CN112281121B - Plasma nano-coating equipment and application - Google Patents

Plasma nano-coating equipment and application Download PDF

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Publication number
CN112281121B
CN112281121B CN202011154515.9A CN202011154515A CN112281121B CN 112281121 B CN112281121 B CN 112281121B CN 202011154515 A CN202011154515 A CN 202011154515A CN 112281121 B CN112281121 B CN 112281121B
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Prior art keywords
motor
rod
workbench
gear ring
coating
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CN112281121A (en
Inventor
董海青
申鹏
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Shenzhen Chuangzhijie Technology Co ltd
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Shenzhen Chuangzhijie Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Spray Control Apparatus (AREA)

Abstract

The invention discloses a plasma nano-coating device, which comprises a frame, a workbench and a coating unit, wherein the frame is provided with the workbench, the workbench is provided with a clamp assembly for clamping a workpiece, the frame is provided with the coating unit above the workbench, the coating unit comprises a moving feeding mechanism, a reciprocating driving mechanism and a swinging mechanism, the moving feeding mechanism comprises a screw rod, a second motor and a first mounting seat, the reciprocating driving mechanism comprises a fourth motor, a turntable and a first connecting rod, the swinging mechanism comprises a sixth motor, a disk and a mounting rod, the sixth motor is fixedly mounted at the bottom of the second mounting seat, the application also discloses the application of the plasma nano-coating device, the coating unit is arranged, the coating range is adjusted, the circumferential rotary coating can be carried out, and the effect of adjusting the circumferential rotary radius can be achieved, can carry out reciprocal coating film, enlarge the coating film scope, improve work efficiency, multi-angle coating film further improves the adaptability.

