CN112210759A - Heater and vacuum coating device - Google Patents
Heater and vacuum coating device Download PDFInfo
- Publication number
- CN112210759A CN112210759A CN202011102437.8A CN202011102437A CN112210759A CN 112210759 A CN112210759 A CN 112210759A CN 202011102437 A CN202011102437 A CN 202011102437A CN 112210759 A CN112210759 A CN 112210759A
- Authority
- CN
- China
- Prior art keywords
- housing
- heater
- shell
- aluminum
- heating wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 15
- 238000010438 heat treatment Methods 0.000 claims abstract description 57
- 239000000463 material Substances 0.000 claims abstract description 38
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 36
- 125000001153 fluoro group Chemical group F* 0.000 claims abstract description 13
- 238000005215 recombination Methods 0.000 claims abstract description 13
- 230000006798 recombination Effects 0.000 claims abstract description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 47
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 47
- 229910000838 Al alloy Inorganic materials 0.000 claims description 33
- 239000011224 oxide ceramic Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
- 229910001055 inconels 600 Inorganic materials 0.000 claims description 9
- 229910052574 oxide ceramic Inorganic materials 0.000 claims description 9
- 229910000792 Monel Inorganic materials 0.000 claims description 6
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 6
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 6
- UZLYXNNZYFBAQO-UHFFFAOYSA-N oxygen(2-);ytterbium(3+) Chemical compound [O-2].[O-2].[O-2].[Yb+3].[Yb+3] UZLYXNNZYFBAQO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- HWLDNSXPUQTBOD-UHFFFAOYSA-N platinum-iridium alloy Chemical compound [Ir].[Pt] HWLDNSXPUQTBOD-UHFFFAOYSA-N 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- 229910001256 stainless steel alloy Inorganic materials 0.000 claims description 6
- 229910003454 ytterbium oxide Inorganic materials 0.000 claims description 6
- 229940075624 ytterbium oxide Drugs 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 5
- RHBRWKIPYGZNMP-UHFFFAOYSA-N [O--].[O--].[O--].[Al+3].[Cr+3] Chemical compound [O--].[O--].[O--].[Al+3].[Cr+3] RHBRWKIPYGZNMP-UHFFFAOYSA-N 0.000 claims description 4
- -1 fluorine ions Chemical class 0.000 abstract description 25
- 239000011737 fluorine Substances 0.000 abstract description 23
- 238000005452 bending Methods 0.000 abstract description 7
- 239000000843 powder Substances 0.000 abstract description 6
- 238000005260 corrosion Methods 0.000 abstract description 5
- 230000007797 corrosion Effects 0.000 abstract description 5
- 230000002035 prolonged effect Effects 0.000 abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- 230000001681 protective effect Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 9
- 239000000956 alloy Substances 0.000 description 6
- 229910000566 Platinum-iridium alloy Inorganic materials 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004512 die casting Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 239000010963 304 stainless steel Substances 0.000 description 1
- 229910000619 316 stainless steel Inorganic materials 0.000 description 1
- 229910000952 Be alloy Inorganic materials 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- BIJOYKCOMBZXAE-UHFFFAOYSA-N chromium iron nickel Chemical compound [Cr].[Fe].[Ni] BIJOYKCOMBZXAE-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Abstract
The invention relates to a heater and a vacuum coating device, wherein the heater comprises a heating wire, a first shell and a second shell, wherein: the second shell is coated on the outer side of the first shell, and the outer surface of the second shell, which is far away from the first shell, has fluorine atom recombination loss rate less than 5 multiplied by 10‑3The material of (a); the first shell covers the outer side of the heating wire, the ratio of the thermal expansion coefficient of the first shell to the thermal expansion coefficient of the second shell is 0.5-2, the outer surface of the second shell, which is far away from the first shell, has excellent corrosion resistance to fluorine ions in air so as to prevent the fluorine ions from contacting with the heating wire, the protection of the heating wire is realized, the condition that powder falls in the cavity and on a workpiece after a protection sleeve of the heating wire is corroded is avoided, the service life of the heating wire is prolonged, the starting rate and the yield of equipment are improved, and the product yield is improved; and the heater strip is convenient to bend, so that the strength, toughness and ductility of the heater are better, and various bending shapes are convenient to realize.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a heater and a vacuum coating device.
