CN112113553A - Gyro full-matching tuning electrode - Google Patents
Gyro full-matching tuning electrode Download PDFInfo
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- CN112113553A CN112113553A CN202010967592.XA CN202010967592A CN112113553A CN 112113553 A CN112113553 A CN 112113553A CN 202010967592 A CN202010967592 A CN 202010967592A CN 112113553 A CN112113553 A CN 112113553A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
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Abstract
The invention discloses a gyroscope full-matching tuning electrode.A grid structure of the tuning electrode in a driving mode and a detection mode is arranged on a central mass block, and the central mass block can freely move in the driving mode direction and the detection mode direction; the two tuning electrodes in the driving mode are symmetrically distributed on the central mass block and are parallel to each other; the two tuning electrodes of the detection module are symmetrically distributed on the central mass block and are parallel to each other; the direction of the tuning electrode of the driving mode is perpendicular to the direction of the tuning electrode of the detection module. The grid structures of the tuning electrodes in the driving mode and the detection mode are directly arranged on the central mass block, so that the proportion of the mass of the central mass block to the total mass is increased, and the mechanical sensitivity of the gyroscope is increased; and under the condition of a certain total area, the grid structure of the tuning electrode is placed on the central mass block, so that the space of the central mass block can be fully utilized.
Description
Technical Field
The invention belongs to the field of micromechanical gyroscopes, and particularly relates to a gyroscope full-matching tuning electrode.
Background
The driving mode and the detection mode of the full-symmetry gyroscope are designed in a full-symmetry mode, and the resonance frequencies of the driving mode and the detection mode have the same design value. The mode matching is called when the resonance frequencies of the driving mode and the detection mode are equal, and the gyroscope has the maximum mechanical sensitivity at the moment, so that the angular velocity detection precision of the gyroscope can be effectively improved. However, in actual processing, due to process errors, the resonant frequencies of the driving mode and the detection mode often have a certain difference. In order to eliminate this difference in resonant frequency and thereby achieve mode matching, a frequency trimming method, also called tuning, is often used. Frequency trimming generally includes mechanical trimming and electrostatic trimming, wherein electrostatic trimming has a wide range of applications because it can still perform a tuning function after the gyroscope is packaged. Electrostatic trimming is typically accomplished using a tuning electrode. The double decoupling gyroscope mainly comprises a driving mode frame, a detection mode frame and a central mass block, wherein the existing tuning electrodes are usually respectively designed and placed on the driving mode frame and the detection mode frame, so that the mass of the driving mode frame and the mass of the detection mode frame are correspondingly increased, and the mechanical sensitivity of the double decoupling gyroscope is reduced.
Disclosure of Invention
The invention aims to provide a tuning electrode with a fully matched gyroscope, which can be used for simultaneously tuning a driving mode and a detection mode of a micromechanical gyroscope.
In order to solve the technical problems, the invention provides a gyroscope full-matching tuning electrode, which mainly comprises a driving modal frame, a detection modal frame and a central mass block, wherein the tuning electrode comprises a grid structure and a metal electrode, the grid structures of the tuning electrodes of the driving modal frame and the detection modal frame are arranged on the central mass block, and the central mass block can freely move in the driving modal direction and the detection modal direction;
the two tuning electrodes of the driving modal frame are symmetrically distributed on the central mass block and are parallel to each other; the two tuning electrodes of the detection module frame are symmetrically distributed on the central mass block and are parallel to each other; the direction of the tuning electrode of the driving mode frame is perpendicular to the direction of the tuning electrode of the detection module frame.
In the above technical solution, further, the metal electrode is zigzag.
Further, the tuning electrodes of the driving mode frame and the detection mode frame are independent of each other, and the tuning directions include the following 4 cases:
the drive mode is tuned upwards, and the detection mode is tuned downwards;
upward tuning of a driving mode and upward tuning of a detection mode;
the drive mode is tuned downwards, and the detection mode is tuned upwards;
the drive mode is tuned down and the detection mode is tuned down.
Furthermore, the drive mode is tuned downwards, and the detection mode is tuned upwards, so that the method is suitable for the condition that the resonance frequency of the drive mode of the machined micro-mechanical gyroscope is greater than the resonance frequency of the detection mode due to process errors.
