CN112097349B - Filter device for clean room - Google Patents
Filter device for clean room Download PDFInfo
- Publication number
- CN112097349B CN112097349B CN202011249788.1A CN202011249788A CN112097349B CN 112097349 B CN112097349 B CN 112097349B CN 202011249788 A CN202011249788 A CN 202011249788A CN 112097349 B CN112097349 B CN 112097349B
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- Prior art keywords
- air
- buffer area
- equipment
- clean room
- pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C11/00—Trolleys or crabs, e.g. operating above runways
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
The invention discloses a clean room filtering device, comprising: the rail equipment is arranged among the clean rooms and used for moving the loading equipment into the clean rooms; the buffer area is positioned at the joint between the clean rooms and is connected with the rail equipment in a clamping manner; the air conveying equipment is connected with the buffer area and is used for conveying air; the air filtering device is positioned at the top end of the buffer area and is used for communicating the air conveying device with the buffer area; the pressure control equipment is positioned in the buffer area and is connected with the air conveying equipment; wherein the pressure control device controls the pressure in the buffer area to be higher than the pressure of the clean room on two sides of the buffer area. The invention can effectively avoid the condition that the adjacent clean room area is polluted because of the operation of loading equipment such as a crown block.
Description
Technical Field
The invention relates to the field of semiconductor equipment, in particular to a clean room filtering device.
Background
Semiconductor manufacturing and scientific research are typically conducted in clean environments, which are environments where contaminants are filtered and removed. As semiconductor feature sizes become smaller, micro-contamination control becomes more important, particularly gaseous molecular contamination (AMC). Oht (overhead house transfer) is an automated handling system used in semiconductor factories, where overhead traveling cranes run on travel rails under the ceiling to transport equipment containing wafers to each production area, which creates a passage between each area that was originally sealed. When the pressure between two adjacent areas of the clean room is too low, the lateral air flow generated by the operation of the equipment with the wafers brings high-concentration gaseous molecular contamination (AMC) to the adjacent areas, which brings difficulty to the micro-contamination control of the adjacent areas.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, the present invention provides a clean room filtering apparatus, which can effectively prevent the adjacent clean room area from being polluted due to the operation of loading equipment such as a crown block.
In order to achieve the above and other objects, the present invention provides a clean room filtering apparatus, including:
the rail equipment is arranged among the clean rooms and used for moving the loading equipment into the clean rooms;
the buffer area is positioned at the joint between the clean rooms and is connected with the rail equipment in a clamping manner;
the air conveying equipment is connected with the buffer area and is used for conveying air;
the air filtering device is positioned at the top end of the buffer area and is used for communicating the air conveying device with the buffer area;
the pressure control equipment is positioned in the buffer area and is connected with the air conveying equipment;
wherein the pressure control device controls the pressure in the buffer area to be higher than the pressure of the clean room on two sides of the buffer area.
In one embodiment, the pressure in the buffer area is at least 5-10 Pa higher than the maximum pressure of the clean room on both sides of the buffer area.
In one embodiment, two automatic double doors are respectively arranged on two sides of the buffer area, and each automatic double door is provided with a bayonet which is connected with the rail device in a clamping manner.
In one embodiment, the automatic double door comprises a first door and a second door, the first door is provided with a first notch, the second door is provided with a second notch, and the first notch and the second notch enclose the bayonet in a cuboid shape.
In one embodiment, the air delivery apparatus comprises:
the fresh air feeding equipment is used for providing air;
the electromagnetic valve is arranged on a pipeline of the fresh air feeding equipment and is connected with the pressure control equipment;
and the closed cover surrounds the air filtering equipment, and is communicated with the fresh air feeding equipment.
In one embodiment, the fresh air feeding device is an air conditioner, and the air conditioner is connected with the closed cover.
In one embodiment, a top end of the buffer area extends vertically to a top end of the clean room.
In an embodiment, the pressure control device is a pressure sensor. The pressure sensor is connected with the air filtering device, and the pressure sensor is located at the bottom end of the air filter.
In one embodiment, the air filtration device is an air filter.
In one embodiment, a baffle is disposed at the bottom of the buffer region.
In one embodiment, the top end of the buffer area is the top end of the clean room.
In one embodiment, the top end of the clean room is a ceiling or ceiling.
In one embodiment, the top and the side of the clean room are further provided with a filter screen.
