CN111977613B - Digermane collecting and purifying equipment and safety control method, device and system thereof - Google Patents
Digermane collecting and purifying equipment and safety control method, device and system thereof Download PDFInfo
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- CN111977613B CN111977613B CN202010830182.0A CN202010830182A CN111977613B CN 111977613 B CN111977613 B CN 111977613B CN 202010830182 A CN202010830182 A CN 202010830182A CN 111977613 B CN111977613 B CN 111977613B
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- VXGHASBVNMHGDI-UHFFFAOYSA-N digermane Chemical compound [Ge][Ge] VXGHASBVNMHGDI-UHFFFAOYSA-N 0.000 title claims abstract description 104
- 238000000034 method Methods 0.000 title claims abstract description 40
- 238000012545 processing Methods 0.000 claims abstract description 49
- 238000003860 storage Methods 0.000 claims abstract description 32
- 238000010521 absorption reaction Methods 0.000 claims abstract description 20
- 239000000110 cooling liquid Substances 0.000 claims abstract description 14
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 10
- 239000010959 steel Substances 0.000 claims abstract description 10
- 238000004891 communication Methods 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 150
- 238000001514 detection method Methods 0.000 claims description 75
- 230000007613 environmental effect Effects 0.000 claims description 35
- 238000007789 sealing Methods 0.000 claims description 34
- 230000015654 memory Effects 0.000 claims description 31
- 230000001681 protective effect Effects 0.000 claims description 30
- 239000007788 liquid Substances 0.000 claims description 26
- 238000009833 condensation Methods 0.000 claims description 16
- 238000004364 calculation method Methods 0.000 claims description 15
- 230000005494 condensation Effects 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 12
- 238000000746 purification Methods 0.000 claims description 12
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 229910000078 germane Inorganic materials 0.000 claims description 6
- 238000011897 real-time detection Methods 0.000 claims description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 5
- 230000000007 visual effect Effects 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 239000012295 chemical reaction liquid Substances 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 231100001261 hazardous Toxicity 0.000 claims description 4
- 230000002045 lasting effect Effects 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 235000011089 carbon dioxide Nutrition 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 3
- 230000004907 flux Effects 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 238000005057 refrigeration Methods 0.000 claims description 3
- 230000001012 protector Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000011084 recovery Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 5
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- 230000003044 adaptive effect Effects 0.000 description 3
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- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 101100204059 Caenorhabditis elegans trap-2 gene Proteins 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- VGRFVJMYCCLWPQ-UHFFFAOYSA-N germanium Chemical compound [Ge].[Ge] VGRFVJMYCCLWPQ-UHFFFAOYSA-N 0.000 description 1
- 229940119177 germanium dioxide Drugs 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000012113 quantitative test Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B6/00—Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic compounds ; Compounds containing at least one metal-hydrogen bond, e.g. (GeH3)2S, SiH GeH; Monoborane or diborane; Addition complexes thereof
- C01B6/06—Hydrides of aluminium, gallium, indium, thallium, germanium, tin, lead, arsenic, antimony, bismuth or polonium; Monoborane; Diborane; Addition complexes thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1412—Controlling the absorption process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B6/00—Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic compounds ; Compounds containing at least one metal-hydrogen bond, e.g. (GeH3)2S, SiH GeH; Monoborane or diborane; Addition complexes thereof
- C01B6/34—Purification; Stabilisation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
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- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
- G08B21/18—Status alarms
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- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B7/00—Signalling systems according to more than one of groups G08B3/00 - G08B6/00; Personal calling systems according to more than one of groups G08B3/00 - G08B6/00
- G08B7/06—Signalling systems according to more than one of groups G08B3/00 - G08B6/00; Personal calling systems according to more than one of groups G08B3/00 - G08B6/00 using electric transmission, e.g. involving audible and visible signalling through the use of sound and light sources
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0043—Impurity removed
- C01B2210/0045—Oxygen
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- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0043—Impurity removed
- C01B2210/0046—Nitrogen
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- C01B2210/00—Purification or separation of specific gases
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- C01B2210/0051—Carbon dioxide
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- C01B2210/0053—Hydrogen
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- C01B2210/00—Purification or separation of specific gases
- C01B2210/0043—Impurity removed
- C01B2210/0078—Noble gases
- C01B2210/0079—Helium
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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- Separation Of Gases By Adsorption (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
The invention relates to a digermane collecting and purifying device and a safety control method, a device and a system thereof, wherein the digermane collecting and purifying device comprises: the cooling liquid storage container and the cold trap are arranged in the cooling liquid storage container, and the gas containing the digermane enters the cold trap through a valve and a pipeline; the tail gas absorption tower is communicated with a tail gas outlet of the cold trap; the filling device is communicated with the digermane outlet of the cold trap and fills digermane into the steel cylinder; the early warning device comprises a plurality of sensors and a central processing unit which is in communication connection with the sensors, the sensors acquire safety influence parameters of the digermane collecting and purifying equipment and transmit the safety influence parameters to the central processing unit for processing, and the central processing unit judges whether the safety influence parameters are higher than or lower than corresponding safety threshold values and then sends out warning signals. Through the setting of early warning device, when condensing equipment high temperature, cross low or tail gas recovery reached the volume threshold value, can in time send the early warning to avoid taking place the production accident, improved production security.
