CN112132905B - Method and system for determining position relationship between alignment camera and optical device - Google Patents
Method and system for determining position relationship between alignment camera and optical device Download PDFInfo
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- CN112132905B CN112132905B CN202010872113.6A CN202010872113A CN112132905B CN 112132905 B CN112132905 B CN 112132905B CN 202010872113 A CN202010872113 A CN 202010872113A CN 112132905 B CN112132905 B CN 112132905B
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- 238000012360 testing method Methods 0.000 abstract description 8
- 238000005259 measurement Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 3
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/80—Analysis of captured images to determine intrinsic or extrinsic camera parameters, i.e. camera calibration
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/70—Determining position or orientation of objects or cameras
- G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
Abstract
The invention discloses a method and a system for determining the position relationship between an alignment camera and an optical device, wherein the method comprises the following steps: the optical device projects a picture onto the calibration camera, and after the calibration camera acquires the picture, the processing module records the position of the optical device as a first mark point coordinate; the alignment camera moves and grabs the central position of the calibration camera, and the processing module records the position of the alignment camera as a second mark point coordinate; the processing module calculates a first position difference coordinate between the alignment camera and the optical device according to the first mark point coordinate and the second mark point coordinate. The invention can test the position relation between the alignment camera and the optical device at any time according to the requirement, does not need to clean the working table surface, and has simple test scheme and easy realization.
Description
Technical Field
The present invention relates to the field of camera calibration technologies, and in particular, to a method and a system for determining a positional relationship between an alignment camera and an optical device.
Background
In image measurement processes and machine vision applications, in order to determine the correlation between the three-dimensional geometric position of a point on the surface of a spatial object and its corresponding point in the image, a geometric model of camera imaging must be established, and these geometric model parameters are camera parameters. Under most conditions, these parameters must be obtained through experiments and calculations, and this process of solving the parameters is called camera calibration (or camera calibration). In image measurement or machine vision application, calibration of camera parameters is a very critical link, and the accuracy of a calibration result and the stability of an algorithm directly influence the accuracy of a result generated by camera work. Thus, making camera calibration is a precondition for making subsequent work.
Before the exposure machine is operated, the mutual position relationship between the optical device (such as a digital mirror device DMD, or a combination of the DMD and a lens) and the alignment camera (such as a CCD camera) is normal, and is generally kept at a preset value or within a preset range. However, after the exposure machine is operated for a period of time, the positional relationship between the optical device and the alignment camera may be shifted, for various reasons, such as assembling parts, driving mechanisms, etc. Therefore, it is necessary to acquire the positional relationship between the optical device and the alignment camera, and adjust the positions of the optical device and the alignment camera according to the positional deviation value by calculating the positional deviation value.
As shown in fig. 1, in the conventional scheme for obtaining the position deviation value between the optical device and the alignment camera, it is common to place a test piece (such as a dry film) on a table surface, and the optical device exposes a point of the test piece, and marks the point as DMD (x) 1 ，y 1 ) Then the alignment camera is used to move and grasp the mark point, and the coordinate of the mark grasping is CCD (x 2 ，y 2 ) Then by calculating the difference between the two coordinate positions (CCD (x 2 ，y 2 )－DMD(x 1 ，y 1 ) The positional relationship between the optical device and the alignment camera is obtained, and the positional relationship is compared with the initial positional relationship to obtain an offset value. However, the scheme is carried out after the exposure machine works for a period of time, so that the work piece on the working table surface needs to be manually cleaned during testing, and the work piece is replaced on the working table surface after adjustment is finished, so that the operation is troublesome and time-consuming.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a method and a system for determining the position relationship between an alignment camera and an optical device.
