CN112286008B - Laser direct writing energy correction method and device - Google Patents
Laser direct writing energy correction method and device Download PDFInfo
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- CN112286008B CN112286008B CN202011036034.8A CN202011036034A CN112286008B CN 112286008 B CN112286008 B CN 112286008B CN 202011036034 A CN202011036034 A CN 202011036034A CN 112286008 B CN112286008 B CN 112286008B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70558—Dose control, i.e. achievement of a desired dose
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The embodiment of the invention provides a laser direct-writing energy correction method and a laser direct-writing energy correction device, wherein the laser direct-writing energy correction method comprises the following steps: acquiring an image formed by the laser beam on a detector after being reflected by the micro-mirror array in an interval sampling mode; the interval sampling mode means that at least one inoperative micromirror is spaced between two adjacent micromirrors in normal operation state each time of interval sampling; acquiring the brightness value of a micromirror in at least partial area of the micromirror array according to the image; acquiring a brightness integral value of each column of the micromirrors in the scanning direction according to the brightness values of the micromirrors in the at least partial area; and performing energy correction on the micromirror array according to the brightness integral value of each column of the micromirrors. The embodiment of the invention provides a laser direct-writing energy correction method and device, and the sampling interval sampling mode avoids the overlapping phenomenon, improves the sampling accuracy, and improves the accuracy of laser direct-writing energy correction, thereby solving the problem of brightness uniformity.
Description
Technical Field
The invention relates to a laser direct writing technology, in particular to a laser direct writing energy correction method and device.
Background
The laser direct writing imaging equipment is also called image direct transfer equipment, and is an important equipment different from the traditional semi-automatic exposure equipment in the field of semiconductor and Printed Circuit Board (PCB) production. The pattern generator is used for replacing a mask plate of the traditional imaging equipment, so that the pattern data of the computer can be directly exposed on a wafer or a PCB, the plate manufacturing time and the cost for manufacturing the mask plate are saved, and the pattern generator can be used for manufacturing the mask plate. And most of the previous manufacturers use Spatial Light Modulators (SLMs) as pattern generators SLMs including Digital Micromirror Devices (DMDs) and Liquid Crystal Displays (LCDs), which SLMs include an array of independently addressable and controllable pixels, each of which can modulate transmitted, reflected or diffracted light, including phase, gray scale direction or on-off state.
The laser direct-writing imaging equipment forms images through the reflection of the DMD, and has great requirements on the brightness uniformity of laser projected onto the DMD.
The currently generally adopted laser direct writing energy detection method is as follows:
1. imaging a full white pattern on the DMD; 2. uniformly selecting a plurality of brightness sampling points (the number and the positions are set according to the actual situation) on the DMD, 3, placing an illuminometer below the sampling points to collect the brightness of the sampling points, and 4, counting the brightness of the sampling points. 5. The brightness uniformity is the ratio of the brightness minimum value to the brightness maximum value, the data of non-sampling points on the brightness measurement cannot be included in the evaluation range, the brightness uniformity depends on the processing precision of the optical element and the design precision of the optical dodging device, and the problem of the brightness uniformity cannot be solved timely and effectively.
Disclosure of Invention
The embodiment of the invention provides a laser direct-writing energy correction method and device, and the sampling interval sampling mode avoids the overlapping phenomenon, improves the sampling accuracy, and improves the accuracy of laser direct-writing energy correction, thereby solving the problem of brightness uniformity.
In a first aspect, an embodiment of the present invention provides a laser direct writing energy correction method, including:
acquiring an image formed by the laser beam on a detector after being reflected by the micro-mirror array in an interval sampling mode; the interval sampling mode means that at least one inoperative micromirror is spaced between two adjacent micromirrors in normal operation state each time of interval sampling;
acquiring the brightness value of a micromirror in at least partial area of the micromirror array according to the image;
acquiring a brightness integral value of each column of the micromirrors in the scanning direction according to the brightness values of the micromirrors in the at least partial area;
and performing energy correction on the micromirror array according to the brightness integral value of each column of the micromirrors.
Optionally, before acquiring an image formed on the detector by the laser beam after being reflected by the micromirror array in an interval sampling manner, the method further includes:
and controlling the exposure time of the detector to be less than the preset exposure time.
Optionally, acquiring an image formed by the laser beam on the detector after being reflected by the micromirror array in an interval sampling manner, and acquiring the brightness value of the micromirror in at least a partial area in the micromirror array according to the image, includes:
acquiring a sampling image formed by a laser beam on a detector in an interval sampling mode;
acquiring the brightness value of the micromirror corresponding to the sampled image according to the sampled image;
and splicing the brightness values of the micro mirrors corresponding to the sampled images after multiple times of interval sampling into the brightness values of the micro mirrors in at least partial areas in the micro mirror array.
Optionally, acquiring an image formed by the laser beam on the detector after being reflected by the micromirror array in an interval sampling manner, and acquiring the brightness value of the micromirror in at least a partial area in the micromirror array according to the image, includes:
acquiring a sampling image formed by a laser beam on a detector in an interval sampling mode;
splicing the plurality of sampling images into an image formed by the laser beam on a detector after being reflected by the micro mirror array;
and acquiring the brightness value of the micro mirror in at least partial area of the micro mirror array according to the image.
Optionally, during interval sampling, the adjacent two micromirrors in normal operation state are separated by N inoperative micromirrors to perform (N +1)2Sampling at intervals, wherein N is more than or equal to 1.