Background
Vacuum coating is a process for coating a thin film device under a vacuum condition, and in the coating production process, in order to improve the production efficiency, a heating plate with a protective sleeve is generally adopted to raise the temperature of a cathode, heat a workpiece or raise the temperature of the periphery of the workpiece. In general, the protective sleeve of the heating wire is made of a material having good high temperature resistance and oxidation resistance, such as Inconel600 (nickel-chromium-iron-based solid solution strengthened alloy), SUS304(304 stainless steel), SUS310(310 stainless steel), and SUS316(316 stainless steel), to protect the heating plate.
For the existing vacuum coating device with the online cleaning function, the process comprises the step of etching and cleaning the polysilicon film deposited on the inner wall of the process chamber and the surface of the cathode through fluorine ions, but the fluorine ions have strong corrosivity, the protective sleeves made of materials such as Inconel600, SUS304, SUS310, SUS316 and the like are strongly corroded, the materials of the protective sleeves are damaged after being partially corroded, powder or block structures can be formed, the process chamber and workpieces are polluted after the powder or block structures fall, the product yield is reduced, and after the protective sleeves are completely corroded, the heating wire fails, the heating function is lost, and the starting rate and the yield of equipment are reduced.
Disclosure of Invention
Therefore, it is necessary to provide a heater and a vacuum coating apparatus for solving the problems that the protective sleeve of the heating wire is easy to corrode and affects the product yield, the starting rate of equipment and the yield.
A heater, includes heater strip, first casing and second casing, wherein:
the second shell is coated on the outer side of the first shell, and the outer surface of the second shell, which is far away from the first shell, has fluorine atom recombination loss rate of less than 5 multiplied by 10-3The material of (a);
the first shell covers the outer side of the heating wire, and the ratio of the thermal expansion coefficient of the first shell to the thermal expansion coefficient of the second shell is 0.5-2.
In one embodiment, the outer surface of the second housing facing away from the first housing is any one of gold, silver, nickel, platinum, aluminum, stainless steel alloy, monel, platinum iridium alloy, nickel alloy, aluminum oxide chromium, ytterbium oxide ceramic, yttrium oxide ceramic, aluminum oxide ceramic, and aluminum nitride ceramic.
In one embodiment, the second shell and the first shell are tubular structures, the second shell is sleeved on the outer side of the first shell, and the second shell, the first shell and the heating wire are integrally formed through drawing.
In one embodiment, the second housing is a plate-shaped structure, and the first housing covers the outer side of the heating wire and is die-cast inside the second housing.
In one embodiment, the second shell comprises a plate body and a cover plate, a groove is formed in one side of the plate body, the first shell covers the outer side of the heating wire and is embedded in the groove, and the cover plate cover box is arranged above the groove.
In one embodiment, the first housing and the second housing are riveted together.
In one embodiment, the second housing is made of aluminum and/or an aluminum alloy, or an aluminum coating and/or an aluminum alloy coating is formed on the outer surface of the second housing.
In one embodiment, the heater further comprises at least one first thermocouple, which is disposed between the heating wire and the first housing and is fixedly connected to the heating wire.
In one embodiment, the heater further comprises at least one second thermocouple disposed between the first housing and the second housing and fixed to a sidewall of the second housing adjacent to the first housing.
In one embodiment, the first housing is made of one or more of Inconel600, SUS304, SUS310 and SUS 316.
In addition, the invention also provides a vacuum coating device which comprises a cavity and the heater according to any one of the technical schemes, wherein the heater is fixed in the cavity.
In the heater and the vacuum coating device, the first shell is covered with the heating wire, and the second shell is covered with the second shellThe first shell is arranged to isolate the heating wire from the outside fluorine ions, and the outer surface of the second shell deviating from the first shell is made of a material with fluorine atom recombination loss rate less than 5 multiplied by 10-3And the fluorine atom recombination loss rate is less than 5 x 10-3The material has excellent corrosion resistance to fluorine ions, so that the second shell has a better fluorine ion resistance effect on the outer surface deviating from the first shell, and the fluorine ions are prevented from contacting with the first shell, so that the second shell protects the heating wire from being corroded by the fluorine ions, the protection of the heating wire is realized, the situation that powder falls in the cavity and on a workpiece after the protective sleeve of the heating wire is corroded is avoided, the service life of the heating wire is prolonged, the starting rate and the yield of equipment are improved, and the product yield is improved; and because the ratio of the thermal expansion coefficient of the first shell to the thermal expansion coefficient of the second shell is 0.5-2, the ductility of the first shell is greater than that of the second shell, so that the heating wire can be bent conveniently, the strength, the toughness and the ductility of the heater are better, and various bending shapes can be realized conveniently.
