CN112255781A - Trapezoidal broach, static broach driver and MEMS scanning mirror - Google Patents

Trapezoidal broach, static broach driver and MEMS scanning mirror Download PDF

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Publication number
CN112255781A
CN112255781A CN202011343335.5A CN202011343335A CN112255781A CN 112255781 A CN112255781 A CN 112255781A CN 202011343335 A CN202011343335 A CN 202011343335A CN 112255781 A CN112255781 A CN 112255781A
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China
Prior art keywords
comb
trapezoidal
array
teeth
comb teeth
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CN202011343335.5A
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Chinese (zh)
Inventor
郭俊兴
杜先鹏
金传广
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Suzhou Xiaoyou Intelligent Technology Co Ltd
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Suzhou Xiaoyou Intelligent Technology Co Ltd
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Priority to CN202011343335.5A priority Critical patent/CN112255781A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The invention discloses a trapezoidal comb tooth, wherein the width of the root part of the trapezoidal comb tooth is larger than that of the head part of the trapezoidal comb tooth, and the width of the trapezoidal comb tooth is monotonically reduced from the root part of the trapezoidal comb tooth to the head part of the trapezoidal comb tooth. The trapezoidal comb teeth are designed, the width of the root parts of the comb teeth is larger than that of the head parts of the comb teeth, and the rigidity of the root parts of the comb teeth can be greatly increased under the condition of keeping the average width of the comb teeth unchanged; under the condition that the size of a chip is fixed, compared with a rectangular comb tooth structure in the prior art, the trapezoidal comb tooth structure can greatly improve the driving torque of a comb tooth driver and increase the driving angle, or reduce the size of the chip, reduce the driving voltage, greatly improve the technical performance of the chip and reduce the cost of the chip.

Description

Trapezoidal broach, static broach driver and MEMS scanning mirror
Technical Field
The invention relates to the technical field of micro-optical-electro-mechanical systems, in particular to a trapezoidal comb, an MEMS scanning mirror and a preparation method thereof.
Background
The optical scanning technology is a regular operation scanning that an electric driver drives an optical element such as an optical mirror and an optical lens to move so as to realize a light beam or an imaging point, and has wide application in modern optical technologies, and becomes a key technology in the optical technologies. Particularly, for the laser technology, laser is generally a collimated beam, and laser scanning or pointing is required to be realized through a laser scanning mirror, so that laser scanning of a specific pattern and laser pointing in a specific direction are realized, and applications such as laser scanning, laser pointing, laser tracking, laser projection imaging, dynamic structured light generation, laser three-dimensional measurement, laser 3D printing, laser processing and the like are completed. Therefore, the optical scanning mirror has wide application prospect and huge market demand.
The optical scanning mirror usually realizes the scanning of the light beam by driving the optical mirror through a motor, and comprises two types of galvanometer scanning and multi-surface rotating mirror scanning. The traditional scanning galvanometer is a special swing motor, and the basic principle is that an electrified coil generates torque in a magnetic field, and a rotor of the traditional scanning galvanometer generates restoring torque which is in direct proportion to a torsion angle through a mechanical torsion spring. When the coil is electrified with a certain current and the rotor deflects to a certain angle, the electromagnetic torque and the restoring torque are equal in magnitude, and the electromagnetic torque and the restoring torque do not rotate continuously like a common motor but deflect in a reciprocating angle, the deflection angle of the electromagnetic torque is in proportion to the driving current, and the electromagnetic torque is the same as the working principle of a galvanometer, so that the galvanometer is called a galvanometer scanning galvanometer (Galvo scanning system) and is also called a high-speed scanning galvanometer (Galvo scanning system). Because the scanning system and the reflecting mirror of the traditional scanning mirror have large mass and rotational inertia, the scanning frequency of the scanning galvanometer is difficult to improve and can only reach hundreds of Hz generally. The polygon mirror scans by a high-speed motor which drives the polygon mirror to continuously scan in a single direction, the scanning angular speed of the motor is generally constant, and the polygon mirror reflects light beams in turn to realize single-direction light beam scanning without retrace of the light beams. Due to the fact that the polygon mirror is adopted for scanning, acceleration of light beam scanning can be achieved, high scanning speed is obtained, and the scanning angle is limited to a certain extent; furthermore, the high speed rotation generates a large centrifugal force to deform the mirror, and finally limits the scanning speed of the polygon mirror, wherein the scanning speed is hundreds of revolutions per second. The traditional optical scanning mirror is a precise and complex scanning mechanism, has high cost, large volume and complex control, and greatly limits the application range and the market of the scanning mirror.
