CN112161598A

CN112161598A - Detection method and detection device of detection equipment

Info

Publication number: CN112161598A
Application number: CN202011064650.4A
Authority: CN
Inventors: 陈鲁; 吕肃; 李青格乐; 方一; 张嵩
Original assignee: Shenzhen Zhongke Flying Test Technology Co ltd
Current assignee: Shenzhen Zhongke Flying Test Technology Co ltd
Priority date: 2020-09-30
Filing date: 2020-09-30
Publication date: 2021-01-01
Anticipated expiration: 2040-09-30
Also published as: CN112161598B

Abstract

The embodiment of the application discloses a detection method and a detection device of detection equipment, the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection equipment comprises a detection module, an object to be detected comprises a first characteristic point and a second characteristic point, the first characteristic point can be used for carrying out first detection on the first characteristic point when the detection module and the first characteristic point have a first relative position, then, the second characteristic point can be used for carrying out second detection on the second characteristic point when the detection module and the second characteristic point have a second relative position, so that an included angle to be detected between the reference direction and the measurement direction can be obtained according to a detection result and the inherent position relation of the first characteristic point and the second characteristic point, the detection accuracy of the detection equipment is improved, and the mode of determining the included angle to be detected only needs two characteristic points with known distance along the reference direction, the operation is simple.

Description

Detection method and detection device of detection equipment

Technical Field

The present disclosure relates to the field of detection, and in particular, to a detection method and a detection apparatus for a detection device.

Background

At present, the feature points on the object to be detected can be detected by using the detection equipment to obtain the features of the object, for example, the object to be detected can be detected by using the detection equipment to obtain the distance between the detection equipment and the feature points on the object to be detected, and then the shape of the object to be detected can be determined according to the detection result. Specifically, the detection device can emit detection light to the object to be detected, the detection light is reflected by the surface of the object to be detected, the reflected light is received by the detection device, and the distance between the detection device and the surface of the object to be detected can be calculated according to the characteristics of the detection light and the reflected light.

In the detection process of detecting the feature point, a reference direction may be preset for the detection device, and the detection result obtained by the detection device may be processed into position information along the reference direction through the detection characteristic, the fixed direction of the detection device and the analysis of the detection result of the detection device, so as to determine the actual position of the feature point. The reference direction is consistent for a plurality of characteristic points, so that the relative position of each characteristic point can be reflected. For example, when the reference direction is the vertical direction, the position information of the feature points in the reference direction can be represented by the heights of the feature points, and the fixed direction of the detection device can correspond to a plurality of different analysis processes, so that the heights of the feature points are obtained by using the detection results of the feature points. That is, the detection characteristics of the detection device, the fixed direction, and the analysis process of the detection result are corresponded so that the detection result can be converted into the positional information along the reference direction.

However, there may be a fixed error in the fixing process of the detection device, and under the condition that the detection characteristics and the analysis process of the detection result are not changed, the obtained position information is not along the reference direction any more, but along a direction having a certain included angle with the reference direction, and this direction may be used as the actual measurement direction, and the included angle between the actual measurement direction and the reference direction is related to the error in the fixing process of the detection device. For example, when the reference direction is the vertical direction, the height measuring device may be fixed vertically downward, and the distance between the height measuring device and the feature point detected in this way may be taken as the height difference between the height measuring device and the feature point along the vertical direction, so as to be used for determining the height of the feature point.

Therefore, when the detection device has a fixed error, the position information analyzed based on the detection result also has an error, resulting in a low detection accuracy of the detection device.

Disclosure of Invention

In order to solve the above technical problem, embodiments of the present application provide a detection method and a detection apparatus for a detection device, so as to accurately determine an included angle between a measurement direction of the detection device and a reference direction, so as to improve detection accuracy of the detection device.

The embodiment of the application provides a detection method of detection equipment, the detection equipment has a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, an object to be detected comprises a first characteristic point and a second characteristic point, the detection equipment comprises a detection module, and the method comprises the following steps:

when the detection module and the first feature point have a first relative position, performing first detection on the first feature point by using the detection device to acquire first position information of the first feature point in the device reference system; the detection module has a first distance vector with the first feature point at the first relative position;

when the detection module and the second feature point have a second relative position, performing second detection on the second feature point by using the detection device to acquire second position information of the second feature point in the device reference system; at the second relative position, there is a second distance vector between the detection module and the second feature point, the first distance vector and the second distance vector having a first preset difference in the reference direction, the first preset difference being a non-zero value;

and acquiring an included angle to be measured between the reference direction and the measuring direction according to the first preset difference, the first position information and the second position information.

Optionally, the obtaining an included angle between the reference direction and the measurement direction according to the first preset difference, the first position information, and the second position information includes:

acquiring a first displacement expression of a first characteristic point and a second reference point along the reference direction according to the first position information and the included angle to be measured;

acquiring a second displacement expression of a second characteristic point and the second reference point along the reference direction according to the second position information and the included angle to be measured;

establishing a relation equation according to the first displacement expression, the second displacement expression and the first preset difference value;

and acquiring the included angle to be measured according to the relation equation.

Optionally, the detection module has a first reference point, the object to be detected has a second reference point, and the second reference point is located in the equipment reference frame and has a fixed position in the equipment reference frame;

the first location information includes: a first reference displacement of the first reference point from the second reference point in the reference direction and a first feature displacement of the first feature point from the first reference point in the measurement direction at the first relative position;

the second location information includes: a second reference displacement of the first reference point from the second reference point in the reference direction at the second relative position, and a second feature displacement of the second feature point from the first reference point in the measurement direction.

Alternatively to this, the first and second parts may,

the step of obtaining a first displacement expression of the first characteristic point and the second reference point along the reference direction according to the first position information and the included angle to be measured comprises the following steps: acquiring a first relation representation of the first characteristic displacement in the reference direction according to the first characteristic displacement and the included angle to be measured; acquiring the first displacement expression according to the vector sum of the first reference displacement and the first relation expression;

and/or the presence of a gas in the gas,

the step of obtaining a second displacement expression of a second feature point and the second reference point along the reference direction according to the second position information and the included angle to be measured comprises the following steps: acquiring a second relation representation of the second characteristic displacement in the reference direction according to the second characteristic displacement and the included angle to be measured; and acquiring the second displacement expression according to the second reference displacement and the vector sum represented by the second relation.

Optionally, the detection module is configured to obtain a characteristic distance between the measurement feature point and the first reference point along the measurement direction according to a projection of an inherent distance between the measurement feature point and the first reference point along an optical axis direction of the detection module in the measurement direction; a preset included angle is formed between the measuring direction and the optical axis direction of the detection module; the measurement characteristic points comprise a first characteristic point and a second characteristic point, the characteristic distance between the first characteristic point and the first reference point along the measurement direction is the first characteristic displacement, and the characteristic distance between the second characteristic point and the first reference point along the measurement direction is the second characteristic displacement;

the step of obtaining a first relation representation of the first characteristic displacement in the reference direction according to the first characteristic displacement and the included angle to be measured comprises the following steps: obtaining the back projection of the first characteristic displacement in the optical axis direction according to the preset angle to obtain a first inherent distance; acquiring the projection of the first inherent distance in the reference direction according to the preset angle and the angle to be measured to obtain a first relation expression;

the step of obtaining a second relation representation of the second characteristic displacement in the reference direction according to the second characteristic displacement and the included angle to be measured comprises the following steps: obtaining the back projection of the second characteristic displacement in the optical axis direction according to the preset included angle to obtain a second inherent distance; and acquiring the projection of the second inherent distance in the reference direction according to the preset angle and the angle to be measured to obtain a second relation expression.

Optionally, the preset included angle is equal to zero degree, or the preset included angle is an acute angle.

Optionally, a distance between the first feature point and the second feature point in the reference direction is zero, and if the first reference displacement is different from the second reference displacement, the first preset difference is 0, and the relationship equation is:

[Z1/cos(θ0)*cos(θx+θ0)+h1]-[Z2/cos(θ0)*cos(θx+θ0)+h2]＝0；

wherein the Z1 represents the first characteristic displacement, the Z2 represents the second characteristic displacement, the θ 0 is the preset included angle, the θ x represents the angle to be measured, the h1 represents the first reference displacement, and the h2 represents the second reference displacement.

Optionally, a distance between the first feature point and the second feature point in the reference direction is not zero, the first reference displacement and the second reference displacement are the same or different, and the relationship equation is:

[Z1/cos(θ0)*cos(θx+θ0)+h1]-[Z2/cos(θ0)*cos(θx+θ0)+h2]＝h0；

wherein the Z1 represents the first characteristic displacement, the Z2 represents the second characteristic displacement, the θ 0 is the preset included angle, the θ x represents the angle to be measured, the h1 represents the first reference displacement, the h2 represents the second reference displacement, and the h0 represents the first preset difference.

Optionally, the detection apparatus further includes a moving device, where the moving device is configured to enable the detection module and/or the object to be detected to rotate relatively around a rotation axis, the rotation axis is perpendicular to a rotation plane of the object to be detected, the measurement direction is perpendicular to the rotation axis, the reference direction is perpendicular to the rotation axis, and the reference direction and the rotation axis intersect at a rotation center of the object to be detected; the detection module is provided with a first datum line, the object to be detected is provided with a second datum line, the first datum line is perpendicular to the rotating shaft, the first datum line rotates along with the detection module, the second datum line rotates along with the object to be detected, the second datum line is perpendicular to the rotating shaft, and the second datum line comprises a rotating center of the object to be detected; at a reference position, the first reference line, the second reference line and the reference direction coincide;

the step of acquiring the first reference displacement comprises: enabling the object to be detected and the detection module to relatively rotate through a moving device, enabling the detection module and the first characteristic point to have a first relative position, and acquiring a first relative angle between the first datum line and the second datum line at the first relative position and a first axial relative displacement between the first datum line and the rotation center at the first relative position; performing projection processing on the first axial relative displacement according to the first relative angle to obtain the first reference displacement;

and/or the presence of a gas in the gas,

the step of acquiring the second reference displacement comprises: after the first detection, the object to be detected and the detection module are relatively rotated through the moving device, so that the detection module and the second characteristic point have a second relative position, and a first relative angle between the first datum line and the second datum line at the second relative position and a second axial relative displacement between the first datum line and the rotation center at the second relative position are obtained; and performing projection processing on the second axial relative displacement according to the second relative angle to obtain the second reference displacement.

Optionally, the step of obtaining a first relation representation of the first characteristic displacement in the reference direction according to the first characteristic displacement and the included angle to be measured includes: acquiring a vector sum of the first relative angle and the included angle to be detected to obtain a first characteristic angle; performing projection processing on the first characteristic displacement by using the first characteristic angle to obtain the first relation representation; and/or the presence of a gas in the gas,

the step of obtaining a second relation representation of the second characteristic displacement in the reference direction according to the second characteristic displacement and the included angle to be measured comprises the following steps: acquiring a vector sum of the second opposite angle and the included angle to be detected to obtain a second characteristic angle; and projecting the second characteristic displacement by using the second characteristic angle to obtain the second relation expression.

