CN112028088B - Preparation system and process of electronic-grade ammonia water - Google Patents
Preparation system and process of electronic-grade ammonia water Download PDFInfo
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- CN112028088B CN112028088B CN202010862232.3A CN202010862232A CN112028088B CN 112028088 B CN112028088 B CN 112028088B CN 202010862232 A CN202010862232 A CN 202010862232A CN 112028088 B CN112028088 B CN 112028088B
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
- C01C1/00—Ammonia; Compounds thereof
- C01C1/02—Preparation, purification or separation of ammonia
- C01C1/022—Preparation of aqueous ammonia solutions, i.e. ammonia water
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/48—Mixing liquids with liquids; Emulsifying characterised by the nature of the liquids
- B01F23/481—Mixing liquids with liquids; Emulsifying characterised by the nature of the liquids using liquefied or cryogenic gases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/49—Mixing systems, i.e. flow charts or diagrams
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/70—Pre-treatment of the materials to be mixed
- B01F23/708—Filtering materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F27/00—Mixers with rotary stirring devices in fixed receptacles; Kneaders
- B01F27/80—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis
- B01F27/805—Mixers with rotary stirring devices in fixed receptacles; Kneaders with stirrers rotating about a substantially vertical axis wherein the stirrers or the receptacles are moved in order to bring them into operative position; Means for fixing the receptacle
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/30—Driving arrangements; Transmissions; Couplings; Brakes
- B01F35/31—Couplings
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Mixers Of The Rotary Stirring Type (AREA)
Abstract
The invention discloses a preparation system of electronic-grade ammonia water, which comprises an evaporator, a mixer, a mixing tank and a finished product tank, wherein the evaporator is connected with a liquid ammonia storage tank, the mixer is connected with the evaporator through a filter pipe, a circulating pipe group is connected between the mixer and the mixing tank, and the finished product tank is connected with the mixing tank. The system is simple in composition, complex and simple in structure, can realize systematization of the production process of electronic-grade ammonia water, and is beneficial to enterprises to realize quantitative production under relatively economic conditions; the invention also discloses a preparation process of the electronic-grade ammonia water, which can realize systematic production of the electronic-grade ammonia water on the basis of the preparation system, and has relatively low cost and high production efficiency.
Description
Technical Field
The invention relates to the technical field of material chemistry, in particular to a preparation system and a preparation process of electronic-grade ammonia water.
Background
With the rapid development of the electronic industry, particularly in the field of semiconductors, the requirement on the purity of ammonia water is higher and higher, but the existing manufacturing process of electronic-grade ammonia water is relatively complicated, and a mature system capable of producing electronic-grade ammonia water relatively economically and directly is not available.
In view of this, the present application is specifically made.
Disclosure of Invention
The invention aims to provide a system for preparing electronic-grade ammonia water, which has simple composition, realizes simplification of complexity, can realize systematization of the production process of the electronic-grade ammonia water, and is beneficial to enterprises to realize quantitative production under relatively economic conditions;
the second purpose of the invention is to provide a preparation process of electronic-grade ammonia water, which is simple to implement and easy to operate, can realize systematic production of electronic-grade ammonia water on the basis of a preparation system, and has relatively low cost and high production efficiency.
The embodiment of the invention is realized by the following steps:
the utility model provides a preparation system of electronic grade aqueous ammonia, includes evaporimeter, blender, mixing tank and finished product groove, and the evaporimeter is connected with the liquid ammonia storage tank, and the blender passes through the filter tube to be connected with the evaporimeter, and is connected with the circulation nest of tubes between blender and the mixing tank, and the finished product groove is connected with the mixing tank.
Furthermore, one end of the filter pipe is connected with the upper part of the mixer, at least one group of condensate discharge pipes is communicated between the pipe body of the filter pipe and the mixer, the upper end of each condensate discharge pipe is communicated with the lower part of the pipe body of the filter pipe, and the lower end of each condensate discharge pipe is communicated with the mixer.
