CN112231959A - Plasma module manufacturing method and plasma module - Google Patents
Plasma module manufacturing method and plasma module Download PDFInfo
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Abstract
The invention discloses a plasma module manufacturing method, and belongs to the technical field of manufacturing of environment-friendly equipment. The method adopts the structural design concept of 'point, line, plane' and 'three elements', obtains the modal frequency and amplitude between the inner electrode and the outer electrode through modal analysis, and determines the geometric dimension material parameters of the inner electrode and the outer electrode; through plasma analysis, space electron density distribution and space ion density distribution data of the inner electrode and the outer electrode are obtained and used for determining the space distance and the space position of the inner electrode and the outer electrode, so that point and line discharge of electrode plates of the inner electrode and the outer electrode is realized, sector plasmas are generated, the adhesion area of pollutants in a plasma action area is reduced or basically eliminated, and the plasma die body designed by the method has self-cleaning capacity and improves the efficiency of waste gas treatment. In addition, the invention also provides a plasma module manufactured based on the method.
Description
Technical Field
The invention belongs to the technical field of manufacturing of environment-friendly equipment, and particularly relates to a plasma module manufacturing method and a plasma module.
Background
The malodorous/VOCs gas generated in the municipal sanitation and industrial production process not only causes serious pollution to the atmospheric environment, but also causes harm to the physical and mental health of residents. The main sources of pollution are malodorous gases generated by municipal waste and sewage and VOCs gases generated in the industrial production process, and if the pollution gases are not treated, the pollution gases are discharged into the atmosphere, so that the serious influence is inevitably generated on the surrounding environment, and therefore, the effective treatment of the malodorous gases and the VOCs gases becomes one of the key problems to be solved urgently in the economic development process of China.
At present, treatment technologies for malodorous/VOCs gas in China are diversified, and various treatment technologies play a great role in emission reduction of polluted gas, but the exposed problems are very obvious. For example, the treatment efficiency of the treatment equipment is reduced in the long-term operation process, the treatment equipment is polluted, and potential safety hazards are caused by the pollution. Almost all kinds of safety accidents occur every year. The reason is that a large amount of pollutants are accumulated in the treatment equipment in the long-term operation process of the treatment equipment, and if the pollutants are not cleaned in time, the operation condition of the treatment equipment cannot be guaranteed, such as the reduction of the treatment efficiency or no treatment effect; furthermore, the treatment equipment can also become a new pollution source, and under certain conditions, the pollutants can cause safety accidents of the treatment equipment, such as fire or explosion, and the like.
Therefore, the treatment equipment has no self-cleaning function and is directly related to the treatment efficiency, the treatment long-term effect, the treatment safety and the like of the treatment equipment. In the traditional plasma treatment equipment, self-cleaning functions are lacked, for example, treatment equipment consisting of plasma modules with a cylindrical structure, treatment equipment consisting of plasma modules with a flat plate structure and the like are lacked, after the plasma treatment equipment with the structures operates for a period of time, a large amount of pollutants are adsorbed on the electrode plate, the plasma modules are required to be frequently taken down for manual cleaning, otherwise, a series of problems are easily caused, for example, power protection does not work or the pollutants on the electrode plate are ignited to generate safety accidents such as combustion or explosion.
Disclosure of Invention
1. Problems to be solved
Aiming at the problems that a plasma module in the prior art is easy to adsorb a large amount of pollutants, so that the treatment efficiency is reduced, and even potential safety hazards are generated, the invention provides a novel plasma module manufacturing method, which adopts a point, line and plane three-element structural design concept, obtains modal frequency and amplitude between an inner electrode and an outer electrode through modal analysis, and determines the geometric dimension material parameters of the inner electrode and the outer electrode; through plasma analysis, space electron density distribution and space ion density distribution data of the inner electrode and the outer electrode are obtained and used for determining the space distance and the space position of the inner electrode and the outer electrode, so that point and line discharge of electrode plates of the inner electrode and the outer electrode is realized, sector plasmas are generated, the adhesion area of pollutants in a plasma action area is reduced or basically eliminated, and the plasma die body designed by the method has self-cleaning capacity and improves the efficiency of waste gas treatment.