Optionally, a distance between the first feature point and the second feature point in the reference direction is not zero, the first reference displacement and the second reference displacement are the same or different, the first relative angle is zero, and the relationship equation is:

[OA1+A1P1*cos(θ2)]-[OA2*cos(θ1)+A2P2*cos(θ1+θ2)]＝d0；

the OA1 is the first axial relative displacement, the A1P1 is the first characteristic displacement, the theta 2 is the included angle to be measured, the OA2 is the second axial relative displacement, the theta 1 is the second relative angle, the A2P2 is the second characteristic displacement, and the d0 is the first preset difference.

Optionally, the detection apparatus further includes a moving device, and the moving device is configured to move the object to be detected and the detection module relatively;

performing first detection on the first feature point by using the detection device, and acquiring first position information of the first feature point in the device reference system, including: the object to be detected and the detection module are relatively moved by a first vector through the moving device, so that the detection module and the first feature point have a first relative position; acquiring a first reference displacement of the first reference point and the second reference point along the reference direction according to the first vector; when the detection module and the first feature point have a first relative position, detecting the first feature point through the detection module, and acquiring a first feature displacement of the first feature point and the first reference point along the measurement direction;

performing second detection on the second feature point by using the detection device, and acquiring second position information of the second feature point in the device reference system, including: after the first detection, the object to be detected and the detection module are relatively moved by a second vector through the moving device, so that the detection module and the first feature point have a second relative position; acquiring a second reference displacement of the first reference point and the second reference point along the reference direction according to the second vector; when the detection module and the first feature point have a second relative position, the detection module detects the second feature point, and second feature displacement of the second feature point and the first reference point along the measurement direction is obtained.

Optionally, the distance between the first feature point and the second feature point along the reference direction is greater than zero, and the second vector is perpendicular to the reference direction; or,

the distance between the first characteristic point and the second characteristic point along the reference direction is equal to zero, and the second vector has a non-zero included angle with the reference direction.

Optionally, obtaining the included angle to be measured according to the relationship equation includes:

setting an initial value for the angle to be measured in the relation equation;

acquiring a plurality of first position information, a plurality of second position information and a plurality of first preset difference values;

and performing function fitting on the relation equation according to the first position information, the second position information and the first preset difference values to optimize the initial value to obtain the included angle to be measured.

Optionally, the method of function fitting includes least squares method or linear regression.

Optionally, the first reference displacement is zero, and/or the second reference displacement is zero.

Optionally, the detection module includes: one or more of a spectrum confocal module, a white light interference module, a differential phase shift interference module and a laser ranging module.

Optionally, the number of the first feature points and the second feature points is plural.

Optionally, the first characteristic point and the second characteristic point are a center point of a circular hole, a vertex of a cone, or a sphere center of a sphere.

Optionally, the method further includes:

when the detection module and the point to be detected have a third relative position, performing third detection on the point to be detected by using the detection equipment to obtain third position information of the point to be detected in the equipment reference system;

and adjusting the third position information based on the included angle to be measured between the reference direction and the measuring direction to obtain fourth position information of the point to be measured in the equipment reference system.

The embodiment of the application also provides a detection device, which comprises detection equipment and a processing module, wherein the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection equipment comprises a detection module, and an object to be detected comprises a first characteristic point and a second characteristic point; the processing module comprises: the device comprises a detection unit and an included angle determination unit;

the detection unit is used for performing first detection on the first feature point by using the detection device when the detection module and the first feature point have a first relative position, and acquiring first position information of the first feature point in the device reference system; the detection module has a first distance vector with the first feature point at the first relative position;

and the included angle determining unit is used for acquiring the included angle to be measured between the reference direction and the measuring direction according to the first preset difference value, the first position information and the second position information.

Optionally, the included angle determining unit includes:

a first displacement expression determining unit, configured to obtain, according to the first position information and the included angle to be measured, a first displacement expression of the first feature point and the second reference point in the reference direction;

a second displacement expression determining unit, configured to obtain, according to the second position information and the included angle to be measured, a second displacement expression of a second feature point and the second reference point in the reference direction;

a relational equation determining unit, configured to establish a relational equation according to the first displacement expression, the second displacement expression, and the first preset difference;

and the included angle determining subunit is used for obtaining the included angle to be measured according to the relation equation.

Alternatively to this, the first and second parts may,

the first displacement expression determination unit includes:

a first relation representation obtaining unit, configured to obtain a first relation representation of the first characteristic displacement in the reference direction according to the first characteristic displacement and the included angle to be measured;

a first displacement expression determining subunit configured to obtain the first displacement expression according to a vector sum of the first reference displacement and the first relational expression;

and/or the presence of a gas in the gas,

the second displacement expression determination unit includes:

a second relation representation obtaining unit, configured to obtain a second relation representation of the second characteristic displacement in the reference direction according to the second characteristic displacement and the included angle to be measured;

and a second displacement expression determination subunit configured to acquire the second displacement expression based on a vector sum of the second reference displacement and the second relational expression.

the first relation representation acquiring unit is specifically configured to: obtaining the back projection of the first characteristic displacement in the optical axis direction according to the preset angle to obtain a first inherent distance; acquiring the projection of the first inherent distance in the reference direction according to the preset angle and the angle to be measured to obtain a first relation expression;

the second relationship representation acquiring unit is specifically configured to: obtaining the back projection of the second characteristic displacement in the optical axis direction according to the preset included angle to obtain a second inherent distance; and acquiring the projection of the second inherent distance in the reference direction according to the preset angle and the angle to be measured to obtain a second relation expression.

[Z1/cos(θ0)*cos(θx+θ0)+h1]-[Z2/cos(θ0)*cos(θx+θ0)+h2]＝0；

[Z1/cos(θ0)*cos(θx+θ0)+h1]-[Z2/cos(θ0)*cos(θx+θ0)+h2]＝h0；

and/or the presence of a gas in the gas,

[OA1+A1P1*cos(θ2)]-[OA2*cos(θ1)+A2P2*cos(θ1+θ2)]＝d0；

Optionally, the detection apparatus further includes a moving device, and the moving device is configured to:

enabling the object to be detected and the detection module to move relative to each other by a first vector, enabling the detection module and the first feature point to have a first relative position, and acquiring the reference displacement of the first reference point and the second reference point along the reference direction according to the first vector of the object to be detected and the detection module which move relative to each other;

after the first detection, the object to be detected and the detection module are relatively moved by a second vector, so that the detection module and the first feature point have a second relative position; and acquiring a second reference displacement of the first reference point and the second reference point along the reference direction according to the second vector.

Optionally, the included angle determining subunit includes:

an initial value determining unit, configured to set an initial value for the angle to be measured in the relationship equation;

the information acquisition unit is used for acquiring a plurality of pieces of first position information, a plurality of pieces of second position information and a plurality of first preset difference values;

and the fitting unit is used for performing function fitting on the relation equation through the plurality of first position information, the plurality of second position information and the plurality of first preset difference values so as to optimize the initial value and obtain the included angle to be measured.

Optionally, the apparatus further comprises:

a third position information obtaining unit, configured to, when the detection module and the point to be measured have a third relative position, perform a third detection on the point to be measured by using the detection device, and obtain third position information of the point to be measured in the device reference system;

and the adjusting unit is used for adjusting the third position information based on the included angle to be measured between the reference direction and the measuring direction to obtain fourth position information of the point to be measured in the equipment reference system.

The embodiment of the application provides a detection method and a detection device of detection equipment, the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection equipment comprises a detection module, an object to be detected comprises a first characteristic point and a second characteristic point, when the detection module and the first characteristic point have a first relative position, the first characteristic point can be subjected to first detection by the detection equipment, first position information of the first characteristic point in the equipment reference system is obtained, a first distance vector is formed between the detection module and the first characteristic point, when the detection module and the second characteristic point have a second relative position, the second characteristic point can be subjected to second detection by the detection equipment, second position information of the second characteristic point in the equipment reference system is obtained, and a second distance vector is formed between the detection module and the second characteristic point, the first distance vector and the second distance vector have a first predetermined difference in the reference direction, the first predetermined difference being a non-zero value.

Because the device reference system is determined according to the measurement direction, the acquired first position information of the first characteristic point in the device reference system and the acquired second position information of the second characteristic point in the device reference system are related to the measurement direction, the reference direction corresponds to the measurement direction, when the detection device is accurately fixed, the measurement direction is overlapped with the reference direction, when the detection device has a fixed error, an included angle exists between the measurement direction and the reference direction, the detection of the detection device is inaccurate, the obtained first position information and second position information are also inaccurate, therefore, the detection distance between the first characteristic point and the second characteristic point determined according to the first relative position and the second relative position is different from the first preset difference value, and the difference between the detection distance and the first preset difference value is determined by the included angle to be measured between the reference direction and the measurement direction, therefore, the included angle to be detected can be obtained according to the preset difference value, the first position information and the second position information so as to improve the detection accuracy of the detection equipment, and the method for determining the included angle to be detected only needs two characteristic points with known distance along the reference direction, so that the operation is simple.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art according to the drawings.

Fig. 1 is a flowchart of a detection method of a detection device in an embodiment of the present application;

fig. 2 is a schematic diagram of a detection provided in an embodiment of the present application;

FIG. 3 is a schematic diagram of another detection provided by an embodiment of the present application;

FIG. 4 is a schematic illustration of another exemplary detection scheme provided by an embodiment of the present application;

FIG. 5 is a schematic illustration of another exemplary detection scheme provided by an embodiment of the present application;

fig. 6 is a block diagram of a detection apparatus according to an embodiment of the present application.

Detailed Description

In order to make the technical solutions of the present application better understood, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

At present, the feature points on the object to be detected can be detected by using the detection equipment to obtain the features of the object, for example, the object to be detected can be detected by using the detection equipment to obtain the distance between the detection equipment and the feature points on the object to be detected, and then the shape of the object to be detected can be determined according to the detection result.

Based on this, the embodiment of the present application provides a detection method and a detection apparatus for a detection device, where the detection device has a measurement direction, a device reference system determined according to the measurement direction, and a reference direction corresponding to the measurement direction, the detection device includes a detection module, the object to be detected includes a first feature point and a second feature point, when the detection module and the first feature point have a first relative position, the detection device may perform first detection on the first feature point to obtain first position information of the first feature point in the device reference system, at this time, a first distance vector exists between the detection module and the first feature point, when the detection module and the second feature point have a second relative position, the detection device may perform second detection on the second feature point to obtain second position information of the second feature point in the device reference system, at this time, a second distance vector exists between the detection module and the second feature point, the first distance vector and the second distance vector have a first predetermined difference in the reference direction, the first predetermined difference being a non-zero value.

