CN112285378A

CN112285378A - High-sensitivity MEMS graphene wind speed and direction sensor chip

Info

Publication number: CN112285378A
Application number: CN202011129449.XA
Authority: CN
Inventors: 王俊强; 李孟委; 高经武; 刘佳政
Original assignee: Nantong Institute Of Intelligent Optics North China University; North University of China
Current assignee: Nantong Institute For Advanced Study; North University of China
Priority date: 2020-10-21
Filing date: 2020-10-21
Publication date: 2021-01-29

Abstract

A high sensitivity MEMS graphite alkene wind speed wind direction sensor chip, the sensor includes: the glass substrate is provided with a plurality of glass through holes, and heat conducting metal is arranged in the glass through holes; the temperature measuring assembly is arranged on the upper surface of the glass substrate and positioned at the top of the glass through hole and used for detecting the change of the resistance; the heating assembly is arranged at the bottom of the glass through hole and used for generating a measurement reference temperature; and the interconnection components are arranged on two sides of the interconnection components and used for leading out the electric signals of the temperature measurement components. The graphene temperature measurement device has the beneficial effects that a double-sided layout mode is adopted, the detection units are distributed on the upper surface of the glass substrate for measuring temperature, the heating resistors are arranged on the lower surface for heating, the heat emitted by the heating resistors can be conducted to the graphene temperature measurement units at the shortest distance, and the time for the heat of the sensor in a single-sided layout to be conducted from the surface of the substrate to the back of the substrate is reduced, so that the accuracy, the sensitivity and the response rate of wind measurement can be greatly improved.

Description

High-sensitivity MEMS graphene wind speed and direction sensor chip

Technical Field

The invention relates to the technical field of fluid measurement, in particular to a high-sensitivity MEMS graphene wind speed and direction sensor chip.

Background

The improvement of the living standard of human beings promotes the continuous development of science and technology. Nowadays, in daily life, the requirements for monitoring weather and environment are increasing day by day. Moreover, the research and development of MEMS wind speed and direction sensors are the problems which are not solved in China at present, facing to the wind speed and direction measurement requirements in the military field. Especially for measurement under long-term severe environment is one of the important problems facing the present.

Whether cold, hot or nuclear and high-tech weapons, its operational performance is not surprisingly affected by weather and climate. According to the information of the central weather station in China, the military weather expert explains that the weather conditions have direct influence on the war. The influence of meteorological conditions on artillery activities is mainly the influence on artillery shooting. The projectile flies in the air, all the time is influenced by meteorological conditions, and the accuracy of the projectile hitting a target is directly influenced due to the change of the meteorological conditions. The cannonball is influenced by air resistance when flying in the air. The magnitude of the air resistance depends on the shape and flight pattern of the projectile itself, and is also influenced by weather conditions such as wind, so that when shooting a ground cannon, it is necessary to correct the deviation of the cannonball hitting the target caused by the wind. Wind energy changes the speed and direction of the relative motion of the projectiles in the atmosphere. The longitudinal wind (parallel to the incident wind) can move the impact point farther or closer. When the wind is downwind, the resistance is reduced, and long shot is easy to generate; when the wind is against the wind, the resistance is increased, and the near-bounce is easy to generate. Crosswind (perpendicular to the incident wind) can cause the impact point to be shifted to the left or right. When wind blows from an oblique direction, the wind is decomposed into a longitudinal wind and a transverse wind in a vector relationship to consider the influence thereof. The warhead is also affected by wind during flying. The vertical wind affects the height of the trajectory, the height of the blast point and the distance to the horizon. When the wind is against the wind, the position of the frying point is lower and the distance is closer; the opposite is true with downwind. Taking a 100 mm antiaircraft gun as an example, if no wind exists, the height of a frying point is 8000 m, the horizontal distance is 1000 m, when the whole layer of air has 10 m/s of headwind, the frying point can be reduced by 24 m according to calculation, and the horizontal distance can be shortened by 140 m. Crosswind primarily deflects the trajectory away from the plane of incidence.

Also for example, if a cross wind blows to the right (left) at 10 m/s, the location of the fry spot can be offset by about 114 m to the right (left). Therefore, the amount of deviation of the wind must be corrected when the antiaircraft gun is fired. Usually, the service personnel in the army weather will make an accurate measurement of the current local wind speed and direction, then calculate the wind distribution according to an assumed distribution of wind along with altitude and make corresponding corrections to the design parameters, and then make corresponding adjustments to the firing data.