2. Technical scheme
In order to solve the problems, the technical scheme adopted by the invention is as follows:
the first aspect of the present invention provides a method for manufacturing a plasma module, the method comprising:
s100: extracting inner electrode and outer electrode models, changing the size and/or material of the inner electrode and outer electrode models, and carrying out modal analysis; obtaining modal frequency and amplitude between the inner electrode and the outer electrode, and determining the geometric dimension material parameters of the inner electrode and the outer electrode;
s200: introducing the inner electrode and outer electrode models into analysis software, constructing an inner electrode and outer electrode space reaction model, and carrying out plasma analysis; acquiring space electron density distribution and space ion density distribution data of the inner electrode and the outer electrode to determine the space distance and the space position of the inner electrode and the outer electrode;
s300: inputting the space distance, space position, geometric dimension and material parameters of the inner electrode and the outer electrode into finite element analysis software to perform modal analysis test and ion simulation test;
s400: and when the test is qualified, manufacturing a plasma module according to the final space distance, the final space position, the final geometric dimension and the final material parameters of the inner electrode and the outer electrode, which are output by the finite element analysis software.
In some embodiments, in said step S100:
the extracted inner electrode model is an electrode plate, and one side or two sides of the electrode plate are provided with tooth-shaped electrodes which are arranged at equal intervals; the outer electrode model is one of an outer electrode plate or an outer electrode rod.
In some embodiments, the step S100 includes:
s102: respectively extracting inner electrode models and outer electrode models from a design drawing, introducing the inner electrode models and the outer electrode models into ANSYS software, and performing networking division on the inner electrode models and the outer electrode models;
s104: setting boundary conditions of modal analysis of the inner electrode and the outer electrode, changing the size and/or the material of models of the inner electrode and the outer electrode, carrying out modal analysis on the inner electrode and the outer electrode, and respectively determining modal frequency and amplitude of the models of the inner electrode and the outer electrode;
s106: adjusting the geometric dimensions of the inner electrode model and the outer electrode model, repeating the steps S202-S204, and respectively determining a first relation list of modal frequency and amplitude of the inner electrode model and the outer electrode model and the geometric dimensions;
s108: adjusting material parameters of the inner electrode model and the outer electrode model, repeating the steps S202-S204, and respectively determining a second relation list of modal frequency and amplitude of the inner electrode model and the outer electrode model and the material parameters;
s110: and determining the geometric dimension and the material parameter according to the first relation list and the second relation list.
In some embodiments, the step S200 includes:
s202: importing the inner electrode and outer electrode models into COMSOL software, and establishing space reaction models of the inner electrode and the outer electrode by using a plasma analysis module in Multiphysics;
s204: setting parameters in the space reaction model, and determining electron cloud density distribution, space ion cloud density distribution and space conductivity distribution of the inner electrode and the outer electrode space; the parameter includes one of a power supply voltage applied between the inner electrode and the outer electrode, a spatial distance between the inner electrode and the outer electrode, and a velocity of a fluid flowing between the inner electrode and the outer electrode.
In some embodiments, the step S200 further includes a step S206, which includes:
adjusting the power supply voltage of the inner electrode and the outer electrode, repeating the steps S202-204, and listing a space electron cloud density distribution diagram, a space ion cloud density distribution diagram and a conductivity distribution diagram between the inner electrode and the outer electrode according to the magnitude of the power supply voltage;
adjusting the space distance between the inner electrode and the outer electrode, repeating the steps S202-S204, and listing a space electron cloud density distribution diagram, a space ion cloud density distribution diagram and a conductivity distribution diagram between the inner electrode and the outer electrode according to the size of the space distance between the inner electrode and the outer electrode sheet;
adjusting the fluid velocity flowing between the inner electrode and the outer electrode, repeating the steps S202-S204, and listing the density distribution diagram of the space electron cloud, the density distribution diagram of the space ion cloud and the conductivity distribution diagram between the inner electrode and the outer electrode according to the magnitude of the fluid velocity.
