CN112260058A - Single-mode high-power semiconductor laser - Google Patents

Single-mode high-power semiconductor laser Download PDF

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Publication number
CN112260058A
CN112260058A CN202011152194.9A CN202011152194A CN112260058A CN 112260058 A CN112260058 A CN 112260058A CN 202011152194 A CN202011152194 A CN 202011152194A CN 112260058 A CN112260058 A CN 112260058A
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Prior art keywords
waveguide
multimode interference
mode
semiconductor laser
reflecting surface
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CN202011152194.9A
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Chinese (zh)
Inventor
刘安金
张靖
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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Priority to CN202011152194.9A priority Critical patent/CN112260058A/en
Publication of CN112260058A publication Critical patent/CN112260058A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1003—Waveguide having a modified shape along the axis, e.g. branched, curved, tapered, voids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/065—Mode locking; Mode suppression; Mode selection ; Self pulsating
    • H01S5/0651—Mode control
    • H01S5/0653—Mode suppression, e.g. specific multimode
    • H01S5/0654—Single longitudinal mode emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1003—Waveguide having a modified shape along the axis, e.g. branched, curved, tapered, voids
    • H01S5/1014—Tapered waveguide, e.g. spotsize converter

Abstract

A semiconductor laser comprising: the multimode interference waveguide comprises a first single-mode waveguide (1), a first tapered waveguide (2), a multimode interference waveguide (3), a second tapered waveguide (4), a second single-mode waveguide (5), a third tapered waveguide (6) and a first multimode interference reflector (7) which are connected in sequence; wherein, the end face (10) of the first single-mode waveguide (1) and the first multimode interference reflector (7) can form a laser cavity and are used as the reflector of the laser cavity; wherein the first multimode interference mirror (7) is formed by an etching process. The semiconductor laser further includes: and the grating (8) is arranged on the first single-mode waveguide (1), the grating (8) and the first multi-mode interference reflector (7) can form a laser cavity and serve as a reflector of the laser cavity, and the semiconductor laser outputs laser through an end face (10). The semiconductor laser may be monolithically integrated with one or more photonic integrated chips.

Description

Single-mode high-power semiconductor laser
Technical Field
The invention relates to the technical field of semiconductor optoelectronic devices, in particular to a single-mode high-power semiconductor laser.
Background
The semiconductor laser is widely applied to the fields of optical communication, optical interconnection, laser radar, material processing, intelligent manufacturing, consumer electronics and the like, and is an essential light source for the modern information society. In particular, single-mode high-power semiconductor lasers have special applications and are of importance. Generally, if there is no special mode selection structure in a semiconductor laser (such as a fabry-perot laser), multiple longitudinal modes are output. In addition, in order to meet the high beam quality requirement of the semiconductor laser, the light emitting area of the semiconductor laser is limited, and the single-mode output power of the semiconductor laser is limited. To achieve high power output of a semiconductor laser, it is effective to increase the lateral size of the semiconductor laser, i.e., the stripe width of the semiconductor laser, but this method introduces a multi-sided die, which deteriorates the beam quality of the semiconductor laser.
At present, the related art proposes a multi-mode interference waveguide (abbreviated as MMI) semiconductor laser, which increases the area of an active region by introducing an MMI region and realizes a single-side-mode high-power semiconductor laser by adopting single-mode waveguide output. However, MMI semiconductor lasers with such structures usually require cleavage to implement end mirrors to form laser cavities, and are difficult to be monolithically integrated with photonic integrated chips.
Disclosure of Invention
Technical problem to be solved
In view of the prior art, the present invention proposes a single-mode high-power semiconductor laser, which is used to at least partially solve the above technical problems.
(II) technical scheme
One aspect of the present invention provides a semiconductor laser including: the first single mode waveguide, the first tapered waveguide, the multi-mode interference waveguide, the second tapered waveguide, the second single mode waveguide, the third tapered waveguide and the first multi-mode interference reflector are connected in sequence; the end face of the first single-mode waveguide and the first multimode interference reflector can form a laser cavity and serve as a reflector of the laser cavity; wherein the first multimode interference mirror is formed by an etching process.