Remote precision combat is an important feature in modern warfare as compared to traditional warfare. Accurate preparation of shots is a prerequisite for achieving this requirement for modern artillery, and modern high technology provides a wide space for meeting or achieving this goal. For the remote indirect aiming artillery, with the equipment and application of a global positioning system and various modern reconnaissance means, the determined local position of the artillery can reach an accurate level, and on the other hand, the modern fire control computer equipped with the artillery can be enough to rapidly solve a trajectory (2-3 seconds) on an operation site. Under the traditional combat condition, the artillery corrects the shooting data through firing so as to achieve the aim of correcting the impact point. Therefore, the influence of the outer trajectory parameters such as wind on the shot range and the accuracy can be compensated by on-site trial injection correction even if the influence is not accurate. Modern wars require that the artillery system can effectively strike targets, and have high first group coverage or first shot hit rate, and the hit rate of the first shot is a critical factor for determining the success or failure of wars and the survival and death of the own party. A wind cup anemometer (wind cup anemorumbometer) is generally adopted in artillery battlefield, and the wind cup anemorumbometer has a movable part due to the adoption of a mechanical transmission structure, so that mechanical abrasion can occur after long-term use, the precision can be influenced, the reading is inconvenient, and the wind cup anemorumbometer cannot capture the tiny change of the instantaneous wind speed due to the mechanical inertia effect, has larger error during measurement and low resolution. Obviously, the traditional wind speed and wind direction sensor cannot meet the requirement of accurate measurement. The on-site real-time accurate measurement of wind speed and wind direction is an urgent task.

Based on the temperature-sensitive characteristic of the graphene material, the method has the advantages of quickly and effectively sensing the change of instantaneous wind, and can be widely applied to the requirement of accurately measuring the wind speed and the wind direction in real time. The project mainly aims at the graphene wind speed and direction sensor to carry out research, and plays an important role in breaking through research barriers of the wind speed and direction sensor with high precision, high sensitivity and high resolution, realizing autonomy of key technology and improving weapon performance and equipment reliability.

Disclosure of Invention

In order to effectively solve the defects of the background technical problem, a high-sensitivity MEMS graphene wind speed and direction sensor chip is designed by using a graphene material to replace a metal material and other semiconductor materials. The graphene temperature-sensitive element is arranged in a wind-sensitive area, heat generated by a heating resistor on the lower surface of the substrate is conducted to the surface of the substrate in a heat transfer mode, so that the temperature of the temperature-measuring element on the surface of the substrate is kept consistent, the heated graphene material is influenced by phonon coupling, the resistivity is changed along with the change of the temperature-sensitive element, the resistance is also changed, a part of heat is taken away when wind blows over the sensor substrate, the resistance of the graphene is changed again, and finally the measurement of the temperature is realized by detecting the change of the conductivity of the graphene film through an external detection circuit.

A high-sensitivity MEMS graphene wind speed and direction sensor chip can work normally in the environment with the wind speed of 0-30m/s, and the sensor comprises:

the glass substrate is provided with a plurality of glass through holes, and heat conducting metal is arranged in the glass through holes;

the temperature measuring assembly is arranged on the upper surface of the glass substrate and positioned at the top of the glass through hole and used for detecting the change of the resistance;

the heating assembly is arranged at the bottom of the glass through hole and used for generating a measurement reference temperature;

and the interconnection components are arranged on two sides of the interconnection components and used for leading out the electric signals of the temperature measurement components.

Optionally, the temperature measurement assembly includes: the graphene temperature measurement device comprises a graphene temperature measurement unit and first metal electrodes, wherein the first metal electrodes are respectively arranged at two ends of the graphene temperature measurement unit and are connected with the graphene temperature measurement unit through wiring.

Optionally, the graphene temperature measurement unit is a temperature-sensitive nano-film, and the graphene temperature measurement unit includes: the temperature measuring device comprises a graphene film layer, a boron nitride film layer and internal interconnection electrodes, wherein the boron nitride film layer and the internal interconnection electrodes are arranged above and below the graphene film layer respectively, the internal interconnection electrodes wrap the two exposed ends of the graphene film layer respectively, and the internal interconnection electrodes are connected with first metal electrodes located on two sides of a graphene temperature measuring unit through wiring.

