CN112083233A - Device and method for measuring multi-frequency-point dielectric constant of micro material sample - Google Patents

Device and method for measuring multi-frequency-point dielectric constant of micro material sample Download PDF

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CN112083233A
CN112083233A CN202010953534.1A CN202010953534A CN112083233A CN 112083233 A CN112083233 A CN 112083233A CN 202010953534 A CN202010953534 A CN 202010953534A CN 112083233 A CN112083233 A CN 112083233A
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frequency
dielectric constant
point
measuring
micro
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CN112083233B (en
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王彬
徐�彻
蒙林
殷勇
李海龙
袁学松
张平
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University of Electronic Science and Technology of China
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2617Measuring dielectric properties, e.g. constants
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets

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  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

The invention discloses a device and a method for measuring multi-frequency-point dielectric constant of a micro material sample, relates to the field of material science, and solves the problem that the dielectric constant of the existing material corresponds to a certain frequency band and cannot be measured to a specific numerical value corresponding to specific frequency. The high-frequency resonance structure comprises a screw hole (5) and an inlet and outlet (1), wherein the inlet and outlet (1) is used for placing or taking out a micro-interfering body (3), the screw hole (5) is used for being in threaded connection with a tuning screw, the high-frequency resonance structure is used for measuring the dielectric constant of the micro-interfering body (3), and the tuning screw is used for changing the working frequency point of the high-frequency resonance structure. The invention overcomes the difficulty that the dielectric constant of the material in a certain frequency range can only be tested in the past, and finally can realize the method for testing the dielectric constant corresponding to the target frequency point.

Description

Device and method for measuring multi-frequency-point dielectric constant of micro material sample
Technical Field
The invention relates to the field of material science, in particular to a device and a method for measuring multi-frequency-point dielectric constant of a micro material sample.
Background
The rapid development of material science creates a necessary condition for the deep advance of scientific research work in various fields, namely the realization of the technology depends on the continuous exploration of material characteristics, such as the heat resistance, the dielectric constant and the like of the material. One of the core points of the research on the electrical characteristics in the medium is the search for a dielectric constant method. In the aspect of measuring the dielectric constant of a material, a transmission line method, a circuit method, a resonance method, a free space wave method and the like are generally included, the methods are used for specific situations, and the coverage frequency of the national standard measuring method is below 50MHz and between 100MHz and 30 GHz. But the rapid development of the research of the electric vacuum device enables the frequency of the device to reach the terahertz level. The method for measuring the dielectric constant of the material can greatly help research work and engineering application of electric vacuum devices, only the dielectric constant value of a certain frequency band can be tested by the method for testing the dielectric constant at present, and if the dielectric constant value can correspond to a certain frequency point, a new research means can be provided for research work of high frequency bands in certain fields, and the method is extremely valuable.
Disclosure of Invention
The technical problem to be solved by the invention is as follows:
1) the coverage frequency of the national standard measurement method is below 50MHz and between 100MHz and 30 GHz;
2) the dielectric constant value of the existing material corresponds to a certain frequency band, and the dielectric constant of a specific numerical value corresponding to a specific frequency cannot be tested;
the invention provides a device and a method for measuring multi-frequency point dielectric constant of a micro material sample, which solve the problems.
The invention is realized by the following technical scheme:
the utility model provides a measure minute material sample multifrequency point dielectric constant's device, includes the high frequency resonance structure, the high frequency resonance structure includes screw and exit, exit and entrance are used for putting into or taking out the perturbation body, the screw is used for threaded connection tuning screw, the high frequency resonance structure is used for measuring the dielectric constant of perturbation body, tuning screw is used for changing the operating frequency point of high frequency resonance structure.
Further, the high-frequency resonance structure is a resonant cavity, and the working frequency point of the high-frequency resonance structure is within the range of 30GHz-300 GHz.
Further, the high-frequency resonance structure is a cuboid structure.
Furthermore, the high-frequency resonance structure comprises two cavities, namely a sample cavity and a waveguide cavity, wherein the two cavities are separated and communicated through a rectangular window;
the sample cavity is used for placing a micro-interfering body, and the waveguide cavity is used for conducting input and output waveguides.
