CN112139988A - Polishing head structure of polishing machine - Google Patents
Polishing head structure of polishing machine Download PDFInfo
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- CN112139988A CN112139988A CN202010934426.XA CN202010934426A CN112139988A CN 112139988 A CN112139988 A CN 112139988A CN 202010934426 A CN202010934426 A CN 202010934426A CN 112139988 A CN112139988 A CN 112139988A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
- B24B41/047—Grinding heads for working on plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/007—Weight compensation; Temperature compensation; Vibration damping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention relates to a polishing head structure of a polishing machine, which comprises a support, a vertical motor, a driving gear, a driven gear and a cylinder assembly, wherein the vertical motor is fixed on the support, the driving gear is positioned in the support and fixedly connected with the output end of the vertical motor, the driven gear is fixedly connected to an upper disc shaft assembly and is in meshed transmission with the driving gear, a cylinder rod of the cylinder assembly is connected with a transition shaft sleeve assembly, an anti-rotation sleeve is arranged at the upper end of the transition shaft sleeve assembly, a rotary joint assembly is arranged in the anti-rotation sleeve and is connected with the upper disc shaft assembly, the upper disc shaft assembly is rotatably arranged in the support, the lower end of the upper disc shaft assembly is connected with an upper disc assembly, the upper disc assembly is positioned below the support, an organ cover is arranged. The polishing head pressurization device adopts a balancing weight to adjust a pressurization mode to replace a traditional cylinder pressurization mode, so that the pressurization is more stable, and the polishing head pressurization uniformity is better by adopting a center auxiliary cylinder pressurization mode.
Description
Technical Field
The invention relates to the technical field of polishing machines, in particular to a polishing head structure of a polishing machine.
Background
The single-side polishing machine is the main equipment for processing hard and brittle materials such as monocrystalline silicon, polycrystalline silicon, electronic grade silicon, sapphire and the like at present, and when the upper polishing head is adopted for pressurization, the air cylinder pressurization of the polishing head leads the processing pressure of the equipment to have certain fluctuation and instability, and the pressurization of the ceramic disk is not uniform.
In order to solve the problems, the invention provides a polishing head structure of a polishing machine, which adopts a balancing weight adjusting and pressurizing mode and a central auxiliary cylinder pressurizing mode to replace the traditional cylinder pressurizing mode, so that the pressurizing uniformity of a polishing head is better.
Disclosure of Invention
The invention aims to overcome the problems in the prior art and provides a polishing head structure of a polishing machine.
In order to achieve the technical purpose and achieve the technical effect, the invention is realized by the following technical scheme:
a polishing head structure of a polishing machine comprises a support, a vertical motor, a driving gear, a driven gear, a cylinder assembly, an anti-rotation sleeve, a rotary joint assembly, a transition shaft sleeve assembly, an upper disc shaft assembly, an organ cover and an upper disc assembly, wherein the vertical motor is fixed on the support, the driving gear is positioned in the support and fixedly connected with the output end of the vertical motor, the driven gear is fixedly connected on the upper disc shaft assembly and is in meshed transmission with the driving gear, a cylinder body of the cylinder assembly is fixed on the support, a cylinder rod of the cylinder assembly is connected with the transition shaft sleeve assembly through a connecting block, the upper end of the transition shaft sleeve assembly is provided with the anti-rotation sleeve, the rotary joint assembly is arranged in the anti-rotation sleeve and is connected with the upper disc shaft assembly, the upper disc shaft assembly is rotatably arranged in the support, the lower, the upper disc assembly is positioned below the bracket, an organ cover is arranged between the bracket and the upper disc assembly, and the organ cover is connected to the upper disc shaft assembly.
Further, the rotary joint subassembly includes joint guard shield, rotation axis, gland, bearing gland, preventing flitch and bearing, the outside of rotation axis is equipped with the joint guard shield, be equipped with the bearing gland between the upper portion lateral surface of rotation axis and the medial surface and the upper end face of joint guard shield, be equipped with the bearing between the upper portion shoulder department of rotation axis and the bearing gland and between the lower part shoulder department of rotation axis and the joint guard shield respectively, the gland sets up in the upper end of rotation axis and bearing gland and pushes down the bearing, the joint guard shield is in the same place with preventing the flitch looks rigid coupling, makes it remain static motionless state throughout the course of the work, the rotation axis is connected and is driven the hanging wall axle subassembly of below and hanging wall subassembly through corresponding fastener and rotates.