Optionally, performing energy correction on the micromirror array according to the integrated value of brightness of each column of the micromirrors comprises:
acquiring a minimum value in the luminance integrated value;
if the brightness integral value of one row of the micromirrors is larger than the minimum value, selecting a first part of micromirrors in one row of the micromirrors, and making the difference value between the brightness integral value and the minimum value of all micromirrors except the first part of micromirrors in one row of the micromirrors smaller than a preset difference value;
and during laser direct-writing photoetching, controlling the first part of micromirrors not to work all the time, and controlling all micromirrors except the first part of micromirrors in one row to be in a normal working state.
Optionally, before acquiring an image formed on the detector by the laser beam after being reflected by the micromirror array in an interval sampling manner, the method further includes:
and arranging a brightness attenuation sheet on a light path between the micromirror array and the detector, wherein the brightness attenuation sheet is used for reducing the brightness of the laser beam received by the detector.
Optionally, the rows and columns of the micromirrors are arranged in a matrix, and the column direction of the matrix of the micromirrors is parallel to the scanning direction.
Optionally, the rows and columns of the micromirrors are arranged in a matrix, and an included angle between a matrix column direction of the micromirrors and the scanning direction is greater than 0 ° and less than 90 °.
In a second aspect, an embodiment of the present invention provides a laser direct writing energy correction apparatus, including:
a laser emitting a laser beam;
the micro mirror array comprises a plurality of micro mirrors arranged in an array and reflects the laser beam;
a detector;
the controller is used for acquiring an image formed by the laser beam on the detector after being reflected by the micromirror array in an interval sampling mode, acquiring the brightness value of the micromirror in at least partial area of the micromirror array according to the image, acquiring the brightness integral value of each row of the micromirrors in the scanning direction according to the brightness value of the micromirror in at least partial area, and performing energy correction on the micromirror array according to the brightness integral value of each row of the micromirrors;
the interval sampling mode refers to that at least one non-working micromirror is spaced between two adjacent micromirrors in a normal working state each time the interval sampling is carried out.
The embodiment of the invention provides a laser direct writing energy correction method, which comprises the steps of acquiring an image formed by a laser beam on a detector after being reflected by a micro mirror array in an interval sampling mode, and acquiring the brightness value of a micro mirror in at least partial area of the micro mirror array according to the image. The sampling image formed by the laser beam on the detector is acquired by adopting an interval sampling mode, at least one non-working micromirror is arranged between two adjacent micromirrors in a normal working state, the laser beams reflected by a plurality of adjacent micromirrors are prevented from overlapping on the detector, and the brightness of an overlapping area is obviously greater than that of a non-overlapping area, so that the accuracy of the brightness value of a single micromirror obtained by sampling is reduced. The overlapping phenomenon is avoided by the interval sampling mode, and the sampling accuracy is improved. In addition, because the embodiment of the invention acquires the brightness values of all the micromirrors in at least part of the area in the micromirror array, and does not select a plurality of brightness sampling points but all the brightness sampling points of the micromirrors in at least part of the area, the uniformity of the brightness of each micromirror can be reflected more truly, and the problem of the uniformity of the brightness is solved. The embodiment of the invention also acquires the brightness integral value of each column of micro mirrors in the scanning direction according to the brightness value of the micro mirrors in at least partial regions, and performs energy correction on the micro mirror array according to the brightness integral value of each column of micro mirrors. The embodiment of the invention adopts the comparison object which is the brightness integral value of each row of micro mirrors, and the brightness integral value of each row of micro mirrors is not the brightness value of a single micro mirror, so that the brightness integral value of each row of micro mirrors is closer to the real exposure brightness in the laser direct writing working mode, the precision of laser direct writing energy correction is improved, and the problem of brightness uniformity is solved.
Drawings
FIG. 1 is a schematic diagram of a reflective imaging surface of a micromirror array in a conventional design;
fig. 2 is a flowchart of a laser direct writing energy correction method according to an embodiment of the present invention;
FIG. 3 is a flow chart of another method for laser direct write energy calibration according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a micromirror array according to an embodiment of the invention;
FIG. 5 is a flow chart of another method for laser direct write energy calibration according to an embodiment of the present invention;
FIG. 6 is a flow chart of another method for laser direct write energy calibration according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of another micromirror array according to an embodiment of the invention;
FIG. 8 is a flow chart of another method for laser direct write energy calibration according to an embodiment of the present invention;
FIG. 9 is a flowchart of another laser direct write energy calibration method according to an embodiment of the present invention;
FIG. 10 is a schematic diagram of another micromirror array according to an embodiment of the invention;
FIG. 11 is a schematic view of another micromirror array according to an embodiment of the invention;
FIG. 12 is a diagram illustrating a luminance integral value of a micromirror array according to an embodiment of the invention;
FIG. 13 is a schematic view of another micromirror array according to an embodiment of the invention;
fig. 14 is a schematic diagram of a laser direct writing energy correction apparatus according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Laser direct writing utilizes a laser beam with variable intensity to perform variable dose exposure on a resist material on the surface of a substrate, and a required relief contour is formed on the surface of the resist layer after development. The laser direct-writing imaging device can reflect and image through a micro-mirror array (namely, a digital micro-mirror device, also called a DMD), the micro-mirror array is used as a spatial light modulator to modulate amplitude, phase and the like of laser beams irradiated on the micro-mirror array, and the modulated laser beams are projected to a photosensitive substrate, so that the aim of photoetching a substrate is fulfilled. The laser direct writing has great requirements on the uniformity of the laser brightness projected on the micro mirror array, and also has great requirements on the uniformity of the laser brightness after the micro mirror array reflects under the same white picture.
