CN111994885A - Preparation device and preparation process for electronic-grade nitric acid - Google Patents
Preparation device and preparation process for electronic-grade nitric acid Download PDFInfo
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- CN111994885A CN111994885A CN202010867406.5A CN202010867406A CN111994885A CN 111994885 A CN111994885 A CN 111994885A CN 202010867406 A CN202010867406 A CN 202010867406A CN 111994885 A CN111994885 A CN 111994885A
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- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/20—Nitrogen oxides; Oxyacids of nitrogen; Salts thereof
- C01B21/38—Nitric acid
- C01B21/46—Purification; Separation ; Stabilisation
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Abstract
A preparation device and a preparation process for electronic-grade nitric acid relate to the field of nitric acid preparation and comprise the following steps: the device comprises a mixing tank for diluting raw nitric acid, a reboiler for purifying the raw nitric acid, an aeration tower for removing impurities in the raw nitric acid and a finished product tank for storing finished nitric acid; and a precision filter; the outlet of the mixing tank is communicated with the inlet of the reboiler, the outlet of the reboiler is communicated with the inlet of the aeration tower, the outlet of the aeration tower is communicated with the inlet of the finished product tank, and the outlet of the finished product tank is communicated with the inlet of the precision filter. The structure is simple, the simplification of the complex process is realized, the simplification of the production flow is facilitated, the production cost is reduced, and the positive significance on improving the production efficiency is achieved. The preparation process is realized based on the preparation device, the operation is simple, the implementation is easy, the whole production process is simplified, and the production efficiency is improved.
Description
Technical Field
The invention relates to the field of nitric acid preparation, in particular to a preparation device and a preparation process for electronic-grade nitric acid.
Background
At present, the existing equipment for preparing electronic-grade nitric acid is complex in structure, complex in whole manufacturing process, high in difficulty of matching control among all parts, relatively complex in use and low in production efficiency.
In view of this, the present application is specifically made.
Disclosure of Invention
The invention aims to provide a preparation device for electronic-grade nitric acid, which has a simple structure, realizes simplification of complex processes, is beneficial to simplifying production flow, reduces production cost and has positive significance for improving production efficiency.
The second purpose of the invention is to provide a preparation process for electronic grade nitric acid, which is simple to operate and easy to implement, so that the whole production process is simplified, and the production efficiency is improved.
The embodiment of the invention is realized by the following steps:
a preparation device and a preparation process for electronic-grade nitric acid comprise the following steps: the device comprises a mixing tank for diluting raw nitric acid, a reboiler for purifying the raw nitric acid, an aeration tower for removing impurities in the raw nitric acid and a finished product tank for storing finished nitric acid; and a precision filter; the outlet of the mixing tank is communicated with the inlet of the reboiler, the outlet of the reboiler is communicated with the inlet of the aeration tower, the outlet of the aeration tower is communicated with the inlet of the finished product tank, and the outlet of the finished product tank is communicated with the inlet of the precision filter.
Further, the preparation apparatus further includes: an intermittent feed mechanism; the intermittent feeding mechanism comprises a driving bin, a first separation bin and a second separation bin, wherein the first separation bin and the second separation bin are respectively arranged on two sides of the driving bin; the reboiler is provided with a second nitric acid inlet and a second steam inlet, the first nitric acid outlet is communicated with the second nitric acid inlet, and the second steam inlet is communicated with the first steam outlet;
a movable first piston and a movable second piston are respectively arranged in the first compartment and the second compartment, and a driving mechanism for driving the first piston and the second piston to move is arranged in the driving compartment;
the first piston can move to enable the first nitric acid inlet to be communicated with the second nitric acid inlet, so that the nitric acid enters the reboiler; the first steam inlet can be communicated with the second steam inlet by movement of the second piston to allow steam to enter the reboiler.