Furthermore, a long spacer is arranged between the outer side surface of the rotating shaft and the inner side surface of the joint shield, a sealing ring is arranged at the lower end of the long spacer, a short spacer is arranged above the long spacer, a sealing ring is arranged between the short spacer and a bearing gland above the short spacer, and the sealing ring is sleeved on the rotating shaft and then installed in the joint shield.
Furthermore, an O-shaped sealing ring is arranged between the bottom end of the joint protective cover and the rotating shaft.
Further, the transition shaft sleeve assembly comprises a bearing seat, a flange, a tapered roller bearing, a spacer bush, a first deep groove ball bearing and a bearing end cover, wherein the first deep groove ball bearing is arranged at the upper end of a middle step in the bearing seat, the spacer bush is arranged at the upper end of the first deep groove ball bearing and presses the tapered roller bearing at the upper end of the spacer bush, the flange is arranged at the upper end of the bearing seat and presses the tapered roller bearing below the bearing seat, the tapered roller bearing is arranged at the lower end of the middle step in the bearing seat, and the bearing end cover is arranged at the lower end of the bearing seat and presses the tapered roller bearing above the.
Further, the upper disk shaft assembly comprises an upper disk main shaft, an inner clamping jaw, a driven gear, a second deep groove ball bearing, a transmission shaft, a polishing head bearing seat, a middle spacer sleeve, a first graphite copper sleeve, a lip-shaped sealing ring, an upper disk bearing seat baffle cover, an upper disk shield flange and a compression ring, the driven gear is arranged on the upper disk main shaft through an inner clamping claw, the middle spacer sleeve is arranged between the outer side surface of the transmission shaft and the inner side surface of the polishing head bearing seat, the first graphite copper sleeve is arranged on the outer side surface of the upper disc main shaft and fixed on the step of the inner side surface of the transmission shaft, the lower end of the step on the inner side surface of the lower part of the polishing head bearing seat is provided with a second deep groove ball bearing, the lip-shaped sealing ring is arranged at the lower end of the second deep groove ball bearing and is pressed by the upper disc bearing seat baffle cover and the upper disc shield flange below the lip-shaped sealing ring, and a second deep groove ball bearing is arranged between the upper end of the step on the inner side surface of the upper part of the polishing head bearing seat and the lower end of the step on the outer side surface of the upper part of the transmission shaft.
Further, the upper disc assembly comprises a third deep groove ball bearing, a throwing connecting block, a conical ring, a bearing support, an upper spline shaft, a second graphite copper bush, a self-aligning ball bearing, a counter weight press block, a counter weight block, an inter-flower coupler, an upper disc guard ring top cover, an upper disc press ring, a flange, a self-aligning bearing spacer, a guide sleeve support frame, a throwing piston, a spline, a lower spline shaft, a throwing connecting rod, an upper disc base, a positioning rod, an organ cover fixing plate and a protective cover, wherein the throwing connecting rod is arranged on the inner ring side of the upper disc guard ring top cover, the self-aligning ball bearing is arranged between the lower side of the inner side step in the middle of the throwing connecting rod and the outer side of the second graphite copper bush, the upper spline shaft is arranged on the inner side of the second graphite copper bush, the third deep groove ball bearing is arranged on the upper spline shaft, the lower end of, the inner side of the lower end of the lower spline shaft is fixedly provided with a guide sleeve support frame, a polishing head piston is slidably arranged in a guide sleeve in the guide sleeve support frame, the lower end of the polishing head piston is connected with an upper disc base, and the lower spline shaft is connected with a corresponding air cylinder through a pipeline and used for driving the polishing head piston to move in the guide sleeve support frame, so that the upper disc base is driven to move to pressurize the center position of the polishing head.
Further, be equipped with self-aligning bearing spacer between lower spline shaft and the self-aligning ball bearing, spline shaft coupling and spline are located self-aligning bearing spacer inboard.
Furthermore, the balancing weight and the counterweight pressing block are installed on the upper end face of the top cover of the upper disc retainer after being positioned in a penetrating mode through the positioning rod to integrally pressurize the polishing head, the third deep groove ball bearing is arranged in the bearing support, a conical ring is arranged above the bearing support in an inclined mode and fixedly connected to the polishing head connecting rod through corresponding screws, and an inclined face matched with the conical face of the conical ring is arranged on the bearing support, so that the polishing head is driven to ascend and descend after the bearing support is in contact with the conical ring when the polishing head is located at a non-working position, and the bearing support is separated from the conical ring when the polishing head falls to the polishing disc face without interfering with the work of the polishing head.
The invention has the beneficial effects that:
the structure of the polishing head adopts a balancing weight to adjust a pressurizing mode to replace a traditional cylinder pressurizing mode, so that the pressurizing is more stable, and in addition, the polishing head can be pressurized more uniformly by adopting a center auxiliary cylinder pressurizing mode.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a block diagram of a rotary joint assembly of the present invention;
FIG. 3 is a block diagram of a transition bushing assembly of the present invention;
FIG. 4 is a structural view of an upper spindle assembly of the present invention;
FIG. 5 is a structural view of the upper disc assembly of the present invention.
The reference numbers in the figures illustrate: 1. a bracket, 2, a vertical motor, 3, a driving gear, 4, a driven gear, 5, a cylinder assembly, 6, an anti-rotation sleeve, 7, a rotary joint assembly, 701, a joint shield, 702, a rotating shaft, 703, a gland, 704, a short spacer, 705, a bearing gland, 706, a long spacer, 707, an anti-rotation plate, 708, a seal ring, 709, a pipe joint, 710, a first oil cup, 711, a bearing, 712, an O-shaped seal ring, 8, a transition shaft sleeve assembly, 801, a bearing seat, 802, a flange, 803, a tapered roller bearing, 804, a spacer, 805, a first deep groove ball bearing, 806, a bearing end cover, a second oil cup, 9, an upper plate shaft assembly, 901, an upper plate main shaft, 902, an inner clamping claw, 903, a driven gear, 904, a second deep groove ball bearing, 905, a transmission shaft, 906, a bearing seat, 907, a middle spacer, 908, a first graphite copper lip-shaped seal ring, 909, a sealing ring, 910. an upper disc bearing seat retaining cover 911, an upper disc shield flange 912, a third oil cup 913, a pressing ring 10, an organ cover 11, an upper disc assembly 1101, a third deep groove ball bearing 1102, a throwing connecting block 1103, a conical ring 1104, a bearing support 1105, an upper spline shaft 1106, a second graphite copper sleeve 1107, a self-aligning ball bearing 1108, a counterweight pressing block 1109, a counterweight block 1110, an inter-flower coupling, 1111, an upper disc retainer top cover 1112, an upper disc pressing ring 1113, a retaining edge 1114, a self-aligning bearing spacer, 1115, a guide sleeve support frame 1116, a throwing piston 1117, a spline 1118, a lower spline shaft 1119, a throwing connecting rod 1120, an upper disc base 1121, a positioning rod 1122, an organ cover fixing plate 1123 and a protective cover.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in fig. 1, a polishing head structure of a polishing machine comprises a support 1, a vertical motor 2, a driving gear 3, a driven gear 4, a cylinder assembly 5, an anti-rotation sleeve 6, a rotary joint assembly 7, a transition shaft sleeve assembly 8, an upper disc shaft assembly 9, an organ cover 10 and an upper disc assembly 11, wherein the vertical motor 2 is fixed on the support 1, the driving gear 3 is positioned inside the support 1 and fixedly connected with an output end of the vertical motor 2, the driven gear 4 is fixedly connected on the upper disc shaft assembly 9 and is in meshing transmission with the driving gear 3, a cylinder body of the cylinder assembly 5 is fixed on the support 1, a cylinder rod of the cylinder assembly 5 is connected with the transition shaft sleeve assembly 8 through a connecting block, the anti-rotation sleeve 6 is arranged at the upper end of the transition shaft sleeve assembly 8, the rotary joint assembly 7 is arranged inside the anti-rotation sleeve 6, and the rotary joint assembly 7 is connected, the upper disc shaft assembly 9 is rotatably arranged in the bracket 1, the lower end of the upper disc shaft assembly 9 is connected with an upper disc assembly 11, the upper disc assembly 11 is positioned below the bracket 1, an organ cover 10 is arranged between the bracket 1 and the upper disc assembly 11, and the organ cover 10 is connected to the upper disc shaft assembly 9.