Further, the sample cavity comprises a screw hole arranged at one end and an inlet and an outlet, the screw hole and the inlet and the outlet are both hole structures which are communicated with the side face of the sample cavity, and internal threads matched with the tuning screws are arranged on the inner side of the inner portion of the screw hole.
Further, the device comprises a plurality of screw holes and a plurality of inlet and outlet.
A method for measuring the multi-frequency-point dielectric constant of a tiny material sample is based on the device for measuring the multi-frequency-point dielectric constant of the tiny material sample, and comprises the following steps:
s1, placing a perturbation body in the high-frequency resonance structure, wherein the perturbation body changes the working frequency point of the high-frequency resonance structure;
and S2, measuring the difference value of the working frequency points of the high-frequency resonance structure after the micro-perturbation is added, and calculating the dielectric constant of the micro-perturbation under the working frequency points based on the relation between the difference value and the dielectric constant of the micro-perturbation.
S3, adding a tuning screw, changing the position of the tuning screw, changing the working frequency point of the high-frequency resonance structure by the tuning screw, and measuring to obtain the high-frequency resonance structure at the position of the tuning screw to obtain a plurality of different high-frequency resonance structures;
and S4, measuring to obtain a plurality of working frequency points corresponding to the plurality of different high-frequency resonance structures in S3, and calculating to obtain a plurality of corresponding dielectric constants of the micro-perturbation body under the corresponding plurality of working frequency points according to the plurality of working frequency points in S4.
Further, a vector network analyzer is adopted to measure the working frequency point of the high-frequency resonance structure.
Further, a method for calculating the dielectric constant of the perturbation body by obtaining the field intensity value in the high-frequency resonance structure and the volume of the perturbation body through the calculation of a resonance cavity perturbation formula or the calculation of simulation software is as follows: based on multiple data sets including measured frequency deviation value Deltaf, operating frequency point f of high-frequency resonance structure0And a dielectric constant. Inputting the volumes of the resonant cavities and the volumes of the micro-perturbation bodies of the multiple groups of data, and deducing or measuring the working frequency point f of the high-frequency structure0And field intensity value at the position of the perturbation body, utilizing a formula between a working frequency point and a dielectric constant of the high-frequency resonance structure, wherein the formula comprises a working frequency point of the high-frequency structure, the field intensity value in the high-frequency resonance structure and a frequency deviation value delta f, and the frequency deviation value delta f is the working frequency point and the working frequency f after the perturbation body is added into the resonant cavity0A difference of (d);
and calculating according to the formula or simulating through simulation software to obtain the dielectric constant of the perturbation body.
For the explanation of the resonant cavity: the resonant cavity can work at a specific resonant frequency point, so that the dielectric constant of the frequency can be correspondingly tested, the working frequency of the resonant cavity can be designed within the range of 30GHz-300GHz by designing the three-dimensional size of the rectangular resonant cavity, and the reason that the measuring method can measure the dielectric constant within the frequency range of 30GHz-300GHz is ensured; the working frequency of the resonant cavity is a frequency point, and the resonant cavity does not work in a frequency band like a traveling wave tube, which is also the reason for ensuring that a certain frequency point can be accurately measured; by using the resonant cavity as a carrier for measuring the dielectric constant of the material, the volume of the material sample required in measurement can be small, and the innovation point of testing the dielectric constant of the tiny sample in a small space environment is met.
Furthermore, the device and the method can accurately control the frequency of the resonant cavity, so that the dielectric constant of the sample material at each frequency point is obtained.
Further, the resonant cavity device is designed to generally work at only one frequency point, but for the test flexibility, the working frequency can be adjusted slightly, so that the structure is changed by adding or adjusting a tuning screw, so that the working frequency value of the resonant cavity is changed to achieve the dielectric constant for testing multiple frequency values.
The invention has the following advantages and beneficial effects:
the coverage range of the test method is 30GHz-300GHz, and the limitation of the conventional method for testing the dielectric constant on frequency is overcome.
When the method is used for measuring the sample, only a small-volume sample material is needed, the space requirement for measuring the sample is small, and the method for measuring the dielectric constant of the small sample under the small-space background is realized.
