CN112210831A - Diffusion furnace for manufacturing photovoltaic cell - Google Patents
Diffusion furnace for manufacturing photovoltaic cell Download PDFInfo
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- CN112210831A CN112210831A CN202010958561.8A CN202010958561A CN112210831A CN 112210831 A CN112210831 A CN 112210831A CN 202010958561 A CN202010958561 A CN 202010958561A CN 112210831 A CN112210831 A CN 112210831A
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 41
- 239000010453 quartz Substances 0.000 claims abstract description 36
- 238000007789 sealing Methods 0.000 claims abstract description 20
- 238000001125 extrusion Methods 0.000 claims abstract description 11
- 239000002775 capsule Substances 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 10
- 230000002745 absorbent Effects 0.000 claims description 8
- 239000002250 absorbent Substances 0.000 claims description 8
- 238000005260 corrosion Methods 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 4
- 230000003446 memory effect Effects 0.000 claims description 3
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052710 silicon Inorganic materials 0.000 abstract description 6
- 239000010703 silicon Substances 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 22
- 238000000034 method Methods 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 9
- 229910019213 POCl3 Inorganic materials 0.000 description 7
- 239000000460 chlorine Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 229910052902 vermiculite Inorganic materials 0.000 description 1
- 235000019354 vermiculite Nutrition 0.000 description 1
- 239000010455 vermiculite Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/04—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Furnace Details (AREA)
Abstract
The invention relates to the technical field of photovoltaic cell manufacturing, and discloses a diffusion furnace for manufacturing a photovoltaic cell, which comprises a furnace body, wherein a quartz tube is arranged inside the furnace body, an inner seal piece is arranged on the inner wall of the quartz tube, a furnace door is rotatably connected to the outer wall of the furnace body, an outer cover is sleeved on the side wall of the furnace body, a hoop is fixedly connected to one end, connected with the furnace body, of the outer cover, an extrusion piece is arranged between the inner seal piece and the furnace door, and a one-way air valve is arranged on the outer wall of the furnace door. The invention prevents the gas in the quartz tube from leaking outwards by the sealing effect of the inner sealing piece, reduces the heat loss caused by air convection by matching with the effect of the vacuum cavity in the inner sealing piece, thereby reducing the temperature difference between the quartz tube opening and the inner cavity of the quartz tube, improving the uniformity of the silicon chip square resistance in the quartz tube, improving the extrusion force on the inner wall of the quartz tube by the deformation of the inner arc plate at high temperature, reducing the connecting gap and further improving the sealing property.
Description
Technical Field
The invention relates to the technical field of photovoltaic cell manufacturing, in particular to a diffusion furnace for manufacturing a photovoltaic cell.
Background
In the practical production of silicon solar cells, P-type silicon wafers are adopted, and an N-type layer is required to be formed to obtain PN junctions, which is usually realized by phosphorus source diffusion under the condition of high temperature and by using phosphorus oxychloride (POCl)3) Liquid diffusion is a common method, namely practical protective gas is used, impurity source steam is brought into a high-temperature diffusion furnace through a constant-temperature liquid source bottle, and is subjected to high-temperature thermal decomposition to react with the surface of a silicon wafer, so that impurity atoms are reduced and diffused into the silicon wafer. During the above reaction, POCl3And oxygen gas at high temperature to generate chlorine gas (Cl)2) The highly toxic gas with strong pungent smell has suffocating property, and if the sealing property of the furnace body is poor, the chlorine gas can be diffused into the environment to causeEnvironmental pollution and even poisoning of operating workers.
Traditional furnace body generally adopts rubber seal ring to seal, but because the furnace body heats the back temperature and reaches more than 600 degrees centigrade, rubber is easy to expand and warp under the high temperature, because do not have sufficient extrusion force after the inflation, consequently make and have the clearance between rubber seal ring and the furnace body, reduced sealed performance, gas mixture in the quartz capsule can be through the joint gap diffusion to external environment in, because gas mixture has the Cl that contains to be harmful2And unreacted POCl3Steam, which is toxic, easily pollutes the environment and in particular can cause hazards to the workers in the vicinity of the machine.