Furthermore, the drive mode is tuned upwards, and the detection mode is tuned downwards, so that the method is suitable for the condition that the resonance frequency of the drive mode of the machined micro-mechanical gyroscope is smaller than the resonance frequency of the detection mode due to process errors.
The tuning electrode can generate an electrostatic force which is proportional to the displacement of the mass block and is on the same straight line with the displacement direction of the mass block on the mass block, and equivalent rigidity is changed, so that the resonant frequency of a mode is changed. The generated electrostatic force acts on the resonance frequency of the mode only, and the motion of the mass block is not influenced. Depending on the direction in which the electrostatic force is generated, the resonant frequency of the mode may be increased or decreased.
The double-mode decoupling micro-mechanical gyroscope has the advantages that the driving mode and the detection mode are nearly completely symmetrical, and the motions of the two modes are decoupled mutually, and the central mass block belongs to the driving mode and the detection mode simultaneously and has two-direction freedom degrees. The tuning electrode is arranged on the central mass block, and the central mass block can move in the driving mode direction and the detection mode direction at the same time, so that the tuning electrode arranged on the central mass block can tune the resonant frequency of the driving mode and the detection mode at the same time.
The invention has the beneficial effects that:
when the tuning electrode provided by the invention is used for tuning the resonance frequencies of the driving mode and the detection mode at the same time, the changes of the resonance frequencies of the two modes cannot influence each other. The grid structures of the tuning electrodes of the driving modal frame and the detection modal frame are all directly arranged on the central mass block, so that the proportion of the mass of the central mass block to the total mass is increased (namely the mass of the central mass block is increased relative to the mass of the driving modal frame and the mass of the detection modal frame), the Coriolis force formed by unit angular velocity input is increased, the mechanical sensitivity of the gyroscope is increased, and the performance is better; moreover, under the condition of a certain total area, the tuning electrode is placed on the central mass block, so that the space of the central mass block can be fully utilized.
Drawings
FIG. 1 is a top view of a center mass tuned gyroscope;
FIG. 2 is a top view of the tuning electrode in the Y direction;
FIG. 3 is a different state of motion of the tuning electrode in the Y direction;
FIG. 4 is a diagram showing different states of motion of the tuning electrode in the X direction;
FIG. 5 is a top view of the Y-direction down tuning electrode;
fig. 6 is a top view of the X-direction down tuning electrode.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, the movable mass of a center mass tuning gyroscope consists essentially of five parts: first movable mass 9, third movable mass 11 in the X direction; second and fourth movable masses 10 and 12 in the Y direction; a central mass 21.
The first anchor region 1, the second anchor region 2, the third anchor region 3 and the fourth anchor region 4 are fixed with a glass substrate (not shown) through anodic bonding, and the first anchor region 1, the second anchor region 2, the third anchor region 3 and the fourth anchor region 4 can be regarded as static and do not move in a gyroscope reference system.
The first movable mass 9 in the X direction is connected to the first anchor region 1 via the first elastic beam 5, and the stiffness of the first elastic beam 5 in the Y direction is much greater than the stiffness in the X direction, so that the first movable mass 9 has only a translational degree of freedom in the X direction. The third movable mass 11 in the X direction is connected to the third anchor area 3 via the third elastic beam 7, and the stiffness of the third elastic beam 7 in the Y direction is much greater than the stiffness in the X direction, so that the third movable mass 11 has only a translational degree of freedom in the X direction. The second movable mass 10 in the Y direction is connected to the second anchor region 2 via a second elastic beam 6, and the second elastic beam 6 has a much greater stiffness in the X direction than in the Y direction, so that the second movable mass 10 has only a translational degree of freedom in the Y direction. The fourth movable mass 12 in the Y direction is connected to the fourth anchor region 4 via a fourth spring beam 8, and the stiffness of the fourth spring beam 8 in the X direction is much greater than the stiffness in the Y direction, so that the fourth movable mass 12 has only a translational degree of freedom in the Y direction. The first elastic beam 5, the second elastic beam 6, the third elastic beam 7 and the fourth elastic beam 8 can be realized in various forms, and are uniformly equivalent to a single spring in the figure.
