CN112170285A - Cleaning equipment is used in image sensor chip production - Google Patents

Cleaning equipment is used in image sensor chip production Download PDF

Info

Publication number
CN112170285A
CN112170285A CN202010992710.2A CN202010992710A CN112170285A CN 112170285 A CN112170285 A CN 112170285A CN 202010992710 A CN202010992710 A CN 202010992710A CN 112170285 A CN112170285 A CN 112170285A
Authority
CN
China
Prior art keywords
fixed
welded
sensor chip
plate
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN202010992710.2A
Other languages
Chinese (zh)
Inventor
赵万斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Dinghan Technology Co Ltd
Original Assignee
Beijing Dinghan Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Dinghan Technology Co Ltd filed Critical Beijing Dinghan Technology Co Ltd
Priority to CN202010992710.2A priority Critical patent/CN112170285A/en
Publication of CN112170285A publication Critical patent/CN112170285A/en
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12—Brushes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
    • B08B9/0933—Removing sludge or the like from tank bottoms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning In General (AREA)
  • Studio Devices (AREA)

Abstract

The invention discloses cleaning equipment for producing an image sensor chip, which comprises a box body, wherein a T-shaped plate is fixedly welded on the box body, the bottom of the T-shaped plate is rotatably connected with a vertical rod, a motor is fixedly welded on the T-shaped plate, the output end of the motor is fixedly welded with a reciprocating lead screw, a rotating part for rotating the vertical rod is fixedly welded on the reciprocating lead screw, a floating block is connected on the reciprocating lead screw in a sliding manner, a collecting part for cleaning floating chips is fixedly welded on the floating block, a nut is connected on the reciprocating lead screw in a threaded manner, fixing plates are symmetrically and fixedly arranged on the side wall of the nut, each fixing plate is provided with a sliding groove, a clamping part is connected in the sliding groove in a sliding manner, and a cleaning part is fixedly welded at the bottom of the. According to the invention, through the arrangement of the structures such as the hollow plate, the brush, the scraping rod, the mud sucking plate and the like, floating scraps and sediments in the cleaning liquid are removed, frequent cleaning liquid replacement is avoided, and secondary pollution when the chip is taken out is avoided.

