CN112123208A - Breakage detection mechanism - Google Patents
Breakage detection mechanism Download PDFInfo
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- CN112123208A CN112123208A CN202010070256.5A CN202010070256A CN112123208A CN 112123208 A CN112123208 A CN 112123208A CN 202010070256 A CN202010070256 A CN 202010070256A CN 112123208 A CN112123208 A CN 112123208A
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- 238000001514 detection method Methods 0.000 title claims abstract description 92
- 230000007246 mechanism Effects 0.000 title claims abstract description 65
- 239000013307 optical fiber Substances 0.000 claims abstract description 96
- 238000007689 inspection Methods 0.000 claims abstract description 75
- 238000006243 chemical reaction Methods 0.000 claims abstract description 37
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 238000010586 diagram Methods 0.000 description 5
- 239000000835 fiber Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
- B24B49/165—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load for grinding tyres
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dicing (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention provides a damage detection mechanism which can detect damage of a rotary blade with better detection sensitivity and SN ratio than the prior art. The optical fiber device includes a control unit, a light emitting unit, an emission side optical fiber, an irradiation range converting unit, an incident side lens, an incident side optical fiber, and a light receiving unit. The incident side lens is disposed at a position facing the irradiation range converting section with the rotary blade interposed therebetween. The light emitting section outputs inspection light. The emission-side optical fiber transmits the inspection light to the irradiation range conversion unit. The irradiation range converting section emits inspection light in a state where the diameter of the rotary blade is reduced. The incident side lens condenses the inspection light emitted through the irradiation range conversion unit and transmits the condensed inspection light to the incident side optical fiber. The incident-side optical fiber transmits the inspection light to the light receiving section. The light receiving unit converts the inspection light into an electric signal having an intensity corresponding to the amount of the light received. The control unit detects damage to the rotary blade based on an electrical signal transmitted from the light receiving unit.
Description
Technical Field
The present invention relates to a mechanism for detecting breakage of a rotary blade provided in a cutting device.
Background
The wafer on which the plurality of devices are formed is cut by, for example, a dicing apparatus having a rotary blade, and is divided into a plurality of chips corresponding to the respective devices. The rotary blade is circular and is attached to the tip end of the rotating spindle. The outer peripheral portion of the rotary blade becomes a cutting edge formed by bonding abrasive grains of diamond or the like with a bonding material. The wafer is cut by rotating the rotary blade to cut into the wafer.
The rotary blade may be damaged by a load during cutting, such as chipping. If the damaged rotary blade is continuously used, the workpiece may be damaged during cutting. Therefore, a mechanism for detecting such a trouble of the rotary blade is required.
As a mechanism for detecting damage of the rotary blade (damage detection mechanism), there is a technique using an optical fiber (for example, see patent document 1). The damage detection mechanism disclosed in patent document 1 includes an optical fiber (emission-side optical fiber) connected to the light emitting section and an optical fiber (incident-side optical fiber) connected to the light receiving section. An exit end of an exit-side optical fiber that emits light from the light emitting section and an entrance end of an entrance-side optical fiber that enters light emitted from the exit-side optical fiber are disposed opposite to each other with the rotary blade interposed therebetween.
In the breakage detection mechanism disclosed in patent document 1, when the rotary blade is not broken, at least a part of the light emitted from the light-emitting-side optical fiber is blocked by the cutting edge. Therefore, the amount of light received by the light receiving section is reduced by the light incident on the incident-side optical fiber. On the other hand, when the rotary blade is damaged, such as a flaw, the blocked light reaches the incident-side optical fiber, and the amount of received light increases. The light receiving unit converts the received light into an electrical signal. By detecting the electric signal, the CPU (Central Processing Unit) processes the electric signal, thereby detecting the damage of the rotary blade due to the increase of the light receiving amount.
Documents of the prior art
Patent document
Patent document 1: japanese unexamined patent application publication No. 2014-159064
Disclosure of Invention
Problems to be solved by the invention
Here, as a characteristic of the breakage detection mechanism using an optical fiber, light emitted from the emission end of the emission-side optical fiber is reflected repeatedly on the inner surface of the optical fiber, and as a result, for example, the ratio of 1: the refractive index of 1.5 is wide-angle light and is emitted. Since the corresponding incident-side optical fiber uses an optical fiber having the same outer diameter as that of the exit-side optical fiber, the incident-side optical fiber can receive only the amount of the diameter of the incident end in the light diffused in a conical shape.
Therefore, light is applied to the rotary blade in a wide range, and only a part of the light is incident on the incident-side optical fiber. Therefore, in the conventional damage detection mechanism, for example, when a minute defect or the like is detected, it is necessary to increase the gain of the detection amplifier. As a result, it is difficult to detect a minute defect or the like with high sensitivity in the conventional damage detection mechanism because of the amplifier characteristic that the response frequency is lowered when the gain is increased.
