CN112045499B - High-precision detection device and method for thickness of small thin-wall part - Google Patents
High-precision detection device and method for thickness of small thin-wall part Download PDFInfo
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- CN112045499B CN112045499B CN202011053456.6A CN202011053456A CN112045499B CN 112045499 B CN112045499 B CN 112045499B CN 202011053456 A CN202011053456 A CN 202011053456A CN 112045499 B CN112045499 B CN 112045499B
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
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Abstract
The invention discloses a high-precision detection device for the thickness of a small thin-wall part and a method for detecting the thickness of the small thin-wall part by using the device, which relate to the technical field of precision detection, and the device comprises: a base; the detection assembly is arranged on the base and comprises two spring type inductance measuring heads which are coaxial and arranged oppositely; the two sliding block components are arranged on the base in a sliding mode and each sliding block component comprises a sliding block and a shifting fork, the shifting fork is arranged on one side of the sliding block, and the two shifting forks clamp the measuring pins of the two spring type inductance measuring heads respectively so as to stretch the measuring pins; the linear driving device is arranged on the base and is used for driving the two sliding block components to move towards opposite or opposite directions, and the moving directions of the two sliding block components are both parallel to the axis of the spring type inductance measuring head; and the two spring type inductance measuring heads are in communication connection with the measuring head display unit. By the arrangement, the device and the method can directly measure the thickness of the small thin-wall part with high precision.
Description
Technical Field
The invention relates to the technical field of precision detection, in particular to a device and a method for detecting the thickness of a small thin-wall part with high precision.
Background
With the development of aerospace technology, parts applied to important equipment gradually tend to be miniaturized, the size of a key part of some functional parts is only dozens of micrometers thick, the precision requirement is submicron level, and the shape and the structure of the key part are complex. For example, in a flexible joint of a key part in a dynamically tuned gyroscope, four thin-neck thin-wall structures are circumferentially arrayed around a central axis of the flexible joint, and the use performance of the flexible joint is determined by the rigidity consistency of the thin-neck thin walls, so that the rigidity consistency of the thin-neck thin walls needs to be improved by strictly controlling the dimensional precision of the thin-neck thin walls. The thin neck wall has a size (thickness) of only about 40 μm, and the size precision is required to be less than 0.3 μm. In order to ensure the dimensional accuracy of the machining, the machining error must be measured, however, the existing detection technology is divided into an off-line detection method and an on-line detection method for a thin neck structure and similar thin-wall functional parts in the flexible joint. The off-line measurement method is characterized in that when the size is difficult to measure with high precision, whether the design requirement is met or not can not be verified directly by detecting the performance index of the off-line measurement method. For example, the uniform rigidity and consistency of the thin neck of the flexible joint directly determine the index of the product, and when the existing measuring method cannot meet the measuring requirement, a method for directly measuring the angular rigidity is adopted; rigidity detection is needed after parts are machined, and then secondary grinding is conducted on key parts according to rigidity results, so that the machining period is long, the efficiency is low, and the product yield is low due to errors caused by secondary clamping. The existing online detection method has the main problems that: the device has low automation degree, needs a hand to hold a measuring head for measurement, has low measurement precision (more than 0.5 mu m) and poor measurement stability, and most researches stay on a theoretical level without manufacturing an actual prototype supporting theory. Therefore, a high-precision thin-wall dimension measurement process method and a high-precision thin-wall dimension measurement device are urgently needed at present.
Disclosure of Invention
In order to solve the technical problems, the invention provides a device and a method for detecting the thickness of a small thin-wall part with high precision, so as to realize direct high-precision measurement of the thickness of the small thin-wall part.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides a high-precision detection device for the thickness of a small thin-wall part, which comprises: a base; the detection assembly is arranged on the base and comprises two spring type inductance measuring heads which are coaxial and arranged oppositely; the two sliding block components are arranged on the base in a sliding mode, each sliding block component comprises a sliding block and a shifting fork, the shifting fork is arranged on one side of the sliding block, and the two shifting forks clamp the measuring pins of the two spring type inductance measuring heads respectively so as to stretch the measuring pins; the linear driving device is arranged on the base and used for driving the two sliding block assemblies to move towards opposite directions or opposite directions, and the moving directions of the two sliding block assemblies are both parallel to the axis of the spring type inductance measuring head; and the two spring type inductance measuring heads are in communication connection with the measuring head display unit.
Preferably, the linear driving device comprises a screw rod and a coding motor, a shaft shoulder is arranged in the middle of the screw rod, a first external thread and a second external thread are respectively arranged on two sides of the screw rod along the length direction of the screw rod, the first external thread and the second external thread respectively form a screw pair with the two sliding blocks, and the screw directions of the first external thread and the second external thread are opposite.