Drawings
Fig. 1 is a schematic structural diagram of a heater according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a heater according to another embodiment of the present invention;
FIG. 3 is a cross-sectional view of a heater provided in accordance with yet another embodiment of the present invention;
FIG. 4 is a cross-sectional view of a heater according to yet another embodiment of the present invention;
fig. 5 is an exploded view of a heater according to another embodiment of the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
The first embodiment;
as shown in fig. 1, the present invention provides a heater 10 applied to a vacuum deposition apparatus for performing etching cleaning by using fluorine ions, the heater 10 comprising three parts, namely a heating wire 100, a first casing 200 and a second casing 300, wherein:
the second shell 300 is coated outside the first shell 200, and the outer surface of the second shell 300 departing from the first shell 200 has a fluorine atom recombination loss rate less than 5 × 10-3When the material of (1) is specifically arranged, the second shell 300 is of a closed structure, the first shell 200 is arranged inside the second shell 300, fluorine ions cannot enter the second shell 300, and the fluorine atom recombination loss ratio of the outer surface of the second shell 300, which is far away from the first shell 200, is less than 5 x 10-3Of course, the outer surface of the second casing 300 facing away from the first casing 200 is not limited to the above materials, and may be other materials meeting the requirement, and preferably, the fluorine atom recombination loss ratio of the outer surface material of the second casing 300 facing away from the first casing 200 may be 0, 0.5 × 10-3、1×10-3、1.5×10-3、2×10-3、2.5×10-3、3×10-3、3.5×10-3、4×10-3、4.5×10-3Of course, the fluorine atom recombination loss ratio of the outer surface material of the second case 300 away from the first case 200 is not limited to the above range, and may be less than 5 × 10-3Other values within this range for corrosion resistance against fluoride ions;
the first casing 200 covers the outer side of the heater wire 100, and the ratio of the thermal expansion coefficient of the first casing 200 to the thermal expansion coefficient of the second casing 300 is 0.5-2, when the heater wire 100 is specifically arranged, the first casing 200 may be a closed structure, and the heater wire 100 is arranged inside the first casing 200 to further protect the heater wire 100, the first casing 200 may be an open structure, the first casing 200 is sleeved on the outer side of the heater wire 100, in order to overcome the disadvantage that the material strength, toughness and ductility of the outer surface of the second casing facing away from the first casing are low, the ratio of the thermal expansion coefficient of the first casing 200 to the thermal expansion coefficient of the second casing 300 is limited to be 0.5-2, so that the ductility of the first casing 200 is greater than the ductility of the second casing 300, so that the strength, toughness and ductility of the first casing 200 are high, and the strength and toughness of the heater 10 are high, bending is facilitated, of course, the ratio of the thermal expansion coefficient of the first housing 200 to the thermal expansion coefficient of the second housing 300 is not limited to the above range of 0.5-2, and may be other values that can meet the requirement, and preferably, the ratio of the thermal expansion coefficient of the first housing 200 to the thermal expansion coefficient of the second housing 300 may be 0.5, 0.7, 0.9, 1, 1.2, 1.4, 1.5, 1.6, 1.8, 2, and of course, the ratio of the thermal expansion coefficient of the first housing 200 to the thermal expansion coefficient of the second housing 300 is not limited to the above range, and may be other values in the range of 0.5-2.
In the heater 10, the first casing 200 covers the heating wire 100, the second casing 300 covers the first casing 200 to isolate the heating wire 100 from the external fluorine ions, and the fluorine atom recombination loss rate of the material of the second casing 300 departing from the outer surface of the first casing 200 is less than 5 × 10-3And a fluorine atom recombination loss ratio of less than 5X 10-3Has excellent corrosion resistance to fluoride ions so that the second housing 300 is deviated fromThe outer surface of the first shell 200 has a good effect of resisting fluorine ions, and the fluorine ions are prevented from contacting the first shell 200, so that the second shell 300 protects the heating wire 100 from being corroded by the fluorine ions, the heating wire 100 is protected, the situation that powder falls into the cavity and a workpiece after the protective sleeve of the heating wire 100 is corroded is avoided, the service life of the heating wire 100 is prolonged, the starting rate and the yield of equipment are improved, and the product yield is improved; and since the ratio of the thermal expansion coefficient of the first housing 200 to the thermal expansion coefficient of the second housing 300 is 0.5-2, the ductility of the first housing 200 is greater than that of the second housing 300, so as to facilitate bending of the heater wire 100, thereby making the heater 10 have better strength, toughness and ductility, and facilitating realization of various bending shapes.