Optionally, the plurality of glass through holes are arranged in an annular array, and the plurality of groups of temperature measurement assemblies are symmetrically arranged in an annular manner.

Optionally, a glass through hole is formed in the glass substrate, a temperature measuring assembly is arranged on each glass through hole, the graphene temperature measuring units of the temperature measuring assemblies are centrosymmetric and are uniformly distributed in the circumferential direction, and the included angle between every two adjacent graphene temperature measuring units is 45 degrees.

Optionally, the heating assembly comprises: the heating resistor is arranged on the lower surface of the glass substrate and positioned at the bottom of the glass through hole, and two ends of the heating resistor are respectively connected with the second metal electrode.

Optionally, the interconnect assembly comprises: the interconnection pad is arranged on the upper surface of the glass substrate and is connected with the adjacent first metal electrode, the external interconnection electrode is arranged at the bottom of the glass substrate, the lead post penetrates through the glass substrate, two ends of the lead post are respectively connected with the interconnection pad and the external interconnection electrode, and the lead post is connected with an external circuit through the external interconnection electrode to transmit signals.

Optionally, the glass via comprises a single pore structure or a porous structure.

Optionally, the high-sensitivity MEMS graphene wind speed and direction sensor chip further includes silicon nitride protective layers, the silicon nitride protective layers cover the upper and lower surfaces of the glass substrate respectively, and cover the temperature measurement component and the heating component on the upper and lower surfaces of the glass substrate respectively.

Optionally, the high-sensitivity MEMS graphene anemometry sensor chip further includes a barrier layer disposed between the internal interconnection electrode and the glass substrate.

The graphene temperature measurement sensor has the advantages that a double-sided layout mode is adopted, the detection units are distributed on the upper surface of the glass substrate for measuring temperature, the heating resistors are arranged on the lower surface for heating, heat emitted by the heating resistors can be conducted to the graphene temperature measurement units at the shortest distance, and time for the heat of the sensor in a single-sided layout to be conducted from the surface of the substrate to the back of the substrate is reduced, so that the accuracy, the sensitivity and the response speed of wind measurement can be greatly improved, and the graphene temperature measurement units are arranged on the upper surface of the glass substrate, so that the change of wind can be sensed to the greatest extent, and the response speed is also greatly improved compared with that of a traditional back wind sensing type wind speed and direction sensor. The graphene temperature measurement units are distributed in an annular central symmetry mode, measurement of wind directions is equivalent, the angle range can be reduced to be within 45 degrees no matter wind flows from any direction, the wind direction measurement accuracy can be improved, the temperature measurement interval and the temperature measurement accuracy of the temperature sensor are greatly improved by the aid of the graphene temperature measurement units, and the response speed of the device is effectively improved due to high heat conductivity of graphene materials. The graphene temperature measurement unit is wrapped by the silicon nitride and the substrate, interference factors in the surrounding environment are effectively eliminated, the silicon nitride isolates the graphene film from being in direct contact with the outside, and therefore the corrosion resistance and the stability of a device are improved. The wind speed and wind direction testing device can work in a wind speed environment of 0-30m/s, realizes the test of the wind speed and the wind direction, is acid-base resistant and corrosion resistant, and has high application value.

Drawings

FIG. 1 is a schematic view of the external structure of the present invention;

FIG. 2 is a schematic cross-sectional view of a portion of the structure of the present invention;

FIG. 3 is a schematic top view of the temperature measurement assembly of the present invention;

FIG. 4 is a bottom view of the temperature measurement assembly of the present invention;

FIG. 5 is a schematic structural diagram of a graphene temperature measurement unit according to the present invention;

fig. 6 is a schematic top view of a graphene thin film layer according to an embodiment of the invention;

as shown in the figures, the list of reference numbers is as follows:

