CN111996487A - Mask plate frame body assembly and mask plate assembly - Google Patents

Mask plate frame body assembly and mask plate assembly Download PDF

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Publication number
CN111996487A
CN111996487A CN202010732964.0A CN202010732964A CN111996487A CN 111996487 A CN111996487 A CN 111996487A CN 202010732964 A CN202010732964 A CN 202010732964A CN 111996487 A CN111996487 A CN 111996487A
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CN
China
Prior art keywords
mask plate
fixing
frame body
fixing mechanism
mask
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Pending
Application number
CN202010732964.0A
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Chinese (zh)
Inventor
侯炜轩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vicino Technology Co ltd
Visionox Technology Inc
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Vicino Technology Co ltd
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Publication date
Application filed by Vicino Technology Co ltd filed Critical Vicino Technology Co ltd
Priority to CN202010732964.0A priority Critical patent/CN111996487A/en
Publication of CN111996487A publication Critical patent/CN111996487A/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The application discloses a mask plate frame body assembly and a mask plate assembly, wherein the mask plate frame body assembly comprises a frame body and a fixing mechanism, and the frame body is used for supporting a mask plate; the fixing mechanism is used for fixing the mask plate; the fixing mechanism is movably connected with the frame body and used for dynamically adjusting the screen tensioning force/precision of the mask plate. By means of the mode, the screen stretching precision of the mask plate can be improved.

Description

Mask plate frame body assembly and mask plate assembly
Technical Field
The application relates to the technical field of display, in particular to a mask plate frame body assembly and a mask plate assembly.
Background
With the development of electronic technology, Organic Light-Emitting Diode (OLED) displays are increasingly widely used because of their advantages of high brightness, fast response, low energy consumption, low cost, etc. In the process of manufacturing the OLED display panel, a Mask plate is generally used, and the Mask plate is used to control the position of material deposition on the substrate, so as to form patterns of different shapes on the substrate, and the Mask plate includes a precision Metal Mask (FMM) and a Common Metal Mask (CMM), and the precision Metal Mask plate is used to evaporate a light-emitting material layer, and the Common Metal Mask plate is used to evaporate an organic Common layer, etc.
The mask plate mainly comprises a Frame body (Frame) and a net surface (Sheet), the mask plate is generally manufactured by adopting a net stretching technology, and the existing net stretching technology is to combine the stretched net surface and the Frame body into a complete mask plate in a welding mode. However, the net-stretching mode has some disadvantages, firstly, the net surface and the frame body need to be detached during repair (Rework), the frame body after the net surface is detached can be reused after residual welding points are polished, and the frame body is thinned to be unusable; secondly, the mesh Position Accuracy (PPA) of the mesh surface after welding is completed cannot be adjusted, and needs to be improved.
Disclosure of Invention
The main technical problem who solves of this application provides a mask plate framework subassembly and mask plate subassembly, can improve the stretch-net precision of mask plate.
In order to solve the technical problem, the application adopts a technical scheme that: the mask plate frame body assembly comprises a frame body and a fixing mechanism, wherein the frame body is used for supporting a mask plate; the fixing mechanism is used for fixing the mask plate; the fixing mechanism is movably connected with the frame body and used for dynamically adjusting the net tensioning force and/or net tensioning precision of the mask plate.
The fixing mechanism comprises a rolling shaft and a rolling shaft support, the rolling shaft support is used for supporting and fixing the rolling shaft, and the rolling shaft can rotate relative to the rolling shaft support and is used for rolling the mask plate and fixing the mask plate.
Wherein the roller is cylindrical.
The side surface of the cylindrical rolling shaft is provided with a side plane for welding and fixing the mask plate.
The frame body is provided with a guide rail mechanism, and the fixing mechanism is connected with the guide rail mechanism in a sliding mode and used for dynamically adjusting the relative position of the fixing mechanism and the frame body.
The guide rail mechanism is a sliding groove, and the fixing mechanism is connected with the guide rail mechanism in a sliding mode through a sliding block.
Wherein, the slider with fixed establishment detachable connects.
