CN112196772A - Piezoelectric stack pump with double-rhombus mechanism for amplification - Google Patents
Piezoelectric stack pump with double-rhombus mechanism for amplification Download PDFInfo
- Publication number
- CN112196772A CN112196772A CN202011050943.7A CN202011050943A CN112196772A CN 112196772 A CN112196772 A CN 112196772A CN 202011050943 A CN202011050943 A CN 202011050943A CN 112196772 A CN112196772 A CN 112196772A
- Authority
- CN
- China
- Prior art keywords
- double
- rhombus
- pump body
- piston
- piezoelectric stack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 40
- 230000003321 amplification Effects 0.000 title claims abstract description 22
- 238000003199 nucleic acid amplification method Methods 0.000 title claims abstract description 22
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 18
- 239000010432 diamond Substances 0.000 claims abstract description 18
- 239000007788 liquid Substances 0.000 claims description 24
- 238000007789 sealing Methods 0.000 claims description 14
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005086 pumping Methods 0.000 abstract 1
- 230000006872 improvement Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000012528 membrane Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/22—Arrangements for enabling ready assembly or disassembly
Abstract
The invention discloses a double-rhombus amplification piezoelectric stack pump, wherein a double-rhombus amplification mechanism is arranged in a piezoelectric stack pump body, the double-rhombus amplification mechanism is arranged on two sides of the pump body and is symmetrical in structure, and the top of the double-rhombus amplification mechanism is connected with a piston which is provided with a sliding chute and can move up and down; the double-rhombus mechanism is connected through a cylindrical screw rod; the lower end of the double-diamond mechanism at one side is connected to a rectangular shaft with threads fixed at the bottom of the pump body; the other side is connected to a cuboid sliding block which can slide in a groove fixed at the two sides of the bottom of the pump body; an elastic diaphragm which can be contacted with the piston is fixed in the cavity; the piezoelectric stack is bonded between the cuboid shaft and the slider. The double-rhombus amplification piezoelectric stack pump can convert the motion of the piezoelectric stack in the X direction into the motion in the Z direction through the multi-rhombus amplification mechanisms on the two sides and amplify the motion, and the piston is pushed to move to enable the elastic diaphragm to deform in a reciprocating mode. The structure can achieve the effect of secondary amplification through one-time movement, the amplification effect is obvious, and the pumping flow of the pump is improved.
Description
Technical Field
The invention relates to a piezoelectric stack pump amplified by a double-rhombus mechanism, belonging to the field of fluid machinery.
Background
The piezoelectric stack pump has the advantages of simple structure, small volume, no electromagnetic interference, good flow and pressure controllability and the like, is well noticed by people, and is widely applied to various fields in recent years along with the deep research on the piezoelectric stack pump.
Disclosure of Invention
The invention mainly aims to provide a piezoelectric stack pump with an amplification mechanism of a double-rhombus structure, which has high reliability and higher flow rate.
The technical scheme adopted by the invention is as follows: the double-rhombus amplification piezoelectric stack pump is composed of an upper pump body (1), a lower pump body (2), a piezoelectric stack (3), a piston (4), a valve (5), a rectangular shaft (6) with threads, a rectangular slider (7), a threaded screw (8), an elastic diaphragm (9), a sealing ring (10), a sealing groove (11), a double-rhombus amplification mechanism (12), a screw (13) and a bolt (14);
the upper part of the upper pump body (1) is provided with a liquid inlet (1-1) and a liquid outlet (1-2), the liquid inlet and the liquid outlet are provided with valves, and the upper pump body is connected with the lower pump body through a bolt (14); a piezoelectric stack (3) is bonded between a rectangular body shaft (6) with threads at the inner bottom end of the lower pump body (2) and a rectangular sliding block (7), a piston (4) is connected to the top end of the double-diamond mechanism, one side of the piston (4) is fixedly connected with one end of the top end of the double-diamond mechanism (12) through a threaded screw rod (8), and the other side of the piston is in sliding connection with a sliding groove in the piston (4) through a screw rod (13-1); the valve (5) is arranged on the liquid inlet (1-1) and the liquid outlet (1-2); the threaded cuboid shaft (6) is fixedly connected to the bottom of the lower pump body (2) through a threaded screw (8); the cuboid slider (7) is fixed in the chute on the bottom (2) of the lower pump body and can move left and right in the chute. The elastic diaphragm (9) is arranged between the upper pump body (1) and the lower pump body (2) and is sealed by a sealing ring (10) and a sealing groove; the double-diamond amplifying mechanism (12) is arranged on a rectangular