Further, be provided with the filtering component in the junction of condensate delivery pipe and filter tube shaft, the filtering component includes first filter and second filter, and first filter sets up in the inner chamber of filter tube shaft and can be used for separating the inner chamber of filter tube shaft, and the second filter sets up in the inner chamber of condensate delivery pipe and can be used for separating the inner chamber of condensate delivery pipe, is provided with link gear between first filter and the second filter.
Further, the link gear includes the hinge, pendulum rod and shadoof, the hinge sets up in the junction of the inner chamber of filter tube shaft and condensate delivery pipe inner chamber, the inner chamber of filter tube shaft is articulated and can the activity be separated with the hinge in first filter one side, the hinge is close to the fixed pendulum rod of one side of condensate delivery pipe, the second filter slides and sets up in the inner chamber of condensate delivery pipe, the shadoof is fixed in on the second filter, it has the bar hole to process on the pendulum rod, be fixed with the sliding pin that stretches into to the bar downthehole slidable on the shadoof.
Furthermore, an annular step is formed on the wall of the inner cavity of the condensate discharge pipe, a cylindrical boss matched with the annular step is arranged on one side of the second filter plate, and the second filter plate is matched with the annular step in a plug-in mounting mode through the cylindrical boss.
Furthermore, a stirring mechanism is arranged at the top of the mixer, the stirring mechanism comprises a power motor, a transmission case and a stirring shaft, the power motor is connected with the input end of the transmission case, the transmission case is arranged in the mixer, the transmission case is provided with a first output shaft and a second output shaft which synchronously act and reversely rotate, a first shifting wheel is sleeved on the first output shaft, a second shifting wheel is sleeved on the second output shaft, arc-shaped gaps are respectively processed on the outer edges of the first shifting wheel and the second shifting wheel, an annular track sleeved on the first shifting wheel and the second shifting wheel is fixed in the mixer, a first track for embedding the end part of the stirring shaft is formed between the arc-shaped gap of the first shifting wheel and the inner hole wall of the annular track, so that the stirring shaft can move along the outer edge of the first shifting wheel, a second track for embedding the end part of the stirring shaft is also formed between the arc-shaped gap of the second shifting wheel and the inner hole wall of the annular track, so that the stirring shaft can move along the outer edge of the second thumb wheel, one side of the first track is tangent to one side of the second track, and the tangent parts of the first track and the second track are communicated with each other.
Furthermore, a partition plate is fixed on the upper portion of an inner cavity of the mixer, the annular rail is fixed on the partition plate, a positioning rail is machined on the partition plate and penetrates through the upper surface and the lower surface of the partition plate, the shape of the positioning rail is the same as that of the combination of the first rail and the second rail, and one end of the stirring shaft penetrates through the positioning rail and penetrates into the first rail or the second rail.
Furthermore, one side of the partition board far away from the power motor is provided with a limiting component which enables the stirring shaft to move back and forth between the first track and the second track in a switching manner, the limiting component comprises a T-shaped rod, a limiting pin and a positioning pin, the positioning pin is fixed on the partition board surface wall on one side of the middle communicating part of the positioning track, a vertical beam of the T-shaped rod is hinged with the positioning pin, the end part of the vertical beam of the T-shaped rod is located on the left side or the right side of the middle communicating part of the positioning track, the limiting pin is fixed on the partition board surface wall on one side of the positioning track far away from the positioning pin, the cross beam of the T-shaped rod is located between the positioning pin and the limiting pin, the limiting pin is used for limiting the rotating angle of the cross beam of the T-shaped rod, and a spring is fixed between the end part of the vertical beam of the limiting pin and the T-shaped rod.