The mask plate frame body assembly further comprises a stopping mechanism, and the stopping mechanism is used for fixing the fixing mechanism and the frame body.
The stopping mechanism comprises a clamping component, the clamping component comprises clamping grooves and clamping strips, the clamping grooves are formed in two opposite sides of the sliding groove, and the clamping strips stretch across the sliding groove and are inserted into the clamping grooves in the two sides, so that the sliding block is limited and fixed.
The frame body comprises a plurality of frame strips which are sequentially connected and form a multi-edge closed area, and the plurality of fixing mechanisms are respectively positioned on the plurality of frame strips.
The fixing mechanisms are multiple groups, each group comprises two oppositely-arranged fixing mechanisms, and the two fixing mechanisms are respectively positioned on the two opposite edges of the frame strip.
The fixing mechanism and the frame body are made of the same material.
In order to solve the above technical problem, another technical solution adopted by the present application is: the mask plate component comprises a mask plate and a mask plate frame body component, wherein the mask plate frame body component comprises a frame body and a fixing mechanism used for fixing the mask plate, the fixing mechanism is movably connected with the frame body and used for dynamically adjusting the net tensioning force or/and net tensioning precision of the mask plate.
The mask plate is connected with the fixing mechanism in a non-destructive mode, the non-destructive connection comprises the fact that the connection mode of the mask plate structure is not changed, and the mask plate is wound on the rolling shaft of the fixing mechanism.
The beneficial effect of this application is: be different from prior art's condition, this application will be used for fixed mask plate's fixed establishment to set to with framework swing joint's mode, but fixed establishment relatively framework activity, through the position of adjustment fixed establishment in the framework, can adjust the net dynamics of opening the net of mask plate and/or the precision of opening the net. By the mode, the net stretching precision of the mask plate can be improved.
Drawings
FIG. 1 is a schematic top view of a mask frame assembly according to an embodiment of the present disclosure;
FIG. 2 is a schematic view of a partial perspective view of a mask plate assembly according to an embodiment of the present disclosure;
FIG. 3 is a schematic side view of a mask plate assembly according to an embodiment of the present disclosure;
FIG. 4 is a schematic top view of another mask plate assembly according to an embodiment of the present disclosure;
fig. 5 is a schematic top view of another mask plate assembly according to an embodiment of the present disclosure.
Detailed Description
In order to make the purpose, technical solution and effect of the present application clearer and clearer, the present application is further described in detail below with reference to the accompanying drawings and examples.
The application provides a mask plate frame body assembly for the fixed stay mask plate wire side (hereinafter referred to as mask plate), this mask plate frame body assembly includes framework and the fixed establishment who is used for fixed mask plate. Wherein, fixed establishment and framework swing joint, fixed establishment relatively the framework motion, can dynamic adjustment mask plate open the net dynamics, and can open the net the dynamics of adjusting mask plate once more after opening the net.
Referring to fig. 1 to 3, fig. 1 is a schematic top view of a mask plate frame assembly according to an embodiment of the present disclosure, fig. 2 is a schematic partial perspective view of the mask plate assembly according to the embodiment of the present disclosure, and fig. 3 is a schematic side view of the mask plate assembly according to the embodiment of the present disclosure. In this embodiment, the mask plate frame assembly includes a frame 10 and a fixing mechanism 20.
The frame 10 may be a metal frame made of stainless steel or Invar (Invar) and is used to provide a fixing support for the mask 30. The frame body 10 may include a plurality of frame strips sequentially connected to form a multi-side closed area, that is, the frame body 10 is a polygon, such as a quadrangle, a hexagon, an octagon, a dodecagon, and the like, and specifically may be a regular polygon with equal side length, or may be a non-equilateral polygon, and preferably, the frame strips may be in a shape that is uniformly stressed. In other embodiments, the mask frame may be a polygon with odd number of sides, such as a triangle, a pentagon, a heptagon, etc., and certainly, the mask frame may be derived from a polygon with infinite number of sides, i.e., a circle. The frame 10 is a three-dimensional frame with a certain thickness, and the thickness of the frame 10 can be 28-33 mm.