In order to achieve the above purpose, the present invention proposes the following technical scheme: a method for determining the position relationship between an alignment camera and an optical device, wherein one side of the alignment camera and one side of the optical device are provided with calibration cameras, and the alignment camera, the optical device and the calibration cameras are all connected with a processing module, and the method comprises the following steps:
s100, the optical device projects a picture to a calibration camera, and after the calibration camera acquires the projected picture, the processing module records the position of the optical device as a first mark point coordinate;
s200, moving the alignment camera and grabbing the central position of the calibration camera, wherein the processing module records the position of the alignment camera as a second mark point coordinate;
and S300, the processing module calculates a first position difference coordinate between the alignment camera and the optical device according to the first mark point coordinate and the second mark point coordinate.
Preferably, the determining method further includes:
s400, repeating the steps S100-S300 to obtain a third mark point coordinate representing the position of the optical device and a fourth mark point coordinate representing the position of the alignment camera, and calculating a second position difference coordinate between the alignment camera and the optical device by the processing module according to the third mark point coordinate and the fourth mark point coordinate;
s500, the processing module calculates the position offset between the alignment camera and the optical device according to the first position difference coordinate and the second position difference coordinate.
Preferably, a functional piece is installed at the center of the calibration camera, and in S200, the alignment camera grabs the functional piece.
Preferably, the functional element comprises a chip or a lens.
Preferably, the alignment camera and the optical device are moved simultaneously or relatively.
Preferably, in S300, the calculation formula of the first position difference coordinate is: first position difference coordinates=first mark point coordinates-second mark point coordinates.
Preferably, the position offset = first position difference coordinate-second position difference coordinate, and the calculation formula of the first position difference coordinate is: first position difference coordinates=first mark point coordinates-second mark point coordinates, and the calculation formula of the second position difference coordinates is: second position difference coordinates=third mark point coordinates-fourth mark point coordinates.
The invention also discloses another technical scheme: a system for determining the position relation between an alignment camera and an optical device comprises the optical device, the alignment camera, a calibration camera and a processing module, wherein the calibration camera is positioned at one side of the alignment camera and the optical device,
the optical device is used for projecting a picture to the calibration camera, and the processing module records the position of the optical device as a first mark point coordinate after the calibration camera acquires the projected picture;
the processing module records the position of the alignment camera as a second mark point coordinate;
the processing module is also used for calculating a first position difference coordinate between the alignment camera and the optical device according to the first mark point coordinate and the second mark point coordinate.
Preferably, the processing module is further configured to calculate a second position difference coordinate between the alignment camera and the optical device after the optical device repeatedly projects a map onto the calibration camera and the alignment camera repeatedly moves and grabs the center position of the calibration camera, and calculate a position offset between the alignment camera and the optical device according to the first position difference coordinate and the second position difference coordinate.
The beneficial effects of the invention are as follows: through add a calibration camera on the exposure machine, counterpoint camera confirms the positional relationship between counterpoint camera and the optical device through grabbing the central point that marks the camera, and this scheme can test the positional relationship between counterpoint camera and the optical device at any time as required, need not to clear up table surface, and test scheme is simple and easy realization.
Drawings
FIG. 1 is a schematic diagram of a first prior art solution;
FIG. 2 is a schematic diagram of a determination method of the present invention;
FIG. 3 is a schematic top view of a calibration camera of the present invention;
FIG. 4 is a flow chart of the determination method of the present invention;
FIG. 5 is a flow chart of a determination method according to another embodiment of the present invention.
Reference numerals:
1. the device comprises an alignment camera, an optical device, a dry film, a suction platform, a calibration camera and a calibration camera, wherein the alignment camera, the optical device, the dry film and the suction platform are arranged at the center of the alignment camera, the optical device, the dry film and the suction platform, the calibration camera and the calibration camera are arranged at the center of the alignment camera, the optical device, the dry film and the suction platform, and the calibration camera are arranged at the center.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.
According to the method and the system for determining the position relationship between the alignment camera and the optical device, the calibration camera is additionally arranged on the exposure machine, the alignment camera is used for determining the position relationship between the alignment camera and the optical device by grabbing the central position of the calibration camera, the position relationship between the alignment camera and the optical device can be tested at any time according to the requirements, a working table is not required to be cleaned, and the test scheme is simple and easy to realize.