As shown in fig. 2, the rotary joint assembly 7 includes a joint shield 701, a rotary shaft 702, a gland 703, a bearing gland 705, an anti-rotation plate 707 and a bearing 711, the joint shield 701 is disposed on an outer side of the rotary shaft 702, the bearing gland 705 is disposed between an upper outer side surface of the rotary shaft 702 and an inner side surface and an upper end surface of the joint shield 701, the bearing 711 is disposed between an upper shoulder of the rotary shaft 702 and the bearing gland 705 and between a lower shoulder of the rotary shaft 702 and the joint shield 701, the gland 702 is disposed on upper ends of the rotary shaft 702 and the bearing gland 705 and presses the bearing 711, the joint shield 701 and the anti-rotation plate 707 are fixed together to keep the upper disc assembly 9 and the upper disc assembly 11 in a stationary state all the time during operation, and the rotary shaft 702 is connected by corresponding fasteners and drives the upper disc assembly 9 and the upper disc assembly.
A long spacer 706 is arranged between the outer side surface of the rotating shaft 702 and the inner side surface of the joint shield 701, a sealing ring 708 is arranged at the lower end of the long spacer 706, a short spacer 704 is arranged above the long spacer 706, the sealing ring 708 is arranged between the short spacer 704 and a bearing gland 705 above the short spacer 704, and the sealing ring 708 is arranged in the joint shield 701 after being sleeved on the rotating shaft 702.
An O-ring 712 is disposed between the bottom end of the joint boot 701 and the rotating shaft 702.
In this embodiment, the rotary joint assembly 7 further includes a pipe joint 709 and a first oil cup 710, the pipe joint 709 is disposed on a side surface of the joint shield 701, and the first oil cup 710 is disposed on a top side of the joint shield 701.
As shown in fig. 3, the transition bushing assembly 8 includes a bearing seat 801, a flange 802, a tapered roller bearing 803, a spacer 804, a first deep groove ball bearing 805 and a bearing end cap 806, the first deep groove ball bearing 805 is disposed at the upper end of a middle step in the bearing seat 801, the spacer 804 is disposed at the upper end of the first deep groove ball bearing 805 and presses the tapered roller bearing 803 against the upper end of the spacer 804, the flange 802 is disposed at the upper end of the bearing seat 801 and presses the tapered roller bearing 803 below the bearing seat, the lower end of the middle step in the bearing seat 801 is provided with the tapered roller bearing 803, the bearing end cap 806 is disposed at the lower end of the bearing seat 801 and presses the tapered roller bearing 803 above the bearing seat, and in this embodiment, a second oil cup 807 is disposed on one side surface of the.
As shown in fig. 4, the upper disc shaft assembly 9 includes an upper disc main shaft 901, an inner jaw 902, a driven gear 903, a second deep groove ball bearing 904, a transmission shaft 905, a polishing head bearing seat 906, a middle spacer sleeve 907, a first graphite copper sleeve 908, a lip seal 909, an upper disc bearing seat stop cover 910, an upper disc shield flange 911 and a press ring 913, the driven gear 903 is mounted on the upper disc main shaft 901 through the inner jaw 902, the middle spacer sleeve 907 is disposed between an outer side surface of the transmission shaft 905 and an inner side surface of the polishing head bearing seat 906, the first graphite copper sleeve 908 is disposed on an outer side surface of the upper disc main shaft 901 and fixed on a step on the inner side surface of the transmission shaft 905, the second deep groove ball bearing 904 is mounted on a lower end of the step on the inner side surface of the lower part of the polishing head bearing seat 906, the lip seal 909 is disposed on a lower, a second deep groove ball bearing 904 is arranged between the upper end of the step on the inner side surface of the upper part of the polishing head bearing seat 906 and the lower end of the step on the outer side surface of the upper part of the transmission shaft 905, and in this embodiment, a third oil cup (912) is arranged on the side surface of the polishing head bearing seat 906.
