CN112247672B - Precision self-healing method for internal injection type cooling main shaft - Google Patents

Precision self-healing method for internal injection type cooling main shaft Download PDF

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CN112247672B
CN112247672B CN202011343240.3A CN202011343240A CN112247672B CN 112247672 B CN112247672 B CN 112247672B CN 202011343240 A CN202011343240 A CN 202011343240A CN 112247672 B CN112247672 B CN 112247672B
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machine tool
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main shaft
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CN112247672A (en
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王永青
班仔优
刘阔
韩伟
姜少玮
韩灵生
刘海波
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Dalian University of Technology
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/12—Arrangements for cooling or lubricating parts of the machine
    • B23Q11/126—Arrangements for cooling or lubricating parts of the machine for cooling only
    • B23Q11/127—Arrangements for cooling or lubricating parts of the machine for cooling only for cooling motors or spindles
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia

Abstract

The invention discloses an internal injection type cooling main shaft precision self-healing method, and belongs to the technical field of numerical control machine tool main shaft thermal deformation. Establishing a relation model between the current of the thermoelectric refrigerator and the state parameters of the machine tool and the temperature of key points of the machine tool, and establishing an active control strategy function and an active control system of the temperature field of the internal injection type main shaft according to the relation model; when the main shaft is self-healed, the input current of the thermoelectric refrigerator is changed in real time according to the temperature value of the key point and the running state of the machine tool, and then the temperature field of the machine tool is controlled to further realize the self-healing of the thermal inclination error. The method adopts the thermoelectric refrigerator as an active heat controller, can actively control the temperature of the heat inclination error control sensitive point of the internal-injection type ultra-low temperature processing machine tool by establishing a heat inclination error model and a main shaft self-healing control strategy, realizes the precision self-healing of the internal-injection type main shaft, has the advantages of high accuracy, good robustness and rapid response, solves the problem of the heat inclination error of the internal-injection type ultra-low temperature processing machine tool, and improves the processing precision of the machine tool.

Description

Precision self-healing method for internal injection type cooling main shaft
Technical Field
The invention belongs to the technical field of thermal deformation of a spindle of a numerical control machine tool, and particularly relates to an internal injection type cooling spindle precision self-healing method.
Background
In the fields of aerospace and the like, in order to meet the requirement of high-service performance under extreme working conditions, core parts in high-end equipment are widely made of advanced materials represented by titanium alloy and composite materials. However, these materials often exhibit difficult processing characteristics such as high viscosity, high toughness, and low thermal conductivity, and the cutting temperature during processing is high, and the emulsion cooling efficiency is significantly insufficient. Experiments show that the ultra-low temperature medium such as liquid nitrogen is applied to a local cutting area, so that the extremely high cutting heat of materials difficult to machine such as titanium alloy and the like in cutting machining can be effectively reduced, the cutting performance of the materials is improved, the service life of a cutter is prolonged, the traditional cutting fluid is replaced, and green manufacturing is realized. This cutting method using liquid nitrogen as a coolant or lubricant is called ultra-low temperature cutting. The application mode of the ultralow temperature cooling medium mainly comprises cutter external spray cooling and cutter internal spray cooling. The external spray type cooling is based on the design idea of conventional cooling, and the peripheral area of a cutting point is cooled in a flood irrigation mode by using an external nozzle, so that the external spray type cooling is easy to implement under the existing conditions, but the utilization rate of a cooling medium is often low, and the integration of machine tool functions is poor. The inner-spraying type cooling guides ultra-low temperature media such as liquid nitrogen and the like to the tool tip through the inner cavity channels of the main shaft and the tool shank, so that direct quantitative cooling of a cutting point is realized, the cooling efficiency is high, the utilization rate of the cooling medium is improved, and the inner-spraying type cooling is a development trend of ultra-low temperature processing technology. The development of an internal-injection cooling machine tool on the internal-injection cooling technology also becomes key equipment for improving the ultra-low temperature cutting performance, and the MAG company in the U.S. 2010 develops the only commercial liquid nitrogen internal-injection ultra-low temperature cooling machine tool so far and is successfully applied to the manufacturing of F35 parts.