The invention overcomes the difficulty that the dielectric constant of the material in a certain frequency range can only be tested in the past, and finally can realize the method for testing the dielectric constant corresponding to the target frequency point.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is an exemplary diagram of the high frequency structure of the present invention.
FIG. 2 is a cross-sectional view of a high frequency structure according to the present invention.
FIG. 3 is an exemplary illustration of the invention in which a perturbation is added to the resonator.
Fig. 4 is an exemplary view of a tuning screw of the present invention.
Figure 5 is an exemplary view of a resonant cavity incorporating a tuning screw in accordance with the present invention.
Figure 6 is an exemplary view of a resonant cavity of the present invention incorporating two tuning screws.
FIG. 7 is an exemplary view of a resonant cavity incorporating four tuning screws in accordance with the present invention.
FIG. 8 is an exemplary illustration of the position of an adjusting tuning screw of the present invention within a resonant cavity.
Reference numbers and corresponding part names in the drawings:
1. an inlet and an outlet; 2. a resonant cavity; 3. a perturbation body; 4. an input-output waveguide; 5. and a screw hole.
Detailed Description
Before any embodiments of the invention are explained in detail, it is to be understood that the invention is not limited in its application to the details of construction and the arrangements of components set forth in the following description or illustrated in the drawings. The invention is capable of other embodiments and of being practiced or of being carried out in various ways. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any inventive changes, are within the scope of the present invention.
An apparatus for measuring multi-frequency point dielectric constant of a micro material sample, as shown in fig. 1-8, comprises a high frequency resonance structure, wherein the high frequency resonance structure comprises a screw hole 5 and an inlet and outlet 1, the inlet and outlet 1 is used for placing or taking out a micro-interfering body 3, the screw hole 5 is used for being in threaded connection with a tuning screw, the high frequency resonance structure is used for measuring the dielectric constant of the micro-interfering body 3, and the tuning screw is used for changing the working frequency point of the high frequency resonance structure.
Further, the high-frequency resonance structure is a resonant cavity 2, and the working frequency point of the high-frequency resonance structure is within the range of 30GHz-300 GHz.
Further, the high-frequency resonance structure is a cuboid structure.
Furthermore, the high-frequency resonance structure comprises two cavities, namely a sample cavity and a waveguide cavity, wherein the two cavities are separated and communicated into a whole through a rectangular window;
the sample cavity is used for placing a perturbation body 3, and the waveguide cavity is used for conducting an input-output waveguide 4.
Further, the sample cavity comprises a screw hole 5 arranged at one end and an inlet and outlet 1, the screw hole 5 and the inlet and outlet 1 are both of hole structures which are communicated with the side face of the sample cavity, and internal threads matched with the tuning screws are arranged on the inner side of the inner portion of the screw hole 5.
Further, it includes a plurality of screw holes 5 and a plurality of ports 1.
A method for measuring the multi-frequency-point dielectric constant of a tiny material sample is based on the device for measuring the multi-frequency-point dielectric constant of the tiny material sample, and comprises the following steps:
s1, placing the perturbation body 3 in the high-frequency resonance structure, wherein the perturbation body 3 changes the working frequency point of the high-frequency resonance structure;
and S2, measuring the difference value of the working frequency points of the high-frequency resonance structure after the perturbation body 3 is added, and calculating the dielectric constant of the perturbation body 3 under the working frequency points based on the relation between the difference value and the dielectric constant of the perturbation body 3.
S3, adding a tuning screw, changing the position of the tuning screw, changing the working frequency point of the high-frequency resonance structure by the tuning screw, and measuring to obtain the high-frequency resonance structure at the position of the tuning screw to obtain a plurality of different high-frequency resonance structures;
and S4, measuring to obtain a plurality of working frequency points corresponding to the plurality of different high-frequency resonance structures in S3, and calculating to obtain a plurality of dielectric constants corresponding to the micro-perturbation body 3 under the corresponding plurality of working frequency points according to the plurality of working frequency points in S4.
Further, a vector network analyzer is adopted to measure the working frequency point of the high-frequency resonance structure.