Description

Cleaning equipment is used in image sensor chip production
Technical Field
The invention relates to the technical field of cleaning equipment, in particular to cleaning equipment for producing an image sensor chip.
Background
The image sensor is the core of the digital camera and the most critical technology, in the traditional camera, the film is a photosensitive material, after being processed by a certain specific chemical, the film can record the shot image, and in the digital camera, the image sensor replaces the position of the film to form an electronic image.
The chip as an important element in the image sensor needs to be cleaned in the production process, but the current cleaning equipment cleans the sensor chip in the cleaning solution, but impurities such as floating dust and the like stored on the sensor chip can quickly pollute the cleaning solution, and meanwhile, the impurities washed out of the chip fall on the bottom of the equipment and can continuously pollute the cleaning solution, so that a user frequently changes the cleaning solution, which causes great waste in the production time, and meanwhile, when the sensor chip is finally taken out of the cleaning solution, floating dust floating on the liquid level is often attached to the sensor chip in the process, which causes secondary pollution to the sensor chip.
Therefore, the cleaning equipment for producing the image sensor chip is provided.
Disclosure of Invention
The invention aims to solve the problems that in the prior art, a sensor chip is easy to cause secondary pollution in cleaning equipment, and cleaning liquid needs to be frequently replaced, and provides cleaning equipment for producing an image sensor chip.
In order to achieve the purpose, the invention adopts the following technical scheme: the utility model provides a cleaning device is used in image sensor chip production, includes the box, welded fastening has the T shaped plate on the box, T shaped plate bottom is rotated and is connected with the montant, welded fastening has the motor on the T shaped plate, the output welded fastening of motor has reciprocal lead screw, welded fastening has the rotatable part that makes the montant rotatory on the reciprocal lead screw, sliding connection has the kicking block on the reciprocal lead screw, welded fastening has the collection part that carries out the clearance to the floating chip on the kicking block, threaded connection has the nut on the reciprocal lead screw, nut lateral wall symmetry installation is fixed with the fixed plate, every the spout has all been seted up on the fixed plate, sliding connection has the clamping part that makes the sensor chip fixed in the spout, the bottom welded fastening of fixed plate has the clearance part that makes bottom impurity get rid of.
In foretell cleaning device is used in image sensor chip production, rotating member includes the action wheel of welded fastening on reciprocal lead screw, welded fastening has from the driving wheel on the montant, the action wheel with from the driving wheel and pass through the hold-in range connection, the bottom welded fastening of montant has drive disk assembly.
In foretell cleaning device is used in image sensor chip production, transmission part includes the first cone pulley of welded fastening in montant bottom, first cone pulley meshing is connected with the second cone pulley, second cone pulley intermediate position welded fastening has the horizontal pole, welded fastening has sector gear after the horizontal pole runs through the box lateral wall.
In foretell cleaning device is used in image sensor chip production, box inner wall symmetry welded fastening has hollow slider, two sliding connection has the slide bar in the hollow slider, welded fastening has the rectangle frame on the slide bar, the upper and lower inner wall of rectangle frame welded fastening has the rack respectively, rack and sector gear meshing are connected.
In foretell cleaning device for image sensor chip production, the bottom symmetry welded fastening of slide bar has the cavity board, a plurality of dust absorption holes have been seted up to the bottom of cavity board, the bottom welded fastening of cavity board has a plurality of brushes, the fixed intercommunication in one side of cavity board has the dust removal pipe, dust removal pipe and external air pump fixed connection.
In the cleaning device for producing the image sensor chip, the collecting component comprises scraping rods symmetrically welded and fixed on two sides of the floating block, a collecting tank is welded and fixed on the top end of each scraping rod, and a sawtooth-shaped slotted hole is formed in each collecting tank.
In the cleaning device for producing the image sensor chip, the clamping part comprises clamping blocks which are symmetrically and slidably connected in the sliding groove, the adjacent clamping blocks are elastically connected through a spring, and a triangular block is welded and fixed at the top of the fixing plate.
In foretell cleaning device for image sensor chip production, the clearance part includes the straight-bar of symmetry welded fastening in the fixed plate bottom, straight-bar bottom welded fastening has the mud suction plate, one side and the mud removal pipe of mud suction plate are fixed and are communicated, the mud suction plate is hollow structure, mud removal pipe and external siphon device fixed connection.
In foretell cleaning device is used in image sensor chip production, welded fastening stopper on the reciprocal lead screw, the floating block sliding connection is on the stopper, the lateral wall of box runs through and is equipped with a plurality of blowpipes.
Compared with the prior art, the invention has the advantages that:
1. through setting up the box, hollow slider, the slide bar, the rectangle frame, rack and sector gear isotructure, two rack toothing in sector gear and the rectangle frame rotate, thereby drive the slide bar and remove about in hollow slider, make slide bar bottom welded fastening's well hollow plate and brush also remove along with removing, come the brush back to the sensor chip surface and move, increase the brush driving range of brush, get rid of the floating dust on sensor chip surface, avoid causing great pollution to the washing liquid, make the washing to the sensor cause secondary pollution.