1. 6-interconnect pads; 2. 5-a first metal electrode; 3. 7-a lead post; 4-a graphene temperature measuring unit; 8. 15-a silicon nitride protective layer; 9. 14-external interconnection electrodes; 10. 13-a second metal electrode; 11-a thermally conductive metal; 12-heating resistance; 16-a glass substrate; 17-a boron nitride thin film layer; 18-internal interconnection electrodes; 19-a graphene thin film layer; 20-a barrier layer; 21-routing.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the combination or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, are not to be construed as limiting the present invention. In addition, in the description process of the embodiment of the present invention, the positional relationships of the devices such as "upper", "lower", "front", "rear", "left", "right", and the like in all the drawings are based on fig. 1.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The invention is further described below with reference to the accompanying drawings:

as shown in fig. 1 and 2, a high-sensitivity MEMS graphene wind speed and direction sensor chip can work normally in an environment with a wind speed of 0-30m/s, and the sensor includes:

the glass substrate 16 is provided with a plurality of glass through holes, and heat conducting metal 11 is arranged in the glass through holes;

the temperature measuring assembly is arranged on the upper surface of the glass substrate 16 and positioned at the top of the glass through hole and used for detecting the change of the resistance;

As shown in fig. 2, the heat conducting metal 11 is disposed in the glass through hole by electroplating or printing, the heat conducting metal 11 includes copper, gold, or other metals with high thermal conductivity, and can be filled by a thick film process such as electroplating or printing, the heat conducting metal 11 filled in the glass through hole can rapidly conduct the heat generated by the heating assembly to the temperature measuring assembly, and the effect of rapidly conducting heat and increasing the response rate is achieved by utilizing the high thermal conductivity of the metals with high thermal conductivity such as copper.

The glass through hole plays a role in rapid heat conduction, and comprises a single-hole structure or a porous structure, in an embodiment, the single-hole structure.

As shown in fig. 2, the temperature measuring assembly includes: the temperature measuring device comprises a graphene temperature measuring unit 4 and

first metal electrodes

2 and 5, wherein the

first metal electrodes

2 and 5 are respectively arranged at two ends of the graphene temperature measuring unit 4 and connected with the graphene temperature measuring unit 4 through wiring. The graphene temperature measuring unit 4 is in a shape including but not limited to a square or a circle, and the graphene temperature measuring unit 4 is arranged on the upper surface of the glass substrate 16, so that the graphene temperature measuring unit can be contacted with wind at the first time, and the response time is improved.

As shown in fig. 5 and 6, the graphene temperature measurement unit 4 is a temperature-sensitive nano-film, and the graphene temperature measurement unit 4 includes: the temperature measuring device comprises a graphene film layer 19, a boron nitride film layer 17 and internal interconnection electrodes 18, wherein the boron nitride film layer 17 and the internal interconnection electrodes 18 are arranged above and below the graphene film layer 19 respectively, the internal interconnection electrodes 18 wrap the two exposed ends of the graphene film layer 19 respectively, and the internal interconnection electrodes 18 are connected with

first metal electrodes

2 and 5 located on two sides of a graphene temperature measuring unit 4 through wiring. In other embodiments, the number of layers of the boron nitride thin film layer 17 is equal to or greater than 1, and the graphene thin film layer 19 has a single-layer structure.

As shown in fig. 6, the graphene film layer 19 includes, but is not limited to, a folded structure, and may also be a disk shape in other embodiments.

As shown in fig. 3 and 4, the plurality of glass through holes are arranged in an annular array, the plurality of temperature measurement assemblies are arranged in an annular symmetry manner, preferably, 8 glass through holes are formed in the glass substrate 16, each glass through hole is provided with a temperature measurement assembly, the graphene temperature measurement units 4 of the 8 temperature measurement assemblies are arranged in a centrosymmetric manner and are uniformly distributed in an annular direction, and the included angle between every two adjacent graphene temperature measurement units 4 is 45 degrees. Compared with the traditional temperature measuring units arranged in an array manner in the east-west direction and the south-north direction of the wind speed and direction sensor, the angle can only be reduced to be within the range of 90 degrees, when wind blows the surface of the sensor, the graphene temperature measuring unit 4 can lock the range of the wind direction to be within +/-45 degrees of the point according to the lowest temperature, and has the advantages that the equivalent property is realized on the measurement of the wind direction, the angle range can be reduced to be within 45 degrees no matter which direction the wind goes, and therefore the wind direction measurement precision can be improved.