Disclosure of Invention
Aiming at the defects of the existing diffusion furnace in the use process in the background technology, the invention provides the diffusion furnace for manufacturing the photovoltaic cell, which has the advantages of good sealing performance, gas leakage absorption and gas leakage alarm, and solves the problems of reduced sealing performance at high temperature and environmental pollution caused by gas leakage in the background technology.
The invention provides the following technical scheme: the utility model provides a diffusion furnace is used in photovoltaic cell manufacturing, includes the furnace body, the inside of furnace body is equipped with the quartz capsule, the inner wall of quartz capsule is equipped with interior seal, the outer wall of furnace body rotates and is connected with the furnace gate, the lateral wall cover of furnace body is equipped with the dustcoat, the one end fixedly connected with hoop that dustcoat and furnace body are connected, be provided with the extruded article between interior seal and the furnace gate, install one-way pneumatic valve on the outer wall of furnace gate, be connected with the pressure gauge in the quartz capsule.
Preferably, interior closure includes fagging, interior arc board and outer arc board, the fagging joint is on the inner wall of quartz capsule, the fagging is the annular, interior arc board and outer arc board all weld on the outer wall of fagging, form the vacuum cavity between interior arc board and the outer arc board.
Preferably, the hoop comprises an inner ring, an outer ring and a support ring, the inner ring is attached to the outer wall of the furnace body, the support ring is located between the inner ring and the outer ring and supports the inner ring and the outer ring, and the inner ring is a rubber gasket.
Preferably, fagging, inner arc board and support ring all adopt memory alloy to make and have two journey memory effect, fagging and inner arc board all become the arc, fagging and inner arc board can reverse sunken when the high temperature, the support ring is annular wavy, the crest height of support ring increases when the high temperature.
Preferably, the top fixed mounting of dustcoat has the shower head, export and exit have been seted up to the bottom of dustcoat and have been equipped with out the liquid valve, there is the absorbent bottle at the top of dustcoat through the pipe connection, the exit end of absorbent bottle is equipped with the solenoid valve, the PH tester is installed to the bottom of dustcoat.
Preferably, the electric connection has the controller between pressure gauge and the solenoid valve, the switching of controller control solenoid valve, PH test meter and play liquid valve all with controller electric connection.
Preferably, the outer walls of the inner sealing piece and the furnace door are both provided with anti-corrosion coatings, and the outer cover is made of transparent quartz glass.
The invention has the following beneficial effects:
1. the invention prevents the gas in the quartz tube from leaking outwards by the sealing effect of the inner sealing piece, reduces the heat loss caused by air convection by matching with the effect of the vacuum cavity in the inner sealing piece, thereby reducing the temperature difference between the quartz tube opening and the inner cavity of the quartz tube, improving the uniformity of the silicon chip square resistance in the quartz tube, improving the extrusion force on the inner wall of the quartz tube by the deformation of the inner arc plate at high temperature, reducing the connecting gap and further improving the sealing property.
2. The outer cover is arranged outside the furnace body, the inner sealing piece and the outer cover are separated by the furnace door, a small part of gas leaked from the quartz tube can be dissolved and absorbed by utilizing the water solution introduced into the outer cover, the gas is prevented from polluting the environment, and the alarm effect can be played through the reaction of the gas and the water solution, so that the aim of monitoring the sealing performance in real time is fulfilled.
3. According to the invention, the pressure gauge, the PH tester and the liquid outlet valve are connected with the electromagnetic valve through the controller to form the feedback circuit, so that the function of controlling the opening and closing of the electromagnetic valve is achieved, materials capable of absorbing harmful gases can be introduced into the outer cover in time when the sealing performance suddenly drops, severe contact reaction between a large amount of harmful gases and water is avoided, meanwhile, the harmful gases are prevented from leaking into the environment, and the electromagnetic valve has good protection performance.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the structure of the hoop;
fig. 3 is a front view of the present invention.