Preferably, small-size thin wall part thickness high accuracy detection device still includes two photoelectric switch, slider component still includes the separation blade, the separation blade with the shift fork set up respectively in both sides around the slider, two photoelectric switch follows slider component's slip direction set up in on the base, just photoelectric switch with the two one-to-one of separation blade, one photoelectric switch is used for monitoring one the motion of separation blade, the width of separation blade is greater than photoelectric switch's width, during initial state, each the left side edge of separation blade all with correspond separately photoelectric switch's left side edge looks parallel and level, photoelectric switch is used for control the work of coding motor.
Preferably, the high-precision thickness detection device for the small thin-wall parts further comprises a polished rod and three bearing seats, the three bearing seats are arranged on the base, bearings are arranged at two ends and in the middle of the polished rod, the bearings correspond to the bearing seats one by one, one bearing is supported on one bearing seat, the axis of the polished rod is parallel to the sliding direction of the sliding block assembly, the two sliding blocks are connected with the polished rod in a sliding mode, and the two sliding blocks are arranged on two sides of the bearing located in the middle respectively.
Preferably, two opposite end faces of any two adjacent bearings are provided with buffer pads.
Preferably, the device for detecting the thickness of the small-sized thin-walled part at high precision further comprises two positioning and supporting components, wherein the two positioning and supporting components are arranged on the base and respectively comprise a boss and a clamping block which are oppositely arranged and detachably connected, a first groove and a second groove are symmetrically arranged on the opposite surfaces of the boss and the clamping block, the first groove and the second groove are spliced to form a through hole, the positioning and supporting components correspond to the spring type inductance measuring heads one by one, and one spring type inductance measuring head penetrates through one through hole, so that one positioning and supporting component positions and supports one spring type inductance measuring head.
Preferably, the first groove and the second groove are both V-shaped structures, and correspondingly, the through hole is a parallelogram structure.
The embodiment also provides a high-precision detection method for the thickness of the small thin-wall part, and the zero point of the high-precision detection device for the thickness of the small thin-wall part is measured by using the standard gauge block mark before the high-precision detection device for the thickness of the small thin-wall part is used for detecting the thickness of the small thin-wall part.
Compared with the prior art, the invention has the following technical effects:
1) the detection device can realize online full-automatic online detection, does not need manual participation, can be easily integrated into an ultra-precision machine tool to realize online measurement, so that a part machining coordinate system and a detection coordinate system are unified, automatic extension and retraction of a measuring head are realized by controlling a shifting fork, introduction of artificial uncertain factors is avoided, the automation degree of measurement is improved, the dimensional precision can be effectively and subsequently repaired, and high-precision machining is facilitated.
2) The detection device uses a double-measuring-head structure, measurement is carried out by using a relative measurement method, one side of the relative measurement method is characterized in that a standard gauge block is used for calibrating a zero point before measurement, a measuring section of the measuring head is transferred to a linear region near the zero point, the characteristic that the linearity error (0.01 mu m) near the zero point of the measuring head is far smaller than the given theoretical nonlinearity (> 0.07 mu m) is used, the measurement precision is further improved on the original basis, the other side of the relative measurement method is characterized in that a special operation mode is realized, and environmental interference can be further compensated through the sum and difference operation of the measured values of the two measuring heads: such as temperature, humidity, etc.
3) The measuring force of the device is derived from a reset spring structure at the front end of the spring type inductance measuring head, the size is generally only 0.63N, the thin-wall structure is not damaged through analysis, the force can be easily overcome under the action of a shifting fork, and the shifting movement of the measuring head is realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a device for detecting thickness of a small thin-walled part with high precision according to an embodiment of the present invention;
FIG. 2 is a schematic view of a polished rod and a bearing seat of the high-precision thickness detection device for small thin-walled parts according to an embodiment of the present invention;
FIG. 3 is a diagram showing the relationship between the photoelectric beam splitting and the position of a blocking piece of the high-precision thickness detection device for the small thin-wall parts in the embodiment of the present invention;
fig. 4 is a schematic view of a measurement principle of a high-precision thickness detection method for a small thin-wall part provided in an embodiment of the invention.