shaft (6) with threads and a rectangular sliding block (7) which are arranged at the lower end in the lower pump body (2). The upper end is connected with the piston (4). The middle parts of the cuboid sheets (12-1), (12-2), (12-5) and (12-6) are connected through a screw (13-2); the middle parts of the cuboid sheets (12-3), (12-4), (12-7) and (12-8) are connected through a screw (13-3), the upper part of the cuboid sheet (12-4) at the lower part of the cuboid sheet (12-1) is connected with the lower part of the cuboid sheet (12-5) at the upper part of the cuboid sheet (12-8) through the screw (13-4), the upper part of the cuboid sheet (13-3) at the cuboid sheet (13-2) is connected with the upper part of the cuboid sheet (13-7) at the lower part of the cuboid sheet (13-6) through the screw (13-5), and a rhombus amplification mechanism (12) is formed by the connection of the screw (13-;
as a further improvement of the technical scheme, the double-diamond mechanism (12) is symmetrically arranged on two sides of the pump cavity, so that the piston (4) can be stressed uniformly and can move stably;
as a further improvement of the technical scheme, the piezoelectric stack (3) is bonded between the rectangular body shafts (6) with the threads and the rectangular body sliders (7), and the double-diamond mechanism can convert the change of the piezoelectric stack (3) along the X direction into the motion along the Z direction and amplify the motion;
as a further improvement of the technical scheme, the elastic diaphragm (9) is arranged in the sealing groove (10) and sealed by the sealing ring (11), so that leakage can be effectively prevented.
The invention has the advantages that
The double-diamond amplification mechanism can achieve the effect of two-stage amplification through one-time movement, and the double-structure symmetrical design is adopted to ensure that the movement is more stable.
The invention can increase the flow rate.
Drawings
Fig. 1 is an exploded view of the overall structure of an enlarged piezo-stack pump of a double diamond configuration.
Fig. 2 is a schematic structural view of the upper pump body.
FIG. 3 is a schematic structural view of the bottom of the lower pump body.
Fig. 4 is a schematic view of the piston structure.
Figure 5 is a rectangular parallelepiped shaft with threads.
FIG. 6 is a schematic view of a rectangular parallelepiped slider.
FIG. 7 is a schematic view of a threaded screw.
Fig. 8 is a schematic diagram of a double-diamond amplification mechanism.
FIG. 9 is a schematic view of a rectangular parallelepiped thin sheet screw connection.
Detailed Description
The following detailed description of the present invention is given for the purpose of better understanding technical solutions of the present invention by those skilled in the art, and the present description is only exemplary and explanatory and should not be construed as limiting the scope of the present invention in any way.
Referring to fig. 1 and 2, in the embodiment of the present invention, the specific structure includes:
the upper part of the upper pump body (1) is provided with a liquid inlet (1-1) and a liquid outlet (1-2), the liquid inlet and the liquid outlet are provided with valves, and the upper pump body is connected with the lower pump body through a bolt (14); a piezoelectric stack (3) is bonded between a rectangular body shaft (6) with threads at the inner bottom end of the lower pump body (2) and a rectangular sliding block (7), a piston (4) is connected to the top end of the double-diamond mechanism, one side of the piston (4) is fixedly connected with one end of the top end of the double-diamond mechanism (12) through a threaded screw rod (8), and the other side of the piston is in sliding connection with a sliding groove in the piston (4) through a screw rod (13-1); the valve (5) is arranged on the liquid inlet (1-1) and the liquid outlet (1-2); the threaded cuboid shaft (6) is fixedly connected to the bottom of the lower pump body (2) through a threaded screw (8); the cuboid slider (7) is fixed in the chute on the bottom (2) of the lower pump body and can move left and right in the chute. The elastic diaphragm (9) is arranged between the upper pump body (1) and the lower pump body (2) and is sealed by a sealing ring (10) and a sealing groove; the double-diamond amplifying mechanism (12) is arranged on a rectangular shaft (6) with threads and a rectangular sliding block (7) which are arranged at the lower end in the lower pump body (2). The upper end is connected with the piston (4). The middle parts of the cuboid sheets (12-1), (12-2), (12-5) and (12-6) are connected through a screw (13-2); the middle parts of the cuboid sheets (12-3), (12-4), (12-7) and (12-8) are connected through a screw (13-3), the upper part of the cuboid sheet (12-4) at the lower part of the cuboid sheet (12-1) is connected with the lower part of the cuboid sheet (12-5) at the upper part of the cuboid sheet (12-8) through the screw (13-4), the upper part of the cuboid sheet (13-3) at the cuboid sheet (13-2) and the upper part of the cuboid sheet (13-7) at the lower part of the cuboid sheet (13-6) are connected through the screw (13-5), and the rhombus amplification mechanism (12) is formed by the mutual connection of the screw (13.
