CN112283059B - Photothermal effect-based sample microsphere horizontal rolling control method and system - Google Patents

Photothermal effect-based sample microsphere horizontal rolling control method and system Download PDF

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CN112283059B
CN112283059B CN202011263713.9A CN202011263713A CN112283059B CN 112283059 B CN112283059 B CN 112283059B CN 202011263713 A CN202011263713 A CN 202011263713A CN 112283059 B CN112283059 B CN 112283059B
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microsphere
laser
microspheres
light source
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CN112283059A (en
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张志强
戴喜德
刘聪
史国华
周武平
张涛
蒋克明
黎海文
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Suzhou Institute of Biomedical Engineering and Technology of CAS
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F03GSPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
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    • GPHYSICS
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    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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Abstract

The invention discloses a sample microsphere horizontal rolling control method and a system based on photothermal effect, wherein the system comprises the following steps: the device comprises an optical microscopic imaging module, a control module, a laser light source, a sample platform and sample microspheres; the control module is used for controlling and realizing relative motion between the laser light source and the sample microsphere, so that a laser spot emitted by the laser light source can be focused on the edge of the sample microsphere, and the sample microsphere rolls towards the direction far away from the laser spot due to the photothermal effect. The invention provides a simple and feasible microsphere motion control scheme, the whole control system is simple and convenient to build and low in cost, the invention realizes the motion of the microspheres by only depending on photo-thermal drive, the diameter of the microspheres can reach 10-500 mu m, the interference of Brownian motion is small, the microspheres can be continuously controlled in direction, the control is simple, and the invention has good application prospect.

Description

Photothermal effect-based sample microsphere horizontal rolling control method and system
Technical Field
The invention relates to the technical field of micro-nano material driving, in particular to a sample microsphere horizontal rolling control method and system based on a photothermal effect.
Background
The realization of the controllable motion of micro-and nano-scale objects in liquid has important research significance in the fields of life science, surface science, micro-fluidic and micro-electro-mechanical systems, etc. The driving method for micro-nano structure particles reported in the literature at present comprises acoustic waves, a magnetic field, an electric field, photocatalysis, chemical reaction, optical tweezers, photo-thermal and the like; the adopted microspheres are mostly smaller than a plurality of micrometers in size, and are mostly nano-sized particles; the structural shapes of the microspheres include rocket type, spherical type, surface asymmetric type and the like. The driving mode of optical driving, particularly thermal seepage caused by laser photothermal effect, so that particles generate self thermophoresis has the following characteristics, for example, 1) the laser easily realizes micron-scale remote control and even nanoscale energy focusing through a microscopic technology; 2) the photo-thermal material contained in the driving particles and the solution in which the driving particles are positioned do not generally have chemical reaction, and the driving method is a fuel-free driving mode, so that secondary pollution to a biological sample can be avoided, and temperature gradient and heat seepage caused by photo-thermal can be generated in most solutions; 3) compared with an optical tweezers regulation and control technology based on photon momentum transfer, the photo-thermal driving has higher conversion efficiency on light energy, and the photo-thermal driving has larger driving force than the optical tweezers under the same optical power, can reach nanometer Newton magnitude and realizes the driving of particles of tens of microns.