Because the device reference system is determined according to the measurement direction, the acquired first position information of the first characteristic point in the device reference system and the acquired second position information of the second characteristic point in the device reference system are related to the measurement direction, the reference direction corresponds to the measurement direction, when the detection device is accurately fixed, the measurement direction is overlapped with the reference direction, when the detection device has a fixed error, an included angle exists between the measurement direction and the reference direction, the detection of the detection device is inaccurate, the obtained first position information and second position information are also inaccurate, therefore, the detection distance between the first characteristic point and the second characteristic point determined according to the first relative position and the second relative position is different from the first preset difference value, and the difference between the detection distance and the first preset difference value is determined by the included angle to be measured between the reference direction and the measurement direction, therefore, the included angle to be detected can be obtained according to the first preset difference value, the first position information and the second position information, so that the detection accuracy of the detection equipment is improved, and the method for determining the included angle to be detected only needs two characteristic points with known distances along the reference direction, so that the operation is simple.

For convenience of explanation, the following describes the detection apparatus according to the embodiment of the present application.

In the embodiment of the application, the detection device is used for detecting the object to be detected, the object to be detected can include at least one feature point, the feature point on the object to be detected can be detected through the detection device to obtain the position of the feature point, and the position of the feature point obtained through detection can be the position along a certain direction or the position in a two-dimensional coordinate system. In this embodiment, the object to be measured may be a wafer, and the position of the detected feature point may be a position of the feature point on the surface of the wafer.

The detection device can comprise a detection module and a moving device, wherein the detection module is used for detecting the characteristic points to obtain a detection result, and the moving device can move the detection module and/or the object to be detected so as to adjust the relative position between the detection module and the object to be detected. Specifically, mobile device can make detection module rotate around the rotation axis, also can make detection module translate along the radius of rotation, can also make the determinand rotate around the rotation axis, can also carry out relative translation to determinand and detection module, for example detection module can be at the plane internal translation that is on a parallel with the determinand surface, also can be at the direction translation on perpendicular determinand surface. Of course, the detecting module and the object to be detected may also move simultaneously, such as rotate simultaneously or translate simultaneously, wherein the object to be detected and the detecting module may have the same rotation axis, the rotation axis is perpendicular to the rotation plane of the object to be detected and the rotation plane of the detecting module, and the rotation centers of the object to be detected and the detecting module are located on the rotation axis.

After the detection module and/or the object to be detected are moved, the mobile device can acquire mobile data, and the mobile data can comprise a rotation angle, a rotation radius, a movement distance and the like. In order to quantify the rotation of the detection module and the object to be detected, a first datum line can be arranged in a rotation plane of the detection module, a second datum line is arranged in the rotation plane of the object to be detected, the first datum line and the second datum line can be intersected with the rotation shaft, the first datum line rotates along with the detection module, the second datum line rotates along with the object to be detected, and the rotation angle of the detection module and the rotation angle of the object to be detected can be represented by the rotation of the first datum line and the rotation angle of the second datum line. In order to quantify the translation of the detection module and the object to be detected, the position of the detection module can be embodied by using the coordinate in the machine coordinate system, specifically, the horizontal plane in the machine coordinate system comprises an X axis and a y axis, the vertical direction is a z axis, the position of the detection module in the machine coordinate system can be obtained according to the reading of the machine and is recorded as (X)_stage，Y_stage，Z_stage)。

The detection module may have an equipment built-in coordinate system, and after the position of the detection module is changed, the equipment built-in coordinate system also moves, for example, the equipment built-in coordinate system rotates along with the rotation of the detection module and translates along with the translation of the detection module, so that the equipment built-in coordinate system cannot accurately represent the actual position of the detected feature point, and therefore, an equipment reference system may be determined for the detection equipment.

In the detection process, the detection mode and the fixed direction of the detection module are determined, and the conversion relation between the device built-in coordinate system and the device reference system is also determined, so that the device reference system in which the detection data after conversion is located is also determined. Under the condition that the fixed direction is accurate, on the basis of the detection data after the conversion strategy conversion, correspondingly establishing a device reference system based on a reference direction, wherein the reference direction is a predefined ideal direction; and in the case that the fixed direction has a deviation, the detection data converted based on the conversion strategy corresponds to the device reference system established based on the measurement direction, which is different from the device reference system established based on the reference direction, wherein the measurement direction is the actual direction determined according to the detection mode, the fixed direction and the conversion relation of the detection module, when the measurement direction has a certain angle with the reference direction, the device reference system established based on the reference direction also has a certain angle with the corresponding coordinate axis of the device reference system established based on the measurement direction, obviously, the actual position of the feature point is determined by taking the detection data corresponding to the device reference system established based on the measurement direction as the detection data corresponding to the device reference system established based on the reference direction, and the actual position is inaccurate. Therefore, in the embodiment of the application, the included angle to be detected between the reference direction and the measurement direction can be determined, and then the included angle to be detected can be utilized to realize the conversion of data in the equipment reference system established based on the measurement direction and the equipment reference system established based on the reference direction, so that the detection accuracy of the detection equipment is improved.

Specifically, the device reference system may be a rectangular coordinate system, may also be another coordinate system, may be a two-dimensional rectangular coordinate system, and may also be a three-dimensional rectangular coordinate system, and the device reference system is determined by using the reference direction or the measurement direction, and the reference direction or the measurement direction may be used as a coordinate axis to establish the coordinate system, and a direction forming a certain included angle with the reference direction or the measurement direction may also be used as a coordinate axis to establish the coordinate system.

The following description will be made from two scenes, a scene in which the detection module acquires the features of the feature points in the plane of the object to be measured (i.e., a two-dimensional detection scene), and a scene in which the detection module acquires the distances between the feature points and the detection module (i.e., a one-dimensional detection scene). In a two-dimensional detection scene, the object to be detected may have a rotation plane, the rotation plane is generally parallel to the surface of the object to be detected, for example, the circle center of the wafer is used as the rotation center, the rotation plane is the surface of the wafer, and the detection module may move on a plane parallel to the rotation plane of the object to be detected, so as to detect the feature points on the object to be detected, and obtain the positions of the feature points on the object to be detected on the surface of the object to be detected; in a one-dimensional detection scene, the object to be detected and the detection module can move randomly in a three-dimensional scene, and the detection module can detect the distance between the detection module and the feature point on the object to be detected, so that the distance of the feature point outside the surface of the object to be detected is determined according to the position of the detection module. It can be understood that the optical axis direction of the detection module is always kept unchanged during the translation of the detection module.

In a two-dimensional detection scenario, the device reference frame, the reference direction, and the measurement direction may be located in the same plane, which may be referred to as a measurement plane, and then the predicted included angle between the reference direction and the measurement direction is also located in the measurement plane.

Specifically, in a two-dimensional detection scene, the detection module may be a camera, the detection of the feature points may be implemented by shooting the feature points with the camera, and the camera may be an array of an image sensor, for example, a white light confocal device. The detection result of the detection module on the feature point can be the coordinate of the feature point in a built-in coordinate system of the equipment, so that the position relation between the feature point and the detection module is embodied.

The image sensor can form a linear array, the detection module is a linear array camera, and the coordinate axis of the equipment built-in coordinate system can be along the array extension direction of the linear array camera, so that the actual position of the characteristic point can be determined according to the position of the characteristic point in the equipment built-in coordinate system and the position of the detection module; or, the image sensor may also form an array plane, and the detection module may also be an area-array camera, and then two coordinate axes of the device built-in coordinate system may be along two extending directions of the array of the area-array camera, so that the actual positions of the feature points may be determined according to the positions of the feature points in the device built-in coordinate system and the positions of the detection module.

Specifically, in a one-dimensional detection scenario, the detection module may be a distance measurement device, and is configured to measure a characteristic displacement of the characteristic point and a first reference point of the distance measurement device along a measurement direction. The equipment reference system can comprise a coordinate axis direction, the coordinate axis direction can be along the measuring direction and can also form a certain included angle with the measuring direction, the measuring direction can be parallel to the optical axis direction of the distance measuring equipment and can also form a certain included angle with the optical axis direction, and the equipment built-in coordinate system of the distance measuring equipment can be vertical to the optical axis direction. The optical axis of the detection module refers to the optical axis direction of the lens of the detection module. After the distance between the feature point and the ranging device along the measuring direction is obtained by using the ranging device, the actual position of the feature point can be determined according to the relative position of the ranging device and the device reference system and the distance detected by the ranging device.

The distance measuring module can be one or a combination of a spectrum confocal module, a white light interference module, a differential phase shift interference module and a laser distance measuring module. The spectrum confocal module comprises: the wide-spectrum light source is used for emitting detection light with different wavelengths; the dispersion objective lens is used for converging the detection light with different wavelengths to different positions of the optical axis of the dispersion objective lens; and the detection device is used for collecting the detection light with different wavelengths returned by the object to be detected and acquiring the distance information of the object to be detected in different directions along the optical axis of the dispersion objective lens according to the light intensity of the detection light.

For convenience of understanding, specific implementation manners of the detection method and the detection device of the detection device in the embodiments of the present application are described in detail below by embodiments with reference to the accompanying drawings.

Referring to fig. 1, a flowchart of a detection method of a detection device provided in an embodiment of the present application is shown, where the method may include the following steps:

s101, when the detection module and the first feature point have a first relative position, first detection is carried out on the first feature point by using detection equipment, and first position information of the first feature point in an equipment reference system is obtained.

In the embodiment of the application, the detection device can detect the feature points, and when the detection device detects the feature points, the detection module and the feature points can have relative positions. Specifically, when the detection module and the first feature point have a first relative position, the detection device may be used to perform first detection on the first feature point, and at this time, the first feature point is within the field of view of the detection module, and a detection result of the first feature point may be obtained after the first detection.

The detection device may include a mobile device and a detection module, the mobile device may move the detection module, and the detection module may detect the feature point. The first feature point may be located on the object to be measured, the first feature point may be a center point of a circular hole, a vertex of a cone, or a spherical center of a sphere, for example, the object to be measured may be a wafer, and the first feature point may be a feature point on the wafer, for example, a center point of a circular hole on the wafer. The first feature point may be a plurality of first feature points, and when the detection module and the first feature point have the first relative position, the plurality of first feature points are all located within the detection range of the detection module.

For the detection device, the reference direction is a direction corresponding to preset ideal detection data, and the measurement direction is a direction corresponding to actual data, and the position information detected by the detection device is set to correspond to a device reference frame determined based on the reference direction. When the reference direction and the measuring direction of the detection device coincide, the detection device is accurately fixed, the first position information of the first feature point in the device reference system determined based on the measuring direction of the detection device is accurate, when the detection device has a fixed error, the first position information of the first feature point in the device reference system determined based on the measuring direction is inaccurate, and the first position information is related to the fixed error of the detection device. In the following description, the device reference frame refers to a device reference frame determined based on a measurement direction, unless otherwise specified.

The detection module and the object to be detected are movable, the first relative position of the detection module and the object to be detected can be a result of moving the detection module and the object to be detected, the movement is generalized movement, and the movement displacement can be zero, so that the detection module and the object to be detected are considered to be in an initial state. It should be noted that the object to be detected is movable, which is to better place the first feature point in the object to be detected within the detection range of the detection module, if the object to be detected moves before detection, the position of the detected first feature point is the position of the object to be detected after movement, the position of the first feature point before movement can be obtained according to the movement data of the object to be detected and the position of the detected first feature point, for example, when the object to be detected is a wafer, the rotation center of the wafer is the center of a circle, after the detection module detects the first feature point on the wafer, in order to accurately analyze the position of the first feature point, the detected result needs to be corresponded to a certain fixed plane of the wafer. The first relative position of the detection module and the first feature point may be represented by a first distance vector between the detection module and the first feature point.