The fixing mechanism 20 is used to fix the mask plate 30 on the frame body 10, that is, one end of the fixing mechanism 20 is connected to the mask plate 30, and the other end is connected to the frame body 10. The material of the fixing mechanism 20 may be the same as that of the frame 10, for example, the fixing mechanism 20 and the frame 10 may be stainless steel, which is used to provide sufficient support for the mask plate 30 to prevent deformation.
In the existing screen stretching process, a mask plate is generally fixed on a frame body in a welding mode after being stretched, so that the mask plate can have certain tension and the screen surface is kept flat. When using the mask plate, because FMM top has backplate glass to exist when actual coating by vaporization, backplate glass can flagging under its action of gravity for FMM flagging thereupon, and coating by vaporization cavity temperature is higher simultaneously, and FMM also can the expansion deformation under the action of thermal stress. The welded FMM PPA can change under the action of the two kinds of deformation, so that materials cannot be accurately evaporated to a designed position, and screen color mixing is caused. In order to improve the yield and prevent evaporation deviation, the stretching precision of the FMM needs to be adjusted, and in the existing fixing mode, after welding is completed, the stretching position precision of the mask plate cannot be adjusted, and if the stretching force/precision is to be adjusted, the mask plate needs to be detached and then stretched again. In the scheme that this application provided, set the fixed establishment 20 that is used for fixed mask plate to the mode with framework 10 swing joint, fixed establishment 20 can be relative framework 10 activity, through the position of adjustment fixed establishment 20 on framework 10, can adjust the net dynamics and/or the net precision of opening of mask plate. In this embodiment, the mask plate 30 is fixed on the fixing mechanism 20, and then the stretching force and/or stretching precision of the mask plate is adjusted by adjusting the position of the fixing mechanism 20 on the frame 10. When the mask plate is deformed, the mask plate which is deformed can be tensioned and aligned by readjusting the fixing mechanism.
When the mask plate is connected with the fixing mechanism, a non-destructive connection mode can be selected, namely, the mask plate is protected during connection, and the structure of the mask plate is not damaged. If the mask plate is fixed in a welding mode, the welding position can damage the mask plate in the mode. If the mask plate can be fixed by utilizing the winding and clamping modes, the mask plate cannot be damaged by the fixing mode, and the subsequent repair is facilitated.
In an embodiment, the fixing mechanism 20 includes a roller 201 and a roller holder 202, the roller holder 202 is used for fixedly supporting the roller 201, and the roller 201 can rotate relative to the roller holder 202 to roll up the mask 30 and fix the mask 30. The mask 30 may be wound up from the end of the mask 30 by the roller 201, and the mask 30 may be fixed after several windings. The rolling shaft can be further connected with a driving mechanism (not shown) to drive the rolling shaft to rotate so as to roll up the mask plate.
In an embodiment, a set of two fixing mechanisms 20 disposed oppositely may be disposed on the frame 10, and when the mask plate 30 is stretched, the mask plate is rolled up from two ends of the mask plate 30 along opposite directions by using the rolling shafts 201, and the mask plate is stretched by applying a pulling force to the mask plate by using a counter force between the two rolling shafts. Through this kind of mode, the whole face of mask plate is applyed to the net pulling force, and the pulling force distributes evenly, can reduce because of the uneven net fold that arouses of pulling force, just also can reduce the influence of net fold to the coating by vaporization laminating, improves the coating by vaporization yield. After the screen is stretched, the position of the fixing mechanism 20 on the frame 10 can be adjusted by moving, so that the PPA of the screen surface can be adjusted, and the screen stretching precision of the mask plate can be improved.