Description
Technical Field
The invention relates to the technical field of gas purification, in particular to digermane collecting and purifying equipment and a safety control method, device and system thereof.
Background
Digermane (Ge2H6), colorless liquid. The relative density is 1.98(100 deg.C), the solidifying point is-109 deg.C, the boiling point is 29 deg.C, and the decomposition is at 215 deg.C. Insoluble in water, has reducibility higher than that of germylane, reacts with oxygen at 100 deg.C to obtain germanium dioxide, and is prepared from germylane by discharge. In the germane production process, the gas after a plurality of impurity removal processes also contains a small amount of impurities, and the main components of the gas are hydrogen, germane, carbon dioxide, helium, oxygen, nitrogen and the like.
Therefore, it is an urgent need to solve the problem of the art to provide a digermane collecting and purifying apparatus, a safety control method, a device and a system thereof, which separate the impurity gas from digermane in the mixed gas to conveniently bottle and deliver the pure germane gas to a bottle for use and ensure the safety in the decomposition process.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide digermane collecting and purifying equipment and a safety control method, device and system thereof, which are used for separating impurity gas from digermane in the mixed gas so as to conveniently bottle and deliver pure germane gas for use and ensure the safety in the decomposition process.
In order to achieve the purpose, the technical scheme provided by the invention is as follows:
an digermane collecting and purifying device, comprising:
the condensing device comprises a cooling liquid storage container and a cold trap arranged in the cooling liquid storage container, and the gas containing the digermane enters the cold trap through a valve and a pipeline;
the tail gas absorption tower is communicated with a tail gas outlet of the cold trap;
the filling device is communicated with the digermane outlet of the cold trap and used for filling digermane into the steel cylinder;
the early warning device comprises a plurality of sensors and a central processing unit which is in communication connection with the sensors, the sensors acquire the safety influence parameters of the digermane collecting and purifying equipment and transmit the safety influence parameters to the central processing unit for processing, and the central processing unit judges whether the safety influence parameters are higher than or lower than corresponding threshold values and then sends out warning signals.
Furthermore, the number of the cold traps is multiple, each cold trap is arranged in parallel, and the gas containing the digermane enters each cold trap through a valve and a pipeline;
and a pressure gauge is arranged on the filling pipeline between the filling device and the steel cylinder.
The cooling liquid in the cooling liquid storage container is liquid argon, liquid nitrogen or a mixture of dry ice and citric acid.
The early warning device also comprises an audible and visual alarm which is arranged outside the condensing device;
the security impact parameters include, but are not limited to: the central processor judges that the temperature is higher than a high-temperature threshold value, lower than a low-temperature threshold value or the gas volume exceeds a volume threshold value, and then an alarm signal is sent out.
