CN112327391A - Preparation method of micro-lens array, micro-lens array and under-screen fingerprint module - Google Patents
Preparation method of micro-lens array, micro-lens array and under-screen fingerprint module Download PDFInfo
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- CN112327391A CN112327391A CN202011122466.0A CN202011122466A CN112327391A CN 112327391 A CN112327391 A CN 112327391A CN 202011122466 A CN202011122466 A CN 202011122466A CN 112327391 A CN112327391 A CN 112327391A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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Abstract
The invention provides a preparation method of a micro-lens array, the micro-lens array and an under-screen fingerprint module, wherein the micro-lens array is provided with a first side and a second side which are opposite, and the second side is provided with a concave part, the preparation method comprises the following steps of S101: preparing or providing a first mother plate corresponding to the surface shape of the first side of the micro-lens array; s102: preparing or providing a second mother plate corresponding to the surface shape of the second side of the micro-lens array; s103: forming a surface shape of a first side of the micro-lens array through a lens substrate by using the first master plate; s104: forming a surface shape of a second side of the micro-lens array through a lens base material by using the second master plate; s105: filling a light absorption material into the concave part; and S106: and curing the light absorption material to form the light shielding part of the micro lens array. According to the embodiment of the invention, the crosstalk of large-angle light among the micro lenses is effectively prevented, the imaging effect of incident light after penetrating through the micro lenses is improved, and the light condensing efficiency of the micro lenses is improved.
Description
Technical Field
The invention relates to the technical field of optics, in particular to a preparation method of a micro-lens array, the micro-lens array and a fingerprint module under a screen.
Background
The prior art microlens arrays are formed by disposing a plurality of microlenses on a transparent optical material substrate. As shown in fig. 1, when incident light passes through a microlens with such a structure, it may also pass through a microlens adjacent to the microlens, and light rays between different lenses generate crosstalk, which easily results in low signal-to-noise ratio, and further affects imaging quality. In addition, as shown in fig. 2, one or more light shielding layers can be formed by photolithography, but this method has the disadvantage of high cost. Moreover, in order to prevent the crosstalk of light, the light aperture opening in the microlens array is set to be small, thereby affecting the transmittance of incident light and further affecting the illuminance and uniformity of the imaging surface. In addition, the structure using a single or multiple light shielding layers may cause some high-angle light to easily transmit, thereby reducing the signal-to-noise ratio.
The statements in the background section are merely prior art as they are known to the inventors and do not, of course, represent prior art in the field.
Disclosure of Invention
In view of at least one of the drawbacks of the prior art, the present invention provides a method for manufacturing a microlens array, wherein the microlens array has a first side and a second side opposite to each other, the second side having a recess, the method comprising:
s101: preparing or providing a first mother plate corresponding to the surface shape of the first side of the micro-lens array;
s102: preparing or providing a second mother plate corresponding to the surface shape of the second side of the micro-lens array;
s103: forming a surface shape of a first side of the micro-lens array through a lens substrate by using the first master plate;
s104: forming a surface shape of a second side of the micro-lens array through a lens base material by using the second master plate;
s105: filling a light absorption material into the concave part; and
s106: and curing the light absorption material to form the light shielding part of the micro lens array.
According to an aspect of the present invention, wherein the step S101 comprises: processing the surface of the first side of the micro lens array into a first mother plate through laser direct writing, photoetching or an ultra-precision machine tool; the step S102 includes: and processing the surface of the second side of the micro lens array into a second mother plate by using a laser direct writing machine, a photoetching machine or an ultra-precision machine tool.
According to an aspect of the present invention, wherein said step S105 further comprises: and controlling the amount of the light absorption material to ensure that the outer surface of a light shielding part formed after the light absorption material is cured is not higher than the surface adjacent to the light shielding part on the second side.
According to an aspect of the invention, wherein the steps S103 and S104 are performed by an imprint process, the imprint process comprising nano-imprinting.
According to an aspect of the present invention, wherein the steps S103 and S104 are performed on different lens substrates; the preparation method further comprises the following steps: and bonding the lens base material with the first side surface shape and the lens base material with the second side surface shape.
According to an aspect of the present invention, wherein the steps S103 and S104 are implemented by:
coating the lens substrate on the first master plate;
and aligning and pressing the second master plate and the first master plate to form a first side and a second side of the micro-lens array.
According to an aspect of the invention, further comprising: and adjusting the distance between the first mother plate and the second mother plate.
