CN112161981A - Detection jig and detection device - Google Patents
Detection jig and detection device Download PDFInfo
- Publication number
- CN112161981A CN112161981A CN202010923150.5A CN202010923150A CN112161981A CN 112161981 A CN112161981 A CN 112161981A CN 202010923150 A CN202010923150 A CN 202010923150A CN 112161981 A CN112161981 A CN 112161981A
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- shaft
- hole
- shaft end
- chip strip
- bearing plane
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- 238000001514 detection method Methods 0.000 title claims abstract description 45
- 238000001179 sorption measurement Methods 0.000 claims abstract description 49
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 2
- 230000002745 absorbent Effects 0.000 abstract description 4
- 239000002250 absorbent Substances 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004323 axial length Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The application discloses detection tool and detection device. This detection tool includes: a support assembly; the bearing rod is rotatably supported on the support assembly and is provided with a bearing plane along the axial direction, and the bearing plane is provided with an adsorption hole; wherein, the adsorption hole is used for adsorbing and fixing the chip strip on the bearing plane. Rotate to support in supporting component through the carrier bar to adopt the absorbent mode of negative pressure to adsorb the chip strip through adsorbing the hole and be fixed in on the bearing plane of carrier bar, the detection tool that this application provided can improve the efficiency that detects the chip strip effectively.
Description
Technical Field
The application relates to the technical field of semiconductor laser manufacturing, in particular to a detection jig and a detection device.
Background
The semiconductor laser has the characteristics of small volume, high photoelectric conversion efficiency, direct modulation, wide selectable wavelength range and the like, so that the application field of the semiconductor laser is more and more extensive. The light emitting cavity surface of a semiconductor laser chip needs to be inspected during the manufacturing process of a semiconductor device to determine the quality of the semiconductor laser chip.
The existing semiconductor laser mainly picks up a chip manually, places the chip position on a chip detection jig, and then carries out visual inspection through a microscope. The existing detection jig is complex in structure and complex in operation of fixing the chip strip, so that the efficiency of detecting the chip strip is very low.
Disclosure of Invention
The application mainly provides a detection tool and a detection device to solve the problem of low efficiency of detecting chip strips.
In order to solve the technical problem, the application adopts a technical scheme that: a detection tool is provided. This detection tool includes: a support assembly; the bearing rod is rotatably supported on the support assembly and is provided with a bearing plane along the axial direction, and the bearing plane is provided with an adsorption hole; wherein, the adsorption hole is used for adsorbing and fixing the chip strip on the bearing plane.
In some embodiments, at least one set of the adsorption holes is disposed on the bearing plane, and each set of the adsorption holes includes at least two adsorption holes.
In some embodiments, a width of the carrier plane in a width direction perpendicular to the axial direction is less than a width of the chip strip in the width direction.
In some embodiments, an adsorption channel is axially arranged in the bearing rod, and the adsorption channel is communicated with the adsorption hole;
the detection jig further comprises an end cover and a handle, the end cover is covered at one end of the adsorption channel in a sealing mode, and the handle is connected to the other end of the adsorption channel.
In some embodiments, the detection fixture further comprises a vacuum assembly, wherein the vacuum assembly is connected to one end of the handle, which is away from the bearing rod, and is communicated with the adsorption channel through the handle.
In some embodiments, the bearing rod comprises a first shaft end part, a rod part and a second shaft end part which are connected in sequence, the rod part is provided with the bearing plane along the axial direction, the first shaft end part is provided with a first shaft shoulder, the second shaft end part is provided with a second shaft shoulder, the first shaft end part and the second shaft end part are assembled with the shaft hole of the supporting component, and the first shaft shoulder and the second shaft shoulder are in axial limit fit with the supporting component.
In some embodiments, the supporting component includes two supporting seats and two supporting rods, the supporting seats are provided with through holes, the two supporting seats are arranged in parallel at intervals, the two supporting rods are connected between the two supporting seats and arranged at intervals, the first shaft end portion and the second shaft end portion are rotatably arranged in the corresponding through holes, the first shaft shoulder and the second shaft shoulder are in axial limit fit with the corresponding supporting seats, and the first shaft shoulder and the second shaft shoulder are located between the two supporting seats.
In some embodiments, the support assembly further comprises a sleeve fixed within the through-hole, the first and second axial ends each fitting with a corresponding sleeve axial hole.