2. Through setting up the collecting part, scrape the pole and will float the superficial bits on the washing liquid and scrape and move to the collecting tank in, the sawtooth shape slotted hole that is equipped with in the collecting tank avoids getting into to the debris that collects the inslot and flow once more to external washing liquid level for when taking out sensor chip at last, can not float because of the washing liquid level and have the pollution that floats the bits and lead to sensor chip.
3. Through the cleaning component, sundries falling from the sensor chip are deposited at the bottom of the box body and are taken away from the mud suction plate and the mud removal pipe, so that the water quality in the whole cleaning process is ensured to be clean, and the sensor chip is cleaned more cleanly.
4. Through setting up rotatable parts and drive disk assembly, the motor drives reciprocal lead screw and rotates to reciprocal lead screw passes through rotatable parts and drives the montant rotation, thereby the meshing of the first cone pulley of drive and second cone pulley rotates, thereby welded fastening's horizontal pole drives sector gear and rotates on the second cone pulley, avoids setting up a plurality of power input device, reduces the production and the running cost of this device.
Drawings
FIG. 1 is a schematic structural diagram of a cleaning apparatus for producing an image sensor chip according to the present invention;
FIG. 2 is an enlarged view of a portion A of a cleaning apparatus for producing an image sensor chip according to the present invention;
FIG. 3 is a side view of a cleaning apparatus for producing an image sensor chip according to the present invention;
fig. 4 is a front view of a cleaning apparatus for producing an image sensor chip according to the present invention.
In the figure: the device comprises a box body 1, a 2T-shaped plate, a motor 3, a lead screw 4, a driving wheel 5, a driven wheel 6, a synchronous belt 7, a first conical wheel 8, a second conical wheel 9, a cross rod 10, a sector gear 11, a rectangular frame 12, a rack 13, a sliding rod 14, a hollow sliding block 15, a hollow plate 16, a dust removal pipe 17, a dust removal hole 18, a hairbrush 19, a floating block 20, a limiting block 21, a scraping rod 22, a collecting tank 23, a nut 24, a fixing plate 25, a sliding groove 26, a clamping block 27, a spring 28, a straight rod 29, a mud suction plate 30, a vertical rod 31, a triangular block 32 and a mud removal.
Detailed Description
The following examples are for illustrative purposes only and are not intended to limit the scope of the present invention.
Examples
Referring to fig. 1-4, a cleaning device is used in production of image sensor chips, including box 1, welded fastening has T shaped plate 2 on box 1, T shaped plate bottom is rotated and is connected with montant 31, welded fastening has motor 3 on T shaped plate 2, the output welded fastening of motor 3 has reciprocal lead screw 4, welded fastening has the rotating part that makes montant 31 rotatory on the reciprocal lead screw 4, sliding connection has floater 20 on the reciprocal lead screw 4, welded fastening has the collecting part that clears up the floating debris on floater 20, threaded connection has nut 24 on the reciprocal lead screw 4, nut 24 lateral wall symmetry installation is fixed with fixed plate 25, spout 26 has all been seted up on every fixed plate 25, sliding connection has the clamping part that makes sensor chip fixed in the spout 26, the bottom welded fastening of fixed plate 25 has the clearance part that makes bottom impurity get rid of.
Rotatable parts includes drive wheel 5 of welded fastening on reciprocal lead screw 4, welded fastening has from driving wheel 6 on montant 31, drive wheel 5 with from driving wheel 6 to pass through hold-in range 7 and connect, montant 31's bottom welded fastening has drive disk assembly, motor 3 drives reciprocal lead screw 4 and rotates, thereby reciprocal lead screw 4 drives montant 31 through rotatable parts and rotates, thereby drive disk assembly, avoid setting up a plurality of power input device, reduce the production and the running cost of this device.
The transmission part comprises a first conical wheel 8 welded and fixed at the bottom of a vertical rod 31, the first conical wheel 8 is meshed and connected with a second conical wheel 9, a transverse rod 10 is welded and fixed at the middle position of the second conical wheel 9, the transverse rod 10 penetrates through the side wall of the box body 1 and then is welded and fixed with a sector gear 11, the first conical wheel 8 and the second conical wheel 9 are driven to rotate in a meshed mode through rotation of the vertical rod 31, and therefore the transverse rod 10 welded and fixed on the second conical wheel 9 drives the sector gear 11 to rotate.
The inner wall of the box body 1 is symmetrically welded and fixed with hollow sliding blocks 15, two hollow sliding blocks 15 are internally and slidably connected with sliding rods 14, rectangular frames 12 are welded and fixed on the sliding rods 14, racks 13 are respectively welded and fixed on the upper inner walls and the lower inner walls of the rectangular frames 12, the racks 13 are meshed and connected with the sector gears 11, the sector gears 11 are meshed and rotated with the two racks 13 in the rectangular frames 12, so that the sliding rods 14 are driven to move left and right in the hollow sliding blocks 15, hollow plates 16 and brushes 19 which are welded and fixed at the bottoms of the sliding rods 14 are also driven to move left and right, and the surfaces of the sensor.