Since the detection module is mobile and the position of the detection module itself relative to the reference frame of the device is variable, the first position information of the first feature point in the reference frame of the device can be determined from the real-time position information of the detection module relative to the reference frame of the device and the real-time position information of the first feature point relative to the detection module. Specifically, the detection module may have a first reference point, where the first reference point may be any one feature point of the detection module and is used to represent a position of the detection module, where the position of the first reference point relative to the device reference system may represent a position of the detection module relative to the device reference system, the device reference system may have a second reference point, where the second reference point is a point that is not fixed relative to the device reference system, and has a fixed position in the device reference system, and the second reference point may be a point on the object to be measured or a point outside the object to be measured. At this time, the first distance vector between the detection module and the first feature point may be represented by the first distance vector between the first reference point and the first feature point of the detection module.

S102, when the detection module and the second feature point have a second relative position, second detection is carried out on the second feature point by using the detection equipment, and second position information of the second feature point in the equipment reference system is obtained.

In this embodiment of the application, when the detection module and the second feature point have the second relative position, the second feature point is in the detection range of the detection module, the detection device may be used to perform the second detection on the second feature point, and obtain the second position information of the second feature point in the device reference system, where the device reference system is determined based on the measurement direction of the detection device.

The second feature point may be located on the object to be measured, the second feature point may be a center point of a circular hole, a vertex of a cone, or a spherical center of a sphere, for example, the object to be measured may be a wafer, the second feature point may be a feature point on the wafer, for example, a center point of a circular hole on the wafer, and the second feature point and the first feature point may belong to the same type of feature point or may belong to different types of feature points. The second feature point may be multiple, and when the detection device and the second feature point have a second relative position, the multiple second feature points are all located within the detection range of the detection module.

In the case of a detection device whose detected position information is set to correspond to a device reference frame determined based on the reference direction, when the reference direction and the measurement direction of the detection device coincide, it is stated that the detection device is fixed accurately, the first position information of the first feature point in the device reference frame determined based on the measurement direction of the detection device is accurate, and the second position information of the second feature point in the device reference frame determined based on the measurement direction of the detection device is also accurate, so that the distances of the first feature point and the second feature point in the reference direction calculated based on the first position information and the second position information are equal to the first preset difference d 0. And when the detection equipment has a fixed error, the detection equipment is fixed and has an error, a certain included angle exists between the reference direction and the measurement direction of the detection equipment, the obtained first position information and second position information are inaccurate based on the detection characteristics and the detection direction of the detection equipment, the distance between the first characteristic point and the second characteristic point along the reference direction determined according to the first position information and the second position information is not equal to the first preset difference d0 any more but has a certain distance error, and the calculated distance error is related to the fixed error of the detection equipment.

The second relative position of the detection module and the second feature point may be represented by a second distance vector between the detection module and the second feature point. In order to embody the fixed error of the detection device by using the first position information and the second position information, the first distance vector and the second distance vector may have a first preset difference in the reference direction, and the first preset difference is a non-zero value, that is, the first relative position and the second relative position are not completely consistent in the reference direction, so that the distance between the first feature point and the second feature point in the reference direction, which is finally calculated, is no longer equal to the first preset difference, and the fixed error of the detection device can be embodied.

S103, acquiring an included angle to be measured between the reference direction and the measuring direction according to the first preset difference, the first position information and the second position information.

When the detection equipment has a fixed error, a certain included angle exists between the reference direction and the measurement direction of the detection equipment, the obtained first position information and the second position information are inaccurate based on the detection characteristics and the detection direction of the detection equipment, the distance between the first characteristic point and the second characteristic point along the reference direction determined according to the first position information and the second position information is no longer equal to a first preset difference value but has a certain distance error, and the calculated distance error is related to the fixed error of the detection equipment, so that the included angle between the reference direction and the measurement direction can be determined according to the first position information, the second position information, the distance between the first characteristic point and the second characteristic point along the reference direction is no longer equal to the first preset difference value.

After first position information of the first characteristic point along the measuring direction and second position information of the second characteristic point along the second measuring direction are obtained through detection, the relative positions of the first characteristic point and the second characteristic point in the measuring direction are determined, and the first preset difference can represent the relative positions of the first characteristic point and the second characteristic point in the reference direction, so that the included angle to be measured between the reference direction and the measuring direction can be obtained according to the first preset difference, the first position information and the second position information.

After the relationship equation between the first position information, the second position information, the included angle to be measured and the first preset difference value is established, the included angle to be measured can be obtained according to the relationship equation. Specifically, an initial value may be set for the angle to be measured in the relationship equation, and the established relationship equation is subjected to function fitting through the first position information, the second position information, and the first preset difference value, so as to optimize the initial value, thereby obtaining the included angle to be measured. The method of function fitting may include least squares method or linear regression, etc.

In order to improve the accuracy of the calculated included angle to be measured, the plurality of first feature points and the plurality of second feature points can be detected to obtain a plurality of first position information, a plurality of second position information and a plurality of first preset difference values, so that a plurality of relation equations are established according to the obtained plurality of first position information, the plurality of second position information and the plurality of first preset difference values, and the plurality of relation equations are subjected to function fitting to obtain the accurate included angle to be measured.

After the included angle to be measured between the reference direction and the measurement direction is obtained, when the detection module and the point to be measured have a third relative position, the detection device is used for carrying out third detection on the point to be measured, third position information of the point to be measured in the device reference system along the measurement direction is obtained, and the third position information is adjusted based on the included angle to be measured between the reference direction and the measurement direction, so that fourth position information of the point to be measured in the device reference system is obtained.

The embodiment of the application provides a detection method of detection equipment, the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection equipment comprises a detection module, an object to be detected comprises a first characteristic point and a second characteristic point, when the detection module and the first characteristic point have a first relative position, the first characteristic point can be subjected to first detection by the detection equipment, first position information of the first characteristic point in the equipment reference system is obtained, a first distance vector exists between the detection module and the first characteristic point, when the detection module and the second characteristic point have a second relative position, the second characteristic point can be subjected to second detection by the detection equipment, second position information of the second characteristic point in the equipment reference system is obtained, and a second distance vector exists between the detection module and the second characteristic point, the first distance vector and the second distance vector have a first predetermined difference in the reference direction, the first predetermined difference being a non-zero value.

In the above embodiments, the detection method may be applied to a one-dimensional detection scenario and may also be applied to a two-dimensional detection scenario, and the following description will be made for two scenarios respectively.

In the one-dimensional detection scenario:

in a one-dimensional detection scene, a reference direction and a measurement direction may be located in the same plane, an equipment reference system established based on the reference direction or the measurement direction may also be located in the plane, the equipment reference system may have one coordinate axis, and the coordinate axis directions of the reference direction and the equipment reference system may have a reference angle.

Therefore, in S101, the first location information of the first feature point in the reference frame of the device may include: the first reference point is displaced from the second reference point at the first relative position by a first reference in the reference direction, and the first feature point is displaced from the first reference point by a first feature in the measurement direction. The detection device can determine the projection of the inherent distance in the measurement direction according to the inherent distance and the preset included angle, and the projection is used as the characteristic distance between the measurement characteristic point and the first reference point in the measurement direction. The measured feature point may be a first feature point, and the obtained feature distance is a first feature displacement of the first feature point and the first reference point along the measurement direction. In specific implementation, the preset included angle may be zero degree or an acute angle.

Specifically, the first reference displacement may be zero or may not be zero, where the first reference point may be an array starting point of the detection module, the second reference point may be a point in a reference plane parallel to the surface of the object to be detected, and the first reference displacement may be zero, that is, the first reference point may be set in the reference plane at the first relative position.

Therefore, the first feature point is first detected by the detection device, the first position information of the first feature point in the device reference system is acquired, specifically, the object to be detected and the detection module are relatively moved by the moving device by a first vector, the detection module and the first feature point have a first relative position, the first reference displacement of the first reference point and the second reference point along the reference direction is acquired according to the first vector, and when the detection module and the first feature point have the first relative position, the first feature point is detected by the detection module, and the first feature displacement of the first feature point and the first reference point along the measurement direction is acquired.

The step of moving the object to be detected and the detection module relatively through the moving device comprises the following steps: the detection module is moved, the object to be detected can be moved through the moving device, and the detection module and the object to be detected can be moved to obtain the detection result.

Referring to fig. 4 and 5, schematic diagrams of detection in a one-dimensional detection scenario in the embodiment of the present application are shown, where the detection module is a distance measurement device, the reference direction may be a vertical direction, the measurement direction may be along an optical axis direction of the detection module, a device built-in coordinate system may be perpendicular to the optical axis direction of the detection module, and a device reference system may be along the measurement direction. The second reference point may be disposed above the detection module, and at the first relative position, a first reference displacement of the first reference point and the second reference point along the reference direction may be denoted as h1, for representing a vertical distance between the second reference point and the detection module, and in fig. 5, h1 may be 0. The detection module can be used for detecting the first characteristic point P1 to obtain the inherent distance between the detection module and the first characteristic point along the optical axis direction of the detection module, the first characteristic displacement is the projection of the inherent distance between the detection module and the first characteristic point along the optical axis direction of the detection module in the measurement direction and is recorded as Z1, and the first characteristic displacement is the inherent distance itself because the included angle between the optical axis direction of the detection module and the measurement direction is zero.

In S102, the second location information of the first feature point in the reference frame of the device may include: a second reference displacement of the first reference point from the second reference point in the reference direction and a second feature displacement of the second feature point from the first reference point in the measurement direction at the second relative position. The detection module can be used for detecting the inherent distance between the measurement feature point and the first reference point along the optical axis direction of the detection module, and the detection device can determine the projection of the inherent distance in the measurement direction according to the inherent distance and the preset included angle, and the projection is used as the feature distance between the measurement feature point and the first reference point along the measurement direction. The measured feature point may be a second feature point, and the obtained feature distance is a second feature displacement of the second feature point from the first reference point along the measurement direction.

Specifically, the second reference displacement may be zero or not, where the first reference point may be an array starting point of the detection module, the second reference point may be a point in the reference plane parallel to the surface of the object to be detected, and the second reference displacement may be zero, that is, the first reference point may be set in the reference plane at the second relative position. One or both of the first reference displacement and the second reference displacement may be zero.

The second feature point is subjected to second detection by using the detection device, and second position information of the second feature point in the device reference system is acquired, which may specifically be that after the first detection, the object to be detected and the detection module are relatively moved by the moving device by a second vector, so that the detection module and the first feature point have a second relative position, a second reference displacement of the first reference point and the second reference point along the reference direction is acquired according to the second vector, and when the detection module and the first feature point have the second relative position, the second feature point is detected by the detection module, and a second feature displacement of the second feature point and the first reference point along the measurement direction is acquired.