Optionally, the semiconductor laser further comprises: and the grating is arranged on the first single-mode waveguide, the grating and the first multi-mode interference reflector can form a laser cavity and serve as a reflector of the laser cavity, and the semiconductor laser outputs laser through the end face.
Optionally, the semiconductor laser further comprises: the second multimode interference reflector is connected with the sixth tapered waveguide through the first single-mode waveguide, and is also sequentially connected with a seventh tapered waveguide and a fourth single-mode waveguide; the first multimode interference reflector is also connected with the eighth conical waveguide and the fifth single-mode waveguide in sequence.
Optionally, the first, second, fourth, and fifth single-mode waveguides include a single-side mode and a single transverse mode, and the first, second, fourth, and fifth single-mode waveguides are active waveguides or passive waveguides.
Optionally, the connection positions of the first tapered waveguide and the second tapered waveguide with the multimode interference waveguide are self-reflection points of the multimode interference waveguide, the connection positions of the third tapered waveguide and the eighth tapered waveguide with the first multimode interference reflector are self-reflection points of the first multimode interference reflector, and the connection positions of the sixth tapered waveguide and the seventh tapered waveguide with the second multimode interference reflector are self-reflection points of the second multimode interference reflector.
Optionally, the first multimode interference reflector comprises a first reflecting surface and a second reflecting surface, the first reflecting surface and the second reflecting surface form an angle of 45 ° with a central axis of the first multimode interference reflector, and an intersection of the first reflecting surface and the second reflecting surface is located on the central axis of the first multimode interference reflector; the second multimode interference reflector comprises a third reflecting surface and a fourth reflecting surface, the third reflecting surface and the fourth reflecting surface form an angle of 45 degrees with the central axis of the second multimode interference reflector, and the intersection of the third reflecting surface and the fourth reflecting surface is positioned on the central axis of the second multimode interference reflector.
Optionally, the multimode interference waveguide is an active waveguide.
Optionally, the length and width of the multi-mode interference waveguide satisfy a self-image condition of the multi-mode interference waveguide.
Optionally, the first multimode interference mirror and the second multimode interference mirror are active waveguides or passive waveguides, and the first tapered waveguide, the second tapered waveguide, the third tapered waveguide, the sixth tapered waveguide, the seventh tapered waveguide and the eighth tapered waveguide are active waveguides or passive waveguides.
Optionally, the grating is a grating introduced on the surface of the first single-mode waveguide or a buried grating introduced in the first single-mode waveguide, wherein the grating periphery of the gratingWith period lambda ═ lambdaB/(2neff) Wherein λ isBIs the Bragg wavelength, neffIs the effective refractive index.
Optionally, the semiconductor laser comprises at least two cascaded multimode interference waveguides.
(III) advantageous effects
The invention provides a single-mode high-power semiconductor laser, which at least has the following beneficial effects:
(1) the multimode interference reflector is adopted to replace one reflecting end face of a laser cavity of a traditional MMI semiconductor laser, and the multimode interference reflector used as the reflector of the semiconductor laser is formed through an etching process, so that the process that the cavity surface reflector is manufactured by the traditional MMI semiconductor laser through a cleavage process is avoided, and the semiconductor laser can be used for a laser source of a monolithic integrated photonic chip and can also be used in the fields of laser radar, laser illumination, laser pumping, material processing and the like.
(2) By arranging the grating, the end face cleavage of the semiconductor laser is not needed, and the grating and the multimode interference reflector are utilized to construct a semiconductor laser cavity, so that the single longitudinal mode high-power output is realized, and the semiconductor laser can be monolithically integrated with a waveguide type photonic integrated chip.
(3) Furthermore, two reflecting end faces of a laser cavity of a traditional MMI semiconductor laser are replaced by the multimode interference reflector, and the two multimode interference reflectors are respectively provided with a tapered waveguide and a single-mode waveguide for inputting or outputting laser, so that the monolithic integration of the semiconductor laser and a plurality of photonic integrated chips is realized.