Fig. 2 is a flowchart of a laser direct write energy correction method according to an embodiment of the present invention, where the laser direct write energy correction method can be executed by the laser direct write energy correction apparatus according to the embodiment of the present invention, and referring to fig. 2, the laser direct write energy correction method includes the following steps:
s101, acquiring an image formed by the laser beam on the detector after being reflected by the micro-mirror array in an interval sampling mode.
The interval sampling mode refers to that at least one non-working micromirror is spaced between two adjacent micromirrors in a normal working state each time the interval sampling is carried out. The micromirror array may include a plurality of micromirrors arranged in an array, each micromirror may serve as an independently controlled reflective element, and each micromirror may have a normal operating state (i.e., an ON state) and an OFF state (i.e., an OFF operating state), for example, the micromirror may be in the normal operating state when the inclination angle is 12 °, and in the normal operating state, the micromirror may reflect the laser beam onto the photosensitive substrate of the substrate, so as to implement exposure of the photosensitive substrate; the micromirror is in a non-operating state when the inclination angle is-12 degrees, and in the non-operating state, the micromirror can reflect the laser beam to the outside of the area of the substrate where the photosensitive substrate is located, so that the photosensitive substrate cannot be exposed. In other embodiments, for example, the normal operating state of the micromirror can be defined as-12 °, and the non-operating state of the micromirror can be defined as 12 °.
The detector is imaging equipment and is used for receiving the laser beam reflected by the micro mirror array and imaging. The detector may be, for example, a charge coupled device (i.e., a CCD).
In this step, an image formed by the laser beam reflected by each sampling area of the micromirror array on the detector can be obtained in one calibration process, an image formed by the laser beam reflected by one sampling area can also be obtained in one calibration process, and a plurality of images formed by the laser beam reflected by each sampling area of the micromirror array on the detector can be obtained for a plurality of times.
And S102, acquiring the brightness value of the micro mirror in at least partial area of the micro mirror array according to the image.
Since the image formed on the detector carries information of the brightness value of the laser beam reflected by each micromirror in the micromirror array, the brightness value of the micromirror in at least a partial region of the micromirror array can be obtained from the image. For example, if the gray scale value of the pixel cell of the image corresponding to the position where the micromirror brightness is high is large, and the gray scale value of the pixel cell of the image corresponding to the position where the micromirror brightness is low is small, the relative magnitude of the brightness value of the micromirror in at least a partial region can be determined according to the gray scale value of each pixel cell in the image. The brightness value of the micromirror refers to the brightness value of the micromirror generated by reflecting the laser beam to the detector.
In this step, the brightness value of the micromirror in at least a partial region may be obtained from one image, or the brightness value of the micromirror may be obtained from a plurality of images.
It should be noted that, in the actual use process, only a partial area in the micromirror array may be used, so that only the micromirrors in the partial area in the micromirror array may be needed to be corrected, and of course, all the micromirrors in the micromirror array may also be corrected, which is determined by the specific need and is not limited to the embodiment of the present invention. The "at least partial area" in the embodiments of the present invention may be a partial area in the micromirror array or a whole area in the micromirror array, and for the "at least partial area", it is a selected area in the micromirror array that needs to be corrected, and the "at least partial area" includes a plurality of micromirrors.
S103, acquiring a brightness integrated value of each column of micro mirrors in the scanning direction according to the brightness value of the micro mirrors in at least part of the area.
In the laser direct writing process, the micromirror array and the photosensitive substrate move relatively along the scanning direction, and laser beams reflected by a row of micromirrors arranged in the scanning direction in the micromirror array expose the same position of the photosensitive substrate. Therefore, in this step, in order to realize the calibration of the micromirror array, the luminance integral value of each column of micromirrors needs to be obtained. The integrated value of the brightness of a row of micromirrors may be the sum of the brightness values of all micromirrors in the row.
And S104, performing energy correction on the micro-mirror array according to the brightness integrated value of each row of micro-mirrors.
Because the laser beam irradiated to the micromirror array has a problem of brightness uniformity, the brightness of the laser beam irradiated to the micromirrors at the center of the micromirror array is different from the brightness of the laser beam irradiated to the micromirrors at the edge of the micromirror array, and the brightness integral values of different micromirror rows are different, so that energy correction needs to be performed on the micromirror array. Wherein, a micromirror array refers to an array of micromirrors along the scanning direction.
The embodiment of the invention provides a laser direct writing energy correction method, which adopts an interval sampling mode to obtain an image formed by a laser beam reflected by a micro mirror array on a detector, and obtains the brightness value of a micro mirror in at least part of the area of the micro mirror array according to the image. The sampling image formed by the laser beam on the detector is acquired by adopting an interval sampling mode, at least one non-working micromirror is arranged between two adjacent micromirrors in a normal working state, the laser beams reflected by a plurality of adjacent micromirrors are prevented from overlapping on the detector, and the brightness of an overlapping area is obviously greater than that of a non-overlapping area, so that the accuracy of the brightness value of a single micromirror obtained by sampling is reduced. The overlapping phenomenon is avoided by the interval sampling mode, and the sampling accuracy is improved. In addition, because the embodiment of the invention acquires the brightness values of the micromirrors in at least part of the area in the micromirror array, not selects a plurality of brightness sampling points, but all the brightness sampling points of the micromirrors in at least part of the area, the uniformity of the brightness of each micromirror can be reflected more truly, and the problem of the uniformity of the brightness can be solved. The embodiment of the invention also acquires the brightness integral value of each column of micro mirrors in the scanning direction according to the brightness value of the micro mirrors in at least partial regions, and performs energy correction on the micro mirror array according to the brightness integral value of each column of micro mirrors. The embodiment of the invention adopts the comparison object which is the brightness integral value of each row of micro mirrors, and the brightness integral value of each row of micro mirrors is not the brightness value of a single micro mirror, so that the brightness integral value of each row of micro mirrors is closer to the real exposure brightness in the laser direct writing working mode, the precision of laser direct writing energy correction is improved, and the problem of brightness uniformity is solved.