Description

Plasma nano-coating equipment and application
Technical Field
The invention relates to a coating device, in particular to a plasma nano coating device and application thereof.
Background
The nano coating mainly has the following applications: coating a film on the probe; coating a film on the golden finger; coating a film on SOCKET; silver plating the LED bracket; an ATP packaging material; the traditional industrial and civil products.
The existing coating equipment has the defects of single coating mode, poor adjustability and small coating range, and cannot meet more and more use requirements.
Disclosure of Invention
The invention aims to provide plasma nano-coating equipment and application thereof so as to solve the problems.
In order to achieve the purpose, the invention provides the following technical scheme:
a plasma nanometer coating device comprises a rack, a workbench and a coating unit, wherein the rack is provided with the workbench, the workbench is provided with a clamp assembly for clamping a workpiece, the rack is provided with the coating unit above the workbench, the coating unit comprises a moving feeding mechanism, a reciprocating driving mechanism and a swinging mechanism, the moving feeding mechanism is in driving connection with an electric push rod, the bottom end of a telescopic rod of the electric push rod is fixedly provided with a third motor, an output shaft of the third motor is fixedly provided with a first sliding block, the lower surface of the first sliding block is in sliding connection with a mounting plate, a fastening screw is connected between the first sliding block and the mounting plate and used for fixing the position between the first sliding block and the mounting plate, the lower surface of the mounting plate is provided with the reciprocating driving mechanism, the reciprocating driving mechanism is in driving connection with a second mounting seat, the second mounting seat is in sliding connection with the mounting plate, and the lower surface of the second mounting seat is provided with the swinging mechanism, the swinging mechanism is connected with the nozzle in a driving way, in the embodiment, the swinging mechanism comprises a sixth motor, a disc and a mounting rod, the sixth motor is fixedly arranged at the bottom of the second mounting seat, a disc is fixedly arranged on an output shaft of the sixth motor, a mounting rod is connected to the front side of the disc in a matching manner, the top end of the mounting rod is hinged with the second mounting seat, a pin shaft is fixed on the outer ring of the end surface of the disc, a through groove for the pin shaft to insert and move is formed in the mounting rod, a nozzle is arranged at the bottom end of the mounting rod, one side that the installation pole bottom is close to the workstation articulates there is branch, and the nozzle is installed to the branch bottom, has outside supply equipment through the pipe connection on the nozzle, and installation pole bottom fixed mounting has the fifth motor, and fixed mounting has the threaded rod on the output shaft of fifth motor, and threaded connection has the internal thread cover on the threaded rod, and it has the second connecting rod to articulate on the internal thread cover, and the second connecting rod is articulated with branch.
On the basis of the technical scheme, the invention also provides the following optional technical scheme:
in one alternative: the movable feeding mechanism comprises a screw rod, a second motor and a first mounting seat, the screw rod is rotatably mounted at the top of the rack, the rack is fixedly provided with the second motor for driving the screw rod to rotate, the screw rod is in threaded connection with the first mounting seat, the first mounting seat is in sliding connection with the top of the rack, and the electric push rod is vertically and fixedly mounted on the first mounting seat.
In one alternative: reciprocating drive mechanism includes fourth motor, carousel and first connecting rod, and mounting panel lower surface one end is fixed with the fourth motor, and fixed mounting has the carousel on the output shaft of fourth motor, and carousel terminal surface outer lane articulates there is first connecting rod, and the one end that the carousel was kept away from to first connecting rod is articulated with the second mount pad.
In one alternative: even symmetry fixed mounting in frame bottom has the supporting leg, and the gyro wheel is installed to the supporting leg bottom.
In one alternative: a first motor is fixedly mounted below the workbench on the rack, and an output shaft of the first motor is fixedly connected with the workbench.