In the reported pure photothermal microsphere driving technology, the driven microsphere is generally below a few micrometers, most of the driven microspheres are unfocused illumination, a temperature gradient is generally generated around the microspheres by utilizing a two-sided asymmetric structure, although the movement speed can reach hundreds of micrometers per second, the movement direction is difficult to control, and the influence of Brownian movement on the smaller the microsphere volume is, the more remarkable the microsphere volume is. In addition, the focusing point light source is utilized to excite the microspheres containing the photo-thermal material to generate self-thermophoresis. The rocket-type microsphere with the length of about 10 mu m prepared by the group of subjects (Superfast Near-isolated Light-Driven Polymer Multilayer cameras, Small 2016,12, 577-582), takes a hollow tube of a styrene sulfonic acid/polycyclic aromatic hydrocarbon composite layer (total 20 layers) which is assembled layer by layer and synthesized by template assistance as a base frame, nano platinum stabilized by poly (diallyl dimethyl ammonium chloride) is assembled on the inner wall of a pipeline as a catalytic layer, a gold nano layer grows on the outer wall of the pipeline, and at the moment when a laser point Light source acts on the microsphere, the heat generated by photo-heat can accelerate the decomposition of hydrogen peroxide (0.1%) in the surrounding solution by the catalytic material on the inner wall of the particle, and the generated oxygen bubbles finally can push the whole particle to move for a certain distance towards the direction deviating from the point Light source; the rocket-type microspheres have complex structures and do not depend on photo-thermophoresis driving. The Utsab Khadka et al (Active particles bound by information flows, nat. Commun.2018,9:3864) also adopt a laser focusing light source to act on one side of 2.13 mu m melamine resin particles sparsely wrapped by gold nanoparticles, generate temperature gradient to form thermophoresis, and induce a plurality of particles of the same type to regularly perform group suspension motion by using wavelength division multiplexing and algorithm, and because the particles are smaller, the interference of brownian motion is more obvious, the motion speed is limited. In contrast, it is only rarely reported that the controllable driving of microspheres with a size of tens of micrometers is performed, and Ido Freekel et al (Light generated bubbles for micro particle pulsing, Scientific Reports 2017,7:2814) use 40-60 μm hollow glass microspheres, the surface of the microspheres is coated with a layer of metal silver with a thickness of 200nm, hundreds of milliwatts of laser (405nm) is focused on one side of the particles, the bubbles are caused to undergo the processes of generation, enlargement and disappearance within tens of microseconds by local high temperature, the particles are finally ejected out while the bubbles are gradually dissolved, the speed change is extremely fast (up to 1m/s), therefore, the motion change process needs to be observed by means of high-speed camera shooting, the driving mode of the method belongs to single-point fast triggering, and continuous direction control of the microspheres is not easy.
A more reliable solution is now needed.
Disclosure of Invention
The invention aims to solve the technical problem of providing a sample microsphere horizontal rolling control method and system based on a photothermal effect aiming at the defects in the prior art. The invention mainly adopts microspheres with the size of tens to hundreds of microns as control objects, irradiates one side edge of the microsphere through the focusing action of an objective lens, and initiates the photothermal effect of a nano material layer on the surface of the microsphere, thereby driving particles to horizontally roll on a bottom substrate in liquid; the invention can continuously control the direction of the microsphere, is little interfered by Brownian motion and is simple to control.
In order to achieve the above objects and other advantages of the present invention, the technical solution adopted by the present invention is: a sample microsphere horizontal rolling control system based on photothermal effect comprises: the device comprises an optical microscopic imaging module, a control module, a laser light source, a sample platform and sample microspheres;
the sample microsphere comprises a sphere core and a photo-thermal material layer coated on the surface of the sphere core, the sample microsphere is arranged on the sample platform through a container, the laser light source emits laser spots, and the optical microscopic imaging module is used for imaging the sample microsphere;
the control module is used for controlling and realizing relative motion between the laser light source and the sample microsphere, so that a laser spot emitted by the laser light source can be focused on the edge of the sample microsphere, and the sample microsphere rolls towards the direction far away from the laser spot due to the photothermal effect.
Preferably, the optical microscopic imaging module comprises an imaging light source, a condenser, a microscope objective, a semi-reflecting and semi-transmitting mirror, an eyepiece and a CCD camera, which are sequentially arranged along the emergent direction of the imaging light emitted by the imaging light source, and the sample platform is arranged between the condenser and the microscope objective.
Preferably, the laser light source includes a laser and a collimator disposed on a light exit of the laser.
Preferably, laser emitted by the laser passes through the collimator, is reflected by the semi-reflecting and semi-transparent mirror, and then passes through the microscope objective and irradiates the edge of the sample microsphere on the sample platform;
the imaging light emitted by the imaging light source irradiates the edge of a sample microsphere on the sample platform after passing through the condenser lens, and the light reflected by the sample microsphere is transmitted through the half-reflecting and half-transmitting lens after being collected by the microscope objective lens and then reaches the CCD camera after passing through the ocular lens.
Preferably, the collimator is an adjustable fiber collimator, and the diameter of the collimated light beam passing through the adjustable fiber collimator is larger than the diameter of the entrance pupil of the microscope objective.
Preferably, the material of the spherical core is a non-metallic material without a photothermal effect in the central wave band of the laser emitted by the laser, and the density of the non-metallic material is greater than that of water;
the diameter of the sample microsphere is 10-500 mu m, and the thickness of the photo-thermal material layer is 50-500 nm.
