CN112230522B - Method for improving TFT-LCD panel pair group precision based on length measuring instrument - Google Patents
Method for improving TFT-LCD panel pair group precision based on length measuring instrument Download PDFInfo
- Publication number
- CN112230522B CN112230522B CN202011094112.XA CN202011094112A CN112230522B CN 112230522 B CN112230522 B CN 112230522B CN 202011094112 A CN202011094112 A CN 202011094112A CN 112230522 B CN112230522 B CN 112230522B
- Authority
- CN
- China
- Prior art keywords
- measuring instrument
- length measuring
- data
- glass substrate
- lcd panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Multimedia (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Liquid Crystal (AREA)
Abstract
The invention relates to the technical field of panel pairing, in particular to a method for improving TFT-LCD panel pairing accuracy based on a length measuring instrument.
Description
The application is a divisional application of a parent application named as 'a method for improving TFT-LCD panel pair accuracy' with the application number of 201811589654.7 and the application date of 2018, 12 and 25.
Technical Field
The invention relates to the technical field of panel pair groups, in particular to a method for improving TFT-LCD panel pair group precision based on a length measuring instrument.
Background
Nowadays, the TFT-LCD panel factory assembly mode is generally a whole glass assembly mode, and the Array substrate and CF substrate pattern control mode is manufactured by using a length measuring instrument machine to measure and monitor and then compensating to an exposure machine, and if the machine difference between different length measuring instrument machines is too large, the assembly abnormity is caused. The current method for correcting the machine difference between machines of the length measuring instrument uses the common 0 measurement as the adjustment basis, and the method can easily ignore the difference of the coordinate quadrants of the measuring machine and the influence of the mirror image relationship between the Array substrate and the CF substrate in the pairing process. Therefore, it is particularly necessary to provide a method for improving the accuracy of the TFT-LCD panel pair.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the method for improving the TFT-LCD panel pairing accuracy is provided, and the difference of a measuring machine of a length measuring instrument machine and the difference caused by a graph mirror image can be effectively reduced.
In order to solve the technical problems, the invention adopts the technical scheme that:
a method for improving TFT-LCD panel pair accuracy comprises the following steps:
s1, carrying out correction operation on the reference length measuring instrument machine to obtain correction data;
s2, respectively correcting the first length measuring instrument machine and the second length measuring instrument machine according to the correction data;
s3, aligning the Array glass substrate by using the corrected first length measuring instrument machine, and aligning the CF glass substrate by using the corrected second length measuring instrument machine;
s4, combining the Array glass substrate and the CF glass substrate obtained in the step S3 to obtain the TFT-LCD panel.
The invention has the beneficial effects that: after the correction data is obtained by correcting the benchmark length measuring instrument machine, the first length measuring instrument machine and the second length measuring instrument machine are corrected by taking the correction data as an adjustment target, and the corrected length measuring instrument machine aligns the glass substrate, so that the error caused by the difference of the measuring instruments between the first length measuring instrument machine and the second length measuring instrument machine is reduced, the group alignment precision of the Array glass substrate and the CF glass substrate is improved, and the group alignment precision of the TFT-LCD panel is further improved.
Drawings
FIG. 1 is a flowchart illustrating steps of a method for improving the accuracy of a TFT-LCD panel pair according to the present invention.
Detailed Description
In order to explain technical contents, achieved objects, and effects of the present invention in detail, the following description is made with reference to the accompanying drawings in combination with the embodiments.
The most key concept of the invention is as follows: the method for improving the TFT-LCD panel pairing accuracy is provided, the error caused by the machine difference between an Array length measuring instrument machine and a CF length measuring instrument machine is reduced, and the TFT-LCD panel pairing accuracy is improved.
Referring to fig. 1, the technical solution provided by the present invention is:
a method for improving TFT-LCD panel pair accuracy comprises the following steps:
s1, carrying out correction operation on the reference length measuring instrument machine to obtain correction data;
s2, respectively correcting the first length measuring instrument machine and the second length measuring instrument machine according to the correction data;
s3, aligning the Array glass substrate by using the corrected first length measuring instrument machine, and aligning the CF glass substrate by using the corrected second length measuring instrument machine;
s4, combining the Array glass substrate and the CF glass substrate obtained in the step S3 to obtain the TFT-LCD panel.
From the above description, the beneficial effects of the present invention are: after the correction data is obtained by correcting the benchmark length measuring instrument machine, the first length measuring instrument machine and the second length measuring instrument machine are corrected by taking the correction data as an adjustment target, and the corrected length measuring instrument machine aligns the glass substrate, so that the error caused by the difference of the measuring instruments between the first length measuring instrument machine and the second length measuring instrument machine is reduced, the group alignment precision of the Array glass substrate and the CF glass substrate is improved, and the group alignment precision of the TFT-LCD panel is further improved.