Further, a method for calculating the dielectric constant of the perturbation body 3 by obtaining the field intensity value in the high-frequency resonance structure and the volume of the perturbation body 3 through calculation of a perturbation formula of the resonant cavity 2 or calculation of simulation software is as follows: based on multiple data sets including measured frequency deviation value Deltaf, operating frequency point f of high-frequency resonance structure0And the dielectric constant is used for inputting the volume of the resonant cavity 2 and the volume of the perturbation body 3 of the multi-group data, deducing the working frequency point of the high-frequency structure and the field intensity value at the perturbation body, and utilizing the high-frequency resonanceA formula between the working frequency point and the dielectric constant of the structure, wherein the formula comprises a high-frequency structure working frequency point, a field intensity value in a high-frequency resonance structure and a frequency deviation value delta f, and the frequency deviation value delta f is the working frequency point and the frequency deviation value f after the micro-interfering body 3 is added into the resonant cavity 20A difference of (d);
and calculating according to the formula or simulating through simulation software to obtain the dielectric constant of the perturbation body 3.
For the explanation of the cavity 2: the resonant cavity 2 can work at a specific resonant frequency point, so that the dielectric constant of the frequency can be correspondingly tested, the working frequency of the resonant cavity 2 can be designed within the range of 30GHz-300GHz by designing the three-dimensional size of the rectangular resonant cavity 2, and the reason that the measuring method can measure the dielectric constant within the frequency range of 30GHz-300GHz is ensured; the working frequency of the resonant cavity 2 is a frequency point, and the resonant cavity does not work in a frequency band like a traveling wave tube, which is also the reason for ensuring that a certain frequency point can be accurately measured; by using the resonant cavity 2 as a carrier for measuring the dielectric constant of the material, the volume of the material sample required in the measurement can be small, and the requirement of the second innovation point that the dielectric constant of the tiny sample is tested in a small space environment is met.
Further, the apparatus and method of the present invention can precisely control the frequency of the resonant cavity 2, so as to obtain the dielectric constant of the sample material at each frequency point.
Further, the resonant cavity 2 device is designed to generally work at only one frequency point, but for the flexibility of the test, the working frequency can be adjusted to a small extent, so that the structure is changed by adding or adjusting a tuning screw, so that the working frequency value of the resonant cavity 2 is changed to achieve the dielectric constant for testing multiple frequency values.
Example 1:
firstly, a sample material to be measured is a spherical micro-interfering body 3 with the radius of 0.15mm in the example, a high-frequency resonance structure of a W-band expansion interaction device is designed, and a tuning hole is reserved, so that the working frequency of the high-frequency structure can be adjusted by adding a tuning screw and adjusting the position of the tuning screw.
When no tuning screw is added, the working frequency of the high-frequency structure is measured to be 93.25GHz by a vector network analyzer; and placing the sample of the perturbation body 3 at the position with the strongest field intensity of the resonant cavity 2, measuring the working frequency of the high-frequency structure at the moment to be 93.52GHz by using a vector network analyzer, and obtaining the dielectric constant of the material of the tested perturbation body 3 to be 7.87 according to a frequency perturbation formula. After the tuning screw is added and the position of the tuning screw is adjusted, the working frequency of the high-frequency structure at the moment is measured to be 94.3GHz by a vector network analyzer, the sample of the perturbation body 3 is added at the position where the field intensity of the resonant cavity 2 is strongest, the working frequency of the high-frequency structure at the moment is obtained to be 94.57GHz, and the dielectric constant of the material of the tested perturbation body 3 is also obtained to be 7.62 according to a frequency perturbation formula. Thus, different dielectric constant values of the same material at different frequencies are obtained, and for a material with a larger dielectric constant, the influence of the frequency on the material can be quite large, so that the practical significance of the invention is proved again by the example in the present application.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (10)

1. The device for measuring the multi-frequency-point dielectric constant of the micro material sample is characterized by comprising a high-frequency resonance structure, wherein the high-frequency resonance structure comprises a screw hole (5) and an inlet and outlet (1), the inlet and outlet (1) is used for placing or taking out a micro-interfering body (3), the screw hole (5) is used for being in threaded connection with a tuning screw, the high-frequency resonance structure is used for measuring the dielectric constant of the micro-interfering body (3), and the tuning screw is used for changing the working frequency point of the high-frequency resonance structure.