The material of the outer surface of the second casing 300 facing away from the first casing 200 is various, and in a preferred embodiment, the outer surface of the second casing 300 facing away from the first casing 200 is any one of gold, silver, nickel, platinum, aluminum, stainless steel alloy, monel alloy, platinum-iridium alloy, nickel alloy, aluminum oxide, aluminum chromium oxide, ytterbium oxide ceramic, yttrium oxide ceramic, aluminum oxide ceramic, and aluminum nitride ceramic. Of course, the material of the outer surface of the second casing 300 away from the first casing 200 is not limited thereto, and may be other materials that can meet the requirement.
In the heater 10, the fluorine atom recombination loss ratios of the materials such as gold, silver, nickel, platinum, aluminum, stainless steel alloy, monel alloy, platinum-iridium alloy, nickel alloy, aluminum alloy, alumina chrome, ytterbium oxide ceramic, yttrium oxide ceramic, alumina ceramic, and aluminum nitride ceramic are all less than 5 × 10-3And the outer surface of the second housing 300 facing away from the first housing 200 is defined to be any one of gold, silver, nickel, platinum, aluminum, stainless steel alloy, monel alloy, platinum-iridium alloy, nickel alloy, aluminum oxide, aluminum chromium oxide, ytterbium oxide ceramic, yttrium oxide ceramic, aluminum oxide ceramic, and aluminum nitride ceramic material, so that the second housing 300 can ensure a good effect of resisting fluorine ions. When specifically arranged, the material of the outer surface of the second casing 300 departing from the first casing 200The second casing 300 may be made of a metal, for example, the outer surface facing away from the first casing 200 is made of one of gold, silver, nickel, platinum and aluminum; the outer surface of the second casing 300 facing away from the first casing 200 is made of an alloy material, for example, the outer surface of the second casing 300 facing away from the first casing 200 is made of one of stainless steel alloy, monel alloy, platinum-iridium alloy, nickel alloy, and aluminum alloy; the outer surface of the second casing 300 facing away from the first casing 200 may be made of an oxide, for example, the outer surface of the second casing 300 facing away from the first casing 200 may be made of one of alumina, alumina chrome, ytterbium oxide ceramic, yttrium oxide ceramic, alumina ceramic, and aluminum nitride ceramic.
The structural forms of the second housing 300 and the first housing 200 are various, as shown in fig. 1, 2 and 3, in a preferred embodiment, the second housing 300 and the first housing 200 are tubular structures, the heating wire 100 is arranged in the first housing 200 of the tubular structures, the second housing 300 is sleeved on the outer side of the first housing 200, and the second housing 300 is integrally formed with the first housing 200 and the heating wire 100 by drawing.
In the heater 10, the first housing 200 is sleeved outside the heater wire 100, the second housing 300 is sleeved outside the first housing 200, and the heater 10 is formed by one drawing operation, in the heater 10, there is almost no gap between the first housing 200 and the heater wire 100 and between the first housing 200 and the second housing 300, so that fluorine ions are prevented from entering, and the heater wire 100 is protected, and in the specific arrangement, the second housing 300 and the first housing 200 are tubular structures with one open end, for example, the second housing 300 is an aluminum pipe or an aluminum alloy pipe, the first housing 200 is inserted into the second housing 300, the heater wire 100 is inserted into the first housing 200, and then the drawing is performed, so that the second housing 300 with a closed structure is formed, so as to isolate the fluorine ions from the heater wire 100. Of course, when the second housing 300 and the first housing 200 are tubular structures, the formation of the heater 10 is not limited to the above-mentioned drawing process, and may also be other manufacturing processes that can meet the requirement, for example, the first housing 200 is a protective sleeve, the heating wire 100 is disposed in the protective sleeve, and the second housing 300 is an aluminum coating sprayed on the outer side of the protective sleeve.
There are various structural forms of the second housing 300 and the first housing 200, and in a preferred embodiment, as shown in fig. 4, the second housing 300 is a plate-shaped structure, the first housing 200 covers the outside of the heating wire 100, and the first housing 200 is die-cast inside the second housing 300.
In the heater 10, the first shell 200 is sleeved outside the heater wire 100, then the first shell 200 is pressed into the metal plate, and then aluminum water and/or aluminum alloy water is poured on the first shell 200 to form the closed second shell 300, so that the heater wire 100 is protected, and the isolation of the heater wire 100 from fluorine ions is realized. In a specific arrangement, the metal plate is an aluminum plate, and at this time, aluminum water is poured on the first shell 200, or aluminum alloy water is poured on the first shell 200, or a mixture of aluminum water and aluminum alloy water is poured on the first shell 200; the metal plate may also be an aluminum alloy plate, in which case, aluminum water is cast on the first shell 200, or a mixture of aluminum water and aluminum water is cast on the first shell 200; the metal plate may be a mixed plate of aluminum and aluminum alloy, in which case aluminum water is cast on the first case 200, or aluminum alloy water is cast on the first case 200, or a mixture of aluminum water and aluminum alloy water is cast on the first case 200.
The second housing 300 and the first housing 200 have various structural forms, and in a preferred embodiment, as shown in fig. 4 and 5, the second housing 300 includes a plate 310 and a cover plate 320, a groove 311 is formed in one side of the plate 310, the first housing 200 covers the outer side of the heating wire 100, the first housing 200 is embedded in the groove 311, and the cover plate 320 covers the groove 311.
In the heater 10, the groove 311 is formed in the plate body 310, the groove 312 for bearing the cover plate 320 is formed in the plate body 310, the first housing 200 coated with the heating wire 100 is embedded in the groove 311, the cover plate 320 is covered and boxed above the groove 311, and the cover plate 320 is matched with the groove 312 to form the closed second housing 300, so that the heating wire 100 is protected, and the insulation of the heating wire 100 from fluorine ions is realized. In a specific configuration, the plate body 310 may be an aluminum plate, in this case, the cover plate 320 may be an aluminum plate, the cover plate 320 may also be an aluminum alloy plate, and the cover plate 320 may also be a mixed plate of aluminum and an aluminum alloy; the plate body 310 may be an aluminum alloy plate, in this case, the cover plate 320 may be an aluminum plate, the cover plate 320 may also be an aluminum alloy plate, and the cover plate 320 may also be a mixed plate of aluminum and an aluminum alloy; the plate body 310 may be a mixed plate of aluminum and an aluminum alloy, in this case, the cover plate 320 may be an aluminum plate, the cover plate 320 may also be an aluminum alloy plate, and the cover plate 320 may also be a mixed plate of aluminum and an aluminum alloy; of course, in order to ensure the sealing performance of the second housing 300, aluminum water and/or aluminum alloy water may be poured between the cover plate 320 and the groove 312.
In order to ensure that the first housing 200 is fixed in the groove 311 of the plate body 310, specifically, the first housing 200 and the second housing 300 may be fixed by riveting. Of course, the fixing connection between the first housing 200 and the groove 311 of the plate 310 is not limited to this, and other connection methods that can satisfy the fixing requirement may also be used, for example, the first housing 200 may be welded in the groove 311 of the plate 310. In the heater 10, the first housing 200 can be conveniently and quickly fixed in the second housing 300 by riveting, so as to fixedly connect the first housing 200 and the second housing 300, thereby ensuring the reliability of the subsequent manufacturing process.
The second housing 300 may be made of various materials, and for convenience of processing, the inside and the surface of the second housing 300 may be made of the same material, and in a preferred embodiment, the second housing 300 may be made of aluminum and/or an aluminum alloy.
In the heater 10, the second housing 300 is limited to be made of aluminum and/or an aluminum alloy, so as to facilitate the formation of the second housing 300 and the processing of the entire heater 10, and in particular, the second housing 300 may be made of aluminum, the second housing 300 may be made of an aluminum alloy, and the second housing 300 may also be made of a mixture of aluminum and an aluminum alloy.
The material of the second housing 300 may be various, and in order to save material, the inner part and the surface of the second housing 300 may be made of different materials, and in a preferred embodiment, the outer surface of the second housing 300 is formed with an aluminum coating and/or an aluminum alloy coating.
In the heater 10, the inner and outer surfaces of the second casing 300 are defined to be made of different materials, and the outer surface of the second casing 300 is formed with a layer of aluminum coating and/or aluminum alloy coating to protect the wires, and aluminum and/or aluminum alloy can be saved, and a plurality of materials are selected in the inner part of the second casing 300 to meet different requirements of the scene, when the heater is specifically set, the outer surface of the second casing 300 can be formed with a layer of aluminum coating, the outer surface of the second casing 300 can be formed with a layer of aluminum alloy coating, and the outer surface of the second casing 300 can be formed with a layer of mixed coating of aluminum and aluminum alloy. Of course, the structure of the second casing 300 is not limited thereto, and the second casing 300 may also be in other structural forms meeting the requirement, for example, the outer surface of the second casing 300 is in a structural form coated with an aluminum foil, and for example, the outer surface of the second casing 300 is in a structural form coated with an aluminum alloy foil.
In addition to the heater 10, the material of the first housing 200 may have various forms, and in a preferred embodiment, the material of the first housing 200 may be one or more of Inconel600, SUS304, SUS310, and SUS 316. Of course, the material of the first housing 200 is not limited to this, and the material of the first housing 200 may also be other materials meeting the ductility requirement, for example, the first housing 200 may be alloy steel.
In the heater 10, in order to facilitate the installation of the first housing 200, the material of the first housing 200 may be one of Inconel600, SUS304, SUS310, and SUS316, for example, the material of the first housing 200 is Inconel 600; the material of the first housing 200 may also be a plurality of materials of Inconel600, SUS304, SUS310, and SUS316, for example, a mixture of Inconel600 and SUS316 of the first housing 200.
In order to achieve temperature control of the second housing 300, in a preferred embodiment, as shown in fig. 1, 2, 4 and 5, the heater 10 further includes at least one first thermocouple 400, the first thermocouple 400 is disposed between the heating wire 100 and the first housing 200, and the first thermocouple 400 is fixedly connected to the heating wire 100.
In the heater 10, the operating temperature of the heater 10 is within 300 ℃, and the temperature of the heater wire 100 is accurately measured by arranging the first thermocouple 400 between the heater wire 100 and the first housing 200, so that the temperature of the heater wire 100 is controlled to be less than 660 ℃ which is the melting point of aluminum, and thus the temperature of the surface of the aluminum tube can be monitored to be less than the melting point thereof, so as to avoid the situation that the heater wire 100 is overheated and the aluminum tube is burned. In a specific arrangement, the first thermocouple 400 and the heating wire 100 may be fixedly connected by a clip, and the first thermocouple 400 and the heating wire 100 may also be fixedly connected by welding, so as to avoid the first thermocouple 400 from being dislocated, and of course, the fixed connection manner of the first thermocouple 400 and the heating wire 100 is not limited thereto, and may also be other fixing manners meeting the requirements; the number of the first thermocouples 400 may be one, two, three, or more than three, the plurality of first thermocouples 400 are distributed along the extending direction of the heating wire 100, the temperature of each position of the heating wire 100 can be accurately detected by the plurality of first thermocouples 400, and the specific number of the first thermocouples 400 and the specific fixed connection manner of the first thermocouples 400 and the heating wire 100 are determined according to the actual situation of the heater 10.
In order to achieve temperature control of the second housing 300, in a preferred embodiment, as shown in fig. 3, the heater 10 further includes at least one second thermocouple 500, the second thermocouple 500 is disposed between the first housing 200 and the second housing 300, and the second thermocouple 500 is fixed to a sidewall of the second housing 300 adjacent to the first housing 200.