Description of reference numerals: 1. a base; 2. a boss; 3. a spring type inductance probe; 4. measuring a needle; 5. a shifting fork; 6. a left slider; 7. a right slider; 8. a clamping block; 9. a motor base; 10. a coding motor; 11. a lead screw; 12. a bearing seat; 13. a polish rod; 14. a cushion pad; 15. a baffle plate; 16. a photoelectric switch.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a device and a method for detecting the thickness of a small thin-wall part with high precision, which can realize direct high-precision measurement of the thickness of the small thin-wall part.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Referring to fig. 1-4, the present embodiment provides a high-precision thickness detection device for a small thin-walled part, comprising: a base 1; the detection assembly is arranged on the base 1 and comprises two spring type inductance measuring heads 3 which are coaxial and arranged oppositely; the two sliding block components are arranged on the base 1 in a sliding mode, each sliding block component comprises a sliding block and a shifting fork 5, the shifting fork 5 is arranged on one side of each sliding block, and the two shifting forks 5 clamp the measuring pins 4 of the two spring type inductance measuring heads 3 respectively so as to stretch the measuring pins 4; the linear driving device is arranged on the base 1 and used for driving the two sliding block assemblies to move towards opposite directions or opposite directions, and the moving directions of the two sliding block assemblies are both parallel to the axis of the spring type inductance measuring head 3; and the two spring type inductance measuring heads 3 are in communication connection with the measuring head display unit. The device for detecting the thickness of the small thin-wall part can directly measure the thickness of the small thin-wall part with high precision.
In this embodiment, the spring type inductance probe 3 specifically uses a TESA GT22HP vacuum probe, and the corresponding probe display unit specifically uses a TT80 probe display unit.
In this embodiment, the linear driving device includes a lead screw 11 and a coding motor 10, a shoulder is disposed in the middle of the lead screw 11, a first external thread and a second external thread are respectively disposed on two sides of the lead screw 11 along the length direction of the lead screw 11, the first external thread and the second external thread respectively form a screw pair with the two sliders, and the screw directions of the first external thread and the second external thread are opposite. In this embodiment, specifically, a first nut and a second nut are respectively disposed on the two sliding blocks, the first nut is in threaded connection with the first external thread, and the second nut is in threaded connection with the second external thread; the base 1 is provided with a motor base 9, and the coding motor 10 is supported on the motor base 9.
In this embodiment, the high-precision thickness detection device for small-sized thin-walled parts further includes two photoelectric switches 16, the slider assembly further includes a blocking piece 15, the blocking piece 15 and the shifting fork 5 are respectively disposed on the front side and the rear side of the slider, the two photoelectric switches 16 are disposed on the base 1 along the sliding direction of the slider assembly, and the photoelectric switches 16 correspond to the blocking pieces 15 one by one, one photoelectric switch 16 is used for monitoring the movement of one blocking piece 15, the width of the blocking piece 15 is greater than that of the photoelectric switch 16, in the initial state, the left side edge of each blocking piece 15 is flush with the left side edge of the corresponding photoelectric switch 16, and the photoelectric switch 16 is used for controlling the operation of the coding motor 10.
For convenience of description, in fig. 3, the blocking piece 15 arranged on the right side is a right blocking piece, the blocking piece 15 arranged on the left side is a left blocking piece, the photoelectric switch 16 arranged on the right side is a right photoelectric switch, the photoelectric switch 16 arranged on the left side is a left photoelectric switch, the slider arranged on the right side is a right slider 7, and the slider arranged on the left side is a left slider 6, if the right blocking piece 15 is far away from the right slider 7 until the right photoelectric switch cannot be blocked completely, the movement of the coding motor 10 is stopped, and at this time, the left blocking piece 15 also blocks the left photoelectric switch, and the left photoelectric switch controls the next approach movement of the slider assembly; when the left slider 6 and the right slider 7 approach each other, the left blocking piece 15 moves along with the left slider 6 and leaves the photoelectric switch 16 earlier than the right blocking piece 15, so that the encoder motor 10 stops moving again. At the moment, the right blocking piece 15 still has a shielding effect on the right photoelectric switch, and the right photoelectric switch can control the left sliding block 6 and the right sliding block 7 to move away when measuring next time.
In this embodiment, in order to make the slider slide more steadily, smoothly, small-size thin wall part thickness high accuracy detection device still includes polished rod 13 and three bearing frame 12, three bearing frame 12 all sets up on base 1, the both ends and the middle part of polished rod 13 all are provided with the bearing, the two one-to-one of bearing and bearing frame 12, a bearing supports on a bearing frame 12, the axis of polished rod 13 parallels with sliding block set's slip direction, two sliders all with polished rod 13 sliding connection, and two sliders set up respectively in the bearing both sides that are located the middle part.
In this embodiment, in order to protect the bearings, the opposite end surfaces of any two adjacent bearings are provided with cushion pads 14. Cushion 14 is preferably a polyurethane cushion.