The present invention also relates to a microlens array comprising:
a light transmissive body having opposing first and second sides, the first side having a plurality of microlenses thereon, the second side having a recessed portion;
and the light shielding part is filled in the sunken part.
According to an aspect of the present invention, wherein an outer surface of the light shielding portion is not higher than a plane adjacent thereto on the second side.
According to one aspect of the invention, the width of each microlens in the microlens array is DL, the cross section of the light shielding part is trapezoid, the height of the trapezoid light shielding part is H1, the height of the microlens array is H2, the size of an image sensor pixel is W, wherein DL is less than or equal to W/3, and H1 is less than H2.
According to an aspect of the present invention, wherein the height H1 of the trapezoidal light-shielding portion ranges from 30 μm to 100 μm, and the height H2 of the microlens array ranges from 35 μm to 115 μm.
According to one aspect of the invention, the width of each microlens in the microlens array is DL, the cross section of the light shielding part is trapezoidal, the height of the trapezoidal light shielding part is H1, the diameter of the opening of the inner surface is D1, the height of the microlens array is H2, and D1 satisfies 0.9H 1 DL/H2 ≦ D1 ≦ DL.
According to one aspect of the present invention, wherein the cross section of the light-shielding portion is trapezoidal, the aperture diameter of the outer surface of the trapezoidal light-shielding portion is D2, and the range of D2 is 2 μm to 10 μm.
According to an aspect of the present invention, the refractive index of the light shielding portion is equal to or greater than the refractive index of the light transmissive body, and the difference between the refractive indices is less than 0.25.
The invention also relates to an underscreen fingerprint module comprising the micro-lens array.
The embodiment of the invention relates to a preparation method of a micro lens array, the micro lens array and an under-screen fingerprint module comprising the micro lens array. The micro lens array is a permutation and combination of a certain number of micro-nano scale spherical, aspheric or free-form surface lenses, not only has basic functions of focusing, imaging and the like of the traditional lens, but also has the characteristics of small unit size, light weight, high integration degree and the like. The micro-lens array optical element can be widely applied to biological identification such as an underscreen fingerprint identification module, a mobile phone, a camera and other imaging electronic equipment, and is thinner and lighter than the traditional lens scheme. However, the high-angle light between adjacent lenses of the microlens array is generally prone to crosstalk, which reduces the signal-to-noise ratio or image quality, and therefore, a light-absorbing structure needs to be designed to block stray light with a large incident angle.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosure, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure and are not to limit the disclosure. In the drawings:
FIG. 1 shows a block diagram of a prior art microlens array;
FIG. 2 is a structural view showing a microlens array having a single or multiple light-shielding layers in the prior art;
FIG. 3 shows a flow chart of a method of fabricating a microlens array according to one embodiment of the present invention;
FIG. 4 shows a block diagram of a microlens array according to one embodiment of the invention;
FIG. 5 shows a schematic view of a first master according to one embodiment of the invention;
FIG. 6 shows a schematic view of a first side of a microlens array according to one embodiment of the invention;
FIG. 7 shows a schematic view of a second master according to one embodiment of the invention;
FIG. 8 shows a schematic view of a first side and a second side of a microlens array according to one embodiment of the invention;
FIG. 9 shows a schematic diagram of recess filling of a microlens array according to one embodiment of the invention;
FIG. 10 shows a schematic diagram of adjusting the thickness of an intermediate layer of a microlens array according to one embodiment of the invention;
FIG. 11 shows a schematic diagram of a microlens array and an image sensor according to one embodiment of the invention;
FIG. 12 shows a schematic diagram of an optical module including a stereoscopic array of aperture microlenses according to one embodiment of the invention; and
FIG. 13 shows a graph comparing signal-to-noise ratio of a microlens array designed according to the present invention with that of the prior art.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection, either mechanically, electrically, or in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature.
The following disclosure provides many different embodiments or examples for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or uses of other materials.
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.
Fig. 3 shows a flowchart of a microlens array fabrication method 100 according to an embodiment of the present invention, and fig. 4 shows a structural diagram of a microlens array 200 according to an embodiment of the present invention. The following detailed description refers to the accompanying drawings. As shown in fig. 4, the microlens array 200 has first and second opposing sides 210 and 220, the second side 220 having a recess 221. As shown in fig. 3, the method 100 for manufacturing the microlens array 200 includes the following steps, which are described in detail below.