Specifically, when the first preset difference value is a nonzero value, the distance between the first feature point and the second feature point along the reference direction is greater than zero, and the second vector is perpendicular to the reference direction, or the distance between the first feature point and the second feature point along the reference direction is zero, and the second vector has a nonzero included angle with the reference direction. For example, when the reference direction is a vertical direction, the first feature point and the second feature point may be located at different heights, and the detection module and/or the object to be measured may translate along the horizontal plane, as shown in fig. 5, or the first feature point and the second feature point may be located at the same height, and the second vector may have a certain component in the reference direction, that is, the detection module and/or the object to be measured may translate along a direction not parallel to the horizontal plane, as shown in fig. 4.

Referring to fig. 4 and 5, a second datum point may be provided above the detection device, and at a second relative position, the second datum of the first datum point and the second datum point in the datum direction is unique, which may be denoted as h2, for characterizing the vertical distance of the second datum point from the detection module, and in fig. 5, h2 may be 0. The detection module can be used for detecting the second characteristic point P2 to obtain the inherent distance between the detection module and the second characteristic point along the optical axis direction of the detection module, the first characteristic displacement is the projection of the inherent distance between the detection module and the first characteristic point along the optical axis direction of the detection module in the measurement direction and is recorded as Z2, and the second characteristic displacement is the inherent distance itself because the included angle between the optical axis direction of the detection module and the measurement direction is zero.

In S103, obtaining the included angle to be measured between the reference direction and the measurement direction according to the first preset difference, the first position information, and the second position information may specifically be: acquiring a first displacement expression of the first characteristic point and the second reference point in the reference direction according to the first position information and the included angle to be measured, acquiring a second displacement expression of the first characteristic point and the second reference point in the reference direction according to the second position information and the included angle to be measured, establishing a relational equation according to the first displacement expression, the second displacement expression and a first preset difference value, and acquiring the included angle to be measured according to the established relational equation.

The first displacement expression of the first characteristic point and the second characteristic point in the reference direction is obtained according to the first position information and the included angle to be measured, and specifically, a first relation representation of the first characteristic displacement in the reference direction is obtained according to the first characteristic displacement and the included angle to be measured, and the first displacement expression is obtained according to a vector sum of the first reference displacement and the first relation representation.

When the detection module is distance measuring equipment, a preset included angle theta 0 is formed between the measuring direction and the optical axis of the detection module, the preset included angle theta 0 can be 0 or other acute angles, and the measuring direction, the optical axis direction of the detection module and the reference direction are in the same plane.

According to the first characteristic displacement and the included angle to be measured, obtaining a first relation representation of the first characteristic displacement in the reference direction, which may specifically be: and obtaining the back projection of the first characteristic displacement in the optical axis direction according to the preset angle to obtain a first inherent distance, and obtaining the projection of the first inherent distance in the reference direction according to the preset angle and the angle to be measured to obtain a first relation expression.

Referring to fig. 4 and 5, a first intrinsic distance between the first feature point detected by the detection device and the first reference point along the optical axis direction of the detection module is L1, a preset included angle between the measurement direction and the optical axis direction of the detection module is θ 0, a projection of the first intrinsic distance in the measurement direction may be taken as a first feature distance Z1 between the first feature point and the first reference point along the measurement direction, which is L1 × cos (θ 0), and then, after inverse projection of the first feature displacement in the optical axis direction, the obtained first intrinsic distance L1 is Z1/cos (θ 0). Then, an included angle between the measurement direction and the reference direction is an included angle θ x to be measured, an included angle between the optical axis direction of the detection module and the reference direction may be represented as (θ x + θ 0)), and then the first relationship may be represented as L1 ═ cos (θ x + θ 0) ═ Z1/cos (θ 0) × cos (θ x + θ 0). The first reference displacement is represented by h1, and the first displacement expression may be represented as Z1/cos (θ 0) × cos (θ x + θ 0) + h 1. Assuming that the measurement direction is parallel to the optical axis direction of the detection module, it can be determined that the preset included angle θ 0 is 0 °, and the first displacement expression can be expressed as Z1 × cos (θ x) + h 1.

The second displacement expression of the second characteristic point and the second reference point in the reference direction is obtained according to the second position information and the included angle to be measured, and specifically, a second relation representation of the second characteristic displacement in the reference direction is obtained according to the second characteristic displacement and the included angle to be measured, and the second displacement expression is obtained according to a vector sum of the second reference displacement and the second relation representation.

Obtaining a second relation representation of the second characteristic displacement in the reference direction according to the second characteristic displacement and the included angle to be measured, which may specifically be: and obtaining the back projection of the second characteristic displacement in the optical axis direction according to the preset angle to obtain a second inherent distance, and obtaining the projection of the second inherent distance in the reference direction according to the preset angle and the angle to be measured to obtain a second relation expression.

Referring to fig. 4 and 5, a second intrinsic distance between the second feature point detected by the detection module and the first reference point along the optical axis direction of the detection module is L2, a preset included angle between the measurement direction and the optical axis direction of the detection module is θ 0, a projection of the second intrinsic distance in the measurement direction may be taken as a second feature distance Z2 between the second feature point and the first reference point along the measurement direction, which is L2 × cos (θ 0), and after inverse projection of the second feature displacement in the optical axis direction, the obtained second intrinsic distance L2 is Z2/cos (θ 0). Then, an included angle between the measurement direction and the reference direction is an included angle θ x to be measured, an included angle between the optical axis direction of the detection module and the reference direction may be represented as (θ x + θ 0)), and a second relationship may be represented as L2 ═ cos (θ x + θ 0) ═ Z2/cos (θ 0) × cos (θ x + θ 0). The second reference displacement is represented by h2, and the second displacement expression may be represented as Z2/cos (θ 0) × cos (θ x + θ 0) + h 2. Assuming that the measuring direction is parallel to the optical axis direction of the detecting module, the preset included angle θ 0 may be determined to be 0 °, and the second displacement expression may be represented as Z2 × cos (θ x) + h 2.

Then, the first displacement expression, the second displacement expression and the first preset difference value establish a relational equation. Specifically, the difference between the first position expression and the second displacement expression is equal to a first preset difference.

For example, referring to fig. 4, the first displacement expression may be represented as Z1/cos (θ 0) × cos (θ x + θ 0) + h1, the second displacement expression may be represented as Z2/cos (θ 0) × cos (θ x + θ 0) + h2, and the first preset difference value in fig. 4 is 0, the relationship equation obtained according to the vector difference between the first displacement expression and the second displacement expression and the first preset difference value may be: [ Z1/cos (θ 0) × cos (θ x + θ 0) + h1] - [ Z2/cos (θ 0) × cos (θ x + θ 0) + h2] ═ 0. Wherein, if θ 0 is zero, the relation equation may be: [ Z1 × cos (θ x) + h1] - [ Z2 × cos (θ x) + h2] ═ 0.

For example, referring to fig. 5, the first displacement expression may be represented as Z1/cos (θ 0) × cos (θ x + θ 0) + h1, the second displacement expression may be represented as Z2/cos (θ 0) × cos (θ x + θ 0) + h2, and the first preset difference value in fig. 5 is h0, the relationship equation obtained according to the vector difference between the first displacement expression and the second displacement expression and the first preset difference value may be: [ Z1/cos (θ 0) × cos (θ x + θ 0) + h1] - [ Z2/cos (θ 0) × cos (θ x + θ 0) + h2] ═ h 0. Wherein, if θ 0 is zero, the relation equation may be: [ Z1 × cos (θ x) + h1] - [ Z2 × cos (θ x) + h2] ═ h 0.

Specifically, taking the distance measuring device shown in fig. 4 as an example, the third position information, which can be obtained at the third relative position, of the point P3 to be measured in the device reference system along the measuring direction can be represented by a third characteristic distance Z3, a preset included angle θ 0 is formed between the measuring direction and the optical axis of the detection module, the third inherent distance of the point P3 to be measured at the third relative position along the optical axis of the detection module is Z2/cos (θ 0), when θ 0 is obtained, the third position information can be adjusted by using θ 0, and the adjusted fourth position information is represented by Z2/cos (θ 0)' cos (θ x + θ 0).

In a two-dimensional detection scenario:

in S101, the first relative position is used to represent a relative position relationship between the detection module and the first feature point, and may be represented by a first distance vector between the detection module and the first feature point, where the detection module and the first feature point are located in two rotation planes parallel to the measurement plane, the first distance vector and the rotation plane form a certain angle, the first distance vector may be projected into the measurement plane, and a projection of the first distance vector in the measurement plane may be recorded as a third distance vector.

The reference direction and the measurement direction can be located in the same plane, the equipment reference system established based on the reference direction or the measurement direction can also be located in the plane, the plane can be called as a measurement plane, the equipment reference system established based on the measurement direction can have coordinate axes, the measurement direction can be the coordinate axis direction, and can also be other directions except the coordinate axes, and when the measurement direction is not the coordinate axis direction, the included angle between the measurement direction and the coordinate axes is fixed. . Generally, the reference direction is preset and known, the measurement direction is uncertain, and the coordinate axis direction of the equipment reference system is uncertain, wherein the measurement direction needs to be calculated according to actual data.

Specifically, the first position information of the first feature point in the reference frame of the apparatus may include a first fiducial displacement of the first fiducial point and the second fiducial point in the fiducial direction at the first relative position, and a first feature displacement between the first feature point and the first fiducial point.

The first reference displacement represents real-time position information of the detection module relative to the equipment reference system when the first reference displacement represents the first relative position, the first characteristic displacement represents real-time position information of the first characteristic point relative to the detection module when the first characteristic displacement represents the first relative position, and the first characteristic displacement are combined to determine first position information of the first characteristic point in the equipment reference system when the first relative position is determined.

The first relative position of the object to be detected and the detection module can be obtained by moving the object to be detected and/or the detection module through the moving device, the movement can include rotation, and can also include translation along a rotation radius of the detection module, wherein the detection module and the object to be detected rotate relatively around a rotation axis, and the rotation axis is perpendicular to a rotation plane of the object to be detected, for example, the detection module can be arranged above the object to be detected. In addition, the measurement plane of the reference system of the device may be parallel to the rotation plane of the object to be measured, or may coincide with the rotation plane of the object to be measured, and the rotation axis may also be perpendicular to the measurement plane, so that the reference direction is perpendicular to the rotation axis, and the measurement direction is perpendicular to the rotation axis.

The detection module is provided with a first datum line, the object to be detected is provided with a second datum line, the first datum line is perpendicular to the rotating shaft, and the second datum line is perpendicular to the rotating shaft; the first datum line and the second datum line can be intersected with the rotating shaft, the first datum line rotates along with the detection module, the second datum line rotates along with the object to be detected, and the rotation angle of the detection module and the object to be detected can be represented by the rotation of the first datum line and the rotation angle of the second datum line. For example, the first reference line may be a connection line between any point on the detection module and a rotation center of the detection module, such as a connection line between the first reference point and the rotation center, and the second reference line may be a connection line between any point on the object to be measured and the rotation center of the object to be measured, for example, when the object to be measured is a wafer, the second reference line may be a connection line between a point at the edge of the wafer and the rotation center, that is, a radius direction of the wafer, and the radius direction may pass through a mark point of the wafer.