With the development of the MEMS technology, the laser scanner based on the MEMS technology becomes the development direction of the optical scanning mirror technology, has many advantages of fast scanning speed, multi-axis scanning, small volume, low cost, etc., becomes the main technology of low-power and small-size mirror laser scanning, greatly expands the application market of the optical scanning, and has a broad market prospect. MEMS scanning mirrors are currently being studied extensively and MEMS scanning mirror chips are currently available on the market from a number of companies. The MEMS scanning mirror can be classified into a resonant MEMS scanning galvanometer and a quasi-static MEMS scanning mirror according to different application scenarios of the MEMS scanning mirror. From the MEMS driving mode, the MEMS scanning mirror mainly comprises four driving modes, namely electrostatic driving, electromagnetic driving, piezoelectric driving and electrothermal driving, wherein the electrostatic driving is the most mature and widely applied driving mode. The electrostatic drive MEMS scanning mirror mainly adopts an electrostatic comb drive, and can realize a larger drive angle.
The electrostatic comb drive is one of the main drive technologies of MEMS technology, and is mainly characterized by comprising a comb array formed by staggering a plurality of pairs of moving combs and fixed combs, wherein the comb array usually comprises one group or a plurality of groups to jointly form the electrostatic comb drive. The basic principle of the driving is that the comb teeth form a comb tooth capacitor, the comb tooth capacitor is charged by driving voltage, positive and negative static charges are injected into two electrodes of the comb tooth capacitor, and the static charge attraction drives the comb teeth to move horizontally or in a twisting mode. For the comb teeth torsion driver, the electrostatic charge attraction is converted into driving torque through the MEMS torsion structure, the torque is balanced with the restoring moment of the torsion shaft, and the torsion angle of the scanning mirror is determined. The driving torque of the electrostatic comb drive is the fundamental cause of the torsional operation and is proportional to the product of the electrostatic force and the moment arm in the vertical direction of the comb. Therefore, in order to increase the driving torque of the electrostatic comb drive, increasing the comb-vertical direction electrostatic force and the driving force arm is the main design direction.
The vertical electrostatic force of the drive comb teeth is proportional to the number of comb teeth pairs N and the rate of change of the comb tooth overlap area (dS/d θ), and inversely proportional to the comb tooth gap distance d, so that the number of comb teeth pairs N is increased as much as possible, the length L of the comb teeth is increased, the comb tooth gap d is decreased, and the comb tooth drive torque τ is increased under the condition that the chip size is fixed. The selection of the comb tooth gap parameter d depends on the limitation of the depth-to-width ratio of silicon deep etching and the limitation of electrostatic breakdown voltage in the MEMS process, and is usually 2-5 mu m, and the minimum value is usually selected on the premise of meeting the reliability of the device. Under the condition that the comb tooth gap d is selected, the number of pairs N and the length L of the comb teeth are increased, the selection of the width W of the comb teeth is mainly determined, and the selection of the width W and the length L of the comb teeth is mainly limited by the rigidity of the comb teeth. When the comb teeth have a constant thickness h, the width W and length L of the comb teeth, i.e., the aspect ratio (L/W) that can be achieved by the comb teeth, are generally determined according to the stiffness requirements of the comb teeth, which are required for the reliability of the device design. For the distributed electrostatic attraction, the comb tooth driving torque is in direct proportion to the integral of the product of the electrostatic force and the force arm in the vertical direction of the comb teeth along the length of the comb teeth, namely the comb tooth driving torque and the electrostatic force are closely related to the driving force arm, so that under the condition that the MEMS chip is in a certain size, the increase of the driving force arm has important significance for increasing the driving torque.
At present, in the design of the electrostatic driving comb teeth, as shown in fig. 8, slender rectangular comb teeth are adopted, namely the widths of the root, the middle and the head of the comb teeth are consistent, so that the design is simple and clear. However, when the comb length is long, for example, when the comb length L is 100 to several thousand microns, the comb width W needs to be 10 to several tens of microns due to the limitation of the comb length-width ratio (L/W), the number N of the manufacturable comb number is drastically reduced, and the comb drive torque is not easily linearly increased with the increase in the size of the drive chip. The technical problem of designing the electrostatic comb tooth driver is solved, and the key for developing the MEMS scanning mirror with high cost performance is achieved.