In the invention, the pressure in the buffer area is controlled to be higher than the pressure of the clean rooms on two sides of the buffer area, and when the automatic double door on one side is opened, clean air is blown to the clean rooms opposite to the running direction of the loading equipment, so that the condition that two adjacent clean rooms are polluted by each other due to the running of the loading equipment such as a crown block can be effectively avoided. The invention uses the closing cover, for example, can effectively concentrate the air, can maintain a certain pressure by conveying a small amount of air, thereby saving energy. The present invention uses the arrangement of an automatic double door with a bayonet, so that the buffer area is in a closed state when the loading device does not pass. The air filtering unit does not occupy the space of the clean room, does not influence the operation of the loading equipment such as a crown block, and has lower cost. The invention also has the advantages of easily understood principle, low cost, ingenious conception, compact structure and the like.
Drawings
FIG. 1: a schematic structural view of the clean room filtering apparatus according to an embodiment of the present invention;
FIG. 2: the schematic diagram of the automatic double-open door closing in one embodiment of the invention;
FIG. 3: the automatic double door in one embodiment of the invention is shown in the schematic view when opened.
Description of the symbols
101. A track device; 102. a buffer region; 103. an air delivery device; 1031. feeding fresh air into equipment; 1032. an electromagnetic valve; 1033. a closure cap; 104. an air filtration device; 105. a pressure control device; 106. automatic double opening of the door; 1061. first opening a door; 1062. secondly, opening the door; 107. a bayonet; 1071. a first notch; 1072. a second recess; A. a first clean room; B. a second clean room; C. and a baffle plate.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
In the present invention, it should be noted that, as the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, their indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present application and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present application. Furthermore, the terms "first" and "second," if any, are used for descriptive and distinguishing purposes only and are not to be construed as indicating or implying relative importance.
In the invention, the pressure in the buffer area is controlled to be higher than the pressure of the clean room at two sides of the buffer area, and when the automatic double door at one side is opened, clean air is blown and swept to the direction of the clean room opposite to the running direction of the loading equipment, so that the condition that the adjacent clean room area is polluted due to the running of the loading equipment such as a crown block can be effectively avoided.
Referring to fig. 1 to 3, in one embodiment, the clean room filtering apparatus includes, but is not limited to, a rail device 101, a buffer area 102, an air conveying device 103, an air filtering device 104, and a pressure control device 105. The application scenario of the clean room filtering device is, for example, a situation that an overhead traveling crane runs to prevent adjacent clean rooms from being polluted.
Referring to fig. 1 to 3, in one embodiment, the track apparatus 101 is disposed between the clean rooms, and is used for moving a loading apparatus, such as a crown block, loaded with wafers into any of the clean rooms. Taking a first clean room a and a second clean room B as an example, the first clean room a and the second clean room B are adjacent clean rooms, and the rail device 101 penetrates through the first clean room a and the second clean room B. The top ends of the first clean room A and the second clean room B are ceilings or ceilings. The top and sides of the clean room a and/or the second clean room B are for example also provided with a screen to adsorb some chemicals in order to make the clean level of the clean room higher.
Referring to fig. 1 to 3, in an embodiment, the buffer area 102 is located at a connection position of any adjacent clean room, for example, a top end of the buffer area 102 is a top end of the clean room, and the buffer area 102 is connected to the rail device 101 in a snap fit manner. Specifically, the buffer area 102 is located at a junction between the first clean room a and the second clean room B, for example, and a top end of the buffer area 102 is, for example, a top end of the clean room, specifically, an area at a junction between the top end of the first clean room a and the top end of the second clean room B. The buffer area 102 is used for the loading equipment to pass through and enter the next clean room. In this embodiment, when the loading device does not pass through the buffer area 102, the buffer area 102 is in a sealed state, and no gas containing impurities enters the buffer area 102.
The bottom of the buffer area 102 is open, and a baffle C is arranged at the bottom opening of the buffer area 102. The baffle C is supported by a joint of the first clean room a and the second clean room B, and is made of, for example, a wood baffle, a plastic baffle, a metal baffle, or a baffle made of other materials.