When the mask plate 30 is rolled up by the rolling shaft 201, any fixation between the mask plate 30 and the rolling shaft 201 can be omitted, one end of the mask plate 30 is directly rolled up on the rolling shaft 201, and fixation is achieved through winding. In contrast, when the mask plate 30 is manufactured, the two ends of the mask plate 30 can be made with some surplus for winding and fixing; the roller with the smaller diameter can be selected as much as possible to save the amount of the mask plate to be wound. Through the mode, when the mask plate is repaired, the mask plate can be separated from the rolling shaft only by releasing tension and removing winding, the mask plate and the rolling shaft cannot be damaged, the rolling shaft can be repeatedly used, polishing is not needed, and abrasion does not exist. In other embodiments, in order to improve the binding force between the mask plate and the roller, the mask plate and the roller can be fixed first, and then the mask plate and the roller are wound to apply a net tensioning force.
In one embodiment, the roller is cylindrical to facilitate winding. The roller can be a smooth reel, and fixing parts can be arranged at two ends of the roller and used for locally fixing the mask plate, so that the winding operation is facilitated. For example, a clamping member may be disposed at both ends of the roller to clamp and fix the mask. The clamping component can be set to be elastic clamping, the clamping force and the clamping thickness can be adjusted, clamping of the mask plates with different thicknesses can be achieved, and meanwhile the mask plates are prevented from being crushed by overlarge clamping force. In other embodiments, a side plane can be further arranged on the side face of the cylindrical roller, the side plane is a plane obtained by cutting the cylinder by using the face facing the cylindrical axis plane, and when the mask plate is fixed, the mask plate is welded on the side plane, so that the fixation of the mask plate is enhanced.
In other embodiments, the fixing mechanism may be other structures, for example, the fixing mechanism may be a clamping mechanism, and the mask plate is fixed by using a clamping force of the clamping mechanism.
In one embodiment, a guide mechanism is disposed on the frame 10, and the fixing mechanism 20 is slidably connected to the guide mechanism to dynamically adjust the relative position between the fixing mechanism 20 and the frame 10, so as to dynamically adjust the tension and/or tension precision of the mask plate. The guide rail mechanism can be a sliding groove etched on the frame body or a sliding rail arranged on the surface of the frame body, and the fixing mechanism can slide on the sliding groove or the sliding rail so as to drive and adjust the net tensioning force and/or the net tensioning precision of the mask plate.
As shown in fig. 3, the guiding mechanism may be a sliding slot 101, and the fixing mechanism 20 may slide in the sliding slot through the sliding block 40 to achieve a sliding connection with the frame 10. The chute 101 extends along the winding direction of the roller. The depth and the length of the sliding groove can be set according to the tension of the mask plate.
The sliding block 40 can be arranged at the bottom end of the roller support 202, and the roller support 202 and the sliding block 40 can be fixedly connected, namely the roller support 202 and the sliding block are produced in an integrated manner in the production process; the roller bracket 202 and the slider 40 may also be detachably connected, that is, the two are produced separately during the manufacturing process and connected by a detachable structure. When the slide block is detachably connected with the roller support, the use flexibility of the net stretching device can be improved.
The sliding block 40 can slide in the sliding groove 101, and further drives the roller bracket 202 to move, so as to control the screen tensioning force and/or screen tensioning precision of the mask plate 30. By the mode, the roller can be used for controlling the tension of the screen before the screen is stretched, and the PPA on the screen surface can be adjusted by the sliding block after the screen is stretched, so that the screen stretching precision of the mask plate is improved.
In one embodiment, the mask frame assembly further includes a stop mechanism (not shown) for limiting the fixing mechanism to be fixed relative to the frame to maintain tension on the mask.
After the sliding block is adjusted to obtain appropriate screen tensioning force and/or screen tensioning precision, the sliding block needs to be fixed so that the mask plate can maintain the screen tensioning force. A stop mechanism is then required to control the fixed slide so that it no longer slides.
In one embodiment, the slide may be filled with a fixing material and the slider may be fixed by filling the slide with a sufficient amount of the filler. And when the position of the slide block needs to be adjusted again, taking out the filling material, adjusting the position of the slide block, and then refilling and fixing.
In another embodiment, the stopping mechanism can be a clamping strip and a buckle which are arranged on two sides of the sliding groove, and the fixing mechanism can be fixed through the matching of the clamping strip and the buckle. In other embodiments, when the slider is made of magnetizable material, the slider can be fixed by magnetic attraction. If a magnet is arranged on one side of the frame body opposite to the sliding block, the sliding block is fixed by utilizing the magnetic force of the magnet, and when the position of the sliding block needs to be adjusted, the limitation on the sliding block can be removed by moving away the magnet.