A preparation process for preparing electronic-grade ammonia water by using the preparation system comprises the steps of introducing liquid ammonia stored in a liquid ammonia storage tank into an evaporator and heating, conveying generated ammonia gas into a mixer through a filter pipe, condensing the ammonia gas in the mixer into liquid ammonia, enabling the ammonia gas to reach a specified water level in the mixer, introducing ultrapure water, adjusting the concentration of the ammonia water, cooling and conveying the ammonia water to a mixing tank after the ammonia water is adjusted to the specified concentration, adding ultrapure water to adjust the concentration of the ammonia water to 29% to obtain finished electronic-grade ammonia water, conveying the prepared finished electronic-grade ammonia water to a finished product tank, precisely filtering, and subpackaging and warehousing.
Preferably, circulating water at 30-40 ℃ is adopted in the evaporator to heat the liquid ammonia, and the pressure in the evaporator is controlled to be 1.5-1.8 MPa.
The embodiment of the invention has the beneficial effects that:
the preparation system provided by the embodiment of the invention mainly comprises the evaporator, the mixer, the mixing tank and the finished product tank, has simple integral structure composition, realizes orderly and concise materialization of complex procedures, realizes simplification, and is beneficial to the realization of quantitative production of enterprises under relatively economic conditions; in addition, the preparation process provided by the embodiment of the invention is operated on the basis of the main structure body, the whole production process is simple to implement and easy to operate, and the advantages of relatively low cost and high production efficiency can be achieved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a flow chart of a manufacturing process provided by an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a mixer provided in an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a linkage structure according to an embodiment of the present invention;
FIG. 4 is a schematic partial structural view of a stirring mechanism provided in an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a limiting assembly according to an embodiment of the present invention.
Icon: 1-a mixer; 2-a filter tube; 3-a condensate drain; 4-a stirring mechanism; 5-a first filter plate; 6-a hinge; 7-oscillating bar; 8-a strip-shaped hole; 9-a limiting component; 10-lifting a rod; 11-a second filter plate; 12-an annular boss; 41-a first output shaft; 42-a second output shaft; 43-driven gear; 44-a drive gear; 45-a second thumb wheel; 46-a first thumbwheel; 47-a circular track; 48-arc notch; 49-stirring shaft; 91-positioning the track; 92-a separator; 93-a positioning pin; 94-vertical beam; 95-a cross beam; 96-a spacing pin; 97-spring.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "parallel," "perpendicular," and the like do not require that the components be absolutely parallel or perpendicular, but may be slightly inclined. For example, "parallel" merely means that the directions are more parallel relative to "perpendicular," and does not mean that the structures are necessarily perfectly parallel, but may be slightly tilted.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Examples
Referring to fig. 1, the system for preparing electronic-grade ammonia water provided by this embodiment includes an evaporator, a mixer 1, a mixing tank and a finished product tank, where the evaporator is connected to a liquid ammonia storage tank, the liquid ammonia storage tank is used to store liquid ammonia raw materials, the mixer 1 is connected to the evaporator through a filter tube 2, and a circulation tube set is connected between the mixer 1 and the mixing tank, the circulation tube set is used to circularly pump an ammonia water solution, and the finished product tank is connected to the mixing tank and is used to store the prepared finished product ammonia water. The whole preparation system is approximately composed of the parts, so that the whole structure is simple, the complex procedures are orderly and simply materialized, and the systematization of the production process of the electronic-grade ammonia water is realized. In addition, the embodiment of the invention also provides a preparation process for preparing electronic-grade ammonia water by using the preparation system, liquid ammonia stored in a liquid ammonia storage tank is pressed into or introduced into an evaporator through the pressure in the tank and is heated, in the embodiment, circulating water at 30-40 ℃ is adopted in the evaporator to heat the liquid ammonia, the pressure condition range in the evaporator is controlled to be 1.5-1.8 Mpa, ammonia gas generated after the liquid ammonia is heated is filtered by the filter pipe 3 and then is dissipated into the mixer 1, the ammonia gas in the mixer 1 is condensed into the liquid ammonia and reaches a specified water level in the mixer 1, the water level is 60-70% of the capacity of the mixer 1, ultrapure water is introduced at the moment, the primary concentration of the ammonia water, such as 15-20%, a circulating pump on a circulating pipe group is opened, the ammonia water circulates back and forth between the mixing tank and the mixer 1 and is fully dissolved with the ammonia gas, and the ultrapure water is continuously added in the process to adjust to the specified concentration, cooling the ammonia water after reaching the standard by a cooler, conveying the cooled ammonia water into a mixing tank, finally adding ultrapure water to adjust the ammonia water concentration to 29 percent to obtain the finished product of electronic grade ammonia water, after the ammonia water is qualified by inspection, performing precise filtration, subpackaging and warehousing, and collecting and treating waste gas and waste water generated in the middle process. By adopting the preparation process, the finished product of the electronic-grade ammonia water can be prepared in batches, namely the systematic production of the electronic-grade ammonia water can be realized on the basis of the preparation system, the whole production process is simple to implement and easy to operate, and the advantages of relatively low cost and high production efficiency can be achieved.
