CN112033979B - Chemical liquid microwave sensor based on metamaterial and application thereof - Google Patents
Chemical liquid microwave sensor based on metamaterial and application thereof Download PDFInfo
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Abstract
The invention discloses a chemical liquid microwave sensor based on a metamaterial and application thereof, and the chemical liquid microwave sensor comprises a substrate (1), a step-type microstrip transmission line (2), an omega-type open resonant ring (3), a cylindrical induction cavity (4) and a microstrip line ground wire (5). The invention utilizes the microwave transmission coefficient resonance effect of a metamaterial structure formed by integrating a microstrip transmission line and an open resonant ring on a substrate, when chemical liquid in an induction cavity changes, the resonance frequency point of the microwave transmission coefficient can obviously shift, thereby realizing the accurate identification of the chemical liquid type, effectively overcoming the defects of very limited identification type, poor robustness due to environmental interference and incapability of being reused of the traditional chemical liquid sensor, and having the advantages of simple structure, high sensitivity, small volume, low cost, multiple types of measured liquid, small measurement error and reusability.
Description
Technical Field
The invention belongs to the technical field of microelectronic devices, and particularly relates to a chemical liquid microwave sensor based on a metamaterial and application thereof.
Background
The chemical liquid sensor plays an important role in the fields of liquid food, liquid product production and processing, biological tissue fluid component identification and the like. Chinese patent ZL201921076734.2 discloses a double-layer oil tank with detection device, detects the liquid leakage condition in the cavity, and pressure sensor then can monitor the gas permeation condition in the cavity, and the material according to permeating is that petroleum liquid, water or petroleum gas can carry out preliminary judgement to double-layer oil tank leakage position. ZL201920733242.X discloses a skid-mounted storage tank oil leakage monitoring device, which is internally provided with a combustible gas sensor and a liquid sensor and can monitor leaked liquid in an interlayer of a storage tank in time. ZL201920693442.7 discloses arid area cistern mass flow automatic control and quality of water clean system, including singlechip and with singlechip signal transmission's liquid sensor, improved the utilization ratio of rainwater. ZL201880023984.1 discloses a liquid sensor made using a plurality of electrochemical cells in series. ZL201780083934.8 discloses a sensor sending a signal to an antenna unit for detecting a metal contact surface of a liquid.
However, most of the conventional chemical liquid sensors are based on the chemical reaction principle, and need to use a chemical probe to directly contact with a detection sample for detection, so that the detection unit has a large size, the repeated detection process causes waste of a detection object, the cost is invisibly and greatly increased, and on the other hand, especially, the detection of biological tissue liquid may cause certain damage to the organism. The problem can be solved thoroughly by using the non-contact interaction of the electromagnetic wave and the detection object, and the customized design can be carried out for quick detection due to the high flexibility of the structural design.
Disclosure of Invention
The invention aims to provide a metamaterial-based chemical liquid microwave sensor without using a chemical probe and application thereof.
The invention relates to a chemical liquid microwave sensor based on a metamaterial, which comprises a substrate (1), a step-type microstrip transmission line (2), an omega-type open resonant ring (3), a cylindrical induction cavity (4) and a microstrip line ground wire (5); a cylindrical induction cavity (4) is arranged on the upper surface of the substrate (1); an omega-shaped open resonant ring (3) is arranged on a substrate (1) along the outline side line of a cylindrical induction cavity (4), the circular area of the upper half part of the omega-shaped open resonant ring (3) is concentric with the cylindrical induction cavity (4), the cylindrical induction cavity (4) is positioned in the omega-shaped open resonant ring (3), and the diameter of the cylindrical induction cavity (4) is the same as the inner diameter of the omega-shaped open resonant ring (3); a step-type microstrip transmission line (2) is arranged on the outer side of the upper semicircle of the omega-type opening resonance (3), and the omega-type opening resonance ring (3) is positioned on the bent inner side of the step-type microstrip transmission line (2); the circle center of the cylindrical induction cavity (4) is also positioned on the straight line at the two ends of the step-type microstrip transmission line (2); a layer of copper film is coated on the lower surface of the substrate to be used as a microstrip line ground wire (5).
