CN111987134A - Connection structure, preparation method and stretchable display substrate - Google Patents
Connection structure, preparation method and stretchable display substrate Download PDFInfo
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- CN111987134A CN111987134A CN202010915713.6A CN202010915713A CN111987134A CN 111987134 A CN111987134 A CN 111987134A CN 202010915713 A CN202010915713 A CN 202010915713A CN 111987134 A CN111987134 A CN 111987134A
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- 239000000758 substrate Substances 0.000 title claims abstract description 73
- 238000002360 preparation method Methods 0.000 title abstract description 11
- 239000010410 layer Substances 0.000 claims abstract description 151
- 238000000034 method Methods 0.000 claims abstract description 31
- 239000011241 protective layer Substances 0.000 claims abstract description 31
- 238000005538 encapsulation Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 238000000059 patterning Methods 0.000 claims description 6
- 238000004380 ashing Methods 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 13
- 230000000694 effects Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- 239000000872 buffer Substances 0.000 description 6
- 230000008054 signal transmission Effects 0.000 description 4
- 239000006173 Good's buffer Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 239000002346 layers by function Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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Abstract
The utility model provides a connection structure and preparation method, tensile display substrate belongs to and shows technical field, and it can solve current tensile display substrate and break easily at tensile in-process signal line, causes the technical problem of bad circuit. A connection structure of the present disclosure for forming a stretchable display substrate, the connection structure having a central region and an edge region surrounding the central region; the connection structure includes: the device comprises a substrate, a first planarization layer positioned on the substrate, a plurality of signal lines arranged on the first planarization layer in parallel, a second planarization layer only covering the signal lines corresponding to a central area, and a first protective layer covering the second planarization layer; the first planarization layer between at least partially adjacent signal lines corresponding to the edge regions is disconnected.
Description
Technical Field
The disclosure belongs to the technical field of display, and particularly relates to a connection structure, a preparation method and a stretchable display substrate.
Background
With the continuous development of display technology, stretchable display products gradually come into the field of vision of people. Current stretchable display products generally include a plurality of display elements, with adjacent display elements being connected by a connecting structure. The connection structure between the adjacent display units is stretched during the stretching process, thereby implementing a stretchable function.
The tensile structure of tensile display product is usually provided with many signal lines in, and many signal lines coat and have protective layer and encapsulated layer, and in tensile process, be subject to the material of protective layer and encapsulated layer, the edge zone of protective layer and encapsulated layer appears the crackle in tensile structure limit easily. When the stretching amount is large, cracks on the protective layer and the encapsulation layer can extend into the connection structure, so that the signal lines close to the edge area are broken, and as the cracks extend towards the central area of the connection structure, the signal lines close to the central area are also easily broken, so that the stretchable display product is badly broken, and the display effect is affected.
Disclosure of Invention
The present disclosure is directed to at least one of the problems of the prior art, and provides a connection structure, a method for manufacturing the connection structure, and a stretchable display substrate.
In a first aspect, embodiments of the present disclosure provide a connection structure for forming a stretchable display substrate, the connection structure having a central region and an edge region surrounding the central region; the connection structure includes: the signal line protection device comprises a substrate, a first planarization layer positioned on the substrate, a plurality of signal lines arranged in parallel on the first planarization layer, a second planarization layer only covering the signal lines corresponding to the central area, and a first protection layer covering the second planarization layer;
the first planarization layer between the signal lines adjacent to at least a portion of the edge region is disconnected.
Optionally, the second planarizing layer has a thickness of 1 to 3 micrometers.
Optionally, the substrate comprises a flexible substrate.
In a second aspect, embodiments of the present disclosure provide a stretchable display substrate including the connection structure provided as above.
Optionally, the stretchable display substrate has a display area and a non-display area surrounding the display area; the connecting structure is arranged in the non-display area; the stretchable display substrate further comprises a plurality of display units arranged in the display area;
the connecting structure is positioned between the adjacent display units.
Optionally, the stretchable display substrate further comprises a plurality of openings disposed in the non-display area;
the opening is located between the adjacent display unit and the connecting structure.
Optionally, the display unit includes: the thin film transistor is positioned on the substrate, and the light-emitting device is connected with the thin film transistor;
a second protective layer covers the layer where the anode of the light-emitting device is located; the second protective layer and the first protective layer are arranged on the same layer and are made of the same material.
Optionally, the stretchable display substrate further comprises an encapsulation layer;
the encapsulation layer covers the first protective layer and the signal lines corresponding to the edge region in the connection structure, and cathodes of the light emitting devices in the display unit.
In a third aspect, an embodiment of the present disclosure provides a method for manufacturing a connection structure, where the connection structure has a central area and an edge area surrounding the central area, and the method includes:
forming a first planarization layer on a substrate;
forming a plurality of signal lines on the first planarization layer by using a patterning process;
forming a second planarizing layer on the plurality of signal lines;
forming a first protective layer covering only the central region on the second planarization layer by using a patterning process;
and with the first protective layer as a mask, ashing the second planarization layer corresponding to the edge area and the first planarization layer between the signal lines at least partially adjacent to the edge area, so that the first planarization layer between the signal lines at least partially adjacent to the edge area is disconnected.
Optionally, the forming a second planarization layer on the plurality of signal lines includes:
and forming a second planarization layer on the plurality of signal wires by using a blade coating process.
Drawings
FIG. 1 is a schematic diagram illustrating a stretchable display substrate according to the related art;
FIGS. 2a, 2b and 2c are structural views of cracks generated in a connection structure;
fig. 3 is a schematic structural diagram of a connection structure according to an embodiment of the disclosure;
fig. 4 is a schematic structural diagram of a stretchable display substrate according to an embodiment of the present disclosure;
fig. 5 is a schematic flow chart illustrating a method for manufacturing a connection structure according to an embodiment of the disclosure;
fig. 6a to fig. 6e are schematic structural diagrams corresponding to each step in a method for manufacturing a connection structure according to an embodiment of the present disclosure.
Detailed Description
For a better understanding of the technical aspects of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings.
Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. Also, the use of the terms "a," "an," or "the" and similar referents do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
Fig. 1 is a schematic structural diagram of a stretchable display substrate in the related art, as shown in fig. 1, the display substrate includes a plurality of display units 10 and a connection structure 20, the connection structure 20 is located between adjacent display units 10, and the adjacent display units 10 can be connected through the connection structure 20 and perform signal transmission, so as to implement a display function. During the stretching process, the connection unit 20 may be stretched and bring the display unit 10, thereby performing a stretching function. Wherein, the connection unit 20 includes: the semiconductor device includes a substrate 201, a first planarization layer 202 on the substrate 201, a plurality of signal lines 203 arranged in parallel on the first planarization layer 202, a second planarization layer 204 covering the plurality of signal lines 203, and a first protective layer 205 covering the second planarization layer 204. In order to prevent water, oxygen, and the like from attacking the signal lines 203 in the connection structure, the first protective layer 205 is also covered with an encapsulation layer 206. During the stretching process, limited by the materials of the first protective layer 205 and the encapsulation layer 206, cracks as shown in fig. 2a, 2b and 2c are easily generated in the edge regions of the first protective layer 205 and the encapsulation layer 206 in the stretched structure. Limited by the formation process of the second planarization layer 204, the second planarization layer 204 has a small thickness and cannot perform a good buffer function, and when the stretching amount is large, cracks on the first protection layer 205 and the encapsulation layer 206 may extend into the connection structure, resulting in the fracture of the signal line 203 near the edge region. Furthermore, since there is no blocking structure for preventing crack extension, as the crack extends toward the central region of the connection structure, the signal line 203 near the central region is also easily broken, thereby causing poor disconnection of the stretchable display substrate and affecting the display effect. In order to solve at least one of the technical problems in the related art, embodiments of the present disclosure provide a connection structure and a manufacturing method thereof, and a stretchable display substrate. A connection structure, a manufacturing method thereof, and a stretchable display substrate provided in the embodiments of the present disclosure are described in detail below with reference to the accompanying drawings and the detailed description.
Example one
Fig. 3 is a schematic structural diagram of a connection structure 20 according to an embodiment of the disclosure, where the connection structure 20 may be used to form a stretchable display substrate, as shown in fig. 3, the connection structure 20 has a central region and an edge region surrounding the central region; the connection structure 20 includes: a substrate 201, a first planarization layer 202 on the substrate 201, a plurality of signal lines 203 arranged in parallel on the first planarization layer 202, a second planarization layer 204 covering only the signal lines 203 corresponding to the central region, and a first protective layer 205 covering the second planarization layer 204; the first planarizing layer 202 between at least partially adjacent signal lines 203 corresponding to the edge regions is disposed in an off state.
In the connection structure 20 provided in the embodiment of the present invention, the second planarization layer 204 covers the plurality of signal lines 203, and the second planarization layer 204 can provide a buffer for the signal lines 203, so that when cracks occur in other film layers covering the signal lines 203, the cracks can be prevented from extending from the other film layers to the signal lines 203, thereby preventing the signal lines 203 from being broken. During the preparation process, the first protection layer 205 may protect the second planarization layer 204, so as to ensure the thickness of the second planarization layer 204, so that the second planarization layer 204 may achieve an effective buffer effect and increase the stretching amount of the entire connection structure 20. Meanwhile, only the signal line 203 in the central area is covered by the second planarization layer 204, the signal line 203 in the edge area is not covered by the second planarization layer 204, and at the same time, the first planarization layer 202 between at least part of the adjacent signal lines 203 in the edge area is disconnected, and the signal line 203 in the edge area can form a blocking structure, so that when a crack occurs in other film layers covering the signal line 203 and extends to the part of the signal line 203 in the edge area, the crack can be blocked, and the crack is prevented from extending from the edge area to the central area, thereby avoiding the bad disconnection caused by the breakage of the signal line 203 in the central area and affecting the display effect. In practical applications, the signal line 203 in the edge area may not be connected to any signal, so as to prevent the signal line 203 from breaking to interrupt the signal transmission. Furthermore, the connection structure provided by the embodiment of the disclosure has a simple structure, and only a small amount of improvement needs to be performed on the connection structure 20 in the stretchable display substrate in the related art, so that the preparation process is simple, and the preparation cost can be saved.
In some embodiments, the thickness of second planarizing layer 204 is 1 to 3 microns.
It should be noted that, in the preparation process, the first protection layer 205 may protect the second planarization layer 204, and may prevent the second planarization layer 204 from being damaged when other film layers are prepared, so that the second planarization layer 204 may have a larger thickness. In practical applications, the thickness of the second planarizing layer 204 may be set to be 1 to 3 micrometers, so that the second planarizing layer 204 may have a good buffer effect on cracks and increase the stretching amount of the entire connection structure 20, thereby improving the display effect.
In some embodiments, substrate 201 comprises a flexible substrate.
It should be noted that the substrate 201 may be a flexible substrate, and the substrate 201 may be made of a flexible material that is easily stretched, bent, curled, or folded, and the flexible material may include ultra-thin glass, metal, or plastic, for example, the material of the substrate 201 in the embodiment of the present disclosure may be PI (polyimide), so as to ensure that the whole stretching structure 20 has good stretching performance. In practical applications, a barrier layer, an optical adhesive layer, or other film layers may be further disposed between the substrate 201 and the first buffer layer 202.
Example two
Fig. 4 is a schematic structural diagram of a stretchable display substrate according to an embodiment of the disclosure, and as shown in fig. 4, the stretchable display substrate includes the connection structure 20 according to any of the embodiments. The stretchable display substrate has a display area and a non-display area surrounding the display area; the connecting structure 20 is disposed in the non-display region; the stretchable display substrate further includes a plurality of display cells 10 disposed in the display region; the connection structure 20 is located between adjacent display units 10.
It should be noted that adjacent display units 10 in the stretchable display substrate can be connected through the connection structure 20 and perform signal transmission, so as to implement a display function. During the stretching process, the connection unit 20 may be stretched and bring the display unit 10, thereby performing a stretching function. The second planarization layer 204 covers the plurality of signal lines 203 of the connection structure 20 in the stretchable display substrate, and the second planarization layer 204 can provide a buffer for the signal lines 203 and prevent cracks from extending from other film layers to the signal lines 203 when the other film layers covering the signal lines 203 are cracked, thereby preventing the signal lines 203 from being broken. During the preparation process, the first protection layer 205 may protect the second planarization layer 204, so as to ensure the thickness of the second planarization layer 204, so that the second planarization layer 204 may achieve an effective buffer effect and increase the stretching amount of the entire connection structure 20. Meanwhile, only the signal line 203 in the central area is covered by the second planarization layer 204, the signal line 203 in the edge area is not covered by the second planarization layer 204, and at the same time, the first planarization layer 202 between at least part of the adjacent signal lines 203 in the edge area is disconnected, and the signal line 203 in the edge area can form a blocking structure, so that when a crack occurs in other film layers covering the signal line 203 and extends to the part of the signal line 203 in the edge area, the crack can be blocked, and the crack is prevented from extending from the edge area to the central area, thereby avoiding the bad disconnection caused by the breakage of the signal line 203 in the central area and affecting the display effect. In practical applications, the signal line 203 in the edge area may not be connected to any signal, so as to prevent the signal line 203 from breaking to interrupt the signal transmission. Furthermore, the connection structure provided by the embodiment of the disclosure has a simple structure, and only a small amount of improvement needs to be performed on the connection structure 20 in the stretchable display substrate in the related art, so that the preparation process is simple, and the preparation cost can be saved.
In some embodiments, as shown in fig. 4, the stretchable display substrate further includes a plurality of openings 30 disposed in the non-display region; the opening 30 is located between the adjacent display unit 10 and the connection structure 20.
It should be noted that the opening 30 is disposed between the adjacent display units 10 and the connecting structure 20, during the stretching process, the connecting unit 20 can be stretched, and the opening 30 can relieve the stress on the connecting unit 20 during the stretching process, so as to increase the stretching amount of the stretchable display substrate, and further ensure that the stretchable display substrate achieves a good stretching effect.
In some embodiments, the display unit 10 includes: a thin film transistor 101 over a substrate 201, a light emitting device 102 connected to the thin film transistor 101; the layer where the anode of the light emitting device 102 is located is covered with a second protective layer 103; the second protection layer 103 and the first protection layer 205 are disposed in the same layer and are made of the same material.
It should be noted that the thin film transistor 101 may include an active layer, a first gate insulating layer, a first gate electrode, a second gate insulating layer, a second gate electrode, an interlayer insulating layer, and a source electrode and a drain electrode sequentially disposed on the substrate 201. The source electrode and the drain electrode are arranged on the same layer and are respectively connected with two ends of the active layer. The light emitting device 102 may include an anode and a cathode disposed opposite to each other, and an organic functional layer between the anode and the cathode, wherein a voltage is applied between the anode and the cathode, and a semiconductor material in the organic functional layer may be excited to emit light, thereby implementing a display function. The drain of the thin film transistor 101 is connected to the anode of the light emitting device 102, a data signal can be input through the source of the thin film transistor 101, and under the control of control signals input from the first gate and the second gate, the thin film transistor 101 can be turned on and transmitted to the anode of the light emitting device 102 through the drain of the thin film transistor 101, so that the brightness of light emitted from the organic functional layer is adjusted by controlling the magnitude of the data signal, and a display function is realized. In practical applications, the layer on which the anode of the light emitting device 102 is located is covered with the second protective layer 103 to protect the anode of the light emitting device 102 and prevent the anode from being damaged when other film layers are formed. The second protection layer 103 and the first protection layer 205 may be disposed on the same layer and have the same material, and the two layers may be formed in one step by the same process, so that the number of manufacturing steps may be reduced, the manufacturing raw material may be saved, and the manufacturing cost may be saved.
In some embodiments, the stretchable display substrate further comprises an encapsulation layer; the encapsulation layer covers the first protective layer 205 and the signal line 203 corresponding to the edge region in the connection structure 20, and the cathode of the light emitting device 102 in the display unit 10.
It should be noted that the encapsulation layer can prevent water, oxygen, and the like from penetrating into the display unit 10 and the connection unit 20, and avoid damage to each film layer therein, causing short circuit or open circuit, and the like, so as to ensure that the stretchable display substrate realizes good display, improve the service life of the stretchable display substrate, and save the use cost.
EXAMPLE III
Fig. 5 is a schematic flow chart of a method for manufacturing a connection structure according to an embodiment of the disclosure, and as shown in fig. 5, the method for manufacturing the connection structure includes the following steps:
s501, forming a first planarization layer on the substrate.
It should be noted that, as shown in fig. 6a, a first planarization layer is coated on the substrate, and the thickness of the first planarization layer can be set according to the thickness of each film layer of the display unit in the formed stretchable display substrate.
S502, a plurality of signal lines are formed on the first planarization layer by using a patterning process.
As shown in fig. 6b, a metal layer is formed on the first planarization layer, and a plurality of signal lines arranged in parallel are formed on the entire metal layer by exposure, development and etching.
S503, forming a second planarization layer on the plurality of signal lines.
It should be noted that, as shown in fig. 6c, a second planarization layer is coated on the film layer where the plurality of signal lines are located, and the second planarization layer can buffer the tensile stress during the stretching process, so as to prevent the crack from extending onto the signal line, and thus the signal line is damaged.
S504, forming a first protective layer covering only the central region on the second planarization layer by using a patterning process.
As shown in fig. 6d, a protective layer is formed on the second planarizing layer, and the protective layer in the edge region is removed by exposure, development, and etching, thereby forming a first protective layer covering only the central region. The first protective layer can protect the second planarization layer and prevent the second planarization layer from being damaged when other film layers are formed, so that the second planarization layer is guaranteed to have larger thickness, and a good buffering effect is achieved.
And S505, with the first protective layer as a mask, ashing the second planarization layer corresponding to the edge area and the first planarization layer between at least part of adjacent signal lines corresponding to the edge area, so that the first planarization layer between at least part of adjacent signal lines corresponding to the edge area is disconnected.
It should be noted that, as shown in fig. 6e, the first protection layer is used as a mask, the second planarization layer and the first planarization layer are ashed, the second planarization layer in the edge region and the first planarization layer between at least part of adjacent signal lines in the edge region are removed, so that at least part of adjacent signal lines in the edge region are disconnected, and therefore, when part of the signal lines are broken, the cracks can be blocked, and the cracks are prevented from extending from the edge region to the central region, so that the signal lines in the central region are prevented from being broken to cause poor disconnection, and the display effect is not affected.
In some embodiments, forming a second planarization layer on the plurality of signal lines includes: a second planarizing layer is formed on the plurality of signal lines using a doctor blade process.
It should be noted that, a doctor blade process may be used to form the second planarizing layer, and compared with a spin coating process in the related art, the doctor blade process may be used to make the thickness of the formed second planarizing layer larger, so that the second planarizing layer achieves a good buffer effect.
It is to be understood that the above embodiments are merely exemplary embodiments that are employed to illustrate the principles of the present disclosure, and that the present disclosure is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the disclosure, and these are to be considered as the scope of the disclosure.
Claims (10)
1. A connection structure for forming a stretchable display substrate, the connection structure having a central region and an edge region surrounding the central region; characterized in that, the connection structure includes: the signal line protection device comprises a substrate, a first planarization layer positioned on the substrate, a plurality of signal lines arranged in parallel on the first planarization layer, a second planarization layer only covering the signal lines corresponding to the central area, and a first protection layer covering the second planarization layer;
the first planarization layer between the signal lines adjacent to at least a portion of the edge region is disconnected.
2. The connection structure according to claim 1, wherein the thickness of the second planarizing layer is 1 to 3 micrometers.
3. The connection structure of claim 1, wherein the substrate comprises a flexible substrate.
4. A stretchable display substrate comprising the connection structure of any one of claims 1-3.
5. The stretchable display substrate of claim 4, wherein the stretchable display substrate has a display area and a non-display area surrounding the display area; the connecting structure is arranged in the non-display area; the stretchable display substrate further comprises a plurality of display units arranged in the display area;
the connecting structure is positioned between the adjacent display units.
6. The stretchable display substrate of claim 5, further comprising a plurality of openings disposed in the non-display region;
the opening is located between the adjacent display unit and the connecting structure.
7. A stretchable display substrate according to claim 6, wherein the display unit comprises: the thin film transistor is positioned on the substrate, and the light-emitting device is connected with the thin film transistor;
a second protective layer covers the layer where the anode of the light-emitting device is located; the second protective layer and the first protective layer are arranged on the same layer and are made of the same material.
8. The stretchable display substrate of claim 7, further comprising an encapsulation layer;
the encapsulation layer covers the first protective layer and the signal lines corresponding to the edge region in the connection structure, and cathodes of the light emitting devices in the display unit.
9. A method of producing a connection structure having a central region and an edge region surrounding the central region, the method comprising:
forming a first planarization layer on a substrate;
forming a plurality of signal lines on the first planarization layer by using a patterning process;
forming a second planarizing layer on the plurality of signal lines;
forming a first protective layer covering only the central region on the second planarization layer by using a patterning process;
and with the first protective layer as a mask, ashing the second planarization layer corresponding to the edge area and the first planarization layer between the signal lines at least partially adjacent to the edge area, so that the first planarization layer between the signal lines at least partially adjacent to the edge area is disconnected.
10. The method for manufacturing a connection structure according to claim 9, wherein the forming of the second planarizing layer on the plurality of signal lines includes:
and forming a second planarization layer on the plurality of signal wires by using a blade coating process.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2022141497A1 (en) * | 2020-12-30 | 2022-07-07 | 武汉华星光电半导体显示技术有限公司 | Display panel and display apparatus |
| EP4203052A4 (en) * | 2021-04-30 | 2024-01-10 | Boe Technology Group Co Ltd | Stretchable display substrate and preparation method therefor, and display device |
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| CN109920803A (en) * | 2019-03-25 | 2019-06-21 | 京东方科技集团股份有限公司 | A kind of stretchable display base plate and display device |
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2020
- 2020-09-03 CN CN202010915713.6A patent/CN111987134A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109920803A (en) * | 2019-03-25 | 2019-06-21 | 京东方科技集团股份有限公司 | A kind of stretchable display base plate and display device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022141497A1 (en) * | 2020-12-30 | 2022-07-07 | 武汉华星光电半导体显示技术有限公司 | Display panel and display apparatus |
| US11968868B2 (en) | 2020-12-30 | 2024-04-23 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Display panel and display device |
| EP4203052A4 (en) * | 2021-04-30 | 2024-01-10 | Boe Technology Group Co Ltd | Stretchable display substrate and preparation method therefor, and display device |
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