Furthermore, the driving mechanism comprises a first inner gear ring, a first driving assembly, a transmission block, a first transmission rod and a second transmission rod, the first inner gear ring is arranged in the driving bin, the first driving assembly comprises a first driving block, a first transmission shaft and a first transmission gear, the first transmission shaft is rotatably arranged on the first driving block, the first transmission gear is arranged on the first transmission shaft, and the first transmission gear is meshed with the first inner gear ring;
the driving block is provided with a strip-shaped hole in sliding fit with the first driving shaft, the first driving rod and the second driving rod are respectively arranged on two sides of the driving block, and the first driving rod can movably penetrate through the side wall of the driving bin and then is connected with the first piston; the first transmission rod is movably connected with the driving bin along the axial direction of the first transmission rod; one end of the second transmission rod, which is far away from the transmission block, can movably penetrate through the side wall of the driving bin and then is movably connected with the second piston; the second transmission rod is movably connected with the driving bin along the axial direction of the second transmission rod;
can rotate through first drive block, drive first drive gear and rotate to with the meshing of first interior ring gear, can make first drive gear along first interior ring gear circumferential motion, thereby drive the drive block along first drive rod axial reciprocating motion, so that first piston and second piston reciprocating motion.
Further, the first drive assembly further comprises: the second transmission shaft and the third transmission shaft can be rotatably arranged on the first driving block, the second transmission gear is arranged on the second transmission shaft, the third transmission gear is arranged on the third transmission shaft, and the second transmission gear and the third transmission gear are both meshed with the first inner gear ring.
Further, the drive mechanism further includes: the second internal gear ring is arranged in the driving bin, the second internal gear ring is positioned below the first internal gear ring, and the transmission block is positioned between the first internal gear ring and the second internal gear ring;
the second driving assembly comprises a second driving block and a fourth transmission gear, one end of the first transmission shaft, which is far away from the first driving block, penetrates through the strip-shaped hole and then is connected with the fourth transmission gear, and the fourth transmission gear is meshed with the second inner gear ring.
Further, the second drive assembly further comprises: the fourth transmission shaft and the fifth transmission shaft can be rotatably arranged on the second driving block, the fifth transmission gear is arranged on the fourth transmission shaft, the sixth transmission gear is arranged on the fifth transmission shaft, and the fifth transmission gear and the sixth transmission gear are both meshed with the second inner gear ring.
Furthermore, a limiting rod is arranged in the strip-shaped hole, the limiting rod is arranged along the axial direction of the strip-shaped hole, and the first driving shaft is provided with a central through hole matched with the limiting rod; the limiting rod is movably connected with the transmission block along the axial direction of the limiting rod.
Furthermore, positioning rods are arranged on two sides in the driving bin and are arranged in parallel with the first transmission rod; both sides of the transmission block are provided with positioning holes matched with the positioning rods; the positioning rod is movably connected with the transmission block along the axial direction of the positioning rod.
Furthermore, the inner cavity of the first compartment is matched with the first piston, and the diameters of the first nitric acid inlet and the first nitric acid outlet are both smaller than that of the first piston;
the inner cavity of the second compartment is matched with the second piston, and the diameters of the first steam inlet and the first steam outlet are smaller than that of the second piston.
The preparation process of preparing electronic grade nitric acid by using the preparation device comprises the steps of mixing raw material nitric acid and raw material ultrapure water in a mixing tank according to a preset proportion, feeding the mixture into a reboiler through an intermittent feeding mechanism, removing impurities through an aeration tower, feeding the mixture into a finished product tank, filtering the mixture through a precision filter, and subpackaging the mixture into a warehouse.
The embodiment of the invention has the beneficial effects that:
in the using process of the preparation device for the electronic grade nitric acid, provided by the embodiment of the invention, the raw material nitric acid and the purified water can be mixed by using the mixing tank, so that a diluted nitric acid solution is obtained, then the nitric acid solution is introduced into the reboiler, the high-purity electronic grade nitric acid is produced by purifying according to the azeotropic distillation principle, then impurities in the product are removed by using the aeration tower, the nitric acid is stored by using the finished product tank, and then the nitric acid is filtered by using the precision filter, and then the nitric acid can be subpackaged and stored.
In general, the preparation device for the electronic grade nitric acid provided by the embodiment of the invention has a simple structure, realizes simplification of complex processes, is beneficial to simplifying production flow, reduces production cost, and has positive significance for improving production efficiency. The preparation process for the electronic-grade nitric acid provided by the embodiment of the invention is simple to operate and easy to implement, so that the whole production process is simplified, and the production efficiency is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic structural diagram of a manufacturing apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a reboiler provided in an embodiment of the present invention;
FIG. 3 is a schematic view of an installation structure of an intermittent feeding mechanism provided in an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of an intermittent feeding mechanism provided in an embodiment of the present invention;
FIG. 5 is a side view of an intermittent feed mechanism provided by an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a driving mechanism according to an embodiment of the present invention;
FIG. 7 is a side view of a drive mechanism provided by an embodiment of the present invention;
FIG. 8 is a schematic structural diagram of a first driving assembly according to an embodiment of the present invention;
FIG. 9 is a schematic structural diagram of a second driving assembly according to an embodiment of the present invention;
FIG. 10 is a schematic structural diagram of a transmission block provided in an embodiment of the present invention;
fig. 11 is a schematic flow chart of a manufacturing process according to an embodiment of the present invention.