Since ammonia gas is transported in the filter tube 2, condensate is likely to be generated, and in order to recycle the condensate, please refer to fig. 2, one end of the filter tube 2 is connected to the upper portion of the mixer 1, preferably, one end of the filter tube 2 connected to the liquid ammonia storage tank is located at a high position, and the other end, i.e., one end connected to the mixer 1, is located at a low position, so as to prevent the condensate from flowing back and lowering the distillation efficiency, and the middle tube body of the filter tube 2 is coiled at the upper portion of the mixer 1 and is coiled at most two times. At least one group of condensate discharge pipes 3 is communicated between the pipe body of the filter pipe 2, namely the part coiled with the upper part of the mixer 1, and the mixer 1, the number of the condensate discharge pipes 3 is selected according to the occupied area of the mixer 1, and more groups of the condensate discharge pipes 3 can be arranged when the occupied area is large. Taking a single group of condensate discharge pipes 3 as an example, the upper ends of the condensate discharge pipes 3 are communicated with the lower part of the filtering pipe body so as to collect condensate, and the lower ends of the condensate discharge pipes 3 are communicated with the mixer 1 so as to facilitate the condensate to flow into the mixer 1.
In order to filter the ammonia gas delivered into the mixer 1, i.e. not only the ammonia gas in the filter pipe 2 but also the ammonia gas in the condensate discharge pipe 3, a filter assembly is arranged in the joint of the condensate discharge pipe 3 and the pipe body of the filter pipe 2, so that a group of filter assemblies can be used to filter the condensate discharge pipe 3 and the pipe body of the filter pipe 2 simultaneously, please refer to fig. 3, wherein the filter assembly comprises a first filter plate 5 and a second filter plate 11, the first filter plate 5 is arranged in the inner cavity of the pipe body of the filter pipe 2 and can be used to separate the inner cavity of the pipe body of the filter pipe 2, i.e. the first filter plate 5 is separated in the inner cavity of the pipe body of the filter pipe 2, so that the ammonia gas can be delivered in the filter pipe 2 smoothly after being filtered by the first filter plate 5, the second filter plate 11 is arranged in the inner cavity of the condensate discharge pipe 3 and can be used to separate the inner cavity of the condensate discharge pipe 3, similarly, the second filter plate 11 is blocked in the inner cavity of the condensate discharge pipe 3, so that ammonia gas can be smoothly transported in the condensate discharge pipe 3 after being filtered by the second filter plate 11.