The preparation method 100 includes step S101: a first master 310 corresponding to the profile of the first side 210 of the microlens array is prepared or provided. Fig. 5 shows a schematic view of a first master according to an embodiment of the invention, and fig. 6 shows a schematic view of a first side of a microlens array according to an embodiment of the invention. Referring to fig. 5 and 6, the profile 311 of the first master 310 is disposed to correspond to the profile 211 of the first side 210 of the microlens array. Wherein the cross section of the surface 211 is, for example, a continuous arc shape protruding outward, the cross section of the surface 311 is set to be a corresponding continuous arc shape recessed inward. The first master 310 can thus be obtained from negative working of the profile 211 of the first side 210. In addition, the first reticle 310 may also be provided directly from an existing reticle.
The preparation method 100 includes step S102: a second master 320 corresponding to the profile of the second side 220 of the microlens array is prepared or provided. Fig. 7 shows a schematic view of a second master according to an embodiment of the invention, and fig. 8 shows a schematic view of a first side and a second side of a microlens array according to an embodiment of the invention. Referring to fig. 7 and 8, the profile 321 of the second master 320 is arranged to correspond to the profile 222 of the second side 220 of the microlens array. Wherein the cross-section of the surface 222 is, for example, a continuous outwardly convex trapezoid, the cross-section of the surface 321 is configured as a corresponding continuous inwardly concave trapezoid. The second master 320 can thus be obtained from negative profiling of the profile 222 of the second side 220. In addition, the second master 320 may also be provided directly from an existing master.
The preparation method 100 includes step S103: using the first master 310, a profile 211 of the first side 210 of the microlens array is formed by a lens substrate. Referring to fig. 5 and 6, according to the obtained first master 310, the first side 210 of the microlens array is prepared from a lens substrate based on the profile 311, and a profile 211 is obtained.
The preparation method 100 includes step S104: using the second master 320, the profile 222 of the second side 220 of the microlens array is formed by a lens substrate. Referring to fig. 7 and 8, according to the obtained second master 320, the second side 220 of the microlens array is prepared from the lens substrate based on the profile 321, and the profile 222 is obtained.
The preparation method 100 includes step S105: the recess 221 is filled with a light absorbing material. FIG. 9 shows a schematic illustration of recess filling of a microlens array according to one embodiment of the invention. Referring to fig. 8 and 9, a recess is formed between every two consecutive outwardly convex trapezoids in the profile 222, and a plurality of the recesses form the recess 221 of the second side 220. The microlens array 200 is placed horizontally, and a light absorbing material, such as a black light absorbing material, is dropped into the recess 221.
The preparation method 100 further includes step S106: the light absorbing material is cured to form the light shielding portion 230 of the microlens array. Referring to fig. 9, after filling the light absorbing material, the leveling time can be shortened by waiting for the light absorbing material to level or applying a certain centrifugal force and controlling the rotation speed. The light absorbing material forms a light blocking portion 230 after curing.
According to an embodiment of the present invention, wherein the step S101 includes: the facet 211 of the first side 210 of the microlens array is machined into a first master 310 by laser direct writing, lithography, or ultra-precision machining. Similarly, the step S102 includes: the facet 222 on the second side 220 of the microlens array is machined into a second master 320 by laser direct writing, lithography, or ultra-precision machining.
According to an embodiment of the present invention, referring to fig. 9, the step S105 further includes: the amount of the light absorbing material is controlled such that the outer surface 231 of the light shielding portion 230 formed after the light absorbing material is cured is not higher than the surface 223 of the second side 220 adjacent to the light shielding portion 230.
According to an embodiment of the present invention, the steps S103 and S104 are performed by an imprinting process, which includes nanoimprinting. Specifically, referring to fig. 5 and 6, the step S103 includes coating a UV transparent glue on a substrate, and using the first master 310 to copy the UV transparent glue into the first side 210 of the microlens array and the surface shape 211 thereof by means of nanoimprinting; or a piece of lens base material is directly copied into the first side 210 of the microlens array and the surface shape 211 thereof by hot embossing by using the first master plate 310. Further, referring to fig. 6, 7 and 8, the step S104 includes applying a UV transparent glue on the flat surface 212 of the first side 210 of the prepared microlens array, and using the second master plate 320 to copy the UV transparent glue into the second side 220 of the microlens array and the surface shape 222 thereof by means of nanoimprinting.
According to another embodiment of the present invention, the steps S103 and S104 are performed on different lens substrates, respectively, to obtain the first side 210 and the second side 220 of the microlens array, respectively. Referring to fig. 8, the preparation method 100 further includes: the lens base material (first side 210) formed with the first side surface 211 and the lens base material (second side 220) formed with the second side surface 222 are bonded.