In some embodiments, the support assembly further includes an elastic positioning element, the support seat is provided with a connecting hole, the connecting hole is communicated with the through hole, the elastic positioning element is connected with the connecting hole, the first shaft end portion and the second shaft end portion are provided with positioning surfaces, and the elastic positioning element is used for being matched with the positioning surfaces in a positioning manner.
In order to solve the above technical problem, another technical solution adopted by the present application is: a detection device is provided. The detection device comprises a microscope and the detection jig, wherein the chip strip is fixedly adsorbed on the bearing plane, the bearing rod is rotated to enable the cavity surface to be detected of the chip strip to be aligned with the microscope, and then the cavity surface to be detected is detected and observed through the microscope.
The beneficial effect of this application is: be different from prior art's condition, this application discloses a detection tool and detection device. Rotate to support in supporting component through the carrier bar, wherein the carrier bar is provided with the bearing plane who bears the weight of the chip strip along the axial, bearing plane is equipped with the absorption hole, fix the chip strip on bearing plane in order to adsorb, adopt the absorbent mode of negative pressure to adsorb the chip strip through adsorbing the hole and be fixed in bearing plane on, it is all very convenient to make fixed and the removal of fixing to the chip strip, and still relatively supporting component rotates the carrier bar with the position of adjusting the chip strip that is located above that, so that detect the chip strip, and then the detection tool that this application provided can improve the efficiency of detecting the chip strip effectively.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts, wherein:
fig. 1 is a schematic structural diagram of an embodiment of a detection fixture provided in the present application;
FIG. 2 is a schematic structural diagram of a state in which the chip strip is carried by the inspection jig shown in FIG. 1;
FIG. 3 is a schematic structural view of a carrier bar of the inspection fixture shown in FIG. 1;
FIG. 4 is a perspective schematic view of the load bar of FIG. 3;
fig. 5 is a schematic structural view of a support seat in the inspection fixture shown in fig. 1.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The terms "first", "second" and "third" in the embodiments of the present application are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of the feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless explicitly specifically limited otherwise. Furthermore, the terms "include" and "have," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements listed, but may alternatively include other steps or elements not listed, or inherent to such process, method, article, or apparatus.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
Referring to fig. 1 to 3, fig. 1 is a schematic structural diagram of an embodiment of a detection fixture, fig. 2 is a schematic structural diagram of a state in which a chip strip is loaded on the detection fixture shown in fig. 1, and fig. 3 is a schematic structural diagram of a load bar in the detection fixture shown in fig. 1.
The detection jig 100 is used for fixing the chip strip 40, and adjusting the position of the chip strip 40 by rotation, so that the cavity surface to be detected of the chip strip 40 is aligned to an eyepiece of a microscope, and then the cavity surface to be detected of the chip strip 40 is visually detected by the microscope, so as to observe whether the cavity surface to be detected is polluted or damaged, and the like.
The detection jig 100 comprises a support component 10, a bearing rod 20 and a vacuum component 30, wherein the bearing rod 20 is rotatably supported on the support component 10, the vacuum component 30 is connected with the bearing rod 20 to provide a negative pressure environment and adsorb the chip strip 40 through the bearing rod 20, and after the chip strip 40 is adsorbed and fixed, the bearing rod 20 is rotatably adjusted to a proper orientation, so that the cavity surface to be detected of the chip strip 40 is aligned to an eyepiece of a microscope.
Specifically, the supporting assembly 10 includes two supporting seats 12 and two supporting rods 14, the two supporting seats 12 are disposed in parallel at an interval, the two supporting rods 14 are connected between the two supporting seats 12 and disposed at an interval, and two ends of the bearing rod 20 are respectively rotatably supported on the two supporting seats 12.
Alternatively, the support assembly 10 may further include a support platform and two support seats 12, wherein the two support seats 12 are disposed in parallel and spaced apart from each other and connected to the support platform. The support assembly 10 may have other configurations, and the present application is not limited in this respect.
The bearing rod 20 is rotatably supported on the support assembly 10, the bearing rod 20 is provided with a bearing plane 21 along the axial direction, and the bearing plane 21 is provided with an adsorption hole 23; the absorption holes 23 are used for absorbing and fixing the chip strip 40 on the bearing plane 21, and the bearing rod 20 rotates relative to the supporting assembly 10 to assist in detecting the chip strip 40.
At least one adsorption hole 23 is formed in the bearing plane 21, and the adsorption holes 23 are axially distributed in the bearing plane 21 at intervals.
The chip strip 40 is placed on the bearing plane 21, the chip strip 40 covers the adsorption hole 23, the chip strip 40 is adsorbed and fixed on the bearing plane 21 when negative pressure exists in the adsorption hole 23, and the chip strip 40 is released when the negative pressure disappears in the adsorption hole 23, so that the chip strip 40 is conveniently fixed and released.