Considering that first filter 5 and second filter 11 can appear filtering badly and lead to the condition that filtration efficiency is lower relatively after using certain age, in order to improve certain protective capacities or have certain explosion-proof pipe's ability, be provided with link gear between first filter 5 and the second filter 11, can make first filter 5 and second filter 11 activity respectively set up in filter tube 2 and condensate discharge pipe 3, both can accomplish the linkage action to change the separation effect into partial sealing effect, make whole air flue be in unblocked state and prevent the explosion phenomenon that pressure too big and appear. In this embodiment, the link gear includes hinge 6, pendulum rod 5 and shadoof 10, hinge 6 is the round pin hinge, and hinge 6 sets up in the junction of the inner chamber of 2 pipe shafts of filter tube and 3 inner chambers of condensate discharge pipe, the inner chamber of 2 pipe shafts of filter tube is separated with hinge 6 is articulated and can move about to first filter 5 downside, in this embodiment, uses the direction of ammonia carrying in filter tube 2 as the benchmark, and the one end that is close to the liquid ammonia storage tank is the front side, and the one end that is close to blender 1 is the rear side, hinge 6 sets up in the rear side junction of the inner chamber of 2 pipe shafts of filter tube and 3 inner chambers of condensate discharge pipe, shows that second filter 11 is located 5 front sides of first filter promptly.
The hinge 6 is close to one side of condensate discharge pipe 3 and is the front side fixed pendulum rod 7, and the length direction of pendulum rod 7 is parallel to each other with the axial of filter tube 2 pipe shaft, second filter 11 slides and sets up in the inner chamber of condensate discharge pipe 3, in this embodiment, the shaping has annular step 12 on the inner chamber wall of condensate discharge pipe 3, second filter 11 one side has the column boss that matches with annular step 12, and second filter 11 cooperates with 12 cartridge of annular step through its column boss to reach second filter 1 and 3 inner chamber sliding fit's of condensate discharge pipe purpose. The lifting rod 10 is fixed on the second filter plate 11, a strip-shaped hole 8 arranged along the length direction of the swinging rod 7 is processed on the swinging rod 7, and a sliding pin capable of slidably extending into the strip-shaped hole 8 is fixed on the lifting rod 10. When the first filter plate 5 is under the condition of overpressure or overpressure, the upper end of the first filter plate 5 inclines towards the rear side, so that the second filter plate 11 moves upwards and slides through the interaction of the swing rod 7 and the lifting rod 10, and the purpose of partially opening the inner cavity of the filter pipe 2 and the inner cavity of the condensate discharge pipe 3 is achieved at the same time; naturally, the ease of rotation of the first filter plate 5, i.e. the function of opening after an overpressure or overpressure, can be achieved by providing a torsion spring with a low stiffness coefficient at the hinge 6 or by providing a friction layer at the first filter plate 5.
In order to achieve a more sufficient dissolving effect in the process of the ammonia water solution circulating back and forth and the ammonia gas dissolving sufficiently, the inventor has made an innovative improvement on the basis of the conventional stirring mechanism, the stirring mechanism 4 is arranged at the top of the mixer 1, please refer to fig. 4 and 5, the stirring mechanism 4 comprises a power motor, a transmission case and a stirring shaft 49, the power motor is connected with the input end of the transmission case, the transmission case is arranged in the mixer 1, the transmission case is a gear transmission case, the transmission case has a first output shaft 41 and a second output shaft 42 which act synchronously and rotate in opposite directions, and the purpose of the first output shaft 41 and the second output shaft 42 acting synchronously and rotating in opposite directions can be achieved by respectively sleeving a driving gear 44 and a driven gear 43 on the first output shaft 41 and the second output shaft 42. The first output shaft 41 is sleeved with a first thumb wheel 46, the second output shaft 42 is sleeved with a second thumb wheel 45, and the mutual positions and states of the first thumb wheel 46 and the second thumb wheel 45 are the same as those of the driving gear 44 and the driven gear 43, namely, the first thumb wheel 46 and the second thumb wheel 45 can synchronously move and relatively rotate.