In this scenario, the step of acquiring the first reference displacement may include: the object to be detected and the detection module are relatively rotated through the moving device, so that the detection module and the first characteristic point have a first relative position, and a first reference displacement is obtained. The first reference displacement may be obtained through movement data of the moving device, and specifically, a first relative angle between the first reference line and the second reference line at the first relative position and a first axial relative position between the first reference point and the rotation center of the object at the first relative position along the first reference line may be obtained, and the first axial relative displacement is projected according to the first relative angle to obtain the first reference displacement. The first relative angle represents a relative rotation angle between the detection module and the object to be detected, the first relative angle may be zero or not, the first axial relative position represents a distance between the first reference point and the rotation center, that is, a rotation radius of the first reference point of the detection module, the rotation radius of the first reference point may be kept consistent during rotation of the detection module, and if the detection module has translation in the rotation radius direction, the rotation radius of the first reference point changes, and a real-time rotation radius is acquired at the first relative position.

In this scenario, the step of obtaining the first feature displacement may include: when the detection module and the first characteristic point have a first relative position, the detection module detects the first characteristic point to obtain first characteristic displacement. The detection module may have a device-built coordinate system that may move with movement of the detection module, the first reference point may be an origin of the device-built coordinate system of the detection module, and the first feature displacement may include a first coordinate of the first feature point in the device-built coordinate system. The detection module can be a linear array camera or an area array camera, the first characteristic point is shot by the detection module to obtain a first image, and a first coordinate of the first characteristic point in a built-in coordinate system of the equipment can be determined according to the first image. Specifically, the first coordinate may be represented by a distance between the first feature point and a coordinate origin of the built-in coordinate system of the device along a coordinate axis direction in the built-in coordinate system of the device, or may be represented by a distance between the first feature point and the coordinate origin in the built-in coordinate system of the device, and an included angle between a connection line of the first feature point and the coordinate origin in the built-in coordinate system of the device and the coordinate axis direction.

Referring to fig. 2, a schematic diagram of detection in a two-dimensional detection scenario in an embodiment of the present application is shown, where a detection module is a line camera, an array extending direction of the line camera is an A1B1 direction, and A1 and B1 are array end points of the line camera, and a built-in coordinate system of the apparatus is along the array extending direction A1B1 of the line camera, and A1 is taken as a coordinate origin, it can be understood that fig. 2 is only a specific example, and does not constitute a limitation on a detection manner of the line camera in the present application.

The detecting module can rotate around a point O, the current position of the detecting module and the first characteristic point P1 can be used as a first relative position, the reference direction is vertical, the first reference point of the detecting module is a point a1, the detecting module rotates along with the rotation of the detecting module, the point O is a second reference point of the object to be detected and is the rotation center of the object to be detected, the first reference line of the detecting module can be a connecting line of the first reference point and the rotation center, the second reference line of the object to be detected can be coincident with the first reference line, the first reference line and the second reference line can be along the vertical direction, when the detecting module and the object to be detected rotate, the first reference line and the second reference line also rotate, the first reference line and the second reference line can be represented by OA1 when the first reference line and the second reference line are in the vertical direction, the rotation radius of the first reference point a1 is OA1, in actual operation, the array extending direction of the detecting module is usually set to be, in this way, the position of the detected feature point can be directly determined according to the rotation angle and the detection result of the detection module, however, in the embodiment of the present application, the extending direction of the array of the detection module has an angle θ 2(θ 2 can be represented by positive and negative values) with the rotation radius when fixed, which causes the measurement direction of the detection device to deviate from the reference direction by the angle θ 2, and when the reference direction is along OA1, the measurement direction is along A1B 1. When the detection module and the first feature point P1 are at the first relative position, the first relative angle between the first reference line and the second reference line is zero, and the first axial relative position of the first reference point a1 and the rotation center O of the object along the first reference line can be represented by OA1, that is, the first reference displacement can be obtained by using the first relative angle of 0 ° and the first axial relative position OA1, and specifically, the first reference displacement can be represented by OA1 cos0 °.

In the in-device coordinate system of the line camera, the distance between the first feature point P1 and the coordinate origin A1 of the in-device coordinate system along the coordinate axis direction is A1P1, the first coordinate is A1P1, and the first feature displacement can be represented by A1P 1.

Referring to fig. 3, another schematic detection diagram provided for the embodiment of the present application is shown, where the detection module is an area-array camera, the array of the area-array camera may be represented as A1B1E1D1, the array extension directions of the area-array camera are A1B1 and A1D1, the respective end points are A1, B1, C1, and D1, two coordinate axes of the device-built coordinate system may respectively follow two extension directions of the array of the area-array camera, specifically, the first extension direction A1B1 may be a y1 axis, the second extension direction A1D1 may be an x1 axis, and A1 may be an origin point to form the device-built coordinate system, and it is understood that fig. 3 is only one specific example and does not constitute a limitation on the detection mode of the area-array camera in the present application.

The detection module can rotate around a point O, the current position of the detection module and the first characteristic point P1 can be used as a first relative position, the reference direction is vertical, the first reference point of the detection module is the point A1, the detection module rotates along with the rotation of the detection module, the point O is used as a second reference point of the object to be detected and is the rotation center of the object to be detected, the first reference line of the detection module and the second reference line of the object to be detected can be along the vertical direction, when the detection module and the object to be detected rotate, the first reference line and the second reference line also rotate, the first reference line and the second reference line can be represented by OA1 when the first reference line A1 has the rotation radius OA1, in actual operation, the array extending direction of the detection module is generally set to be coincident with the rotation radius direction of the detection module, so that the rotation angle of the detected characteristic point can be directly determined according to the detection result of the detection module, however, in the embodiment of the present application, the extending direction of the array of the detection module has an angle θ 2(θ 2 can be represented by positive and negative values) with the rotation radius when fixed, which causes the measuring direction of the detection device to deviate from the reference direction by the angle θ 2, and the measuring direction is along A1B1 when the reference direction is along OA 1. When the detection module and the first feature point P1 are at the first relative position, the first relative angle between the first reference line and the second reference line is zero, and the first axial relative position of the first reference point a1 and the rotation center O of the object along the first reference line can be represented by OA1, that is, the first reference displacement can be obtained by using the first relative angle of 0 ° and the first axial relative position OA1, and specifically, the first reference displacement can be represented by OA1 cos0 °.

In the on-device coordinate system of the area-array camera, the first coordinate of the first feature point P1 in the on-device coordinate system can be represented as (a, b), and the distances between the first feature point P1 and the origin of coordinates a1 of the on-device coordinate system along the coordinate axis directions x1 and y1 are a and b, respectively, in fig. 3, a is 0. Further, the distance A1P1 between P1 and the origin of coordinates A1 is

The angle between A1P1 and the y1 axis is denoted by α 1(α 1 can be oriented by positive and negative values),

in fig. 3, α 1 is zero.

In S102, the second relative position between the detection module and the second feature point may be represented by a second distance vector between the detection module and the second feature point, and a projection of the second distance vector in the measurement plane may be denoted as a third distance vector. In order to embody the fixed error of the detection device by using the first position information and the second position information, the first distance vector and the second distance vector may have a first preset difference in the reference direction, and the first preset difference is a non-zero value, that is, the first relative position and the second relative position are not completely consistent in the reference direction, so that the distance between the finally calculated first feature point and the second feature point in the reference direction is not equal to the first preset difference, and the fixed error of the detection device can be embodied.

When determining a first preset difference value of the first distance vector and the second distance vector in the reference direction, a projection of the first distance vector in the measurement plane may be recorded as a third distance vector, a projection of the second distance vector in the measurement plane may be recorded as a third distance vector, a second preset difference value is provided between the third distance vector and the fourth distance vector, and a component of the second preset difference value in the reference direction is the first preset difference value.

Specifically, when the first preset difference is a non-zero value, the first feature point and the second feature point may be the same point, and the detection module and the object to be detected have relative rotation, or the detection module and the object to be detected do not have relative rotation, and the projection positions of the first feature point and the second feature point in the reference direction are different, or the detection module and the object to be detected have relative rotation, and the projection positions of the first feature point and the second feature point in the reference direction are different, as shown in fig. 2 and fig. 3.

In particular, the second position information of the second feature point in the reference system of the device may include a second fiducial displacement in the fiducial direction between the first fiducial point and the second fiducial point at the second relative position, and a second feature displacement between the second feature point and the first fiducial point.

The second reference displacement represents real-time position information of the detection module relative to the equipment reference system when the second reference displacement represents the second relative position, the second characteristic displacement represents real-time position information of the second characteristic point relative to the detection module when the second characteristic displacement represents the second relative position, and the second position information of the first characteristic point in the equipment reference system when the second characteristic displacement represents the second relative position can be determined by combining the two.

The step of acquiring the second reference displacement may comprise: after the first detection, the object to be detected and the detection module are relatively rotated through the moving device, so that the detection module and the second characteristic point have a second relative position, and a second reference displacement is obtained. The second reference displacement may be obtained by moving data of the mobile device, specifically, a second relative angle between the first reference line and the second reference line at the second relative position and a second axial relative position between the first reference point and the rotation center of the object to be measured at the second relative position along the first reference line may be obtained, and the second axial relative displacement is projected according to the second relative angle to obtain the second reference displacement. The second opposite angle represents a relative rotation angle between the detection module and the object to be detected, the second opposite angle may be zero or not, and at least one of the first opposite angle and the second opposite angle may be zero, so as to facilitate subsequent calculation. The second axial relative position represents the distance between the first reference point and the rotation center, namely the rotation radius of the first reference point of the detection module.

The step of obtaining the second characteristic displacement may comprise: and when the detection module and the second characteristic point have a second relative position, detecting the second characteristic point through the detection module to obtain second characteristic displacement. The first reference point may be an origin of a device-built coordinate system of the detection module, and the second feature displacement may include a second coordinate of the second feature point in the device-built coordinate system. The detection module can be a linear array camera or an area array camera, a second image can be obtained by shooting the second characteristic point through the detection module, and a second coordinate of the second characteristic point in the equipment built-in coordinate system can be determined according to the second image. Specifically, the second coordinate may be represented by a distance between the second feature point and a coordinate origin of the built-in coordinate system of the device along the coordinate axis direction in the built-in coordinate system of the device, or may be represented by a distance between the second feature point and the coordinate origin in the built-in coordinate system of the device, and an included angle between a connection line of the second feature point and the coordinate origin in the built-in coordinate system of the device and the coordinate axis direction.