This application carrier bar 20 rotates and supports in supporting component 10, wherein carrier bar 20 is provided with the bearing plane 21 that bears chip strip 40 along the axial, bearing plane 21 is equipped with adsorption hole 23, fix chip strip 40 on bearing plane 21 with adsorbing, adopt the absorbent mode of negative pressure to adsorb chip strip 40 through adsorption hole 23 and be fixed in bearing plane 21, it is all very convenient to make fixed and the removal of chip strip 40, and still can rotate carrier bar 20 with the position of adjusting the chip strip 40 that is located above that relative supporting component 10, so that detect chip strip 40, and then the efficiency of detecting the chip strip can be improved effectively to detection tool 100 that this application provided.
Specifically, at least one set of adsorption holes 23 is disposed on the bearing plane 21, each set of adsorption holes 23 includes at least two adsorption holes 23, and the number of each set of adsorption holes 23 may be different or the same. In this embodiment, referring to fig. 2 and fig. 3 in combination, four sets of adsorption holes 23 are disposed on the bearing plane 21, wherein each set of adsorption holes 23 at the two axial ends includes 3 adsorption holes 23, and the two sets of adsorption holes 23 located in the middle include 2 adsorption holes, the more the number of the adsorption holes 23 included in each set of adsorption holes 23 is, the longer the chip strip 40 along the axial length is adsorbed correspondingly, and the different chip strips 40 along the axial length can be adsorbed by each set of adsorption holes 23.
The width of the bearing plane 21 in the width direction perpendicular to the axial direction is smaller than the width of the chip strip 40 in the width direction, so that the chip strip 40 covers the adsorption hole 23, and the adsorption hole 23 adsorbs the chip strip 40 more efficiently.
Referring to fig. 4, the carrying rod 20 is provided with an adsorption channel 22 along the axial direction, the adsorption channel 22 is communicated with the adsorption hole 23, the adsorption channel 22 penetrates through the carrying rod 20, and the adsorption channel 22 is further communicated with the vacuum assembly 30.
Referring to fig. 2 to 4, the detecting tool 100 further includes an end cap (not shown) and a handle 25, the end cap is connected to one end of the carrying rod 20 to cover one end of the suction channel 22, the handle 25 is connected to the other end of the suction channel 22, the handle 25 is communicated with the suction channel 22, and the handle 25 is used for facilitating the holding of the carrying rod 20. The vacuum assembly 30 is connected to an end of the handle 25 facing away from the carrier bar 20 and communicates with the suction channel 22 through the handle 25.
The end cap may be a bolt that is sealingly attached to one end of the suction channel 22. Alternatively, the end cap is a threaded cap body that is threaded onto one end of the carrier rod 20 to close one end of the suction channel 22. The structure of the end cap is not particularly limited in this application.
The outer peripheral surface of the handle 25 is patterned to increase friction and prevent slipping, so that a user can hold the handle 35 to rotate the carrying rod 20.
Referring to fig. 2, the vacuum module 30 includes a vacuum source 31, an air tube 32 and an air tube connector 33, the vacuum source 31 is used for generating negative pressure, two ends of the air tube 32 are respectively connected to the vacuum source 31 and the air tube connector 33, the air tube connector 33 is connected to the handle 25, and the negative pressure generated by the vacuum source 31 is guided to the adsorption channel 22 through the air tube 32, the air tube connector 33 and the handle 25, and finally the chip strip 40 is adsorbed and fixed on the bearing plane 21 through the adsorption hole 23.
The vacuum source 31 may be a negative pressure generating device such as a vacuum pump, and the vacuum module 30 may not include the vacuum source 31, but use an external negative pressure communicating air pipe 32, which is not limited in this application.
In this embodiment, referring to fig. 3, the bearing rod 20 includes a first shaft end 26, a rod 27, and a second shaft end 28, which are connected in sequence, the rod 27 is provided with a bearing plane 21 along an axial direction, the first shaft end 26 is provided with a first shaft shoulder 260, the second shaft end 28 is provided with a second shaft shoulder 280, the first shaft end 26 and the second shaft end 28 are assembled with the shaft hole of the support component 10, so that the bearing rod 20 is rotatably supported on the support component 10, and the first shaft shoulder 260 and the second shaft shoulder 280 are axially and limitedly matched with the support component 10.
