CN112266167A - Based on Ho3+Manufacturing method of ion-doped ZBLAN glass material, glass microsphere and microsphere laser - Google Patents

Based on Ho3+Manufacturing method of ion-doped ZBLAN glass material, glass microsphere and microsphere laser Download PDF

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CN112266167A
CN112266167A CN202011156422.XA CN202011156422A CN112266167A CN 112266167 A CN112266167 A CN 112266167A CN 202011156422 A CN202011156422 A CN 202011156422A CN 112266167 A CN112266167 A CN 112266167A
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microsphere
zblan glass
doped
laser
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王鹏飞
赵海燕
王顺宾
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Shenzhen University
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/32Non-oxide glass compositions, e.g. binary or ternary halides, sulfides or nitrides of germanium, selenium or tellurium
    • C03C3/325Fluoride glasses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/10Forming beads
    • C03B19/1005Forming solid beads
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/02Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
    • C03B37/022Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from molten glass in which the resultant product consists of different sorts of glass or is characterised by shape, e.g. hollow fibres, undulated fibres, fibres presenting a rough surface
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/10Non-chemical treatment
    • C03B37/14Re-forming fibres or filaments, i.e. changing their shape
    • C03B37/15Re-forming fibres or filaments, i.e. changing their shape with heat application, e.g. for making optical fibres
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C12/00Powdered glass; Bead compositions
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C13/00Fibre or filament compositions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06708Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06745Tapering of the fibre, core or active region
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094049Guiding of the pump light
    • H01S3/094053Fibre coupled pump, e.g. delivering pump light using a fibre or a fibre bundle

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Abstract

The invention discloses a method based on Ho3+A manufacturing method of an ion-doped ZBLAN glass material, glass microspheres and a microsphere laser relates to the technical field of microcavity lasers. Particularly discloses a Ho3+An ion-doped ZBLAN glass material, the molar composition of the glass material being represented by the formula: 53ZrF4‑19BaF2‑4LaF3‑3AlF320NaF and doping Ho with a concentration of 1 mol%3+And ions, wherein the sum of the mole percentages of the components is 100%. In addition, also discloses a Ho3+Preparation method of ion-doped ZBLAN glass microsphere and Ho-based glass microsphere3+A method for the production and regulation of ion-doped ZBLAN glass microsphere lasers. The invention has the advantages of low threshold value, narrow line width and the like, and the preparation method is simple, and can realize the miniaturization and integration of the 2 mu m wave band laser. The 2-micron-band near-infrared laser can be applied to the fields of quantum communication, high-sensitivity sensing, integrated optics and the like.