In order to enable the stirring shaft 49 to have a larger stirring range, the stirring shaft is different from a traditional fixed stirring shaft, an arc notch 48 is processed on the outer edge of the first stirring wheel 46 and the second stirring wheel 45, the cross section of the arc notch 48 is semicircular and can just accommodate a half of the end part of the stirring shaft 49, the arc notches 48 of the first stirring wheel 46 and the second stirring wheel 45 can be correspondingly attached after the first stirring wheel and the second stirring wheel rotate respectively for one circle, and therefore a cylindrical space capable of accommodating the whole end part of the stirring shaft 49 is formed. An annular track 47 sleeved on the first thumb wheel 46 and the second thumb wheel 45 is fixed in the mixer 1, namely the first thumb wheel 46 and the second thumb wheel 45 are arranged in an inner hole of the annular track 47. Preferably, the inner hole of the annular track 47 is in a shape of a combination of two circles which are circumscribed with each other, a first track for the end of the stirring shaft 49 to be inserted is formed between the arc-shaped notch 48 of the first stirring wheel 46 and the inner hole wall of the annular track 47, so that the stirring shaft 49 can move circumferentially along the outer edge of the first stirring wheel 46, and similarly, a second track for the end of the stirring shaft 49 to be inserted is also formed between the arc-shaped notch 48 of the second stirring wheel 45 and the inner hole wall of the annular track 47, so that the stirring shaft 49 can move circumferentially along the outer edge of the second stirring wheel 45, that is, the end of the stirring shaft 49 can move both in the first track and in the second track, so as to provide a larger movement space for the translation of the stirring shaft 49.
In order to enable the selective switching movement of agitator shaft 49 between the first track and the second track, the first track side and the second track side are tangent to each other, and the first track and the second track tangent portion communicate with each other, i.e., a shape representing the combination of the first track and the second track is substantially similar to the shape of the numeral "8". In order to increase the stability of the stirring shaft 49 during stirring, please refer to fig. 5 again, a partition plate 92 is fixed at the upper part of the inner cavity of the mixer 1, the annular rail is fixed at one side of the partition plate 92 close to the power motor, and the partition plate 92 can be used as a supporting platform and can also play a role in isolating and preventing wetting. The partition plate 92 is provided with a positioning rail 91, the positioning rail 91 penetrates through the upper and lower surfaces of the partition plate 92, the shape of the positioning rail 91 is the same as the shape of the combination of the first rail and the second rail, namely, the positioning rail 91 is also in the shape of the number "8", and the positioning rail 91 can be obtained by downwards translating the 8-shaped rail formed by combining the first rail and the second rail. The upper end of the stirring shaft 49 penetrates through the positioning rail 92 and penetrates into the corresponding first rail or second rail, so that the stirring shaft 49 can be more stable in translation. Of course, the stirring shaft 49 may be provided with two limiting rings on both sides thereof passing through the positioning rail 92, that is, two limiting rings are formed on the stirring shaft 49 and respectively located on the upper and lower sides of the partition 92 to prevent the stirring shaft 49 from being separated from the positioning rail 92, alternatively, the positions of the two limiting rings may also be formed on the upper and lower sides of any shifting wheel, and the two limiting rings can also play a role in preventing the stirring shaft 49 from being separated from the first rail or the second rail. The orbital orbit parallel displacement of 8 types can be followed to whole (mixing) shaft 49, can obtain bigger removal space to realize diversified stirring, fixed (mixing) shaft of tradition can reach more abundant stirring effect relatively, promotes the liquid molecule interact in almost every department space, has avoided the problem at "stirring dead angle" to appear.
In order to enable the stirring shaft 49 to regularly switch between the first track and the second track, the stirring shaft can respectively finish running along the track of the first track and the track of the second track in each movement period. The surface, namely the lower surface, of one side of the partition 92 far away from the power motor is provided with a limiting assembly 9 which enables the stirring shaft 49 to move back and forth between the first rail and the second rail, in this embodiment, the limiting assembly 9 comprises a T-shaped rod, a limiting pin 96 and a positioning pin 93, the positioning pin 93 is fixed on the surface wall of the partition 92 on one side of the middle communication part of the positioning rail 91, preferably, the position of the positioning pin 93 is located on the front side or the rear side of the middle communication part of the positioning rail 91, and the position of the front side or the rear side refers to the symmetrical center line of the whole 8-shaped rail when the connecting line of the positioning pin 93 and the middle communication part of the positioning rail 91 is just right. The middle of the vertical beam 94 of the T-shaped rod is hinged with the positioning pin 93, and the end of the vertical beam 94 of the T-shaped rod is positioned at the left or right side of the middle communication part of the positioning rail 91, so that the movement of the stirring shaft 49 in the left or right direction can be limited.