Referring to fig. 2, in the method for determining a positional relationship between an alignment camera and an optical device according to the present invention, a calibration camera 5 is disposed on one side of the alignment camera 1 and one side of the optical device 2, and the alignment camera 1, the optical device 2 and the calibration camera 5 are connected to a processing module (not shown). In practice, the optical device 2 may be a mathematical mirror device DMD or a combination of a DMD and a lens. The alignment camera 1 and the calibration camera 5 may be both CCD cameras.
Referring to fig. 3, the method for determining the positional relationship between the alignment camera 1 and the optical device 2 according to the present invention specifically includes the following steps:
s100, the optical device 2 projects a picture to the calibration camera 5, and after the calibration camera 5 acquires the picture, the processing module records the position of the optical device 2 as a first mark point coordinate.
In this embodiment, the position of the optical device 2 projecting onto the calibration camera 5 is located at the center position 6 of the calibration camera.
S200, the alignment camera 1 moves and grabs the center position of the calibration camera 5, and the processing module records the position of the alignment camera 1 as a second mark point coordinate.
In practice, the alignment camera 1 and the optical device 2 may be moved simultaneously or relatively. The calibration camera 5 and the alignment camera 1 or the optical device 2 can also move simultaneously or relatively. As shown in fig. 3, the functional component is installed at the center position 6 of the calibration camera 5, and the functional component includes a chip and a lens, and the alignment camera can grasp the chip or the lens of the calibration camera 5.
S300, the processing module calculates a first position difference coordinate between the alignment camera 1 and the optical device 2 according to the first mark point coordinate and the second mark point coordinate.
Specifically, the processing module may calculate the first position difference coordinate between the alignment camera 1 and the optical device 2 according to the first mark point coordinate obtained in step S100 and the second mark point coordinate obtained in step S200. The specific calculation formula is as follows: the calculation formula of the first position difference coordinate is as follows: first position difference coordinates=first mark point coordinates-second mark point coordinates. That is, the positional coordinates of the optical device 2 are subtracted from the positional coordinates of the alignment camera 1, and the positional relationship between the optical device 2 and the alignment camera 1 can be obtained.
Referring to fig. 5, after the positional relationship between the optical device 2 and the alignment camera 1 is measured in steps S100 to S300, if the positional shift between the alignment camera 1 and the optical device 2 is further measured, the positional relationship between the alignment camera 1 and the optical device 2 needs to be repeated at least once more. Therefore, the method for determining the positional relationship between the alignment camera and the optical device according to the present invention may further comprise the following steps:
s400, repeating the above steps S100 to S300, the processing module calculates the second position difference coordinates between the alignment camera 1 and the optical device 2.
Specifically, the above S100 is repeated, the processing module records that the position of the optical device 2 is the third mark point coordinate, the above S200 is repeated, the processing module records that the position of the alignment camera 1 is the fourth mark point coordinate, the above S300 is repeated, and the processing module calculates the second position difference coordinate between the alignment camera 1 and the optical device 2 according to the third mark point coordinate and the fourth mark point coordinate. The calculation formula of the second position difference coordinate is as follows: second position difference coordinates=third mark point coordinates-fourth mark point coordinates. That is, the positional relationship between the optical device 2 and the alignment camera 1 obtained by the second measurement can be calculated by subtracting the positional coordinate of the alignment camera 1 obtained by the second measurement (i.e., the third mark point coordinate) from the positional coordinate of the optical device 2 obtained by the second measurement (i.e., the fourth mark point coordinate).
S500, the processing module calculates the position offset between the alignment camera 1 and the optical device 2 according to the first position difference coordinate and the second position difference coordinate.