Icon: 1-mixing tank, 2-reboiler, 3-aeration tower, 4-finished product tank, 5-precision filter, 6-filter, 7-condenser, 8-cooler, 9-intermittent feeding mechanism, 91-driving bin, 92-first compartment, 93-second compartment, 94-first nitric acid inlet, 95-first nitric acid outlet, 96-first steam inlet, 97-first steam outlet, 98-first piston, 99-second piston, 10-first inner gear ring, 11-first driving block, 12-first transmission shaft, 13-first transmission gear, 14-second transmission shaft, 15-second transmission gear, 16-third transmission gear, 17-third transmission gear, 18-driving block, 19-a first transmission rod, 20-a second transmission rod, 21-a strip-shaped hole, 22-a driving rod, 23-a driving motor, 24-a second inner gear ring, 25-a second driving block, 26-a fourth transmission gear, 27-a fourth transmission shaft, 28-a fifth transmission gear, 29-a fifth transmission shaft, 30-a sixth transmission gear, 31-a limiting rod, 32-a positioning rod, 33-a positioning hole, 34-a second nitric acid inlet and 35-a second steam inlet.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "parallel," "perpendicular," and the like do not require that the components be absolutely parallel or perpendicular, but may be slightly inclined. For example, "parallel" merely means that the directions are more parallel relative to "perpendicular," and does not mean that the structures are necessarily perfectly parallel, but may be slightly tilted.
Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Examples
Referring to fig. 1-10, the present embodiment provides a device for preparing electronic grade nitric acid.
The preparation device comprises a mixing tank 1 for diluting the raw material nitric acid, a reboiler 2 for purifying the raw material nitric acid, an aeration tower 3 for removing impurities in the raw material nitric acid, and a finished product tank 4 for storing the finished product nitric acid; and a precision filter 5.
Wherein, the outlet of the mixing tank 1 is communicated with the inlet of the reboiler 2, the outlet of the reboiler 2 is communicated with the inlet of the aeration tower 3, the outlet of the aeration tower 3 is communicated with the inlet of the finished product tank 4, and the outlet of the finished product tank 4 is communicated with the inlet of the precision filter 5.
In the use process, the raw material nitric acid and the purified water can be mixed by using the mixing tank 1, so that a diluted nitric acid solution is obtained, then the nitric acid solution is introduced into the reboiler 2, the high-purity electronic-grade nitric acid is produced by using the azeotropic distillation principle, then impurities in the product are removed by using the aeration tower 3, the nitric acid is stored by using the finished product tank 4, and then the nitric acid is filtered by using the precision filter 5, and then the nitric acid can be subpackaged and stored.
In general, the preparation device for the electronic grade nitric acid provided by the embodiment of the invention has a simple structure, realizes simplification of complex processes, is beneficial to simplifying production flow, reduces production cost, and has positive significance for improving production efficiency.
Further, referring to fig. 3 to 5, in the present embodiment, in order to improve the efficiency of the reboiler 2 for purifying and producing high purity electronic grade nitric acid, the preparation apparatus is particularly matched with the intermittent feeding mechanism 9. The intermittent feeding mechanism 9 includes a driving chamber 91, and a first compartment 92 and a second compartment 93 respectively disposed on two sides of the driving chamber 91.
The first separation chamber 92 is provided with a first nitric acid inlet 94 and a first nitric acid outlet 95, and the second separation chamber 93 is provided with a first steam inlet 96 and a first steam outlet 97; the reboiler 2 is provided with a second nitric acid inlet 34 and a second steam inlet 35, the first nitric acid outlet 95 is communicated with the second nitric acid inlet 34, and the second steam inlet 35 is communicated with the first steam outlet 97;
a movable first piston 98 and a movable second piston 99 are respectively arranged in the first separation chamber 92 and the second separation chamber 93, and a driving mechanism for driving the first piston 98 and the second piston 99 to move is arranged in the driving chamber 91;
can be moved by the first piston 98 so that the first nitric acid inlet 94 is in communication with the second nitric acid inlet 34 to allow nitric acid to enter the reboiler 2; can be moved by the second piston 99 so that the first steam inlet 96 communicates with the second steam inlet 35 to allow steam to enter the reboiler 2.