Referring to fig. 2, the detection module rotates around the point O, the object to be detected does not rotate, and a second relative position between the detection module and the object to be detected is obtained, and the array extending direction of the line camera moves from A1B1 to A2B2, so that the built-in coordinate system of the apparatus moves to A2B2, where A2 is the origin of coordinates. The first reference point moves to a2, the reference line moves to OA2, the vertical direction (OA1) is still the reference direction, the A1B1 direction is still the measurement direction, the point O is the second reference point of the object to be measured, the second opposite angle between the first reference line and the second reference line can be represented by θ 1(θ 1 can represent the direction by a positive value or a negative value), and since the object to be measured does not rotate, the second reference line coincides with the reference direction, the included angle between the first reference line and the reference direction can also be represented by θ 1. When the detection module and the second feature point P2 are at the second relative position, the rotation radius of the first reference point a2 is OA2, and the second axial relative position of the first reference point a2 and the rotation center O of the object along the first reference line can be represented by OA2, that is, the second reference displacement can be obtained by using the second relative angle θ 1 and the second axial relative position OA2, and can be represented by OA2 × cos (θ 1).

In the in-device coordinate system of the line camera, the distance between the second feature point P2 and the coordinate origin A2 of the in-device coordinate system along the coordinate axis direction is A2P2, and the second coordinate is A2P2, and the second feature displacement can be represented by A2P 2.

Referring to fig. 3, after the detection module rotates around the point O, the object to be detected does not rotate, so as to obtain a second relative position between the detection module and the object to be detected, the array extension direction of the area array camera moves to A2B2E2D2, the movement of the coordinate system built in the device is x2A2y2, accordingly, the first extension direction A2B2 serves as a y2 axis, the second extension direction A2D2 serves as an x2 axis, and A2 serves as a coordinate origin. The first reference point moves to a2, the reference line moves to OA2, the vertical direction (OA1) is still the reference direction, the A1B1 direction is still the measurement direction, the point O is the second reference point of the object to be measured, the second opposite angle between the first reference line and the second reference line can be represented by θ 1(θ 1 can represent the direction by a positive value or a negative value), and since the object to be measured does not rotate, the second reference line coincides with the reference direction, the included angle between the first reference line and the reference direction can also be represented by θ 1. When the detection module and the second feature point P2 are at the second relative position, the rotation radius of the first reference point a2 is OA2, and the second axial relative position of the first reference point a2 and the rotation center O of the object along the first reference line can be represented by OA2, that is, the second reference displacement can be obtained by using the second relative angle θ 1 and the second axial relative position OA2, and can be represented by OA2 × cos (θ 1).

In the on-device coordinate system of the area-array camera, the second coordinate of the second feature point P2 in the on-device coordinate system can be represented as (c, d), and the distances between the second feature point P2 and the origin of coordinates a2 of the on-device coordinate system along the coordinate axis directions x2 and y2 are c and d, respectively, and in fig. 3, c is 0. Further, the distance A2P2 between P2 and the origin of coordinates A2 is

The angle of the A2P2 from the y2 axis is denoted by A2 (A2 can be oriented by positive and negative values),

in fig. 3, α 2 is zero.

In S103, obtaining the angle to be measured between the reference direction and the measurement direction according to the first preset difference, the first position information, and the second position information may specifically be to establish a relationship equation between the first position information, the second position information, the angle to be measured, and the first preset difference, and obtain the angle to be measured according to the established relationship equation.

In the embodiment of the application, a relational equation between the first position information, the second position information, the included angle to be measured, and the first preset difference is established, which may specifically be to obtain a first displacement expression of the first feature point and the second reference point in the reference direction according to the first position information and the included angle to be measured, obtain a second displacement expression of the second feature point and the second reference point in the reference direction according to the second position information and the included angle to be measured, establish the relational equation according to the first displacement expression, the second displacement expression, and the first preset difference, and obtain the included angle to be measured according to the established relational equation.

Specifically, a first displacement expression of the first characteristic point and the second reference point in the reference direction is obtained according to the first position information and the included angle to be measured, which may be specifically that a first relational expression of the first characteristic displacement in the reference direction is obtained according to the first characteristic displacement and the angle to be measured, and the first displacement expression is obtained according to a vector sum of the first reference displacement and the first relational expression.

The step of obtaining a first relation representation of the first characteristic displacement in the reference direction according to the first characteristic displacement and the included angle to be measured comprises the following steps: acquiring a vector sum of the first relative angle and an included angle to be measured to obtain a first characteristic angle; and projecting the first characteristic displacement by using the first characteristic angle to obtain a first relation expression.

For example, referring to fig. 2, the first characteristic displacement is A1P1, the angle to be measured is θ 2 (an angle from the reference direction OA1 to the measurement direction A1B 1), and the first relative angle is 0 °, so that an included angle between the first characteristic displacement and the reference direction may be taken as a first projection angle, and may be a vector sum of the first relative angle and the angle to be measured, and may be represented as θ 2+0 ° - θ 2, and a first relationship obtained after the projection processing is represented as A1P1 × cos (θ 2). Referring to fig. 3, the first characteristic displacement is A1P1, an included angle between the first displacement and the y1 axis is α 1, the angle to be measured is θ 2 (an angle from the reference direction OA1 to the measurement direction A1B 1), and the first relative angle is 0 °, so that the included angle between the first characteristic displacement and the reference direction may be a first projection angle, which is a vector sum of the first relative angle and the angle to be measured, and may be represented as θ 2+ α 1+0 ° - θ 2+ α 1, and a first relationship obtained after the projection processing is represented as A1P1 × cos (θ 2+ α 1).

Referring to fig. 2, the first displacement expression may be a vector sum of the first base displacement and the first relational expression, and may be represented as OA1+ A1P1 × cos (θ 2). Referring to fig. 3, the first displacement expression may be a vector sum of the first base displacement and the first relation, and may be represented as OA1+ A1P1 cos (θ 2+ α 1)

Specifically, the step of obtaining a second displacement expression of the second feature point and the second reference point in the reference direction according to the second position information and the included angle to be measured may specifically be obtaining a second relation representation of the second feature displacement in the reference direction according to the second feature displacement and the angle to be measured; and acquiring a second displacement expression according to the second reference displacement and the vector sum represented by the second relation.

The step of obtaining a second relation representation of the second characteristic displacement in the reference direction according to the second characteristic displacement and the included angle to be measured comprises the following steps: obtaining a vector sum of the second opposite angle and an included angle to be measured to obtain a second characteristic angle; and projecting the second characteristic displacement by using the second characteristic angle to obtain a second relation expression.

For example, referring to fig. 2, the second characteristic displacement is A2P2, the angle to be measured is θ 2, and the second opposite angle is θ 1, so that an included angle between the second characteristic displacement and the reference direction may be taken as a second projection angle, which is a vector sum of the second opposite angle and the angle to be measured, and may be represented as θ 2+ θ 1, and a second relationship obtained after the projection processing is represented as A2P2 × cos (θ 1+ θ 2). Referring to fig. 3, the second characteristic displacement is A2P2, an included angle between the second characteristic displacement and the y1 axis is α 2, the angle to be measured is θ 2, and the second relative angle is θ 1, so that the included angle between the second characteristic displacement and the reference direction can be taken as a second projection angle, which is a vector sum of the second relative angle and the angle to be measured, and can be represented as θ 2+ α 2+ θ 1, and a second relationship obtained after the projection processing is represented as A2P2 × (θ 1+ θ 2+ α 2).

Referring to fig. 2, the second displacement expression may be a vector sum of the second reference displacement and the second relational expression, and may be represented as OA2 × (θ 1) + A2P2 × (θ 1+ θ 2). Referring to fig. 3, the second displacement expression may be a vector sum of the second reference displacement and the second relational expression, and may be represented as OA2 × (θ 1) + A2P2 × (θ 1+ θ 2+ α 2).

Then, a relational equation may be obtained from the first displacement expression, the second displacement expression, and the first preset difference value. Specifically, the relational equation may be obtained by using a vector difference between the first displacement expression and the second displacement expression, and a first preset difference value.

Referring to fig. 2, if the first predetermined difference value may be d0, a relationship equation may be obtained according to the vector difference between the first displacement expression and the second displacement expression and the first predetermined difference value, and the relationship equation may be [ OA1+ A1P1 × cos (θ 2) ]]-[OA2*cos(θ1)+A2P2*cos(θ1+θ2)]D 0. Where θ 1 and d0 are known parameters, A1P1 and A2P2 can be obtained from the results of the first and second tests, and OA1 and OA2 are the same parameters and can be set to r, i.e. the relation equation can be converted to [ r + A1P 1] cos (θ 2)]-[r*cos(θ1)+A2P2*cos(θ1+θ2)]＝d₀Then r and θ 2 can be solved simultaneously through multiple sets of feature points.

Referring to fig. 3, if the first predetermined difference may be d0, a relational equation may be obtained according to the vector difference between the first displacement expression and the second displacement expression and the first predetermined difference, and the relational equation may be established as [ OA1+ A1P1 × cos (θ 2+ α 1) ] - [ OA2 × cos (θ 1) + A2P2 × cos (θ 1+ θ 2+ α 2) ], d 0. Where θ 1, α 2, and d0 are known parameters, A1P1 and A2P2 can be obtained from the results of the first detection and the second detection, OA1 and OA2 are the same parameters, and can be set as r, that is, the relational equation can be converted into [ r + A1P1 × (θ 2+ α 1) ] - [ r × (θ 1) + A2P2 × (θ 1+ θ 2+ α 2) ] - [ d0, and then r and θ 2 can be solved simultaneously through multiple sets of feature points.

Specifically, taking the line camera in fig. 2 as an example, third position information of the point to be measured P3 along the measurement direction in the device reference system can be obtained at the third relative position, at this time, the detection module rotates the third phase diagonal θ 3 relative to the reference direction, and the distance between the point to be measured and the origin of the line camera is l_cameraThen the third position information may be calculated by the system based on θ 2 being zero, which may be expressed as (r + l)_camera) Cos (θ 3), and when θ 2 is obtained, the third position information may be adjusted by θ 2, and the fourth adjusted position information may be r cos (θ 3) + l_camera*cos(θ2+θ3)。

Specifically, taking the line camera in fig. 3 as an example, third position information of the point to be measured P3 along the measurement direction in the device reference system can be obtained at the third relative position, at this time, the detection module rotates the third phase diagonal θ 3 relative to the reference direction, and the distance between the point to be measured and the origin of the line camera is l_cameraAnd an included angle between a connecting line between the third feature point and the origin of the linear array camera and the longitudinal axis of the linear array camera is α 3, the third position information may be calculated by the system according to the condition that θ 2 is zero, and may be represented as r × cos (θ 3) + l_cameraCos (θ 3+ α 3), and when θ 2 is obtained, the third position information may be adjusted by θ 2, and the fourth adjusted position information may be r cos (θ 3) + l_camera*cos(θ2+θ3+α3)。

In the above examples, the vertical upward direction in the drawing is taken as the reference direction, and in fact, the reference direction may also be other directions, for example, the horizontal right direction, the vertical downward direction and the horizontal left direction in the drawing may be taken as reference, and the manner of determining the included angle between the reference direction and the measurement direction may refer to the above examples, which are not further illustrated herein.