Further, between the outgoing-side optical fiber and the incoming-side optical fiber, light passing through the outer periphery of the rotary blade is scattered or reflected by the cutting water, and becomes noise that does not contribute to detection of the breakage. In the conventional damage detection mechanism, since light is emitted from the light-emitting-side optical fiber while being diffused in a conical shape as described above, the noise becomes a factor that increases the amount of light diffusion. Therefore, there is room for improvement in the SN ratio of the light received by the light receiving portion and the electrical signal converted therefrom.
Accordingly, an object of the present invention is to provide a damage detection mechanism capable of detecting damage of a rotary blade with a better detection sensitivity and SN ratio than in the related art.
Means for solving the problems
In order to solve the above problem, a damage detection mechanism of the present invention detects damage to a rotary blade of a flat plate-like body, the rotary blade being provided in a cutting device and including a 1 st main surface and a 2 nd main surface which are opposed to each other, and the 1 st main surface and the 2 nd main surface having a circular planar shape, the damage detection mechanism of the present invention includes a control unit, a light emitting unit, an emission-side optical fiber, an irradiation range conversion unit, an incident-side lens, an incident-side optical fiber, and a light receiving unit.
An incident side lens is arranged at a position opposite to the irradiation range conversion part through a rotary blade, the light emitting part outputs inspection light, the emergent side optical fiber transmits the inspection light output by the light emitting part to the irradiation range conversion part, the irradiation range conversion part emits the inspection light in a state of being reduced along the diameter of the rotary blade, the incident side lens condenses the inspection light emitted from the emergent side optical fiber through the irradiation range conversion part and transmits the condensed inspection light to the incident side optical fiber, the incident side optical fiber transmits the inspection light to a light receiving part, the light receiving part converts the inspection light transmitted from the incident side optical fiber into an electric signal with intensity corresponding to the light receiving amount and transmits the electric signal to a control part, and the control part detects the damage of the rotary blade based on the electric signal transmitted from the light receiving part.
Effects of the invention
In the damage detection mechanism of the present invention, the irradiation range conversion unit is provided, so that the irradiation range of the inspection light becomes narrow along the diameter of the rotary blade. Therefore, the inspection light of sufficient intensity can be irradiated to the rotary blade without increasing the gain of the detection amplifier. As a result, since it is not necessary to increase the gain of the sense amplifier, the response frequency is not lowered. Therefore, according to the breakage detection mechanism of the present invention, breakage of the rotary blade can be detected with high sensitivity.
In the damage detection mechanism of the present invention, the irradiation range of the inspection light is narrowed, so that the detection resolution per one rotation of the rotary blade is improved, and thus, the detection of a fine damage can be performed.
Further, since the irradiation range of the inspection light is narrowed, the noise which does not contribute to the damage detection is reduced, and therefore, the SN ratio of the electric signal which is received by the light receiving portion and converted from the light received by the light receiving portion is improved.
In the damage detection mechanism of the present invention, the irradiation range of the inspection light emitted as described above is narrowed along the diameter of the rotary blade, and therefore the direction of the damage detection can be defined as the direction along the diameter of the rotary blade. As a result, the detection sensitivity is improved. Therefore, according to the breakage detection mechanism of the present invention, even a slight breakage or the like can be reliably detected.
Drawings
Fig. 1 is a schematic view showing a breakage detection mechanism of the present invention.
Fig. 2 (a) and (B) are schematic diagrams showing an enlarged region surrounded by a broken line shown in fig. 1.
Fig. 3 is an enlarged schematic view of a region surrounded by a broken line shown in fig. 1.
Fig. 4 (a) is a schematic view of the rotary blade as viewed from the 1 st principal surface side, and fig. 4 (B) is a view showing the intensity of the electric signal transmitted to the control unit when the rotary blade shown in fig. 4 (a) is the inspection target.
Fig. 5 is a diagram showing a configuration example when the irradiation range conversion accessory is provided as the irradiation range conversion section.
Fig. 6 (a) and (B) are schematic views of the irradiation range conversion accessory shown in fig. 5, and fig. 6 (C) and (D) are views showing configuration examples when the irradiation range conversion part is formed as a part of the emission side optical fiber at the emission end part of the emission side optical fiber.
Fig. 7 (a) is a schematic view of the rotary blade having the slit formed therein as viewed from the 1 st principal surface side, and fig. 7 (B) is a view showing the intensity of an electric signal transmitted to the control unit when the rotary blade shown in fig. 7 (a) is a test target.
Description of the reference numerals
10 control part
20 drive part
30 light emitting part
40 emergent side optical fiber
41 irradiation range conversion accessory
50 light-emitting side lens
60 incident side lens
70 incident side optical fiber
80 light receiving part
90 amplifying part
100 breakage detection mechanism
200 rotating blade
Detailed Description
The embodiments of the present invention will be described below with reference to the drawings, but the shapes, sizes, and arrangement relationships of the respective constituent elements are schematically illustrated only to the extent that the present invention can be understood. In addition, although preferred configuration examples of the present invention will be described below, the material and numerical conditions of the respective components are merely preferred examples. Therefore, the present invention is not limited to the following embodiments, and various modifications and variations that can achieve the effects of the present invention can be made without departing from the scope of the structure of the present invention.