In the figure: 1. a furnace body; 2. a quartz tube; 3. an inner seal; 301. a supporting plate; 302. an inner arc plate; 303. an outer arc plate; 4. a furnace door; 5. a housing; 6. a hoop; 601. an inner ring; 602. an outer ring; 603. a support ring; 7. an extrusion; 8. a shower head; 9. an absorbent bottle; 10. a pressure gauge; 11. a controller; 12. an electromagnetic valve; 13. a pH tester; 14. a one-way air valve; 15. a liquid outlet valve.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, a diffusion furnace for manufacturing a photovoltaic cell comprises a furnace body 1, a quartz tube 2 is arranged inside the furnace body 1, a protrusion is arranged on the inner wall of the quartz tube 2, the protrusion is integrally formed with the quartz tube 2, an inner seal 3 is arranged on the inner wall of the quartz tube 2, the inner seal 3 is in contact with the protrusion, the protrusion plays a role of supporting the inner seal 3, a rubber seal ring can be placed at the joint of the inner seal 3 and the inner wall of the quartz tube 2, a furnace door 4 is rotatably connected to the outer wall of the furnace body 1, the furnace door 4 is made of the same material as the furnace body 1 and is generally made of stainless steel, the furnace door 4 further seals the diffusion furnace, an outer cover 5 is sleeved on the side wall of the furnace body 1, and the outer cover 5 is used for neutralizing a gas mixture leaked from the seal toAnd can alarm; be provided with extruded part 7 between interior piece 3 and the furnace gate 4, because in the reaction process, produce the heat in the quartz capsule 2, the heat leads to gaseous inflation, can produce the extrusion force to interior piece 3, consequently, exert reverse extrusion force to interior piece 3 through extruded part 7, guarantee the stability of interior piece 3, extruded part 7 adopts spring and threaded rod to mutually support, and play the fixed action to the threaded rod through furnace gate 4, install one-way air valve 14 on the outer wall of furnace gate 4, one-way air valve 14 is used for gaseous effusing, and can reduce gaseous flow and velocity of flow of outdiffusion, because the main harmful substance that gas mixture contains is Cl2And POCl3Steam, POCl3The reaction is strong when the gas is dissolved in water, so that the one-way gas valve 14 is used for reducing the amount of gas mixture diffused from the inner cavity of the furnace door 4 to the inner cavity of the outer cover 5, and the phenomenon of overlarge reaction when the gas is dissolved in water can be avoided; in addition, a sealing gasket is arranged at the joint of the furnace door 4 and the furnace body 1, so that the gas leakage speed is reduced.
The inner sealing piece 3 comprises a supporting plate 301, an inner arc plate 302 and an outer arc plate 303, the supporting plate 301 is connected to the inner wall of the quartz tube 2 in a clamping manner, the supporting plate 301 is annular, the supporting plate 301 is made of soft materials and has functions similar to a rubber gasket and can be extruded, the inner arc plate 302 and the outer arc plate 303 are both welded to the outer wall of the supporting plate 301, the inner arc plate 302 and the supporting ring 603 are all made of memory alloy and have a two-way memory effect, referring to fig. 1, the supporting plate 301 and the inner arc plate 302 are both arc-shaped, the supporting plate 301 and the inner arc plate 302 can be reversely sunken at high temperature, the outer arc plate 303 and the supporting plate 301 are coaxial, a vacuum cavity is formed between the inner arc plate 302 and the outer arc plate 303, the vacuum cavity reduces heat dissipation caused by air convection due to reduction of gas density, thereby avoiding the problem that the temperature of a sealed port of the quartz tube 2 is reduced too much, in addition, when the temperature of the inner, referring to fig. 1, the inner arc plate 302 is recessed from the right concave state to the left side, and during the conversion process, the radius of the inner arc plate 302 is increased, and the inner arc plate 302 applies extrusion force to the supporting plate 301, so that the extrusion force between the supporting plate 301 and the inner wall of the quartz tube 2 is increased, and the sealing performance is improved; in addition, due to the heat insulation effect of the vacuum cavity between the outer arc plate 303 and the supporting plate 301, the temperature of the outer arc plate 303 is lower than that of the inner arc plate 302, so that the deformation speed of the outer arc plate 303 is lower than that of the inner arc plate 302, the space of the vacuum cavity is increased in the deformation process, the density of gas remaining in the vacuum cavity is reduced, and the heat insulation effect of the vacuum cavity is further improved.