In one alternative: the fixture component comprises an inner gear ring, a first driving mechanism for driving the inner gear ring to rotate, a third connecting rod, a positioning rod, a guide sleeve, a gear, a double-sided gear ring and a second driving mechanism for driving the double-sided gear ring to rotate, the inner gear ring is fixed on the outer ring of the upper surface of the workbench, the first driving mechanism for driving the inner gear ring is arranged on one side of the inner gear ring on the workbench, a plurality of third connecting rods are hinged on the top surface of the inner gear ring in an annular direction at intervals, one ends of the third connecting rods, far away from the inner gear ring, are hinged with the positioning rod, one ends of the positioning rods, far away from the third connecting rods, movably penetrate through positioning heads, springs are fixedly connected between one ends of the positioning heads, located in the positioning rods and the positioning rods, the guide sleeve is sleeved on the outer portion of the positioning rods, the guide sleeve is rotatably arranged on the workbench through a rotating shaft, the gear is fixedly arranged on the rotating shaft, the double-sided gear ring is arranged on the outer side of the rotating shaft, and the double-sided gear ring is meshed with the gear, and a second driving mechanism for driving the double-sided gear ring to rotate is fixedly arranged on one side of the double-sided gear ring on the workbench.
In one alternative: the first driving mechanism and the second driving mechanism have the same structure and comprise driving motors and driving wheels.
Compared with the prior art, the invention has the following beneficial effects:
1. the coating device is provided with a coating unit, the coating unit comprises a moving feeding mechanism, a reciprocating driving mechanism and a swinging mechanism, the moving feeding mechanism drives a first mounting seat to move, the coating range is adjusted, a third motor drives a mounting plate to rotate, circumferential rotation coating can be carried out, the effect of adjusting the circumferential rotation radius can be achieved by adjusting the relative position of the mounting plate and a first slide block, workpieces with different sizes are adapted, the reciprocating driving mechanism drives a second mounting seat to reciprocate left and right, reciprocating coating can be carried out, the coating efficiency is improved, a sixth motor drives a disc to rotate, the disc drives a mounting rod to swing, the mounting rod drives a nozzle to swing, the coating range is further expanded, the working efficiency is improved, a fifth motor drives a threaded rod to rotate, the threaded rod drives an internal thread sleeve to move, the internal thread sleeve drives a supporting rod to rotate through the second connecting rod, the support rod drives the nozzle to move to adjust the angle of the nozzle, and multi-angle film coating is performed, so that the adaptability is further improved;
2. the workpiece positioning and clamping device is provided with a clamp assembly, the clamp assembly comprises an inner gear ring, a first driving mechanism for driving the inner gear ring to rotate, a third connecting rod, a positioning rod, a guide sleeve, a gear, a double-sided gear ring and a second driving mechanism for driving the double-sided gear ring to rotate, a workpiece is placed in the middle of a workbench, the first driving mechanism is started to drive the inner gear ring to rotate, the inner gear ring drives the positioning rod to be close to the workpiece through the third connecting rod, the workpiece is positioned and clamped, the workpiece positioning and clamping device is quick and practical, the stability is good, the second driving mechanism drives a rotating shaft to rotate, the rotating shaft drives the guide sleeve to rotate, the guide sleeve drives the positioning rod to rotate by a certain angle, the positioning position can be adjusted, and the situation that the workpiece cannot be fully coated due to contact of a positioning head is avoided.
Drawings
Fig. 1 is a schematic structural diagram of a first embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a second embodiment of the present invention.
Fig. 3 is a partially enlarged view of fig. 2.
Notations for reference numerals: 1-frame, 2-first motor, 3-workbench, 4-second motor, 5-lead screw, 6-first mounting seat, 7-electric push rod, 8-third motor, 9-mounting plate, 10-fourth motor, 11-rotary table, 12-first connecting rod, 13-first sliding block, 14-second mounting seat, 15-disc, 16-mounting rod, 17-fifth motor, 18-support rod, 19-threaded rod, 20-second connecting rod, 21-inner gear ring, 22-third connecting rod, 23-positioning rod, 24-guide sleeve, 25-gear, 26-double-sided gear ring, 27-first driving mechanism and 28-second driving mechanism.
Detailed Description
The present invention will be described in detail with reference to the following embodiments, wherein like or similar elements are designated by like reference numerals throughout the several views, and wherein the shape, thickness or height of the various elements may be expanded or reduced in practice. The examples are given solely for the purpose of illustration and are not intended to limit the scope of the invention. Any obvious modifications or variations can be made to the present invention without departing from the spirit or scope of the present invention.