Disclosure of Invention
In order to solve the limitation of the existing rectangular comb teeth on the design of electrostatic drive comb teeth and break through the inherent slender rectangular shape of the comb teeth, the invention provides a trapezoidal comb tooth design, the width of the root of the comb tooth is larger than the width of the head of the comb tooth, under the condition of keeping the average width of the comb tooth unchanged, the rigidity of the root of the comb tooth can be greatly increased, and the root of the comb tooth is the part of the comb tooth with the highest requirement on the rigidity; under the condition that the size of a chip is fixed, compared with a rectangular comb tooth structure in the prior art, the trapezoidal comb tooth structure can greatly improve the driving torque of a comb tooth driver and increase the driving angle, or reduce the size of the chip, reduce the driving voltage, greatly improve the technical performance of the chip and reduce the cost of the chip.
The technical scheme adopted by the invention is as follows:
the utility model provides a trapezoidal broach, the root width of trapezoidal broach is greater than the head width, just the width of trapezoidal broach reduces from trapezoidal broach root to trapezoidal broach head monotonously.
Preferably, the trapezoidal comb teeth are trapezoidal in shape; break through the inherent long and thin rectangle shape of broach, adopt the design of trapezoidal broach, the width of its broach root is greater than broach head width, under the unchangeable condition of the average width of keeping the broach, has increased substantially the rigidity of broach root, and the root of broach is the position that requires the rigidity the most to the broach. When the comb teeth are under the action of unbalanced force, the comb teeth bend to one side, and the electrostatic force is larger as the distance is smaller, so that the comb teeth are attracted to one side by the electrostatic force, which is a side suction phenomenon, and particularly when the rigidity of the comb teeth is insufficient, the side suction phenomenon is more obvious; therefore, the trapezoidal comb teeth are designed to be trapezoidal, the rigidity of the root parts of the comb teeth is increased, the number of pairs of the comb teeth and the length of the comb teeth can be increased under the condition that the rigidity of the comb teeth meets the requirement of side suction resistance, and therefore the driving torque of the comb teeth in the vertical direction is increased.
Preferably, the trapezoidal comb teeth are isosceles trapezoids; preferably, the angle of the trapezoid bottom angle at the root of the trapezoid comb teeth is 85-89.95 degrees.
The invention also provides an electrostatic comb tooth driver, which comprises a moving comb tooth array and a fixed comb tooth array, wherein the moving comb tooth array and the fixed comb tooth array are respectively composed of a plurality of trapezoidal comb teeth of any one of the above parts;
preferably, the moving comb tooth array and the fixed comb tooth array are located in the same plane, the trapezoidal comb teeth of the moving comb tooth array and the trapezoidal comb teeth of the fixed comb tooth array are distributed in a staggered mode, and the gap between every two adjacent trapezoidal comb teeth is 0.5-20 microns. The arrangement mode is a plane comb tooth driver, can be applied to an MEMS scanning galvanometer in a resonance working state, can realize large-angle scanning of dozens of degrees by virtue of a resonance Q factor (which can reach dozens to hundreds), and the driving voltage adopts a pulse loading mode and is loaded only at a specific phase.
Preferably, the height difference is formed between the moving comb tooth array and the fixed comb tooth array, the trapezoidal comb teeth of the moving comb tooth array and the trapezoidal comb teeth of the fixed comb tooth array are distributed in a staggered mode, and the gap between every two adjacent trapezoidal comb teeth is 0.5-20 microns. The arrangement mode is a vertical comb tooth driver, is usually applied to an MEMS pointing scanning mirror in a quasi-static working state, and can realize any angle pointing in a scanning range; the MEMS scanning galvanometer can also be applied to the MEMS scanning galvanometer in a resonant working state.
The trapezoidal comb teeth are arranged at equal intervals, and a plurality of pairs of trapezoidal comb teeth form the electrostatic trapezoidal comb tooth driver.