In some embodiments, in said step S102:
calculating the sectional area of an air channel flowing through the plasma module according to the speed of the target polluted fluid, and determining the geometric dimension of the plasma module;
and adjusting the geometric dimension and material parameter of the inner electrode and the outer electrode according to the geometric dimension of the plasma module.
The invention provides a plasma module, which is manufactured by the manufacturing method of the plasma module, wherein the plasma module comprises an inner electrode, an outer electrode, an inner support frame, an outer support frame and an insulator, the inner electrode slice is a toothed electrode with one side or two sides arranged at equal intervals, and the inner electrode slice is connected with the inner support frame; the outer electrode is of a sheet or rod-shaped structure, the outer electrode is connected with the outer support frame, and the inner support frame is connected with the outer support frame through the insulator.
3. Advantageous effects
Compared with the prior art, the invention has the beneficial effects that:
(1) according to the invention, through the structural mode analysis of the inner electrode and the outer electrode plate of the plasma module and the space plasma analysis of the inner electrode and the outer electrode plate, the fluid speed control range, the humidity range and the matched power supply voltage regulation range of the polluted fluid to be treated are combined, the structural sizes and the materials of the inner electrode and the outer electrode plate, and the space distance and the space position of the inner electrode and the outer electrode plate are optimized, the problem that the traditional plasma module is easy to be polluted is solved, and the high-efficiency, long-acting and safe operation of the plasma module is realized.
(2) The plasma module manufacturing method provided by the invention adopts the structural design concept of 'point, line, surface' and 'three elements', namely, the 'sector' plasma is generated by 'point' and 'line' discharge of the inner electrode and the outer electrode plate (rod), the pollutant 'adhesion' area of the plasma action area is reduced or basically eliminated, and the waste gas treatment efficiency is improved.
(3) In the process of manufacturing the plasma module, the plasma module generates uniform electron cloud and ion cloud under the excitation of the plasma power supply matched with the inner electrode and the outer electrode by controlling the voltage change, and has triple purification effects on polluted gas molecules, namely 'electron-breaking' purification, 'active particle oxidation' purification and 'ultraviolet light decomposition' purification.
(4) In the manufacturing process of the plasma module, the disturbance effect of the inner electrode and the outer electrode plate (rod) on the air flow is amplified, so that the electrodes generate micro-vibration with certain frequency, the micro-vibration of the electrode plates weakens the adhesion force of pollutants with the surfaces of the inner electrode and the outer electrode plate on one hand, and on the other hand, the pollutants cannot be accumulated on the surfaces of the inner electrode and the outer electrode plate (rod) under the action of the energy of the micro-vibration and the action of the self gravity of the pollutants, thereby ensuring the self-cleaning of the surfaces of the electrode plates (rods) of the plasma module.
Drawings
FIG. 1 is a front view of a model structure of an inner electrode and an outer electrode according to an embodiment of the present invention;
FIG. 2 is a schematic diagram illustrating a vibration mode amplification of a certain order in an inner electrode model and an outer electrode model according to an embodiment of the present invention;
FIG. 3 is a layout view of the inner and outer electrode pads according to the embodiment of the present invention;
FIG. 4 is a spatial layout view b of the inner and outer electrode rods according to an embodiment of the present invention;
FIG. 5 is a schematic view of a plasma module according to an embodiment of the present invention;
fig. 6 is a flowchart of a method for manufacturing a plasma module according to an embodiment of the invention.
Detailed Description
To make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The invention is further described with reference to specific examples.