Wherein the suction passage 22 extends through the first shaft end 26, the stem portion 27 and the second shaft end 28, the handle 25 is connected to the first shaft end 26, and the cap is connected to the second shaft end 28.
Specifically, referring to fig. 1 to 5, the supporting assembly 10 includes two supporting seats 12 and two supporting rods 14, the supporting seats 12 are provided with through holes 120, the two supporting seats 12 are disposed in parallel at intervals, the two supporting rods 14 are connected between the two supporting seats 12 and disposed at intervals, the first shaft end 26 and the second shaft end 28 are rotatably disposed in the corresponding through holes 120, the first shaft shoulder 260 and the second shaft shoulder 280 are in axial limit fit with the corresponding supporting seats 12, and the first shaft shoulder 260 and the second shaft shoulder 280 are located between the two supporting seats 12.
The support assembly 10 further includes a sleeve 13, the sleeve 13 being fixed in the through hole 120, and the first shaft end 26 and the second shaft end 28 being respectively shaft-hole-fitted with the corresponding sleeve 13. The sleeve 13 is assembled with the through hole 120 in an interference fit mode, wherein the inner peripheral surface of the sleeve 13 is subjected to finish machining, so that the bearing rod 20 can rotate relative to the sleeve 13, the through hole 120 can be prevented from being subjected to finish machining directly, and the production and machining difficulty is reduced.
The support assembly 10 further includes an elastic positioning member 15, the support base 12 is provided with a connecting hole 122, the connecting hole 122 is communicated with the through hole 120, the elastic positioning member 15 is connected to the connecting hole 122, the first shaft end 26 and the second shaft end 28 are provided with positioning surfaces (not shown), and the elastic positioning member 15 is used for being positioned and matched with the positioning surfaces.
In this embodiment, the elastic positioning member 15 is a ball plunger, the connecting hole 122 is a threaded hole, and a through hole is further formed in the sleeve 13, the ball plunger is connected to the threaded hole and penetrates through the through hole to partially extend into the sleeve 13, and then when the positioning surface rotates to align the ball plunger, the bearing rod 20 can be positioned, so as to assist the chip strip 40 located on the bearing plane 21 to align with the microscope, the alignment efficiency is improved, and the bearing rod 20 is rotated by continuing to drive the handle 25, so that the ball plunger can be released from the positioning state with the positioning surface.
The positioning surface may be an arc surface or a plane, and the elastic positioning element 15 may also be an elastic column, which is not limited in this application.
Based on this, this application still provides a detection device, this detection device include the microscope and like above-mentioned detection tool 100, adsorb on the bearing plane 21 and be fixed with chip strip 40, rotate carrier bar 20 so that the chamber face alignment microscope is awaited to the chamber face of chip strip 40, and then go to detect through the microscope and observe the chamber face of awaiting measuring.
Be different from prior art's condition, this application discloses a detection tool and detection device. Rotate to support in supporting component through the carrier bar, wherein the carrier bar is provided with the bearing plane who bears the weight of the chip strip along the axial, bearing plane is equipped with the absorption hole, fix the chip strip on bearing plane in order to adsorb, adopt the absorbent mode of negative pressure to adsorb the chip strip through adsorbing the hole and be fixed in bearing plane on, it is all very convenient to make fixed and the removal of fixing to the chip strip, and still relatively supporting component rotates the carrier bar with the position of adjusting the chip strip that is located above that, so that detect the chip strip, and then the detection tool that this application provided can improve the efficiency of detecting the chip strip effectively.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and all modifications of equivalent structures and equivalent processes, which are made by the contents of the specification and the drawings, or which are directly or indirectly applied to other related technical fields, are intended to be included within the scope of the present application.
Claims (10)
1. The utility model provides a detection tool which characterized in that, detection tool includes:
a support assembly;
the bearing rod is rotatably supported on the support assembly and is provided with a bearing plane along the axial direction, and the bearing plane is provided with an adsorption hole;
wherein, the adsorption hole is used for adsorbing and fixing the chip strip on the bearing plane.
2. The detecting tool according to claim 1, wherein the bearing plane is provided with at least one set of the absorption holes, and each set of the absorption holes comprises at least two absorption holes.
3. The inspection fixture of claim 1, wherein a width of the carrier plane in a width direction perpendicular to the axial direction is less than a width of the chip strip in the width direction.
4. The detection jig according to claim 1, wherein an adsorption channel is axially arranged in the bearing rod, and the adsorption channel is communicated with the adsorption hole;
the detection jig further comprises an end cover and a handle, the end cover is covered at one end of the adsorption channel in a sealing mode, and the handle is connected to the other end of the adsorption channel.
