CN112307779B - Method for optimizing ultra-high-precision GMI superconducting composite magnetometer - Google Patents

Method for optimizing ultra-high-precision GMI superconducting composite magnetometer Download PDF

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CN112307779B
CN112307779B CN202011227072.1A CN202011227072A CN112307779B CN 112307779 B CN112307779 B CN 112307779B CN 202011227072 A CN202011227072 A CN 202011227072A CN 112307779 B CN112307779 B CN 112307779B
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王三胜
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Abstract

The invention discloses an ultra-high precision GMI superconducting composite magnetometer optimization method, which comprises six optimization research steps, and realizes the research optimization of the composition structure and annealing post-treatment influence of a GMI multilayer film sensitive material system, the material preparation, processing and post-treatment influence of a YBCO superconducting magnetic flux converter, and the coupling mechanism and influence between the GMI superconducting composite magnetometer and the YBCO superconducting magnetic flux converter; the invention designs and optimizes a superconducting magnetic flux converter and a GMI multilayer film sensitive structure, provides a method for preparing a high-sensitivity GMI component by adopting a sandwich structure or multilayer films, does not need precise parameter control and structural design, has simple structure and easy production, and simultaneously provides a method for preparing a magnetic flux converter by adopting a self-made large-area high-performance high-temperature superconducting film so as to achieve the purposes of high gain, high measurement precision of a principle prototype for preparing a magnetic sensor and capability of detecting a magnetic field of fT magnitude.

Description

Ultra-high precision GMI superconducting composite magnetometer optimization method
Technical Field
The invention relates to the technical field of superconducting composite magnetometers, in particular to an ultra-high-precision GMI superconducting composite magnetometer optimization method.
Background
The ultra-high precision magnetometer (magnetic sensor) has wide application prospect and urgent need in scientific research fields such as biomagnetic measurement, geomagnetic navigation, astronomical observation, basic physical characteristic analysis and the like, the magnetic sensor is a converter capable of converting a magnetic field into corresponding electric signals, and the principles for realizing the magnetic sensor are various, such as Hall effect, magnetoresistance effect, giant magnetoresistance effect, nuclear precession, superconducting quantum interferometer, magnetoelastic effect and the like;
the existing magnetic sensor has dispersed research data in the aspect of miniaturization, and the measurement precision cannot be compared with a SQUID device, but the traditional SQUID manufacturing requires the preparation of weak connection because the working principle is based on the Josephson effect of a superconducting conductor, and meanwhile, the GMR element in the existing micro magnetic sensor manufactured by utilizing the GMR effect still has low detection precision, the multilayer film structure of the GMR element is very complex, very precise parameter control and structural design are required for realization, and the difficulty is very high, so the invention provides an ultra-high precision GMI superconducting composite magnetometer optimization method to solve the problems in the prior art.
Disclosure of Invention
In view of the above problems, the present invention provides an ultra-high precision GMI superconducting composite magnetometer optimization method, which designs and optimizes a superconducting magnetic flux converter and a GMI multilayer film sensitive structure, and provides a method for manufacturing a high-sensitivity GMI component by using a sandwich structure or multilayer films, without precise parameter control and structural design, and is simple and easy to produce, and simultaneously provides a method for manufacturing a magnetic flux converter by using a self-made large-area high-performance high-temperature superconducting film, so as to achieve high gain, manufacture a magnetic sensor principle prototype with high measurement precision, and detect the field of fT magnitude.