Example 1
As shown in fig. 6, the present example provides a plasma module manufacturing method, including the steps of:
s100: extracting models of an inner electrode and an outer electrode, and carrying out modal analysis; and respectively acquiring the modal frequency and the amplitude of the inner electrode and the outer electrode, and determining the geometric dimension and the material parameter of the inner electrode and the outer electrode.
Specifically, see steps S102-S110.
S102: respectively extracting inner electrode models and outer electrode models from the design drawing, introducing the inner electrode models and the outer electrode models into ANSYS software, and performing networking division on the inner electrode models and the outer electrode models.
Specifically, the spatial dimension information of the inner electrode and the outer electrode is extracted from a design drawing, and a three-dimensional model is drawn. In this example, as shown in fig. 1 and 2, the extracted inner electrode model is an electrode sheet, and one side or both sides of the inner electrode sheet are provided with tooth-shaped electrodes arranged at equal intervals; the outer electrode model in this example is an outer electrode sheet, and those skilled in the art should understand that the outer electrode model here may also be an outer electrode rod 3, which is not limited herein. And respectively extracting models of the inner electrode plate 1 and the outer electrode plate 2, importing the models of the inner electrode plate 1 and the outer electrode plate 2 into finite element analysis software such as ANSYS and the like, and performing networking division on the models to facilitate modal analysis between rear electrodes.
In the example, the inner electrode and the outer electrode are designed into a rod shape or a sheet shape instead of a barrel shape or a flat plate shape in the prior art, so that the contact area of dust and the electrode is reduced, and the dust is inconvenient to gather on the electrode. In addition, due to the smaller appearance design, the inner electrode and the outer electrode plate (rod) can generate micro-vibration with certain frequency under the disturbance action of air flow, the micro-vibration of the electrode plate weakens the adhesive force of pollutants with the surfaces of the inner electrode and the outer electrode plate, and the pollutants can not be accumulated on the surfaces of the inner electrode and the outer electrode plate (rod) under the action of the energy of the micro-vibration and the action of the self gravity of the pollutants, so that the self-cleaning of the surfaces of the electrode plate or the electrode rod in the plasma module is ensured.
S104: setting boundary conditions of modal analysis of the inner electrode and the outer electrode, changing the size and/or the material of models of the inner electrode and the outer electrode, carrying out modal analysis on the inner electrode and the outer electrode, and respectively determining modal frequency and amplitude of the models of the inner electrode and the outer electrode.
Specifically, the boundary conditions set in this example refer to the limit conditions of the mounting positions of the inner and outer electrodes, and it should be understood by those skilled in the art that the sizes and dimensions of the exhaust gas treatment devices are different under different working conditions. As shown in fig. 5, the inner electrode plate 1 is fixed to the inner support frame 4 and the outer electrode plate 2 is fixed to the outer support frame 5, and then the boundary conditions in this example are determined by the dimensions and spatial positions of the outer support frame 5 and the inner support frame 4. Preferably, the sectional area of an air channel in the equipment is calculated according to the speed of the target polluted fluid, and the geometric dimension of the plasma module is determined; determining boundary conditions of modal analysis of the inner electrode and the outer electrode according to the geometric dimension of the plasma module, and adjusting the geometric dimension and material parameters of the inner electrode and the outer electrode. Specifically, in this example, the speed of the airflow passing through the device is required to be 2m/s, and the airflow is converted into the sectional area of the air duct in the device according to the size of the airflow, and the size of the plasma module is designed according to the sectional area of the air duct. It should be noted that, in different working conditions, the speed of the airflow passing through the device is required to be different, and the controllable range of the airflow speed is generally different from 1.5m/s to 5.0 m/s.