Further, the coupling department that purification equipment carried hazardous gas is collected to digermane all sets up protector, the coupling includes: the pipe joint comprises a first pipe body, a second pipe body positioned at the right end of the first pipe body, and a pipe joint body for connecting the first pipe body and the second pipe body;
the guard device includes:
the middle part of the protective shell is provided with a horizontal through hole, the outer wall of the first pipe body is fixedly connected in the horizontal through hole, and the right end of the protective shell is provided with an opening;
the second shell is matched with the protective shell in shape, the left end and the right end of the second shell are both opened, and the outer side of the second shell is connected to the inner side of the protective shell in a sealing and sliding manner;
at least one group of protection components are arranged on two opposite sides in the protection shell;
the guard assembly includes: one end of the first fixing block is fixedly connected with the outer side of the first pipe body, and the other end of the first fixing block is fixedly connected with the inner side of the protective shell; the threaded rod is parallel to the first pipe body and is rotationally connected with the left side wall of the protective shell and the first fixing block; the driving piece is arranged in the protective shell or outside the protective shell and used for driving the threaded rod to rotate; the inner side of the sliding block is provided with a horizontal thread through hole, the horizontal thread through hole is in threaded connection with the outer wall of the threaded rod, and the sliding block is positioned on the right side of the first fixed block; the two fixing rods are parallel to the first pipe body, and one ends of the fixing rods are fixedly connected with the right side of the sliding block through elastic pieces; the left end of the fixed plate is fixedly connected with the other ends of the two fixed rods, and the upper end of the fixed plate is fixedly connected with the inner lower end of the second shell; the first sealing gasket is fixedly connected to the right side of the fixing plate; the second sealing gasket is fixedly connected to one side, close to the second pipe body, of the lower end of the second shell;
the second fixing block is fixedly connected to the second pipe body, the second sealing gasket is used for sealing one side, far away from the second pipe body, of the second fixing block, and the first sealing gasket is used for sealing the left side of the second fixing block;
the pressure sensor is arranged on the elastic piece;
the gas sensor is arranged on the first fixing block;
the driving motor is fixedly connected to the right side of the first fixing block or the left side of the second fixing block, the driving motor is parallel to the first pipe body, and the output end of the right side of the driving motor is fixedly connected with a first gear;
the second gear is positioned in the protective shell and is rotationally connected to the first pipe body through a bearing, and the second gear is in meshing transmission with the first gear;
the liquid storage ring is fixedly connected to the second gear, sleeved on the outer side of the first pipe body and used for storing absorption reaction liquid, a liquid outlet pipe of the liquid storage ring is provided with a spray head, and the liquid outlet pipe is also provided with an electromagnetic valve;
and the microcontroller is electrically connected with the electromagnetic valve, the driving motor, the pressure sensor and the gas sensor.
Further, the condensing unit further includes:
the first temperature sensor is arranged at the cold trap air inlet;
the second temperature sensor is arranged in a condensate flow channel of the cold trap;
the first detection device is arranged at the cold trap air inlet and is used for detecting the air flow rate and the air pressure of the cold trap air inlet;
the third detection device is arranged in a condensate flow channel of the cold trap and used for detecting the flow rate and the hydraulic pressure of condensate at the position of the third detection device;
the second detection device is arranged at the tail gas outlet of the cold trap and is used for detecting the gas flow rate and the gas pressure at the tail gas outlet of the cold trap;
the controller, with the alarm first temperature sensor, second temperature sensor, first detection device, second detection device, third detection device electricity are connected, the controller is based on first temperature sensor, second temperature sensor, first detection device, second detection device, third detection device control valve and alarm work includes following step:
step 1: the controller calculates a comprehensive condensation coefficient k based on real-time detection values of the first temperature sensor, the second temperature sensor and the second detection device and a formula (1);
wherein, T0Is a preset target temperature, T, after digermane condensation1For the real-time detection of the second temperature sensor, T3Detecting the real-time value of the first temperature sensor; e is a natural constant and takes the value of 2.71828; s is an error coefficient, the value range is 0.2-1, L is the total length of the condensate flow channel, v0Mu being a flow rate sensor detection value1The comprehensive value of the heat absorption coefficient of the condensate, the heat exchange coefficient of the condensate flow channel material and the heat exchange of the material of the channel containing the digermane gas in the cold trap is obtained, the condensate is output by the refrigerator, A is the safe refrigeration period of the refrigerator, mu2The heat exchange coefficient of the refrigerator is f is the average resistance coefficient of a channel of the digermane gas, and q is the impurity-containing coefficient in the digermane-containing gas, and the value is 0-1;
step 2: the controller calculates a target flow rate based on the step 1, the first detection device and the third detection device;
wherein α is the heat flux density of the digermane-containing gas; the condensate passage comprises N inflection points, wjIs the resistance coefficient corresponding to the jth inflection point of the condensate flow passage, sin is sine, thetajThe included angle between the tangent line corresponding to the jth inflection point of the condensate flow channel and the horizontal direction is P1Hydraulic pressure value, P, detected for the third detecting means2The air pressure detected by the first detection device;
and step 3: the controller controls the valve to work, so that the gas flow rate value detected by the first detection device is the target flow rate, and after the valve works for a first preset time, whether the gas flow rate and the gas pressure detected by the second detection device are larger than corresponding preset thresholds or not is compared, and when the gas flow rate and/or the gas pressure detected by the second detection device are larger than or equal to the corresponding preset thresholds, the controller controls the alarm to give an alarm and controls the valve to work to reduce the gas flow rate of the cold trap gas inlet; when the gas flow rate and the gas pressure detected by the second detection device are smaller than the corresponding preset threshold values, the controller controls the valve to work, so that the duration of the gas flow rate value detected by the first detection device lasting for a first preset time is the target flow rate.
The invention also provides a safety control method based on the digermane collecting and purifying equipment, which comprises the following steps:
acquiring safety influence parameters in the process of purifying the digermane;
if the safety influence parameter is judged to exceed a safety threshold value, an early warning instruction is sent out;
and sending out an early warning signal according to the early warning instruction.
Further, obtain the safety influence parameter in the digermane purification process, judge that the safety influence parameter surpasss the safety threshold value, then send out the early warning instruction, specifically include:
acquiring the current temperature of the cold trap and the volume of the digermane filled in the filling device;
and judging that the current temperature in the cold trap is higher than a high-temperature threshold, the current temperature is lower than a low-temperature threshold or the volume of digermane exceeds a threshold, and sending an early warning instruction.
The invention also provides a safety control device for implementing the method as described above, the device comprising:
the parameter acquisition unit is used for acquiring safety influence parameters in the process of purifying the digermane;
the safety judgment unit is used for judging that the safety influence parameters exceed a safety threshold value and sending out an early warning instruction;
and the early warning output unit is used for sending out an early warning signal according to the early warning instruction.
Further, still include safe reaction unit, safe reaction unit includes:
the first determining module is connected with the parameter acquiring unit and used for determining each current first grade corresponding to each current safety influence parameter acquired by the parameter acquiring unit according to a preset first grading rule, wherein each safety influence parameter corresponds to the first grading rule;
the calculation module is connected with the first determination module and used for calculating the current superposition value after each current first-level superposition according to a preset level superposition calculation rule;
the second determination module is connected with the calculation module and used for determining the current superposition grade corresponding to the current superposition value according to a preset superposition value grading rule;
the environment information acquisition device is used for acquiring the information of the current environment where the digermane collecting and purifying equipment is located;
the third determining module is connected with the environmental information acquiring device and used for determining the current environmental risk level corresponding to the information of the current environment according to a preset environmental risk grading rule;
a second memory storing a plurality of different safety processing rules or safety control models, the parameters of which include: a reference first level, a reference superposition level and a reference environmental risk level corresponding to each safety influence parameter;
the third determining module is connected with the first determining module, the calculating module, the second memory and the third determining module, and is used for comparing the current superposition grade, each current first grade determined by the first determining module, the current environmental risk grade corresponding to the current environmental information with a reference first grade, a reference superposition grade and a reference environmental risk grade corresponding to different safety processing rules or safety control models to obtain a target safety processing rule with the highest difference value accumulated value of each first grade and the environmental risk reference grade determined by the current superposition grade and the first determining module;
and the control unit is connected with the first determining module, the calculating module, the second determining module, the second memory and the third determining module, and is also connected with a control terminal and used for sending the target safety processing rule to the control terminal.
The present invention also provides a safety control system, the system comprising: a processor and a first memory;
the first memory is to store one or more program instructions;
the processor is configured to execute one or more program instructions to perform the method as described above.
The present invention also provides a computer storage medium having one or more program instructions embodied therein for execution by a security control system for performing a method as described above.
The technical scheme provided by the invention has the following beneficial effects: the invention creatively provides a device for collecting and purifying digermane, which is characterized in that when digermane is recovered and purified, firstly, mixed gas containing digermane gas is introduced into a condensing device, and digermane is condensed in the condensing device; then, other uncondensed gases are sucked into the tail gas absorption tower through a vacuum pump by using the tail gas absorption tower to be recovered; connect the steel bottle and cool off the steel bottle, adjust condensing equipment's temperature to heat up condensing equipment, gasify germane with condensing in it, and pour into the steel bottle. Meanwhile, in the recycling and purifying process, through the arrangement of the early warning device, when the temperature of the condensing device is too high, too low or the tail gas is recycled to reach the volume threshold value, early warning can be timely sent out so as to avoid production accidents and improve the production safety.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic structural diagram of an embodiment of an digermane collecting and purifying apparatus provided in the present invention;
fig. 2 is a flowchart of a safety control method according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of an embodiment of the protection device of the present invention.
In the figure: 1. a coolant storage container; 2. cold trap; 3. a tail gas absorption tower; 4. a filling device; 5. a sensor; 6. a guard; 61. a protective shell; 62. a second housing; 63. a guard assembly; 631. a first fixed block; 632. a threaded rod; 633. a slider; 634. fixing the rod; 635. an elastic member; 636. a fixing plate; 637. a first gasket; 64. a first pipe body; 65. a second tube body; 66. a second fixed block; 67. a drive motor; 68. a second gear; 69. a liquid storage ring; 610. a first gear.
Detailed Description
The technical solution of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. The following examples are only for illustrating the technical solutions of the present invention more clearly, and therefore are only examples, and the protection scope of the present invention is not limited thereby. The experimental procedures in the following examples are conventional unless otherwise specified. The test materials used in the following examples were purchased from a conventional reagent store unless otherwise specified. In the quantitative tests in the following examples, three replicates were set, and the data are the mean or the mean ± standard deviation of the three replicates.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an embodiment of an digermane collecting and purifying apparatus provided in the present invention. Wherein only one alternative placement location for the air pressure sensor is shown in fig. 1;
in a specific embodiment, the digermane collecting and purifying apparatus provided by the present invention comprises: the condensing device comprises a cooling liquid storage container 1 and a cold trap 2 arranged in the cooling liquid storage container, wherein gas containing digermane enters the cold trap through a valve and a pipeline; the tail gas absorption tower 3 is communicated with a tail gas outlet of the cold trap; the filling device 4 is communicated with the digermane outlet of the cold trap and used for filling digermane into the steel cylinder; the early warning device comprises a plurality of sensors 5 and a central processing unit which is in communication connection with the sensors, the sensors acquire the safety influence parameters of the digermane collecting and purifying equipment and transmit the safety influence parameters to the central processing unit for processing, and the central processing unit judges whether the safety influence parameters are higher than or lower than the corresponding safety threshold value and then sends out an alarm signal.
The security impact parameters include, but are not limited to: the central processor judges that the temperature is higher than a high-temperature threshold value, lower than a low-temperature threshold value or the gas volume exceeds a volume threshold value, and then an alarm signal is sent out.
Furthermore, the early warning device can also comprise gas detectors arranged at all valves besides monitoring the cold and static temperature and the gas volume of the filling device, and the gas detectors are used for sensing whether digermane gas leaks from the valves, so that the leakage of toxic gas is avoided, and the safety is ensured.
The central processing unit can be arranged on a purification site, also can be provided with a cloud processor, and is connected with the intelligent terminal through a remote transmission protocol, the data detected by the sensor is uploaded to the cloud processor in real time, and after being judged by the cloud processor, the alarm signal is transmitted to the intelligent terminal, so that remote alarm is realized. The intelligent terminal can be a computer or a mobile phone, and the alarm signal can be character information push, acousto-optic alarm information push and the like. Besides cloud alarm, the early warning device further comprises an audible and visual alarm, and the audible and visual alarm is installed outside the condensing device so as to give an alarm on site.
Specifically, the number of the cold traps is multiple, each cold trap is arranged in parallel, and the gas containing the digermane enters each cold trap through a valve and a pipeline; therefore, the mixed gas can be rapidly and multichannel cooled and separated by arranging the plurality of cold traps, so that the treatment efficiency is improved.
In order to avoid explosion caused by overlarge pressure and ensure enough filling pressure, a pressure gauge is arranged on a filling pipeline between the filling device and the steel cylinder.
The cooling liquid in the cooling liquid storage container can be liquid argon, liquid nitrogen or a mixture of dry ice and citric acid.