In the heater 10, the operating temperature of the heater 10 is within 300 ℃, and the temperature of the second housing 300 is accurately measured by arranging the second thermocouple 500 between the first housing 200 and the second housing 300, so that the temperature of the second housing 300 is controlled to be less than 660 ℃ which is the melting point of aluminum, and thus the temperature of the surface of the aluminum tube can be monitored to be less than the melting point thereof, so as to avoid the situation that the heating wire 100 is overheated and the aluminum tube is burned. In a specific setting, the heater 10 is prepared by a drawing process, the second thermocouple 500 is attached to the inner wall of the second housing 300 and is fixedly arranged between the first housing 200 and the second housing 300 in the drawing process, so that the second thermocouple 500 is prevented from being dislocated; when the heater 10 is manufactured through a die-casting process, the second thermocouple 500 is attached to the outer wall of the first housing 200 and is fixedly arranged between the first housing 200 and the second housing 300 after die-casting, so that the second thermocouple 500 is prevented from being dislocated; when the second case 300 includes the plate body 310 and the cover plate 320, the second thermocouple 500 is attached to the outer wall of the first case 200 and is fixed to the groove 311 of the plate body 310 together, or the second thermocouple 500 is fixed to the surface of the cover plate 320 facing the groove 311 by welding or the like, so as to prevent the second thermocouple 500 from being dislocated.
Example two;
in addition, the invention also provides a vacuum coating device, which comprises a cavity and the heater 10 according to any one of the technical schemes, wherein the heater 10 is fixed in the cavity.
In the vacuum coating apparatus, since the heater 10 can cover the heater wire 100 through the first casing 200, and the second casing 300 covers the first casing 200 to isolate the heater wire 100 from the external fluorine ions, the outer surface of the second casing 300 away from the first casing 200 is made of a material with a fluorine atom recombination loss rate less than 5 × 10-3The material of (1) has excellent corrosion resistance to fluorine ions so as to avoid the contact of the fluorine ions with the heating wire 100, thereby enabling the second shell 300 to protect the heating wire 100 from being corroded by the fluorine ions, realizing the protection of the heating wire 100, avoiding the situation that powder falls in the cavity and on a workpiece after the protective sleeve of the heating wire 100 is corroded, prolonging the service life of the heating wire 100, improving the starting rate and the yield of equipment and improving the yield of products; and the ductility of the first housing 200 is greater than that of the second housing 300 due to the difference of the thermal expansion coefficients of 0.5-2, so as to facilitate bending of the heater wire 100, thereby enabling the heater 10 to have better strength, toughness and ductility and facilitating realization of various bending shapes. Therefore, the vacuum coating apparatus having the heater 10 has a high product yield, a high start rate and yield of the apparatus, and a good structural reliability.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (11)
1. The utility model provides a heater, its characterized in that includes heater strip, first casing and second casing, wherein:
the second shell is coated on the outer side of the first shell, and the outer surface of the second shell, which is far away from the first shell, has fluorine atom recombination loss rate of less than 5 multiplied by 10-3The material of (a);
the first shell covers the outer side of the heating wire, and the ratio of the thermal expansion coefficient of the first shell to the thermal expansion coefficient of the second shell is 0.5-2.
2. The heater of claim 1, wherein an outer surface of the second housing facing away from the first housing is any one of gold, silver, nickel, platinum, aluminum, stainless steel alloy, monel, platinum iridium, nickel alloy, aluminum oxide, aluminum chromium oxide, ytterbium oxide ceramic, yttrium oxide ceramic, aluminum nitride ceramic.
3. The heater of claim 1, wherein the second housing and the first housing are tubular structures, the second housing is sleeved outside the first housing, and the second housing and the first housing and the heating wire are integrally formed through drawing.
4. The heater of claim 1, wherein the second housing is a plate-like structure, the first housing is wrapped outside the heater wire and die cast inside the second housing.
5. The heater of claim 1, wherein the second casing comprises a plate body and a cover plate, a groove is formed in one side of the plate body, the first casing covers the outer side of the heating wire and is embedded in the groove, and the cover plate is covered above the groove.
6. The heater according to claim 5, wherein the first housing and the second housing are riveted together.
7. The heater of any one of claims 1 to 5, wherein the second housing is made of aluminum and/or an aluminum alloy, or an aluminum coating and/or an aluminum alloy coating is formed on the outer surface of the second housing.
8. The heater of claim 1, further comprising at least one first thermocouple disposed between the heater wire and the first housing and fixedly coupled to the heater wire.
9. The heater of claim 1 or 8, further comprising at least one second thermocouple disposed between the first housing and the second housing and secured to a sidewall of the second housing adjacent the first housing.