In addition, the numerical control machine tool gradually develops towards high speed and high precision, but the relative motion relationship between the workpiece and the cutter is damaged due to the coupling influence of an internal heat source and an external heat source during the operation of the precise numerical control machine tool, so that the processing precision of the machine tool is reduced. For the ultra-low temperature cooling processing machine tool, because the ultra-low temperature medium is introduced into the main shaft, the inner heat source and the outer heat source of the main shaft of the machine tool are changed, the distribution of the temperature field and the thermal deformation behavior are also changed, and the thermal deformation behavior of the machine tool is greatly different from that of the traditional numerical control machine tool. According to statistics, the proportion of machining and manufacturing errors caused by thermal deformation of a high-speed and high-precision machine tool reaches 40% -70%, so that the research on the thermal deformation behavior of an internal-injection type cooling main shaft of an ultra-low-temperature cooling machine tool is very important for ensuring the machining precision of the ultra-low-temperature cooling machine tool and improving the service performance.
The current methods for controlling thermal errors mainly comprise two methods: error prevention methods and error compensation methods. The error prevention method is to eliminate or reduce the thermal error of the machine tool by means of design, manufacture and the like, such as adopting a screw-nut or bed body cooling mode, a machine tool thermal symmetric structure design and the like. The compensation method has good effect on the compensation method of the axial thermal elongation error thermal error, but the compensation method has limited effect on the compensation of the radial thermal drift error, can not fundamentally solve the thermal inclination error generated by the hot bending of the main spindle box of the machine tool, has obvious thermal inclination error of the internal-injection cooling main spindle and has great influence on the machining precision of the machine tool. Therefore, it is very critical to provide a precision self-healing method and an active heat control device that can solve the thermal tilt error of the internal injection cooling spindle.
In patent CN201310115537.8, high defense in 2006 discloses an active control system and method for a precision machine tool temperature field, which controls a layered independent multi-point temperature control system to realize layered independent temperature control of each part of the machine tool. In 2019, the patent CN201910939356.4 of high defense and the like discloses a measuring device and a measuring method for simulating the structural thermal deformation of a machine tool, aiming at the thermal deformation measurement of large structural members such as a machine tool body, a stand column and the like, the device can meet the detection requirements of simplicity and high precision, and is suitable for the structural thermal deformation detection of medium and high-grade numerical control machine tools. However, none of the above patents relates to a self-healing method for studying the precision of the thermal tilt error of the main shaft of the ultra-low temperature cooling processing machine tool.
Disclosure of Invention
The invention provides a precision self-healing method capable of solving the problem of thermal inclination error of an internal-injection cooling main shaft by utilizing an active thermal control device, aiming at the problem that the traditional thermal error compensation method cannot completely solve the problem of thermal inclination error of the internal-injection cooling main shaft of an internal-injection ultralow-temperature processing machine tool.