Drawings
Fig. 1 schematically shows a structural view of a single-mode high-power semiconductor laser provided by a first embodiment of the present invention;
fig. 2 schematically shows a structural view of a single-mode high-power semiconductor laser provided by a second embodiment of the present invention;
fig. 3 is a schematic diagram showing a structure of a single-mode high-power semiconductor laser provided by a third embodiment of the present invention;
fig. 4 schematically shows a structure diagram of a single-mode high-power semiconductor laser provided by a fourth embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
The invention provides a single-mode high-power MMI semiconductor laser, wherein a multimode interference reflector of the semiconductor laser is formed by an etching process, and the semiconductor laser can be applied to the fields of photonic integrated chips, laser radars, laser lighting, laser pumping, material processing and the like.
Fig. 1 schematically shows a structure diagram of a single-mode high-power semiconductor laser provided by a first embodiment of the present invention.
As shown in fig. 1, the single-mode high-power semiconductor laser includes: the laser comprises a first single-mode waveguide 1, a first tapered waveguide 2, a multi-mode interference waveguide 3, a second tapered waveguide 4, a second single-mode waveguide 5, a third tapered waveguide 6 and a first multi-mode interference reflector 7 which are connected in sequence, wherein an end face 10 of the first single-mode waveguide 1 and the first multi-mode interference reflector 7 can form a laser cavity, the end face 10 of the first single-mode waveguide 1 and the first multi-mode interference reflector 7 can serve as reflectors of the laser cavity, and the first multi-mode interference reflector 7 is formed through an etching process.
In the embodiment of the present invention, each of the first single-mode waveguide 1 and the second single-mode waveguide 5 includes a single-side mode and a single transverse mode, and the first single-mode waveguide 1 and the second single-mode waveguide 5 are active waveguides or passive waveguides.
In the embodiment of the invention, the first tapered waveguide 2, the second tapered waveguide 4 and the third tapered waveguide 6 are active waveguides or passive waveguides.
In the embodiment of the present disclosure, the connection positions of the first tapered waveguide 2 and the second tapered waveguide 4 and the multimode interference waveguide 3 are self-imaging points of the multimode interference waveguide 3, the multimode interference waveguide 3 may be, for example, an active waveguide, and the length and the width of the multimode interference waveguide 3 satisfy the self-imaging condition of the multimode interference waveguide.
In the embodiment of the present disclosure, the connection position of the third tapered waveguide 6 and the first multimode interference mirror 7 is the self-imaging point of the first multimode interference mirror 7. The first multimode interference reflector 7 comprises a first reflecting surface 70 and a second reflecting surface 71, the first reflecting surface 70 and the second reflecting surface 71 form an angle of 45 degrees with the central axis of the first multimode interference reflector 7, and the intersection of the first reflecting surface 70 and the second reflecting surface 71 is positioned on the central axis of the first multimode interference reflector 7. The first multimode interference mirror 7 is an active waveguide or a passive waveguide.
Fig. 2 schematically shows a structure diagram of a single-mode high-power semiconductor laser provided by a second embodiment of the present invention.
As shown in fig. 2, the single-mode high-power semiconductor laser includes: the laser comprises a first single-mode waveguide 1, a first tapered waveguide 2, a multi-mode interference waveguide 3, a second tapered waveguide 4, a second single-mode waveguide 5, a third tapered waveguide 6 and a first multi-mode interference reflector 7 which are sequentially connected, wherein a grating 8 is further arranged on the first single-mode waveguide 1, the grating 8 and the first multi-mode interference reflector 7 can form a laser cavity and serve as a reflector of the laser cavity, and the semiconductor laser outputs laser through an end face 10 of the first single-mode waveguide 1. Wherein the first multimode interference mirror 7 is formed by an etching process.
In the embodiment of the present invention, each of the first single-mode waveguide 1 and the second single-mode waveguide 5 includes a single-side mode and a single transverse mode, and the first single-mode waveguide 1 and the second single-mode waveguide 5 are active waveguides or passive waveguides.