Example 1
Referring to fig. 1-2, in the embodiment of the invention, a plasma nano-coating device comprises a frame 1, a workbench 3 and a coating unit, wherein supporting legs are uniformly and symmetrically and fixedly mounted at the bottom of the frame 1, rollers are mounted at the bottom ends of the supporting legs, so that the device can be conveniently moved, the workbench 3 is mounted on the frame 1, a clamp assembly for clamping a workpiece is mounted on the workbench 3, a first motor 2 is fixedly mounted on the frame 1 below the workbench 3, and an output shaft of the first motor 2 is fixedly connected with the workbench 3 and can drive the workbench 3 to rotate so as to fully coat the workpiece;
a film coating unit is arranged on the frame 1 above the workbench 3 and comprises a moving feeding mechanism, a reciprocating driving mechanism and a swinging mechanism, the moving feeding mechanism is connected with an electric push rod 7 in a driving manner, in the embodiment, the moving feeding mechanism comprises a screw rod 5, a second motor 4 and a first mounting seat 6, the screw rod 5 is rotatably arranged at the top of the frame 1, the second motor 4 for driving the screw rod 5 to rotate is fixedly arranged on the frame 1, the first mounting seat 6 is connected to the screw rod 5 in a threaded manner, the first mounting seat 6 is slidably connected with the top of the frame 1, the electric push rod 7 is vertically and fixedly arranged on the first mounting seat 6, a third motor 8 is fixedly arranged at the bottom end of a telescopic rod of the electric push rod 7, a first sliding block 13 is fixedly arranged on an output shaft of the third motor 8, a mounting plate 9 is slidably arranged on the lower surface of the first sliding block 13, and a fastening screw is connected between the first sliding block 13 and the mounting plate 9, the reciprocating driving mechanism is used for fixing the position between the first sliding block 13 and the mounting plate 9, the reciprocating driving mechanism is mounted on the lower surface of the mounting plate 9 and is in driving connection with the second mounting seat 14, and the second mounting seat 14 is in sliding connection with the mounting plate 9. in the embodiment, the reciprocating driving mechanism comprises a fourth motor 10, a rotary disc 11 and a first connecting rod 12, the fourth motor 10 is fixed at one end of the lower surface of the mounting plate 9, the rotary disc 11 is fixedly mounted on an output shaft of the fourth motor 10, the first connecting rod 12 is hinged to the outer ring of the end surface of the rotary disc 11, one end of the first connecting rod 12, which is far away from the rotary disc 11, is hinged to the second mounting seat 14, the swinging mechanism is mounted on the lower surface of the second mounting seat 14 and is in driving connection with a nozzle, in the embodiment, the swinging mechanism comprises a sixth motor, a circular disc 15 and a mounting rod 16, the sixth motor is fixedly mounted at the bottom of the second mounting seat 14, the circular disc 15 is fixedly mounted on the output shaft of the sixth motor, the front side of the disc 15 is connected with a mounting rod 16 in a matching way, the top end of the mounting rod 16 is hinged with a second mounting seat 14, a pin shaft is fixed on the outer ring of the end face of the disc 15, a through groove for the pin shaft to insert and move is arranged on the mounting rod 16, a nozzle is arranged at the bottom end of the mounting rod 16, in the embodiment, one side of the bottom end of the mounting rod 16, which is close to the workbench 3, is hinged with a support rod 18, the bottom end of the support rod 18 is provided with the nozzle, the nozzle is connected with an external supply device through a pipeline, the bottom end of the mounting rod 16 is fixedly provided with a fifth motor 17, an output shaft of the fifth motor 17 is fixedly provided with a threaded rod 19, the threaded rod 19 is in threaded connection with an internal thread sleeve, the internal thread sleeve is hinged with a second connecting rod 20, the second connecting rod 20 is hinged with the support rod 18, during operation, the first mounting seat 6 is driven by a moving feed mechanism, the coating range is adjusted, the mounting plate 9 is driven to rotate by the third motor 8, can carry out the circumferential direction coating film, through the relative position who adjusts mounting panel 9 and first slider 13, can reach the effect of adjustment circumferential direction radius of rotation, adapt to not unidimensional work piece, drive second mount pad 14 left and right sides reciprocating motion through reciprocating drive mechanism, can carry out reciprocal coating film, improve coating film efficiency, drive disc 15 through the sixth motor and rotate, disc 15 drives the swing of installation pole 16, installation pole 16 drives the nozzle swing, further enlarge the coating film scope, and the work efficiency is improved, drive threaded rod 19 through fifth motor 17 and rotate, threaded rod 19 drives the internal thread cover and removes, the internal thread cover drives branch 18 through second connecting rod 20 and rotates, branch 18 drives the angle of nozzle motion regulation nozzle, multi-angle coating film, further improve the adaptability.