As a further improvement of the technical scheme, the piezoelectric stack (3) is bonded between the rectangular sliding blocks (7) of the rectangular body shaft (6) with the threads, and the double-diamond mechanism can convert the change of the piezoelectric stack (3) along the X direction into the movement along the Z direction and amplify the movement.
As a further improvement of the technical scheme, the double-diamond mechanism (12) is symmetrically arranged on two sides of the pump cavity, so that the piston (4) is uniformly stressed and can move smoothly.
As a further improvement of the technical scheme, the elastic diaphragm (9) is arranged in the sealing groove and sealed by the sealing ring (10), so that leakage can be effectively prevented.
The working process of the invention can be divided into a first working process and a second working process:
the first working process comprises the following steps: an alternating current signal is applied to the piezoelectric stack (3) to shrink the piezoelectric stack to drive the cuboid sliding block (7) to move rightwards in the sliding groove, the double-rhombus mechanism is driven by the cuboid sliding block (7) to deform to push the piston (4) connected with the upper end of the double-rhombus mechanism to move upwards, the piston (4) is in contact with the elastic membrane (9), then the piston (4) pushes the elastic membrane (9) to deform upwards, the inlet valve (5-1) on the liquid inlet (1-1) is closed when the volume of the upper pump cavity is reduced, the outlet valve (5-2) on the liquid outlet (1-2) is opened, and liquid is discharged out of the pump cavity.
The second working process: the piezoelectric stack (3) is stretched under the excitation of a reverse alternating current signal to drive the cuboid sliding block (7) to move leftwards in the sliding groove, the double-rhombus mechanism is driven by the cuboid sliding block (7) to deform to push the piston (4) connected to the upper end of the double-rhombus mechanism to move downwards, the elastic membrane (9) deforms downwards under the action of elasticity until the piston (4) is separated from the elastic membrane (9), at the moment, an inlet valve (5-1) on the liquid inlet (1-1) for increasing the volume of the pump cavity is opened, an outlet valve (5-2) on the liquid outlet (1-2) is opened, and liquid is sucked into the pump cavity.
The principles and embodiments of the present invention have been described herein using specific examples, which are intended to facilitate an understanding of the principles and core concepts of the invention. The foregoing is only a preferred embodiment of the present invention, and it should be noted that there are objectively infinite specific structures due to the limited character expressions, and it will be apparent to those skilled in the art that a plurality of modifications, decorations or changes may be made without departing from the principle of the present invention, and the technical features described above may be combined in a suitable manner; such modifications, variations, combinations, or adaptations of the invention using its spirit and scope, as defined by the claims, may be directed to other uses and embodiments.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (4)
1. The double-rhombus amplification piezoelectric stack pump is composed of an upper pump body (1), a lower pump body (2), a piezoelectric stack (3), a piston (4), a valve (5), a rectangular shaft (6) with threads, a rectangular slider (7), a threaded screw (8), an elastic diaphragm (9), a sealing ring (10), a sealing groove (11), a double-rhombus amplification mechanism (12), a screw (13) and a bolt (14); the upper part of the upper pump body (1) is provided with a liquid inlet (1-1) and a liquid outlet (1-2), the liquid inlet and the liquid outlet are provided with valves, and the upper pump body is connected with the lower pump body through a bolt (14); a piezoelectric stack (3) is bonded between a rectangular body shaft (6) with threads at the inner bottom end of the lower pump body (2) and a rectangular sliding block (7), a piston (4) is connected to the top end of