The first movable mass 9, the second movable mass 10, the third movable mass 11, and the fourth movable mass 12 have drivers (not shown) with comb tooth structures or grating structures inside, and electrostatic force generated by the drivers allows the first movable mass 9 and the 3 rd movable mass 11 to move in the X direction, and the second movable mass 10 and the fourth movable mass 12 to move in the Y direction.
The central mass block 21 is connected with the first movable mass 9 through the first decoupling beam 13, the central mass block 21 is connected with the third movable mass 11 through the third decoupling beam 15, and the rigidity of the first decoupling beam 13 and the third decoupling beam 15 in the X direction is far greater than that in the Y direction, so that when the first movable mass 9 and the third movable mass 11 move in the X direction, the central mass block 21 performs the same movement in the X direction, and meanwhile, the central mass block 21 can perform the movement in the Y direction relative to the first movable mass 9 and the third movable mass 11. The central mass 21 is connected with the second movable mass 10 through the second decoupling beam 14, the central mass 21 is connected with the fourth movable mass 12 through the fourth decoupling beam 16, and the rigidity of the second decoupling beam 14 and the fourth decoupling beam 16 in the Y direction is much greater than that in the X direction, so when the second movable mass 10 and the fourth movable mass 12 move in the Y direction, the central mass 21 performs the same movement in the Y direction, and simultaneously, the central mass 21 can perform the movement in the X direction relative to the second movable mass 10 and the fourth movable mass 12. The central mass 21 therefore has translational degrees of freedom in both the X and Y directions.
The first tuning electrode 17 and the third tuning electrode 19 generate electrostatic force in the X direction, and the magnitude of the electrostatic force is in a linear relationship with the displacement of the central mass 21 in the X direction, which is equivalent to that the first tuning electrode 17 and the third tuning electrode 19 are equivalent to springs, and actually changes the resonant frequency in the X direction. The second tuning electrode 18 and the fourth tuning electrode 20 generate electrostatic force in the Y direction, and the magnitude of the electrostatic force is in a linear relationship with the displacement of the central mass block 21 in the Y direction, which is equivalent to that the second tuning electrode 18 and the fourth tuning electrode 20 are equivalent to springs, and actually changes the resonant frequency in the Y direction.
As shown in fig. 2(a), a first through-hole 22 and a second through-hole 23 are etched in the central mass 21 by a deep ion etching process, and a gate structure 24 is formed between the first through-hole 22 and the second through-hole 23. As shown in fig. 2(b), the metal electrode 25 is formed by etching a metal layer deposited on a glass substrate (not shown), and the metal electrode 25 has a designed shape (e.g., a zigzag shape or other shapes). As shown in fig. 2(c), the metal electrode 25 and the gate structure 24 constitute the fourth tuning electrode 20. The metal electrode 25 and the gate structure 24 form a capacitor by overlapping, and according to the electric potential theory, when there is a potential difference between the metal electrode 25 and the gate structure 24, the gate structure 24 is subjected to an electrostatic force, and since the gate structure 24 is a part of the central mass 21, the central mass 21 is subjected to the electrostatic force. The electrostatic force generated by the tuning electrode shown in fig. 2 is in the opposite direction to the movement direction of the central mass 21, which is equivalent to increasing the equivalent stiffness, i.e. increasing the resonance frequency, and the tuning electrode is an upward tuning electrode.
It is assumed that fig. 3(c) shows the initial relative positions of the central mass 21 and the metal electrodes 25. As shown in fig. 3(a), when the central mass 21 moves along the X direction, the overlapping condition between the gate structure 24 and the metal electrode 25 is not changed, the size of the formed capacitance is not changed, and according to the electric potential energy theory, the electrostatic force applied to the central mass 21 at this time is not changed, that is, the movement of the central mass 21 in the X direction does not affect the change of the resonant frequency. As shown in fig. 3(b), when the central mass block 21 moves along the Y direction, the overlapping condition between the gate structure 24 and the metal electrode 25 changes, the size of the formed capacitance changes, and according to the electric potential energy theory, the electrostatic force applied to the central mass block 21 at this time changes, that is, the movement of the central mass block 21 in the Y direction affects the change of the resonant frequency. Since the motion of the central mass 21 can be decomposed into motions in both X and Y directions, it can be seen from the above that the Y-direction tuning electrode only affects the Y-direction resonance frequency and does not affect the X-direction resonance frequency.