Example 2
Referring to fig. 3, the embodiment of the present invention is different from embodiment 1 in that the fixture assembly includes an inner gear ring 21, a first driving mechanism 27 for driving the inner gear ring 21 to rotate, a third connecting rod 22, a positioning rod 23, a guide sleeve 24, a gear 25, a double-sided gear ring 26, and a second driving mechanism 28 for driving the double-sided gear ring 26 to rotate, the inner gear ring 21 is fixed to an outer ring of an upper surface of the workbench 3, the first driving mechanism 27 for driving the inner gear ring 21 is installed on one side of the inner gear ring 21 on the workbench 3, a plurality of third connecting rods 22 are annularly and hingedly installed on a top surface of the inner gear ring 21 at intervals, the positioning rod 23 is hinged to one end of the third connecting rod 22 away from the inner gear ring 21, a positioning head movably penetrates through one end of the positioning rod 23 away from the third connecting rod 22, a spring is fixedly connected between one end of the positioning head located in the positioning rod 23 and the positioning rod 23, the guide sleeve 24 is sleeved outside the positioning rod 23, the guide sleeve 24 is rotatably arranged on the workbench 3 through a rotating shaft, a gear 25 is fixedly arranged on the rotating shaft, a double-sided gear ring 26 is arranged on the outer side of the rotating shaft, the double-sided gear ring 26 is meshed with the gear 25, a second driving mechanism 28 for driving the double-sided gear ring 26 to rotate is fixedly arranged on one side of the double-sided gear ring 26 on the workbench 3, the first driving mechanism 27 and the second driving mechanism 28 have the same structure and comprise driving motors and driving wheels, the workpiece is placed in the middle of the workbench 3, the first driving mechanism 27 is started to drive the inner gear ring 21 to rotate, the inner gear ring 21 drives the positioning rod 23 to be close to the workpiece through the third connecting rod 22, the workpiece is positioned and clamped, the operation is quick and practical, the stability is good, the second driving mechanism 28 drives the rotating shaft to rotate, the rotating shaft drives the guide sleeve 24 to rotate, the guide sleeve 24 drives the positioning rod 23 to rotate by a certain angle, the positioning position can be adjusted, and the problem that the workpiece cannot be fully coated due to the contact of the positioning head is avoided.
The working principle of the invention is as follows: when the device works, a workpiece is placed in the middle of the workbench 3, the first driving mechanism 27 is started to drive the inner gear ring 21 to rotate, the inner gear ring 21 drives the positioning rod 23 to be close to the workpiece through the third connecting rod 22, the workpiece is positioned and clamped, the device is quick and practical, the stability is good, the first mounting seat 6 is driven to move through the moving and feeding mechanism, the coating range is adjusted, the mounting plate 9 is driven to rotate through the third motor 8, circumferential rotary coating can be performed, the effect of adjusting the circumferential rotary radius can be achieved by adjusting the relative position of the mounting plate 9 and the first slider 13, the device is suitable for workpieces with different sizes, the second mounting seat 14 is driven to reciprocate left and right through the reciprocating driving mechanism, reciprocating coating can be performed, the coating efficiency is improved, the disc 15 is driven to rotate through the sixth motor, the disc 15 drives the mounting rod 16 to swing, the mounting rod 16 drives the nozzle to swing, and the coating range is further expanded, improve work efficiency, it rotates to drive threaded rod 19 through fifth motor 17, threaded rod 19 drives the internal thread cover and removes, the internal thread cover drives branch 18 through second connecting rod 20 and rotates, branch 18 drives the angle of nozzle motion regulation nozzle, multi-angle coating film, further improve adaptability, second actuating mechanism 28 drives the pivot and rotates, the pivot drives uide bushing 24 and rotates, uide bushing 24 drives locating lever 23 and rotates certain angle, can adjust the locating position, avoid making work can't be fully coated film owing to the contact of locating head.
The above description is only for the specific embodiments of the present disclosure, but the scope of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present disclosure, and all the changes or substitutions should be covered within the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.