Preferably, the material of the spherical core is polystyrene, silicon dioxide or other polymers, and the material of the photothermal material layer is gold or silver or other organic polymers with photothermal conversion effect.
Preferably, the sample platform has X, Y two-directional freedom, which can perform X, Y directional horizontal movement under the control of the control module, so that the laser spot emitted from the laser light source can be focused on the edge of the sample microsphere on the sample platform.
Preferably, the system further comprises a spatial light modulation mechanism or a reflection mechanism capable of adjusting the focusing position of the laser spot emitted by the laser light source, and the spatial light modulation mechanism or the reflection mechanism can adjust the position of the laser spot emitted by the laser light source under the control of the control module, so that the laser spot is focused near the edge of the sample microsphere on the sample platform.
The invention also provides a control method of the sample microsphere horizontal rolling control system based on the photothermal effect, which comprises the following steps:
1) the CCD camera and the two-dimensional sample stage are respectively connected with the control module, sample microspheres are placed in a container filled with liquid, the container is placed on the two-dimensional sample stage, the imaging light source is started, the two-dimensional sample stage is controlled to move horizontally through the control module, and meanwhile the distance between the microscope objective and the sample microspheres is adjusted, so that the sample microspheres are clearly imaged in the center of the visual field of the CCD camera;
2) starting the laser, controlling the two-dimensional sample stage to horizontally move through the control module to adjust the position of the sample microsphere, enabling the position of a laser spot in a visual field to be relatively close to the edge of the sample microsphere, and adjusting the adjustable optical fiber collimator to reduce the laser spot;
3) the two-dimensional sample stage is controlled to move horizontally, so that the sample microspheres are continuously close to the laser spots, the laser spots are focused on the edges of the sample microspheres, the sample microspheres move due to the photothermal effect, the two-dimensional sample stage is controlled to move continuously, the laser spots can catch up with the moving sample microspheres, and the sample microspheres can move continuously.
The invention has the beneficial effects that:
the sample microsphere horizontal rolling control method and system based on the photothermal effect provide a simple and feasible microsphere motion control scheme, the whole control system is simple and convenient to build and low in cost, the movement of the microspheres is realized by purely depending on photothermal driving, the diameter of the microspheres can reach 10-500 mu m, the interference of Brownian motion is small, the microspheres can be continuously controlled in direction, the control is simple, and the application prospect is good.
Drawings
FIG. 1 is a schematic structural diagram of a photothermal effect based sample microsphere horizontal rolling control system according to the present invention;
FIG. 2 is an electron microscope photograph of sample microspheres from example 1 of the present invention;
FIG. 3 is a simulation diagram (left) of the surface temperature distribution and a simulation diagram (right) of the flow field distribution of the sample microsphere under laser excitation in example 1 of the present invention;
FIG. 4 is a simulation of the rolling effect of photothermal driving sample microspheres in example 1 of the present invention;
FIG. 5 shows the experimental results of photothermally driving the microspheres of the sample to horizontally roll under a 40 Xmicroscope objective in example 1 of the present invention.
Description of reference numerals:
1-an imaging light source; 2-ground glass; 3-a condenser lens; 4-sample platform; 5, a microscope objective; 6-half reflecting and half transmitting mirror; 7, an ocular lens; 8-a CCD camera; 9-image acquisition card; 10-a computer; 11-a laser; 12-collimator.
Detailed Description
The present invention is further described in detail below with reference to examples so that those skilled in the art can practice the invention with reference to the description.
It will be understood that terms such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
The sample microsphere horizontal rolling control system based on the photothermal effect of the embodiment comprises: the device comprises an optical microscopic imaging module, a control module, a laser light source, a sample platform 4 and sample microspheres;
the sample microsphere comprises a sphere core and a photo-thermal material layer coated on the surface of the sphere core, the sample microsphere is arranged on the sample platform 4 through a container, a laser light source emits laser spots, and the optical microscopic imaging module is used for imaging the sample microsphere;
the control module is used for controlling and realizing relative motion between the laser light source and the sample microsphere so that a laser spot emitted by the laser light source can be focused on the edge of the sample microsphere, and the sample microsphere rolls towards the direction far away from the laser spot due to the photothermal effect.