As shown in fig. 2, the heating assembly includes: heating resistor 12 and

second metal electrode

10, 13, heating resistor 12 sets up the lower surface of glass substrate 16 is located glass through-hole bottom, heating resistor 12 both ends respectively with

second metal electrode

10, 13 are connected, heating resistor 12 is the inflection shape structure or disc type structure that correspond with graphite alkene thin layer 19. The heating resistor 12 can be connected with an external processing circuit through the

second metal electrodes

10 and 13 and a lead wire so as to derive measured data, and current wind speed and direction information can be obtained through external processing. The material of the heating resistor 12 is a high resistivity material, such as Pt, and the heating resistor 12 is disposed on the lower surface of the glass substrate 16 to heat the entire glass substrate 16 so as to achieve the temperature at each graphene temperature measuring unit 4.

The number of the graphene film layers 19 and the number of the folded strips of the heating resistors 12 are plural.

As shown in fig. 2, the interconnect assembly includes: the graphene temperature measuring unit comprises

interconnection pads

1 and 6,

lead posts

3 and 7 and

external interconnection electrodes

9 and 14, wherein the

interconnection pads

1 and 6 are arranged on the upper surface of the glass substrate 16 and are connected with the adjacent

first metal electrodes

2 and 5, the

external interconnection electrodes

9 and 14 are arranged at the bottom of the glass substrate 16, the lead posts 3 and 7 are arranged in the glass substrate 16 in a penetrating manner, two ends of each

lead post

3 and 7 are respectively connected with the

interconnection pads

1 and 6 and the

external interconnection electrodes

9 and 14, and the lead posts 3 and 7 are used for leading out signals measured by the graphene temperature measuring unit 4 and are connected with an external circuit through the

external interconnection electrodes

9 and 14 to transmit the signals.

Example two:

as shown in fig. 2, the high-sensitivity MEMS graphene wind speed and direction sensor chip further includes silicon nitride

protective layers

8 and 15, where the silicon nitride

protective layers

8 and 15 cover the upper and lower surfaces of the glass substrate 16, respectively, and cover the temperature measurement component and the heating component on the upper and lower surfaces of the glass substrate 16, respectively, so as to protect the temperature measurement component and the heating component, isolate the temperature measurement component and the heating component from direct contact with the outside, and provide oxygen-free protection.

Example three:

as shown in fig. 5, the high-sensitivity MEMS graphene wind speed and direction sensor chip further includes a barrier layer 20, the barrier layer 20 is disposed between the internal interconnection electrode 18 and the glass substrate 16, the barrier layer 20 isolates the internal interconnection electrode 18 from the glass substrate 16, and the barrier layer 20 serves as a wetting layer and a protective layer to prevent mutual diffusion of metal atoms and substrate atoms at high temperature.

The principle of the invention is as follows:

the heat that the heating resistor of sensor glass substrate lower surface produced conducts the upper surface of glass substrate with the heat fast through the high thermal conductivity heat conduction metal of glass through-hole, under the condition that there is only natural convection in the absence of wind, because of the symmetry, 8 graphite alkene temperature measurement units of the even distribution of hoop on substrate surface are in same temperature, and the resistance is also equal. At wind speeds other than zero, the heat exchange between the fluid and the substrate takes place in the form of forced convection. Due to the action of fluid viscous force and the condition that the wall surface does not slide, a very thin speed boundary layer and a very thin heat boundary layer exist on the surface of the substrate from the wind-sensing edge of the substrate, and a very large speed gradient and a very large temperature gradient exist in the boundary layer along the normal direction of the wall surface. Moreover, the thickness of the boundary layer gradually increases from upstream to downstream, and accordingly, the heat exchange coefficient of forced convection between the wall surface and the air varies. The thickness of the thermal boundary layer at the front end of the substrate is small, the convection heat transfer coefficient is large, and the loss heat is large, so that the temperature at the front end is low, and the conditions at the rear end of the substrate are opposite, so that a temperature difference exists between the upstream temperature measuring point and the downstream temperature measuring point of the surface of the substrate. According to the temperature-sensitive mechanism of graphene, the resistance of graphene is different at different temperatures. The resistance of the graphene is changed due to temperature change, the resistance is led out to an external circuit through a lead, a certain voltage value is output, and the wind speed at the moment can be obtained after the difference value of the voltage values is processed by the outside. The principle of wind direction measurement is that the corresponding angle of the wind direction can be obtained by using a corresponding theoretical formula according to the temperature values measured by the circumferential temperature measuring resistors at different positions through the vector decomposition of the wind speed. Meanwhile, in the process, the silicon nitride film and the substrate are isolated from direct contact of the temperature-sensitive nano film and the outside, so that oxygen-free protection is provided for graphene, the sensor can work in an environment with high wind speed, and high-sensitivity and high-precision measurement in a complex environment is realized.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims and their equivalents.