Optionally, before step S101, the laser direct writing energy correction method further includes: and controlling the exposure time of the detector to be less than the preset exposure time. If the brightness of the laser beam projected to the detector is too high and exceeds the maximum brightness range acceptable by the detector, overexposure occurs, the pixels of the detector above the maximum brightness range acceptable by the detector output the same electrical signal, and optical signals with different brightness cannot be distinguished. In the embodiment of the invention, the exposure time of the detector is reduced by controlling the exposure time of the detector to be less than the preset exposure time, so that overexposure of the laser beam reflected by the micro mirror array on the detector is avoided.
Optionally, before step S101, the laser direct writing energy correction method may further include: and a brightness attenuation sheet is arranged on the light path between the micro-mirror array and the detector. In the embodiment of the invention, the brightness attenuation sheet is arranged on the light path between the micromirror array and the detector, so that the brightness of the laser beam received by the detector is reduced, and the overexposure of the laser beam reflected by the micromirror array on the detector is avoided.
Fig. 3 is a flowchart of another laser direct-write energy calibration method according to an embodiment of the present invention, fig. 4 is a schematic diagram of a micromirror array according to an embodiment of the present invention, and referring to fig. 3 and fig. 4, the laser direct-write energy calibration method includes the following steps:
s201, dividing the micro mirror array into a plurality of sub-regions, wherein each sub-region comprises a plurality of micro mirrors arranged in an array.
As shown in fig. 4, the micromirror array 10 is divided into a plurality of sub-regions 11, and a plurality of micromirror arrays are arranged in each sub-region 11. Illustratively, referring to FIG. 4, the micro mirror array 10 is divided into 15 sub-regions 11 arranged in 3 rows and 5 columns. The number of the sub-regions 11 and the arrangement of the sub-regions 11 are not limited in the embodiment of the present invention.
Each of the sub-regions 11 divided in this step may be used as a reflective device in each imaging detection, and when one sub-region 11 is in an operating state, the remaining sub-regions 11 are in an inoperative state. As shown in fig. 4, when the sub-area 11 at the upper left corner in fig. 4 is in the working state, the laser beam is reflected to the receiving surface 20 of the detector, and the rest of the sub-areas 11 are in the non-working state, and the laser beam is not reflected to the receiving surface 20 of the detector.
S202, obtaining sub-images formed on the detector by the laser beams after the sub-regions reflect.
In this step, when one sub-region 11 is in an operating state, the other sub-regions 11 are in an inoperative state, and the plurality of sub-regions 11 operate sequentially, so that a plurality of sub-images (i.e., a plurality of images) can be sequentially formed on the receiving surface 20 of the detector.
S203, acquiring the brightness value of the micromirror in the sub-area according to the sub-image.
In this step, when one sub-region 11 is in an operating state and the other sub-regions 11 are in an inoperative state, a sub-image may be obtained, and then the brightness value of the micromirror in the sub-region 11 may be obtained according to the sub-image. When the rest sub-regions 11 are in the working state in sequence, the brightness values of the micromirrors in the rest sub-regions 11 can be obtained in the same manner.
S204, splicing the brightness values of the micromirrors in the sub-regions into brightness values of the micromirrors in at least some regions of the micromirror array.
In this step, the brightness values of the sub-regions obtained in step S203 are spliced into the brightness values of all micromirrors in at least some regions of the micromirror array. For example, in one embodiment, every 4 cells in a column of 60 cells can be grouped together, one group of cells for storing the brightness value of the micromirror in one sub-region 11, i.e., the first through fourth cells for storing the brightness value of the micromirror in the first sub-region 11, the fifth through eighth cells for storing the brightness value of the micromirror in the second sub-region, and so on, up to the fifty-seventh through sixty cells for storing the brightness value of the micromirror in the fifteenth sub-region. In another embodiment, the division of the cells corresponding to the sub-regions can be formed into 6 rows and 10 columns (taking the example that each sub-region 11 includes 2 rows and 2 columns of micromirrors as an example), the first row and the first column of cells is used to store the brightness value of the first micromirror in the sub-region of the first row and the first column, and so on until the third row and the fifth column of cells are used to store the brightness value of the last micromirror in the sub-region of the third row and the fifth column. The cells can be implemented in software and/or hardware.
S205, a luminance integrated value of each column of micromirrors in the scanning direction is obtained from the luminance values of micromirrors in at least a partial area.
S206, performing energy correction on the micromirror array according to the brightness integral value of each column of micromirrors.