The invention also provides an MEMS scanning mirror, which comprises a reflecting mirror, a comb tooth driver, a torsion shaft for connecting the reflecting mirror and the comb tooth driver, and a silicon substrate with a cavity, wherein the comb tooth driver is the electrostatic comb tooth driver, and the electrostatic comb tooth driver drives the reflecting mirror to rotate in the cavity of the silicon substrate. The working state of the MEMS scanning mirror is a resonance state, so that large-angle rapid scanning can be realized, and the MEMS scanning mirror can also work in a quasi-static scanning state.
Preferably, the comb tooth drivers are located at two sides of the torsion shaft, and the comb tooth drivers respectively located at two sides of the torsion shaft are symmetrically distributed about the torsion shaft.
Preferably, an optical reflection film layer is arranged on the reflector; the optical reflection film layer is a metal reflection film of gold or aluminum, and can also be a multilayer optical medium reflection film.
Compared with the prior art, the invention provides the trapezoidal comb teeth, the electrostatic comb teeth driver and the MEMS scanning mirror,
1. the design of the trapezoidal comb teeth is adopted, and the rigidity of the root parts of the trapezoidal comb teeth can be increased under the condition that the average width of the trapezoidal comb teeth is not changed, so that the logarithm of the trapezoidal comb teeth can be increased on the premise of meeting the rigidity requirement of the trapezoidal comb teeth, the vertical electrostatic force of the trapezoidal comb teeth is increased, and the driving torque of the trapezoidal comb teeth is increased;
2. by adopting the design of the trapezoidal comb teeth, on the premise of ensuring the rigidity of the comb teeth to resist the requirement of side suction, the length of the comb teeth can be increased, the driving force arms can be increased, and the capacitance change rate of the torsion of the comb teeth can be increased, so that the driving torque of the comb teeth can be greatly increased;
3. under the condition that the size of the chip surface of the MEMS scanning mirror is fixed, the trapezoidal comb tooth design is adopted, compared with the existing elongated rectangular shape, the comb tooth driving torque can be greatly increased by adopting the long comb tooth design, so that the driving angle is increased, or the driving voltage is reduced;
4. under the condition that the driving angle and the driving voltage of the MEMS scanning mirror chip are certain, the trapezoidal comb tooth design of the MEMS scanning mirror chip can reduce the area of the chip and reduce the cost.
Drawings
FIG. 1 is a schematic structural diagram of a trapezoidal comb tooth of the present invention;
FIG. 2 is a schematic diagram of the comb drive of the present invention;
FIG. 3a is a schematic cross-sectional view of a planar comb drive of the present invention;
FIG. 3b is a schematic cross-sectional view of the planar comb drive of the present invention in a deflected position;
FIG. 4a is a schematic cross-sectional view of the vertical comb drive of the present invention;
FIG. 4b is a schematic cross-sectional view of the vertical comb drive of the present invention in a deflected position;
FIG. 5 is a schematic diagram of comb tooth arrangement of the comb tooth driver;
FIG. 6 is a schematic diagram of a MEMS scanning mirror of the present invention;
FIG. 7 is a schematic cross-sectional view of a MEMS scanning mirror of the present invention at the mirror;
fig. 8 is a schematic structural diagram of a comb drive in the prior art.
Reference numerals: 1. trapezoidal comb teeth; 11. the root of the comb teeth; 12. a comb head; 2. a comb drive; 21. an array of moving combs; 22. fixing the comb array; 3. a mirror; 4. a torsion shaft; 5. a silicon substrate; 51. a cavity; 6. an optical reflection film layer; 7. rectangular comb teeth in the prior art.
Detailed Description
The following detailed description of the invention refers to specific embodiments thereof for better understanding by those skilled in the art.
A trapezoidal comb tooth 1 is shown in figure 1, the root 11 of the trapezoidal comb tooth 1 has a width WRoot of herbaceous plantIs greater than the width W of the head 12Head with a rotatable shaftAnd the width of the trapezoidal comb teeth is monotonously reduced from the root part 11 of the trapezoidal comb teeth to the head part 12 of the trapezoidal comb teeth.
In some specific embodiments of the present invention, the trapezoidal comb teeth 1 are trapezoidal in shape. Adopts the design of trapezoidal comb teeth, the width W of the root part of the comb teethRoot of herbaceous plantIs greater than the width W of the head of the comb teethHead with a rotatable shaftWhile maintaining the average width W of the comb teethAverageUnder the condition of no change, the rigidity of the root of the comb teeth is greatly increased, the root of the comb teeth is the part with the highest rigidity required by the comb teeth, namely, the trapezoidal comb teeth are designed according to the requirement of the rigidity of the comb teeth, so that the best design effect is achieved. Therefore, under the condition that the rigidity of the comb teeth meets the requirement of resisting side suction, the number of pairs of the comb teeth and the length of the comb teeth can be increased, and the driving torque in the vertical direction of the comb teeth is increased.