2. The device for measuring the multi-frequency-point dielectric constant of the micro-material sample as claimed in claim 1, wherein the high-frequency resonant structure is a resonant cavity (2), and the operating frequency point of the high-frequency resonant structure is in the range of 30GHz-300 GHz.
3. The apparatus of claim 2, wherein the high-frequency resonant structure is a rectangular parallelepiped structure.
4. The apparatus of claim 3, wherein the high frequency resonant structure comprises two cavities, namely a sample cavity and a waveguide cavity, the two cavities are separated from each other and are communicated with each other through a rectangular window;
the sample cavity is used for placing a micro-interfering body (3), and the waveguide cavity is used for conducting an input-output waveguide (4).
5. The device for measuring the multi-frequency-point dielectric constant of a micro-material sample according to claim 4, wherein the sample chamber comprises a screw hole (5) disposed at one end, and further comprises an inlet and outlet (1), the screw hole (5) and the inlet and outlet (1) are all hole structures opening through the side surface of the sample chamber, wherein the inner side of the screw hole (5) is provided with an internal thread matching with the tuning screw.
6. The device for measuring the multi-frequency-point dielectric constant of a micro-material sample according to claim 5, comprising a plurality of screw holes (5) and a plurality of inlet and outlet ports (1).
7. A method for measuring multi-frequency-point dielectric constant of a sample of a minute material, which is based on the apparatus for measuring multi-frequency-point dielectric constant of a sample of a minute material as claimed in any one of claims 1 to 6, comprising the steps of:
s1, placing a perturbation body (3) in the high-frequency resonance structure, wherein the perturbation body (3) changes the working frequency point of the high-frequency resonance structure;
and S2, measuring the difference value of the working frequency points of the high-frequency resonance structure after the perturbation body (3) is added, and calculating the dielectric constant of the perturbation body (3) under the working frequency points based on the relation between the difference value and the dielectric constant of the perturbation body (3).
8. The method of claim 7, further comprising the step of measuring the multi-frequency point by the multi-frequency point method as follows:
s3, adding a tuning screw, changing the position of the tuning screw, changing the working frequency point of the high-frequency resonance structure by the tuning screw, and measuring to obtain the high-frequency resonance structure at the position of the tuning screw to obtain a plurality of different high-frequency resonance structures;
and S4, measuring to obtain a plurality of working frequency points corresponding to the plurality of different high-frequency resonance structures in S3, and calculating to obtain a plurality of corresponding dielectric constants of the micro-perturbation body (3) under the corresponding plurality of working frequency points according to the plurality of working frequency points in S4.
9. The method of claim 7, wherein the operating frequency point of the high-frequency resonant structure is measured by a vector network analyzer.
10. The method for measuring the multi-frequency point dielectric constant of a micro-material sample according to claim 7, wherein the field strength value in the high-frequency resonant structure and the volume of the micro-interfering body (3) are obtained through calculation of a perturbation formula of the resonant cavity (2) or calculation of simulation software, and the dielectric constant of the micro-interfering body (3) is calculated by the following steps: based on multiple data sets including measured frequency deviation value Deltaf, operating frequency point f of high-frequency resonance structure0And the dielectric constant is used for inputting the volume of the resonant cavity (2) and the volume of the perturbation body (3) of the multiple groups of data, and deducing or measuring the working frequency point f of the resonant structure0And a perturbation position field intensity value, a formula between a working frequency point and a dielectric constant of the high-frequency resonance structure is utilized, the formula comprises a working frequency point of the high-frequency structure, the field intensity value in the high-frequency resonance structure and a frequency deviation value delta f, wherein the frequency deviation value delta f is the working frequency point after the perturbation body (3) is added into the resonant cavity (2)As frequency point and f0A difference of (d);
and calculating according to the formula or simulating through simulation software to obtain the dielectric constant of the perturbation body (3).
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