Claims

1. A high-sensitivity MEMS graphene wind speed and direction sensor chip can normally work in the environment with the wind speed of 0-30m/s, and is characterized by comprising:

the glass substrate (16), wherein a plurality of glass through holes are formed in the glass substrate (16), and heat-conducting metal (11) is arranged in the glass through holes;

the temperature measuring assembly is arranged on the upper surface of the glass substrate (16), is positioned at the top of the glass through hole and is used for detecting the change of the resistance;

2. The high-sensitivity MEMS graphene wind speed and direction sensor chip of claim 1, wherein the temperature measurement component comprises: the temperature measurement device comprises a graphene temperature measurement unit (4) and first metal electrodes (2, 5), wherein the first metal electrodes (2, 5) are respectively arranged at two ends of the graphene temperature measurement unit (4) and are connected with the graphene temperature measurement unit (4) through wiring.

3. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 2, wherein the graphene temperature measurement unit (4) is a temperature sensitive nano-film, and the graphene temperature measurement unit (4) comprises: the temperature measuring device comprises a graphene film layer (19), a boron nitride film layer (17) and internal interconnection electrodes (18), wherein the boron nitride film layer (17) and the internal interconnection electrodes (18) are arranged on the upper portion and the lower portion of the graphene film layer (19) respectively, the internal interconnection electrodes (18) wrap the two exposed ends of the graphene film layer (19) respectively, and the internal interconnection electrodes (18) are connected with first metal electrodes (2 and 5) located on two sides of a graphene temperature measuring unit (4) through wiring.

4. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 1, wherein the plurality of glass through holes are arranged in an annular array, and the plurality of temperature measurement components are arranged in an annular symmetry manner.

5. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 4, wherein the glass substrate (16) is provided with (8) glass through holes, each glass through hole is provided with a temperature measurement component, the graphene temperature measurement units (4) of the (8) groups of temperature measurement components are centrosymmetric and circumferentially and uniformly distributed, and the included angle between the adjacent graphene temperature measurement units (4) is 45 degrees.

6. The high sensitivity MEMS graphene wind speed and direction sensor chip of claim 1, wherein the heating assembly comprises: the glass substrate comprises a heating resistor (12) and second metal electrodes (10 and 13), wherein the heating resistor (12) is arranged on the lower surface of the glass substrate (16) and is positioned at the bottom of the glass through hole, and two ends of the heating resistor (12) are respectively connected with the second metal electrodes (10 and 13).

7. The high sensitivity MEMS graphene anemometry sensor chip of claim 2, wherein the interconnect assembly comprises: the glass substrate comprises interconnection pads (1, 6), lead posts (3, 7) and external interconnection electrodes (9, 14), wherein the interconnection pads (1, 6) are arranged on the upper surface of the glass substrate (16) and are connected with adjacent first metal electrodes (2, 5), the external interconnection electrodes (9, 14) are arranged at the bottom of the glass substrate (16), the lead posts (3, 7) penetrate through the glass substrate (16), two ends of each lead post (3, 7) are respectively connected with the interconnection pads (1, 6) and the external interconnection electrodes (9, 14), and signals are transmitted out through the external interconnection electrodes (9, 14) and are connected with an external circuit.

8. The high-sensitivity MEMS graphene anemometry sensor chip of claim 1, wherein the glass via comprises a single-hole structure or a porous structure.

9. The high-sensitivity MEMS graphene wind speed and direction sensor chip according to claim 1, further comprising silicon nitride protection layers (8, 15), wherein the silicon nitride protection layers (8, 15) respectively cover the upper and lower surfaces of the glass substrate (16), and respectively cover the temperature measurement component and the heating component on the upper and lower surfaces of the glass substrate (16).

10. The high-sensitivity MEMS graphene anemometry wind sensor chip according to claim 3, further comprising a barrier layer (20), the barrier layer (20) being disposed between the internal interconnect electrode (18) and a glass substrate (16).