In this embodiment, small-size thin wall part thickness high accuracy detection device still includes two location support assembly, two location support assembly all set up on base 1, each location support assembly all includes relative setting and can dismantle boss 2 and the clamp splice 8 of connection, the symmetry is provided with first recess and second recess on the two relative face of boss 2 and clamp splice 8, a through-hole is spliced into to first recess and second recess, location support assembly and the two one-to-one of spring inductance gauge head 3, a spring inductance gauge head 3 passes a through-hole to make a location support assembly location support a spring inductance gauge head 3.
In this embodiment, the first groove and the second groove are both V-shaped structures, and correspondingly, the through hole is a parallelogram structure.
The high-precision detection device for the thickness of the small thin-wall part mainly has the following advantages:
1) the detection device can realize online full-automatic online detection, does not need manual participation, can be easily integrated into an ultra-precision machine tool to realize online measurement, so that a part machining coordinate system and a detection coordinate system are unified, automatic extension and retraction of a measuring head are realized by controlling the shifting fork 5, introduction of artificial uncertain factors is avoided, the automation degree of measurement is improved, the dimensional precision can be effectively and subsequently repaired, and high-precision machining is facilitated.
2) The detection device uses a double-measuring-head structure, measurement is carried out by using a relative measurement method, one side of the relative measurement method is characterized in that a standard gauge block is used for calibrating a zero point before measurement, a measuring section of the measuring head is transferred to a linear region near the zero point, the characteristic that the linearity error (0.01 mu m) near the zero point of the measuring head is far smaller than the given theoretical nonlinearity (> 0.07 mu m) is used, the measurement precision is further improved on the original basis, the other side of the relative measurement method is characterized in that a special operation mode is realized, and environmental interference can be further compensated through the sum and difference operation of the measured values of the two measuring heads: such as temperature, humidity, etc.
3) The measuring force of the device is derived from a reset spring structure at the front end of the spring type inductance measuring head 3, the size is generally only 0.63N, the thin-wall structure is not damaged through analysis, the force can be easily overcome under the action of the shifting fork 5, and the shifting movement of the measuring head is realized.
4) The device has a double photoelectric switch 16 structure to limit the movement position, thereby reducing the control requirement on the coding motor 10 and greatly reducing the device cost.
The embodiment also provides a high-precision detection method for the thickness of the small thin-wall part, which is characterized in that the zero point of the high-precision detection device for the thickness of the small thin-wall part is measured by using a standard gauge block mark before the high-precision detection device for the thickness of the small thin-wall part is used for detecting the thickness of the small thin-wall part.
The invention provides a high-precision detection method for the thickness of a small thin-wall part, which takes the measurement of the thickness of a thin neck of a flexible joint as a specific embodiment and comprises the following steps:
marking the zero point of the detection device by using a standard gauge block:
intervene between two spring inductance gauge heads 3 with the standard gauge block of thickness through calibration, fix a spring inductance gauge head 3 with the location supporting component, handheld another spring inductance gauge head 3 and hug closely first recess and be close to fixed spring inductance gauge head 3, until two spring inductance gauge heads 3 clip the standard gauge block to continue compressing handheld spring inductance gauge head 3 to gauge head display element near "0" point, stir the gauge block slightly, press the zero set key in gauge head display element minimum department. And marking the zero point of the device, moving out the standard gauge block, and fixing the handheld spring type inductance measuring head 3 by using the clamping block 8.
Step two, keeping the two spring type inductance measuring heads 3 away, and completing preparation work before measurement:
the coding motor 10 drives the screw rod 11 to rotate, and the shifting fork 5 pushes the measuring pins 4 of the two spring type inductance measuring heads 3 to be away from each other until any blocking piece 15 triggers the photoelectric switch 16 to stop moving. At the moment, a middle gap is reserved between the two spring type inductance measuring heads 3, and the middle gap is convenient for a flexible joint positioned on the main shaft in the next step to intervene in the detection device.
Step three, the flexible joint intervenes the checkout gear, carry on the measurement of the thin neck thickness:
after the flexible joint is inserted between the two spring type inductance measuring heads 3, the coding motor 10 drives the screw rod 11 to rotate so as to enable the two groups of sliding block components to approach, and the measuring needle 4 of the spring type inductance measuring head 3 is gradually compressed under the action of the internal reset spring until a thin neck is clamped. Then the two sets of sliding block components continue to approach until the blocking piece 15 in any set of sliding block components triggers the photoelectric switch 16, and the movement stops. At the moment, the reading of the measuring head display unit is the difference value between the thickness of the thin neck of the flexible joint and the actual size of the standard gauge block, so that the thickness value of the thin neck of the flexible joint can be indirectly obtained.