In order to realize the purpose of the invention, the invention is realized by the following technical scheme: an ultra-high precision GMI superconducting composite magnetometer optimization method comprises the following steps:
the method comprises the following steps of firstly, testing a composite multilayer film with a transverse anisotropic structure and a composite multilayer film with a longitudinal anisotropic structure to obtain a structure with the maximum magnetic impedance ratio and find the most appropriate driving frequency;
step two, processing the composite multilayer film by using static magnetic field annealing, current annealing, pulse current annealing and stress annealing to obtain the influence and rule of the composite multilayer film on the magnetic performance;
testing by using a composite multilayer film structure composed of different GMI material systems to obtain an optimized structure and a material system of the maximum magnetic impedance ratio;
analyzing a coupling mechanism and influencing factors between the composite multilayer film structure and the superconducting magnetic flux converter by combining microstructure observation and theory, and providing an optimized artificial composite structure and an implementation method;
fifthly, obtaining a large magnetic flux transformation ratio through the test of material preparation, processing and post-treatment of the YBCO superconducting magnetic flux converter and the influence of the shape and the size of the superconducting ring;
and step six, building a giant magneto-impedance/superconducting composite magnetic sensor circuit consisting of a signal generating circuit, a constant current source excitation circuit, a pre-amplification circuit, a detection circuit, a filter circuit, a differential amplification circuit and a bias feedback circuit.
The further improvement lies in that: the specific manufacturing steps are that firstly, a physical and chemical method is adopted on a single crystal substrate to prepare a high-quality YBCO superconducting film; then preparing a passivation film by adopting a sputtering technology; then, manufacturing a superconducting magnetic flux converter by adopting photoetching exposure and ion beam etching processes; on the basis, a GMI composite film sensitive structure is manufactured by a sputtering method; meanwhile, theoretical analysis and calculation are carried out, the route and the mechanism of the device performance are revealed, the actual process is combined, and the performance of the device is comprehensively improved through the means of membrane system design, surface interface control and optimization, magnetocaloric annealing and stress annealing; and (4) building an external circuit, and finally manufacturing a GMI/superconducting composite magnetometer principle prototype.
The further improvement lies in that: in the second step, the GMI effect of the Co-based amorphous wire is better applied to practice through the influence of annealing, a bias magnetic field, bias current and external stress on the GMI resistance change rate and the magnetic field sensitivity of the Co-based amorphous wire, and optimized processing conditions are obtained through the change of the GMI effect under different static magnetic field annealing, current annealing, pulse current annealing and stress annealing processing conditions.
The further improvement is that: in the third step, a silicon dioxide insulating layer is inserted between the layer A and the layer B in the traditional multilayer film structure A/B/A, namely the traditional multilayer film structure is CoSiB/Cu/CoSiB, the multilayer film structure inserted with the insulating layer is CoSiB/SiO2/Cu/SiO2/CoSiB, and due to the existence of the insulating layer, the resistivity difference between the layer A and the layer B is enhanced, so that the driving current only flows through the conductor layer B, and a larger GMI effect is obtained.
The further improvement lies in that: the amplification factor of the local magnetic field of the superconducting ring in the fourth step is Q, and the formula (1)
Figure BDA0002763914200000031
Wherein R is the average value of the inner and outer diameters of the superconducting ring, omega c 、ω l The width of the superconducting loop pinch and the loop, respectively, with α =2, typically α =1/2, when the width of the loop is much smaller than the average radius;
the expected theoretical amplification factor of the superconducting ring is increased along with the increase of the outer diameter and the decrease of the narrow width through calculation, and the superconducting ring needs to be increased as much as possible in order to achieve high precision
The further improvement lies in that: and in the fifth step, the superconducting film is processed into the superconducting ring by a micro-processing method, and then the superconducting ring is subjected to post-treatment by four methods, namely chemical wet etching, ion beam dry etching, a modification process and a refractory micro-mask preparation process.
The further improvement lies in that: the signal generating circuit in the sixth step generates a high-frequency excitation signal to excite the amorphous band; the constant current source excitation circuit provides stable constant current excitation for the Co-based amorphous wire; the circuit is added with a bias coil, and direct current is conducted in the bias coil to generate a stable magnetic field, so that the sensitive material is ensured to always work in the optimal working section; the control of the working section of the sensitive material is realized by adjusting the current and the coil parameters, and in addition, a bias feedback loop is added, which is beneficial to improving the nonlinearity of the sensor and improving the stability.