As shown in fig. 5, the upper disc assembly 11 includes a third deep groove ball bearing 1101, a throwing connecting block 1102, a conical ring 1103, a bearing support 1104, an upper spline shaft 1105, a second graphite copper bush 1106, a self-aligning ball bearing 1107, a counter weight pressing block 1108, a balancing weight 1109, an inter-flower coupling 1110, an upper disc retainer top cover 1111, an upper disc pressing ring 1112, a retaining edge 1113, a self-aligning bearing spacer 1114, a guide bush support 1115, a throwing piston 1116, a spline 1117, a lower spline shaft 1118, a throwing connecting rod 1119, an upper disc base 1120, a positioning rod 1121, an organ cover fixing plate 1122 and a protecting cover 1123, the throwing connecting rod 1119 is arranged at the inner ring side of the upper disc retainer top cover 1111, the self-aligning ball bearing 1107 is arranged between the lower part of the inner side step of the throwing connecting rod 1119 and the outer side of the second graphite copper bush 1106, the inner side of the second graphite copper bush 1106 is provided with the upper spline shaft, the lower end of the upper spline shaft 1105 is connected with a lower spline shaft 1118 through a spline coupler 1110 and a spline 1117, the lower spline shaft 1118 is fixedly connected with the lower end of a throwing head connecting rod 1119 through screws, a guide sleeve support frame 1115 is fixed on the inner side of the lower end of the lower spline shaft 1118, a throwing head piston 1116 is slidably arranged in a guide sleeve in the guide sleeve support frame 1115, the lower end of the throwing head piston 1116 is connected with a top disc base 1120, and the lower spline shaft 1118 is connected with a corresponding air cylinder through a pipeline and used for driving the throwing head piston 1116 to move in the guide sleeve support frame 1115, so that the top disc base 1120 is driven to move.
A self-aligning bearing spacer 1114 is arranged between the lower spline shaft 1118 and the self-aligning ball bearing 1107, and the spline coupler 1110 and the spline 1117 are located on the inner side of the self-aligning bearing spacer 1114.
The counterweight 1109 and the counterweight briquetting 1108 are positioned by the positioning rod 1121 through penetration and then are mounted on the upper end surface of the upper disk retainer top cover 1111 to form integral pressurization to the polishing head, the third deep groove ball bearing 1101 is arranged in a bearing support 1104, the upper end of the bearing support 1104 is provided with a throwing head connecting block 1102, the parabolic connecting block 1102 is connected with the organ cover fixing plate 1122 above it by corresponding screws, a conical ring 1103 is arranged obliquely above the bearing support 1104, the conical ring 1103 is fixedly connected on the throwing head connecting rod 1119 through corresponding screws, the bearing support 1104 is provided with an inclined surface matched with the conical surface of the conical ring 1103, when the polishing head is at the non-working position, the bearing support 1104 is contacted with the conical ring 1103 to drive the polishing head to lift, when the polishing head drops to the polishing platen, the bearing support 1104 disengages from the taper ring 1103 without interfering with the operation of the polishing head.
In addition, it should be noted that the terms "first", "second", "third", and the like in the specification are used for distinguishing various components, elements, steps, and the like in the specification, and are not used for indicating a logical relationship or a sequential relationship between the various components, elements, steps, and the like, unless otherwise specified or indicated.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A polishing head structure of a polishing machine is characterized by comprising a support (1), a vertical motor (2), a driving gear (3), a driven gear (4), a cylinder assembly (5), an anti-rotation sleeve (6), a rotary joint assembly (7), a transition shaft sleeve assembly (8), an upper disc shaft assembly (9), an organ cover (10) and an upper disc assembly (11), wherein the vertical motor (2) is fixed on the support (1), the driving gear (3) is positioned inside the support (1) and fixedly connected with the output end of the vertical motor (2), the driven gear (4) is fixedly connected on the upper disc shaft assembly (9) and is in meshed transmission with the driving gear (3), a cylinder body of the cylinder assembly (5) is fixed on the support (1), a cylinder rod of the cylinder assembly (5) is connected with the transition shaft sleeve assembly (8) through a connecting block, the anti-rotation sleeve (6) is arranged at the upper end of the transition shaft sleeve assembly (8), the novel anti-rotation device is characterized in that a rotary joint assembly (7) is arranged inside the anti-rotation sleeve (6), the rotary joint assembly (7) is connected with an upper disc shaft assembly (9), the upper disc shaft assembly (9) is rotatably arranged in the support (1), an upper disc assembly (11) is connected to the lower end of the upper disc shaft assembly (9), the upper disc assembly (11) is located below the support (1), an organ cover (10) is arranged between the support (1) and the upper disc assembly (11), and the organ cover (10) is connected to the upper disc shaft assembly (9).