The geometric dimensions of the models of the inner electrode sheet 1 and the outer electrode sheet 2 are adjusted, that is, the parameters of the models of the inner electrode sheet 1 and the outer electrode sheet 2 in the horizontal direction, such as the width and the thickness of the inner electrode sheet 1 and the outer electrode sheet 2, are changed respectively. According to the amplitude, listing a first relation list of modal frequency and amplitude of the electrode plate 1 and the outer electrode plate 2 model and geometric parameters of the model. The material of the inner electrode sheet 1 and the outer electrode sheet 2 is adjusted, and for example, the material of the electrodes is selected from metals such as stainless steel and titanium. And listing a second relation list of modal frequency and amplitude material parameters of the electrode plate 1 and the outer electrode plate 2 model. In the two lists, the mode frequency is selected to be 100-500 Hz, the amplitude is selected to be 0.2-0.5 mm, and the corresponding space size and material parameter of the inner electrode and the outer electrode are selected. It should be noted that, when the inner electrode and the outer electrode are in operation and are disturbed by the polluted air flow, the vibration frequency and the amplitude of the vibration are definitely present, and the selected modal frequency and amplitude are also different according to different working conditions. In addition, the simulated size is not exactly the same as the actual size, and is approximately a difference of millimeter order, and can be adjusted according to the actual manufacturing time.
S200: introducing the inner electrode and outer electrode models into analysis software, constructing an inner electrode and outer electrode space reaction model, and carrying out plasma analysis; and acquiring the space electron density distribution and the space ion density distribution data of the inner electrode and the outer electrode to determine the space distance and the space position of the inner electrode and the outer electrode.
Specifically, see steps S202-S204.
S202: and importing the models of the inner electrode and the outer electrode into COMSOL software, and establishing a space reaction model of the inner electrode and the outer electrode by using a plasma analysis module in Multiphysics.
Specifically, the models of the electrode sheet 1 and the outer electrode sheet 2 determined in step S104 are imported into finite element analysis software such as COMSOL, and a spatial reaction model of the electrode sheet 1 and the outer electrode sheet 2 is established by using a plasma analysis module in Multiphysics.
S204: setting parameters in the space reaction model, and determining electron cloud density distribution, space ion cloud density distribution and space conductivity distribution of the inner electrode and the outer electrode space; the parameters include the supply voltage of the inner and outer electrodes, the spatial distance, and the velocity of the fluid flowing between the inner and outer electrodes.
S206: and (3) determining the initial space distance of the inner electrode and the outer electrode according to the design drawing, adjusting the power supply voltage of the inner electrode and the outer electrode on the basis, and listing a space electron cloud density distribution diagram, a space ion cloud density distribution diagram and a conductivity distribution diagram between the inner electrode and the outer electrode according to the magnitude of the power supply voltage.
And then adjusting the space distance between the inner electrode and the outer electrode, and listing a space electron cloud density distribution diagram, a space ion cloud density distribution diagram and a conductivity distribution diagram between the inner electrode and the outer electrode under different voltages according to the space distance between the inner electrode and the outer electrode sheet.
It should be noted that the electron cloud distribution between the inner electrode and the outer electrode has a direct relationship with the added voltage, and the voltage selected in this example is a high-voltage pulse voltage, which is equivalent to a unidirectional dc voltage. After the inner and outer electrodes are conducted under pressure, ionization occurs in the air, wherein the ionization condition is related to the space distance between the inner and outer electrodes and the working state of the plasma module, for example, the fluid velocity in the exhaust gas and the exhaust gas component cause the ionization condition of the inner and outer electrodes to be different.
Therefore, when the ionization condition meets the threshold value under different wind speeds, the magnitude of the voltage is recorded. Then, the distance between the inner electrode and the outer electrode is used as a dependent variable; working voltages under different working conditions are deduced according to the actual space sizes of the inner electrode and the outer electrode, and finally the proper space size between the inner electrode and the outer electrode is determined. By applying different voltage ranges to the inner and outer electrodes, a uniform electron cloud density is produced. It should be noted that, in the process of constructing the plasma, the distance between the inner electrode and the outer electrode cannot be too close, otherwise, the density of the electron cloud is too high, which may cause local short circuit, and further cause the plasma field to be non-uniform; the treatment efficiency of the exhaust gas is lowered. In the present example, the plasma module generates uniform electron cloud and ion cloud under the excitation of the plasma power source matched with the inner electrode and the outer electrode, and has the 'triple purification' function of the polluted gas molecules, namely 'electron breaking' purification, 'active particle oxidation' purification and 'ultraviolet decomposition' purification.