Specifically, the subtraction of the coordinates of each mark point obtained by the two measurements is the amount of positional displacement between the alignment camera 1 and the optical device 2. That is, the calculation formula of the positional offset is: position offset = second position difference coordinate-first position difference coordinate. Wherein, the second position difference coordinate=the first mark point coordinate-the second mark point coordinate, and the second position difference coordinate=the third mark point coordinate-the fourth mark point coordinate. That is, the positional shift amount=first mark point coordinate-second mark point coordinate-third mark point coordinate-fourth mark point coordinate.
The first measured first mark point coordinate is recorded as (X 11 ，Y 11 ) The first measured second mark point coordinates are (X 21 ，Y 21 ) The coordinates of the third mark point measured for the second time are (X 12 ，Y 12 ) The second mark point coordinate of the second measurement is (X 22 ，Y 22 ) The positional shift amount is (Δx, Δy). Therefore, the positional shift amount (Δx, Δy) = ((X) 11 ，Y 11 )—(X 21 ，Y 21 ))—((X 12 ，Y 12 )—(X 22 ，Y 22 ))。
The change in the positional relationship between the alignment camera 1 and the optical device 2 can be determined based on the calculated amount of the positional displacement, and if 0, it means that the position between the alignment camera 1 and the optical device 2 is not displaced, whereas if not 0, it means that the position between the alignment camera 1 and the optical device 2 is displaced, and the position between the alignment camera 1 and the optical device 2 can be adjusted based on the amount of the positional displacement.
Corresponding to the above method, the system for determining the positional relationship between the alignment camera and the optical device disclosed in the present invention includes the optical device 2, the alignment camera 1, the calibration camera 5 and the processing module, wherein the positional relationship between the optical device 2, the alignment camera 1 and the calibration camera 5, and the structural design of the calibration camera 5 can refer to the description in the above method, and the description is omitted herein.
The optical device 2 is used for projecting a picture onto the calibration camera 5, and after the calibration camera 5 acquires the projected picture, the processing module records the position of the optical device 2 as a first mark point coordinate;
the processing module records the position of the alignment camera 1 as a second mark point coordinate;
the processing module is further configured to calculate a first position difference coordinate between the alignment camera 1 and the optical device 2 according to the first mark point coordinate and the second mark point coordinate.
The specific calculation process of the processing module may refer to the descriptions in the above steps S100 to 500, and will not be repeated here.
While the foregoing has been disclosed in the specification and drawings, it will be apparent to those skilled in the art that various substitutions and modifications may be made without departing from the spirit of the invention, and it is intended that the scope of the invention be limited not by the specific embodiments disclosed, but by the appended claims.
Claims (9)
1. The method for determining the position relationship between the alignment camera and the optical device is characterized in that one side of the alignment camera and one side of the optical device are provided with calibration cameras, and the alignment camera, the optical device and the calibration cameras are all connected with a processing module, and the method for determining the position relationship comprises the following steps:
s100, the optical device projects a picture to a calibration camera, and after the calibration camera acquires the projected picture, the processing module records the position of the optical device as a first mark point coordinate;
s200, moving the alignment camera and grabbing the central position of the calibration camera, wherein the processing module records the position of the alignment camera as a second mark point coordinate;
and S300, the processing module calculates a first position difference coordinate between the alignment camera and the optical device according to the first mark point coordinate and the second mark point coordinate.
2. The method of determining a positional relationship between an alignment camera and an optical device according to claim 1, further comprising:
s400, repeating the steps S100-S300 to obtain a third mark point coordinate representing the position of the optical device and a fourth mark point coordinate representing the position of the alignment camera, and calculating a second position difference coordinate between the alignment camera and the optical device by the processing module according to the third mark point coordinate and the fourth mark point coordinate;
s500, the processing module calculates the position offset between the alignment camera and the optical device according to the first position difference coordinate and the second position difference coordinate.