The bottom of the sliding rod 14 is symmetrically welded and fixed with a hollow plate 16, the bottom of the hollow plate 16 is provided with a plurality of dust collection holes 18, the bottom of the hollow plate 16 is welded and fixed with a plurality of brushes 19, one side of the hollow plate 16 is fixedly communicated with a dust collection pipe 17, the dust collection pipe 17 is fixedly connected with an external air pump, the brushes 19 move left and right along with the reciprocating movement of the sliding rod 14 to brush the surface of the sensor chip, and meanwhile, sundries brushed by the brushes 19 are sucked and removed through the dust collection holes 18, the hollow plate 16 and the dust collection pipe 17.
The collecting component comprises scraping rods 22 symmetrically welded and fixed on two sides of the floating block, a collecting tank 23 is welded and fixed on the top end of each scraping rod 22, sawtooth-shaped slotted holes are formed in the collecting tank 23, sundries floating on cleaning liquid are scraped by the scraping rods 22 to be collected in the collecting tank 23, and the sawtooth-shaped slotted holes formed in the collecting tank 23 are used for preventing the sundries entering the collecting tank 23 from flowing to the liquid level of the external cleaning liquid again.
Clamping part is including the clamp splice 27 of symmetry sliding connection in spout 26, through spring 28 elastic connection between the adjacent clamp splice 27, the top welded fastening of fixed plate 25 has triangle piece 32, two adjacent clamp splices 27 can carry out the centre gripping with the sensor chip of different specification models under the effect of spring 28, increase the application scope of this device, simultaneously when fixed plate 25 rises to the highest point along with nut 24, if triangle piece 32 offsets with scraping rod 22 in this process, triangle piece 32 can push scraping rod 22 to one side, avoid scraping rod 22 and block the washing of brush hair 19 to the sensor chip.
The cleaning component comprises a straight rod 29 which is symmetrically welded and fixed at the bottom of the fixing plate 25, a mud suction plate 30 is welded and fixed at the bottom of the straight rod 29, one side of the mud suction plate 30 is fixedly communicated with a mud removal pipe 33, the mud suction plate 30 is of a hollow structure, the mud removal pipe 33 is fixedly connected with an external siphon device, sundries falling from the sensor chip are deposited at the bottom of the box body 1 and are drawn away from the mud suction plate 20 and the mud removal pipe 33, the water quality of the whole cleaning process is guaranteed to be clean, and the sensor chip is cleaned more cleanly.
Welded fastening has stopper 21 on the reciprocal lead screw 4, and floating block 20 sliding connection is on stopper 21, and the lateral wall of box 1 runs through and is equipped with a plurality of blowpipes, and the density of floating block 20 is less than the washing liquid, and the stroke of floating block 20 is spacing from top to bottom, avoids leading to scraping pole 22 and upper and lower part collision because of the change of washing liquid addition, controls the washing liquid volume of adding easily, and the blowpipe will be washed the sensor chip of cleaning at last weathers.
In the invention, firstly, on a fixed plate 25 in a box body 1, a spring 28 in two clamping plates 27 is extruded to ensure that the clamping plates 27 fix a sensor chip placed in a chute 26, then a proper amount of cleaning solution is added in the box body 1 to ensure that a floating block 20 can just float, a motor 3 is turned on, the motor 3 drives a reciprocating lead screw 4 to rotate, so that a rotating part and a driving part rotate, a cross rod 10 in the driving part drives a sector gear 11 to rotate, the sector gear 11 is meshed and connected with a rack 13 in a rectangular frame 12 to drive the rectangular frame 12 to slide left and right under the action of a slide rod 14, a nut 24 on the reciprocating lead screw 4 drives the fixed plate 25 to move upwards, thereby two hollow plates 16 and a brush 19 which are welded and fixed on the slide rod 14 clean the sensor chip in the fixed plate 25, impurities are sucked into the hollow tube 16 by a dust suction hole 18 on the hollow plate 16, the dust removal pipe 17 sucks the sensor chip to the outside of the device, the back nut 24 moves downwards to drive the sensor chip to enter the cleaning liquid to move up and down for cleaning, the brush bristles 19 clean the surface of the sensor, then floating impurities on the liquid level of the cleaning liquid are scraped into the collecting groove 23 by the scraping rod 22, the impurities attached to the liquid level on the surface when the chip moves up and is taken out are avoided, precipitated impurities at the bottom of the cleaning liquid are pumped away by the mud suction plate 30, clean cleaning liquid is supplemented in the box body 1, the pollution degree of the cleaning liquid is prevented from being reduced in the cleaning process, secondary pollution to the sensor chip is prevented, the frequent operation of replacing the cleaning liquid is reduced, the cleaning efficiency is improved, the cleaned sensor chip is dried by the blowing pipe, the whole cleaning process to the sensor chip is completed, the sensor chip is cleaned, the secondary pollution is avoided, and the replacement frequency of the cleaning liquid is reduced, obviously improving the production efficiency.
Although the terms of the box body 1, the T-shaped plate 2, the motor 3, the reciprocating lead screw 4, the driving wheel 5, the driven wheel 6, the synchronous belt 7, the first cone-shaped wheel 8, the second cone-shaped wheel 9, the cross bar 10, the sector gear 11, the rectangular frame 12, the rack 13, the sliding rod 14, the hollow slide block 15, the hollow plate 16, the dust removing pipe 17, the dust collecting hole 18, the brush 19, the floating block 20, the limiting block 21, the scraping rod 22, the collecting groove 23, the nut 24, the fixing plate 25, the sliding groove 26, the clamping block 27, the spring 28, the straight rod 29, the mud sucking plate 30, the vertical rod 31, the triangular block 32, the mud removing pipe 33 and the like are used more frequently, the possibility of using. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed as being without limitation to any additional limitations that may be imposed by the spirit of the present invention.