the double-diamond mechanism, one side of the piston (4) is fixedly connected with one end of the top end of the double-diamond mechanism (12) through a threaded screw rod (8), and the other side of the piston is in sliding connection with a sliding groove in the piston (4) through a screw rod (13-1); the valve (5) is arranged on the liquid inlet (1-1) and the liquid outlet (1-2); the threaded cuboid shaft (6) is fixedly connected to the bottom of the lower pump body (2) through a threaded screw (8); the cuboid slider (7) is fixed in the chute on the bottom (2) of the lower pump body and can move left and right in the chute. The elastic diaphragm (9) is arranged between the upper pump body (1) and the lower pump body (2) and is sealed by a sealing ring (10) and a sealing groove; the double-diamond amplifying mechanism (12) is arranged on a rectangular shaft (6) with threads and a rectangular sliding block (7) which are arranged at the lower end in the lower pump body (2). The upper end is connected with the piston (4). The middle parts of the cuboid sheets (12-1), (12-2), (12-5) and (12-6) are connected through a screw (13-2); the middle parts of the cuboid sheets (12-3), (12-4), (12-7) and (12-8) are connected through a screw (13-3), the upper part of the cuboid sheet (12-4) at the lower part of the cuboid sheet (12-1) is connected with the lower part of the cuboid sheet (12-5) at the upper part of the cuboid sheet (12-8) through the screw (13-4), the upper part of the cuboid sheet (13-3) at the cuboid sheet (13-2) and the upper part of the cuboid sheet (13-7) at the lower part of the cuboid sheet (13-6) are connected through the screw (13-5), and the rhombus amplification mechanism (12) is formed by the connection of the screw (13-.
2. The double-rhombus amplifying piezoelectric stack pump of claim 1, wherein: the double-diamond mechanism (12) arranged in the lower pump body (2) is formed by connecting cuboid sheets (12-1), (12-2), (12-3), (12-4), (12-5), (12-6), (12-7) and (12-8) through a screw (13) and is arranged symmetrically left and right, so that the piston (4) can move smoothly.
3. The double-rhombus amplifying piezoelectric stack pump of claim 1, wherein: the piezoelectric stack (3) is bonded between a rectangular body shaft (6) with threads and connected with the double-rhombus mechanism and a rectangular slider (7), and the movement of the piezoelectric stack (3) in the X direction can be converted into the movement in the Z direction through the double-rhombus mechanism and amplified.
4. The double-rhombus amplifying piezoelectric stack pump of claim 1, wherein: one side of the upper end of the double-rhombus mechanism (11) is fixedly connected with the piston (4) through a threaded screw (8), the other side of the upper end of the double-rhombus mechanism is connected with a sliding groove on the piston (4) through a screw (13-1) in a sliding mode, the piezoelectric stack (3) deforms, the piston (4) can move up and down through amplification of the double-rhombus mechanism, the elastic diaphragm (9) is driven to deform, and further the volume in the cavity changes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011050943.7A CN112196772A (en) | 2020-09-29 | 2020-09-29 | Piezoelectric stack pump with double-rhombus mechanism for amplification |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011050943.7A CN112196772A (en) | 2020-09-29 | 2020-09-29 | Piezoelectric stack pump with double-rhombus mechanism for amplification |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112196772A true CN112196772A (en) | 2021-01-08 |
Family
ID=74007925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011050943.7A Pending CN112196772A (en) | 2020-09-29 | 2020-09-29 | Piezoelectric stack pump with double-rhombus mechanism for amplification |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112196772A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102192135A (en) * | 2011-06-24 | 2011-09-21 | 浙江师范大学 | Piezoelectric stack pump provided with sensor |
| CN102817817A (en) * | 2012-05-23 | 2012-12-12 | 南京航空航天大学 | Piezo-stack pump |
| CN103022339A (en) * | 2012-12-28 | 2013-04-03 | 东南大学 | Orthogonal piezoelectric displacement amplifying mechanism |