In the embodiment of the invention, the first tapered waveguide 2, the second tapered waveguide 4 and the third tapered waveguide 6 are active waveguides or passive waveguides.
In the embodiment of the present disclosure, the connection positions of the first tapered waveguide 2 and the second tapered waveguide 4 and the multimode interference waveguide 3 are self-imaging points of the multimode interference waveguide 3, the multimode interference waveguide 3 may be, for example, an active waveguide, and the length and the width of the multimode interference waveguide 3 satisfy the self-imaging condition of the multimode interference waveguide.
In the embodiment of the present disclosure, the connection position of the third tapered waveguide 6 and the first multimode interference mirror 7 is the self-imaging point of the first multimode interference mirror 7. The first multimode interference reflector 7 comprises a first reflecting surface 70 and a second reflecting surface 71, the first reflecting surface 70 and the second reflecting surface 71 form an angle of 45 degrees with the central axis of the first multimode interference reflector 7, and the intersection of the first reflecting surface 70 and the second reflecting surface 71 is positioned on the central axis of the first multimode interference reflector 7. The first multimode interference mirror 7 is an active waveguide or a passive waveguide.
In the embodiment of the present invention, the grating 8 is a grating introduced on the surface of the first single-mode waveguide 1, or a buried grating is introduced in the first single-mode waveguide 1, and the grating 8 is used for providing feedback and selecting a longitudinal mode. Wherein, the grating period of the grating 8 is lambda ═ lambdaB/(2neff) Wherein λ isBIs the Bragg wavelength, neffIs the effective refractive index.
Fig. 3 schematically shows a structure diagram of a single-mode high-power semiconductor laser provided by a third embodiment of the present invention.
As shown in fig. 3, the single-mode high-power semiconductor laser includes: the second multimode interference reflector 20, the sixth tapered waveguide 19, the first single-mode waveguide 1, the first tapered waveguide 2, the multimode interference waveguide 3, the second tapered waveguide 4, the second single-mode waveguide 5, the third tapered waveguide 6 and the first multimode interference reflector 7 are connected in sequence. The second multimode interference reflector 20 is further sequentially connected with a seventh tapered waveguide 23 and a fourth single-mode waveguide 24, the first multimode interference reflector 7 is further sequentially connected with an eighth tapered waveguide 28 and a fifth single-mode waveguide 27, an end face 25 of the fourth single-mode waveguide 24 and an end face 26 of the fifth single-mode waveguide 27 can be respectively connected with the photonic integrated chip, and monolithic integration of the semiconductor laser and the multiple photonic integrated chips is achieved. Wherein the second multi-mode interference mirror 20 and the first multi-mode interference mirror 7 can form a laser cavity, the second multi-mode interference mirror 20 and the first multi-mode interference mirror 7 can be used as the mirrors of the laser cavity, and wherein the first multi-mode interference mirror 7 and the second multi-mode interference mirror 20 are formed by an etching process.
In the embodiment of the present invention, each of the first single-mode waveguide 1, the second single-mode waveguide 5, the fourth single-mode waveguide 24, and the fifth single-mode waveguide 27 includes a single-side mode and a single transverse mode, and the first single-mode waveguide 1, the second single-mode waveguide 5, the fourth single-mode waveguide 24, and the fifth single-mode waveguide 27 are active waveguides or passive waveguides.
In the embodiment of the present invention, the first tapered waveguide 2, the second tapered waveguide 4, the third tapered waveguide 6, the sixth tapered waveguide 19, the seventh tapered waveguide 23, and the eighth tapered waveguide 28 are active waveguides or passive waveguides.
In the embodiment of the present disclosure, the connection positions of the first tapered waveguide 2 and the second tapered waveguide 4 and the multimode interference waveguide 3 are self-imaging points of the multimode interference waveguide 3, the multimode interference waveguide 3 may be, for example, an active waveguide, and the length and the width of the multimode interference waveguide 3 satisfy the self-imaging condition of the multimode interference waveguide.