Referring to fig. 1 to 3, in an embodiment, two automatic double doors 106 are respectively disposed on two sides of the buffer area 102, and the automatic double doors 106 have bayonets 107, and the bayonets 107 are connected with the track device 101 in a snap-fit manner. Specifically, the automatic double door 106 includes, for example, a first door 1061 and a second door 1062, where the first door 1061 has a first notch 1071, the second door 1062 has a second notch 1072, the first notch 1071 and the second notch 1072 may be combined to form a rectangular parallelepiped or other bayonet 107, and the bayonet 107 may be engaged with the track device 101, so that the buffer area 102 may maintain a completely sealed state when the loading device does not pass through. Taking the example where the loader passes through the first clean room a first and then the second clean room B second, the automatic double door 106 is provided every time the loader passes through a joint. For example, the automatic double door 106 is disposed at one side of the first clean room a, the automatic double door 106 is also disposed at a joint of the first clean room a and the second clean room B, and the automatic double door 106 is also disposed at an outlet side of the second clean room B. When automatic two door 106 are closed, automatic two door 106 with track equipment 101 is just sealed, works as track equipment 101 such as the overhead traveling crane, moves extremely when automatic two for example 1 ~ 1.5 meters before door 106, automatic two door 106 are automatic to be opened, treat for example the overhead traveling crane and get into completely behind the buffer area 102, automatic two door 106 are closed, the opposite side automatic two door 106 are opened in step.
Referring to fig. 1 to 3, in an embodiment, the air delivery device 103 is connected to the buffer area 102, and the air delivery device 103 is used for delivering air. The air delivery device 103 includes, but is not limited to, a fresh air intake device 1031, a solenoid valve 1032, and a closure cover 1033. Specifically, the fresh air supply device 1031 is used to provide air, such as clean air. The fresh air supply device 1031 is, for example, an air conditioner, and the air conditioner 1031 is connected to the enclosure 1033. After the air conditioner has treated the air, the treated clean air is delivered into the enclosure 1033 through a gas line. The enclosure 1033 encloses the air filter device 104 and the fresh air inlet of the fresh air supply device 1031 communicates with the enclosure 1033. The air transport apparatus 103 is, for example, disposed outside the clean room. The enclosure 1033 is for compressing air to facilitate the fresh air supply device 1031 to supply the clean air to the air filtration device 104. The enclosure 1033 may be, for example, a rectangular parallelepiped housing, a square housing, a cylindrical housing, or a semi-elliptical housing, or may be of any other shape suitable for use with the present invention.
Referring to fig. 1 to fig. 3, in an embodiment, a solenoid valve 1032 is disposed on a pipeline of the fresh air feeding device 1031, and the pressure control device 105 is connected to the solenoid valve 1032. The pressure control device 105 controls the electromagnetic valve 1032 to control the flow rate of the clean air provided by the fresh air feeding device 1031, so as to control the pressure in the buffer area 102.
Referring to fig. 1 to 3, in an embodiment, the air filter device 104 is located at the top end of the buffer area 102, for example, and the air filter device 104 communicates the air delivery device 103 with the buffer area 102. Specifically, the top end of the buffer area 102 extends vertically to the top end of the clean room, and here, taking the first clean room a and the second clean room B as an example, the buffer area 102 is located at the joint of the first clean room a and the second clean room B, and the top end of the buffer area 102 is the top end of the clean room at the joint of the first clean room a and the second clean room B. The air filtering device 104 is located at the top end of the buffer area 102, that is, at the top end of the clean room, the air filtering device 104 is communicated with the air conveying device 103 and the buffer area 102, the air conveying device 103 conveys the filtered air into the buffer area 102 by the air filtering device 104, and it is noted that the air conveyed into the buffer area 102 is clean and free of impurities, and does not pollute the buffer area 102. The air filter device 104 is, for example, an air filter.
Referring to fig. 1 to 3, in an embodiment, the pressure control device 105 is located in the buffer area 102, for example, and the pressure control device 105 is connected to the air delivery device 103, for example. The pressure control device 105 is, for example, a pressure sensor, which is connected to the air filter device 104, and in particular, is, for example, located at the bottom end of the air filter device 104, and when the air filter device 104 is an air filter, is, for example, located at the bottom end of the air filter for monitoring the pressure in the buffer area 102. The pressure control device 105 controls the pressure in the buffer area 102 to be higher than the pressure in the clean room on both sides of the buffer area 102, and when the air flow flowing vertically downward encounters an obstacle when the loading device, such as a crown block, passes through the buffer area 102, the air flow flows toward the clean room of relatively low pressure, so that the loading device, such as a crown block, operates to form a lateral air flow that carries away a high concentration of gaseous molecular contaminants (AMC). In one embodiment, the pressure in the buffer area 102 is at least 5-10 pa, such as 5 pa, 6 pa, 7 pa, 8 pa, 9 pa, 10 pa, higher than the maximum pressure of the clean room on both sides of the buffer area 102.