Preferably, the fluid velocity flowing between the inner electrode and the outer electrode is adjusted to be a dependent variable, the voltage magnitude and the space distance between the inner electrode and the outer electrode are kept constant, and the space electron cloud density distribution diagram, the space ion cloud density distribution diagram and the conductivity distribution diagram between the inner electrode and the outer electrode are listed according to the magnitude of the fluid velocity. In this way, the spatial distance between the inner electrode and the outer electrode, the applied voltage and the fluid speed are respectively found out, and the spatial distance between the inner electrode and the outer electrode is determined by selecting 50% -80% of the critical value as a reference.
The step of adjusting the spatial positions of the inner electrode and the outer electrode comprises the following steps: the inner electrode and the outer electrode are arranged in a staggered way, so that a plasma field is generated between one inner (outer) electrode and two outer (inner) electrodes, and the uniformity of a plasma discharge surface on a module is ensured. It should be understood by those skilled in the art that the parameters selected herein may also be adjusted according to the fluid velocity control range and the humidity level range of the target contaminated fluid, and the spatial distance and the spatial position of the inner electrode and the outer electrode are not limited herein.
S300: inputting the space distance, space position, geometric dimension and material parameters of the inner electrode and the outer electrode into finite element analysis software to perform modal analysis test and ion simulation test; and (5) judging whether uniform electron cloud density can be generated between the inner electrode and the outer electrode, and if the uniform electron cloud density is large in deviation, repeating the steps S100-S300.
S400: and when the test is qualified, outputting the final space distance, the final space position, the final geometric dimension and the final material parameters of the inner electrode and the outer electrode according to the finite element analysis software, and manufacturing the plasma module.
As shown in fig. 5, specifically, the material geometric dimensions of the inner and outer electrodes are determined according to the above steps; according to the final space distance and the final space position of the inner electrode and the outer electrode and a design drawing, the inner electrode plate 1 is connected with the inner support frame 4; the outer electrode is connected with the outer support 5, the inner support frame 4 is connected with the outer support frame 5 through the insulator 6, and thereby, a complete plasma module is formed.
Example 2
The embodiment provides a plasma module on the basis of embodiment 1, which is manufactured by the above plasma module manufacturing method, wherein the plasma module comprises an inner electrode plate 1, an outer electrode, an inner support frame 4, an outer support frame 5 and an insulator 6, wherein one side or two sides of the inner electrode plate 1 are provided with tooth-shaped electrodes which are arranged at equal intervals and are connected with the inner support frame 4; the outer electrode may be one of an outer electrode sheet 2 or an outer electrode rod 3; the outer electrode is connected with the outer support frame, and the inner support frame 4 is connected with the outer support frame 5 through the insulator 6.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
It should also be noted that the terms "a," "an," "two," and the like in the description and claims of this application and in the above-described drawings are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (7)
1. A method of fabricating a plasma module, the method comprising:
s100: extracting inner electrode and outer electrode models, changing the size and/or material of the inner electrode and outer electrode models, and carrying out modal analysis; obtaining modal frequency and amplitude between the inner electrode and the outer electrode, and determining the geometric dimensions and material parameters of the inner electrode and the outer electrode;
s200: introducing the inner electrode and outer electrode models into analysis software, constructing an inner electrode and outer electrode space reaction model, and carrying out plasma analysis; acquiring space electron density distribution and space ion density distribution data of the inner electrode and the outer electrode to determine the space distance and the space position of the inner electrode and the outer electrode;
s300: inputting the space distance, space position, geometric dimension and material parameters of the inner electrode and the outer electrode into finite element analysis software to perform modal analysis test and ion simulation test;
s400: and when the test is qualified, manufacturing a plasma module according to the final space distance, the final space position, the final geometric dimension and the final material parameters of the inner electrode and the outer electrode, which are output by the finite element analysis software.