Description

Based on Ho3+Manufacturing method of ion-doped ZBLAN glass material, glass microsphere and microsphere laser
Technical Field
The invention relates to the technical field of microcavity lasers, in particular to a laser based on Ho3+Ion-doped ZBLAN glass material, glass microsphere and microsphere laser.
Background
In recent years, human eye safe waveband lasers with the wavelength of about 2.0 μm have attracted much attention in the fields of laser medical systems, coherent laser radars, laser imaging, mid-infrared remote sensing chemical sensing, mid-infrared laser pumping sources and the like. Common rare earth ions capable of generating 2.0 μm laser radiation include the thulium ion (Tm)3+) And holmium ion (Ho)3+)。Tm3+Ion Tm under excitation of common 793nm or 808nm semiconductor laser3+:3F43H6The transition process can generate laser light with a wave band of 2.0 μm. The scholars have already checked for Tm3+Doped 2.0 μm fiber lasers have been under considerable investigation.
Ho3+:5I75I8The transition can also generate laser light in the 2.0 μm band. However, Ho3+It cannot be pumped directly with the common 980 or 808nm commercial laser diodes. According to Ho3+Absorption spectra of ZBLAN-doped glasses, Ho3+Has strong absorption near 1150nm wave band, so the invention directly pumps Ho by using 1150nm Raman laser3+The ions gave laser light of 2.0 μm band.
Whispering Gallery Mode (WGM) microcavities of high quality factor (Q) due to their low QThe potential applications of threshold, narrow linewidth lasers and raman lasers have become a research hotspot of researchers. The micro-sphere cavity based on the WGM mode has strong light limiting capability and has a higher Q value than other micro-cavity structures, so that a laser with low threshold and high coupling efficiency can be realized. Currently, microsphere laser media materials are mainly focused on tellurate, phosphate, silica and fluoride glass materials. Compared with other glass materials, the zirconium fluoride-based glass has the advantages of low phonon energy, wide transmission window, high solubility to rare earth, large stimulated emission cross section and the like, thereby having high gain effect. In addition, due to the low glass transition temperature, microspheres can be prepared at relatively low temperatures. ZBLAN glass is a well-known zirconium fluoride based glass with a wide transparent window (lambda-0.22-6 μm) and low phonon energy (580 cm)-1) Have been widely used in fiber lasers and amplifiers, and exhibit excellent optical properties.
With the development of optical information technology, the size requirements for optical devices are increasing. The glass microsphere has wide development prospect in the fields of low-threshold laser emission, integrated optics, nonlinear optics, sensing, quantum communication and the like by virtue of extremely high Q value and extremely small mode volume characteristic.
Accordingly, those skilled in the art are working to develop a Ho-based3+The ion-doped ZBLAN glass microsphere laser can generate laser emission with a low threshold value in a 2 mu m wave band.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, the technical problem to be solved by the present invention is how to prepare a Ho-based catalyst3+A doped ZBLAN zirconium fluoride based glass microsphere laser to achieve a low threshold 2 μm near infrared band laser output.
In order to solve the above problems, the present invention proposes the following technical solutions:
in a first aspect, the present invention provides a Ho-based method3+An ion-doped ZBLAN glass material having the formula, expressed in terms of mole percent composition: 53ZrF4-19 BaF2-4 LaF3-3 AlF320NaF and doping Ho with a concentration of 1 mol%3+And ions, wherein the sum of the mole percentages of the components is 100%.
Further, the Ho3+Ion by HoF3The form is doped.
In a second aspect, the present invention provides a Ho3+The preparation method of the ion-doped ZBLAN glass microspheres comprises the following steps:
step 1, chemical formula 53ZrF expressed by mole percentage composition4-19 BaF2-4 LaF3-3 AlF320NaF and doping Ho with a concentration of 1 mol%3+Ion, calculating the mass ratio of the high-purity raw materials, weighing, grinding in an agate mortar, and fully and uniformly mixing;
step 2, pouring the uniformly mixed raw materials into a platinum crucible, melting at 800-900 ℃, and preserving heat for 1-3 hours;
step 3, pouring the molten glass on a preheated copper plate, drawing the molten glass from the molten glass, and cooling to prepare Ho3+Ion-doped ZBLAN glass fibers;
step 4, heating the Ho by a ceramic heater3+End of ion-doped ZBLAN glass fiber prepared as Ho3+Ion-doped ZBLAN glass microspheres.
Further, Ho in the step 13+Ion by HoF3The form is doped.
Further, Ho prepared in the step 43+The diameter of the ion-doped ZBLAN glass microspheres ranged from 40 to 60 μm.
In a third aspect, the invention provides a method based on Ho3+The preparation method of the microsphere laser of the ion-doped ZBLAN glass microsphere comprises the following steps:
step 1, tapering a coupling area of a single mode fiber to obtain a micro-nano fiber, wherein the diameter of a taper body is 1-2 mu m;
step 2, connecting one end of the single-mode optical fiber with a pumping light source, and connecting the other end of the single-mode optical fiber with a spectrum analyzer;
step 3, mixing the micro-nano optical fiber and Ho3+Ion-dopedThe ZBLAN glass microsphere is in a near contact state, and pumping light is coupled into the ZBLAN glass microsphere by utilizing an evanescent field generated by the pumping light passing through the micro-nano optical fiber.
In the invention, the micro-nano optical fiber is obtained by tapering, belongs to a part of a single-mode optical fiber and is integrated with the single-mode optical fiber; since the ends of the single-mode fiber are connected to the instrument (device), the coupling region needs to avoid the regions at the ends.
Further, the taper length of the micro-nano optical fiber is 2-6 mm.
The method can control the laser coupling area only by limiting the cone diameter and the cone length of the micro-nano optical fiber because the tapering modes are different and the cone waist length and the diameter of the micro-nano optical fiber are different. The size of the waist is not limited in the present invention.
Further, in the step 2, the pumping light source is a 1150nm raman laser.
The near contact state refers to the cone body and Ho of the micro-nano optical fiber3+The distance of the ion-doped ZBLAN glass microspheres was 0-2 μm.
The invention also provides a method based on Ho3+Method for tuning a microsphere laser of ion-doped ZBLAN glass microspheres, the tuning method comprising the steps of:
step 1, mixing the micro-nano optical fiber and Ho3+Coupling the ion-doped ZBLAN glass microspheres, and adjusting the coupling position to ensure that the cone body of the micro-nano optical fiber is coupled with Ho3+The ion-doped ZBLAN glass microspheres are in a near contact state;
and 2, improving the pumping power of the 1150nm laser to 3.36mW to obtain single-mode laser with a wave band of 2 microns.
In practical application, a single-mode laser with a linewidth of 0.12nm at 2.067nm can be observed at a pump power of 3.36 mW.
It can be understood that the power value of 3.36mW is the lowest threshold power of the laser, and as the pump power continues to increase, the output power of the 2 μm band laser also increases linearly.
Compared with the prior art, the invention can achieve the following technical effects:
the invention provides a method based on Ho3+The ion-doped ZBLAN glass material has excellent optical properties.
The invention provides a method based on Ho3+Method for producing ion-doped ZBLAN glass microspheres from Ho-based glass3+The ion-doped ZBLAN glass material is obtained by melting one end of glass fiber into microspheres by a ceramic heater heating method, and is convenient to process.
The invention provides a method based on Ho3+The coupling mode of the microsphere laser of the ion-doped ZBLAN glass microsphere adopts micro-nano fiber coupling, pump light is coupled into the microsphere by utilizing an evanescent field generated by transmitting light source laser to a micro-nano fiber part, the coupling efficiency is high, and the preparation cost is low. The invention provides a method based on Ho3+The microsphere laser of the ion-doped ZBLAN glass microsphere has low threshold value, narrow line width and simple structure, and can realize the miniaturization and integration of a 2 mu m waveband laser.
The 2-micron near-infrared band laser can be applied to the fields of quantum communication, high-sensitivity sensing, integrated optics and the like.
Drawings
FIG. 1 is a schematic optical path diagram of a microsphere laser according to a preferred embodiment of the present invention;
FIG. 2 is a 2 μm band single mode laser emission spectrum of a microsphere laser according to a preferred embodiment of the present invention (the inner diagram is an enlarged detail);
FIG. 3 is a slope efficiency spectrum of a 2 μm band single mode laser of a microsphere laser according to a preferred embodiment of the present invention.
Reference numerals
1-1150nm Raman laser; 2-spectrum analyzer; 3-micro nano optical fiber; 4-single mode fiber; 5-Ho3+Ion-doped ZBLAN glass microspheres; 6-CCD camera; 7-notebook computer.
Detailed Description
The technical solutions in the embodiments will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, wherein like reference numerals represent like elements in the drawings. It is apparent that the embodiments to be described below are only a part of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
It is also to be understood that the terminology used in the description of the embodiments of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the embodiments of the invention. As used in the description of embodiments of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
Understandably, because Ho3+) The ZBYA glass materials obtained varied in their properties depending on the amount of doping. Within the scope of the present application, Ho3+The amount of the surfactant is preferably 1.0 mol%.
Example 1:
1. preparation of Ho doped3+ZBLAN zirconium fluoride based glass and glass fiber:
(1) high-purity raw materials are mixed according to the proportion of 53ZrF4-19 BaF2-4 LaF3-3 AlF3-20 NaF-1 HoF3Weighing, namely putting the weighed raw materials into an agate mortar for grinding, and fully mixing the raw materials;
(2) then the mixed raw materials are put into a platinum crucible, covered with a cover for protection, and placed in a high-temperature furnace of a glove box for heat preservation at 850 ℃ for 2 hours;
(3) pouring molten glass onto a preheated copper plate at 240 deg.C, drawing from molten glass, cooling and making into Ho3+Ion-doped ZBLAN glass fibers;
2. heating the end of the ZBLAN glass fiber by a ceramic heater to melt into glass microspheres:
the ZBLAN glass fiber was brought close to the ceramic heater (temperature about 1300 ℃ C.), and the ends of the glass fiber were shrunk by heating to prepare glass microspheres of a connecting rod, the diameter of the ZBLAN microspheres in this example being 47 μm, due to the surface tension.
3. And tapering the coupling area of the single mode fiber 4 to about 1.5 mu m in diameter to obtain the micro-nano fiber 3. As shown in fig. 1, one end of a single-mode optical fiber 4 is connected to a 1150nm raman laser 1, and the other end of the single-mode optical fiber 4 is connected to a spectrum analyzer 2.