(Structure)
The structure of the breakage detection mechanism of the present invention will be described with reference to fig. 1, 2, and 3. Fig. 1 is a schematic view showing a breakage detection mechanism. Fig. 2 (a), (B), and 3 are enlarged views of the region surrounded by the broken line shown in fig. 1, and are schematic diagrams showing the arrangement relationship between the emission-side lens, the incidence-side lens, and the rotary blade to be inspected, which will be described later. Fig. 2 (a) is a view of the exit side lens, the entrance side lens, and the rotary blade viewed from a plane orthogonal to the longitudinal direction of the entrance side lens, and fig. 2 (B) is a view of the exit side lens, the entrance side lens, and the rotary blade viewed from a plane orthogonal to the longitudinal direction of the exit side lens. Fig. 3 is a view of the exit side lens, the entrance side lens, and the rotary blade viewed from the 2 nd principal surface side of the rotary blade.
The damage detection mechanism 100 is configured to include a control unit 10, a drive unit (DRIVER)20, a light emitting unit 30, an emission-side optical fiber 40, an emission-side lens 50 as an irradiation range conversion unit, an incidence-side lens 60, an incidence-side optical fiber 70, a light receiving unit 80, and an amplification unit (AMP) 90.
In the damage detection mechanism 100, the rotary blade 200 to be inspected is disposed between the emission-side lens 50 and the incidence-side lens 60. The rotary blade 200 is a flat plate-like body including a 1 st main surface 200a and a 2 nd surface 200b facing each other, and the 1 st main surface 200a and the 2 nd surface 200b have a circular planar shape.
The rotary blade 200 is mounted to a front end portion of the spindle 250 in a cutting device (not shown). The main shaft 250 is connected to the rotary blade 200 from a direction orthogonal to the 1 st main surface 200a and the 2 nd main surface 200b of the rotary blade 200 at the center of the 1 st main surface 200a or the 2 nd main surface 200b side. The rotary blade 200 can rotate about a connecting portion with the spindle 250 as a rotation axis in conjunction with the rotation of the spindle 250.
In the following description, a plane along the 1 st main surface 200a and the 2 nd main surface 200b of the rotary blade 200 is referred to as a Y-Z axis plane, and a direction orthogonal to the 1 st main surface 200a and the 2 nd main surface 200b is referred to as an X axis direction.
The driving unit 20 transmits a driving signal to the light emitting unit 30 based on an instruction from the control unit 10.
The light emitting unit 30 outputs inspection light in accordance with the drive signal transmitted from the drive unit 20. As the light emitting section 30, any suitable light emitting element such as an LD (Laser Diode) can be used.
The emission-side optical fiber 40 is connected to the light emitting section 30 at one end 40a side. The other end 40b of the emission-side optical fiber 40 is optically connected to the emission-side lens 50. The emission-side optical fiber 40 transmits the inspection light output from the light-emitting section 30. The emission-side optical fiber 40 transmits the inspection light from the other end 40b to the emission-side lens 50.
The exit side lens 50 and the entrance side lens 60 are so-called cylindrical lenses. As the cylindrical lens, a cylindrical lens having a cylindrical shape, a semi-cylindrical shape, or a shape in which a cylinder is cut out in a plane along the height direction can be used. Fig. 2 (a) and 2 (B) show examples of structures provided with a semi-cylindrical exit-side lens 50 and an entrance-side lens 60, respectively. Therefore, here, the exit side lens 50 includes a flat surface 50a along the longitudinal direction (height direction of the cylindrical shape) and a curved surface 50b having a curvature center on the flat surface 50 a. The incident side lens 60 includes a flat surface 60a along the longitudinal direction and a curved surface 60b having a center of curvature on the flat surface 60 a.
The light-emitting side lens 50 is disposed so that the longitudinal direction of the light-emitting side lens 50 is along the 1 st main surface 200a of the rotary blade 200 (along the Y-Z axis plane) and along the diameter of the rotary blade 200. In addition, here, the exit side lens 50 is provided such that the longitudinal direction thereof is along the Z-axis direction.
The light-emitting lens 50 is optically connected to the other end 40b of the light-emitting fiber 40 on the flat surface 50a side. The light-emitting-side lens 50 is disposed such that the curved surface 50b faces the 1 st main surface 200a of the rotary blade 200. Further, the emission-side lens 50 is positioned at a position overlapping the rotary blade 200 and at a position where a part of one bottom surface side of the semi-cylindrical shape protrudes from the outer periphery of the rotary blade 200 in the Y-Z plane view.
The incident side lens 60 is disposed at a position facing the exit side lens 50 with the rotary blade 200 interposed therebetween. The incident side lens 60 is disposed along the 2 nd main surface 200b of the rotary blade 200 (along the Y-Z axis plane) in the longitudinal direction of the incident side lens 60 and along the direction orthogonal to the longitudinal direction of the exit side lens 50. As described above, here, since the longitudinal direction of the exit side lens 50 is along the Z-axis direction, the incident side lens 60 is disposed such that the longitudinal direction thereof is along the Y-axis direction.