2. The polishing head structure of a polishing machine according to claim 1, wherein the rotary joint assembly (7) comprises a joint shield (701), a rotary shaft (702), a gland (703), a bearing gland (705), an anti-rotation plate (707), and a bearing (711), the joint shield (701) is provided on the outer side of the rotary shaft (702), the bearing gland (705) is provided between the outer side surface of the upper portion of the rotary shaft (702) and the inner side surface and the upper end surface of the joint shield (701), the bearing (711) is provided between the upper shoulder of the rotary shaft (702) and the bearing gland (705), and between the lower shoulder of the rotary shaft (702) and the joint shield (701), the gland (702) is provided on the upper ends of the rotary shaft (702) and the bearing gland (705) and presses the bearing (711), the joint shield (701) and the anti-rotation plate (707) are fixedly connected together, the rotating shaft (702) is connected with the upper disc shaft assembly (9) and the upper disc assembly (11) below through corresponding fasteners and drives the upper disc shaft assembly and the lower disc shaft assembly to rotate.
3. The polishing head structure of the polishing machine according to claim 2, wherein a long spacer (706) is arranged between the outer side surface of the rotating shaft (702) and the inner side surface of the joint shield (701), a sealing ring (708) is arranged at the lower end of the long spacer (706), a short spacer (704) is arranged above the long spacer (706), a sealing ring (708) is arranged between the short spacer (704) and a bearing gland (705) above the short spacer, and the sealing ring (708) is sleeved on the rotating shaft (702) and then installed in the joint shield (701).
4. The polishing head structure of a polishing machine according to claim 3, wherein an O-ring (712) is provided between the bottom end of the joint boot (701) and the rotary shaft (702).
5. The polishing head structure of a polishing machine according to claim 1, wherein the transition bushing assembly (8) comprises a bearing seat (801), a flange (802), a tapered roller bearing (803), a spacer bush (804), a first deep groove ball bearing (805), and a bearing end cap (806), the first deep groove ball bearing (805) is arranged at the upper end of a step in the middle part in the bearing seat (801), the spacer bush (804) is arranged at the upper end of the first deep groove ball bearing (805) and presses the tapered roller bearing (803) to the upper end of the spacer bush (804), the flange (802) is arranged at the upper end of the bearing seat (801) and presses the tapered roller bearing (803) below the bearing seat, the lower end of the step in the middle of the bearing seat (801) is provided with a tapered roller bearing (803), the bearing end cover (806) is arranged at the lower end of the bearing seat (801) and presses the tapered roller bearing (803) above the bearing seat.
6. The polishing head structure of a polishing machine according to claim 1, wherein the upper disk shaft assembly (9) comprises an upper disk main shaft (901), an inner clamping jaw (902), a driven gear (903), a second deep groove ball bearing (904), a transmission shaft (905), a polishing head bearing seat (906), an intermediate spacer sleeve (907), a first graphite copper sleeve (908), a lip seal (909), an upper disk bearing seat baffle cover (910), an upper disk shield flange (911) and a pressure ring (913), the driven gear (903) is mounted on the upper disk main shaft (901) through the inner clamping jaw (902), the intermediate spacer sleeve (907) is arranged between the outer side surface of the transmission shaft (905) and the inner side surface of the bearing seat (906), the first graphite copper sleeve (907) is arranged on the outer side surface of the upper disk main shaft (901) and fixed on the step of the inner side surface of the transmission shaft (905), and a second deep groove ball bearing (904) is installed at the lower end of the inner side surface step at the lower part of the polishing head bearing seat (906), the lip-shaped sealing ring (909) is arranged at the lower end of the second deep groove ball bearing (904) and is pressed by a disc bearing seat baffle cover (910) and a disc shield flange (911) below the lip-shaped sealing ring, and the second deep groove ball bearing (904) is arranged between the upper end of the inner side surface step at the upper part of the polishing head bearing seat (906) and the lower end of the outer side surface step at the upper.