The invention mainly adopts sample microspheres with the size of tens to hundreds of microns as control objects, irradiates one side of the edges of the sample microspheres through the focusing action of an objective lens, and triggers the photothermal effect of a nanometer material layer on the surfaces of the sample microspheres, thereby driving particles to horizontally roll on a container bottom plate in liquid.
The principle of the invention is as follows: the container is filled with liquid, the sample microspheres are placed in the liquid, under the irradiation of focused laser spots, the photo-thermal material on the surfaces of the sample microspheres generates photo-thermal effect, the light energy is converted into heat energy, the focused microsphere surfaces form local high-temperature distribution and temperature gradient, further thermal seepage and pressure difference are formed, and under the combined action of the pressure difference in the horizontal direction and the friction force of the base plate at the bottom of the container, the sample microspheres roll towards the direction far away from the laser spots. Then, the control module controls the laser light source and the sample microsphere to perform relative motion so that the laser light spot can catch up with the edge of the sample microsphere again, and the sample microsphere moves towards a target direction through a photo-thermal effect (wherein, it is to be understood that the motion control aims at realizing the relative motion between the sample microsphere and the liquid in the container).
For example, in an embodiment, the sample platform 4 may move horizontally under the control of the control module, and after the sample microsphere is irradiated by the laser spot and moves, the sample microsphere is driven by the sample platform 4 to move, so that the laser spot can catch up and refocus to the edge of the sample microsphere, and the sample microsphere can move continuously toward the target direction.
In another embodiment, the control module can control the laser spot to move, and after the sample microsphere is irradiated by the laser spot and moves, the laser spot is controlled to move so as to catch up and refocus to the edge of the sample microsphere, so that the sample microsphere can continuously move towards the target direction.
Wherein the local high temperature distribution is related to the surface photothermal material, the size of the microspheres, the liquid thermal conductivity and the laser parameters. The moving direction of the sample microsphere can be changed by adjusting the size of a light spot or the laser power of the laser irradiated on one side of the particle and adjusting the focusing point of the laser light spot.
The foregoing is a general idea of the present invention, and more specific examples are provided below to further illustrate the present invention.
Example 1
Referring to fig. 1, in this embodiment, the control module is a computer 10, the optical microscopic imaging module includes an imaging light source 1, ground glass 2, a condenser 3, a microscope objective 5, a half-reflecting and half-transmitting mirror 6, an eyepiece 7, and a CCD camera 8, which are sequentially arranged along an exit direction of imaging light emitted by the imaging light source 1, the CCD camera 8 is connected to an image acquisition card 9, the image acquisition card 9 is connected to the computer 10, and the sample platform 4 is arranged between the condenser 3 and the microscope objective 5. The laser light source includes a laser 11 and a collimator 12 disposed on a light exit of the laser 11.
Laser emitted by a laser 11 is reflected by a semi-reflecting and semi-transmitting mirror 6 after passing through a collimator 12, and then is irradiated on sample microspheres on a sample platform 4 after passing through a microscope objective 5;
imaging light emitted by the imaging light source 1 irradiates sample microspheres on a sample platform 4 after passing through ground glass 2 and a condenser 3, light reflected by the sample microspheres is collected by a microscope objective 5, then transmits through a semi-reflecting and semi-transmitting lens 6, and then reaches a CCD camera 8 after passing through an ocular lens 7, and an image is collected by an image collection card 9 and imaged and displayed by a computer 10.
In the present embodiment, the imaging light source 1 is selected to be a tungsten halogen lamp or other halogen lamp. The laser 11 is a semiconductor laser 11, the central wavelength is an infrared light band, and the laser power is controlled to be 100 mW-1500 mW. The light outlet of the laser 11 is connected to a collimator 12 via an optical fiber of the FC/PC end face. The collimator 12 is an adjustable fiber collimator 12, and the diameter of the collimated light beam passing through the adjustable fiber collimator 12 is larger than the diameter of the entrance pupil of the microscope objective 5. The microscope objective 5 is a flat field achromatic objective with a magnification of 10-60 times.
In this embodiment, the sample platform 4 has X, Y degrees of freedom in two directions, which can be moved horizontally in the X, Y direction under the control of the computer 10, so that the laser spot emitted from the laser source can be focused on the sample microspheres on the sample platform 4.