2. The plasma module manufacturing method according to claim 1, wherein in the step S100:
the extracted inner electrode model is an electrode plate, and one side or two sides of the electrode plate are provided with tooth-shaped electrodes which are arranged at equal intervals; the outer electrode model is one of an outer electrode plate or an outer electrode rod.
3. The method of claim 2, wherein the step S100 comprises:
s102: respectively extracting inner electrode models and outer electrode models from a design drawing, introducing the inner electrode models and the outer electrode models into ANSYS software, and performing networking division on the inner electrode models and the outer electrode models;
s104: setting boundary conditions of modal analysis of the inner electrode and the outer electrode, changing the size and/or the material of models of the inner electrode and the outer electrode, carrying out modal analysis on the inner electrode and the outer electrode, and respectively determining modal frequency and amplitude of the models of the inner electrode and the outer electrode;
s106: adjusting the geometric dimensions of the inner electrode model and the outer electrode model, repeating the steps S202-S204, and respectively determining a first relation list of modal frequency and amplitude of the inner electrode model and the outer electrode model and the geometric dimensions;
s108: adjusting material parameters of the inner electrode model and the outer electrode model, repeating the steps S202-S204, and respectively determining a second relation list of modal frequency and amplitude of the inner electrode model and the outer electrode model and the material parameters;
s110: and determining the geometric dimension and the material parameter according to the first relation list and the second relation list.
4. The method of claim 3, wherein the step S200 comprises:
s202: importing the inner electrode and outer electrode models into COMSOL software, and establishing space reaction models of the inner electrode and the outer electrode by using a plasma analysis module in Multiphysics;
s204: setting parameters in the space reaction model, and determining electron cloud density distribution, space ion cloud density distribution and space conductivity distribution of the inner electrode and the outer electrode space; the parameter includes one of a power supply voltage applied between the inner electrode and the outer electrode, a spatial distance between the inner electrode and the outer electrode, and a velocity of a fluid flowing between the inner electrode and the outer electrode.
5. The method of claim 4, wherein the step S200 further comprises a step S206, which comprises:
adjusting the power supply voltage of the inner electrode and the outer electrode, repeating the steps S202-204, and listing a space electron cloud density distribution diagram, a space ion cloud density distribution diagram and a conductivity distribution diagram between the inner electrode and the outer electrode according to the magnitude of the power supply voltage;
adjusting the space distance between the inner electrode and the outer electrode, repeating the steps S202-S204, and listing a space electron cloud density distribution diagram, a space ion cloud density distribution diagram and a conductivity distribution diagram between the inner electrode and the outer electrode according to the size of the space distance between the inner electrode and the outer electrode sheet;
adjusting the fluid velocity flowing between the inner electrode and the outer electrode, repeating the steps S202-S204, and listing the density distribution diagram of the space electron cloud, the density distribution diagram of the space ion cloud and the conductivity distribution diagram between the inner electrode and the outer electrode according to the magnitude of the fluid velocity.
6. The plasma module manufacturing method according to claim 3, wherein in the step S102:
calculating the sectional area of an air channel flowing through the plasma module according to the speed of the target polluted fluid, and determining the geometric dimension of the plasma module;
and adjusting the geometric dimension and material parameter of the inner electrode and the outer electrode according to the geometric dimension of the plasma module.
7. A plasma module manufactured by the method of manufacturing a plasma module according to any one of claims 1 to 6, wherein the plasma module comprises an inner electrode, an outer electrode, an inner support frame, an outer support frame and an insulator, the inner electrode plate is a toothed electrode having an equal distance arrangement on one side or two sides, and the inner electrode plate is connected with the inner support frame; the outer electrode is of a sheet or rod-shaped structure, the outer electrode is connected with the outer support frame, and the inner support frame is connected with the outer support frame through the insulator.
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