Similar to the Y-direction tuning electrode, if the Y-direction tuning electrode is rotated by 90 °, the X-direction tuning electrode is obtained. As shown in fig. 4(a), 4(b), and 4(c), it can be seen from the above description of the Y-direction tuning electrodes that the X-direction tuning electrodes affect only the resonance frequency in the X-direction and have no effect on the resonance frequency in the Y-direction.
Fig. 5 is a Y-direction tuning down electrode. By changing the initial position between the gate structure 24 and the metal electrode 25, the electrostatic force generated by the tuning electrode is in the same direction as the movement direction of the central mass 21, which is equivalent to reducing the equivalent stiffness, i.e. the resonant frequency is reduced, and the tuning electrode is a downward tuning electrode.
Similar to fig. 5, fig. 6 is an X-direction tuning down electrode.
The first tuning electrode 17 and the third tuning electrode 19 shown in fig. 1 can be realized by using the X-direction upward tuning electrode shown in fig. 4, and can also be realized by using the X-direction downward tuning electrode shown in fig. 6. The second tuning electrode 18 and the fourth tuning electrode 20 are implemented by Y-direction upward tuning electrodes shown in fig. 2, and may also be implemented by Y-direction downward tuning electrodes shown in fig. 6. That is, there are four combinations: the drive mode is tuned downwards to the upward tuning detection mode, the drive mode is tuned upwards to the downward tuning detection mode, and the drive mode is tuned downwards to the downward tuning detection mode.
When the gyroscope works, the central mass block 21 has translational freedom degrees in the X direction and the Y direction at the same time, but the movement of the central mass block 21 can be decomposed into independent movement in the X direction and the Y direction, the movement in the X direction has no influence on the tuning electrode in the Y direction, and the movement in the Y direction has no influence on the tuning electrode in the X direction. Therefore, when the X-direction tuning electrodes and the Y-direction tuning electrodes are simultaneously disposed on the central mass block 21, the change of the resonant frequencies in the two directions can be simultaneously achieved without affecting each other.
Claims (5)
1. A gyro full-matching tuning electrode is characterized in that the tuning electrode comprises a grid structure and a metal electrode; setting grid structures of tuning electrodes of a driving mode frame and a detection mode frame on a central mass block, wherein the central mass block can freely move in a driving mode direction and a detection mode direction;
the two tuning electrodes of the driving modal frame are symmetrically distributed on the central mass block and are parallel to each other; the two tuning electrodes of the detection module frame are symmetrically distributed on the central mass block and are parallel to each other; the direction of the tuning electrode of the driving mode frame is perpendicular to the direction of the tuning electrode of the detection module frame.
2. The gyro perfect-match tuning electrode of claim 1, wherein the metal electrode is saw-toothed.
3. The tuning gyro electrode according to claim 1, wherein the tuning electrodes of the driving mode frame and the detecting mode frame are independent from each other, and the tuning directions include the following 4 cases:
the drive mode is tuned upwards, and the detection mode is tuned downwards;
upward tuning of a driving mode and upward tuning of a detection mode;
the drive mode is tuned downwards, and the detection mode is tuned upwards;
the drive mode is tuned down and the detection mode is tuned down.
4. The tuning electrode for gyroscope full matching according to claim 3, wherein the drive mode is tuned downwards and the detection mode is tuned upwards, so that the tuning electrode is suitable for a situation that the resonance frequency of the drive mode of the micromechanical gyroscope obtained by processing is greater than the resonance frequency of the detection mode due to process errors.