According to still another embodiment of the present invention, as shown in fig. 5, 7 and 8, the steps S103 and S104 are implemented by: first, the lens substrate is coated on the surface 311 of the first master 310. Secondly, aligning and pressing the side of the second master plate 320 with the surface shape 321 and the side of the first master plate 310 with the surface shape 311, and forming the first side 210 and the second side 220 of the microlens array on the lens substrate by means of nano-imprinting. The first side 210 and the second side 220 obtained in this way are directly integral.
FIG. 10 shows a schematic diagram of adjusting the thickness of an intermediate layer of a microlens array according to one embodiment of the present invention. Optionally, referring to fig. 10, the preparation method 100 further includes: adjusting the spacing between the first master 310 and the second master 320, thereby adjusting the interlayer thickness of the microlens array 200.
The invention also relates to a micro-lens array. Alternatively, the microlens array 200 may be obtained by the above-described manufacturing method 100. Referring to fig. 4 and 9, the microlens array 200 includes: a light transmissive body 201 and a light blocking portion 230. Wherein the light transmissive body 201 has a first side 210 and a second side 220 opposite to the first side 210, the first side 210 having a plurality of microlenses (200-1, 200-2, …, 200-n) thereon, the second side 220 having a recess 221. The light shielding portion 230 is filled in the recess 221.
According to an embodiment of the present invention, referring to fig. 9, the outer surface 231 of the light shielding portion 230 is not higher than the adjacent plane 223 on the second side 220.
FIG. 11 shows a schematic diagram of a microlens array and an image sensor according to one embodiment of the invention. As shown in the figure, the width of a single microlens 200-1 in the microlens array 200 is DL, the cross section of the light shielding part 230 is trapezoid, the height of the trapezoid light shielding part 230 is H1, the height of the microlens array 200 is H2, the maximum light condensation angle is theta, the size of an image element of the image sensor 400 is W, wherein DL is less than or equal to W/3, and H1 is less than H2.
According to one embodiment of the present invention, as shown in FIG. 11, the height H1 of the trapezoid light shielding part 230 ranges from 30 μm to 100 μm, and the height H2 of the microlens array 200 ranges from 35 μm to 115 μm.
According to an embodiment of the present invention, as shown in FIG. 11, the aperture diameter of the inner surface of the trapezoid shielding portion 230 is D1, and the aperture diameter of the outer surface of the trapezoid shielding portion 230 is D2. The D1 satisfies 0.9H 1 DL/H2 and D1 and DL, and the range of D2 is 2-10 μm.
According to one embodiment of the present invention, the refractive index of the light shielding portion 230 is equal to or greater than the refractive index of the light transmissive body 201, and the difference between the refractive indices is less than 0.25.
The invention also relates to an underscreen fingerprint module, which comprises the micro-lens array 200.
Fig. 12 is a schematic diagram of an optical module including a stereoscopic diaphragm microlens array according to an embodiment of the present invention, wherein the microlens array and an image sensor are bonded together by an optical cement. The inventor of the present invention finds that the microlens array can better absorb non-signal light and improve the signal-to-noise ratio when the microlens array is a three-dimensional diaphragm structure (as shown in fig. 12). Based on the invention, the inventor designs a unique light absorption structure and adopts an innovative nano-imprinting process, thereby effectively preventing the crosstalk of large-angle light among the microlenses, improving the imaging effect of incident light after penetrating through the microlenses, and improving the light condensation efficiency of the microlenses. FIG. 13 shows a graph comparing signal-to-noise ratio of a microlens array designed according to the present invention with that of the prior art. As can be seen from fig. 13, the signal-to-noise ratio of the embodiment of the present invention is greatly improved compared to the signal-to-noise ratio of the prior art design, and the ratio of the energy received by the image sensor corresponding to the signal light region to the energy received by the image sensor corresponding to the no-signal light region is greatly improved. The micro-lens array not only has the basic functions of focusing, imaging and the like of the traditional lens, but also has the characteristics of small unit size, light weight, thinness, high integration level and the like, can be widely applied to biological identification such as an underscreen fingerprint identification module, a mobile phone, a camera and other imaging electronic equipment, and is lighter and thinner than the traditional lens scheme. According to the embodiment of the invention, the unique light absorption structure is designed and the innovative nano-imprinting process is adopted, so that the crosstalk of large-angle light among the micro lenses is prevented, the effect of an image formed by incident light after penetrating through the micro lenses is improved, and the light condensation efficiency of the micro lenses is improved.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (15)
1. A method of making a microlens array, wherein the microlens array has opposing first and second sides, the second side having a depression, the method comprising:
s101: preparing or providing a first mother plate corresponding to the surface shape of the first side of the micro-lens array;
s102: preparing or providing a second mother plate corresponding to the surface shape of the second side of the micro-lens array;
s103: forming a surface shape of a first side of the micro-lens array through a lens substrate by using the first master plate;
s104: forming a surface shape of a second side of the micro-lens array through a lens base material by using the second master plate;
s105: filling a light absorption material into the concave part; and
s106: and curing the light absorption material to form the light shielding part of the micro lens array.