The invention has the beneficial effects that: the invention designs and optimizes a superconducting magnetic flux converter and a GMI multilayer film sensitive structure, provides a method for preparing a high-sensitivity GMI component by adopting a sandwich structure or multilayer films, does not need precise parameter control and structural design, has simple structure and easy production, and simultaneously provides a method for preparing a magnetic flux converter by adopting a self-made large-area high-performance high-temperature superconducting film so as to achieve the purposes of high gain, high measurement precision of a principle prototype for preparing a magnetic sensor and capability of detecting a magnetic field of fT magnitude.
Drawings
Fig. 1 is a schematic block diagram of a GMI amorphous wire magnetometer of the present invention.
Fig. 2 is a circuit implementation diagram of a GMI amorphous wire magnetometer of the present invention.
FIG. 3 is a diagram of two giant magneto-impedance effect modes in step one of the present invention.
Detailed Description
In order to further understand the present invention, the following detailed description will be made with reference to the following examples, which are only used for explaining the present invention and are not to be construed as limiting the scope of the present invention.
Referring to fig. 1, 2 and 3, the embodiment provides an ultra-high precision GMI superconducting composite magnetometer optimization method, which includes the following steps:
the method comprises the following steps of firstly, testing a composite multilayer film with a transverse anisotropic structure and a composite multilayer film with a longitudinal anisotropic structure to obtain a structure with the maximum magnetic impedance ratio and find the most appropriate driving frequency;
step two, processing the composite multilayer film by using static magnetic field annealing, current annealing, pulse current annealing and stress annealing to obtain the influence and rule of the composite multilayer film on the magnetic performance;
testing by using a composite multilayer film structure composed of different GMI material systems to obtain an optimized structure and a material system of the maximum magnetic impedance ratio;
fourthly, analyzing a coupling mechanism and influencing factors between the composite multilayer film structure and the superconducting magnetic flux converter by combining microstructure observation and theory, and providing an optimized artificial composite structure and a realization method;
fifthly, obtaining a large magnetic flux transformation ratio through the test of material preparation, processing and post-treatment of the YBCO superconducting magnetic flux transformer and the influence of the shape and the size of the superconducting ring;
and step six, building a giant magneto-impedance/superconducting composite magnetic sensor circuit consisting of a signal generating circuit, a constant current source excitation circuit, a pre-amplification circuit, a detection circuit, a filter circuit, a differential amplification circuit and a bias feedback circuit.
The specific manufacturing steps are that firstly, a physical and chemical method is adopted on a single crystal substrate to prepare a high-quality YBCO superconducting film; then preparing a passivation film by adopting a sputtering technology; then, manufacturing a superconducting magnetic flux converter by adopting photoetching exposure and ion beam etching processes; on the basis, a GMI composite film sensitive structure is manufactured by a sputtering method; meanwhile, theoretical analysis and calculation are carried out, the route and the mechanism of the device performance are revealed, the actual process is combined, and the performance of the device is comprehensively improved through the means of membrane system design, surface interface control and optimization, magnetocaloric annealing and stress annealing; and (4) building an external circuit, and finally manufacturing a GMI/superconducting composite magnetometer principle prototype.
In the second step, the GMI effect of the Co-based amorphous wire is better applied to the reality through the influence of annealing, a bias magnetic field, bias current and external stress on the GMI impedance change rate and the magnetic field sensitivity of the Co-based amorphous wire, and the optimized processing condition is obtained through the change of the GMI effect under different static magnetic field annealing, current annealing, pulse current annealing and stress annealing processing conditions.
In the third step, a silicon dioxide insulating layer is inserted between the layer A and the layer B in the traditional multilayer film structure A/B/A, namely the traditional multilayer film structure is CoSiB/Cu/CoSiB, the multilayer film structure with the insulating layer inserted is CoSiB/SiO2/Cu/SiO2/CoSiB, the existence of the insulating layer leads to the enhancement of the resistivity difference between the layer A and the layer B, so that the driving current only flows through the conductor layer B, and the larger GMI effect is obtained, and the obtained GMI ratio and the magnetic field sensitivity are 700% and 300%/Oe respectively at the frequency of 20MHz, which is the maximum value obtained in all the magnetic films.