In the embodiment of the present disclosure, the connection positions of the third tapered waveguide 6 and the eighth tapered waveguide 28 with the first multimode interference mirror 7 are self-imaging points of the first multimode interference mirror 7. The first multimode interference reflector 7 comprises a first reflecting surface 70 and a second reflecting surface 71, the first reflecting surface 70 and the second reflecting surface 71 form an angle of 45 degrees with the central axis of the first multimode interference reflector 7, and the intersection of the first reflecting surface 70 and the second reflecting surface 71 is positioned on the central axis of the first multimode interference reflector 7. The first multimode interference mirror 7 is an active waveguide or a passive waveguide.
In the embodiment of the present disclosure, the connection positions of the sixth tapered waveguide 19 and the seventh tapered waveguide 23 to the second multimode interference mirror 20 are self-image points of the second multimode interference mirror 20. The second multimode interference reflector 20 comprises a third reflecting surface 21 and a fourth reflecting surface 22, the third reflecting surface 21 and the fourth reflecting surface 22 form an angle of 45 degrees with the central axis of the second multimode interference reflector 20, and the intersection of the third reflecting surface 21 and the fourth reflecting surface 22 is positioned on the central axis of the second multimode interference reflector 20. The second multimode interference mirror 20 is an active waveguide or a passive waveguide.
Further, the semiconductor lasers provided in the above-described first, second, and third embodiments may include at least two cascaded multimode interference waveguides 3.
The semiconductor lasers provided in the first, second, and third embodiments are further described with reference to specific examples.
Fig. 4 schematically shows a structure diagram of a single-mode high-power semiconductor laser provided by a fourth embodiment of the present invention.
As shown in fig. 4, the semiconductor laser employs a cascade of two multimode interference waveguides (MMIs). The first single-mode waveguide 1, the second single-mode waveguide 5 and the third single-mode waveguide 12 each include a single-side mode and a single transverse mode, and are InP-based passive waveguides. The first single-mode waveguide 1 longitudinally contains a multilayer structure (or photonic crystal) similar to a Bragg reflector to realize a near-circular output light spot. The end face 10 of the first single mode waveguide 1 is cleaved by a crystal face and is an output end face coated with an antireflection film to prevent optical feedback. The grating 8 is a first order grating introduced at the surface of the first single mode waveguide 1 for providing feedback and selecting the longitudinal mode. The multi-mode interference waveguide 3 is an active waveguide and contains InGaAsP quantum wells or AlGaInAs quantum wells. The multimode interference waveguide 3 is covered with a p-type electrode 9 for injecting current, and an n-type electrode is on the back of the multimode interference waveguide 3. The first tapered waveguide 2, the second tapered waveguide 4, the third tapered waveguide 6, the fourth tapered waveguide 11, and the fifth tapered waveguide 13 are InP-based passive waveguides. The first multimode interference reflector 7 is formed by etching an InP-based passive waveguide.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A semiconductor laser, comprising:
the multimode interference waveguide comprises a first single-mode waveguide (1), a first tapered waveguide (2), a multimode interference waveguide (3), a second tapered waveguide (4), a second single-mode waveguide (5), a third tapered waveguide (6) and a first multimode interference reflector (7) which are connected in sequence;
wherein the end face (10) of the first single mode waveguide (1) and the first multimode interference mirror (7) form a laser cavity and act as a mirror of the laser cavity;
wherein the first multimode interference mirror (7) is formed by an etching process.
2. A semiconductor laser as claimed in claim 1 further comprising:
and the grating (8) is arranged on the first single-mode waveguide (1), the grating (8) and the first multimode interference reflector (7) can form a laser cavity and serve as a reflector of the laser cavity, and the semiconductor laser outputs laser light through the end face (10).
3. A semiconductor laser as claimed in claim 1 further comprising:
a second multimode interference reflector (20) connected to the first single-mode waveguide (1) via a sixth tapered waveguide (19), the second multimode interference reflector (20) further connecting in sequence a seventh tapered waveguide (23) and a fourth single-mode waveguide (24);
wherein the second multimode interference mirror (20) is formed by an etching process;
the first multimode interference reflector (7) is also connected in sequence with an eighth tapered waveguide (28) and a fifth single-mode waveguide (27).