After the above integral design, when the nitric acid and the heating steam enter the reboiler 2, the heating steam and the nitric acid can enter the first compartment 92 and the second compartment 93 through the first nitric acid inlet 94 and the first steam respectively, and are conveyed separately, and finally enter the reboiler 2 through the first nitric acid outlet 95, the first steam outlet 97, the second nitric acid inlet 34 and the second steam inlet 35.
In the process of carrying out the independent transport to nitric acid and steam, can utilize first piston 98 and the reciprocating motion of second piston 99, block the passageway that nitric acid and steam got into reboiler 2 respectively for nitric acid and steam realize the interval transport, and the interval transport can make the nitric acid segmentation carry, and the nitric acid volume is whole to be reduced, thereby makes the interval transport to the nitric acid of reboiler 2 can obtain the heating of at utmost, thereby can improve the work efficiency who utilizes azeotropic distillation principle purification production high purity electronic grade nitric acid.
Further, the driving mechanism comprises a first inner gear ring 10, a first driving assembly, a driving block 18, a first driving rod 19 and a second driving rod 20, the first inner gear ring 10 is arranged in the driving bin 91, the first driving assembly comprises a first driving block 11, a first driving shaft 12 and a first driving gear 13, the first driving shaft 12 is rotatably arranged on the first driving block 11, the first driving gear 13 is arranged on the first driving shaft 12, and the first driving gear 13 is meshed with the first inner gear ring 10;
the transmission block 18 is provided with a strip-shaped hole 21 in sliding fit with the first transmission shaft 12, the first transmission rod 19 and the second transmission rod 20 are respectively arranged on two sides of the transmission block 18, and the first transmission rod 19 can movably penetrate through the side wall of the driving bin 91 and then is connected with the first piston 98; along the axial direction of the first transmission rod 19, the first transmission rod 19 is movably connected with the driving bin 91; one end of the second transmission rod 20 far away from the transmission block 18 can movably penetrate through the side wall of the driving bin 91 and then is movably connected with the second piston 99; along the axial direction of the second transmission rod 20, the second transmission rod 20 is movably connected with the driving cabin 91.
It should be noted that the center of circle corresponding to the first internal gear ring 10 is located on the rotation axis of the first driving block 11, so as to ensure that the first driving block 11 rotates to drive the first transmission gear 13 to move around the circle corresponding to the first internal gear.
Can rotate through first drive block 11, drive first drive gear 13 and rotate to with the meshing of first interior ring gear 10, can make first drive gear 13 along the 10 circumferential motion of first interior ring gear, thereby make first transmission shaft 12 slide in the bar hole 21 of transmission piece 18, and drive transmission piece 18 along 19 axial reciprocating motion of first transmission pole, so that first piston 98 and second piston 99 reciprocating motion in first compartment 92 and the second storehouse of ordering songs respectively.
By this design, the first piston 98 and the second piston 99 can be made more stable in movement, and separate discharge of nitric acid and steam can be achieved, (when the first piston 98 is moved to separate the first nitric acid inlet 94 from the first nitric acid outlet 95, the second piston 99 is moved to communicate the first steam inlet 96 with the first steam outlet 97, at which time steam enters the reboiler 2) so that heat exchange efficiency can be improved as much as possible.
In this embodiment, in order to ensure the sealing performance of the driving chamber 91, the joints of the driving chamber 91 and the first and second transmission rods 19 and 20 are respectively provided with a sealing ring, so that the sealing performance of the driving chamber 91 can be ensured under the condition that the first and second transmission rods 19 and 20 can normally move along the axial direction, and the steam and the nitric acid are prevented from entering the driving chamber 91 and damaging elements.
Further, in order to ensure the stability of the first transmission gear 13 during movement, the first driving assembly in this embodiment further includes: the driving device comprises a second transmission shaft 14, a second transmission gear 15, a third transmission shaft 16 and a third transmission gear 17, wherein the second transmission shaft 14 and the third transmission shaft 16 can be rotatably arranged on the first driving block 11, the second transmission gear 15 is arranged on the second transmission shaft 14, the third transmission gear 17 is arranged on the third transmission shaft 16, and the second transmission gear 15 and the third transmission gear 17 are meshed with the first internal gear ring 10.