The cylindrical sensing cavity (4) is coated with a copper film.
The depth of the cylindrical induction cavity (4) is 97-99% of the thickness of the substrate (1).
The substrate (1) is made of one of epoxy resins of FR1, FR2, FR3, FR4, FR5 and FR6 models.
The step-type microstrip transmission line (2) and the omega-type opening resonance ring (3) are manufactured on the substrate (1) by adopting a screen printing process according to the design size of the chemical liquid microwave sensor.
The method for printing the stepped microstrip transmission line (2) and the omega-shaped open resonant ring (3) on the substrate (1) specifically comprises the following steps: and preparing a screen printing plate according to the design size of the chemical liquid microwave sensor, placing the screen printing plate on the upper surface of the substrate (1), and then obtaining a corresponding structure through a screen printing process.
The metamaterial-based chemical liquid microwave sensor is applied to identification of chemical liquid.
The metamaterial-based chemical liquid microwave sensor is applied to identification of polyethylene glycol 300, polyethylene glycol 1500, isopropanol, liquid ammonia and water chemical liquid.
The principle of the invention is as follows: the sensor of the invention utilizes the principle of microwave transmission coefficient resonance effect that a substrate integrates a microstrip transmission line and an open resonant ring to form a metamaterial structure, and when chemical liquid in an induction cavity changes, the resonance frequency point of the microwave transmission coefficient can obviously shift, thereby realizing the accurate identification of the chemical liquid type.
The invention has the beneficial effects that: the invention utilizes the microwave transmission coefficient resonance effect of a metamaterial structure formed by integrating a microstrip transmission line and an open resonant ring on a substrate, when chemical liquid in an induction cavity changes, the resonance frequency point of the microwave transmission coefficient can obviously shift, thereby realizing the accurate identification of the chemical liquid type, effectively overcoming the defects of very limited identification type, poor robustness due to environmental interference and incapability of being reused of the traditional chemical liquid sensor, and having the advantages of simple structure, high sensitivity, small volume, low cost, multiple types of measured liquid, small measurement error and reusability.
Drawings
Fig. 1 is a schematic view of the upper surface structure of the microwave sensor of the present invention.
Fig. 2 is a schematic view of the lower surface structure of the microwave sensor of the present invention.
The sensor in the embodiment of fig. 3 detects the microwave transmission curves of various liquids.
Wherein: the antenna comprises a substrate-1, a step-type microstrip transmission line-2, an omega-type open resonant ring-3, a cylindrical induction cavity-4 and a microstrip line ground wire-5.
Detailed Description
Example 1:
a chemical liquid microwave sensor based on metamaterial comprises a substrate 1, a step-type microstrip transmission line 2, an omega-type open resonant ring 3, a cylindrical induction cavity 4 and a microstrip line ground wire 5; the upper surface structure is shown in fig. 1, and the lower surface structure is shown in fig. 2.
(1) The substrate 1 is made of one of the epoxy resins of FR4 type, with a thickness of 1.64 mm; the lower surface of the base 1 is coated with a copper film, namely a microstrip line ground wire 5.
