as claimed in claim 3, wherein: the first electrode and the second electrode are both arranged on the outer wall of the light-transmitting container and are arranged oppositely.
7. An excimer lamp as claimed in claim 6, wherein: the first electrode and the second electrode are both coated by the dielectric film layer.
8. The excimer lamp of claim 1, wherein the dielectric film layer further comprises a second dielectric film layer, and the first dielectric film layer and the second dielectric film layer are coated on the outer wall of the light-transmitting container and are arranged oppositely.
9. The excimer lamp of claim 8, wherein the first dielectric film layer is an antireflection film, the second dielectric film layer is an antireflection film or a high-reflection film, and when the second dielectric film layer is a high-reflection film, light incident on the second dielectric film layer can be partially or completely reflected to the first dielectric film layer; and/or any one of the first electrode and the second electrode is coated by a first dielectric film layer, and the other one is coated by a second dielectric film layer, or different parts of any one of the first electrode and the second electrode are respectively coated by the first dielectric film layer and the second dielectric film layer.
10. The excimer lamp of claim 1, wherein the dielectric film layer is made of one or more materials selected from the group consisting of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum gallium nitride, gallium oxide, magnesium fluoride, titanium oxide, thallium oxide, and zirconium oxide; and/or the first electrode and the second electrode are made of one or a combination of more than two of nickel, titanium, chromium, palladium, platinum, gold, aluminum and gold-germanium-nickel alloy; and/or the discharge gas comprises one or the combination of more than two of helium, neon, argon, krypton, xenon, radon, fluorine, chlorine and bromine.
CN202011333728.8A 2020-11-25 2020-11-25 Excimer lamp Pending CN112331552A (en)

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CN202011333728.8A CN112331552A (en) 2020-11-25 2020-11-25 Excimer lamp

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Application Number Priority Date Filing Date Title
CN202011333728.8A CN112331552A (en) 2020-11-25 2020-11-25 Excimer lamp

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CN112331552A true CN112331552A (en) 2021-02-05

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113327839A (en) * 2021-06-22 2021-08-31 生命阳光(广州)大健康发展有限公司 Ultraviolet lamp tube
CN113345793A (en) * 2021-06-22 2021-09-03 生命阳光(广州)大健康发展有限公司 Novel ultraviolet lamp tube
WO2022267449A1 (en) * 2021-06-21 2022-12-29 深圳市大博实业有限公司 Uv excimer lamp
JP2023002472A (en) * 2021-06-22 2023-01-10 朗升光電科技（広東）有限公司 novel UV lamp tube
JP2023002474A (en) * 2021-06-22 2023-01-10 朗升光電科技（広東）有限公司 UV lamp tube

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022267449A1 (en) * 2021-06-21 2022-12-29 深圳市大博实业有限公司 Uv excimer lamp
CN113327839A (en) * 2021-06-22 2021-08-31 生命阳光(广州)大健康发展有限公司 Ultraviolet lamp tube
CN113345793A (en) * 2021-06-22 2021-09-03 生命阳光(广州)大健康发展有限公司 Novel ultraviolet lamp tube
WO2022267630A1 (en) * 2021-06-22 2022-12-29 朗升光电科技(广东)有限公司 Novel ultraviolet lamp
WO2022267629A1 (en) * 2021-06-22 2022-12-29 朗升光电科技(广东)有限公司 Ultraviolet lamp tube
JP2023002472A (en) * 2021-06-22 2023-01-10 朗升光電科技（広東）有限公司 novel UV lamp tube
JP2023002474A (en) * 2021-06-22 2023-01-10 朗升光電科技（広東）有限公司 UV lamp tube

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