Step four, moving the flexible joint out of the detection device, and finishing the measurement process:
the coding motor 10 drives the screw rod 11 to rotate, so that the sliding block components are far away from each other, the shifting fork 5 pushes the measuring pins 4 of the two spring type inductance measuring heads 3 to separate until any blocking piece 15 triggers the photoelectric switch 16 to stop moving. The flexible joint moves out of the detection device. And judging whether the flexible joint meets the requirements or not according to the measurement result of the step three.
It should be noted that: step one only needs to be operated once after each startup, and each online measurement process after the zero setting is finished can be directly carried out from step two.
Precision verification of the device:
in the prior art flexible joint sample, 5 sets of data were measured for four sets of wall thicknesses of the neck of each flexible joint. The experimental results are shown in table 1: calculating the average value of the thickness of each thin neck according to the formula (1.1)
Meanwhile, the maximum deviation delta B of the size of each group of thin necks is calculated according to the formula (1.2)maxAt 2. delta.BmaxAs the accuracy of the device measurement, it can be seen from table one: the measurement precision of the device is less than or equal to 0.2 μm.
Table 1: thin neck thickness measurement experiment results
Unit: mum of
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (6)
1. The utility model provides a small-size thin wall part thickness high accuracy detection device which characterized in that includes:
a base;
the detection assembly is arranged on the base and comprises two spring type inductance measuring heads which are coaxial and arranged oppositely;
the two sliding block components are arranged on the base in a sliding mode, each sliding block component comprises a sliding block and a shifting fork, the shifting fork is arranged on one side of the sliding block, and the two shifting forks clamp the measuring pins of the two spring type inductance measuring heads respectively so as to stretch the measuring pins;
the linear driving device is arranged on the base and used for driving the two sliding block assemblies to move towards opposite directions or opposite directions, and the moving directions of the two sliding block assemblies are both parallel to the axis of the spring type inductance measuring head;
the two spring type inductance measuring heads are in communication connection with the measuring head display unit;
the linear driving device comprises a screw rod and a coding motor, a shaft shoulder is arranged in the middle of the screw rod, a first external thread and a second external thread are respectively arranged on two sides of the screw rod along the length direction of the screw rod, the first external thread and the second external thread respectively form a screw pair with the two sliding blocks, and the screw directions of the first external thread and the second external thread are opposite;
still include two photoelectric switch, slider component still includes the separation blade, the separation blade with the shift fork set up respectively in both sides around the slider, two photoelectric switch follows slider component's slip direction set up in on the base, just photoelectric switch with the two one-to-one of separation blade, one photoelectric switch is used for monitoring one the motion of separation blade, the width of separation blade is greater than photoelectric switch's width, during initial state, each the left side edge of separation blade all with correspond separately photoelectric switch's left side edge looks parallel and level, photoelectric switch is used for control the work of coding motor.
2. The high-precision thickness detection device for the small thin-walled parts according to claim 1, further comprising a polish rod and three bearing seats, wherein the three bearing seats are arranged on the base, bearings are arranged at two ends and a middle part of the polish rod, the bearings correspond to the bearing seats one by one, one bearing is supported on each bearing seat, the axis of the polish rod is parallel to the sliding direction of the slide block assembly, the two slide blocks are slidably connected with the polish rod, and the two slide blocks are respectively arranged at two sides of the bearing in the middle part.
3. The device for detecting the thickness of the small-sized thin-walled part with high precision as claimed in claim 2, wherein the opposite end surfaces of any two adjacent bearings are provided with buffering pads.
4. The high-precision small thin-wall part thickness detection device according to claim 1, further comprising two positioning support assemblies, wherein the two positioning support assemblies are arranged on the base, each positioning support assembly comprises a boss and a clamping block which are oppositely arranged and detachably connected, a first groove and a second groove are symmetrically arranged on the opposite surfaces of the boss and the clamping block, the first groove and the second groove are spliced to form a through hole, the positioning support assemblies correspond to the spring type inductance measuring heads one by one, and one spring type inductance measuring head penetrates through one through hole, so that one positioning support assembly positions and supports one spring type inductance measuring head.
5. The high-precision thickness detection device for the small thin-walled part as claimed in claim 4, wherein the first groove and the second groove are both V-shaped structures, and correspondingly, the through hole is a parallelogram structure.
6. A method for detecting the thickness of a small-sized thin-walled part with high precision, characterized in that the zero point of the device for detecting the thickness of the small-sized thin-walled part with high precision is measured by a standard gauge block mark before the thickness of the small-sized thin-walled part is detected by using the device for detecting the thickness of the small-sized thin-walled part with high precision as claimed in any one of claims 1 to 5.
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