Referring to fig. 4, fig. 4 is a schematic top view of another mask plate assembly according to an embodiment of the present disclosure. In this embodiment, the fixing mechanisms may be multiple sets, each set includes two fixing mechanisms 20 disposed oppositely and respectively located on two frame strips on opposite sides. As shown in fig. 4, the fixing mechanisms 20 may be disposed on the frame strips at two opposite sides, and when the mask plate is stretched, the two opposite fixing mechanisms 20 respectively roll up the mask plate from two ends, and form the tension on the mask plate by using the opposing forces at the two ends. In the embodiment, when the mask plate is manufactured, the two ends of the mask plate are wound by using the rolling shaft of the fixing mechanism, after the mask plate is preliminarily fixed, the fixing mechanism is moved in the opposite direction, the mask plate is applied with pulling force to stretch the screen, and after the mask plate is stretched to a preset position, the fixing mechanism is fixed to keep the screen surface flat. The fixing mechanisms on two sides can be moved simultaneously to adjust tension, or the fixing mechanism on one side can be fixed first and then the fixing mechanism on the other side can be moved to carry out fine adjustment.
Referring to fig. 5, fig. 5 is a schematic top view of another mask plate assembly according to an embodiment of the present disclosure. In other embodiments, the fastening means may be provided only on a part of the frame strips. As shown in fig. 5, one end of the mask plate 30 may be welded and fixed to the frame 10, and the other end may be fixed by the slidable fixing mechanism 20, so as to dynamically adjust the stretching force and/or stretching precision. The number and the position of the fixing means are not limited in this application. In the embodiment, when the mask plate is manufactured, one side of the mask plate and the frame body can be welded and fixed, and then the mask plate is stretched from the other side by using the fixing mechanism, so that the screen is stretched. When the net tensioning precision needs to be adjusted subsequently, the net tensioning force can be adjusted by adjusting the fixing mechanism without dismounting a welding point at the other end.
With reference to fig. 4, the present application provides a mask plate assembly, which includes a mask plate 30 and a mask plate frame assembly, wherein the mask plate frame assembly includes a frame 10 and a fixing mechanism 20, and the fixing mechanism 20 is movably connected to the frame 10 for dynamically adjusting the tension/precision of the mask plate. For a specific structure of the mask plate frame body assembly, please refer to the description of the above embodiments, which is not described herein again.
In the embodiment, when the mask plate is connected and fixed, the mask plate and the fixing mechanism can be fixed without any fixation, the fixation is realized by utilizing the winding effect between the mask plate and the fixing mechanism, when the mask plate is repaired, only tension needs to be released, the mask plate and the fixing mechanism can be separated by removing the winding, the damage to the mask plate and the fixing mechanism can not be caused, the fixing mechanism can be repeatedly used, the polishing is not needed, and the abrasion does not exist. The mask plate and the frame body can be welded and fixed in a stretching mode, so that the frame body can be repeatedly used after being repaired, and the service life of the frame body can be prolonged.
In the embodiment, when the mask plate is stretched, the Sheet and the fixing mechanism are fixed in a rolling mode, the stretching PPA can be adjusted through the control slider, the tension is controlled by the roller before stretching, and the adjustment of the PPA can be performed by the slider after stretching. Meanwhile, the net stretching tension is applied to the whole surface of the Sheet, so that the condition of net stretching wrinkles caused by uneven tension distribution is avoided, and the influence of the net stretching wrinkles on vapor deposition fitting is reduced.
The mask plate subassembly that this application provided can be accurate metal mask plate subassembly for the luminous layer material of coating by vaporization, also can be general metal mask plate subassembly for organic layer, cathode layer etc. of coating by vaporization. The mask can also be used as a mask for producing a packaging layer material, and is not limited herein.