The technical scheme of the invention is as follows:
a thermoelectric refrigerator is used as an active thermal control device, the refrigeration efficiency of the thermoelectric refrigerator is adjusted in real time based on a main shaft precision self-healing control strategy to realize the temperature field balance of an internal-injection type ultralow-temperature processing machine tool, and then the thermal tilt error of the internal-injection type main shaft is eliminated to realize the precision self-healing of the main shaft;
the method comprises the following steps:
step 1, testing temperature rise sensitive points and thermal inclination errors of an internal-injection type ultralow-temperature processing machine tool; arranging a plurality of temperature sensors on an internal injection type ultralow temperature processing machine tool, and measuring the thermal inclination error e of the tail end of a main shaft by adopting a five-point methodθConstructing a machine tool signal acquisition system; selecting and thermal tilt error e using correlation analysis based on temperature sensor data and thermal tilt error dataθThe temperature rise sensitive point with large relevance is used as a key point, and only the temperature data of the key point is collected subsequently; arranging a thermoelectric refrigerating device at a proper position of a machine tool, wherein the thermoelectric refrigerating device mainly comprises a semiconductor refrigerating sheet, a hot-end heat dissipation device and a cold-end heat exchange device, and the hot-end heat dissipation device is in a natural convection type, a forced convection type or a liquid cooling type;
step 2: normal operation of machine tool through several sets of critical point temperature values [ T ] without turning on thermoelectric refrigerator1、T2]1、[T1、T2]2……[T1、T2]cAnd displacement sensor measurement [ e ] of corresponding thermal tilt error measurement point1、e2]1、[e1、e2]2……[e1、e2]cEstablishing a thermal tilt error model related to the temperature of the key point; only turning on the thermoelectric refrigerator, continuously changing the input current I of the thermoelectric refrigerator, passing through the temperature value T of the key point]cAnd current [ I ]]cThe relationship between them establishes the mathematics of the refrigeration power of the thermoelectric refrigeratorA model;
and step 3: based on the calculation formula of the calorific value of the heat source and the heat exchange amount of the cooling medium of the machine tool, the key point temperature value [ T ] is input by different thermoelectric refrigerators under different working conditions1、T2]Combining a thermal inclination error model and a mathematical model of the refrigeration power of the thermoelectric refrigerator, obtaining a self-healing control strategy function of the main shaft of the internal-injection type ultralow-temperature processing machine tool based on a system identification method, and compiling a master control program and building an active control system according to the self-healing control strategy function;
and 4, step 4: and 3, inputting a signal from the signal acquisition system established in the step 1 by the active control system, operating the active control strategy program established in the step 3, outputting a temperature control strategy command signal to the thermoelectric refrigerator, and controlling the temperature field of the machine tool so as to realize self-healing of the thermal inclination error.
The invention has the beneficial effects that: the invention can adjust the refrigeration power of the thermoelectric refrigerator device in real time through the thermal tilt error model and the main shaft self-healing control strategy, can actively control the temperature of the thermal tilt error control sensitive point of the internal-injection type ultra-low temperature processing machine tool, realizes the main shaft precision self-healing, has the advantages of high accuracy, good robustness and quick response, solves the problem of the thermal tilt error of the internal-injection type ultra-low temperature processing machine tool, and improves the processing precision of the machine tool.
Drawings
FIG. 1 is a schematic diagram of a spindle precision self-healing system of an internal injection type ultralow temperature processing machine tool;
FIG. 2 is a schematic flow chart of a main shaft precision self-healing method of an internal injection type ultralow temperature processing machine tool;
FIG. 3 is a schematic diagram of an active control system of a spindle precision self-healing method;
FIG. 4 is a schematic diagram of an active thermal control device-thermoelectric cooling device configuration;
fig. 5 is a spindle tip thermal tilt error measurement apparatus.
In the figure: 1, a machine tool base; 2, machine tool upright post; 3, motor position; 4 a thermoelectric cooling device; 5 a low-temperature cooling medium circulation pipeline; 6 upper surface temperature sensor; 7 machine tool main shaft bearing; 8, a main spindle box; 9 a lower surface temperature sensor; 10, a main shaft; 11 a main shaft tail end thermal inclination error measuring device; 4-1, cooling the surface of the spindle box; 4-2 cold side heat exchanger; 4-3 semiconductor refrigerating sheets; 4-4 hot end radiator; 11-1, checking the rod; 11-2-a displacement sensor 1; 11-2-b displacement sensor 2; 11-3, a displacement sensor tool; l-the distance between the displacement sensor 1 and the displacement sensor 2.
Detailed Description
The following describes the specific implementation of the present invention in detail with reference to the drawings and technical solutions, in the embodiment, the hot side heat sink (4-4) of the thermoelectric cooling device (4) uses a fan to dissipate heat by forced convection.