In this embodiment, the material of the spherical core is a non-metallic material without a photothermal effect in the central band of the laser emitted by the laser 11, and the density is greater than that of water; the diameter of the sample microsphere is 10-500 mu m, and the thickness of the photo-thermal material layer is 50-500 nm. Furthermore, the material of the spherical core is polystyrene, silicon dioxide, or other common microsphere materials such as polymers and non-metallic materials, and the material of the photothermal material layer is precious metal such as gold or silver, or other organic polymers with photothermal conversion effect.
The embodiment also provides a control method of a sample microsphere horizontal rolling control system based on the photothermal effect, which comprises the following steps:
1) respectively connecting a CCD camera 8 and a two-dimensional sample stage with a computer 10, placing sample microspheres into a container filled with liquid, placing the container on the two-dimensional sample stage, starting an imaging light source 1, controlling the two-dimensional sample stage to move horizontally through the computer 10, and adjusting the distance between a microscope objective 5 and the sample microspheres to clearly image the sample microspheres in the center of the visual field of the CCD camera 8;
2) starting the laser 11, controlling the two-dimensional sample stage to horizontally move through the control module to adjust the position of the sample microsphere, enabling the position of a laser spot in a visual field to be relatively close to the edge of the sample microsphere, and adjusting the adjustable optical fiber collimator 12 to reduce the laser spot;
3) the two-dimensional sample stage is controlled to move horizontally, so that the edge of the sample microsphere is continuously close to the laser spot, the laser spot is focused on the edge of the sample microsphere, the sample microsphere moves due to the photothermal effect, the laser spot is enabled to catch up with the edge of the moved sample microsphere by controlling the two-dimensional sample stage to move continuously, and the sample microsphere is enabled to move continuously in the direction beyond the target.
In this embodiment, the diameter of the sample microsphere is 40 μm, the material of the photothermal material layer is gold, and fig. 2 is an electron microscope picture of the sample microsphere. Referring to fig. 3, a simulation diagram (left) of the surface temperature distribution and a simulation diagram (right) of the flow field distribution of the sample microsphere under laser excitation are shown; referring to fig. 4, the simulation effect of photo-thermal driving the sample microspheres to roll is as follows: 785nm laser with the laser power of 1mW is acted on one side edge of the microsphere with the diameter of 40 microns; referring to fig. 5, the experimental result of photo-thermal driving of the sample microsphere to horizontally roll under 40 × micro objective 5 is shown, and it can be seen from the figure that the invention successfully realizes photo-thermal driving of the sample microsphere.
In another embodiment, the system further comprises a spatial light modulation mechanism or a reflection mechanism capable of adjusting the focusing position of the laser spot emitted by the laser light source, and the spatial light modulation mechanism or the reflection mechanism can adjust the position of the laser spot emitted by the laser light source under the control of the control module, so that the laser spot is focused on the edge of the sample microsphere on the sample platform 4.
While embodiments of the invention have been disclosed above, it is not limited to the applications listed in the description and the embodiments, which are fully applicable in all kinds of fields of application of the invention, and further modifications may readily be effected by those skilled in the art, so that the invention is not limited to the specific details without departing from the general concept defined by the claims and the scope of equivalents.

Claims (9)

1. A sample microsphere horizontal rolling control system based on photothermal effect is characterized by comprising: the device comprises an optical microscopic imaging module, a control module, a laser light source, a sample platform and sample microspheres;
the sample microsphere comprises a sphere core and a photo-thermal material layer coated on the surface of the sphere core, the sample microsphere is arranged on the sample platform through a container, the laser light source emits laser spots, and the optical microscopic imaging module is used for imaging the sample microsphere;
the control module is used for controlling and realizing relative motion between the laser light source and the sample microsphere so that a laser spot emitted by the laser light source can be focused on the edge of the sample microsphere, and the sample microsphere rolls in a direction away from the laser spot due to the photothermal effect;
the material of the ball core is a non-metallic material without optical thermal effect in the central wave band of the laser emitted by the laser, and the density of the material is greater than that of water;
the diameter of the sample microsphere is 10-500 mu m, and the thickness of the photo-thermal material layer is 50-500 nm.
2. The photothermal effect based sample microsphere horizontal rolling control system according to claim 1, wherein the optical microscopic imaging module comprises an imaging light source, a condenser, a microscope objective, a half-reflecting and half-transmitting mirror, an eyepiece and a CCD camera, which are sequentially arranged along the exit direction of the imaging light emitted from the imaging light source, and the sample platform is arranged between the condenser and the microscope objective.