In the embodiment of the invention, the micro mirror array is divided into a plurality of sub-regions, each sub-region can be imaged on the detector completely, and sub-images formed on the detector by the laser beams after being reflected by the sub-regions are obtained. The brightness values of the micromirrors in the sub-regions can be spliced into the brightness values of all micromirrors in at least part of the regions in the micromirror array according to the brightness values of the micromirrors in the sub-regions obtained by the sub-images, so that the problem that the detector cannot obtain the light beams reflected by all micromirrors of the micromirror array is avoided, and the detector can completely image the micromirror array. Furthermore, because the embodiment of the invention splices the brightness values of the micromirrors in the sub-regions into the brightness values of all micromirrors in at least part of the regions of the micromirror array, the splicing process only involves the brightness values of the micromirrors in the sub-regions, and the splicing process is the splicing of digital forms, so that the problems of splicing overlapping, shifting and the like do not exist, and the detection precision and the correction precision are improved.
Fig. 5 is a flowchart of another laser direct-write energy correction method according to an embodiment of the present invention, and referring to fig. 4 and 5, the laser direct-write energy correction method includes the following steps:
s301, dividing the micro mirror array into a plurality of sub-regions, wherein each sub-region comprises a plurality of micro mirrors arranged in an array.
S302, obtaining sub-images formed by the laser beams on the detector after the sub-regions reflect.
And S303, splicing the sub-images into an image formed by the laser beam on the detector after being reflected by the micro-mirror array.
In this step, the sub-images corresponding to the sub-regions obtained in step S203 are subjected to image stitching to form an image covering all the sub-regions, that is, the image is stitched to include all the brightness of the micromirrors in at least some regions of the micromirror array.
S304, acquiring the brightness value of the micro mirror in at least partial area of the micro mirror array according to the image.
S305, acquiring a luminance integrated value of each column of micromirrors in the scanning direction according to the luminance values of micromirrors in at least a partial area.
S306, energy correction is carried out on the micro mirror array according to the brightness integral value of each row of micro mirrors.
In the embodiment of the invention, the micromirror array is divided into a plurality of sub-areas, each sub-area can be imaged on the detector completely, sub-images formed by the laser beams reflected by the sub-areas on the detector are obtained, and the plurality of sub-images are spliced into images formed by the laser beams reflected by the micromirror array on the detector, so that the problem that the detector cannot obtain all micromirror reflected beams of the micromirror array is solved, and the complete imaging of the micromirror array by the detector is realized.
Fig. 6 is a flowchart of another laser direct-write energy calibration method according to an embodiment of the present invention, fig. 7 is a schematic diagram of another micro mirror array according to an embodiment of the present invention, and referring to fig. 6 and 7, the laser direct-write energy calibration method includes the following steps:
s401, acquiring a sampling image formed by the laser beam on the detector in an interval sampling mode.
As shown in fig. 6, the micromirror array 10 comprises a plurality of micromirrors 100 arranged in an array, and when sampling at intervals, the sampled micromirrors 101 in the micromirror array 10 are in a normal operating state, and the rest of the micromirrors 100 are in an inoperative state. At least one inoperative micromirror 100 is spaced between two adjacent sampling micromirrors 101. It should be noted that the sampling micro-mirror 101 is the micro-mirror 100 that is in an operating state when sampling at intervals, each time sampling at intervals, a plurality of sampling micro-mirrors 101 may have different positions, and the patterns formed by the plurality of sampling micro-mirrors 101 may have the same shape or different shapes.
S402, acquiring the brightness value of the micro mirror corresponding to the sampled image according to the sampled image.
Because the brightness values of only a part of the micromirrors 101 can be obtained during the interval sampling, and the brightness values of all the micromirrors 101 in at least a part of the area cannot be obtained at one time, the sampling can be performed for multiple times, one sampled image is obtained at one time, and the brightness values of the micromirrors corresponding to the sampled images are obtained according to the sampled images.
And S403, splicing the brightness values of the micro mirrors corresponding to the sampled images after multiple times of interval sampling into the brightness values of the micro mirrors in at least partial area in the micro mirror array.
In this step, the brightness values obtained in step S402 and sampled at intervals are spliced into the brightness values of all micromirrors in at least part of the regions in the micromirror array. Illustratively, referring to FIG. 7, the cell can be formed as 9 rows and 20 columns, the cell of the first row and the first column is used to store the brightness value of the sampled micromirror 101 of the first row and the first column, and so on, until the cell of the ninth row and the third column is used to store the brightness value of the sampled micromirror 101 of the ninth row and the third column. The next sampling interval is then performed until all cells in 9 rows and 20 columns store the brightness value data for the micro mirror 100. The cells can be implemented in software and/or hardware.
S404, acquiring a brightness integral value of each column of micro mirrors in the scanning direction according to the brightness value of the micro mirrors in at least part of the area.
S405, performing energy correction on the micromirror array according to the brightness integral value of each column of micromirrors.
In the embodiment of the present invention, since the spacing between adjacent micromirrors 100 is very small, the laser beams reflected by adjacent micromirrors 100 overlap on the detector during data acquisition, resulting in brightness weighting. In the embodiment of the invention, the sampling image formed by the laser beam on the detector is acquired by adopting an interval sampling mode, and at least one non-working micromirror is arranged between two adjacent micromirrors in a normal working state, so that the laser beams reflected by the micromirrors 100 are prevented from being overlapped on the detector. Furthermore, the embodiment of the invention splices the brightness values of the micromirrors corresponding to the sampled images after multiple sampling at intervals into the splice of the digital form of the brightness values of all the micromirrors in at least partial area in the micromirror array, so that the problems of splicing overlapping, deviation and the like do not exist, and the detection precision and the correction precision are improved.
Fig. 8 is a flowchart of another laser direct-write energy correction method according to an embodiment of the present invention, and referring to fig. 7 and 8, the laser direct-write energy correction method includes the following steps:
s501, acquiring a sampling image formed by the laser beam on the detector in an interval sampling mode.