The specific implementation mode is as follows:
step 1, testing temperature rise sensitive points and thermal inclination errors of the internal-spraying type ultralow-temperature processing machine tool. Arranging a plurality of temperature sensors on an internal-injection type ultra-low temperature processing machine tool, and measuring a thermal inclination error e of the tail end of a main shaft by adopting a device shown in figure 5θMeasured value e of the displacement sensor 1(11-2-a)1Measured value e of the displacement sensor 2(11-2-b)2Then the thermal tilt error is calculated according to the following equation:
Figure BDA0002799137580000051
enabling the machine tool to normally run, and acquiring corresponding temperature sensor data and displacement sensor data; selection and thermal tilt error e from correlation analysisθThe value of the temperature sensor with larger correlation is taken as a key point; finally, the temperature sensors arranged at key points are shown as 6 and 9 in figure 1, and the measured value of the upper surface temperature sensor (6) is T1The measured value of the lower surface temperature sensor (9) is T2(ii) a At the same time, arranging a thermoelectric refrigerating device (4) as shown in figure 4 at the position as shown in figure 1;
step 2: normal running of machine tool through c group of machine tool key point temperature value [ T ] without opening thermoelectric refrigerator1、T2]1、[T1、T2]2……[T1、T2]cDisplacement sensor measurement with corresponding thermal tilt error measurement point[e1、e2]1、[e1、e2]2……[e1、e2]cThe thermal tilt error model for the key point temperature is built as follows:
eθ＝k1T1-k2T2+β (1.2)
e in formula (1.2)θ-spindle tip thermal tilt error; t is1-the measured value of the upper surface temperature sensor (6); t is2-the measurement value of the lower surface temperature sensor (9); k is a radical of1、k2Determining the parameter to be identified of the beta-model according to a least square method as shown in the formula (1.3);
Figure BDA0002799137580000052
e in formula (1.3)1-the measured value of the displacement sensor 1 (11-2-a); e.g. of the type2-the measured value of the displacement sensor 2 (11-2-b); l-the distance between the displacement sensor 1 and the displacement sensor 2; i-the ith test; c-a total of c trials;
only turning on the thermoelectric refrigerator, continuously changing the input current I of the thermoelectric refrigerator, and controlling the temperature value T of the key point of the thermoelectric refrigeration system]nAnd current [ I ]]nThe relationship between the thermoelectric cooler and the thermoelectric cooler is established as a mathematical model of the refrigerating power of the thermoelectric cooler:
Qc＝f(I) (1.4)
q in formula (1.4)c-thermoelectric refrigerator refrigeration power; i-input current of thermoelectric refrigerator; f-I and QcA mathematical relationship therebetween;
and step 3: machine tool motor heating value QMBearing heat source calorific value QrHeat exchange amount Q of cooling mediumLFormulas (1.5) to (1.7) were calculated:
Figure BDA0002799137580000061
Qr＝1.047×10-4M×n (1.6)
QL＝h·ΔT＝h(Tsurface-Tcoolant)＝h(q)(Tsurface-Tcoolant) (1.7)
q in formula (1.5)M-the heating value of the motor; n is a radical ofM-the power of the motor; eta-motor efficiency; mm-the torque to which the motor is subjected; n-main shaft rotation speed; q in formula (1.6)r-bearing heat source heating value; m is the friction torque born by the main shaft bearing; q in formula (1.7)L-amount of cooling medium heat exchange; h is the thermal convection coefficient of the cooling medium, is related to the flow q of the cooling medium, and is h (q); t issurface-the surface temperature of the flow channel; t iscoolant-cooling medium inlet temperature;
based on the formulas (1.5) - (1.7) and combined with the mathematical model (1.4) of the refrigeration power of the thermoelectric refrigerator, Q is input through different thermoelectric refrigerators under different working conditionscCritical point temperature value of time [ T ]1、T2]Then all thermal influences and critical point temperatures [ T ] of the machine tool can be established1、T2]The mapping relationship between the two is as follows:
[T1,T2]＝[g1(QM,Qr,QL,Qc),g2(QM,Qr,QL,Qc)] (1.8)