Based on the above detection method of the detection device, an embodiment of the present application further provides a detection apparatus, and referring to fig. 6, the detection apparatus provided in the embodiment of the present application is shown in a structural block diagram, the apparatus may include a detection device 110 and a processing module 120, the detection device 110 has a measurement direction, a device reference system determined according to the measurement direction, and a reference direction corresponding to the measurement direction, the detection device 110 includes the detection module, the object to be detected includes a first feature point and a second feature point, and the processing module 120 includes: a detection unit 121 and an included angle determination unit 122;

Optionally, the included angle determining unit includes:

Alternatively to this, the first and second parts may,

the first displacement expression determination unit includes:

and/or the presence of a gas in the gas,

the second displacement expression determination unit includes:

[Z1/cos(θ0)*cos(θx+θ0)+h1]-[Z2/cos(θ0)*cos(θx+θ0)+h2]＝0；

[Z1/cos(θ0)*cos(θx+θ0)+h1]-[Z2/cos(θ0)*cos(θx+θ0)+h2]＝h0；

and/or the presence of a gas in the gas,

[OA1+A1P1*cos(θ2)]-[OA2*cos(θ1)+A2P2*cos(θ1+θ2)]＝d0；

Optionally, the included angle determining subunit includes:

Optionally, the apparatus further comprises:

The embodiment of the application provides a detection device, the detection device has a measurement direction, a device reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection device comprises a detection module, the object to be detected comprises a first characteristic point and a second characteristic point, when the detection module and the first characteristic point have a first relative position, the first characteristic point can be subjected to first detection by the detection device, first position information of the first characteristic point in the device reference system is obtained, a first distance vector exists between the detection module and the first characteristic point, when the detection module and the second characteristic point have a second relative position, the second characteristic point can be subjected to second detection by the detection device, second position information of the second characteristic point in the device reference system is obtained, a second distance vector exists between the detection module and the second characteristic point, the first distance vector and the second distance vector have a first predetermined difference in the reference direction, the first predetermined difference being a non-zero value.

In the names of "first feature point", "first location information", and the like, the "first" mentioned in the embodiments of the present application is used merely as a name identification, and does not represent the first in order. The same applies to "second" etc.

As can be seen from the above description of the embodiments, those skilled in the art can clearly understand that all or part of the steps in the above embodiment methods can be implemented by software plus a general hardware platform. Based on such understanding, the technical solution of the present application may be embodied in the form of a software product, which may be stored in a storage medium, such as a read-only memory (ROM)/RAM, a magnetic disk, an optical disk, or the like, and includes several instructions for enabling a computer device (which may be a personal computer, a server, or a network communication device such as a router) to execute the method according to the embodiments or some parts of the embodiments of the present application.

The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, system embodiments and device embodiments are substantially similar to method embodiments and are therefore described in a relatively simple manner, where relevant reference may be made to some descriptions of method embodiments. The above-described embodiments of the apparatus and system are merely illustrative, wherein modules described as separate parts may or may not be physically separate, and parts shown as modules may or may not be physical modules, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.

The above description is only a preferred embodiment of the present application and is not intended to limit the scope of the present application. It should be noted that, for a person skilled in the art, several improvements and modifications can be made without departing from the scope of the present application, and these improvements and modifications should also be considered as the protection scope of the present application.

Claims

1. A detection method of detection equipment is characterized in that the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, an object to be detected comprises a first characteristic point and a second characteristic point, the detection equipment comprises a detection module, and the method comprises the following steps:

2. The method according to claim 1, wherein the obtaining an angle to be measured between the reference direction and the measurement direction according to the first preset difference, the first position information, and the second position information includes:

3. The method of claim 2, wherein the detection module has a first fiducial, the test object has a second fiducial, the second fiducial is located in the equipment reference frame and has a fixed position in the equipment reference frame;

the first location information includes: a first reference displacement of the first reference point and the second reference point in the reference direction at the first relative position, and a first feature displacement between the first feature point and the first reference point;

the second location information includes: a second reference displacement of the first reference point from the second reference point in the reference direction at the second relative position, and a second feature displacement between the second feature point and the first reference point.

4. The method of claim 3,

and/or the presence of a gas in the gas,

5. The method according to claim 4, wherein the detection module is configured to obtain the characteristic distance of the measurement feature point from the first reference point along the measurement direction according to the projection of the intrinsic distance of the measurement feature point from the first reference point along the optical axis direction of the detection module in the measurement direction; a preset included angle is formed between the measuring direction and the optical axis direction of the detection module; the measurement characteristic points comprise a first characteristic point and a second characteristic point, the characteristic distance between the first characteristic point and the first reference point along the measurement direction is the first characteristic displacement, and the characteristic distance between the second characteristic point and the first reference point along the measurement direction is the second characteristic displacement;

6. The method of claim 5, wherein the predetermined included angle is equal to zero degrees or the predetermined included angle is an acute angle.

7. The method according to claim 5, wherein the distance between the first feature point and the second feature point in the reference direction is zero, the first reference displacement and the second reference displacement are different, then the first preset difference is 0, and the relationship equation is:

[Z1/cos(θ0)*cos(θx+θ0)+h1]-[Z2/cos(θ0)*cos(θx+θ0)+h2]＝0；

8. The method according to claim 5, wherein the distance between the first feature point and the second feature point in the reference direction is not zero, the first reference displacement and the second reference displacement are the same or different, and the relationship equation is:

[Z1/cos(θ0)*cos(θx+θ0)+h1]-[Z2/cos(θ0)*cos(θx+θ0)+h2]＝h0；

9. The method according to claim 4, wherein the inspection apparatus further comprises a moving device for relatively rotating the inspection module and/or the object about a rotation axis, the rotation axis being perpendicular to a rotation plane of the object, the measurement direction being perpendicular to the rotation axis, the reference direction intersecting the rotation axis at a rotation center of the object; the detection module is provided with a first datum line, the object to be detected is provided with a second datum line, the first datum line is perpendicular to the rotating shaft, the first datum line rotates along with the detection module, the second datum line rotates along with the object to be detected, the second datum line is perpendicular to the rotating shaft, and the second datum line comprises a rotating center of the object to be detected; at a reference position, the first reference line, the second reference line and the reference direction coincide;

and/or the presence of a gas in the gas,

10. The method according to claim 9, wherein the step of obtaining a first relational expression of the first characteristic displacement in the reference direction according to the first characteristic displacement and the included angle to be measured comprises: acquiring a vector sum of the first relative angle and the included angle to be detected to obtain a first characteristic angle; performing projection processing on the first characteristic displacement by using the first characteristic angle to obtain the first relation representation; and/or the presence of a gas in the gas,

11. The method according to claim 10, wherein the distance between the first feature point and the second feature point in the reference direction is not zero, the first reference displacement and the second reference displacement are the same or different, the first relative angle is zero, and the relation equation is:

[OA1+A1P1*cos(θ2)]-[OA2*cos(θ1)+A2P2*cos(θ1+θ2)]＝d0；

12. The method according to any one of claims 2 to 8, wherein the detection apparatus further comprises a moving device for moving the object to be detected and the detection module relative to each other;

13. The method of claim 12, wherein the distance between the first feature point and the second feature point along the reference direction is greater than zero and the second vector is perpendicular to the reference direction; or the distance between the first characteristic point and the second characteristic point along the reference direction is equal to zero, and the second vector has a non-zero included angle with the reference direction.

14. The method according to any one of claims 2 to 11, wherein obtaining the angle to be measured according to the relation equation comprises:

setting an initial value for the angle to be measured in the relation equation;

15. The method of claim 14, wherein the method of function fitting comprises least squares or linear regression.

16. The method according to any of claims 1-11, wherein the first reference displacement is zero and/or the second reference displacement is zero.

17. The method according to any one of claims 1-11, wherein the detection module comprises: one or more of a spectrum confocal module, a white light interference module, a differential phase shift interference module and a laser ranging module.

18. The method of any one of claims 1-11, further comprising:

19. The detection device is characterized by comprising detection equipment and a processing module, wherein the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection equipment comprises a detection module, and an object to be detected comprises a first characteristic point and a second characteristic point; the processing module comprises: the device comprises a detection unit and an included angle determination unit;

20. The apparatus of claim 19, wherein the angle determining unit comprises:

21. The apparatus of claim 20, wherein the detection module has a first datum, the test object has a second datum, the second datum is located in the device reference frame and has a fixed position in the device reference frame;

22. The apparatus of claim 21,

the first displacement expression determination unit includes:

and/or the presence of a gas in the gas,

the second displacement expression determination unit includes:

23. The device according to claim 22, wherein the detection module is configured to obtain the characteristic distance of the measurement feature point from the first reference point along the measurement direction according to the projection of the intrinsic distance of the measurement feature point from the first reference point along the optical axis direction of the detection module in the measurement direction; a preset included angle is formed between the measuring direction and the optical axis direction of the detection module; the measurement characteristic points comprise a first characteristic point and a second characteristic point, the characteristic distance between the first characteristic point and the first reference point along the measurement direction is the first characteristic displacement, and the characteristic distance between the second characteristic point and the first reference point along the measurement direction is the second characteristic displacement;

24. The apparatus according to claim 22, wherein the detection device further comprises a moving device for relatively rotating the detection module and/or the object about a rotation axis, the rotation axis being perpendicular to a rotation plane of the object, the measurement direction being perpendicular to the rotation axis, the reference direction intersecting the rotation axis at a rotation center of the object; the detection module is provided with a first datum line, the object to be detected is provided with a second datum line, the first datum line is perpendicular to the rotating shaft, the first datum line rotates along with the detection module, the second datum line rotates along with the object to be detected, the second datum line is perpendicular to the rotating shaft, and the second datum line comprises a rotating center of the object to be detected; at a reference position, the first reference line, the second reference line and the reference direction coincide;

the mobile device is configured to: enabling the object to be detected and the detection module to rotate relatively, enabling the detection module and the first characteristic point to have a first relative position, and acquiring a first relative angle between the first datum line and the second datum line at the first relative position and a first axial relative displacement between the first datum line and the rotation center at the first relative position; performing projection processing on the first axial relative displacement according to the first relative angle to obtain the first reference displacement;

and/or the presence of a gas in the gas,

after the first detection, relatively rotating the object to be detected and the detection module, enabling the detection module and the second characteristic point to have a second relative position, and acquiring a first relative angle between the first datum line and the second datum line at the second relative position and a second axial relative displacement between the first datum line and the rotation center at the second relative position; and performing projection processing on the second axial relative displacement according to the second relative angle to obtain the second reference displacement.

25. The apparatus according to claim 24, wherein the first relational representation obtaining unit is specifically configured to: acquiring a vector sum of the first relative angle and the included angle to be detected to obtain a first characteristic angle; performing projection processing on the first characteristic displacement by using the first characteristic angle to obtain the first relation representation; and/or the presence of a gas in the gas,

the second relationship representation acquiring unit is specifically configured to: acquiring a vector sum of the second opposite angle and the included angle to be detected to obtain a second characteristic angle; and projecting the second characteristic displacement by using the second characteristic angle to obtain the second relation expression.

26. The apparatus of any one of claims 20-25, wherein the angle determining subunit comprises:

27. The apparatus of any one of claims 19-25, further comprising:

28. The apparatus according to any of claims 19-25, wherein the detection device further comprises a moving means for: