CN111992449A - High-precision scraping and coating equipment and method with adjustable scraping and coating angle - Google Patents

High-precision scraping and coating equipment and method with adjustable scraping and coating angle Download PDF

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Publication number
CN111992449A
CN111992449A CN202010849844.9A CN202010849844A CN111992449A CN 111992449 A CN111992449 A CN 111992449A CN 202010849844 A CN202010849844 A CN 202010849844A CN 111992449 A CN111992449 A CN 111992449A
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CN
China
Prior art keywords
scraper
scraping
angle
adjustable
coating
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Pending
Application number
CN202010849844.9A
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Chinese (zh)
Inventor
张成鹏
季金
杜鲁涛
李娟�
赵国庆
王继来
王心凝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rizhao Institute Of Intelligent Manufacturing Shandong University
SUZHOU RESEARCH INSTITUTE SHANDONG UNIVERSITY
Shandong University
Qilu University of Technology
Original Assignee
Rizhao Institute Of Intelligent Manufacturing Shandong University
SUZHOU RESEARCH INSTITUTE SHANDONG UNIVERSITY
Shandong University
Qilu University of Technology
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Application filed by Rizhao Institute Of Intelligent Manufacturing Shandong University, SUZHOU RESEARCH INSTITUTE SHANDONG UNIVERSITY, Shandong University, Qilu University of Technology filed Critical Rizhao Institute Of Intelligent Manufacturing Shandong University
Priority to CN202010849844.9A priority Critical patent/CN111992449A/en
Publication of CN111992449A publication Critical patent/CN111992449A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/04Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades
    • B05C11/041Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades characterised by means for positioning, loading, or deforming the blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02Means for manipulating or holding work, e.g. for separate articles for particular articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling

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  • Coating Apparatus (AREA)

Abstract

The invention discloses high-precision scraping equipment with an adjustable scraping angle and a method thereof, wherein the high-precision scraping equipment comprises: the scraper angle adjusting mechanism is connected with the scraper and can adjust the angle of the scraper; scraper height adjustment mechanism, it is connected with scraper angular adjustment mechanism, but including horizontal migration's sloping block, the sloping block top surface is the inclined plane, and scraper angular adjustment mechanism bottom is connected with the roof, and the roller is connected through the bracing piece to the roof bottom, and the roller contacts with sloping block top surface, can drive scraper angular adjustment mechanism by the sloping block removal and go up and down and then adjust the scraper height.

Description

High-precision scraping and coating equipment and method with adjustable scraping and coating angle
Technical Field
The invention belongs to the technical field of flexible electronics, and particularly relates to high-precision scraping and coating equipment with an adjustable scraping and coating angle and a method.
Background
The statements herein merely provide background information related to the present disclosure and may not necessarily constitute prior art.
Field effect transistors are active devices based on the controlled injection of free carriers into a semiconductor. Organic Field-Effect transistors (OFETs) use Organic semiconductor materials as transport layers. Compared with inorganic semiconductors, the unique flexibility of organic semiconductors makes the organic semiconductors compatible with flexible substrates, thereby realizing flexible and stretchable circuits, and having great potential application values in the aspects of wearable equipment, medical monitoring, electronic skin and the like. The form and microstructure of the organic semiconductor layer play a very important role in OFET performance, the optimization of the microstructure of the organic semiconductor layer can effectively improve the OFET performance, and the improvement of the construction process can also powerfully promote the commercial application of OFET.
The doctor blade coating method is often used for constructing OFET devices, and the inventor finds that the conventional doctor blade coating equipment has the defects of large thickness of coating materials, high contact resistance, uneven microstructure array and the like, and limits the improvement of the performance of the OFET devices and the commercial application of the OFET devices.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide high-precision scraping equipment with an adjustable scraping angle and a method thereof.
In order to achieve the purpose, the invention is realized by the following technical scheme:
in a first aspect, an embodiment of the present invention provides a high-precision doctor apparatus with an adjustable doctor angle, including:
the scraper angle adjusting mechanism is connected with the scraper and can adjust the angle of the scraper;
scraper height adjustment mechanism, it is connected with scraper angular adjustment mechanism, but including horizontal migration's sloping block, the sloping block top surface is the inclined plane, and scraper angular adjustment mechanism bottom is connected with the roof, and the roller is connected through the bracing piece to the roof bottom, and the roller contacts with sloping block top surface, can drive scraper angular adjustment mechanism by the sloping block removal and go up and down and then adjust the scraper height.
As a further technical scheme, the bottom of the inclined block is connected with the first guide rail in a sliding mode, one side of the inclined block abuts against the first differential head, the other side of the inclined block abuts against the spring, and the first differential head rotates to drive the inclined block to move horizontally.
As a further technical scheme, the scraper angle adjusting mechanism comprises a worm wheel, the worm wheel is meshed with a worm shaft, the worm wheel is fixed on the worm wheel shaft, and the worm shaft can be driven to rotate by the rotation of the worm shaft.
As a further technical scheme, the end part of the worm gear shaft is provided with a plane, and the plane is fixedly connected with the scraper.
As a further technical scheme, still include elevating platform, it sets up in the scraper below, and elevating platform is including the workstation that can reciprocate, and the vacuum adsorption platform is supported at the workstation top.
As a further technical scheme, the workbench is connected with the second differential head, the second differential head rotates to drive the workbench to move up and down, and the workbench is connected with the vertical guide rail in a sliding mode.
As a further technical scheme, a temperature control mechanism is arranged between the workbench and the vacuum adsorption platform and comprises a semiconductor heating and refrigerating piece, one side of the semiconductor heating and refrigerating piece is attached to the vacuum adsorption platform, the other side of the semiconductor heating and refrigerating piece is attached to the radiating piece, and a flat spring is arranged between the radiating piece and the workbench.
As a further technical scheme, the bottom of the lifting workbench is connected with the electric translation table, and the electric translation table drives the lifting workbench to move horizontally.
As a further technical scheme, the top plate is connected with the second guide rail in a sliding mode, and the second guide rail is arranged vertically.
In a second aspect, an embodiment of the present invention further provides a blade coating method of the high-precision blade coating apparatus with an adjustable blade coating angle, including the following steps:
fixing the scraper to the scraper angle adjusting mechanism, and adjusting the scraper to a set angle;
adjusting the height of the lifting workbench to enable the vacuum adsorption platform to be positioned below the scraper;
placing the substrate on a vacuum adsorption table for adsorption and fixation, and adjusting the vacuum adsorption table to a set temperature;
adjusting the position of the inclined block to adjust the height of the scraper to a set height;
liquid slurry is injected into the substrate, the lifting workbench moves horizontally, the scraper and the substrate move relatively to scrape, and a continuous crystallized film is formed on the surface of the substrate.
The beneficial effects of the above-mentioned embodiment of the present invention are as follows:
according to the blade coating equipment, the angle of the scraper can be adjusted through the scraper angle adjusting mechanism, so that the blade coating process of liquid slurry is improved, and the uniformity of a film is improved.
According to the blade coating equipment, the high-precision lifting of the scraper can be realized by adopting the scraper height adjusting mechanism, and the thickness of the prepared film is reduced.
The blade coating equipment provided by the invention can realize wide-range adjustment of blade coating thickness by adopting the lifting workbench, and is suitable for substrates with various specifications and thicknesses.
The blade coating equipment disclosed by the invention can realize different blade coating temperatures by adopting the temperature control mechanism, accelerate the preparation of the film and improve the performance of the film.
The blade coating equipment provided by the invention can fix the substrate by adopting a vacuum adsorption mechanism and carry out blade coating on rigid and flexible substrates.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
FIG. 1 is a schematic illustration of a blade coating apparatus according to one or more embodiments of the present disclosure;
FIG. 2 is a schematic diagram of a doctor height adjustment mechanism in combination with a doctor angle adjustment mechanism according to one or more embodiments of the present disclosure;
FIG. 3(a) is a schematic illustration of a doctor blade in accordance with one or more embodiments of the present invention in conjunction with a worm gear shaft;
FIG. 3(b) is a schematic view of a scraper blade according to one or more embodiments of the present invention in another angle in conjunction with a worm gear shaft;
FIG. 4 is a schematic view of a lift table of the present disclosure according to one or more embodiments;
in the figure: 100-electric translation table, 200-scraper height adjusting mechanism, 210-differential head, 220-inclined block, 230 guide rail, 240-spring, 250 guide rail, 260-top plate, 270 support rod, 280 roller, 300-scraper angle adjusting mechanism, 310-worm wheel, 320 worm shaft, 330 worm wheel shaft, 341-scraper, 342-bolt, 343-clamping metal sheet, 344-nut, 400-lifting worktable, 410-differential head, 421-fine adjusting screw, 422-sleeve, 423-pin shaft, 430-vacuum adsorption table, 441-semiconductor heating and refrigerating sheet, 442-radiating sheet, 443-spring, 450-guide rail, 460-worktable and 470-base.
The spacing or dimensions between each other are exaggerated to show the location of the various parts, and the illustration is for illustrative purposes only.
Detailed Description
It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an", and/or "the" are intended to include the plural forms as well, unless the invention expressly state otherwise, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof;
for convenience of description, the words "up", "down", "left" and "right" in the present invention, if any, merely indicate correspondence with up, down, left and right directions of the drawings themselves, and do not limit the structure, but merely facilitate the description of the invention and simplify the description, rather than indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.
The terms "mounted", "connected", "fixed", and the like in the present invention should be understood broadly, and for example, the terms "mounted", "connected", "fixed", and the like may be fixedly connected, detachably connected, or integrated; the two components can be connected mechanically or electrically, directly or indirectly through an intermediate medium, or connected internally or in an interaction relationship, and the terms used in the present invention should be understood as having specific meanings to those skilled in the art.
As described in the background art, the prior art has disadvantages, and in order to solve the technical problems, the invention provides a high-precision scraping device with an adjustable scraping angle and a method thereof.
Example 1:
in a typical embodiment of the present invention, as shown in fig. 1, a high precision blade coating apparatus with adjustable blade coating angle is provided, which includes an electric translation stage 100, a blade height adjusting mechanism 200, a blade angle adjusting mechanism 300, a lifting table 400, wherein the electric translation stage 100, the blade height adjusting mechanism 200, the blade angle adjusting mechanism 300, and the lifting table 400 are all fixed in a chassis. The lifting workbench 400 is connected with the electric translation table 100, and the electric translation table drives the lifting workbench to move in the horizontal direction; the scraper angle adjusting mechanism 300 is arranged at the top of the scraper height adjusting mechanism 200, the scraper height adjusting mechanism 200 can drive the scraper angle adjusting mechanism 300 to move up and down so as to adjust the height of the scraper, and the scraper angle adjusting mechanism is connected with the scraper and can adjust the angle of the scraper; the lifting table 400 is disposed on one side of the scraper angle adjusting mechanism 300, and the scraper is disposed above the lifting table 400.
As shown in fig. 2, the scraper height adjusting mechanism 200 includes a differential head 210, a sloping block 220, a guide rail 230, a spring 240, a guide rail 250, a top plate 260, a support rod 270, and a roller 280;
the differential head 210 (i.e., the first differential head) tightly pushes one end of the inclined block 220, the spring 240 tightly pushes the other end of the inclined block 220, the bottom of the inclined block 220 is slidably connected with the guide rail 230 and can move along the guide rail 230 (i.e., the first guide rail), the guide rail 230 is horizontally arranged, and the rotation of the differential head 210 can drive the inclined block 220 to horizontally move so as to extrude the spring 240; the spring can reset the inclined block.
The top surface of the inclined block 220 is an inclined surface, and the top surface has a height difference in the vertical direction.
The supporting rod 270 is fixed to the bottom of the top plate 260, a rotatable roller 280 is arranged at the bottom end of the supporting rod, the roller 280 is in contact fit with the top surface of the inclined block 220, the top plate 260 is in sliding connection with the guide rail 250 (namely, the second guide rail), the top plate can move along the guide rail 250, the guide rail 250 is vertically arranged, the roller 280 rolls in the horizontal moving process of the inclined block, and the top plate 260 moves along the guide rail 250 along with the inclined block 220 due to the fact that the top surface of the inclined block is an inclined.
When the differential head is specifically arranged, the guide rail 230, the inclined block 220, the spring 240 and the guide rail 250 are arranged in the shell, the spring is arranged in an abutting mode with the inner side wall of the shell, and one end, which is not contacted with the inclined block, of the differential head 210 extends out of the shell; guide rail 250 is fixed in the casing inside wall, and roof 260 sets up in the casing top, and the roof bottom is equipped with the connecting plate, and the connecting plate lateral part sets up pulley and guide rail 250 sliding fit.
As shown in fig. 2, the scraper angle adjusting mechanism 300 includes a worm wheel 310, a worm shaft 320, and a worm wheel shaft 330; the worm wheel 310 is fixed to the worm wheel shaft 330, the worm shaft 320 is engaged with the worm wheel 310, and rotating the worm shaft 320 rotates the worm wheel shaft 330.
The worm wheel 310, the worm shaft 320 and the worm wheel shaft 330 are all fixed on the outer shell, the worm shaft 320 and the worm wheel shaft 330 can both extend out of the outer shell, and the bottom of the outer shell is fixedly connected with the top plate 260. The scraper height adjusting mechanism can drive the scraper angle adjusting mechanism to move up and down so as to adjust the height of the scraper.
Realized blade coating process blade coating angularly adjustable through scraper angular adjustment mechanism, accurate control blade coating thickness effectively promotes the continuity and the homogeneity of thick liquids coating.
Referring to fig. 3, the protruding end of the worm gear shaft 330 is provided with a plane, the scraper 341 is fixed at the protruding end plane of the worm gear shaft 330 by two salient point positioning scrapers 341 and clamping the scrapers with bolts 342, nuts 344 and clamping metal sheets 343. Rotating worm shaft 320 rotates worm gear shaft 330 to adjust the angle of the scraper.
Referring to fig. 4, the elevating platform 400 includes a differential head 410 (i.e., a second differential head), a fine adjustment screw 421, a sleeve 422, a pin 423, a vacuum adsorption platform 430, a semiconductor heating and cooling plate 441, a heat sink 442, a plate spring 443, a guide rail 450, a platform 460, and a base 470;
the electric translation stage is driven by a linear motor to move along a track, the base 470 is fixed on the moving stage of the electric translation stage 100 and is driven by the electric translation stage to move horizontally to realize a blade coating process, a guide rail 450 is arranged at the top of the base 470, the guide rail 450 is vertically arranged, the guide rail 450 is connected with the working table 460 in a sliding manner, and the working table 460 can move up and down along the guide rail 450;
the table 460 is connected to the differential head 410, and the differential head 410 is rotated to drive the table 460 to move up and down along the guide rail 450, and the table is tensioned by a spring and can be reset under the action of the spring. The vacuum adsorption platform 430 is arranged above the workbench 460, the sleeves 422 are arranged at four corners of the workbench 460, each sleeve 422 is matched with one round-head fine adjustment screw 421, the fine adjustment screws 421 support and jack the vacuum adsorption platform 430, the fine adjustment screws 421 can be locked through the sleeves, the vacuum adsorption platform 430 is transversely fixed by two pin shafts 423, and a temperature control mechanism is arranged between the workbench 460 and the vacuum adsorption platform 430. The vacuum adsorption stage 430 is connected to a vacuum adsorption mechanism, which is connected to a vacuum pump through an air pipe to make the vacuum adsorption stage adsorb and fix the substrate. The vacuum adsorption table fixes the substrate required by blade coating, and the substrate is prevented from moving or rotating in the blade coating process. Under the action of the vacuum adsorption mechanism, hard substrates such as glass, silicon wafers and the like can be selected, flexible substrates such as films and the like can be selected, and the substrate selection range is wider.
The lifting workbench 400 is arranged on one side of the scraper angle adjusting mechanism, and the vacuum adsorption platform corresponds to the lower part of the worm gear shaft fixed scraper.
The base 470 is arranged in an inverted T shape so as to provide a lifting space for the workbench 460, the lifting platform 460 is arranged in a T shape, the vertical part of the lifting platform is in sliding fit with the guide rail 450, the temperature control mechanism is arranged at the top of the horizontal part of the lifting platform, the vertical part of the lifting platform is connected with the differential head 410 through a cross rod, the end of the differential head 410 abuts against the top surface of the base 470, and the differential head 410 is rotated to drive the workbench 460 to lift up and down.
The temperature control mechanism comprises a semiconductor heating and refrigerating sheet 441, a radiating sheet 442 and a sheet spring 443, one surface of the semiconductor heating and refrigerating sheet 441 is tightly attached to the radiating sheet 442, the other surface of the semiconductor heating and refrigerating sheet is tightly attached to the vacuum adsorption platform, the sheet spring 443 is arranged between the radiating sheet 442 and the workbench 460, and the radiating sheet 442 is tightly propped by the sheet spring, so that good heat exchange efficiency is ensured.
The semiconductor heating and refrigerating piece is connected with a power supply, and the power supply is controlled to be turned on and off by a temperature control mechanism switch. The vacuum adsorption platform can be provided with a temperature sensor to monitor the temperature, so that the temperature of the substrate in the blade coating process can be accurately controlled, blade coating can be performed in a heating environment, blade coating in a refrigerating environment can be realized, and the working temperature range is wider.
The blade coating equipment is suitable for preparing functional thin-film devices by blade coating of organic semiconductors by a solution method.
The high-precision scraping and coating equipment with the adjustable scraping and coating angle formed by the scheme has the following specific working process:
firstly, a scraper 341 is installed, a nut 344 is screwed down to fix the scraper, a worm shaft 320 is rotated, and a worm wheel shaft 330 rotates along with the rotation to drive the scraper to adjust to a required angle;
second, rotate the differential head 410, adjust the table 460 to the proper position; the fine adjustment screw 421 is adjusted to make the vacuum suction platform parallel to the lower edge of the scraper 341.
Thirdly, placing the substrate on a vacuum adsorption platform 430, turning on a switch of a vacuum adsorption mechanism, and adsorbing and fixing the substrate;
fourthly, opening a switch of the temperature control mechanism to wait for reaching the required temperature;
fifthly, rotating the differential head 210, and adjusting the height of the scraper 341 to the required height;
sixthly, adjusting the position of the lifting workbench 400 on the electric translation table, keeping the left edge of the substrate close to the left edge of the scraper, and injecting liquid slurry on the surface of the substrate;
and seventhly, starting the electric translation table, driving the lifting workbench to move by the platform, further driving the substrate to move leftwards at a constant speed until the tail of the substrate, and carrying out blade coating by the scraper and the substrate to generate relative motion so as to form a continuously crystallized film on the surface of the substrate.
In the embodiment, in the blade coating process, the blade coating angle is 10 degrees (namely the inclination angle of the scraper), the blade coating thickness is 10 μm (which can be realized by adjusting the distance from the scraper to the substrate), the blade coating is performed at room temperature, the blade coating speed is 10mm/s, the scraper is clamped by a metal sheet and fixed at the extending end of a worm gear shaft, a lifting moving table adsorbs and fixes the glass substrate, and the blade coating is performed along with the movement of an electric translation table.
Example 2:
in the present embodiment, the difference from embodiment 1 is that: the scraping angle is 15 degrees, the worm shaft is manually rotated, the worm wheel shaft 330 rotates along with the worm shaft, and the angle of the scraper 341 is adjusted to the required angle.
Example 3:
in the present embodiment, the difference from embodiment 1 is that: the thickness of the drawdown was 15 μm, and the differential head 210 was rotated to adjust to a desired height.
Example 4:
in the present embodiment, the difference from embodiment 1 is that: and (3) blade coating at 70 ℃, opening a switch of a temperature control mechanism, electrifying the semiconductor heating and refrigerating sheet 441, monitoring the temperature by a temperature sensor, and keeping the temperature constant after the temperature reaches the required temperature.
Example 5:
in the present embodiment, the difference from embodiment 1 is that: the scraping speed is 20mm/s, the power supply of the electric translation table 110 is started, and the scraping speed is adjusted to the required speed after the power supply is electrified.
Example 6:
in the present embodiment, the difference from embodiment 1 is that: and (3) carrying out blade coating by taking the flexible film as a substrate, starting a vacuum adsorption mechanism, adsorbing and fixing the film substrate, and carrying out blade coating.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. The utility model provides a high accuracy of knife coating angularly adjustable scrapes scribbles equipment, characterized by includes:
the scraper angle adjusting mechanism is connected with the scraper and can adjust the angle of the scraper;
scraper height adjustment mechanism, it is connected with scraper angular adjustment mechanism, but including horizontal migration's sloping block, the sloping block top surface is the inclined plane, and scraper angular adjustment mechanism bottom is connected with the roof, and the roller is connected through the bracing piece to the roof bottom, and the roller contacts with sloping block top surface, can drive scraper angular adjustment mechanism by the sloping block removal and go up and down and then adjust the scraper height.
2. The scraping apparatus with high precision and adjustable scraping angle as claimed in claim 1, wherein the bottom of the sloping block is connected with the first guide rail in a sliding way, one side of the sloping block is abutted with the first differential head, the other side of the sloping block is abutted with the spring, and the rotation of the first differential head drives the sloping block to move horizontally.
3. The high precision doctor apparatus with adjustable doctor blade angle as claimed in claim 1, wherein the doctor blade angle adjustment mechanism comprises a worm wheel, the worm wheel is engaged with a worm shaft, the worm wheel is fixed to the worm wheel shaft, and the worm wheel shaft is rotated by the rotation of the worm shaft.
4. The scraping and coating apparatus with adjustable scraping and coating angles as claimed in claim 3, wherein the end of the worm gear shaft is provided with a plane, and the plane is fixedly connected with the scraper.
5. The high-precision scraping apparatus with adjustable scraping angle as claimed in claim 1, further comprising a lifting table disposed below the scraper, wherein the lifting table comprises a table capable of moving up and down, and the top of the table supports the vacuum adsorption table.
6. The scraping apparatus with adjustable scraping angle as claimed in claim 5, wherein the worktable is connected with the second differential head, the worktable can be driven to move up and down by the rotation of the second differential head, and the worktable is connected with the vertical guide rail in a sliding way.
7. The high-precision scraping and coating equipment with the adjustable scraping and coating angle as claimed in claim 5, wherein a temperature control mechanism is arranged between the workbench and the vacuum adsorption platform, the temperature control mechanism comprises a semiconductor heating and refrigerating sheet, one side of the semiconductor heating and refrigerating sheet is attached to the vacuum adsorption platform, the other side of the semiconductor heating and refrigerating sheet is attached to a radiating sheet, and a sheet spring is arranged between the radiating sheet and the workbench.
8. The scraping and coating apparatus with adjustable scraping and coating angles as claimed in claim 5, wherein the bottom of the lifting table is connected with an electric translation table, and the electric translation table drives the lifting table to move horizontally.
9. The high-precision scraping apparatus with adjustable scraping angle as claimed in claim 1, wherein said top plate is slidably connected to a second guide rail, which is vertically disposed.
10. The blade coating method of the high-precision blade coating apparatus with adjustable blade coating angle according to any one of claims 1 to 9, characterized by comprising the steps of:
fixing the scraper to the scraper angle adjusting mechanism, and adjusting the scraper to a set angle;
adjusting the height of the lifting workbench to enable the vacuum adsorption platform to be positioned below the scraper;
placing the substrate on a vacuum adsorption table for adsorption and fixation, and adjusting the vacuum adsorption table to a set temperature;
adjusting the position of the inclined block to adjust the height of the scraper to a set height;
liquid slurry is injected into the substrate, the lifting workbench moves horizontally, the scraper and the substrate move relatively to scrape, and a continuous crystallized film is formed on the surface of the substrate.
CN202010849844.9A 2020-08-21 2020-08-21 High-precision scraping and coating equipment and method with adjustable scraping and coating angle Pending CN111992449A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010849844.9A CN111992449A (en) 2020-08-21 2020-08-21 High-precision scraping and coating equipment and method with adjustable scraping and coating angle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010849844.9A CN111992449A (en) 2020-08-21 2020-08-21 High-precision scraping and coating equipment and method with adjustable scraping and coating angle

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CN113102171A (en) * 2021-03-04 2021-07-13 南昌大学 Slit coating head of coating machine
CN115039892A (en) * 2022-07-19 2022-09-13 江苏沃得农业机械股份有限公司 Adjustable cutting cutter disc for sugarcane harvester

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