One end of the outer cover 5 connected with the furnace body 1 is fixedly connected with a hoop 6, the hoop 6 comprises an inner ring 601, an outer ring 602 and a support ring 603, the inner ring 601 is attached to the outer wall of the furnace body 1, the support ring 603 is positioned between the inner ring 601 and the outer ring 602 and supports the inner ring 601 and the outer ring 602, the inner ring 601 is a rubber gasket, and the outer ring 602 is made of hard and non-deformable materials; referring to fig. 2, the supporting ring 603 is in a wave shape of a ring, and the peak height of the supporting ring 603 increases at high temperature, when POCl at the escaping position is increased3When dissolved in water, the material releases heat, the temperature rises, the height of the supporting ring 603 is increased, the extrusion force of the supporting ring 603 on the inner ring 601 and the outer ring 602 is increased, and the inner ring 601 is mainly extruded to be attached to the outer wall of the furnace body 1 because the outer ring 602 has higher hardness.
The top of the outer cover 5 is fixedly provided with a spray header 8, water is introduced into the inner cavity of the outer cover 5 through the spray header 8, the water in the inner cavity of the outer cover 5 is not full, the liquid level can be positioned below the outlet of the one-way air valve 14, and the leakage of excessive water to the inner cavity of the furnace door 4 and Cl can be avoided2And POCl3The density of the water is smaller than that of air, so that the water flows below the outer cover 5 and is dissolved in water, the speed of water flow can be reduced by a spraying mode, water is slowly injected into an inner cavity of the outer cover 5, a large amount of escaped gas in the outer cover 5 can be prevented from violently reacting, an outlet is formed in the bottom of the outer cover 5, a liquid outlet valve 15 is arranged at the outlet, the top of the outer cover 5 of the furnace body 1 is connected with an absorbent bottle 9 through a pipeline, an electromagnetic valve 12 is arranged at the outlet end of the absorbent bottle 9, and a PH tester 13 is arranged at the bottom end of the outer cover; pressure gauge 10 is connected in quartz capsule 2, electric connection has controller 11 between pressure gauge 10 and the solenoid valve 12, the switching of controller 11 control solenoid valve 12, PH tester 13 and drain valve 15 all with controller 11 electric connection, in-process at diffusion reaction, admit air simultaneously and give vent to anger in quartz capsule 2, consequently, pressure gauge 10 is the atmospheric pressure in the dynamic measurement quartz capsule 2, because the process of admitting air and giving vent to anger is dynamic, it is unavoidable to measure to have the error, work as because high temperature makes rubber seal ring warp backWhen the gap is generated, if the gap is small, the amount of gas dissipated per unit time is small, and the pressure gauge 10 may not be accurately measured, but as the diffusion reaction proceeds, the amount of gas dissipated gradually increases, accumulates in the inner cavity of the oven door 4, and diffuses into the inner cavity of the housing 5 through the one-way gas valve 14, and Cl is generated2After the water is dissolved in the water, the color of the water in the outer cover 5 is gradually increased, the PH value of the water solution measured by the PH meter 13 is gradually reduced, and the leakage condition can be known by calculating the speed of reducing the value of the PH meter 13; if the tightness is suddenly reduced and the amount of dissipated gas is suddenly increased, the speed of the decrease of the value of the PH meter 13 is suddenly increased, at this time, the controller 11 controls the electromagnetic valve 12 and the water outlet valve at the bottom outlet of the outer cover 5 to be opened, water in the inner cavity of the outer cover 5 flows out, so that a large amount of gas is prevented from being dissolved in water and reacting strongly, and inert materials in the absorbent bottle 9, such as sand, vermiculite and the like, enter the outer cover 5 to adsorb moisture and gas on the inner wall of the outer cover 5, so as to reduce the hydrolysis reaction of the gas.
The outer walls of the inner sealing piece 3 and the furnace door 4 are both provided with anti-corrosion coatings due to Cl2And POCl3All are corrosive gases, therefore, the corrosion of the outer cover 5 is reduced by the corrosion-resistant coating, the outer cover 5 is made of transparent quartz glass, the color of the aqueous solution in the outer cover 5 can be observed, whether the situation happens can be judged by the color of the aqueous solution, and in addition, the quartz material has the performance of high temperature resistance and corrosion resistance, and in POCl3When meeting water, the quartz glass can emit a large amount of heat and white smoke, and can play a good protection role.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a photovoltaic cell makes with diffusion furnace, includes furnace body (1), the inside of furnace body (1) is equipped with quartz capsule (2), its characterized in that: the inner wall of quartz capsule (2) is equipped with interior seal (3), the outer wall of furnace body (1) rotates and is connected with furnace gate (4), the lateral wall cover of furnace body (1) is equipped with dustcoat (5), one end fixedly connected with hoop (6) that dustcoat (5) and furnace body (1) are connected, be provided with extrusion spare (7) between interior seal (3) and furnace gate (4), install one-way pneumatic valve (14) on the outer wall of furnace gate (4), quartz capsule (2) in-connection has pressure gauge (10).