5. The inspection tool of claim 4 further comprising a vacuum assembly connected to an end of the handle away from the carrier bar and communicating with the suction channel through the handle.
6. The detection jig according to claim 1, wherein the bearing rod comprises a first shaft end part, a rod part and a second shaft end part which are sequentially connected, the rod part is provided with the bearing plane along the axial direction, the first shaft end part is provided with a first shaft shoulder, the second shaft end part is provided with a second shaft shoulder, the first shaft end part and the second shaft end part are assembled with the shaft hole of the support component, and the first shaft shoulder and the second shaft shoulder are in axial limit fit with the support component.
7. The detecting tool according to claim 6, wherein the supporting member includes two supporting seats and two supporting rods, the supporting seats are provided with through holes, the two supporting seats are disposed in parallel and spaced apart from each other, the two supporting rods are connected between the two supporting seats and disposed in spaced apart relation to each other, the first shaft end and the second shaft end are rotatably disposed in the corresponding through holes, the first shaft shoulder and the second shaft shoulder are axially and limitedly engaged with the corresponding supporting seats, and the first shaft shoulder and the second shaft shoulder are disposed between the two supporting seats.
8. The inspection fixture of claim 7, wherein the support assembly further includes a sleeve fixed in the through hole, and the first and second axial ends are respectively assembled with the corresponding sleeve shaft holes.
9. The detection jig according to claim 7 or 8, wherein the support assembly further comprises an elastic positioning member, the support base is provided with a connecting hole, the connecting hole is communicated with the through hole, the elastic positioning member is connected with the connecting hole, the first shaft end portion and the second shaft end portion are provided with positioning surfaces, and the elastic positioning member is used for being matched with the positioning surfaces in a positioning manner.
10. The detection device is characterized by comprising a microscope and the detection jig according to any one of claims 1 to 9, wherein a chip strip is fixedly adsorbed on the bearing plane, the bearing rod is rotated to enable the cavity surface to be detected of the chip strip to be aligned with the microscope, and then the cavity surface to be detected is detected and observed through the microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010923150.5A CN112161981A (en) | 2020-09-04 | 2020-09-04 | Detection jig and detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010923150.5A CN112161981A (en) | 2020-09-04 | 2020-09-04 | Detection jig and detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112161981A true CN112161981A (en) | 2021-01-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010923150.5A Pending CN112161981A (en) | 2020-09-04 | 2020-09-04 | Detection jig and detection device |
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| Country | Link |
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| CN (1) | CN112161981A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102637623A (en) * | 2012-04-18 | 2012-08-15 | 吴晓 | LED (light-emitting diode) chip carrier positioning and absorbing device |
| CN105467291A (en) * | 2015-12-30 | 2016-04-06 | 中国科学院西安光学精密机械研究所 | Semiconductor laser chip testing and fixing device and method thereof |
| CN108776242A (en) * | 2018-04-28 | 2018-11-09 | 深圳瑞波光电子有限公司 | A kind of measurement jig and device |
| CN110634788A (en) * | 2019-10-08 | 2019-12-31 | 重庆电子工程职业学院 | Chip mounting carrier and mounting method |
| CN111211083A (en) * | 2020-01-13 | 2020-05-29 | 长江存储科技有限责任公司 | Wafer bearing device |
| CN111308325A (en) * | 2019-12-13 | 2020-06-19 | 山东才聚电子科技有限公司 | Chip detection system and method |
-
2020
- 2020-09-04 CN CN202010923150.5A patent/CN112161981A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102637623A (en) * | 2012-04-18 | 2012-08-15 | 吴晓 | LED (light-emitting diode) chip carrier positioning and absorbing device |
| CN105467291A (en) * | 2015-12-30 | 2016-04-06 | 中国科学院西安光学精密机械研究所 | Semiconductor laser chip testing and fixing device and method thereof |
| CN108776242A (en) * | 2018-04-28 | 2018-11-09 | 深圳瑞波光电子有限公司 | A kind of measurement jig and device |
| CN110634788A (en) * | 2019-10-08 | 2019-12-31 | 重庆电子工程职业学院 | Chip mounting carrier and mounting method |
| CN111308325A (en) * | 2019-12-13 | 2020-06-19 | 山东才聚电子科技有限公司 | Chip detection system and method |
| CN111211083A (en) * | 2020-01-13 | 2020-05-29 | 长江存储科技有限责任公司 | Wafer bearing device |
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