In some specific embodiments of the present invention, the trapezoidal comb teeth 1 are shaped like an isosceles trapezoid.
In some specific embodiments of the present invention, the trapezoid base angle at the root 11 of the trapezoid comb teeth is α, and α is 85 ° to 89.95 °.
The comb-teeth driver 2 according to an embodiment of the present invention will be described below with reference to the drawings, and as shown in fig. 2, includes a moving comb-teeth array 21 and a fixed comb-teeth array 22, each of the moving comb-teeth array 21 and the fixed comb-teeth array 22 being composed of a plurality of trapezoidal comb-teeth 1;
in some embodiments of the present invention, as shown in fig. 3a and 3b, the moving comb array 21 and the fixed comb array 22 are located in the same plane (planar comb drive), as shown in fig. 5, the moving comb array 21 and the trapezoidal comb 1 of the fixed comb array 22 are arranged in a staggered manner, and the gap between adjacent trapezoidal comb is L, where L is 0.5 μm to 20 μm.
In some embodiments of the present invention, as shown in fig. 4a and 4b, there is a height difference (vertical comb drive) between the moving comb array 21 and the fixed comb array 22, the moving comb array 21 and the trapezoidal comb 1 of the fixed comb array 22 are arranged in a staggered manner, and the gap between adjacent trapezoidal comb 1 is L, where L is 0.5 μm to 20 μm.
Referring to the drawings, an MEMS scanning mirror according to an embodiment of the present invention is described below, and as shown in fig. 6, the MEMS scanning mirror includes a mirror 3, a comb-teeth driver 2, a torsion shaft 4 connecting the mirror 3 and the comb-teeth driver 2, and a silicon substrate 5 having a cavity 51, where the comb-teeth driver of the MEMS scanning mirror is the comb-teeth driver 2 according to the embodiment of the present invention, and the comb-teeth driver 2 drives the mirror 3 to rotate in the cavity 51 of the silicon substrate 5; the comb tooth drivers 2 are positioned on two sides of the torsion shaft 4, and the comb tooth drivers 2 respectively positioned on two sides of the torsion shaft 4 are symmetrically arranged about the torsion shaft 4, namely, half of the comb tooth drivers 2 are positioned on one side of the torsion shaft 4, and half of the comb tooth drivers 2 are positioned on the other side of the torsion shaft 4 and are symmetrically arranged about the torsion shaft 4; as shown in fig. 7, an optical reflection film layer 6 is disposed on the reflector, and the optical reflection film layer 6 is a metal reflection film made of gold or aluminum, or may be a multilayer optical medium reflection film.
It should be noted that the trapezoidal comb and electrostatic comb driver provided by the invention can be applied to MEMS scanning mirror, and can also be applied to any other MEMS device.
A method for fabricating a MEMS scanning mirror in accordance with an embodiment of the present invention is described, comprising the steps of:
s1, carrying out thermal oxidation growth on 2 mu m SiO by using crystal orientation monocrystalline silicon wafer2Layer, lithography, RIE etching of SiO2Etching Si by using a KOH anisotropic wet method, and etching a rectangular open rectangular pyramid etching pit by using the wet method, wherein the etching depth is more than 250 mu m to obtain a silicon substrate;
s2, taking an SOI silicon wafer, and bonding the SOI silicon wafer with a monocrystalline silicon wafer Si-Si to form a silicon bonding wafer with a cavity;
s3, thinning the SOI silicon wafer to 30 microns by adopting CMP, and removing 30 microns of silicon by using silicon dry etching until SiO is exposed2A layer;
s4, removing the oxide layer from the SOI silicon chip, and manufacturing a reflector and a lead by using a metal stripping process;
s5, photoetching is carried out on the surface of the SOI silicon chip, silicon is etched till the silicon penetrates through, and a comb tooth driver, a torsion shaft and a reflector are manufactured; and finally, scribing the wafer to obtain a single MEMS chip.