And S502, splicing the plurality of sampling images into an image formed by the laser beam on the detector after being reflected by the micro mirror array.
In this step, the plurality of sampled images obtained in step S501 are subjected to image stitching to form an image covering all the sampled micromirrors 101, that is, an image including the brightness of all the micromirrors 100 in at least a partial region of the micromirror array 10.
S503, acquiring the brightness value of the micro mirror in at least partial area of the micro mirror array according to the image.
S504, acquiring the brightness integral value of each column of micro mirrors in the scanning direction according to the brightness value of the micro mirrors in at least partial area.
And S505, performing energy correction on the micromirror array according to the brightness integrated value of each column of micromirrors.
In the embodiment of the invention, the sampling image formed by the laser beam on the detector is acquired by adopting an interval sampling mode, at least one non-working micromirror is arranged between two adjacent micromirrors in a normal working state, the laser beam reflected by a plurality of adjacent micromirrors 100 is prevented from overlapping on the detector, and the brightness of the overlapping area is obviously greater than that of the non-overlapping area, so that the accuracy of the brightness value of a single micromirror obtained by sampling is reduced. The overlapping phenomenon is avoided by the interval sampling mode, and the sampling accuracy is improved.
Optionally, during interval sampling, the adjacent two micromirrors in normal operation state are separated by N inoperative micromirrors to perform (N +1)2Sampling at intervals, wherein N is more than or equal to 1. Illustratively, referring to fig. 7, two adjacent sampling micromirrors 101 are spaced by 1 inoperative micromirror 100, and since only one micromirror 100 of every four adjacent micromirrors 100 is a sampling micromirror 101, (1+1) is required24 sampling intervals, the micromirror array 10 can be obtainedThe brightness values of all the micromirrors 100 in at least a portion of the area.
It should be noted that, in an embodiment, in order to prevent a pattern formed by a plurality of sampling micromirrors 101 sampled at intervals each time from exceeding a detection range of the detector when performing interval sampling, interval sampling may be performed on one sub-region 11, after completing sampling of all the micromirrors 100 in one sub-region 11, interval sampling may be performed on another sub-region 11, and after performing interval sampling on a plurality of sub-regions 11, brightness values of all the micromirrors 100 in at least a partial region in the micromirror array 10 are acquired. In another embodiment, in the interval sampling, in order to prevent the pattern formed by the plurality of sampling micromirrors 101 in each interval sampling from exceeding the detection range of the detector, the interval sampling may be performed in one sub-region 11, and then the interval sampling may be performed in another sub-region 11 until the first interval sampling is completed; then, a second sampling pass is performed on the sub-regions 11, and after the second sampling pass, the brightness values of all the micromirrors 100 in at least a partial region of the micromirror array 10 are obtained.
Fig. 9 is a flowchart of another laser direct write energy calibration method according to an embodiment of the present invention, fig. 10 is a schematic diagram of another micro mirror array according to an embodiment of the present invention, fig. 11 is a schematic diagram of another micro mirror array according to an embodiment of the present invention, fig. 12 is a schematic diagram of a luminance integrated value of a micro mirror array according to an embodiment of the present invention, fig. 13 is a schematic diagram of another micro mirror array according to an embodiment of the present invention, and referring to fig. 9 to fig. 13, the laser direct write energy calibration method includes the following steps:
s601, acquiring an image formed by the laser beam on the detector after being reflected by the micro-mirror array in an interval sampling mode.
S602, acquiring the brightness value of the micro mirror in at least partial area of the micro mirror array according to the image.
S603, acquiring a luminance integrated value of each column of micromirrors in the scanning direction based on the luminance values of micromirrors in at least a partial area.
And S604, acquiring the minimum value in the brightness integral value.
Each micromirror array 30 has a different luminance integral value, and the minimum value among all the micromirror arrays 30 in at least a partial area is obtained. The micromirror array 30 is an array of micromirrors 100 arranged in the scanning direction Y. The micromirrors in the micromirror array 30 can be located in the same column or in different columns of rows and columns.
Alternatively, the embodiment of the present invention can adopt a forward scanning mode or a tilted scanning mode for the micro mirror array 10.
When the micro mirror array 10 is scanned in the forward direction, the micro mirrors 100 are arranged in a matrix, and the matrix direction of the micro mirrors is parallel to the scanning direction. As shown in fig. 10, a plurality of micro mirrors 100 are arranged in rows and columns along a step direction X and a scanning direction Y. That is, the column direction of the plurality of micromirrors 100 in the micromirror array 10 is parallel to the scanning direction Y.
When the micromirror array 10 is scanned obliquely, the rows and columns of the micromirrors are arranged in a matrix, and an included angle between the matrix row direction and the scanning direction of the micromirrors is greater than 0 ° and less than 90 °. As shown in fig. 11, the column direction of the micromirrors 100 in the micromirror array 10 is not parallel to the scanning direction Y. The number of micromirrors of the micromirror array 30 extending in the scanning direction Y projected to cover one micromirror width in the stepping direction X is a tilt factor. Illustratively, referring to FIG. 11, the tilt factor is 8 and the columns are selected in such a way that the scanning direction Y is staggered every 8 micro mirrors 100 step direction X.