3. The photothermal effect based sample microsphere horizontal rolling control system according to claim 2, wherein the laser light source comprises a laser and a collimator disposed on a light outlet of the laser.
4. The photothermal effect based sample microsphere horizontal rolling control system according to claim 3, wherein laser light emitted by said laser is reflected by said semi-reflective and semi-transparent mirror after passing through said collimator, and then is irradiated onto the sample microsphere on said sample platform after passing through said microscope objective;
imaging light emitted by the imaging light source irradiates on the sample microspheres on the sample platform after passing through the condenser lens, light reflected by the sample microspheres transmits through the half-reflecting and half-transmitting lens after being collected by the microscope objective lens, and then reaches the CCD camera after passing through the ocular lens.
5. The photothermal effect based sample microsphere horizontal rolling control system according to claim 4, wherein said collimator is an adjustable fiber collimator, and the diameter of the collimated beam passing through said adjustable fiber collimator is larger than the diameter of the entrance pupil of said microscope objective.
6. The photothermal effect based sample microsphere horizontal rolling control system according to claim 5, wherein the material of the sphere core is polystyrene, silica or other polymers, and the material of the photothermal material layer is gold or silver or other organic polymers with photothermal conversion effect.
7. The photothermal effect based sample microsphere horizontal rolling control system according to claim 6, wherein said sample platform has X, Y two-directional freedom, which can perform X, Y directional horizontal movement under the control of said control module, so that the laser spot emitted from said laser light source can be focused on the edge of the sample microsphere on said sample platform.
8. The photothermal effect based sample microsphere horizontal rolling control system according to claim 6, further comprising a spatial light modulation mechanism or a reflection mechanism capable of adjusting the focusing position of the laser spot emitted from the laser light source, wherein the spatial light modulation mechanism or the reflection mechanism can adjust the position of the laser spot emitted from the laser light source under the control of the control module, so that the laser spot is focused on the edge of the sample microsphere on the sample platform.
9. The method for controlling the photothermal effect based sample microsphere horizontal rolling control system according to claim 7, wherein the method comprises the following steps:
1) the CCD camera and the two-dimensional sample stage are respectively connected with the control module, sample microspheres are placed in a container filled with liquid, the container is placed on the two-dimensional sample stage, the imaging light source is started, the two-dimensional sample stage is controlled to move horizontally through the control module, and meanwhile the distance between the microscope objective and the sample microspheres is adjusted, so that the sample microspheres are clearly imaged in the center of the visual field of the CCD camera;
2) starting the laser, controlling the two-dimensional sample stage to horizontally move through the control module to adjust the position of the sample microsphere, enabling the position of a laser spot in a visual field to be relatively close to the vicinity of the edge of the sample microsphere, and adjusting the adjustable optical fiber collimator to reduce the laser spot;
3) the two-dimensional sample stage is controlled to move horizontally, so that the sample microspheres are continuously close to the laser spots, the laser spots are focused on the edges of the sample microspheres, the sample microspheres move due to the photothermal effect, the two-dimensional sample stage is controlled to move continuously, the laser spots can catch up with the moving sample microspheres, and the sample microspheres can move continuously.
CN202011263713.9A 2020-11-12 2020-11-12 Photothermal effect-based sample microsphere horizontal rolling control method and system Active CN112283059B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004309428A (en) * 2003-04-10 2004-11-04 Nippon Sheet Glass Co Ltd Method and device for measuring lens focal position of microchemical system, the microchemical system, and method for positioning lens of the microchemical system
CN201191326Y (en) * 2008-01-24 2009-02-04 浙江大学 Photo thermal driving micro control apparatus
EP2682759A1 (en) * 2012-07-06 2014-01-08 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO High throughput microscopy device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004309428A (en) * 2003-04-10 2004-11-04 Nippon Sheet Glass Co Ltd Method and device for measuring lens focal position of microchemical system, the microchemical system, and method for positioning lens of the microchemical system
CN201191326Y (en) * 2008-01-24 2009-02-04 浙江大学 Photo thermal driving micro control apparatus
EP2682759A1 (en) * 2012-07-06 2014-01-08 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO High throughput microscopy device

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