The incident side lens 60 is optically connected to one end 70a of the incident side optical fiber 70 on the plane 60a side. The incident side lens 60 is disposed such that the curved surface 60b faces the 2 nd main surface 200b of the rotary blade 200. Further, the incident side lens 60 is positioned at a position overlapping the rotary blade 200 in the Y-Z axis plane view.
By arranging the emission-side lens 50 and the incidence-side lens 60 in the above-described relationship, the longitudinal direction of the emission-side lens 50 and the longitudinal direction of the incidence-side lens 60 are orthogonal to each other in the Y-Z plane view. When detecting a breakage of the rotary blade 200, it is preferable that the intersecting portion of the exit side lens 50 and the entrance side lens 60 orthogonal to each other is positioned so as to overlap the vicinity of the outer peripheral portion of the rotary blade 200 in the Y-Z plane view.
One end 70a of the incident side optical fiber 70 is optically connected to the incident side lens 60. The incident side optical fiber 70 is connected to the light receiving unit 80 on the other end 70b side. The inspection light condensed by the incident side lens 60 is sent to the incident side optical fiber 70. The incident side optical fiber 70 transmits the inspection light to the light receiving portion 80.
The light receiving unit 80 converts the inspection light transmitted from the incident side optical fiber 70 into an electric signal having an intensity corresponding to the amount of the received light, and transmits the electric signal to the amplifying unit 90. As the light receiving unit 80, for example, any suitable light receiving element such as a PD (Photo Diode) can be used.
The amplifier 90 is a so-called sense amplifier, and amplifies the electric signal transmitted from the light receiving unit 80 and transmits the amplified signal to the control unit 10.
The control unit 10 is constituted by, for example, a CPU, and controls the operation of the entire damage detection mechanism 100. The control unit 10 executes various processes according to a predetermined control program. The results of these processes and the like are appropriately stored in a storage device such as a RAM.
The control unit 10 controls the output of the inspection light from the light emitting unit 30 by sending an instruction to the drive unit 20. The control unit 10 detects the breakage of the rotary blade 200 based on the electric signal transmitted from the light receiving unit 80 via the amplifying unit 90.
(operation)
In the damage detection mechanism 100, the inspection light output from the light emitting section 30 is output through the output side optical fiber 40. The inspection light emitted from the emission-side optical fiber 40 is irradiated to the rotary blade 200 via the emission-side lens 50.
As described above, the exit side lens 50 is provided with its length direction along the diameter of the rotary blade 200. Therefore, the inspection light is condensed only in a direction along the diameter of the rotary blade 200 (here, the Z-axis direction). On the other hand, the inspection light is irradiated to the rotary blade 200 in a state of being condensed in a direction (here, Y-axis direction) orthogonal to the longitudinal direction of the emission-side lens 50 by the action of the curved surface 50b of the emission-side lens 50.
Further, the incident side lens 60 is disposed such that the longitudinal direction thereof is along a direction orthogonal to the longitudinal direction of the exit side lens 50. Therefore, the inspection light expanding in the direction along the diameter of the rotary blade 200 (in this case, the Z-axis direction) can be efficiently incident through the exit side lens 50.
The inspection light incident on the incident side lens 60 is transmitted to the light receiving unit 80 via the incident side optical fiber 70. The inspection light input to the light receiving portion 80 is converted into an electrical signal. The intensity of the electric signal corresponds to the intensity (light receiving amount) of the inspection light input to the light receiving unit 80. The electric signal is amplified by the amplifier 90 and then sent to the controller 10. The controller 10 detects the breakage of the rotary blade 200 based on the electric signal.
If there is no defect in the rotary blade 200, the inspection light emitted from the emission-side lens 50 is blocked by the rotary blade 200, and therefore does not reach the incidence-side lens 60 except for a part passing through the outside of the rotary blade 200.
On the other hand, when damage such as damage or crack occurs in the rotary blade 200, the inspection light passes through the damaged portion and reaches the incident side lens 60. At the time of inspection, since the rotary blade 200 rotates, the amount of light received by the light receiving unit 80 increases at the time when the inspection light passes through the damaged portion. The larger the degree of damage, the larger the amount of light received by the light receiving unit 80.
With reference to fig. 4 (a) and 4 (B), a description will be given of a relationship between breakage of the rotary blade 200 and the intensity of an electric signal transmitted to the control unit 10 of the breakage detection mechanism 100.
Fig. 4 (a) is a schematic view of the rotary blade 200 as viewed from the 1 st main surface 200a side. Here, the rotary blade 200 has two portions, i.e., two portions, which are broken (chipped) 201 and 202. In fig. 4 (a), the damage detection mechanism 100 indicates an irradiation range of the inspection light irradiated to the rotary blade 200 by a reference numeral 101. In contrast, when the damage detection mechanism having the conventional configuration is used, the irradiation range of the inspection light to be irradiated to the rotary blade 200 is indicated by a symbol 151. The breakage detection mechanism of the conventional structure is a structure in which the emission side lens 50 and the incidence side lens 60 are omitted from the breakage detection mechanism 100.