As shown in fig. 12, the abscissa is the number of the micromirror arrays 30, and since the relative magnitude of the luminance integrated value of each micromirror array 30 is of interest, the ordinate in fig. 12 represents only the relative magnitude thereof, and the ordinate is dimensionless. In fig. 12, each micromirror array 30 has different luminance integrated values, and the minimum value of the luminance integrated values of each micromirror array 30 is 1000.
S605, if the brightness integral value of the micro mirrors in the row is larger than the minimum value, selecting a first part of the micro mirrors in the row, and enabling the difference value between the brightness integral value and the minimum value of all the micro mirrors except the first part of the micro mirrors in the row to be smaller than a preset difference value.
Referring to fig. 13, if the luminance integral value of the first row of micromirrors is greater than the minimum value, the first micromirror 100 of the first row of micromirrors is selected as the micromirror 100 that is always inoperative (i.e., the first subset of micromirrors). The luminance integral value of the second row of micromirrors is greater than the minimum value, and the first micromirror 100 and the second micromirror 100 in the second row of micromirrors are selected as micromirrors 100 that do not operate all the time (i.e., the first partial micromirrors). The integrated value of the brightness of the fourth row of micromirrors is the minimum value, and none of the micromirrors in the fourth row is inactive all the time. So that the integrated values of the luminance of the first, second and fourth columns of micromirrors are equal or close. Similarly, the integrated value of the brightness of the first row of micromirrors is equal or similar to that of any other row of micromirrors.
And S606, controlling the first part of micro mirrors not to work all the time during the laser direct writing photoetching, and controlling all the micro mirrors except the first part of micro mirrors in a row of micro mirrors to be in a normal working state.
For example, the micromirror array includes 1920 × 1080 micromirrors, and when performing laser direct-write lithography, the first part of micromirrors is controlled to be always inoperative, and all the micromirrors except the first part of micromirrors in a row of micromirrors are in a normal operating state, so that the adjustment accuracy can be as high as 1/1080 ≈ 1 ‰.
In the embodiment of the invention, the minimum value of the brightness integral values is acquired, and if the brightness integral values of a row of micromirrors are greater than the minimum value, part of micromirrors in the row of micromirrors are controlled to be always out of operation during laser direct writing lithography, so that the brightness integral values of the remaining micromirrors in the row of micromirrors are equal to or approximate to the minimum value of the brightness integral, thereby realizing the correction of laser direct writing energy.
Fig. 14 is a schematic diagram of a laser direct-writing energy correction apparatus according to an embodiment of the present invention, and referring to fig. 14, the laser direct-writing energy correction apparatus includes a laser 41, a micro mirror array 10, a detector 46, and a controller (not shown in the figure). The laser 41 emits a laser beam. The micromirror array 10 includes a plurality of micromirrors arranged in an array for reflecting the laser beam to a detector. The detector 16 is configured to acquire an image formed by the laser beam reflected by the micromirror array 10 on the detector 46 by using an interval sampling method, acquire a brightness value of a micromirror in at least a partial area of the micromirror array according to the image, acquire a brightness integral value of each row of micromirrors in the scanning direction according to the brightness value of the micromirror in at least the partial area, and perform energy correction on the micromirror array according to the brightness integral value of each row of micromirrors. The interval sampling mode refers to that at least one non-working micromirror is spaced between two adjacent micromirrors in a normal working state each time the interval sampling is carried out.
The embodiment of the invention provides a laser direct-writing energy correction device, which adopts an interval sampling mode to obtain an image formed by a laser beam reflected by a micro-mirror array on a detector, and obtains the brightness value of a micro-mirror in at least part of the area of the micro-mirror array according to the image. The sampling image formed by the laser beam on the detector is acquired by adopting an interval sampling mode, at least one non-working micromirror is arranged between two adjacent micromirrors in a normal working state, the laser beams reflected by a plurality of adjacent micromirrors are prevented from overlapping on the detector, and the brightness of an overlapping area is obviously greater than that of a non-overlapping area, so that the accuracy of the brightness value of a single micromirror obtained by sampling is reduced. The overlapping phenomenon is avoided by the interval sampling mode, and the sampling accuracy is improved. In addition, because the embodiment of the invention acquires the brightness values of all the micromirrors in at least part of the area in the micromirror array, and does not select a plurality of brightness sampling points but all the brightness sampling points of the micromirrors in at least part of the area, the uniformity of the brightness of each micromirror can be reflected more truly, and the problem of the uniformity of the brightness is solved. The embodiment of the invention also acquires the brightness integral value of each column of micro mirrors in the scanning direction according to the brightness value of the micro mirrors in at least partial regions, and performs energy correction on the micro mirror array according to the brightness integral value of each column of micro mirrors. The embodiment of the invention adopts the comparison object which is the brightness integral value of each row of micro mirrors, and the brightness integral value of each row of micro mirrors is not the brightness value of a single micro mirror, so that the brightness integral value of each row of micro mirrors is closer to the real exposure brightness in the laser direct writing working mode, the precision of laser direct writing energy correction is improved, and the problem of brightness uniformity is solved.
Alternatively, referring to fig. 14, a brightness attenuation sheet 45 is disposed on the optical path between micro mirror array 10 and detector 46.
Alternatively, referring to fig. 14, the laser direct write energy correction apparatus further includes an imaging lens 44, and the laser beam reflected by the micro mirror array 10 is imaged on a detector 46 through the imaging lens 44.
Alternatively, referring to fig. 14, the laser direct write energy correction apparatus further includes a mirror 43, and the mirror 43 is used to project the laser beam emitted from the laser 41 onto the micro mirror array 10. In other embodiments, other optical elements may be used to project the laser beam emitted by the laser 41 onto the micro mirror array 10, which is not limited by the present invention. For example, a beam splitter prism may be used to project the laser beam emitted from the laser 41 onto the micromirror array 10.