3. The method for determining a positional relationship between an alignment camera and an optical device according to claim 1, wherein a functional member is mounted at a center position of the calibration camera, and in S200, the alignment camera grips the functional member.
4. A method of determining a positional relationship between an alignment camera and an optical device as claimed in claim 3, wherein the functional element comprises a chip or a lens.
5. The method of claim 1, wherein the alignment camera and the optical device are moved simultaneously or are moved relatively.
6. The method for determining a positional relationship between an alignment camera and an optical device according to claim 1, wherein in S300, the calculation formula of the first position difference coordinate is: first position difference coordinates=first mark point coordinates-second mark point coordinates.
7. The method for determining a positional relationship between an alignment camera and an optical device according to claim 2, wherein the positional offset = first positional difference coordinate-second positional difference coordinate, and the calculation formula of the first positional difference coordinate is: first position difference coordinates=first mark point coordinates-second mark point coordinates, and the calculation formula of the second position difference coordinates is: second position difference coordinates=third mark point coordinates-fourth mark point coordinates.
8. A system for determining the position relation between an alignment camera and an optical device is characterized in that the system comprises the optical device, the alignment camera, a calibration camera and a processing module connected with the alignment camera, the optical device and the calibration camera, wherein the calibration camera is positioned at one side of the alignment camera and the optical device,
the optical device is used for projecting a picture to the calibration camera, and the processing module records the position of the optical device as a first mark point coordinate after the calibration camera acquires the projected picture;
the processing module records the position of the alignment camera as a second mark point coordinate;
the processing module is also used for calculating a first position difference coordinate between the alignment camera and the optical device according to the first mark point coordinate and the second mark point coordinate.
9. The system according to claim 8, wherein the processing module is further configured to calculate a second position difference coordinate between the alignment camera and the optical device after the optical device repeatedly projects a map onto the alignment camera and the alignment camera repeatedly moves and grabs a center position of the alignment camera, and calculate a position offset between the alignment camera and the optical device according to the first position difference coordinate and the second position difference coordinate.
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Citations (5)
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|---|---|---|---|---|
| US6067165A (en) * | 1997-09-12 | 2000-05-23 | Mitutoyo Corporation | Position calibrating method for optical measuring apparatus |
| CN104439698A (en) * | 2014-11-26 | 2015-03-25 | 北京凌云光技术有限责任公司 | Calibration method and device used for laser processing system |
| CN105345254A (en) * | 2015-12-04 | 2016-02-24 | 湖北工业大学 | Calibration method for positional relation between paraxial type visual system and laser vibrating mirror machining system |
| CN206401288U (en) * | 2017-01-19 | 2017-08-11 | 合肥鑫晟光电科技有限公司 | One kind binding alignment device |
| CN109859273A (en) * | 2018-12-24 | 2019-06-07 | 武汉大音科技有限责任公司 | A kind of caliberating device and method of online dynamic vision system of processing |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011006910A1 (en) * | 2011-04-07 | 2012-10-11 | Robert Bosch Gmbh | A method for determining adjustment deviations of an image acquisition chip of an optical camera and corresponding Justierprüfvorrichtungen |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6067165A (en) * | 1997-09-12 | 2000-05-23 | Mitutoyo Corporation | Position calibrating method for optical measuring apparatus |
| CN104439698A (en) * | 2014-11-26 | 2015-03-25 | 北京凌云光技术有限责任公司 | Calibration method and device used for laser processing system |
| CN105345254A (en) * | 2015-12-04 | 2016-02-24 | 湖北工业大学 | Calibration method for positional relation between paraxial type visual system and laser vibrating mirror machining system |
| CN206401288U (en) * | 2017-01-19 | 2017-08-11 | 合肥鑫晟光电科技有限公司 | One kind binding alignment device |
| CN109859273A (en) * | 2018-12-24 | 2019-06-07 | 武汉大音科技有限责任公司 | A kind of caliberating device and method of online dynamic vision system of processing |
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