Referring to fig. 1 to fig. 3, in an embodiment, the pressure control device 105 is connected to the solenoid valve 1032 of the air delivery device 103, for example, and controls the solenoid valve 1032 to further control the pressure in the buffer area 102, and meanwhile, the pressure control device 105 can monitor the pressure in the buffer area 102 in real time to achieve precise control. For example, when the pressure in the buffer area 102 is lower than a set value, i.e. a preset air pressure in the buffer area 102, such as the pressure in the buffer area 102, which is at least 5-10 pa, such as 5 pa, 6 pa, 7 pa, 8 pa, 9 pa, 10 pa higher than the maximum pressure of the clean room on both sides of the buffer area 102, the solenoid valve 1032 adjusts the size of the valve of the solenoid valve 1032 by a signal transmitted by the pressure control device 105, so as to effectively control the amount of new air supply.
Referring to fig. 1 to 3, in an embodiment, the first clean room a is, for example, a wet etching area, the second clean room B is, for example, a copper process area, the rail device 101 penetrates through the buffer area 102 including the rail device 101, the buffer area 102 is located at a junction of the wet etching area and the copper process area, a top end of the buffer area 102 vertically extends to a top end of the clean room at the junction of the wet etching area and the copper process area, two automatic double doors 106 are respectively located at two sides of the buffer area 102, the automatic double doors 106 include a first open door 1061 and a second open door 1062, the first open door 1061 has a first notch 1071, the second open door 1062 has a second notch 1072, the first notch 1071 and the second notch 1072 enclose the bayonet 107 in a rectangular parallelepiped shape, and the bayonet 107 can be engaged with the rail device 101, so that the buffer area 102 can remain completely closed when no loading device passes. The air filter device 104 is, for example, an air filter, which is located at the top end of the buffer area 102, and the bottom end of which is, for example, provided with the pressure sensor. The air delivery device 103 is, for example, disposed outside the clean room, specifically, in the same vertical direction with the air filter, the sealing cover 1033 of the air delivery device 103 covers the air filter, and the fresh air input device 1031 may be placed according to actual needs, as long as the fresh air input device 1031 is communicated with the sealing cover 1033. The electromagnetic valve 1032 is arranged on the nozzle of the fresh air feeding device 1031, and the pressure sensor controls the size of the valve switch of the electromagnetic valve 1032 by transmitting signals, so as to further control the size of the air flow sent into the sealing cover 1033 by the fresh air feeding device 1031. In the present embodiment, the pressure in the buffer area 102 is at least 5-10 pa, specifically, for example, 5 pa, 6 pa, 7 pa, 8 pa, 9 pa or 10 pa, higher than the maximum pressure of the clean room at two sides of the buffer area 102 due to the cooperation between the components.
In summary, the present invention provides a clean room filtering apparatus, wherein the pressure in the buffer area is controlled to be higher than the pressure in the clean room at two sides of the buffer area, and when the automatic double door at one side is opened, clean air is blown to the clean room opposite to the running direction of the loading equipment, so as to effectively avoid the mutual contamination between two adjacent clean rooms caused by the running of the loading equipment, such as a crown block. The invention uses the closed cover, can effectively concentrate air, can maintain a certain pressure by conveying less air quantity, thereby saving energy. The present invention uses the arrangement of an automatic double door with a bayonet, so that the buffer area is in a closed state when the loading device does not pass. The pressure control equipment further controls the pressure in the buffer area by controlling the air conveying equipment, and meanwhile, the pressure control equipment can also monitor the pressure in the buffer area in real time, so that accurate control is realized, and the aim of saving energy is fulfilled. The air filtering unit does not occupy the space of the clean room, does not influence the operation of the loading equipment such as a crown block, and has lower cost. The invention also has the advantages of easily understood principle, low cost, ingenious conception, compact structure and the like.
The above description is only a preferred embodiment of the present application and a description of the applied technical principle, and it should be understood by those skilled in the art that the scope of the present invention related to the present application is not limited to the technical solution of the specific combination of the above technical features, and also covers other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept, for example, the technical solutions formed by mutually replacing the above features with (but not limited to) technical features having similar functions disclosed in the present application.