the combined formulas (1.2), (1.4), (1.8) and (1.5) to (1.7) can construct the thermoelectric refrigerator current (I) and the machine state parameters (main shaft rotating speed n, cooling medium flow q, cooling medium inlet temperature T)coolant) Critical point temperature (T) of machine tool1、T2) The relation model is shown as a formula (1.9), and an active control strategy function and an active control system of the internal injection type main shaft temperature field are formulated according to the relation model and are shown as a figure 3;
I＝ξ([T1,T2],n,q,Tcoolant) (1.9)
formula (1.9) I — the input current to the thermoelectric refrigerator; xi-mapping relation; t is1-the measured value of the upper surface temperature sensor (6); t is2-lower surface temperature sensingThe measured value of the device (9); n-main shaft rotation speed; q-cooling medium flow; t iscoolant-cooling medium inlet temperature;
and 4, step 4: normally operating the internal-spraying type ultralow-temperature processing machine tool, and changing the rotating speed n of the machine tool, the flow q of the cooling medium or the inlet temperature T of the cooling medium every half hourcoolantInputting a temperature sensor signal [ T ] from the signal acquisition system established in the step 1 by the active control system in the step 31、T2](t)Operating the active control strategy program constructed in the step 3 and outputting a temperature control strategy command signal I(t)And controlling the temperature field of the machine tool to the thermoelectric refrigerator so as to realize self-healing of the thermal inclination error. And based on the measured value e of the displacement sensor 1(11-2-a) of the acquisition system1Measured value e of the displacement sensor 2(11-2-b)2And determining the self-healing effect of the thermal tilt error.
It should be noted that the above-mentioned embodiments of the present invention are only used for illustrating the principle and flow of the present invention, and do not limit the present invention. Therefore, any modifications and equivalents made without departing from the spirit and scope of the present invention should be considered as included in the protection scope of the present invention.

Claims (1)

1. The precision self-healing method of the internal-injection cooling main shaft is characterized in that a thermoelectric refrigerator (4) is used as an active heat control device, and the refrigeration efficiency Q of the thermoelectric refrigerator (4) is adjusted in real time based on a main shaft precision self-healing control strategycThe temperature field balance of the internal-injection type ultralow-temperature processing machine tool is realized, and then the thermal inclination error of the internal-injection type cooling main shaft is eliminated to realize the precision self-healing of the main shaft;
the method comprises the following specific steps:
step 1, testing temperature rise sensitive points and thermal inclination errors of an internal-injection type ultralow-temperature processing machine tool; two temperature sensors are arranged on an internal injection type ultralow temperature processing machine tool, and a displacement sensor 1(11-2-a) and a displacement sensor 2(11-2-b) are adopted to measure a thermal inclination error e of the tail end of a main shaftθMeasured value e of the displacement sensor 1(11-2-a)1Measured value e of the displacement sensor 2(11-2-b)2Then the thermal tilt error is calculated according to the following equation:
Figure FDA0003172192820000011
enabling the machine tool to normally run, and acquiring corresponding temperature sensor data and displacement sensor data; selection and thermal tilt error e from correlation analysisθThe value of the temperature sensor with larger correlation is used as a key point, and the measured value of the surface temperature sensor (6) on the key point is T1The measured value of the lower surface temperature sensor (9) is T2(ii) a Arranging a thermoelectric refrigerator device (4);
step 2: normal operation of machine tool through several sets of critical point temperature values [ T ] without turning on thermoelectric refrigerator1、T2]1、[T1、T2]2……[T1、T2]nAnd displacement sensor measurement [ e ] of corresponding thermal tilt error measurement point1、e2]1、[e1、e2]2……[e1、e2]nThe thermal tilt error model for the key point temperature is built as follows:
eθ＝k1T1-k2T2+β (1.2)