2. The diffusion furnace for photovoltaic cell production according to claim 1, characterized in that: interior seal (3) include fagging (301), inner arc board (302) and outer arc board (303), fagging (301) joint is on the inner wall of quartz capsule (2), fagging (301) are the annular, inner arc board (302) and outer arc board (303) all weld on the outer wall of fagging (301), form the vacuum cavity between inner arc board (302) and outer arc board (303).
3. The diffusion furnace for photovoltaic cell production according to claim 1, characterized in that: the hoop (6) comprises an inner ring (601), an outer ring (602) and a supporting ring (603), the inner ring (601) is attached to the outer wall of the furnace body (1), the supporting ring (603) is located between the inner ring (601) and the outer ring (602) and supports the inner ring (601) and the outer ring (602), and the inner ring (601) is a rubber gasket.
4. The diffusion furnace for photovoltaic cell production according to claim 2 or 3, characterized in that: fagging (301), inner arc board (302) and brace ring (603) all adopt memory alloy to make and have two journey memory effect, fagging (301) and inner arc board (302) all become the arc, fagging (301) and inner arc board (302) can reverse sunken when the high temperature, brace ring (603) are annular wavy, the crest height increase when the high temperature of brace ring (603).
5. The diffusion furnace for photovoltaic cell production according to claim 1, characterized in that: the top fixed mounting of dustcoat (5) has shower head (8), export and exit have been seted up to the bottom of dustcoat (5) and have been equipped with out liquid valve (15), there is absorbent bottle (9) at the top of dustcoat (5) through the pipe connection, the exit end of absorbent bottle (9) is equipped with solenoid valve (12), PH test meter (13) are installed to the bottom of dustcoat (5).
6. The diffusion furnace for photovoltaic cell production according to claim 5, characterized in that: electric connection has controller (11) between pressure gauge (10) and solenoid valve (12), the switching of controller (11) control solenoid valve (12), PH tester (13) and play liquid valve (15) all with controller (11) electric connection.
7. The diffusion furnace for photovoltaic cell production according to claim 1, characterized in that: the outer walls of the inner sealing piece (3) and the furnace door (4) are both provided with anti-corrosion coatings, and the outer cover (5) is made of transparent quartz glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010958561.8A CN112210831A (en) | 2020-09-14 | 2020-09-14 | Diffusion furnace for manufacturing photovoltaic cell |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010958561.8A CN112210831A (en) | 2020-09-14 | 2020-09-14 | Diffusion furnace for manufacturing photovoltaic cell |
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| Publication Number | Publication Date |
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| CN112210831A true CN112210831A (en) | 2021-01-12 |
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| CN202010958561.8A Pending CN112210831A (en) | 2020-09-14 | 2020-09-14 | Diffusion furnace for manufacturing photovoltaic cell |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113463092A (en) * | 2021-07-02 | 2021-10-01 | 济宁矿业集团海纳科技机电股份有限公司 | Laser cladding sealing device |
| CN116695251A (en) * | 2023-08-04 | 2023-09-05 | 常州市乐萌压力容器有限公司 | Gem furnace bottom plate and processing technology thereof |
Citations (7)
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| CN113463092A (en) * | 2021-07-02 | 2021-10-01 | 济宁矿业集团海纳科技机电股份有限公司 | Laser cladding sealing device |
| CN113463092B (en) * | 2021-07-02 | 2023-12-26 | 山东大航激光智能装备有限公司 | Laser cladding sealing device |
| CN116695251A (en) * | 2023-08-04 | 2023-09-05 | 常州市乐萌压力容器有限公司 | Gem furnace bottom plate and processing technology thereof |
| CN116695251B (en) * | 2023-08-04 | 2023-10-03 | 常州市乐萌压力容器有限公司 | Gem furnace bottom plate and processing technology thereof |
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