7. The polishing head structure of a polishing machine according to claim 1, wherein the upper disk assembly (11) comprises a third deep groove ball bearing (1101), a polishing head connecting block (1102), a conical ring (1103), a bearing support (1104), an upper spline shaft (1105), a second graphite copper bush (1106), a self-aligning ball bearing (1107), a counterweight pressing block (1108), a counterweight (1109), a flower coupler (1110), an upper disk retainer top cover (1111), an upper disk pressing ring (1112), a flange (1113), a self-aligning bearing spacer (1114), a guide sleeve support frame (1115), a polishing head piston (1116), a spline (1117), a lower spline shaft (1118), a polishing head connecting rod (1119), an upper disk base (1120), a positioning rod (1121), an organ cover fixing plate (1122) and a protective cover (1123), wherein the polishing head connecting rod (1119) is arranged on the inner ring side of the retainer upper disk top cover (1111), the center-adjusting ball bearing (1107) is arranged between the lower part of an inner side step in the middle of the throwing head connecting rod (1119) and the outer side of the second graphite copper sleeve (1106), the inner side of the second graphite copper sleeve (1106) is provided with an upper spline shaft (1105), the upper end of the upper spline shaft (1105) is provided with a third deep groove ball bearing (1101), the lower end of the upper spline shaft (1105) is connected with a lower spline shaft (1118) through a spline coupler (1110) and a spline (1117), the lower spline shaft (1118) is fixedly connected with the lower end of the throwing head connecting rod (1119) through screws, the inner side of the lower end of the lower spline shaft (1118) is fixedly provided with a guide sleeve support frame (1115), a throwing head piston (1116) is slidably arranged in a guide sleeve in the guide sleeve support frame (1115), the lower end of the throwing head piston (1116) is connected with a base upper disc (1120), the lower spline shaft (1118) is connected with a corresponding cylinder through a, thereby driving the upper disc base (1120) to move to pressurize the center position of the projectile head.
8. The polishing head structure of the polishing machine according to claim 7, wherein a self-aligning bearing spacer (1114) is arranged between the lower spline shaft (1118) and the self-aligning ball bearing (1107), and the spline coupler (1110) and the spline (1117) are positioned inside the self-aligning bearing spacer (1114).
9. The polishing head structure of the polishing machine according to claim 7, wherein the counterweight block (1109) and the counterweight pressing block (1108) are mounted on the upper end surface of the upper disk retainer top cover (1111) after being positioned by a positioning rod (1121) in a penetrating way to form integral pressurization to the polishing head, the third deep groove ball bearing (1101) is arranged in the bearing support (1104), a tapered ring (1103) is arranged obliquely above the bearing support (1104), the tapered ring (1103) is fixedly connected to the polishing head connecting rod (1119) through corresponding screws, an inclined surface matched with the conical surface of the tapered ring (1103) is arranged on the bearing support (1104), so that when the polishing head is in a non-working position, the bearing support (1104) is in contact with the tapered ring (1103) to drive the polishing head to lift, and when the polishing head falls to the polishing disk surface, the bearing support (1104) is separated from the tapered ring (1103), without interfering with the operation of the polishing head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010934426.XA CN112139988A (en) | 2020-09-08 | 2020-09-08 | Polishing head structure of polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010934426.XA CN112139988A (en) | 2020-09-08 | 2020-09-08 | Polishing head structure of polishing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112139988A true CN112139988A (en) | 2020-12-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010934426.XA Pending CN112139988A (en) | 2020-09-08 | 2020-09-08 | Polishing head structure of polishing machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115958517A (en) * | 2023-03-09 | 2023-04-14 | 湖南金岭机床科技集团有限公司 | Disc feeding system of high-precision polishing machine |
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2020
- 2020-09-08 CN CN202010934426.XA patent/CN112139988A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115958517A (en) * | 2023-03-09 | 2023-04-14 | 湖南金岭机床科技集团有限公司 | Disc feeding system of high-precision polishing machine |
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