Fig. 4 (B) is a graph showing the intensity of the electric signal transmitted to the control unit 10 when the rotary blade 200 shown in fig. 4 (a) is the inspection target. In fig. 4 (B), the horizontal axis represents time in arbitrary units, and the vertical axis represents the intensity of the electric signal in arbitrary units. A curve 301 in (B) in fig. 4 shows the intensity of the electric signal when the breakage detection mechanism 100 of the present invention is used. Further, a curve 351 in fig. 4 (B) shows the intensity of the electric signal when the breakage detection mechanism of the conventional structure is used.
Since the inspection light emitted from the emission-side lens 50 is blocked by the rotary blade 200 at a portion of the rotary blade 200 where there is no defect, the inspection light does not reach the incidence-side lens 60 except for a portion passing through the outside of the rotary blade 200.
On the other hand, the inspection light passes through the damaged portions where the damages 201 and 202 are generated in the rotary blade 200 and reaches the incident side lens 60. At the time of inspection, the rotary blade 200 is rotated, for example, in the direction of an arrow shown in fig. 4 (a). Therefore, as shown in fig. 4 (B), when the inspection light passes through the damaged portion, the amount of light received by the light receiving unit 80 increases, and the intensity of the electrical signal increases. The greater the degree of breakage, the greater the intensity of the electrical signal.
In the breakages 201 and 202 in the example of (a) in fig. 4, the breakage of the rotary blade 200 in the breakage 202 is larger than the breakage 201. Therefore, the intensity of the electrical signal has a small peak when the inspection light passes through the portion of the damage 201, and a large peak when the inspection light passes through the portion of the damage 202.
Here, since the conventional damage detection mechanism is not provided with the emission-side lens 50, the inspection light is irradiated to the rotary blade 200 in a state where the irradiation range 151 is enlarged in a circular shape. Therefore, the amount of received inspection light passing through the outer periphery of the rotary blade 200 increases. As a result, noise that does not contribute to detection of breakage becomes large, and thus the SN ratio of the light received by the light receiving portion and the electrical signal converted from the light is degraded.
Further, the conventional breakage detection mechanism is not provided with: as described above, the incident side lens 60 expands the irradiation range 151 of the inspection light in a circular shape and collects the inspection light expanded in the circular shape. Therefore, in the conventional breakage detection mechanism, as shown by a curve 351 in fig. 4 (B), a sharp peak cannot be obtained in the intensity of the electric signal, and the detection sensitivity deteriorates. Therefore, it is difficult to detect a slight damage or the like in the damage detection mechanism of the conventional configuration.
On the other hand, in the damage detection mechanism 100, the emission side lens 50 is provided, so that the irradiation range 101 of the inspection light becomes narrow along the diameter of the rotary blade 200. Therefore, the detection resolution per one rotation of the rotary blade is improved, and thus, the detection of the fine damage can be performed. Further, since the irradiation range of the inspection light is narrowed, the noise which does not contribute to the detection of the damage is reduced, and therefore, the SN ratio of the electric signal received by the light receiving unit 80 and converted from the received light is improved as compared with the conventional configuration.
In addition, the breakage detection mechanism 100 is provided with: and an incident side lens 60 which narrows the irradiation range 101 of the inspection light emitted as described above along the diameter of the rotary blade 200 and collects the inspection light having a reduced size. Therefore, in the damage detection mechanism 100, the direction of damage detection can be defined as a direction along the diameter of the rotary blade 200. As a result, as shown by a curve 301 in fig. 4 (B), a sharp peak is obtained in the intensity of the electric signal, and the detection sensitivity is improved. Therefore, the damage detection mechanism 100 can reliably detect even a slight damage or the like.
In this way, in the breakage detection mechanism 100, the detection sensitivity and the SN ratio can be improved with respect to the breakage detection mechanism of the conventional configuration.
In the breakage detection mechanism 100, even in a state where the rotary blade 200 is worn (that is, a state where the diameter of the rotary blade 200 is shortened), if the outer periphery of the rotary blade 200 enters the irradiation range of the detection light, breakage can be detected without changing the arrangement of the emission-side optical fiber 40, the emission-side lens 50, the incidence-side lens 60, and the incidence-side optical fiber 70. As described above, in the breakage detection mechanism 100, the detection light is narrowed and expanded along the diameter of the rotary blade 200 by the emission side lens 50, and the narrowed and expanded detection light can be condensed by the incidence side lens 60. Therefore, the frequency of changing the arrangement of the emission side optical fiber 40, the emission side lens 50, the incidence side lens 60, and the incidence side optical fiber 70 can be suppressed to a small extent by the abrasion of the rotary blade 200.
Here, in the configuration examples shown in fig. 1 and 2, a configuration in which both the emission-side lens 50 and the incidence-side lens 60 are cylindrical lenses is described. However, in the damage detection mechanism 100, one of the emission-side lens 50 and the incidence-side lens 60 may be a cylindrical lens, and the other may be a lens other than the cylindrical lens (for example, a so-called spherical lens).