The position limiting pin 96 is fixed on the surface wall of the partition 92 on the side of the positioning pin 93 far away from the positioning rail 91, and preferably, the position of the position limiting pin 96 is located on the connecting line of the positioning pin 93 and the middle communication part of the positioning rail 91. The cross beam 95 of the T-shaped rod is located between the positioning pin 93 and the limiting pin 96, the limiting pin 96 is used for limiting the rotation angle of the cross beam 95 of the T-shaped rod, namely the angle of the vertical beam 94 deviating from the connecting line can be limited, when the end of the stirring shaft 49 runs to the middle point of the 8-shaped track, the vertical beam 94 of the T-shaped rod deviates from one side of the middle point, and further the end of the stirring shaft 49 is prevented from entering one of the first track or the second track, when the end of the stirring shaft 49 enters the other track, the stirring shaft 49 acts on the cross beam 95 to rotate the cross beam, so that the vertical beam 94 is driven to rotate and deviate to the other side, the stirring shaft 49 next moves to the middle point of the 8-shaped track, and can enter the track which is prevented from entering before, and therefore the first track and the second track can be respectively run in one motion period. Of course, in order to make the vertical beam 94 switch more stably and quickly, a spring 97 is fixed between the limit pin 96 and the end of the vertical beam 94 of the T-shaped rod. Through realizing innovative design to rabbling mechanism 4, can increase the coverage of whole (mixing) shaft 49, for traditional fixed (mixing) shaft (can only rely on increasing the coverage and just can realize bigger stirring range), can promote the liquid molecule interact in almost every space, avoided the problem at "stirring dead angle".
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention. It should be noted that structures or components illustrated in the drawings are not necessarily drawn to scale, and descriptions of well-known components and processing techniques and procedures are omitted to avoid unnecessarily limiting the invention.
Claims (7)
1. The preparation system of the electronic-grade ammonia water is characterized by comprising an evaporator, a mixer, a mixing tank and a finished product tank, wherein the evaporator is connected with a liquid ammonia storage tank, the mixer is connected with the evaporator through a filter pipe, a circulating pipe group is connected between the mixer and the mixing tank, and the finished product tank is connected with the mixing tank;
one end of the filter pipe is connected with the upper part of the mixer, at least one group of condensate discharge pipes is communicated between the pipe body of the filter pipe and the mixer, the upper ends of the condensate discharge pipes are communicated with the lower part of the pipe body of the filter pipe, and the lower ends of the condensate discharge pipes are communicated with the mixer;
a filter assembly is arranged in the joint of the condensate discharge pipe and the filter pipe body, the filter assembly comprises a first filter plate and a second filter plate, the first filter plate is arranged in the inner cavity of the filter pipe body and can be used for separating the inner cavity of the filter pipe body, the second filter plate is arranged in the inner cavity of the condensate discharge pipe and can be used for separating the inner cavity of the condensate discharge pipe, and a linkage mechanism is arranged between the first filter plate and the second filter plate;
the linkage mechanism comprises a hinge, a swing rod and a lifting rod, wherein the hinge is arranged at the joint of the inner cavity of the filter pipe body and the inner cavity of the condensate discharge pipe, one side of the first filter plate is hinged with the hinge and can movably separate the inner cavity of the filter pipe body, the hinge is close to one side of the condensate discharge pipe and is fixed with the swing rod, the second filter plate is slidably arranged in the inner cavity of the condensate discharge pipe, the lifting rod is fixed on the second filter plate, a strip-shaped hole is processed in the swing rod, and a sliding pin which can slidably extend into the strip-shaped hole is fixed on the lifting rod.