2. The production method according to claim 1, wherein the step S101 includes: processing the surface of the first side of the micro lens array into a first mother plate through laser direct writing, photoetching or an ultra-precision machine tool; the step S102 includes: and processing the surface of the second side of the micro lens array into a second mother plate by using a laser direct writing machine, a photoetching machine or an ultra-precision machine tool.
3. The production method according to claim 1, wherein the step S105 further includes: and controlling the amount of the light absorption material to ensure that the outer surface of a light shielding part formed after the light absorption material is cured is not higher than the surface adjacent to the light shielding part on the second side.
4. The production method according to any one of claims 1 to 3, wherein the steps S103 and S104 are performed by an imprint process, the imprint process including nanoimprinting.
5. The production method according to claim 4, wherein the steps S103 and S104 are performed on different lens base materials; the preparation method further comprises the following steps: and bonding the lens base material with the first side surface shape and the lens base material with the second side surface shape.
6. The production method according to any one of claims 1 to 3, wherein the steps S103 and S104 are carried out by:
coating the lens substrate on the first master plate;
and aligning and pressing the second master plate and the first master plate to form a first side and a second side of the micro-lens array.
7. The method of manufacturing according to claim 6, further comprising: and adjusting the distance between the first mother plate and the second mother plate.
8. A microlens array, comprising:
a light transmissive body having opposing first and second sides, the first side having a plurality of microlenses thereon, the second side having a recessed portion;
and the light shielding part is filled in the sunken part.
9. The microlens array of claim 8, wherein an outer surface of the light shielding portion is no higher than a plane on the second side adjacent thereto.
10. The microlens array of claim 8 or 9, wherein the width of individual microlenses in the microlens array is DL, the cross-section of the light-shielding portion is trapezoidal, the height of the trapezoidal light-shielding portion is H1, the height of the microlens array is H2, the size of an image sensor pixel is W, wherein DL ≦ W/3, H1 < H2.
11. The microlens array of claim 10, wherein the height H1 of the trapezoidal light-shielding portion ranges from 30 μm to 100 μm, and the height H2 of the microlens array ranges from 35 μm to 115 μm.
12. A microlens array according to claim 8 or 9, wherein the width of individual microlenses in the microlens array is DL, the shading portion has a trapezoidal cross-section, the height of the trapezoidal shading portion is H1, the diameter of the opening of the inner surface is D1, the height of the microlens array is H2, and the D1 satisfies 0.9H 1 DL/H2 ≦ D1 ≦ DL.
13. A microlens array according to claim 8 or 9, wherein the light-shielding portion has a trapezoidal cross section, the aperture diameter of the outer surface of the trapezoidal light-shielding portion is D2, and the D2 is in the range of 2 μm to 10 μm.
14. A microlens array according to claim 8 or 9, wherein the refractive index of the light shielding portion is equal to or greater than the refractive index of the light transmissive body, and the difference in refractive index therebetween is less than 0.25.
15. An underscreen fingerprint module comprising the microlens array of any one of claims 8-14.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113740865A (en) * | 2021-08-31 | 2021-12-03 | 上海悠睿光学有限公司 | Structured light projection module and electronic equipment |
| CN115308822A (en) * | 2022-01-21 | 2022-11-08 | 苏州东辉光学有限公司 | Method for preparing micro-lens array, method, system and device for monitoring film thickness |
| CN116125569A (en) * | 2023-04-14 | 2023-05-16 | 福建福特科光电股份有限公司 | Preparation method of microlens array based on nanoimprint lithography |
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| CN116125569B (en) * | 2023-04-14 | 2023-09-12 | 福建福特科光电股份有限公司 | Preparation method of microlens array based on nanoimprint lithography |
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