By utilizing the most basic idea of a GMI/superconducting composite structure, the local shape of a YBCO superconducting magnetic flux converter (superconducting ring) is changed to increase the local induced magnetic flux density, so that the induced magnetic field is increased, thereby playing the role of amplifying the surrounding magnetic field, then the amplified magnetic field is induced by a GMI sensitive element area, and the formula (1) is shown in the fourth step when the local magnetic field amplification factor of the superconducting ring is set as Q
Figure BDA0002763914200000071
Wherein R is the average value of the inner and outer diameters of the superconducting ring, omega c 、ω l The width of the superconducting loop pinch and the loop, respectively, with α =2, typically α =1/2, when the width of the loop is much smaller than the average radius;
from the theoretical derivation above, the main parameters of the superconducting loops were set for comparison of the expected magnification, as shown in table 1:
TABLE 1 comparison of theoretical amplification factors of superconducting loops
Figure BDA0002763914200000072
Table 1 shows that the theoretical amplification factor of the superconducting ring is expected to be larger as the outer diameter of the superconducting ring is larger and the width of the superconducting ring is smaller, and the larger the amplification factor of the superconducting ring is, the better the superconducting ring is required to achieve high precision, but the idea is limited by the actual etching process level and the size of the superconducting film per se.
And in the fifth step, the superconducting film is processed into the superconducting ring by a micro-processing method, and then the superconducting ring is subjected to post-treatment by four methods, namely chemical wet etching, ion beam dry etching, a modification process and a refractory micro-mask preparation process.
The signal generating circuit in the sixth step generates a high-frequency excitation signal to excite the amorphous band; the constant current source excitation circuit provides stable constant current excitation for the Co-based amorphous wire; the circuit is added with a bias coil, and direct current is conducted in the bias coil to enable the bias coil to generate a stable magnetic field, so that the sensitive material is ensured to work in an optimal working section all the time; the control of the working section of the sensitive material is realized by adjusting the current and the coil parameters, and in addition, a bias feedback loop is added, which is beneficial to improving the nonlinearity of the sensor and improving the stability.
The optimization method of the ultra-high-precision GMI superconducting composite magnetometer is used for designing and optimizing a superconducting magnetic flux converter and a GMI multilayer film sensitive structure, and providing that a high-sensitivity GMI component is prepared by adopting a sandwich structure or multilayer films, accurate parameter control and structural design are not needed, the structure is simple and easy to produce, and meanwhile, the magnetic flux converter is prepared by adopting a self-made large-area high-performance high-temperature superconducting film, so that the purposes of high gain, high measurement precision of a principle prototype for manufacturing a magnetic sensor and capability of detecting a magnetic field of fT magnitude are achieved.