Claims (6)

1. A plasma nanometer coating device comprises a rack (1), a workbench (3) and a coating unit, wherein the workbench (3) is arranged on the rack (1), a clamp assembly for clamping a workpiece is arranged on the workbench (3), the coating unit is arranged above the workbench (3) on the rack (1), and is characterized in that the coating unit comprises a moving feed mechanism, a reciprocating drive mechanism and a swing mechanism, the moving feed mechanism is in driving connection with an electric push rod (7), a third motor (8) is fixedly arranged at the bottom end of a telescopic rod of the electric push rod (7), a first slider (13) is fixedly arranged on an output shaft of the third motor (8), a mounting plate (9) is slidably arranged on the lower surface of the first slider (13), a fastening screw is connected between the first slider (13) and the mounting plate (9), and is used for fixing the position between the first slider (13) and the mounting plate (9), surface mounting has reciprocal actuating mechanism under mounting panel (9), and reciprocal actuating mechanism drive connects second mount pad (14), second mount pad (14) and mounting panel (9) sliding connection, and surface mounting has swing mechanism under second mount pad (14), and the nozzle is connected in the swing mechanism drive, swing mechanism includes sixth motor, disc (15) and installation pole (16), sixth motor fixed mounting is in second mount pad (14) bottom, and fixed mounting has disc (15) on the output shaft of sixth motor, and disc (15) front side cooperation is connected with installation pole (16), and installation pole (16) top is articulated with second mount pad (14), and disc (15) terminal surface outer lane is fixed with the round pin axle, offers on installation pole (16) and supplies the logical groove that the round pin axle inserted and move about, and the nozzle is installed to installation pole (16) bottom, one side that installation pole (16) bottom is close to workstation (3) articulates there is branch (18), a nozzle is arranged at the bottom end of the supporting rod (18), an external supply device is connected to the nozzle through a pipeline, a fifth motor (17) is fixedly arranged at the bottom end of the mounting rod (16), a threaded rod (19) is fixedly arranged on an output shaft of the fifth motor (17), an internal thread sleeve is connected to the threaded rod (19) in a threaded manner, a second connecting rod (20) is hinged to the internal thread sleeve, and the second connecting rod (20) is hinged to the supporting rod (18);
the fixture component comprises an inner gear ring (21), a first driving mechanism (27) for driving the inner gear ring (21) to rotate, third connecting rods (22), positioning rods (23), a guide sleeve (24), a gear (25), a double-sided gear ring (26) and a second driving mechanism (28) for driving the double-sided gear ring (26) to rotate, wherein the inner gear ring (21) is fixed on an outer ring of the upper surface of the workbench (3), the first driving mechanism (27) for driving the inner gear ring (21) is installed on one side of the inner gear ring (21) on the workbench (3), a plurality of third connecting rods (22) are annularly and hinged on the top surface of the inner gear ring (21) at intervals, one ends, far away from the inner gear ring (21), of the third connecting rods (22) are hinged with the positioning rods (23), one ends, far away from the third connecting rods (22), of the positioning rods (23) are movably penetrated with positioning heads, and springs are fixedly connected between one ends, located in the positioning rods (23), and the positioning heads, a guide sleeve (24) is sleeved outside the positioning rod (23), the guide sleeve (24) is rotatably mounted on the workbench (3) through a rotating shaft, a gear (25) is fixedly mounted on the rotating shaft, a double-faced gear ring (26) is arranged on the outer side of the rotating shaft, the double-faced gear ring (26) is meshed with the gear (25), and a second driving mechanism (28) for driving the double-faced gear ring (26) to rotate is fixedly mounted on one side, located on the double-faced gear ring (26), of the workbench (3); the first driving mechanism (27) and the second driving mechanism (28) are identical in structure and comprise a driving motor and a driving wheel.
2. The plasma nano-coating equipment according to claim 1, wherein the moving and feeding mechanism comprises a screw rod (5), a second motor (4) and a first mounting seat (6), the screw rod (5) is rotatably mounted at the top of the frame (1), the second motor (4) for driving the screw rod (5) to rotate is fixedly mounted on the frame (1), the first mounting seat (6) is connected to the screw rod (5) in a threaded manner, the first mounting seat (6) is slidably connected with the top of the frame (1), and the electric push rod (7) is vertically and fixedly mounted on the first mounting seat (6).
3. The plasma nano-coating equipment as claimed in claim 2, wherein the reciprocating driving mechanism comprises a fourth motor (10), a rotary table (11) and a first connecting rod (12), the fourth motor (10) is fixed at one end of the lower surface of the mounting plate (9), the rotary table (11) is fixedly installed on an output shaft of the fourth motor (10), the first connecting rod (12) is hinged to the outer ring of the end surface of the rotary table (11), and one end, far away from the rotary table (11), of the first connecting rod (12) is hinged to the second mounting seat (14).
4. The plasma nano-coating device according to claim 1, wherein the bottom of the frame (1) is uniformly and symmetrically fixedly provided with supporting legs, and the bottom ends of the supporting legs are provided with rollers.
5. The plasma nano-coating device according to claim 1, characterized in that a first motor (2) is fixedly arranged on the frame (1) below the workbench (3), and an output shaft of the first motor (2) is fixedly connected with the workbench (3).
6. Use of the plasma nano-coating device according to any one of claims 1 to 5, wherein the plasma nano-coating device is used in the fields of machining and automotive.
CN202011154515.9A 2020-10-26 2020-10-26 Plasma nano-coating equipment and application Active CN112281121B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011154515.9A CN112281121B (en) 2020-10-26 2020-10-26 Plasma nano-coating equipment and application

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011154515.9A CN112281121B (en) 2020-10-26 2020-10-26 Plasma nano-coating equipment and application

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CN112281121A CN112281121A (en) 2021-01-29
CN112281121B true CN112281121B (en) 2022-01-11

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Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6841746B2 (en) * 2017-10-16 2021-03-10 石塚硝子株式会社 Coating equipment
CN208071800U (en) * 2018-02-10 2018-11-09 上饶市永盛光学有限公司 A kind of efficient optical vacuum coating machine
CN208869506U (en) * 2018-08-27 2019-05-17 杭州锦上行镜业有限公司 A kind of spray-painting plant of automobile rear view mirror lens
CN210787913U (en) * 2019-07-29 2020-06-19 东莞市瑞泓实业有限公司 Spraying system in automobile accessory coating production line
CN110615620A (en) * 2019-08-23 2019-12-27 贾绍辉 Curved surface glass coating device
CN210875972U (en) * 2019-10-30 2020-06-30 广东东华光电科技有限公司 A shower nozzle for cell-phone coating film device

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