Other technical features than those described in the specification are known to those skilled in the art, and are not described herein in detail in order to highlight the innovative features of the present invention.
Claims (8)
1. A clean room filter apparatus, comprising:
the rail equipment is arranged among the clean rooms and used for moving the loading equipment into the clean rooms;
the buffer area is positioned at the joint between the clean rooms, two automatic double-opening doors are respectively arranged on two sides of the buffer area, each automatic double-opening door comprises a first opening door and a second opening door, each first opening door is provided with a first notch, each second opening door is provided with a second notch, each first notch and each second notch form a rectangular bayonet in a surrounding mode, and the bayonets are connected with the rail equipment in a clamping mode;
the air conveying equipment is connected with the buffer area and is used for conveying air;
the air filtering device is positioned at the top end of the buffer area and is used for communicating the air conveying device with the buffer area;
the pressure control equipment is positioned in the buffer area and is connected with the air conveying equipment;
wherein the pressure control device controls the pressure in the buffer area to be higher than the pressure of the clean room on two sides of the buffer area.
2. The filtration apparatus of claim 1, wherein the pressure in the buffer zone is 5-10 pa higher than the maximum pressure of the clean room on both sides of the buffer zone.
3. The filtration apparatus of claim 1, wherein the air delivery device comprises:
the fresh air feeding equipment is used for providing air;
the electromagnetic valve is arranged on a pipeline of the fresh air feeding equipment and is connected with the pressure control equipment;
and the closed cover surrounds the air filtering equipment, and is communicated with the fresh air feeding equipment.
4. A filter device as claimed in claim 3, wherein the fresh air supply means is an air conditioner, the air conditioner being connected to the enclosure.
5. The filtration apparatus of claim 1, wherein a top end of the buffer zone extends vertically to a top end of the clean room.
6. The filtration apparatus of claim 1, wherein the pressure control device is a pressure sensor.
7. The filtration apparatus of claim 1, wherein the air filtration device is an air filter.
8. A filter device as claimed in claim 1, wherein the bottom of the buffer zone is provided with a baffle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011249788.1A CN112097349B (en) | 2020-11-11 | 2020-11-11 | Filter device for clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011249788.1A CN112097349B (en) | 2020-11-11 | 2020-11-11 | Filter device for clean room |
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| Publication Number | Publication Date |
|---|---|
| CN112097349A CN112097349A (en) | 2020-12-18 |
| CN112097349B true CN112097349B (en) | 2021-04-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011249788.1A Active CN112097349B (en) | 2020-11-11 | 2020-11-11 | Filter device for clean room |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114322197A (en) * | 2022-01-08 | 2022-04-12 | 北京首控电气有限公司 | Air flow control method, device, equipment and storage medium |
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| CN2332971Y (en) * | 1998-07-24 | 1999-08-11 | 王键 | Health fresh keeping box |
| CN1353233A (en) * | 2000-11-08 | 2002-06-12 | 夏普公司 | Ultra clean room for semi conductor device |
| CN101551144A (en) * | 2009-05-06 | 2009-10-07 | 友达光电股份有限公司 | Dust free chamber system |
| CN103206101A (en) * | 2013-03-05 | 2013-07-17 | 亚翔系统集成科技（苏州）股份有限公司 | Clean room for semiconductor plant |
| CN108404156A (en) * | 2018-05-29 | 2018-08-17 | 吴江市净明净化设备有限公司 | A kind of pass-through box used for decontamination chamber |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7285147B2 (en) * | 2004-12-02 | 2007-10-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Air supply systems and pressure adjustment devices for use therewith |
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2020
- 2020-11-11 CN CN202011249788.1A patent/CN112097349B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2332971Y (en) * | 1998-07-24 | 1999-08-11 | 王键 | Health fresh keeping box |
| CN1353233A (en) * | 2000-11-08 | 2002-06-12 | 夏普公司 | Ultra clean room for semi conductor device |
| CN101551144A (en) * | 2009-05-06 | 2009-10-07 | 友达光电股份有限公司 | Dust free chamber system |
| CN103206101A (en) * | 2013-03-05 | 2013-07-17 | 亚翔系统集成科技（苏州）股份有限公司 | Clean room for semiconductor plant |
| CN108404156A (en) * | 2018-05-29 | 2018-08-17 | 吴江市净明净化设备有限公司 | A kind of pass-through box used for decontamination chamber |
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| CN112097349A (en) | 2020-12-18 |
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