Claims (9)

1. The utility model provides a cleaning device is used in image sensor chip production, includes box (1), its characterized in that, welded fastening has T shaped plate (2) on box (1), T shaped plate bottom is rotated and is connected with montant (31), welded fastening has motor (3) on T shaped plate (2), the output welded fastening of motor (3) has reciprocal lead screw (4), welded fastening has the rotatable part that makes montant (31) rotatory on reciprocal lead screw (4), sliding connection has kicking block (20) on reciprocal lead screw (4), welded fastening has the collection part that clears up the floating chips on kicking block (20), threaded connection has nut (24) on reciprocal lead screw (4), nut (24) lateral wall symmetry installation is fixed with fixed plate (25), every spout (26) have all been seted up on fixed plate (25), sliding connection has the clamping part that makes the sensor chip fixed in spout (26), and a cleaning component for removing impurities at the bottom is welded and fixed at the bottom of the fixed plate (25).
2. The cleaning device for producing the image sensor chip as claimed in claim 1, wherein the rotating component comprises a driving wheel (5) welded and fixed on a reciprocating lead screw (4), a driven wheel (6) is welded and fixed on the vertical rod (31), the driving wheel (5) and the driven wheel (6) are connected through a synchronous belt (7), and a transmission component is welded and fixed at the bottom of the vertical rod (31).
3. The cleaning device for producing the image sensor chip as claimed in claim 2, wherein the transmission component comprises a first cone wheel (8) welded and fixed at the bottom of the vertical rod (31), the first cone wheel (8) is engaged and connected with a second cone wheel (9), a cross rod (10) is welded and fixed at the middle position of the second cone wheel (9), and a sector gear (11) is welded and fixed after the cross rod (10) penetrates through the side wall of the box body (1).
4. The cleaning device for producing the image sensor chip as claimed in claim 3, wherein the inner wall of the box body (1) is symmetrically welded and fixed with hollow sliding blocks (15), two sliding blocks (15) are connected with sliding rods (14) in a sliding manner, the sliding rods (14) are welded and fixed with rectangular frames (12), the upper inner wall and the lower inner wall of each rectangular frame (12) are respectively welded and fixed with racks (13), and the racks (13) are meshed and connected with the sector gears (11).
5. The cleaning device for producing the image sensor chip as claimed in claim 4, wherein a hollow plate (16) is symmetrically welded and fixed at the bottom of the sliding rod (14), a plurality of dust suction holes (18) are formed at the bottom of the hollow plate (16), a plurality of brushes (19) are welded and fixed at the bottom of the hollow plate (16), a dust removal pipe (17) is fixedly communicated with one side of the hollow plate (16), and the dust removal pipe (17) is fixedly connected with an external air pump.
6. The image sensor chip production cleaning device according to claim 1, wherein the collecting component comprises scraping rods (22) symmetrically welded and fixed on both sides of the floating block, a collecting groove (23) is welded and fixed on the top end of each scraping rod (22), and a sawtooth-shaped slotted hole is formed in each collecting groove (23).
7. The cleaning device for producing the image sensor chip as claimed in claim 1, wherein the clamping members comprise clamping blocks (27) symmetrically and slidably connected in sliding grooves (26), adjacent clamping blocks (27) are elastically connected through springs (28), and a triangular block (32) is welded and fixed on the top of the fixing plate (25).
8. The cleaning device for producing the image sensor chip as claimed in claim 1, wherein the cleaning member comprises a straight rod (29) symmetrically welded and fixed at the bottom of the fixing plate (25), a mud suction plate (30) is welded and fixed at the bottom of the straight rod (29), one side of the mud suction plate (30) is fixedly communicated with a mud removing pipe (33), the mud suction plate (30) is of a hollow structure, and the mud removing pipe (33) is fixedly connected with an external siphon device.
9. The cleaning device for producing the image sensor chip as claimed in claim 1, wherein a limiting block (21) is welded and fixed on the reciprocating lead screw (4), the floating block (20) is connected to the limiting block (21) in a sliding manner, and a plurality of blowing pipes penetrate through the side wall of the box body (1).
CN202010992710.2A 2020-09-21 2020-09-21 Cleaning equipment is used in image sensor chip production Withdrawn CN112170285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010992710.2A CN112170285A (en) 2020-09-21 2020-09-21 Cleaning equipment is used in image sensor chip production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010992710.2A CN112170285A (en) 2020-09-21 2020-09-21 Cleaning equipment is used in image sensor chip production