e in formula (1.2)θ-spindle tip thermal tilt error; t is1-the measured value of the upper surface temperature sensor (6); t is2-the measurement value of the lower surface temperature sensor (9); k is a radical of1、k2Determining the parameter to be identified of the beta-model according to a least square method as shown in the formula (1.3);
Figure FDA0003172192820000021
e in formula (1.3)1-the measured value of the displacement sensor 1 (11-2-a); e.g. of the type2-the measured value of the displacement sensor 2 (11-2-b); l-the distance between the displacement sensor 1 and the displacement sensor 2; i-The ith test; c-a total of c trials;
only turning on the thermoelectric refrigerator, continuously changing the input current I of the thermoelectric refrigerator, and controlling the temperature value T of the key point of the thermoelectric refrigeration system]nAnd current [ I ]]nThe relationship between the thermoelectric cooler and the thermoelectric cooler is established as a mathematical model of the refrigerating power of the thermoelectric cooler:
Qc＝f(I) (1.4)
q in formula (1.4)c-thermoelectric refrigerator refrigeration power; i-input current of thermoelectric refrigerator; f-I and QcA mathematical relationship therebetween;
and step 3: machine tool motor heating value QMBearing heat source calorific value QrHeat exchange amount Q of cooling mediumLFormulas (1.5) to (1.7) were calculated:
Figure FDA0003172192820000022
Qr＝1.047×10-4M×n (1.6)
QL＝h(Tsurface-Tcoolant)＝h(q)(Tsurface-Tcoolant) (1.7)
q in formula (1.5)M-the heating value of the motor; n is a radical ofM-the power of the motor; eta-motor efficiency; mm-the torque to which the motor is subjected; n-main shaft rotation speed; q in formula (1.6)r-bearing heat source heating value; m is the friction torque born by the main shaft bearing; q in formula (1.7)L-amount of cooling medium heat exchange; h is the thermal convection coefficient of the cooling medium, is related to the flow q of the cooling medium, and is h (q); t issurface-the surface temperature of the flow channel; t iscoolant-cooling medium inlet temperature;
based on the formulas (1.5) - (1.7) and combined with the mathematical model (1.4) of the refrigeration power of the thermoelectric refrigerator, Q is input through different thermoelectric refrigerators under different working conditionscCritical point temperature value of time [ T ]1、T2]Then all thermal influences and critical point temperatures [ T ] of the machine tool can be established1、T2]Inter mapping relationThe method comprises the following steps:
[T1,T2]＝[g1(QM,Qr,QL,Qc),g2(QM,Qr,QL,Qc)] (1.8)
thermoelectric refrigerator current (I), machine tool state parameter and machine tool key point temperature [ T ] are constructed by combining formulas (1.2), (1.4), (1.8) and (1.5) to (1.7)1、T2]The relation model is shown as a formula (1.9), and an active control strategy function and an active control system of the internal injection type main shaft temperature field are formulated according to the relation model; the machine tool state parameters comprise a main shaft rotating speed n, a cooling medium flow q and a cooling medium inlet temperature Tcoolant；
I＝ξ([T1,T2],n,q,Tcoolant) (1.9)
Formula (1.9) I — the input current to the thermoelectric refrigerator; xi-mapping relation; t is1-the measured value of the upper surface temperature sensor (6); t is2-the measurement value of the lower surface temperature sensor (9); n-main shaft rotation speed; q-cooling medium flow; t iscoolant-cooling medium inlet temperature;
and 4, step 4: normally operating the internal-spraying type ultralow-temperature processing machine tool, and changing the rotating speed n of the machine tool, the flow q of the cooling medium or the inlet temperature T of the cooling medium every half hourcoolantInputting a temperature sensor signal [ T ] from the signal acquisition system established in the step 1 by the active control system in the step 31、T2](t)Operating the active control strategy program constructed in the step 3 and outputting a temperature control strategy command signal I(t)The thermoelectric refrigerator controls the temperature field of the machine tool so as to realize self-healing of the thermal tilt error; and based on the measured value e of the displacement sensor 1(11-2-a) of the acquisition system1Measured value e of the displacement sensor 2(11-2-b)2And determining the self-healing effect of the thermal tilt error.
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