4. Will Ho3+Coupling the ion-doped ZBLAN glass microspheres 5 with the micro-nano optical fiber 3, and adjusting the coupling position to enable the two to be in a near contact state (0-2 μm);
5. at Ho3+ A CCD camera 6 is fixed above the ion-doped ZBLAN glass microsphere 5, the CCD camera 6 is connected with a notebook computer 7, and the coupled position image is observed through computer software.
6. The pumping power of the 1150nm Raman laser 1 is increased to 3.36mW, single-mode laser at 2.067nm is observed on a computer, and the spectrogram and the slope efficiency graph are shown in FIGS. 2 and 3.
In the above embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
While the invention has been described with reference to specific embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. Ho-based method3+An ion-doped ZBLAN glass material, characterized in that the ZBLAN glass material is prepared byThe mole percent composition is represented by the formula: 53ZrF4-19 BaF2-4 LaF3-3 AlF320NaF and doping Ho with a concentration of 1 mol%3+And ions, wherein the sum of the mole percentages of the components is 100%.
2. The Ho-based of claim 13+An ion-doped ZBLAN glass material, characterized in that the Ho3+Ion by HoF3The form is doped.
3. Ho3+The preparation method of the ion-doped ZBLAN glass microspheres is characterized by comprising the following steps:
step 1, chemical formula 53ZrF expressed by mole percentage composition4-19 BaF2-4 LaF3-3 AlF320NaF and doping Ho with a concentration of 1 mol%3+Ion, calculating the mass ratio of the high-purity raw materials, weighing, grinding in an agate mortar, and fully and uniformly mixing;
step 2, pouring the uniformly mixed raw materials into a platinum crucible, melting at 800-900 ℃, and preserving heat for 1-3 hours;
step 3, pouring the molten glass on a preheated copper plate, drawing the molten glass from the molten glass, and cooling to prepare Ho3+Ion-doped ZBLAN glass fibers;
step 4, heating the Ho by a ceramic heater3+End of ion-doped ZBLAN glass fiber prepared as Ho3+Ion-doped ZBLAN glass microspheres.
4. The Ho of claim 33+A method for producing ion-doped ZBLAN glass microspheres, characterized in that Ho in the step 13+Ion by HoF3The form is doped.
5. The Ho of claim 33+A method for preparing ion-doped ZBLAN glass microspheres, wherein Ho prepared in the step 43+Ion-doped ZBLAN glass microThe sphere diameter ranges from 40 to 60 μm.
6. Ho-based method3+The preparation method of the microsphere laser of the ion-doped ZBLAN glass microsphere is characterized by comprising the following steps of:
step 1, tapering a coupling area of a single mode fiber to obtain a micro-nano fiber, wherein the diameter of a taper body is 1-2 mu m;
step 2, connecting one end of the single-mode optical fiber with a pumping light source, and connecting the other end of the single-mode optical fiber with a spectrum analyzer;
step 3, mixing the micro-nano optical fiber and Ho3+The ion-doped ZBLAN glass microsphere is in a near contact state, and pumping light is coupled into the ZBLAN glass microsphere by utilizing an evanescent field generated by the pumping light passing through the micro-nano optical fiber.
7. A Ho-based according to claim 63+The preparation method of the microsphere laser of the ion-doped ZBLAN glass microsphere is characterized in that in the step 2, a pumping light source is a 1150nm Raman laser.
8. A Ho-based according to claim 63+The preparation method of the microsphere laser of the ion-doped ZBLAN glass microsphere is characterized in that the near contact state refers to the cone body and Ho of the micro-nano optical fiber3+The distance of the ion-doped ZBLAN glass microspheres was 0-2 μm.
9. A Ho-based according to claim 63+The preparation method of the microsphere laser of the ion-doped ZBLAN glass microsphere is characterized in that the taper length of the micro-nano optical fiber is 2-6 mm.
10. Ho-based method3+Method for tuning a microsphere laser of ion-doped ZBLAN glass microspheres, characterized in that the tuning method comprises the steps of:
step 1, mixing the micro-nano optical fiber and Ho3+Coupling the ion-doped ZBLAN glass microspheres, and adjusting the coupling position to ensure that the cone body of the micro-nano optical fiber is coupled with Ho3+The ion-doped ZBLAN glass microspheres are in a near contact state;
and 2, improving the pumping power of a 1150nm laser to obtain the 2-micron laser with the threshold value of 3.36 mW.
CN202011156422.XA 2020-10-26 2020-10-26 Based on Ho3+Manufacturing method of ion-doped ZBLAN glass material, glass microsphere and microsphere laser Pending CN112266167A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114486766A (en) * 2022-02-09 2022-05-13 深圳大学 Optical fiber humidity sensor with temperature calibration function

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103022869A (en) * 2012-12-31 2013-04-03 电子科技大学 Passive mode-locking guide gain modulated dual-wavelength pulse optical fiber laser
CN109768465A (en) * 2019-03-14 2019-05-17 哈尔滨工程大学 One kind being based on Tm3+The fluoride glass microsphere laser device of doping

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103022869A (en) * 2012-12-31 2013-04-03 电子科技大学 Passive mode-locking guide gain modulated dual-wavelength pulse optical fiber laser
CN109768465A (en) * 2019-03-14 2019-05-17 哈尔滨工程大学 One kind being based on Tm3+The fluoride glass microsphere laser device of doping

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114486766A (en) * 2022-02-09 2022-05-13 深圳大学 Optical fiber humidity sensor with temperature calibration function

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Application publication date: 20210126