| CN204231225U (en) * | 2014-10-16 | 2015-03-25 | 中国科学院上海技术物理研究所 | The coaxial micro displacement magnifying mechanism of eight strands of Piezoelectric Driving |
| CN106092475A (en) * | 2016-06-01 | 2016-11-09 | 中国工程物理研究院总体工程研究所 | A kind of piezoelectric type vibration platform being applicable to broadband and high thrust |
| CN207960900U (en) * | 2018-03-09 | 2018-10-12 | 南昌工程学院 | A kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger |
| CN108847781A (en) * | 2018-06-12 | 2018-11-20 | 湖北三江航天红林探控有限公司 | A kind of big stroke actuator based on Piezoelectric Ceramic |
| CN210898979U (en) * | 2019-12-21 | 2020-06-30 | 邦瓷电子科技(盐城)有限责任公司 | Flexible hinge amplifying mechanism for piezoelectric driver displacement amplification |
-
2020
- 2020-09-29 CN CN202011050943.7A patent/CN112196772A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102192135A (en) * | 2011-06-24 | 2011-09-21 | 浙江师范大学 | Piezoelectric stack pump provided with sensor |
| CN102817817A (en) * | 2012-05-23 | 2012-12-12 | 南京航空航天大学 | Piezo-stack pump |
| CN103022339A (en) * | 2012-12-28 | 2013-04-03 | 东南大学 | Orthogonal piezoelectric displacement amplifying mechanism |
| CN204231225U (en) * | 2014-10-16 | 2015-03-25 | 中国科学院上海技术物理研究所 | The coaxial micro displacement magnifying mechanism of eight strands of Piezoelectric Driving |
| CN106092475A (en) * | 2016-06-01 | 2016-11-09 | 中国工程物理研究院总体工程研究所 | A kind of piezoelectric type vibration platform being applicable to broadband and high thrust |
| CN207960900U (en) * | 2018-03-09 | 2018-10-12 | 南昌工程学院 | A kind of piezoelectric stack Micropump based on two level symmetrical expression flexible hinge enlarger |
| CN108847781A (en) * | 2018-06-12 | 2018-11-20 | 湖北三江航天红林探控有限公司 | A kind of big stroke actuator based on Piezoelectric Ceramic |
| CN210898979U (en) * | 2019-12-21 | 2020-06-30 | 邦瓷电子科技(盐城)有限责任公司 | Flexible hinge amplifying mechanism for piezoelectric driver displacement amplification |
Non-Patent Citations (1)
| Title |
|---|
| 曲兴田等: "基于柔性铰链放大的压电叠堆泵", 《吉林大学学报（工学版）》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2024074050A1 (en) | Dry oil-free air compressor using high-speed direct drive | |
| CN1908431A (en) | Over-magnetostriction rod drive membrane pump | |
| CN102678507A (en) | Double-acting hydraulic ejecting type vacuumizing and compressing device of double cylinders | |
| CN203742925U (en) | Magnetostrictive rod driven micro pump | |
| CN112196772A (en) | Piezoelectric stack pump with double-rhombus mechanism for amplification | |
| CN101737375A (en) | Top cylinder center oil-taking two-level sleeve cylinder | |
| CN201588837U (en) | Two-stage sleeve oil cylinder with oil intake on center of top cylinder | |
| CN212360123U (en) | Micro-flow metering pump with diaphragm mechanism | |
| CN104564622A (en) | Piezoelectric pump with novel semi-active valve | |
| CN108843639B (en) | Piezoelectric ceramic type jet pipe valve group | |
| CN112081729A (en) | Resonant piezoelectric stack pump with slide valve | |
| CN204729245U (en) | A kind of double piston manual variable capacity oil pump | |
| CN209959612U (en) | Automatic reciprocating hydraulic cylinder with adjustable stroke | |
| CN112196756B (en) | Piezoelectric stack double-plunger pump capable of amplifying swing | |
| CN111255917B (en) | Natural gas compressor control device | |
| CN112196757A (en) | Piezoelectric stack plunger pump with double-lever amplification | |
| CN215798161U (en) | Piston type lifting oil cylinder structure | |
| CN219711778U (en) | Novel power valve for hydraulic pump | |
| CN105782160A (en) | Single-rod inlet and outlet bi-direction equal-load hydraulic cylinder | |
| CN104179665A (en) | Miniature diaphragm pump and valve assembly thereof | |
| CN214499370U (en) | Piezoelectric ceramic driven peristaltic variable micropump | |
| CN110762271A (en) | Piezoelectric stack driving type normally closed microfluidic valve | |
| CN112196754B (en) | Integrative valve piezoelectric pump based on rhombus mechanism of enlargiing | |
| CN202073772U (en) | Piston pump | |
| CN203463242U (en) | Hydraulic airless pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210108 |