It is to be noted that the foregoing description is only exemplary of the invention and that the principles of the technology may be employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. A laser direct write energy correction method, comprising: acquiring an image formed by the laser beam on a detector after being reflected by the micro-mirror array in an interval sampling mode; the interval sampling mode means that at least one inoperative micromirror is spaced between two adjacent micromirrors in normal operation state each time of interval sampling;
acquiring the brightness value of a micromirror in at least partial area of the micromirror array according to the image;
acquiring a brightness integral value of each column of the micromirrors in the scanning direction according to the brightness values of the micromirrors in the at least partial area;
and performing energy correction on the micromirror array according to the brightness integral value of each column of the micromirrors.
2. The method of claim 1, wherein before the step of obtaining the image of the laser beam on the detector after being reflected by the micromirror array in an interval sampling manner, the method further comprises:
and controlling the exposure time of the detector to be less than the preset exposure time.
3. The method of claim 1, wherein the step of obtaining an image of the laser beam on the detector after being reflected by the micromirror array in an interval sampling manner, and obtaining the brightness values of the micromirrors in at least a partial area of the micromirror array according to the image comprises:
acquiring a sampling image formed by a laser beam on a detector in an interval sampling mode;
acquiring the brightness value of the micromirror corresponding to the sampled image according to the sampled image;
and splicing the brightness values of the micro mirrors corresponding to the sampled images after multiple times of interval sampling into the brightness values of the micro mirrors in at least partial areas in the micro mirror array.
4. The method of claim 1, wherein the step of obtaining an image of the laser beam on the detector after being reflected by the micromirror array in an interval sampling manner, and obtaining the brightness values of the micromirrors in at least a partial area of the micromirror array according to the image comprises:
acquiring a sampling image formed by a laser beam on a detector in an interval sampling mode;
splicing the plurality of sampling images into an image formed by the laser beam on a detector after being reflected by the micro mirror array;
and acquiring the brightness value of the micro mirror in at least partial area of the micro mirror array according to the image.
5. The method according to claim 3 or 4, wherein the sampling is performed at intervals of N inactive micromirrors between two adjacent micromirrors in normal operation state (N +1)2Sampling at intervals, wherein N is more than or equal to 1.
6. The method of claim 1, wherein energy correcting the micromirror array according to the integrated value of brightness for each column of the micromirrors comprises:
acquiring a minimum value in the luminance integrated value;
if the brightness integral value of one row of the micromirrors is larger than the minimum value, selecting a first part of micromirrors in one row of the micromirrors, and making the difference value between the brightness integral value and the minimum value of all micromirrors except the first part of micromirrors in one row of the micromirrors smaller than a preset difference value;
and during laser direct-writing photoetching, controlling the first part of micromirrors not to work all the time, and controlling all micromirrors except the first part of micromirrors in one row to be in a normal working state.
7. The method of claim 1, wherein before the step of obtaining the image of the laser beam on the detector after the step of reflecting by the micromirror array in an interval sampling manner, further comprising:
and arranging a brightness attenuation sheet on a light path between the micromirror array and the detector, wherein the brightness attenuation sheet is used for reducing the brightness of the laser beam received by the detector.
8. The method of claim 1, wherein a plurality of rows and columns of the micromirrors are arranged in a matrix, and a direction of the matrix columns of the micromirrors is parallel to the scanning direction.
9. The method of claim 1, wherein a plurality of said micro mirrors are arranged in a matrix, and an angle between a direction of a matrix column of the plurality of micro mirrors and said scanning direction is greater than 0 ° and less than 90 °.
10. A laser direct write energy correction device, comprising:
a laser emitting a laser beam;
the micro mirror array comprises a plurality of micro mirrors arranged in an array and reflects the laser beam;
a detector;
the controller is used for acquiring an image formed by the laser beam on the detector after being reflected by the micromirror array in an interval sampling mode, acquiring the brightness value of the micromirror in at least partial area of the micromirror array according to the image, acquiring the brightness integral value of each row of the micromirrors in the scanning direction according to the brightness value of the micromirror in at least partial area, and performing energy correction on the micromirror array according to the brightness integral value of each row of the micromirrors;
the interval sampling mode refers to that at least one non-working micromirror is spaced between two adjacent micromirrors in a normal working state each time the interval sampling is carried out.
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| CN103412467A (en) * | 2013-08-12 | 2013-11-27 | 中山新诺科技有限公司 | Device for uniformity compensation along scan direction and uniformity compensation method utilizing the device |
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| TWM554999U (en) * | 2017-07-13 | 2018-02-01 | Adt Laser Co Ltd | Device using scanning to implement high-precision gray-scale exposure |
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| US7663734B2 (en) * | 2003-04-11 | 2010-02-16 | Tadahiro Ohmi | Pattern writing system and pattern writing method |
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| CN103412467A (en) * | 2013-08-12 | 2013-11-27 | 中山新诺科技有限公司 | Device for uniformity compensation along scan direction and uniformity compensation method utilizing the device |
| CN105319858A (en) * | 2014-07-29 | 2016-02-10 | 上海微电子装备有限公司 | Illumination test apparatus and test method for illumination uniformity and stray light |
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| TWM554999U (en) * | 2017-07-13 | 2018-02-01 | Adt Laser Co Ltd | Device using scanning to implement high-precision gray-scale exposure |
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