Further, step S1 is specifically:
s11, taking the center point of a standard sheet of a standard length measuring instrument machine as a rotation center, rotating the standard sheet to a preset initial position, and then measuring to obtain first data;
s12, taking a preset direction as a rotating direction, rotating the standard sheet 180 degrees to a target position, and measuring to obtain second data;
s13, judging whether the standard sheet needs to be subjected to multiple rotation measurement;
s14, if not, calculating the average value of the first data and the second data according to the mirror image relationship to obtain third data after the average value is obtained;
and S15, taking the third data as the correction data of the length measuring instrument machine base of the reference.
According to the description, due to the fact that the pair-combination abnormity can be caused by the machine difference during the measurement of the length measuring instrument machine, the correction data is obtained by performing correction operation on the reference length measuring instrument machine, the machine difference during the measurement is the lowest, and the pair-combination precision of the Array glass substrate and the CF glass substrate is improved.
Further, the preset initial position is a position corresponding to 0 degree of the length measuring instrument platform of the reference.
As can be seen from the above description, the preset initial position is set as the position corresponding to 0 degree of the length measuring instrument platform of the reference, which facilitates the calculation of the measurement correction data of the length measuring instrument platform.
Further, the preset direction is a clockwise direction.
According to the description, the preset direction is set to be the clockwise direction, so that the offset difference of the standard sheet in the rotating process can be reduced, and the alignment precision of the TFT-LCD panel is improved.
Further, step S13 further includes:
s131, if yes, rotating the standard sheet by 180 degrees to the preset initial position, and then measuring to obtain fourth data;
s132, comparing whether the fourth data is consistent with the first data;
and S133, if so, calculating the average value of the first data and the second data to obtain third data after the average value is obtained.
As can be seen from the above description, by comparing the measured fourth data with the first data, it is determined whether a position shift occurs during the rotation of the reference plate, and the error of the correction data can be reduced.
Further, step S133 further includes:
if not, sending out the prompt information of the abnormity of the length measuring instrument machine.
According to the description, when the length measuring instrument machine is abnormal, the abnormal information can be timely fed back to the working personnel by sending the abnormal prompt information, and the working personnel are informed to maintain the fault machine as soon as possible, so that the safety during working is effectively improved.
Further, step S4 is specifically:
combining the Array glass substrate and the CF glass substrate obtained in the step S3;
judging whether the Array glass substrate and the CF glass substrate are in pair abnormality or not;
if yes, the process returns to step S1.
Further, if there is no pair abnormality between the Array glass substrate and the CF glass substrate, a TFT-LCD panel is obtained.
Referring to fig. 1, a first embodiment of the present invention is:
a method for improving TFT-LCD panel pair accuracy comprises the following steps:
s1, carrying out correction operation on the reference length measuring instrument machine to obtain correction data; the method specifically comprises the following steps:
taking the central point of a standard sheet of a standard length measuring instrument machine platform as a rotation center, rotating the standard sheet to a preset initial position, and measuring to obtain first data; the preset initial position is a position corresponding to 0 degree of a length measuring instrument machine platform of the reference;
rotating the standard sheet by 180 degrees to a target position by taking a preset direction as a rotating direction, and then measuring to obtain second data; the preset direction is clockwise;
judging whether the standard sheet needs to be subjected to multiple rotation measurement;
if the standard sheet does not need to be subjected to multiple rotation measurement, calculating the average value of the first data and the second data according to the mirror image relationship to obtain third data after the average value is obtained; and taking the third data as the correction data of the length measuring instrument machine station of the reference.
If the standard sheet needs to be subjected to multiple rotation measurement, the standard sheet is rotated by 180 degrees to the preset initial position and then is subjected to measurement, and fourth data are obtained; comparing whether the fourth data and the first data are consistent;
and if the fourth data is consistent with the first data, calculating the average value of the first data and the second data to obtain third data after the average value is obtained. And if the fourth data is inconsistent with the first data, sending out a prompt message of the abnormity of the length measuring instrument machine.
S2, respectively correcting the first length measuring instrument machine and the second length measuring instrument machine according to the correction data;
s3, aligning the Array glass substrate by using the corrected first length measuring instrument machine, and aligning the CF glass substrate by using the corrected second length measuring instrument machine;
s4, combining the Array glass substrate and the CF glass substrate obtained in the step S3 to obtain the TFT-LCD panel. The method specifically comprises the following steps:
combining the Array glass substrate and the CF glass substrate obtained in the step S3;
judging whether the Array glass substrate and the CF glass substrate are in pair abnormality or not;
if the Array glass substrate and the CF glass substrate are abnormal in combination, returning to the step S1; and if the Array glass substrate and the CF glass substrate are not in pair abnormality, bonding the Array glass substrate and the CF glass substrate to obtain the TFT-LCD panel.