(2) A cylindrical induction cavity 4 is processed on a substrate with the copper coated on the back, the inner diameter of the cylindrical induction cavity 4 is 10mm, the depth of the cylindrical induction cavity is 1.6mm, and a layer of copper film is coated inside the cylindrical induction cavity 4. The cylindrical induction cavity 4 is positioned inside the omega-shaped open resonant ring 3; the circle center of the cylindrical induction cavity 4 is also positioned on the straight line at the two ends of the step-type microstrip transmission line 2;
(3) preparing the structure in the step (2) on the upper surface of the substrate 1 by adopting a screen printing process; firstly, placing a screen printing plate on the upper surface of a substrate 1, and printing a metamaterial structure pattern, wherein the line width of the step-type microstrip transmission line 2 is 1mm, and two ends of the step-type microstrip transmission line are positioned on the same straight line; the omega-shaped opening resonance ring 3 is positioned on the bent inner side of the step-shaped microstrip transmission line 2, the line width is 1mm, the inner diameter is 10mm, and the opening gap is 0.4 mm.
(4) Three alcohol substances of polyethylene glycol 300, polyethylene glycol 1500 and isopropanol are placed in the induction cavity 4, and microwave transmission parameters S21 are tested, wherein the performance parameters are shown in Table 1:
TABLE 1
| Species of | Ethylene glycol 300 | Polyethylene glycol 1500 | Isopropanol (I-propanol) |
| Microwave relative dielectric constant | 9.5 | 2 | 6 |
| Resonance frequency point (GHz) | 1.45 | 1.95 | 1.67 |
Example 2:
a chemical liquid microwave sensor based on metamaterial comprises a substrate 1, a step-type microstrip transmission line 2, an omega-type open resonant ring 3, a cylindrical induction cavity 4 and a microstrip line ground wire 5; the upper surface structure is shown in fig. 1, and the lower surface structure is shown in fig. 2.
(1) The substrate 1 is made of one of the epoxy resins of FR4 type, with a thickness of 1.64 mm; the lower surface of the base 1 is coated with a copper film, namely a microstrip line ground wire 5.
(2) A cylindrical induction cavity 4 is processed on a substrate with the copper coated on the back, the inner diameter of the cylindrical induction cavity 4 is 10mm, the depth of the cylindrical induction cavity is 1.6mm, and a layer of copper film is coated inside the cylindrical induction cavity 4. The cylindrical induction cavity 4 is positioned inside the omega-shaped open resonant ring 3; the circle center of the cylindrical induction cavity 4 is also positioned on the straight line at the two ends of the step-type microstrip transmission line 2;
(3) preparing the structure in the step (2) on the upper surface of the substrate 1 by adopting a screen printing process; firstly, placing a screen printing plate on the upper surface of a substrate 1, and printing a metamaterial structure pattern, wherein the line width of the step-type microstrip transmission line 2 is 1mm, and two ends of the step-type microstrip transmission line are positioned on the same straight line; the omega-shaped opening resonance ring 3 is positioned on the bent inner side of the step-shaped microstrip transmission line 2, the line width is 1mm, the inner diameter is 10mm, and the opening gap is 0.5 mm.
(4) Liquid ammonia is placed in the induction cavity 4, microwave transmission parameters S21 of the liquid ammonia are tested, and the performance parameters are shown in Table 2:
TABLE 2
| Species of | Liquid ammonia |
| Microwave relative dielectric constant | 67 |
| Resonance frequency point (GHz) | 2.32 |
Example 3:
a chemical liquid microwave sensor based on metamaterial comprises a substrate 1, a step-type microstrip transmission line 2, an omega-type open resonant ring 3, a cylindrical induction cavity 4 and a microstrip line ground wire 5; the upper surface structure is shown in fig. 1, and the lower surface structure is shown in fig. 2.
(1) The substrate 1 is made of one of the epoxy resins of FR4 type, with a thickness of 1.64 mm; the lower surface of the base 1 is coated with a copper film, namely a microstrip line ground wire 5.