Publications (1)

Publication Number Publication Date
CN112170285A true CN112170285A (en) 2021-01-05

Family

ID=73955506

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010992710.2A Withdrawn CN112170285A (en) 2020-09-21 2020-09-21 Cleaning equipment is used in image sensor chip production

Country Status (1)

Country Link
CN (1) CN112170285A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113195353A (en) * 2021-03-19 2021-07-30 唐山哈船科技有限公司 Fixing device and method for marine liftable marine surveying instrument

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108746038A (en) * 2018-06-04 2018-11-06 张涛 A kind of equipment of medical automatic cleaning, drying and disinfection
US20190022709A1 (en) * 2017-07-21 2019-01-24 Citic Dicastal Co.,Ltd Wheel flange drainage channel cleaning device
CN208555166U (en) * 2018-04-26 2019-03-01 常州信息职业技术学院 A kind of machining metal parts surface cleaning apparatus
CN210450033U (en) * 2019-07-29 2020-05-05 天津瑞宝佳兴科技有限公司 Mould cleaning device
CN211071087U (en) * 2019-10-18 2020-07-24 河南华星粉业股份有限公司 Wheat belt cleaning device is used in flour production

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190022709A1 (en) * 2017-07-21 2019-01-24 Citic Dicastal Co.,Ltd Wheel flange drainage channel cleaning device
CN208555166U (en) * 2018-04-26 2019-03-01 常州信息职业技术学院 A kind of machining metal parts surface cleaning apparatus
CN108746038A (en) * 2018-06-04 2018-11-06 张涛 A kind of equipment of medical automatic cleaning, drying and disinfection
CN210450033U (en) * 2019-07-29 2020-05-05 天津瑞宝佳兴科技有限公司 Mould cleaning device
CN211071087U (en) * 2019-10-18 2020-07-24 河南华星粉业股份有限公司 Wheat belt cleaning device is used in flour production

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113195353A (en) * 2021-03-19 2021-07-30 唐山哈船科技有限公司 Fixing device and method for marine liftable marine surveying instrument
CN113195353B (en) * 2021-03-19 2022-07-22 唐山哈船科技有限公司 Fixing device and method for marine surveying instrument capable of lifting

Similar Documents

Publication Publication Date Title
CN211328489U (en) Sewage treatment plant for hydraulic engineering
CN112170285A (en) Cleaning equipment is used in image sensor chip production
CN213610001U (en) Filtering device for polyester production wastewater
CN219149383U (en) Environment-friendly treatment equipment for waste water for chemical products
CN219194610U (en) Oxidation water treatment electrolysis equipment
CN218871490U (en) Primary filtering treatment equipment for wastewater
CN216918645U (en) Water floating pond for spunlace circulating water treatment device
CN221627175U (en) Hydraulic engineering dredging device
CN220194114U (en) Epoxy resin wastewater collection tank
CN221395314U (en) Waste residue collection device
CN221601317U (en) Novel mud scraper
CN221715134U (en) Instrument shell belt cleaning device
CN218223909U (en) Ternary and polymer flooding produced liquid oil-water purification device
CN218530107U (en) Environmental protection engineering pressure filter
CN220836915U (en) Wire drawing machine convenient to it is clean
CN113856299B (en) Filter equipment who strikes off structure with possessing intermittent type formula based on yellow river water is irrigated
CN221440409U (en) Air supporting device with deposit function
CN219079671U (en) Electroplating equipment for plastic processing capable of self-cleaning
CN219744060U (en) Sewage treatment box
CN117099831B (en) Marine product cleaning device for removing sediment
CN220609215U (en) Quick mud scraping mechanism
CN221131131U (en) Descaling agent filter
CN216937522U (en) Water trestle sewage collecting and cleaning device
CN219273891U (en) Ultrasonic cleaner with spill-proof function for robot maintenance
CN219309499U (en) Raw material cleaning equipment for PVC pipe production

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WW01 Invention patent application withdrawn after publication
WW01 Invention patent application withdrawn after publication

Application publication date: 20210105