In summary, according to the method for improving the TFT-LCD panel pair accuracy provided by the present invention, after the calibration data is obtained by performing the calibration operation on the reference length measuring instrument machine, the first length measuring instrument machine and the second length measuring instrument machine are calibrated by using the calibration data as the adjustment target, and the calibrated length measuring instrument machine aligns the glass substrates, so as to reduce the error caused by the difference between the first length measuring instrument machine and the second length measuring instrument machine, improve the Array glass substrate and CF glass substrate pair accuracy, and further improve the TFT-LCD panel pair accuracy.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all equivalent changes made by using the contents of the present specification and the drawings, or applied directly or indirectly to the related technical fields, are included in the scope of the present invention.
Claims (4)
1. The method for improving the TFT-LCD panel pair group accuracy based on the length measuring instrument is characterized by comprising the following steps of: s1, carrying out correction operation on the reference length measuring instrument machine to obtain correction data;
s2, respectively correcting the first length measuring instrument machine and the second length measuring instrument machine according to the correction data;
s3, aligning the Array glass substrate by using the corrected first length measuring instrument machine, and aligning the CF glass substrate by using the corrected second length measuring instrument machine;
s4, combining the Array glass substrate and the CF glass substrate obtained in the step S3 to obtain a TFT-LCD panel;
step S1 specifically includes:
s11, taking the center point of a standard sheet of a standard length measuring instrument machine as a rotation center, rotating the standard sheet to a preset initial position, and then measuring to obtain first data; the preset initial position is a position corresponding to 0 degree of a length measuring instrument machine platform of the reference;
s12, taking a preset direction as a rotating direction, rotating the standard sheet by 180 degrees to a target position, and measuring to obtain second data;
s13, judging whether the standard sheet needs to be subjected to multiple rotation measurement;
step S13 further includes:
s131, if yes, rotating the standard sheet by 180 degrees to the preset initial position, and then measuring to obtain fourth data;
s132, comparing whether the fourth data is consistent with the first data;
s133, if yes, calculating an average value of the first data and the second data to obtain third data after the average value is obtained;
step S133 further includes:
if not, sending out prompt information of the abnormity of the length measuring instrument machine;
s14, if not, calculating the average value of the first data and the second data according to the mirror image relationship to obtain third data after the average value is obtained;
and S15, taking the third data as the correction data of the length measuring instrument machine base of the reference.
2. The length gauge-based method for improving TFT-LCD panel pair accuracy according to claim 1, wherein the preset direction is clockwise.
3. The method for improving the accuracy of the TFT-LCD panel pair group based on the length measuring instrument according to claim 1, wherein the step S4 specifically comprises:
combining the Array glass substrate and the CF glass substrate obtained in the step S3;
judging whether the Array glass substrate and the CF glass substrate are in pair abnormality or not;
if yes, the process returns to step S1.
4. The length measuring instrument-based method for improving the TFT-LCD panel pair accuracy is characterized in that if no pair abnormality exists between the Array glass substrate and the CF glass substrate, the TFT-LCD panel is obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011094112.XA CN112230522B (en) | 2018-12-25 | 2018-12-25 | Method for improving TFT-LCD panel pair group precision based on length measuring instrument |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811589654.7A CN109597282B (en) | 2018-12-25 | 2018-12-25 | Method for improving TFT-LCD panel pairing precision |
| CN202011094112.XA CN112230522B (en) | 2018-12-25 | 2018-12-25 | Method for improving TFT-LCD panel pair group precision based on length measuring instrument |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811589654.7A Division CN109597282B (en) | 2018-12-25 | 2018-12-25 | Method for improving TFT-LCD panel pairing precision |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112230522A CN112230522A (en) | 2021-01-15 |
| CN112230522B true CN112230522B (en) | 2022-06-07 |
Family
ID=65963410
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011094112.XA Active CN112230522B (en) | 2018-12-25 | 2018-12-25 | Method for improving TFT-LCD panel pair group precision based on length measuring instrument |
| CN202011094215.6A Active CN112230523B (en) | 2018-12-25 | 2018-12-25 | Method for improving TFT-LCD panel pair accuracy based on standard sheet |