The foregoing shows and describes the general principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (5)

1. An ultra-high precision GMI superconducting composite magnetometer optimization method is characterized by comprising the following steps:
the method comprises the following steps of firstly, testing a composite multilayer film with a transverse anisotropic structure and a composite multilayer film with a longitudinal anisotropic structure to obtain a structure with the maximum magnetic impedance ratio and find the most appropriate driving frequency;
step two, processing the composite multilayer film by using static magnetic field annealing, current annealing, pulse current annealing and stress annealing to obtain the influence and rule of the composite multilayer film on the magnetic performance;
testing by using a composite multilayer film structure composed of different GMI material systems to obtain an optimized structure and a material system of the maximum magnetic impedance ratio;
fourthly, analyzing a coupling mechanism and influencing factors between the composite multilayer film structure and the superconducting magnetic flux converter by combining microstructure observation and theory, and providing an optimized artificial composite structure and a realization method;
fifthly, obtaining a large magnetic flux transformation ratio through the test of material preparation, processing and post-treatment of the YBCO superconducting magnetic flux transformer and the influence of the shape and the size of the superconducting ring;
constructing a giant magneto-impedance/superconducting composite magnetic sensor circuit consisting of a signal generating circuit, a constant current source excitation circuit, a pre-amplification circuit, a detection circuit, a filter circuit, a differential amplification circuit and a bias feedback circuit;
the specific manufacturing steps are that firstly, a physical and chemical method is adopted on a single crystal substrate to prepare a high-quality YBCO superconducting film; then preparing a passivation film by adopting a sputtering technology; then, manufacturing a superconducting magnetic flux converter by adopting photoetching exposure and ion beam etching processes; on the basis, a GMI composite film sensitive structure is manufactured by a sputtering method; meanwhile, theoretical analysis and calculation are carried out, the route and mechanism of the device performance are revealed, the actual process is combined, and the performance of the device is comprehensively improved through the means of membrane system design, surface interface control and optimization, magnetocaloric annealing and stress annealing; building an external circuit, and finally manufacturing a GMI/superconducting composite magnetometer principle prototype;
processing the superconducting thin film into a superconducting ring by a micro-processing method;
the ultra-high precision GMI superconducting composite magnetometer optimization method is used for designing and optimizing a superconducting magnetic flux converter and a GMI multilayer film sensitive structure, and a high-sensitivity GMI component is prepared by adopting a sandwich structure or a multilayer film;
in the second step, the GMI effect of the Co-based amorphous wire is better applied to practice through the influence of annealing, a bias magnetic field, bias current and external stress on the GMI resistance change rate and the magnetic field sensitivity of the Co-based amorphous wire, and optimized processing conditions are obtained through the change of the GMI effect under different static magnetic field annealing, current annealing, pulse current annealing and stress annealing processing conditions.
2. The method for optimizing the ultra-high precision GMI superconducting composite magnetometer according to claim 1, wherein the method comprises the following steps: in the third step, a silicon dioxide insulating layer is inserted between the layer A and the layer B in the traditional multilayer film structure A/B/A, namely the traditional multilayer film structure is CoSiB/Cu/CoSiB, the multilayer film structure inserted with the insulating layer is CoSiB/SiO2/Cu/SiO2/CoSiB, and due to the existence of the insulating layer, the resistivity difference between the layer A and the layer B is enhanced, so that the driving current only flows through the conductor layer B, and a larger GMI effect is obtained.
3. The method for optimizing the ultra-high precision GMI superconducting composite magnetometer according to claim 1, wherein the method comprises the following steps: in the fifth step, if the local magnetic field amplification factor of the superconducting ring is Q, the formula (1) is shown
Figure FDA0003753085200000031
Wherein R is the average value of the inner and outer diameters of the superconducting ring, omega c 、ω l The width of the superconducting loop pinch and the loop, respectively, with α =2, typically α =1/2, when the width of the loop is much smaller than the average radius;
the theoretical amplification factor expected for superconducting rings becomes larger as the outer diameter becomes larger and the width becomes smaller, and the larger the amplification factor is, the better the superconducting rings need to have high accuracy.
4. The method for optimizing the ultra-high precision GMI superconducting composite magnetometer according to claim 1, wherein the method comprises the following steps: the superconducting ring is post-treated by four methods of chemical wet etching, ion beam dry etching, modification process and refractory micro-mask preparation process.
5. The method for optimizing the ultra-high precision GMI superconducting composite magnetometer according to claim 1, wherein the method comprises the following steps: the signal generating circuit in the sixth step generates a high-frequency excitation signal to excite the YBOC superconducting film; the constant current source excitation circuit provides stable constant current excitation for the composite multilayer film structure; the circuit is added with a bias coil, and direct current is conducted in the bias coil to enable the bias coil to generate a stable magnetic field, so that the GMI composite film sensitive structure is ensured to work in an optimal working section all the time; the control of the working section of the sensitive material is realized by adjusting the current and the coil parameters, and in addition, a bias feedback loop is added, which is beneficial to improving the nonlinearity of the sensor and improving the stability.
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