The above description is only for the purpose of illustrating embodiments of the present application and is not intended to limit the scope of the present application, and all modifications of equivalent structures and equivalent processes, which are made by the contents of the specification and the drawings of the present application or are directly or indirectly applied to other related technical fields, are also included in the scope of the present application.

Claims (10)

1. A mask plate frame assembly, comprising:
a frame body;
the fixing mechanism is used for fixing the mask plate;
the fixing mechanism is movably connected with the frame body and used for dynamically adjusting the net tensioning force and/or net tensioning precision of the mask plate.
2. A mask frame assembly according to claim 1,
the fixing mechanism comprises a rolling shaft and a rolling shaft support, wherein the rolling shaft can rotate relative to the rolling shaft support and is used for rolling the mask plate.
3. A mask frame assembly according to claim 2,
the rolling shaft is cylindrical;
preferably, the side surface of the cylindrical roller is provided with a side plane for welding and fixing the mask plate.
4. A mask frame assembly according to claim 1,
the frame body is provided with a guide rail mechanism, and the fixing mechanism is connected with the guide rail mechanism in a sliding mode and used for dynamically adjusting the relative position of the fixing mechanism and the frame body.
5. A mask frame assembly according to claim 4,
the guide rail mechanism is a sliding groove, and the fixing mechanism is connected with the guide rail mechanism in a sliding mode through a sliding block;
preferably, the slider is detachably connected with the fixing mechanism.
6. A mask frame assembly according to claim 1, further comprising:
and the stopping mechanism is used for fixing the fixing mechanism and the frame body.
7. A mask frame assembly according to claim 6,
the stopping mechanism comprises a clamping component, the clamping component comprises clamping grooves and clamping strips, the clamping grooves are formed in two opposite sides of the sliding groove, and the clamping strips stretch over the sliding groove and are inserted into the clamping grooves in the two sides, so that the sliding block is limited and fixed.
8. A mask frame assembly according to claim 1,
the frame body comprises a plurality of frame strips which are sequentially connected and form a multi-edge closed area, and a plurality of fixing mechanisms are respectively positioned on the frame strips;
preferably, the fixing mechanisms are multiple groups, and each group comprises two fixing mechanisms which are oppositely arranged and respectively positioned on the two frame strips on the opposite sides.
9. A mask plate assembly, comprising:
a mask plate;
the mask plate frame body assembly comprises a frame body and a fixing mechanism used for fixing the mask plate, wherein the fixing mechanism is movably connected with the frame body and is used for dynamically adjusting the net tensioning force and/or net tensioning precision of the mask plate.
10. The mask plate assembly of claim 9,
the mask plate is in nondestructive connection with the fixing mechanism, and the nondestructive connection comprises a connection mode without changing the mask plate structure;
preferably, the mask plate is wound around a roller of the fixing mechanism.
CN202010732964.0A 2020-07-27 2020-07-27 Mask plate frame body assembly and mask plate assembly Pending CN111996487A (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN202010732964.0A CN111996487A (en) 2020-07-27 2020-07-27 Mask plate frame body assembly and mask plate assembly

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CN113215527A (en) * 2021-04-23 2021-08-06 京东方科技集团股份有限公司 Mask plate frame, mask plate assembly and manufacturing method thereof
CN115418605A (en) * 2022-09-26 2022-12-02 云谷（固安）科技有限公司 Mask plate frame and mask plate assembly

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JP2018031066A (en) * 2016-08-26 2018-03-01 株式会社アルバック Mask material running unit
CN109778112A (en) * 2017-11-10 2019-05-21 上海和辉光电有限公司 The method of throwing the net for fixture and the metal mask version of throwing the net
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CN113215527A (en) * 2021-04-23 2021-08-06 京东方科技集团股份有限公司 Mask plate frame, mask plate assembly and manufacturing method thereof
CN115418605A (en) * 2022-09-26 2022-12-02 云谷（固安）科技有限公司 Mask plate frame and mask plate assembly
CN115418605B (en) * 2022-09-26 2024-04-16 云谷（固安）科技有限公司 Mask plate frame and mask plate assembly

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Application publication date: 20201127