Even when only the exit side lens 50 is a cylindrical lens, the rotary blade 200 can be irradiated with the inspection light in a state where the diameter of the rotary blade 200 is reduced. As a result, the sensitivity and the SN ratio can be improved as compared with the conventional structure.
Even when only the incident-side lens 60 is a cylindrical lens, the inspection light can be condensed in a direction along the diameter of the rotary blade 200 and can be made incident on the incident-side lens 60. As a result, the direction of the damage detection can be limited to the direction along the diameter of the rotary blade 200, and therefore, the detection sensitivity can be improved as compared with the conventional configuration.
In the configuration examples shown in fig. 1 and 2, the configuration in which the damage detection mechanism 100 includes the emission-side lens 50 as the irradiation range conversion unit is described. However, the structure of the irradiation range converting section is not limited to the emission side lens 50. Another configuration example of the irradiation range conversion unit will be described with reference to fig. 5 and 6.
First, referring to fig. 5 a and 5B and fig. 6 a and 6B, a description will be given of a configuration example in which an irradiation range conversion attachment (hereinafter, also simply referred to as an attachment) is provided as the irradiation range conversion portion instead of the emission side lens.
Fig. 5 (a) and 5 (B) are schematic diagrams showing a configuration example when an accessory is provided as the irradiation range conversion unit. Fig. 5 (a) and 5 (B) correspond to fig. 2 (a) and 2 (B) with respect to position and direction. Fig. 6 (a) and 6 (B) are schematic diagrams showing the exit-side optical fiber and the accessory shown in fig. 5 (a) and 5 (B) in an enlarged manner. Fig. 6 (a) shows the exit-side optical fiber and the accessory separated from each other, and fig. 6 (B) shows the accessory attached to the exit-side optical fiber.
The attachment 41 is constituted by, for example, a circular flat plate-like body having a front surface 41a and a back surface 41b opposed to each other. A slit 42 is formed in the attachment 41. The slit 42 has a long and narrow rectangular shape when viewed from the front surface 41a, and is formed to penetrate from the front surface 41a to the back surface 41b of the attachment 41.
The attachment 41 is attached to the emission end (the other end) 40B of the emission side fiber 40 so as to cover the entire emission end 40B (see fig. 6 a and 6B). Here, the rear surface 41b side is opposed to the emission end 40b of the emission-side optical fiber 40, and the accessory 41 is attached to the emission-side optical fiber 40.
The attachment 41 is attached to the exit side optical fiber 40 so that the longitudinal direction of the slit 42 of the attachment 41 is along the 1 st main surface 200a of the rotary blade 200 (along the Y-Z axis plane) and along the diameter of the rotary blade 200. Here, the slit 42 of the attachment 41 is positioned so that the longitudinal direction is along the Z-axis direction.
The attachment 41 and the exit-side optical fiber 40 are disposed so that the surface 41a of the attachment 41 faces the 1 st main surface 200a of the rotary blade 200. Further, the slit 42 of the attachment 41 is positioned at a position overlapping the rotary blade 200 in the Y-Z axis plane view.
The incident side lens 60 is disposed at a position facing the attachment 41 with the rotary blade 200 interposed therebetween. The incident side lens 60 is disposed along the 2 nd main surface 200b of the rotary blade 200 (along the Y-Z axis plane) in the longitudinal direction of the incident side lens 60 and in the direction orthogonal to the longitudinal direction of the slit 42 of the attachment 41. As described above, here, since the longitudinal direction of the slit 42 of the attachment 41 is along the Z-axis direction, the incident side lens 60 is disposed such that the longitudinal direction thereof is along the Y-axis direction.
In the breakage detection mechanism provided with the attachment 41 as the irradiation range conversion unit, the emission end 40b of the emission side optical fiber 40 is covered with the attachment 41. Thereby, the inspection light from the emission side optical fiber 40 is partially shielded by the attachment 41 and is emitted from the slit 41.
As a result, the irradiation range of the inspection light becomes narrow along the diameter of the rotary blade 200, similarly to the configuration in which the emission-side lens 50 is provided as the irradiation range conversion unit. Therefore, the detection resolution per one rotation of the rotary blade is improved, and thus, the detection of a fine damage can be performed. Further, since the irradiation range of the inspection light is narrowed, the noise which does not contribute to the detection of the damage is reduced, and therefore, the SN ratio of the electric signal received by the light receiving unit 80 and converted from the received light is improved as compared with the conventional configuration.
Next, a description will be given of a configuration example in which an irradiation range conversion portion as a part of the emission-side optical fiber 40 is formed at the emission end portion of the emission-side optical fiber 40 instead of providing the emission-side lens and the attachment, with reference to (C) and (D) in fig. 6. Fig. 6 (C) is an enlarged schematic view of the emission end of the emission-side optical fiber. Fig. 6 (D) is a schematic view of the emission end portion of the emission-side optical fiber as viewed from the hollow arrow direction shown in fig. 6 (C).