10. The heater of claim 1, wherein the first housing is made of one or more of Inconel600, SUS304, SUS310, and SUS 316.
11. A vacuum coating apparatus comprising a chamber, characterized by further comprising a heater according to any one of claims 1 to 10, said heater being fixed inside said chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011102437.8A CN112210759A (en) | 2020-10-15 | 2020-10-15 | Heater and vacuum coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011102437.8A CN112210759A (en) | 2020-10-15 | 2020-10-15 | Heater and vacuum coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112210759A true CN112210759A (en) | 2021-01-12 |
Family
ID=74054242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011102437.8A Pending CN112210759A (en) | 2020-10-15 | 2020-10-15 | Heater and vacuum coating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112210759A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5850072A (en) * | 1997-02-18 | 1998-12-15 | Eckert; C. Edward | Electric heater assembly |
| US20010016115A1 (en) * | 2000-02-01 | 2001-08-23 | Akisuke Hirata | Panel heater |
| JP2001271178A (en) * | 2000-03-27 | 2001-10-02 | Ulvac Japan Ltd | Heating device and vacuum treating device |
| US20060073349A1 (en) * | 2004-09-30 | 2006-04-06 | Ngk Insulators, Ltd. | Ceramic member and manufacturing method for the same |
| CN101662855A (en) * | 2009-09-08 | 2010-03-03 | 海安县蚕种场 | Hydrochloric acid pool heating pipe |
| CN103177954A (en) * | 2011-12-26 | 2013-06-26 | 中芯国际集成电路制造(上海)有限公司 | Etching device adopting temperature-controllable limit ring |
-
2020
- 2020-10-15 CN CN202011102437.8A patent/CN112210759A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5850072A (en) * | 1997-02-18 | 1998-12-15 | Eckert; C. Edward | Electric heater assembly |
| US20010016115A1 (en) * | 2000-02-01 | 2001-08-23 | Akisuke Hirata | Panel heater |
| JP2001271178A (en) * | 2000-03-27 | 2001-10-02 | Ulvac Japan Ltd | Heating device and vacuum treating device |
| US20060073349A1 (en) * | 2004-09-30 | 2006-04-06 | Ngk Insulators, Ltd. | Ceramic member and manufacturing method for the same |
| CN101662855A (en) * | 2009-09-08 | 2010-03-03 | 海安县蚕种场 | Hydrochloric acid pool heating pipe |
| CN103177954A (en) * | 2011-12-26 | 2013-06-26 | 中芯国际集成电路制造(上海)有限公司 | Etching device adopting temperature-controllable limit ring |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8422871B2 (en) | Immersion heater | |
| CA2227395C (en) | Improvements in thermocouple assemblies | |
| CN101246835A (en) | Substrate support assembly | |
| KR102049632B1 (en) | Temperature probe and method for producing a temperature probe | |
| US20140353290A1 (en) | Electrode for use with a manufacturing apparatus for depositing a material | |
| JP2011517734A5 (en) | ||
| US20060049162A1 (en) | Water heater and method of providing the same | |
| KR20120040631A (en) | Thermo-couple for temperature measurement and method of manufacturing the same | |
| KR20150081364A (en) | Temperature sensor system and method for producing a temperature sensor system | |
| US20050218771A1 (en) | Spark plug | |
| CN207487842U (en) | A kind of sulfur corrosion resistant leakproof sheathed thermal couple thermal resistance | |
| CN112210759A (en) | Heater and vacuum coating device | |
| JPH0254898B2 (en) | ||
| JP5243498B2 (en) | Ceramic heater and gas sensor provided with the same | |
| US7302828B2 (en) | Oxygen sensor | |
| JP2016085864A (en) | Heater with thermoelectric couple, and gas sensor with the same | |
| JP2022504661A (en) | Equipment for treating exhaust gas | |
| CN108476560B (en) | High-temperature tubular heater | |
| JP5238343B2 (en) | Glass sealed thermistor for temperature sensor | |
| JP2009525577A (en) | Anodized aluminum radiant panel with stainless steel electrical resistance | |
| JP2008145244A (en) | Thermocouple | |
| US20190017703A1 (en) | Flame rod | |
| CN218121210U (en) | Thermometer structure for measuring temperature in boiler | |
| KR20200000985A (en) | Thermoelectric conversion module and a method for manufacturing thereof | |
| KR20020052869A (en) | Shunt error free sheathed thermocouple |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210112 |