In this embodiment, the first transmission shaft 12, the second transmission shaft 14 and the third transmission shaft 16 are uniformly distributed along the circumferential direction of the first driving block 11, and the center of a circle formed by the first transmission shaft, the second transmission shaft and the third transmission shaft coincides with the center of a circle corresponding to the first internal gear ring 10.
In this embodiment, the cross section of the first driving block 11 is triangular, so as to ensure the stability of the first driving block 11 during the rotation process.
In this embodiment, a driving rod 22 is disposed on a side of the first driving block 11 away from the driving block 18, and the driving rod 22 movably penetrates through the driving chamber 91 and is connected to the driving motor 23. Wherein the driving rod 22 is arranged at the geometric center of the first driving block 11, and the center of the circle corresponding to the first internal gear ring 10 is located on the central axis of the driving rod 22. The first driving block 11 is driven to rotate by the driving motor 23, so that the first transmission gear 13, the second transmission gear 15 and the third transmission gear 17 can be simultaneously meshed with the first internal gear 10.
Through the design, the first transmission gear 13, the second transmission gear 15 and the third transmission gear 17 can be simultaneously driven to be meshed with the first inner gear ring 10 in the rotating process of the first driving block 11, so that the stability of the first driving shaft is ensured.
Further, the drive mechanism further includes: the second inner gear ring 24 is arranged in the driving bin 91, the second inner gear ring 24 is positioned below the first inner gear ring 10, and the transmission block 18 is positioned between the first inner gear ring 10 and the second inner gear ring 24;
the second driving assembly comprises a second driving block 25 and a fourth transmission gear 26, one end of the first transmission shaft 12, which is far away from the first driving block 11, penetrates through the strip-shaped hole 21 and then is connected with the fourth transmission gear 26, and the fourth transmission gear 26 is meshed with the second inner gear ring 24.
Specifically, in order to ensure the stability of the second driving block 25 during movement, the second driving assembly further includes: the driving device comprises a fourth transmission shaft 27, a fifth transmission gear 28, a fifth transmission shaft 29 and a sixth transmission gear 30, wherein the fourth transmission shaft 27 and the fifth transmission shaft 29 can be rotatably arranged on the second driving block 25, the fifth transmission gear 28 is arranged on the fourth transmission shaft 27, the sixth transmission gear 30 is arranged on the fifth transmission shaft 29, and the fifth transmission gear 28 and the sixth transmission gear 30 are both meshed with the second internal gear ring 24.
In this embodiment, the first transmission shaft 12, the fourth transmission shaft 27 and the fifth transmission shaft 29 are uniformly distributed along the circumferential direction of the second driving block 25, and the center of a circle formed by the circles coincides with the center of a circle corresponding to the second internal gear ring 24.
In this embodiment, the cross section of the second driving block 25 is triangular, so as to ensure the stability of the second driving block 25 in the rotation process.
When can drive first drive block 11 through actuating lever 22 and rotate, make first drive shaft rotate around actuating lever 22, thereby utilize first drive shaft to drive second drive block 25 synchronous motion, make fourth drive gear 26, fifth drive gear 28 and sixth drive gear 30 mesh with second internal tooth ring 24, thereby stability when having guaranteed the motion of first drive shaft makes the stable in bar hole 21 of first drive shaft slides, and drive the motion of transmission piece 18.
Through the design, the two ends of the first driving shaft can be respectively connected with the first transmission gear 13 and the fourth transmission gear 26, wherein the first transmission gear 13 circularly moves around the first inner gear ring 10, and the fourth transmission gear 26 synchronously circularly moves around the second inner gear ring 24, so that the whole moving process is more stable.
Furthermore, a limiting rod 31 is arranged in the strip-shaped hole 21, the limiting rod 31 is arranged along the axial direction of the strip-shaped hole 21, and the first driving shaft is provided with a central through hole matched with the limiting rod 31; along the axial direction of the limiting rod 31, the limiting rod 31 is movably connected with the transmission block 18. This kind of design can make stable the sliding in bar hole 21 of first drive shaft, avoids first pivot to rock.