In the case where the irradiation range converting portion is formed at the output end portion of the output side optical fiber 40, the output side optical fiber 40 is partially cut from the side surface 40c to the output end 40b of the output side optical fiber 40 at the output end portion of the output side optical fiber 40. As a result, the emission end of the emission side fiber 40 becomes thinner toward the tip of the emission end 40 b. The irradiation range converting section 43 is configured as an emission end portion of the emission side optical fiber 40 formed to be tapered.
The surface shape of the emission end 43a of the irradiation range converting section 43 (the emission end 40b of the emission-side optical fiber 40) is formed in an elongated rectangular shape. Fig. 6 (C) and 6 (D) show an example of a configuration in which the light-emitting fibers 40 are cut out symmetrically from positions facing each other with the light-emitting fibers 40 interposed therebetween.
In the irradiation range converting section 43, light shielding processing such as providing a light shielding plate is performed on the cut surfaces 43b and 43c between the side surface 40c and the emission end 40b (43a) of the emission side optical fiber 40, which is generated by partially cutting off the emission side optical fiber 40. This can prevent the inspection light emitted from the emission-side optical fiber 40 from scattering from the cut surfaces 43b and 43 c.
The emission-side optical fiber 40 including the irradiation range converting part 43 is positioned so that the longitudinal direction of the emission end 43a of the irradiation range converting part 43 is along the 1 st principal surface 200a of the rotary blade 200 (along the Y-Z axis plane) and along the diameter of the rotary blade 200. Here, for example, the emission end 43a of the irradiation range converting section 43 is positioned such that the longitudinal direction thereof is along the Z-axis direction.
The emission-side optical fiber 40 including the irradiation range conversion section 43 is disposed such that the emission end 43a faces the 1 st main surface 200a of the rotary blade 200. Further, the emission end 43a of the irradiation range converting section 43 is positioned to overlap the rotary blade 200 in the Y-Z plane view.
The incident side lens 60 is disposed at a position facing the emission end 43a of the irradiation range conversion unit 43 with the rotary blade 200 interposed therebetween. The incident side lens 60 is disposed so that the longitudinal direction of the incident side lens 60 is along the 2 nd main surface 200b of the rotary blade 200 (along the Y-Z axis plane) and along the direction orthogonal to the longitudinal direction of the emission end 43a of the irradiation range converting unit 43. When the longitudinal direction of the emission end 43a of the irradiation range conversion section 43 is along the Z-axis direction, the incident side lens 60 is disposed such that the longitudinal direction thereof is along the Y-axis direction.
In the damage detection mechanism in which the irradiation range conversion section 43 is formed at the emission end of the emission side optical fiber 40, the emission end 43a has an elongated rectangular shape. As a result, similarly to the configuration in which the emission side lens 50 is provided as the irradiation range conversion portion, the irradiation range of the inspection light emitted from the emission side optical fiber 40 is narrowed along the diameter of the rotary blade 200. Therefore, the detection resolution per one rotation of the rotary blade is improved, and thus, the detection of a fine damage can be performed. Further, since the irradiation range of the inspection light is narrowed, the noise which does not contribute to the detection of the damage is reduced, and therefore, the SN ratio of the electric signal received by the light receiving unit 80 and converted from the received light is improved as compared with the conventional configuration.
In any of the configuration in which the attachment 41 is provided as the irradiation range conversion section and the configuration in which the irradiation range conversion section 43 is formed at the emission end of the emission side optical fiber 40, the incident side lens 60 may be a lens other than a cylindrical lens (for example, a so-called spherical lens).
Here, in order to improve the cutting effect, there is a rotary blade formed with a slit. The relationship between the rotary blade 200 having the slit formed therein and the intensity of the electric signal transmitted to the control unit 10 of the damage detection mechanism 100 will be described with reference to fig. 7 (a) and 7 (B).
Fig. 7 (a) is a schematic view of the rotary blade 200 having the slit formed therein, as viewed from the 1 st main surface 200a side. Fig. 7 (B) is a graph showing the intensity of the electric signal transmitted to the control unit 10 when the rotary blade 200 shown in fig. 7 (a) is the inspection target. In fig. 7 (B), the horizontal axis represents time in arbitrary units, and the vertical axis represents the intensity of the electric signal in arbitrary units. A curve 401 in fig. 7 (B) shows the intensity of the electric signal when the breakage detection mechanism 100 of the present invention is used. A curve 451 in fig. 7 (B) shows the intensity of the electric signal when the breakage detection mechanism of the conventional structure described above is used.
A plurality of slits 270 are periodically formed in the rotary blade 200 shown in fig. 7 (a). Each slit 270 is formed by partially removing the rotary blade 200 in a direction from the outer periphery of the rotary blade 200 toward the center (i.e., along the diameter). Further, in the rotary blade 200 shown in fig. 7 (a), a breakage 203 is generated in the slit 270-1.
