CN111982984A - High-precision cross-capacitance oil detection sensor and detection method thereof - Google Patents
High-precision cross-capacitance oil detection sensor and detection method thereof Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 62
- 239000004809 Teflon Substances 0.000 claims abstract description 58
- 229920006362 Teflon® Polymers 0.000 claims abstract description 58
- 229910001369 Brass Inorganic materials 0.000 claims abstract description 53
- 239000010951 brass Substances 0.000 claims abstract description 32
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229910052802 copper Inorganic materials 0.000 claims abstract description 31
- 239000010949 copper Substances 0.000 claims abstract description 31
- 239000003990 capacitor Substances 0.000 claims abstract description 30
- 230000001681 protective effect Effects 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 7
- 239000003344 environmental pollutant Substances 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 231100000719 pollutant Toxicity 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims 1
- 239000003921 oil Substances 0.000 description 36
- 239000002923 metal particle Substances 0.000 description 9
- 239000010687 lubricating oil Substances 0.000 description 7
- 238000012544 monitoring process Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 230000006698 induction Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/226—Construction of measuring vessels; Electrodes therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/08—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring variation of an electric variable directly affected by the flow, e.g. by using dynamo-electric effect
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Abstract
The invention provides a high-precision cross capacitance oil detection sensor and a detection method thereof, wherein the detection method comprises the following steps: the device comprises a cross capacitor, a first circular copper guard ring, a second circular copper guard ring, a brass metal protective cover and an electrode connector; the cross capacitor comprises a first Teflon tube and four symmetrically arranged brass electrodes attached to the outer wall of the first Teflon tube, wherein the interval between any two brass electrodes is 0.5 mm; the first circular copper guard ring and the second circular copper guard ring are respectively arranged at the upper end and the lower end of the outer wall of the first Teflon tube, and are spaced from the two ends of the brass electrode by 0.5 mm; the brass metal protective cover is arranged outside the cross capacitor, the interval between the brass metal protective cover and the cross capacitor is 1mm, and a second Teflon tube is arranged between the brass metal protective cover and the cross capacitor; the electrode connector is connected with four identical brass electrodes. The technical problems of high detection cost, time consumption, single detection parameter, low detection precision and the like in the prior art are solved.
Description
Technical Field
The invention relates to the technical field of fault detection of hydraulic systems of ship equipment, in particular to a high-precision cross capacitance oil detection sensor and a detection method thereof.
Background
Various rotary machines use lubricating oil to ensure their proper operation, wear is one of the most common failure modes that cause various rotary machine devices to operate abnormally and fail, and metal particles of different sizes and shapes generated during the wear of rotating parts of the machine devices may be mixed with the lubricating oil, seriously impairing the performance of the machine devices. Therefore, detecting such particles is necessary to predict and prevent catastrophic failure of the machine. The detection of metal particles in the oil has important significance for avoiding the faults of the rotating machinery. By monitoring the quality or properties of the wear particles in the lubricating oil, the condition of the machine parts in direct contact with the lubricating oil can be obtained. During normal operation, the particle size and its concentration do not cause machine failure. When an abnormal condition occurs, the size and concentration of the metal particles increase. Thus, by continuously monitoring the metal particles in the lubricating oil, catastrophic failure of the machine can be avoided. The condition of the lubricating oil is monitored by chemical, induction, ferrography, optical methods, and the like.
Among them, spectroscopy is a chemical method, an off-line, costly detection method, and time consuming. This detection method does not provide real-time monitoring of the oil. Induction provides on-line monitoring, but can only be used to detect ferromagnetic particles. Non-ferromagnetic metal particles in the oil cannot be detected. Optical methods provide real-time monitoring, but the opacity of the oil will be of a reasonable accuracy for detection. Accuracy is affected by the refractive index of the medium and the shape of the metal particles in the oil. In addition, the detection method can cause pollution to the oil.
Disclosure of Invention
According to the technical problems of high detection cost, time consumption, single detection parameter, low detection precision and the like in the prior art, the invention provides the high-precision cross-capacitance oil detection sensor and the detection method thereof.
The technical means adopted by the invention are as follows:
a high accuracy cross capacitance oil detection sensor, comprising: the device comprises a cross capacitor, a first circular copper guard ring, a second circular copper guard ring, a brass metal protective cover and an electrode connector;
the cross capacitor comprises a first Teflon tube and four symmetrically arranged brass electrodes attached to the outer wall of the first Teflon tube, and the interval between any two brass electrodes is 0.5 mm;
the first circular copper guard ring is arranged at the upper end of the outer wall of the first Teflon tube, and the first circular copper guard ring is 0.5mm away from one end of the brass electrode; the second circular copper guard ring is arranged at the lower end of the outer wall of the first Teflon tube, and the second circular copper guard ring is spaced from the other end of the brass electrode by 0.5 mm;
the brass metal protective cover is arranged outside the cross capacitor, the interval between the brass metal protective cover and the cross capacitor is 1mm, and a second Teflon tube is arranged between the brass metal protective cover and the cross capacitor;
the electrode connector is connected with four identical brass electrodes.
Further, the diameter of said second teflon tube is larger than the diameter of said first teflon tube.
Further, the four brass electrodes are 18mm in length and 2mm in thickness.
Further, the length of each of the first circular copper guard ring and the second circular copper guard ring is 5mm, and the thickness of each of the first circular copper guard ring and the second circular copper guard ring is 2mm as same as that of the brass electrode.
Further, the brass metal protective cover has an outer diameter of 16mm and a thickness of 1 mm.
Furthermore, polytetrafluoroethylene is filled between any two brass electrodes.
Furthermore, the high-precision cross capacitance oil detection sensor also comprises a detection device, the detection device comprises a base and a bracket fixedly connected to the base, and the bracket is respectively provided with a first clamping device and a second clamping device; the first clamping device is connected with the high-precision cross capacitance oil detection sensor; the high-precision cross capacitance oil detection sensor is electrically connected with the AD7150 capacitance digital converter and the PC end; the second clamping device is connected with a third Teflon tube, the third Teflon tube penetrates through the center of the first Teflon tube, the top end of the third Teflon tube is connected with the funnel, a container is arranged right below the bottom end of the third Teflon tube, and a filter screen is suspended between the container and the third Teflon tube.
Further, the diameter of said third teflon tube is smaller than the diameter of said first teflon tube.
The invention also provides an oil detection method based on the high-precision cross capacitance oil detection sensor, which is realized by using the high-precision cross capacitance oil detection sensor and comprises the following steps:
step S1, conveying the oil to be detected into a third Teflon tube through a funnel;
step S2, when the oil to be detected flows through the cross capacitor, signal excitation is applied to the opposite electrodes of the cross capacitor, and the cross capacitor generates different capacitance responses according to the difference of the quality, the size and the flow velocity of the metal pollutants in the oil;
and S3, measuring the capacitance value of the high-precision cross capacitance oil detection sensor by adopting an AD7150 capacitance digital converter, wherein the AD7150 capacitance digital converter is connected with a PC (personal computer) end, and the PC end carries out online data acquisition.
And step S4, the detected oil flows into the container through the filter screen.
Compared with the prior art, the invention has the following advantages:
according to the high-precision cross-capacitance oil detection sensor provided by the invention, the capacitance value of the sensor can be changed due to the existence of metal particles in oil, and the capacitance response of the sensor is very accurate. The sensor has the advantages of high speed, high precision, low cost and the like, and can be used for quickly, accurately, inexpensively and maintenance-free online detection of metal particles in lubricating oil.
Based on the reason, the method can be widely popularized in the fields of fault detection of the hydraulic system of the ship equipment and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic diagram of a sensor according to the present invention.
FIG. 2 is a longitudinal cross-sectional view of the sensor of the present invention.
FIG. 3 is a schematic view of the sensor and the detecting device according to the present invention.
FIG. 4 is a graph of the signal obtained from the metal particles measured by the sensor of the present invention.
In the figure: 1. a first circular copper retaining ring; 2. a second circular copper retaining ring; 3. a brass metal shield; 4. an electrode connector; 5. a first teflon tube; 6. a brass electrode; 7. a second teflon tube; 8. a base; 9. a support; 10. a first holding device; 11. a second holding device; 12. a high-precision cross capacitance oil detection sensor; 13. an AD7150 capacitive-to-digital converter; 14. a PC terminal; 15. a third teflon tube; 16. a funnel; 17. a container; 18. and (4) a filter screen.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. Any specific values in all examples shown and discussed herein are to be construed as exemplary only and not as limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
In the description of the present invention, it is to be understood that the orientation or positional relationship indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the orientation or positional relationship shown in the drawings, and are used for convenience of description and simplicity of description only, and in the absence of any contrary indication, these directional terms are not intended to indicate and imply that the device or element so referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore should not be considered as limiting the scope of the present invention: the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
As shown in fig. 1-2, the present invention provides a high-precision cross-capacitance oil detecting sensor, comprising: the device comprises a cross capacitor, a first circular copper guard ring 1, a second circular copper guard ring 2, a brass metal protective cover 3 and an electrode connector 4;
the cross capacitor comprises a first Teflon tube 5 and four symmetrically arranged brass electrodes 6 attached to the outer wall of the first Teflon tube 5, wherein the interval between any two brass electrodes 6 is 0.5 mm; and polytetrafluoroethylene is filled between any two brass electrodes 6.
The first circular copper guard ring 1 is arranged at the upper end of the outer wall of the first Teflon tube 5, and the first circular copper guard ring 1 is spaced from one end of the brass electrode 6 by 0.5 mm; the second circular copper guard ring 2 is arranged at the lower end of the outer wall of the first Teflon tube 5, and the second circular copper guard ring 2 is spaced from the other end of the brass electrode 5 by 0.5 mm;
the brass metal protective cover 3 is arranged outside the cross capacitor, the interval between the brass metal protective cover 3 and the cross capacitor is 1mm, and a second Teflon tube 7 is arranged between the brass metal protective cover 3 and the cross capacitor;
the electrode connector 4 connects four identical brass electrodes 6.
In a preferred embodiment of the present invention, the diameter of the second teflon tube 7 is larger than the diameter of the first teflon tube 5. In specific implementation, the diameter of the first teflon tube 5 is 8mm, and the diameter of the second teflon tube 7 is 10 mm.
In a preferred embodiment of the present invention, the four brass electrodes 6 are all 18mm in length and 2mm in thickness.
In a preferred embodiment of the present invention, the first circular copper guard ring 1 and the second circular copper guard ring 2 are both 5mm long and 2mm thick, which is the same as the thickness of the brass electrode 6.
In a preferred embodiment of the present invention, the brass metal shield 3 has an outer diameter of 16mm and a thickness of 1 mm. For shielding the brass electrode 6. The brass electrodes 6 of the cross-over capacitor are insulated from the outer brass metal shield 3 by means of a second teflon tube 7 of thickness 1 mm.
As shown in fig. 3, the high-precision cross capacitance oil detection sensor further includes a detection device, the detection device includes a base 8 and a bracket 9 fixedly connected to the base 8, and the bracket 9 is respectively provided with a first clamping device 10 and a second clamping device 11; the first clamping device 10 is connected with the high-precision cross capacitance oil detection sensor 12; the high-precision cross capacitance oil detection sensor 12 is electrically connected with an AD7150 capacitance digital converter 13 and a PC end 14; the second clamping device 11 is connected with a third Teflon tube 15, the third Teflon tube 15 passes through the center of the first Teflon tube 5, the top end of the third Teflon tube 5 is connected with a funnel 16, a container 17 is arranged right below the bottom end of the third Teflon tube 5, and a filter screen 18 is suspended between the container 17 and the third Teflon tube 15.
In a preferred embodiment of the present invention, the diameter of the third teflon tube 15 is smaller than the diameter of the first teflon tube 5.
The invention also provides an oil detection method based on the high-precision cross capacitance oil detection sensor, which is realized by using the high-precision cross capacitance oil detection sensor and comprises the following steps:
step S1, conveying the oil to be detected into a third Teflon tube 15 through a funnel 16;
step S2, when the oil to be detected flows through the cross capacitor, signal excitation is applied to the brass electrodes 6 opposite to the cross capacitor, and the cross capacitor generates different capacitance responses according to the difference of the quality, the size and the flow velocity of metal pollutants in the oil;
and step S3, measuring the capacitance value of the high-precision cross capacitance oil detection sensor by adopting the AD7150 capacitance digital converter 13, connecting the AD7150 capacitance digital converter 13 with the PC end 14, and carrying out online data acquisition by the PC end 14. The detected signal is shown in fig. 4.
In step S4, the detected oil flows into the tank 17 through the filter screen 18.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (9)
1. The utility model provides a high accuracy cross capacitance fluid detection sensor which characterized in that includes: the device comprises a cross capacitor, a first circular copper guard ring, a second circular copper guard ring, a brass metal protective cover and an electrode connector;
the cross capacitor comprises a first Teflon tube and four symmetrically arranged brass electrodes attached to the outer wall of the first Teflon tube, and the interval between any two brass electrodes is 0.5 mm;
the first circular copper guard ring is arranged at the upper end of the outer wall of the first Teflon tube, and the first circular copper guard ring is 0.5mm away from one end of the brass electrode; the second circular copper guard ring is arranged at the lower end of the outer wall of the first Teflon tube, and the second circular copper guard ring is spaced from the other end of the brass electrode by 0.5 mm;
the brass metal protective cover is arranged outside the cross capacitor, the interval between the brass metal protective cover and the cross capacitor is 1mm, and a second Teflon tube is arranged between the brass metal protective cover and the cross capacitor;
the electrode connector is connected with four identical brass electrodes.
2. A high accuracy cross capacitance oil detection sensor as claimed in claim 1 wherein said second teflon tube has a diameter greater than a diameter of said first teflon tube.
3. A high accuracy cross capacitance oil detection sensor as claimed in claim 1 wherein the four brass electrodes are each 18mm in length and 2mm in thickness.
4. The high accuracy cross capacitance oil detection sensor of claim 1, wherein the first and second circular copper grommets are both 5mm in length and 2mm in thickness, as are the brass electrodes.
5. A high accuracy cross capacitance oil detection sensor as claimed in claim 1 wherein the brass metal shield has an outer diameter of 16mm and a thickness of 1 mm.
6. The high accuracy cross-capacitance oil detection sensor of claim 1, wherein polytetrafluoroethylene is filled between any two brass electrodes.
7. The high-precision cross-capacitance oil detection sensor according to claim 1, further comprising a detection device, wherein the detection device comprises a base and a bracket fixedly connected to the base, and the bracket is provided with a first clamping device and a second clamping device respectively; the first clamping device is connected with the high-precision cross capacitance oil detection sensor; the high-precision cross capacitance oil detection sensor is electrically connected with the AD7150 capacitance digital converter and the PC end; the second clamping device is connected with a third Teflon tube, the third Teflon tube penetrates through the center of the first Teflon tube, the top end of the third Teflon tube is connected with the funnel, a container is arranged right below the bottom end of the third Teflon tube, and a filter screen is suspended between the container and the third Teflon tube.
8. A high accuracy cross capacitance oil detection sensor as claimed in claim 1 wherein said third teflon tube has a diameter less than a diameter of said first teflon tube.
9. An oil detection method based on a high-precision cross capacitance oil detection sensor is characterized in that the method is realized by using the high-precision cross capacitance oil detection sensor, and comprises the following steps:
step S1, conveying the oil to be detected into a third Teflon tube through a funnel;
step S2, when the oil to be detected flows through the cross capacitor, signal excitation is applied to the opposite electrodes of the cross capacitor, and the cross capacitor generates different capacitance responses according to the difference of the quality, the size and the flow velocity of the metal pollutants in the oil;
and S3, measuring the capacitance value of the high-precision cross capacitance oil detection sensor by adopting an AD7150 capacitance digital converter, wherein the AD7150 capacitance digital converter is connected with a PC (personal computer) end, and the PC end carries out online data acquisition.
And step S4, the detected oil flows into the container through the filter screen.
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| CN202010963717.1A CN111982984A (en) | 2020-09-14 | 2020-09-14 | High-precision cross-capacitance oil detection sensor and detection method thereof |
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| CN202010963717.1A CN111982984A (en) | 2020-09-14 | 2020-09-14 | High-precision cross-capacitance oil detection sensor and detection method thereof |
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| CN113418968A (en) * | 2021-06-01 | 2021-09-21 | 大连海事大学 | Cross capacitive sensor, manufacturing method of sensor and oil detection system |
| CN113533441A (en) * | 2021-07-19 | 2021-10-22 | 瑞得设备科技(江苏)有限公司 | Cross capacitance solenoid type sensor and preparation device and detection method thereof |
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