(2) A cylindrical induction cavity 4 is processed on a substrate with the copper coated on the back, the inner diameter of the cylindrical induction cavity 4 is 10mm, the depth of the cylindrical induction cavity is 1.6mm, and a layer of copper film is coated inside the cylindrical induction cavity 4. The cylindrical induction cavity 4 is positioned inside the omega-shaped open resonant ring 3; the circle center of the cylindrical induction cavity 4 is also positioned on the straight line at the two ends of the step-type microstrip transmission line 2;
(3) preparing the structure in the step (2) on the upper surface of the substrate 1 by adopting a screen printing process; firstly, placing a screen printing plate on the upper surface of a substrate 1, and printing a metamaterial structure pattern, wherein the line width of the step-type microstrip transmission line 2 is 1mm, and two ends of the step-type microstrip transmission line are positioned on the same straight line; the omega-shaped opening resonance ring 3 is positioned on the bent inner side of the step-shaped microstrip transmission line 2, the line width is 1mm, the inner diameter is 10mm, and the opening gap is 0.5 mm.
(4) Purified water is placed in the induction cavity (4), microwave transmission parameters S21 of the purified water are tested, and the performance parameters are shown in Table 3:
TABLE 3
| Species of | Purified water |
| Microwave relative dielectric constant | 78 |
| Resonance frequency point (GHz) | 2.22 |
The microwave transmission curves of the sensors in embodiments 1 to 3 for detecting various liquids are shown in fig. 3, and it can be seen from fig. 3 that different chemical liquids have their own resonance frequency points, so that the sensors of the present invention can effectively distinguish the chemical liquids.
Claims (6)
1. A chemical liquid microwave sensor based on metamaterials is characterized by comprising a substrate (1), a step-type microstrip transmission line (2), an omega-type open resonant ring (3), a cylindrical induction cavity (4) and a microstrip line ground wire (5); a cylindrical induction cavity (4) is arranged on the upper surface of the substrate (1); an omega-shaped open resonant ring (3) is arranged on a substrate (1) along the outline side line of a cylindrical induction cavity (4), the circular area of the upper half part of the omega-shaped open resonant ring (3) is concentric with the cylindrical induction cavity (4), the cylindrical induction cavity (4) is positioned in the omega-shaped open resonant ring (3), and the diameter of the cylindrical induction cavity (4) is the same as the inner diameter of the omega-shaped open resonant ring (3); a step-type microstrip transmission line (2) is arranged on the outer side of the upper semicircle of the omega-type opening resonance ring (3), and the omega-type opening resonance ring (3) is positioned on the bent inner side of the step-type microstrip transmission line (2); the circle center of the cylindrical induction cavity (4) is also positioned on the straight line at the two ends of the step-type microstrip transmission line (2); a layer of copper film is coated on the lower surface of the substrate to be used as a microstrip line ground wire (5);
a layer of copper film is coated inside the cylindrical induction cavity (4); the depth of the cylindrical induction cavity (4) is 97-99% of the thickness of the substrate (1).
2. The metamaterial-based chemical liquid microwave sensor as in claim 1, wherein: the substrate (1) is made of one of epoxy resins of FR1, FR2, FR3, FR4, FR5 and FR6 models.
3. The metamaterial-based chemical liquid microwave sensor as in claim 1, wherein: the step-type microstrip transmission line (2) and the omega-type opening resonance ring (3) are manufactured on the substrate (1) by adopting a screen printing process according to the design size of the chemical liquid microwave sensor.
4. The metamaterial-based chemical liquid microwave sensor as in claim 2, wherein: the method for printing the stepped microstrip transmission line (2), the omega-shaped open resonant ring (3) and the cylindrical induction cavity (4) on the substrate (1) specifically comprises the following steps: and preparing a screen printing plate according to the design size of the chemical liquid microwave sensor, placing the screen printing plate on the upper surface of the substrate (1), and then obtaining a corresponding structure through a screen printing process.
5. Use of a metamaterial-based chemical liquid microwave sensor as in claim 1 to identify chemical liquids.
6. The metamaterial-based chemical liquid microwave sensor as in claim 5, wherein the chemical liquid is one of polyethylene glycol 300, polyethylene glycol 1500, isopropyl alcohol, liquid ammonia, and water.
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