Furthermore, positioning rods 32 are arranged on two sides in the driving bin 91, and the positioning rods 32 are arranged in parallel with the first transmission rod 19; positioning holes 33 matched with the positioning rods 32 are formed in the two sides of the transmission block 18; the positioning rod 32 is movably connected with the transmission block 18 along the axial direction of the positioning rod 32. This kind of design, its certain supporting role of transmission piece 18 can be many, when making first drive shaft drive transmission piece 18 motion, more stable.
Further, the inner cavity of the first compartment 92 is matched with the first piston 98, and the diameters of the first nitric acid inlet 94 and the first nitric acid outlet 95 are both smaller than the diameter of the first piston 98;
the second compartment 93 has an interior cavity that mates with the second piston 99, and the first vapor inlet 96 and the first vapor outlet 97 each have a diameter that is smaller than the diameter of the second piston 99. By adopting the design, the nitric acid can be prevented from entering the reboiler 2 when the first piston 98 moves to block the first nitric acid inlet 94 and the first nitric acid outlet 95; when the second piston 99 moves to block the first steam inlet 96 and the first steam outlet 97, the heating steam can be prevented from entering the reboiler 2, thereby ensuring good sealing.
In this embodiment, the driving chamber 91, the first compartment 92 and the second compartment 93 are made of corrosion-resistant materials, so as to prevent the nitric acid from corroding the whole device.
In this embodiment, when the first piston 98 moves to block the first nitric acid inlet 94 and the first nitric acid outlet 95, the second piston 99 moves to a side close to the driving chamber 91, and at this time, the first steam inlet 96 and the first steam inlet 96 communicate with each other, so that the heating steam can smoothly enter the reboiler 2.
In this embodiment, a filter 6 is provided between the mixing tank 1 and the reboiler 2, an outlet of the mixing tank 1 is communicated with an inlet of the filter 6, and an outlet of the filter 6 is communicated with the first nitric acid inlet 94. The type of the filter 6 can be an impurity filter in the conventional prior art, which is not described herein.
In this embodiment, a condenser 7 is provided between the reboiler 2 and the aeration tower 3, and the nitric acid is discharged from the reboiler 2 and then enters the condenser 7, and then enters the aeration tower 3 to cool the nitric acid heated by the reboiler 2.
In this embodiment, a cooler 8 is arranged between the aeration tower 3 and the finished product tank 4, and the nitric acid discharged from the aeration tower 3 is cooled to a certain temperature by the cooler 8 and then enters the finished product tank 4 for storage.
In summary, the preparation device for the electronic grade nitric acid has the advantages of simple structure, simplified process, simplified production flow, reduced production cost and positive significance for improving the production efficiency.
Referring to fig. 11, this embodiment further provides a process for preparing electronic grade nitric acid by using a preparation apparatus, in which raw nitric acid and raw ultrapure water are mixed in a mixing tank 1 according to a predetermined ratio, and the mixture enters a reboiler 2 through an intermittent feeding mechanism 9, and then enters a finished product tank 4 after impurity removal through an aeration tower 3, and the finished product is filtered by a precision filter 5 and then is packaged and stored.
The whole preparation process is simple to operate and easy to implement, so that the whole production process is simplified, and the production efficiency is improved. By means of the special design of the preparation device, the quality of the nitric acid can be improved, and the preparation efficiency of the electronic-grade nitric acid can be improved.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A preparation device and a preparation process for electronic-grade nitric acid are characterized by comprising the following steps:
a mixing tank for diluting the raw material nitric acid;
a reboiler for purifying the feed nitric acid;
an aeration tower for removing impurities in the raw material nitric acid;
a finished product tank for storing finished nitric acid; and
a precision filter;
the outlet of the mixing tank is communicated with the inlet of the reboiler, the outlet of the reboiler is communicated with the inlet of the aeration tower, the outlet of the aeration tower is communicated with the inlet of the finished product tank, and the outlet of the finished product tank is communicated with the inlet of the precision filter.
2. The manufacturing apparatus according to claim 1, further comprising: an intermittent feed mechanism; the intermittent feeding mechanism comprises a driving bin, a first separation bin and a second separation bin, wherein the first separation bin and the second separation bin are respectively arranged on two sides of the driving bin; the reboiler is provided with a second nitric acid inlet and a second steam inlet, the first nitric acid outlet is communicated with the second nitric acid inlet, and the second steam inlet is communicated with the first steam outlet;
a movable first piston and a movable second piston are respectively arranged in the first compartment and the second compartment, and a driving mechanism for driving the first piston and the second piston to move is arranged in the driving compartment;
the first piston can move to enable the first nitric acid inlet to be communicated with the second nitric acid inlet so as to enable nitric acid to enter the reboiler; the second piston is movable to place the first steam inlet in communication with the second steam inlet to allow steam to enter the reboiler.
3. The manufacturing apparatus according to claim 2, wherein the driving mechanism includes a first internal gear ring, a first driving assembly, a driving block, a first driving rod, and a second driving rod, the first internal gear ring is disposed on the driving chamber, the first driving assembly includes a first driving block, a first driving shaft, and a first driving gear, the first driving shaft is rotatably disposed on the first driving block, the first driving gear is disposed on the first driving shaft, and the first driving gear is engaged with the first internal gear ring;
the driving block is provided with a strip-shaped hole in sliding fit with the first driving shaft, the first driving rod and the second driving rod are respectively arranged on two sides of the driving block, and the first driving rod can movably penetrate through the side wall of the driving bin and then is connected with the first piston; the first transmission rod is movably connected with the driving bin along the axial direction of the first transmission rod; one end of the second transmission rod, which is far away from the transmission block, can movably penetrate through the side wall of the driving bin and then is movably connected with the second piston; the second transmission rod is movably connected with the driving bin along the axial direction of the second transmission rod;
can pass through first drive block rotates, drives first drive gear rotates, and with first interior ring gear meshing can make first drive gear follows first interior ring gear circumferential motion, thereby drives the drive block is followed first drive rod axial reciprocating motion, so that first piston with second piston reciprocating motion.
4. The manufacturing apparatus of claim 3, wherein the first drive assembly further comprises: the second transmission shaft and the third transmission shaft can be rotatably arranged on the first driving block, the second transmission gear is arranged on the second transmission shaft, the third transmission gear is arranged on the third transmission shaft, and the second transmission gear and the third transmission gear are meshed with the first inner gear ring.
5. The manufacturing apparatus of claim 2, wherein the drive mechanism further comprises: the second inner gear ring is arranged on the driving bin, the second inner gear ring is positioned below the first inner gear ring, and the transmission block is positioned between the first inner gear ring and the second inner gear ring;
the second driving assembly comprises a second driving block and a fourth transmission gear, one end, far away from the first driving block, of the first transmission shaft penetrates through the strip-shaped hole and then is connected with the fourth transmission gear, and the fourth transmission gear is meshed with the second inner gear ring.
6. The manufacturing apparatus of claim 5, wherein the second drive assembly further comprises: the fourth transmission shaft and the fifth transmission shaft can be rotatably arranged on the second driving block, the fifth transmission gear is arranged on the fourth transmission shaft, the sixth transmission gear is arranged on the fifth transmission shaft, and the fifth transmission gear and the sixth transmission gear are meshed with the second inner gear ring.
7. The manufacturing device according to claim 2, wherein a limiting rod is arranged in the strip-shaped hole, the limiting rod is arranged along the axial direction of the strip-shaped hole, and the first driving shaft is provided with a central through hole matched with the limiting rod; and the limiting rod is movably connected with the transmission block along the axial direction of the limiting rod.
8. The manufacturing apparatus according to claim 2, wherein positioning rods are disposed on both sides of the driving chamber, and the positioning rods are disposed in parallel with the first transmission rod; positioning holes matched with the positioning rods are formed in the two sides of the transmission block; and the positioning rod is movably connected with the transmission block along the axial direction of the positioning rod.
9. The preparation device of claim 2, wherein the first compartment inner cavity is matched with the first piston, and the diameters of the first nitric acid inlet and the first nitric acid outlet are smaller than that of the first piston;
the inner cavity of the second compartment is matched with the second piston, and the diameters of the first steam inlet and the first steam outlet are smaller than that of the second piston.
10. A preparation process for preparing electronic-grade nitric acid by using the preparation device as claimed in any one of claims 1 to 9, wherein raw nitric acid and raw ultrapure water are mixed in the mixing tank according to a preset proportion, the mixture enters a reboiler through the intermittent feeding mechanism, the mixture enters the finished product tank after impurity removal through the aeration tower, and the finished product tank is filtered by the precision filter and then is stored in a warehouse.
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