4. A semiconductor laser according to claim 3, characterized in that the first (1), the second (5), the fourth (24) and the fifth (27) single mode waveguides comprise a single side mode and a single transverse mode, the first (1), the second (5), the fourth (24) and the fifth (27) single mode waveguides being active or passive waveguides.
5. A semiconductor laser according to claim 3, characterized in that the connection positions of the first tapered waveguide (2) and the second tapered waveguide (4) to the multimode interference waveguide (3) are the self-reflection points of the multimode interference waveguide (3), the connection positions of the third tapered waveguide (6) and the eighth tapered waveguide (28) to the first multimode interference mirror (7) are the self-reflection points of the first multimode interference mirror (7), and the connection positions of the sixth tapered waveguide (19) and the seventh tapered waveguide (23) to the second multimode interference mirror (20) are the self-reflection points of the second multimode interference mirror (20).
6. A semiconductor laser according to claim 3, characterized in that the first multimode interference mirror (7) comprises a first reflecting surface (70) and a second reflecting surface (71), the first reflecting surface (70) and the second reflecting surface (71) making an angle of 45 ° with the central axis of the first multimode interference mirror (7), the intersection of the first reflecting surface (70) and the second reflecting surface (71) being located on the central axis of the first multimode interference mirror (7);
the second multimode interference reflector (20) comprises a third reflecting surface (21) and a fourth reflecting surface (22), the third reflecting surface (21) and the fourth reflecting surface (22) form an angle of 45 degrees with the central axis of the second multimode interference reflector (20), and the intersection of the third reflecting surface (21) and the fourth reflecting surface (22) is positioned on the central axis of the second multimode interference reflector (20).
7. A semiconductor laser according to claim 3, characterized in that the first (7) and the second (20) multimode interference mirrors are active or passive waveguides, and the first (2), the second (4), the third (6), the sixth (19), the seventh (23), the eighth (28) tapered waveguides are active or passive waveguides.
8. A semiconductor laser as claimed in claim 2 wherein the grating (8) is a grating introduced at the surface of the first single mode waveguide (1) or a buried grating introduced in the first single mode waveguide (1), wherein the grating period of the grating (8) is Λ ═ λ B/(2neff), wherein λ B is the bragg wavelength and neff is the effective refractive index.
9. The semiconductor laser according to any of claims 1 to 7, characterized in that the multi-mode interference waveguide (3) is an active waveguide, the length and width of the multi-mode interference waveguide (3) satisfying the self-image condition of the multi-mode interference waveguide.
10. A semiconductor laser according to any of claims 1 to 7, characterized in that it comprises at least two cascaded multimode interference waveguides (3).
CN202011152194.9A 2020-10-23 2020-10-23 Single-mode high-power semiconductor laser Pending CN112260058A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060274802A1 (en) * 2005-06-03 2006-12-07 Masahiro Aoki Semiconductor optical device and module using the same
CN103915758A (en) * 2014-03-26 2014-07-09 中国科学院上海微系统与信息技术研究所 Terahertz quantum cascade laser of multiple-mode interface structure and manufacturing method thereof
CN108169931A (en) * 2018-02-05 2018-06-15 中国科学院半导体研究所 A kind of tunable multiple-mode interfence speculum of on piece
CN108666864A (en) * 2018-03-26 2018-10-16 中国科学院半导体研究所 Hybrid integrated tunable laser and photon chip

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060274802A1 (en) * 2005-06-03 2006-12-07 Masahiro Aoki Semiconductor optical device and module using the same
CN103915758A (en) * 2014-03-26 2014-07-09 中国科学院上海微系统与信息技术研究所 Terahertz quantum cascade laser of multiple-mode interface structure and manufacturing method thereof
CN108169931A (en) * 2018-02-05 2018-06-15 中国科学院半导体研究所 A kind of tunable multiple-mode interfence speculum of on piece
CN108666864A (en) * 2018-03-26 2018-10-16 中国科学院半导体研究所 Hybrid integrated tunable laser and photon chip

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