5. The tuning electrode for gyroscope full matching according to claim 3, wherein the drive mode is tuned upward and the detection mode is tuned downward, and the tuning electrode is suitable for a situation that the resonance frequency of the drive mode of the micromechanical gyroscope obtained by processing is smaller than the resonance frequency of the detection mode due to process errors.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010967592.XA CN112113553B (en) | 2020-09-15 | 2020-09-15 | Gyro full-matching tuning electrode |
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| CN202010967592.XA CN112113553B (en) | 2020-09-15 | 2020-09-15 | Gyro full-matching tuning electrode |
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| CN112113553B CN112113553B (en) | 2022-06-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112945219A (en) * | 2021-02-04 | 2021-06-11 | 浙江大学 | Variable area capacitor structure capable of adjusting elastic coefficient of micro mechanical device more |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1851401A (en) * | 2006-05-31 | 2006-10-25 | 哈尔滨工业大学 | Symmetric-structure double-grade decoupling single-crystal-silicon micro mechanical gyroscope |
| CN201780110U (en) * | 2009-07-21 | 2011-03-30 | 深迪半导体(上海)有限公司 | Mems gyroscope |
| CN102221361A (en) * | 2011-05-20 | 2011-10-19 | 西北工业大学 | Capacitive micro machinery gyroscope |
| CN104272062A (en) * | 2012-02-01 | 2015-01-07 | 快捷半导体公司 | MEMS multi-axis gyroscope z-axis electrode structure |
| US20170191830A1 (en) * | 2014-05-23 | 2017-07-06 | Hitachi Automotive Systems, Ltd. | Inertial sensor |
| EP3376162A1 (en) * | 2017-03-15 | 2018-09-19 | Honeywell International Inc. | Mems out of plane actuator |
| CN108955662A (en) * | 2018-04-27 | 2018-12-07 | 苏州大学 | Resonator gyroscope substantially symmetrical about its central axis with frequency difference adjustment structure |
-
2020
- 2020-09-15 CN CN202010967592.XA patent/CN112113553B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1851401A (en) * | 2006-05-31 | 2006-10-25 | 哈尔滨工业大学 | Symmetric-structure double-grade decoupling single-crystal-silicon micro mechanical gyroscope |
| CN201780110U (en) * | 2009-07-21 | 2011-03-30 | 深迪半导体(上海)有限公司 | Mems gyroscope |
| CN102221361A (en) * | 2011-05-20 | 2011-10-19 | 西北工业大学 | Capacitive micro machinery gyroscope |
| CN104272062A (en) * | 2012-02-01 | 2015-01-07 | 快捷半导体公司 | MEMS multi-axis gyroscope z-axis electrode structure |
| US20170191830A1 (en) * | 2014-05-23 | 2017-07-06 | Hitachi Automotive Systems, Ltd. | Inertial sensor |
| EP3376162A1 (en) * | 2017-03-15 | 2018-09-19 | Honeywell International Inc. | Mems out of plane actuator |
| CN108955662A (en) * | 2018-04-27 | 2018-12-07 | 苏州大学 | Resonator gyroscope substantially symmetrical about its central axis with frequency difference adjustment structure |
Non-Patent Citations (6)
| Title |
|---|
| HAITAO DING等: "A High-Resolution Silicon-on-Glass Z Axis Gyroscope Operating at Atmospheric Pressure", 《IEEE SENSORS JOURNAL》 * |
| XUDONG ZHENG等: "Linear parametric amplification/attenuation for MEMS vibratory gyroscopes based on triangular area-varying capacitors", 《JOURNAL OF MICROMECHANICS AND MICROENGINEERING》 * |
| 张燕燕等: "一种新型解耦硅微机械陀螺的设计", 《微纳电子技术》 * |
| 彭世刚等: "杠杆耦合式微机械陀螺仪特性分析", 《压电与声光》 * |
| 郑旭东等: "一种静电驱动电容检测的微机械陀螺及其工艺改进", 《中国机械工程》 * |
| 陈泓伍等: "全对称振动陀螺的结构设计与参数优化分析", 《仪表技术与传感器》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112945219A (en) * | 2021-02-04 | 2021-06-11 | 浙江大学 | Variable area capacitor structure capable of adjusting elastic coefficient of micro mechanical device more |
| CN112945219B (en) * | 2021-02-04 | 2022-09-20 | 浙江大学 | Variable area capacitor structure capable of adjusting elastic coefficient of micro mechanical device more |
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