In the damage detection mechanism 100, the irradiation range of the inspection light emitted as described above is narrowed along the diameter of the rotary blade 200. Therefore, in the damage detection mechanism 100, the inspection light can be irradiated along the formation direction of the slit 270. Therefore, as shown in fig. 7 (B), the intensity of the electric signal can obtain a sharp peak at the formation position of each slit 270. Further, the shape of the peak changes in the slit 270-1 whose shape is changed by the breakage 203 and the slit 270-2 in which the breakage is not generated. In this way, in the breakage detection mechanism 100, even in the rotary blade 200 in which the slit 270 is formed, breakage occurring in the slit 270 can be detected with high detection sensitivity and SN ratio.
Claims (7)
1. A damage detection mechanism for detecting damage to a rotary blade of a flat plate-like body, the rotary blade being provided in a cutting device and including a 1 st principal surface and a 2 nd principal surface which are opposed to each other, the 1 st principal surface and the 2 nd principal surface having a circular planar shape,
comprises a control unit, a light emitting unit, an emission side optical fiber, an irradiation range converting unit, an incident side lens, an incident side optical fiber, and a light receiving unit,
the incident side lens is disposed at a position facing the irradiation range converting section with the rotary blade interposed therebetween,
the light-emitting section outputs an inspection light,
the emission-side optical fiber transmits the inspection light output by the light emitting section to the irradiation range conversion section,
the irradiation range converting section emits the inspection light in a state where the diameter of the rotary blade is narrowed,
the incident side lens condenses the inspection light emitted from the emission side optical fiber through the irradiation range conversion part and transmits the condensed inspection light to the incident side optical fiber,
the incident-side optical fiber transmits the inspection light to the light receiving section,
the light receiving unit converts the inspection light transmitted from the incident-side optical fiber into an electrical signal having an intensity corresponding to the amount of light received, and transmits the electrical signal to the control unit,
the control unit detects breakage of the rotary blade based on an electric signal transmitted from the light receiving unit.
2. The breakage detection mechanism according to claim 1,
the irradiation range converting section includes an emission side lens,
the exit side lens is a cylindrical lens,
the light-emitting side lens is disposed along the 1 st principal surface of the rotary blade and along the diameter of the rotary blade in the longitudinal direction.
3. The breakage detection mechanism according to claim 2,
the incident-side lens is a cylindrical lens,
the longitudinal direction of the incident-side lens is arranged along the 2 nd main surface of the rotary blade and along a direction orthogonal to the longitudinal direction of the exit-side lens.
4. The breakage detection mechanism according to claim 1,
the irradiation range conversion unit includes an irradiation range conversion attachment attached to the emission end of the emission side optical fiber and covering the entire emission end,
a slit having a long and narrow rectangular shape is formed in the irradiation range conversion attachment, the slit penetrating the irradiation range conversion attachment,
the irradiation range conversion attachment is provided such that a longitudinal direction of the slit is along a 1 st main surface of the rotary blade and along a diameter of the rotary blade.
5. The breakage detection mechanism according to claim 4,
the incident-side lens is a cylindrical lens,
the longitudinal direction of the incident side lens is arranged along the 2 nd main surface of the rotary blade and along a direction orthogonal to the longitudinal direction of the slit.
6. The breakage detection mechanism according to claim 1,
the irradiation range converting section is configured as an emission end portion of the emission side optical fiber, the emission end portion is shaped so that a tip thereof becomes thinner toward an emission end,
the shape of the exit end is shaped as an elongated rectangular shape,
the emission-side optical fiber includes the irradiation range conversion section, and the emission-side optical fiber is provided such that a longitudinal direction of the emission end is along a 1 st principal surface of the rotary blade and along a diameter of the rotary blade.
7. The breakage detection mechanism according to claim 6,
the incident-side lens is a cylindrical lens,
the longitudinal direction of the incident-side lens is arranged along the 2 nd main surface of the rotary blade and along a direction orthogonal to the longitudinal direction of the emission end.
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| JP2018228254 | 2018-12-05 | ||
| JP2019-116789 | 2019-06-24 | ||
| JP2019116789A JP6661109B1 (en) | 2018-12-05 | 2019-06-24 | Damage detection mechanism |
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| CN112123208A true CN112123208A (en) | 2020-12-25 |
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| CN202010070256.5A Pending CN112123208A (en) | 2018-12-05 | 2020-01-21 | Breakage detection mechanism |
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| JP (1) | JP6661109B1 (en) |
| CN (1) | CN112123208A (en) |
| TW (1) | TWI762870B (en) |
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| CN114755239A (en) * | 2022-06-13 | 2022-07-15 | 江苏京创先进电子科技有限公司 | Blade damage detection method and system |
| CN117949023A (en) * | 2024-03-27 | 2024-04-30 | 珠海博杰电子股份有限公司 | Cutting tool breakage detection method |
| CN117949023B (en) * | 2024-03-27 | 2024-06-04 | 珠海博杰电子股份有限公司 | Cutting tool breakage detection method |
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Also Published As
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| JP2020096159A (en) | 2020-06-18 |
| TW202100296A (en) | 2021-01-01 |
| TWI762870B (en) | 2022-05-01 |
| JP6661109B1 (en) | 2020-03-11 |
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