| CN201811589654.7A Active CN109597282B (en) | 2018-12-25 | 2018-12-25 | Method for improving TFT-LCD panel pairing precision |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011094215.6A Active CN112230523B (en) | 2018-12-25 | 2018-12-25 | Method for improving TFT-LCD panel pair accuracy based on standard sheet |
| CN201811589654.7A Active CN109597282B (en) | 2018-12-25 | 2018-12-25 | Method for improving TFT-LCD panel pairing precision |
Country Status (1)
| Country | Link |
|---|---|
| CN (3) | CN112230522B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110488512B (en) * | 2019-06-11 | 2021-12-24 | 惠科股份有限公司 | Correction method and correction system of display panel measuring equipment |
| CN114415476A (en) * | 2022-01-18 | 2022-04-29 | 京东方科技集团股份有限公司 | Standard sheet, preparation method thereof and machine error calibration method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001257159A (en) * | 2000-03-13 | 2001-09-21 | Hitachi Ltd | Alignment method and alignment control system |
| JP2010191059A (en) * | 2009-02-17 | 2010-09-02 | Hitachi High-Technologies Corp | Exposure apparatus, exposure method and method for manufacturing panel substrate for display |
| CN103075970A (en) * | 2012-12-27 | 2013-05-01 | 深圳市华星光电技术有限公司 | Method of compensating orthogonal degree of length measuring device and length measuring device using the same |
| CN103292709A (en) * | 2013-05-24 | 2013-09-11 | 深圳市华星光电技术有限公司 | Method for routinely testing and automatically correcting length measuring machine |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203274635U (en) * | 2013-06-03 | 2013-11-06 | 武汉钢铁(集团)公司 | Calibration device for clamping and accurately positioning on-gauge plate on length measuring instrument |
| CN106249446A (en) * | 2016-07-20 | 2016-12-21 | 武汉华星光电技术有限公司 | Test platform and there is the gauging machine of described test platform |
-
2018
- 2018-12-25 CN CN202011094112.XA patent/CN112230522B/en active Active
- 2018-12-25 CN CN202011094215.6A patent/CN112230523B/en active Active
- 2018-12-25 CN CN201811589654.7A patent/CN109597282B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001257159A (en) * | 2000-03-13 | 2001-09-21 | Hitachi Ltd | Alignment method and alignment control system |
| JP2010191059A (en) * | 2009-02-17 | 2010-09-02 | Hitachi High-Technologies Corp | Exposure apparatus, exposure method and method for manufacturing panel substrate for display |
| CN103075970A (en) * | 2012-12-27 | 2013-05-01 | 深圳市华星光电技术有限公司 | Method of compensating orthogonal degree of length measuring device and length measuring device using the same |
| CN103292709A (en) * | 2013-05-24 | 2013-09-11 | 深圳市华星光电技术有限公司 | Method for routinely testing and automatically correcting length measuring machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109597282A (en) | 2019-04-09 |
| CN112230522A (en) | 2021-01-15 |
| CN112230523B (en) | 2023-04-07 |
| CN109597282B (en) | 2020-11-24 |
| CN112230523A (en) | 2021-01-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112230522B (en) | Method for improving TFT-LCD panel pair group precision based on length measuring instrument | |
| CN103292709B (en) | Gauging machine routine testing and automatic compensation method | |
| US8274642B2 (en) | Maskless exposure method | |
| US7826068B2 (en) | Method for correcting measured values resulting from the bending of a substrate | |
| CN102478815B (en) | Automatic calibration and compensation for a cnc machine table and an associated probe | |
| TW201520702A (en) | Misalignment error compensation method, system, and patterning method | |
| US8638438B2 (en) | Self-calibrated alignment and overlay target and measurement | |
| US20230401988A1 (en) | Brightness correcting method of display panel and brightness correcting device | |
| CN107340614B (en) | System and method for detecting or correcting position | |
| JP2017026687A (en) | Exposure apparatus, exposure method, and device manufacturing method | |
| JPH07260472A (en) | Orthogonality measuring method for stage device | |
| JP2019162692A (en) | Position information restoration method for robot | |
| CN107621245B (en) | Automatic point position correction method and device for measuring machine | |
| CN108519726B (en) | Method and device for correcting exposure pattern and exposure equipment | |
| TWI384528B (en) | Coincidence inspection system | |
| US20220406636A1 (en) | Monitor wafer measuring method and measuring apparatus | |
| US20150109596A1 (en) | Method and system for achieving automatic compensation in glass substrate exposure process | |
| US8219348B2 (en) | Method for calibrating and/or correcting a display device having a needle, the needle being able to move in rotation about an axis of rotation | |
| JP5082506B2 (en) | Calibration support apparatus, calibration support method, program, and recording medium | |
| KR20040070676A (en) | Method for improving tool induced shift in overlay device | |
| CN106324892B (en) | A kind of exposure system being used to prepare display base plate and exposal control method | |
| KR102045234B1 (en) | Method of verifying display lamination aligns | |
| CN112767495B (en) | Camera and valve angle calibration method, system, electronic equipment and storage medium | |
| WO2023190400A1 (en) | Method for manufacturing semiconductor device | |
| KR100589850B1 (en) | Method for amending error of overlay inspection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |