CN111982265A - Packaging structure of two-dimensional vibration sensor based on fiber grating - Google Patents
Packaging structure of two-dimensional vibration sensor based on fiber grating Download PDFInfo
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- 238000005538 encapsulation Methods 0.000 claims abstract description 10
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- 229920001971 elastomer Polymers 0.000 claims description 10
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- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
本发明公开了一种基于光纤光栅的二维振动传感器的封装结构,该封装结构包括外壳、弹性体、第一光纤光栅和第二光纤光栅,弹性体包括位于上端的质量块、位于中部的铰链部分和底座,在预应力的作用下将第一光纤光栅和第二光纤光栅粘贴在质量块和底座的槽内,栅区悬空分布在质量块和底座之间。质量块上半部分为半球,下半部分为圆柱,中间铰链部分包括两个正交布置铰链。外壳外形是长方体,中间设有盲孔,底部设有内凹的凸台和螺纹孔,凸台部分侧面为矩形。解决二维振动传感器封装在安装时不易确定测量方向,安装稳定性不高,容易产生光信号损失的问题。
The invention discloses an encapsulation structure of a two-dimensional vibration sensor based on fiber grating. The encapsulation structure includes a casing, an elastic body, a first optical fiber grating and a second optical fiber grating. The elastic body includes a mass block located at the upper end and a hinge located in the middle. Part and base, the first fiber grating and the second fiber grating are pasted in the grooves of the mass block and the base under the action of prestress, and the grating area is suspended and distributed between the mass block and the base. The upper half of the mass is a hemisphere, the lower half is a cylinder, and the middle hinge part includes two orthogonally arranged hinges. The outer shape of the casing is a cuboid, a blind hole is arranged in the middle, a concave boss and a threaded hole are arranged at the bottom, and the side of the boss is rectangular. It solves the problems that the two-dimensional vibration sensor package is not easy to determine the measurement direction during installation, the installation stability is not high, and the optical signal loss is easy to occur.
Description
技术领域technical field
本发明属于光纤光栅振动传感器技术领域,尤其涉及一种基于光纤光栅的二维振动传感器的封装结构。The invention belongs to the technical field of fiber grating vibration sensors, and particularly relates to a packaging structure of a two-dimensional vibration sensor based on fiber gratings.
背景技术Background technique
基于光纤光栅式的二维振动传感器,具有抗电磁干扰、可靠性高、易于复用等特点,是光纤光栅研究和应用的热点之一。但是,目前许多基于FBG设计的振动传感器为了测量的需要,大多采用圆柱形的外壳进行封装。传感器采用这样的封装方式,在实验和测量应用安装传感器时,安装面较窄,不能准确的确定传感器的测量方向,导致测量结果可能产生较大的系统误差,不利于精确测量。而且,大部分基于FBG的二维传感器上的每根光纤光栅都连接一根跳线,在解调过程中都占用一个通道,没能发挥出光纤光栅复用的特点,不利于信号拓展。The two-dimensional vibration sensor based on fiber grating has the characteristics of anti-electromagnetic interference, high reliability, and easy reuse. It is one of the hot spots in the research and application of fiber grating. However, at present, many vibration sensors based on FBG design are mostly packaged in cylindrical housings for measurement needs. The sensor adopts such a packaging method. When installing the sensor in experiments and measurement applications, the installation surface is narrow, and the measurement direction of the sensor cannot be accurately determined, resulting in a large systematic error in the measurement result, which is not conducive to accurate measurement. Moreover, each fiber grating on most FBG-based two-dimensional sensors is connected with a jumper, which occupies one channel during the demodulation process, and fails to exert the characteristics of fiber grating multiplexing, which is not conducive to signal expansion.
专利CN201611157807.1设计了一种量程可调的光纤光栅二维振动传感器,其采用圆柱形外壳进行封装,安装时需要设计辅助机构,并且传感器的测量方向不能准确的确定,安装的稳定性不高,容易产生安装误差。专利CN201711229418.X设计一种小型光纤光栅二维振动传感器,其光纤在封装时,需要弯曲,且弯曲半径较小,容易造成光信号的损失。The patent CN201611157807.1 designs a fiber grating two-dimensional vibration sensor with adjustable range, which is packaged in a cylindrical shell, and an auxiliary mechanism needs to be designed during installation, and the measurement direction of the sensor cannot be accurately determined, and the installation stability is not high , prone to installation errors. Patent CN201711229418.X designs a small fiber grating two-dimensional vibration sensor. When the optical fiber is packaged, it needs to be bent, and the bending radius is small, which is easy to cause the loss of optical signal.
发明内容SUMMARY OF THE INVENTION
本发明所要解决的技术问题是,提供一种基于光纤光栅的二维振动传感器的封装结构,解决二维振动传感器封装在安装时不易确定测量方向,安装稳定性不高,容易产生光信号损失的问题。The technical problem to be solved by the present invention is to provide a package structure of a two-dimensional vibration sensor based on fiber grating, which solves the problem that the two-dimensional vibration sensor package is not easy to determine the measurement direction during installation, the installation stability is not high, and the optical signal loss is easy to occur. question.
本发明解决其技术问题所采用的技术方案是:提供一种基于光纤光栅的二维振动传感器的封装结构,该封装结构包括外壳、弹性体、第一光纤光栅和第二光纤光栅,弹性体包括位于上端的质量块、位于中部的铰链部分和底座,在预应力的作用下将第一光纤光栅和第二光纤光栅粘贴在质量块和底座的槽内,栅区悬空分布在质量块和底座之间。The technical solution adopted by the present invention to solve the technical problem is to provide a packaging structure of a two-dimensional vibration sensor based on a fiber grating. The mass block at the upper end, the hinge part and the base in the middle, under the action of prestress, the first fiber grating and the second fiber grating are pasted in the groove of the mass block and the base, and the grid area is suspended between the mass block and the base. between.
按上述技术方案,质量块上半部分为半球,下半部分为圆柱,中间铰链部分包括两个正交布置铰链。According to the above technical solution, the upper half of the mass block is a hemisphere, the lower half is a cylinder, and the middle hinge part includes two orthogonally arranged hinges.
按上述技术方案,外壳外形是长方体,中间设有盲孔,底部设有内凹的凸台和螺纹孔,凸台部分侧面为矩形。According to the above technical solution, the outer shape of the casing is a cuboid, a blind hole is arranged in the middle, a concave boss and a threaded hole are arranged at the bottom, and the side of the boss is rectangular.
按上述技术方案,底座上圆柱表面均匀分布四个光纤粘贴槽,下圆台部分侧面为矩形,并且对应槽的位置均匀分布四个小通孔,质量块底座圆柱直径相同,对应均匀分布四个粘贴光纤的槽。According to the above technical scheme, four optical fiber sticking grooves are evenly distributed on the cylindrical surface of the base, the side of the lower circular table is rectangular, and the positions of the corresponding grooves are evenly distributed with four small through holes. fiber optic slot.
按上述技术方案,弹性体上的槽在质量块和底座圆柱部分的表面,底座上的孔对应槽的位置分布且孔径大于槽宽。According to the above technical solution, the grooves on the elastic body are on the surface of the mass block and the cylindrical part of the base, the holes on the base are distributed corresponding to the positions of the grooves and the aperture is larger than the width of the grooves.
按上述技术方案,第一光纤光栅和第二光纤光栅在粘贴前,通过有机溶剂去掉栅区光纤表面的涂覆层,光纤光栅剩余未粘贴部分,一端从底座下部分的孔内穿出,一端从质量块的上半球部分绕到光纤光栅的对面,粘贴在相应的槽内,后从底座下部分的孔内穿出。According to the above technical solution, before the first fiber grating and the second fiber grating are pasted, the coating layer on the surface of the optical fiber in the grid region is removed by an organic solvent, and the remaining part of the fiber grating that is not pasted is passed through the hole in the lower part of the base, and one end It is wound from the upper hemisphere of the mass block to the opposite side of the fiber grating, pasted in the corresponding groove, and then passed through the hole in the lower part of the base.
按上述技术方案,弹性体安装在外壳中,盲孔直径大于弹性体圆柱的直径,凸台与底座的下圆台配合,两矩形侧面重合。According to the above technical solution, the elastic body is installed in the casing, the diameter of the blind hole is larger than the diameter of the cylinder of the elastic body, the boss is matched with the lower circular platform of the base, and the two rectangular sides overlap.
按上述技术方案,还包括传感器封装头,传感器封装头为中空的壳体,第一光纤光栅和第二光纤光栅未粘贴部分从底座下部分的孔穿出后直接穿入传感器封装头中,从光纤保护套管穿出;外壳、弹性体和传感器封装头均采用金属材料。According to the above technical solution, it also includes a sensor packaging head, the sensor packaging head is a hollow shell, and the unpasted parts of the first fiber grating and the second fiber grating are directly penetrated into the sensor packaging head after passing through the hole in the lower part of the base, The optical fiber protective sleeve goes out; the shell, the elastomer and the sensor package head are all made of metal materials.
按上述技术方案,传感器封装头为漏斗状,其最上端设有螺纹。According to the above technical solution, the sensor packaging head is in the shape of a funnel, and the uppermost end thereof is provided with a thread.
按上述技术方案,传感器封装头与外壳通过螺纹连接,同时将弹性体压紧。According to the above technical solution, the sensor packaging head and the housing are connected by screw threads, and the elastic body is compressed at the same time.
本发明产生的有益效果是:The beneficial effects that the present invention produces are:
1)传感器的光纤完全封装金属壳体之内,不容易损坏,且封装尺寸小,结构简单。1) The optical fiber of the sensor is completely encapsulated in the metal shell, which is not easy to be damaged, and the package size is small and the structure is simple.
2)光纤光栅在粘贴前去掉了栅区及其附近光纤的表面涂覆层,加载粘贴时,光纤光栅粘贴的很牢固,卸载后,光纤光栅的波长漂移量变化较小。2) The fiber grating removes the surface coating of the grating region and its adjacent fibers before pasting. When loading and pasting, the fiber grating is firmly pasted. After unloading, the wavelength shift of the fiber grating changes little.
3)传感器的测量方向垂直于所采用的矩形壳体的表面,可以在壳体表面标示出传感器的测量方向。3) The measurement direction of the sensor is perpendicular to the surface of the adopted rectangular housing, and the measurement direction of the sensor can be marked on the surface of the housing.
4)光纤在传感器内部弯曲部分半径较大,光信号的传输损耗低。4) The radius of the bending part of the optical fiber inside the sensor is large, and the transmission loss of the optical signal is low.
5)光纤光栅两端的光纤都从传感器内穿出,可以将两根光纤进行串联,实现单通道解调。5) The fibers at both ends of the fiber grating go out from the sensor, and the two fibers can be connected in series to realize single-channel demodulation.
6)光纤光栅的出口位于传感器的底部,工作稳定性高。6) The outlet of the fiber grating is located at the bottom of the sensor, and the working stability is high.
附图说明Description of drawings
下面将结合附图及实施例对本发明作进一步说明,附图中:The present invention will be further described below in conjunction with the accompanying drawings and embodiments, in which:
图1本发明实施例二维振动传感器整体封装结构图;1 is an overall package structure diagram of a two-dimensional vibration sensor according to an embodiment of the present invention;
图2本发明实施例中传感器外壳的结构示意图;2 is a schematic structural diagram of a sensor housing in an embodiment of the present invention;
图3本发明实施例中弹性体的三视图;Figure 3 is a three view of an elastic body in an embodiment of the present invention;
图4本发明实施例中弹性体的轴测图;Figure 4 is an axonometric view of an elastomer in an embodiment of the present invention;
附图标记:1.外壳,2.弹性体,3.第一光纤光栅,4.第二光纤光栅,5.传感器封装头,6.光纤保护套管,1-1.盲孔,1-2.凸台,1-3.螺纹孔,2-1.质量块,2-2.铰链部分,2-3.底座。Reference numerals: 1. Housing, 2. Elastomer, 3. First fiber grating, 4. Second fiber grating, 5. Sensor packaging head, 6. Fiber protection sleeve, 1-1. Blind hole, 1-2 .Boss, 1-3. Tapped hole, 2-1. Mass, 2-2. Hinged part, 2-3. Base.
具体实施方式Detailed ways
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅用以解释本发明,并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
本发明实施例中,如图1-4所示,提供一种基于光纤光栅的二维振动传感器的封装结构,该封装结构包括外壳1,弹性体2,第一光纤光栅3,第二光纤光栅4传感器封装头5,光纤保护套管6,外壳外形是长方体,中间有一盲孔1-1,底部有一内凹的凸台1-2和一定深度的螺纹孔1-3,凸台1-2部分侧面为矩形。弹性体包括位于上端的质量块2-1,位于中间的铰链部分2-2,位于最下端的底座2-3。其中质量块2-1上半部分为半球,下半部分为圆柱,圆柱直径略大于半球直径。中间铰链部分2-2包括两个正交布置铰链,其转动方向分别为x方向和y方向。底座2-3上圆柱表面均匀分布四个光纤粘贴槽,下圆台部分侧面为矩形,并且对应槽的位置均匀分布四个小通孔。质量块2-1和底座2-3圆柱直径相同,对应均匀分布四个粘贴光纤的槽。传感器封装头5类似于漏斗形,其最上端有螺纹。外壳1、弹性体2和传感器封装头5均采用金属材料。In the embodiment of the present invention, as shown in FIGS. 1-4 , a packaging structure of a two-dimensional vibration sensor based on fiber grating is provided. The packaging structure includes a housing 1 , an
弹性体2上的槽均沿z轴方向,在质量块2-1和底座2-3圆柱部分的表面。底座2-3上的孔对应槽的位置分布且孔径大于槽宽。第一光纤光栅3和第二光纤光栅4在粘贴前,需要用有机溶剂去掉栅区及其附近光纤表面的涂覆层,然后在预应力的作用下,将其粘贴在质量块2-1和底座2-3的槽内,光纤光栅轴向与z轴方向平行,栅区悬空分布在质量块2-1和底座2-3之间。光纤光栅剩余未粘贴部分,一端直接从底座2-3下部分的孔内穿出,一端从质量块2-1的上半球部分绕到光纤光栅的对面,粘贴在相应的槽内,然后也从底座2-3下部分的孔内穿出。第一光纤光栅3的径向与x轴平行,第二光纤光栅4的径向与y轴平行。The grooves on the
弹性体安装在外壳1中,盲孔1-1直径大于弹性体3圆柱的直径,凸台1-2与底座2-3的下圆台配合,两矩形侧面重合,圆台略高于凸台深度。传感器封装头5与外壳1通过螺纹连接,同时将弹性体2压紧,防止弹性体3沿z向发生窜动。光纤保护套管6通过工业胶水粘贴在传感器封装头5的末端。传感器封装头4为中空的壳体,第一光纤光栅3和第二光纤光栅4未粘贴部分从底座2-3下部分的孔穿出后,直接穿入传感器封装头4中,最后从光纤保护套管6穿出。The elastic body is installed in the shell 1, the diameter of the blind hole 1-1 is larger than the diameter of the cylinder of the
具体实施步骤如下:The specific implementation steps are as follows:
S1:用有机溶剂浸泡光纤光栅及其两边的光纤,去掉其涂覆层。S1: Soak the fiber grating and the fibers on both sides with an organic solvent to remove its coating.
S2:对光纤光栅加载,同时将光纤光栅粘贴在弹性体的质量块和底座之间,使光纤光栅处于悬浮状态,然后将剩余光纤的一端从弹性体底座上的孔穿出,另一段从质量块上部的半球绕180°,粘贴在光纤光栅正对面的槽内,再从底座上对应的孔穿出。S2: Load the fiber grating, and stick the fiber grating between the mass block of the elastomer and the base at the same time, so that the fiber grating is in a suspended state. The hemisphere on the upper part of the block is wound around 180°, pasted in the groove on the opposite side of the fiber grating, and then pierced through the corresponding hole on the base.
S3:将弹性体放入外壳内,弹性体底座的下圆台的矩形侧面与外壳内凸台的矩形侧面重合。S3: Put the elastomer into the shell, and the rectangular side of the lower circular table of the elastomer base coincides with the rectangular side of the boss in the shell.
S4:将光纤保护套通过工业胶水连接在传感器封装头的尾端。S4: Connect the optical fiber protective sleeve to the tail end of the sensor package head through industrial glue.
S5:通过螺纹连接,将传感器封装头连接在外壳上,其中传感器封装头在连接时将弹性体压紧,光纤最后穿过传感器封装头,从光纤保护套管伸出。S5: Connect the sensor packaging head to the housing through screw connection, wherein the sensor packaging head presses the elastomer when connecting, and the optical fiber finally passes through the sensor packaging head and protrudes from the optical fiber protective sleeve.
应当理解的是,对本领域普通技术人员来说,可以根据上述说明加以改进或变换,而所有这些改进和变换都应属于本发明所附权利要求的保护范围。It should be understood that, for those skilled in the art, improvements or changes can be made according to the above description, and all these improvements and changes should fall within the protection scope of the appended claims of the present invention.
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003076887A1 (en) * | 2002-03-13 | 2003-09-18 | Light Structures As | Fiber optic sensor package |
CN2578832Y (en) * | 2002-11-14 | 2003-10-08 | 钟少龙 | Temperature self-compensated differential optical fibre acceleration sensor probe |
CN103148894A (en) * | 2013-02-04 | 2013-06-12 | 中国科学院半导体研究所 | Angle stress sensor based on optical fiber Bragg gratings |
CN104483008A (en) * | 2014-12-09 | 2015-04-01 | 西安石油大学 | Fiber grating three-dimensional vibration sensor |
CN106814216A (en) * | 2017-01-24 | 2017-06-09 | 武汉理工大学 | The round flexible hinge optical fibre grating acceleration sensor of Integral direct |
CN108007553A (en) * | 2017-11-29 | 2018-05-08 | 武汉理工大学 | A kind of miniature fiber grating two-dimension vibration sensor |
-
2019
- 2019-05-21 CN CN201910424405.0A patent/CN111982265A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003076887A1 (en) * | 2002-03-13 | 2003-09-18 | Light Structures As | Fiber optic sensor package |
CN2578832Y (en) * | 2002-11-14 | 2003-10-08 | 钟少龙 | Temperature self-compensated differential optical fibre acceleration sensor probe |
CN103148894A (en) * | 2013-02-04 | 2013-06-12 | 中国科学院半导体研究所 | Angle stress sensor based on optical fiber Bragg gratings |
CN104483008A (en) * | 2014-12-09 | 2015-04-01 | 西安石油大学 | Fiber grating three-dimensional vibration sensor |
CN106814216A (en) * | 2017-01-24 | 2017-06-09 | 武汉理工大学 | The round flexible hinge optical fibre grating acceleration sensor of Integral direct |
CN108007553A (en) * | 2017-11-29 | 2018-05-08 | 武汉理工大学 | A kind of miniature fiber grating two-dimension vibration sensor |
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