2. The system for preparing electronic-grade ammonia water according to claim 1, wherein an annular step is formed on the inner cavity wall of the condensate discharge pipe, a cylindrical boss matched with the annular step is arranged on one side of the second filter plate, and the second filter plate is inserted and matched with the annular step through the cylindrical boss.
3. The system for preparing electronic grade ammonia water according to claim 1, wherein a stirring mechanism is disposed at the top of the mixer, the stirring mechanism includes a power motor, a transmission box and a stirring shaft, the power motor is connected with an input end of the transmission box, the transmission box is disposed in the mixer, the transmission box has a first output shaft and a second output shaft which are synchronously operated and oppositely turned, a first shifting wheel is sleeved on the first output shaft, a second shifting wheel is sleeved on the second output shaft, arc-shaped notches are respectively processed on outer edges of the first shifting wheel and the second shifting wheel, an annular track sleeved on the first shifting wheel and the second shifting wheel is fixed in the mixer, a first track for embedding an end portion of the stirring shaft is formed between the arc-shaped notch of the first shifting wheel and an inner hole wall of the annular track, so that the (mixing) shaft can follow the outer edge removal of first thumb wheel, also form between the arc breach of second thumb wheel and the orbital inner bore wall of annular and be used for supplying the second track of (mixing) shaft tip embedding, so that the (mixing) shaft can follow the outer edge removal of second thumb wheel, first track one side with tangent between second track one side, just first track and the tangent part of second track communicate each other.
4. The system for preparing electronic grade ammonia water according to claim 3, wherein a partition plate is fixed on the upper portion of the inner cavity of the mixer, the annular rail is fixed on the partition plate, a positioning rail is processed on the partition plate, the positioning rail penetrates through the upper surface and the lower surface of the partition plate, the shape of the positioning rail is the same as the shape of the combination of the first rail and the second rail, and one end of the stirring shaft penetrates through the positioning rail and penetrates into the first rail or the second rail.
5. The system for preparing electronic grade ammonia water according to claim 4, wherein a side of the partition board away from the power motor is provided with a limiting component which enables the stirring shaft to move back and forth between a first track and a second track in a switching way, the limiting assembly comprises a T-shaped rod, a limiting pin and a positioning pin, the positioning pin is fixed on the surface wall of the partition plate on one side of the middle communication part of the positioning track, a vertical beam of the T-shaped rod is hinged with the positioning pin, and the end part of the vertical beam of the T-shaped rod is positioned at the left side or the right side of the middle communication part of the positioning track, the limiting pin is fixed on the surface wall of the partition board at one side of the positioning pin, which is far away from the positioning track, the cross beam of the T-shaped rod is positioned between the positioning pin and the limiting pin, the limiting pin is used for limiting the rotation angle of the T-shaped rod cross beam, and a spring is fixed between the limiting pin and the end part of the vertical beam of the T-shaped rod.
6. A preparation process for preparing electronic-grade ammonia water by using the preparation system as claimed in any one of claims 1 to 5, characterized in that liquid ammonia stored in the liquid ammonia storage tank is introduced into the evaporator and heated, generated ammonia gas is sent into the mixer through the filter pipe, the ammonia gas in the mixer is condensed into liquid ammonia and reaches a specified water level in the mixer, ultrapure water is introduced and the concentration of ammonia water is adjusted, the ammonia water is cooled and conveyed into the mixing tank after being adjusted to the specified concentration, then the ultrapure water is added to adjust the concentration of ammonia water to 29%, and then the finished product electronic-grade ammonia water is prepared, conveyed into the finished product tank, and is subjected to precision filtration and then subpackaged and warehoused.
7. The preparation process of the electronic grade ammonia water according to claim 6, wherein the evaporator is internally heated by circulating water at 30-40 ℃, and the pressure in the evaporator is controlled to be 1.5-1.8 MPa.
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