The trapezoidal comb teeth, the electrostatic comb teeth driver and the MEMS scanning mirror provided by the invention are described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are set forth only to aid in understanding the methods and concepts of the invention, and the directional terms used are, for example: upper, lower, left, right, front, rear, etc. are directions with reference to the drawings only, and directional terms used are intended to illustrate and not to limit the present invention. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.

Claims (9)

1. The trapezoidal comb teeth are characterized in that the width of the root parts of the trapezoidal comb teeth is larger than that of the head parts of the trapezoidal comb teeth, and the width of the trapezoidal comb teeth is monotonically reduced from the root parts of the trapezoidal comb teeth to the head parts of the trapezoidal comb teeth.
2. Trapezoidal comb according to claim 1, wherein the trapezoidal comb is trapezoidal in shape.
3. The trapezoidal comb teeth according to claim 1, wherein the trapezoidal comb teeth are shaped like isosceles trapezoids, and the angle of the trapezoidal base angle at the root of the trapezoidal comb teeth is 85 ° to 89.95 °.
4. An electrostatic comb drive comprising an array of moving combs and an array of fixed combs, wherein the array of moving combs and the array of fixed combs each comprise a plurality of trapezoidal combs as claimed in any one of claims 1 to 3.
5. An electrostatic comb drive according to claim 4, wherein the moving comb array and the fixed comb array are in the same plane, the moving comb array and the trapezoidal comb of the fixed comb array are arranged in a staggered manner, and a gap between adjacent trapezoidal comb is 0.5 μm to 20 μm.
6. The comb drive according to claim 4, wherein the moving comb array and the fixed comb array have a height difference therebetween, the moving comb array and the trapezoidal comb of the fixed comb array are arranged in a staggered manner, and a gap between adjacent trapezoidal comb is 0.5 μm to 20 μm.
7. An MEMS scanning mirror, comprising a reflecting mirror, a comb-tooth driver, a torsion shaft connecting the reflecting mirror and the comb-tooth driver, and a silicon substrate with a cavity, wherein the comb-tooth driver is the electrostatic comb-tooth driver of claim 5 or 6, and the electrostatic comb-tooth driver drives the reflecting mirror to rotate in the cavity of the silicon substrate.
8. A MEMS scanning mirror according to claim 7, wherein the electrostatic comb drives are located on both sides of the torsion axis, and the electrostatic comb drives respectively located on both sides of the torsion axis are arranged symmetrically with respect to the torsion axis.
9. A MEMS scanning mirror as claimed in claim 7, wherein the mirror is provided with an optically reflective film layer.
CN202011343335.5A 2020-11-25 2020-11-25 Trapezoidal broach, static broach driver and MEMS scanning mirror Pending CN112255781A (en)

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CN202011343335.5A CN112255781A (en) 2020-11-25 2020-11-25 Trapezoidal broach, static broach driver and MEMS scanning mirror

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Application Number Priority Date Filing Date Title
CN202011343335.5A CN112255781A (en) 2020-11-25 2020-11-25 Trapezoidal broach, static broach driver and MEMS scanning mirror

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112965239A (en) * 2021-02-05 2021-06-15 西安知象光电科技有限公司 Stacked induction capacitor angle feedback galvanometer and manufacturing method thereof
CN114279442A (en) * 2021-12-30 2022-04-05 中国电子科技集团公司第十三研究所 Micro-mechanical detection structure for preventing electrostatic attraction
CN115199637A (en) * 2021-04-12 2022-10-18 中国科学院微电子研究所 MEMS torsion driving structure
CN116699834A (en) * 2023-07-31 2023-09-05 西安知象光电科技有限公司 Micro-vibrating mirror structure based on staggered vertical comb tooth driving array and preparation process thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112965239A (en) * 2021-02-05 2021-06-15 西安知象光电科技有限公司 Stacked induction capacitor angle feedback galvanometer and manufacturing method thereof
CN115199637A (en) * 2021-04-12 2022-10-18 中国科学院微电子研究所 MEMS torsion driving structure
CN114279442A (en) * 2021-12-30 2022-04-05 中国电子科技集团公司第十三研究所 Micro-mechanical detection structure for preventing electrostatic attraction
CN116699834A (en) * 2023-07-31 2023-09-05 西安知象光电科技有限公司 Micro-vibrating mirror structure based on staggered vertical comb tooth driving array and preparation process thereof

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