In one embodiment, as shown in fig. 3, the joints of the digermane collecting and purifying equipment for transporting hazardous gases (such as the digermane-containing gas, and/or the tail gas) are each provided with a protection device 6, and the joints include: a first pipe 64, a second pipe 65 positioned at the right end of the first pipe 64, and a pipe joint body connecting the first pipe 64 and the second pipe 65; the specific structure of the pipe joint body/pipe joint is the prior art, and is not described herein again;
the guard 6 comprises:
the protection device comprises a protection shell 61, wherein a horizontal through hole is formed in the middle of the protection shell 61, the outer wall of the first pipe body 64 is fixedly connected into the horizontal through hole, and the right end of the protection shell 64 is opened;
the second shell 62 is matched with the protective shell 61 in shape, the left end and the right end of the second shell 62 are both opened, and the outer side of the second shell 62 is connected to the inner side of the protective shell in a sealing and sliding manner; preferably, the protective shell may be the same shape as the first pipe;
at least one group of protection components 63 are arranged on two opposite sides (such as the upper side and the lower side and/or the front side and the rear side) in the protection shell 61;
the guard assembly 63 includes: a first fixing block 631 having one end fixedly connected to the outer side of the first pipe 64 and the other end fixedly connected to the inner side of the protective shell 61; the threaded rod 632 is parallel to the first pipe 64, and the threaded rod 632 is rotatably connected with the left side wall of the protective shell 61 and the first fixing block 631; a driving member disposed inside the protective shell 61 or outside the protective shell 61 and configured to drive the threaded rod 632 to rotate (preferably, the driving member may be a driving handle outside the protective shell, or a driving motor inside and outside the protective shell, and when the driving motor is a driving motor, the driving motor is electrically connected to the controller); a horizontal threaded through hole is formed in the inner side of the sliding block 633, the horizontal threaded through hole is in threaded connection with the outer wall of the threaded rod 632, and the sliding block 633 is located on the right side of the first fixed block 631; two fixing rods 634 parallel to the first tube 64, wherein one end of the fixing rod 634 is fixedly connected to the right side of the sliding block 633 through an elastic member 635; a fixing plate 636, the left end of the fixing plate 636 is fixedly connected with the other ends of the two fixing rods 634, and the upper end of the fixing plate 636 is also fixedly connected with the inner lower end of the second housing 62; a first sealing pad 637 fixedly connected to the right side of the fixing plate 636; the second sealing gasket is fixedly connected to one side of the lower end of the second shell 62 close to the second pipe 65;
the second fixing block 66 is fixedly connected to the second pipe 65, the second sealing gasket is used for sealing one side of the second fixing block 66 far away from the second pipe, and the first sealing gasket 637 is used for sealing the left side of the second fixing block 66;
a pressure sensor 5 disposed on the elastic member 635 (preferably, the pressure sensor is disposed between the elastic member and the slider, and may be disposed on the slider, or a mounting layer is disposed on one side of the elastic member, and the mounting layer is disposed on the pressure sensor);
a gas sensor 5 disposed on the first fixing block 631;
the driving motor 67 is fixedly connected to the right side of the first fixing block 631 or the left side of the second fixing block 66, the driving motor 67 is parallel to the first pipe 64, and the output end of the right side of the driving motor 67 is fixedly connected with the first gear 610;
a second gear 68 located inside the protective shell 61, wherein the second gear 68 is rotatably connected (sleeved) to the first tube 64 through a bearing, and the second gear 68 is in meshing transmission with the first gear;
the liquid storage ring 69 is fixedly connected to the second gear 68, the liquid storage ring 69 is sleeved outside the first pipe body 64, the liquid storage ring 69 is used for storing absorption reaction liquid (and liquid which is subjected to absorption reaction with the hazardous gas), a liquid outlet pipe of the liquid storage ring 69 is provided with a spray head, and the liquid outlet pipe is also provided with an electromagnetic valve;
and the microcontroller is electrically connected with the electromagnetic valve, the driving motor 67, the pressure sensor 5 and the gas sensor 5.
The working principle and the beneficial effects of the technical scheme are as follows:
when the pipe joint and/or the second pipe 65 needs to be disassembled, the driving part rotates in the forward direction to drive the threaded rod 632 to rotate, when the threaded rod 632 rotates, the sliding block 633 on the threaded rod 632 moves leftwards to drive the second shell 62 to slide leftwards on the inner side of the protective shell 61, so that the first sealing pad 637, the second sealing pad and the second fixing block 66 are separated from each other, and at this time, the pipe joint and/or the second pipe 65 can be disassembled;
after the pipe joint, the first pipe body 64 and the second pipe body 65 are installed, the driving piece reversely rotates to drive the threaded rod 632 to rotate, when the threaded rod 632 rotates, the sliding block 633 on the threaded rod 632 moves rightwards to drive the second casing 62 to slide rightwards on the inner side of the protective casing 61, so that the first sealing pad 637 and the second sealing pad are close to the second fixing block 66, the first sealing pad 637 seals the left side of the second fixing block 66, and the second sealing pad seals one side (outer side) of the second fixing block 66 away from the second pipe body 65 and the left side (inner side) of the second casing 62, so that a sealing accommodating space is formed among the second fixing block 66, the second casing 62 and the protective casing 61; one end of the fixing rod 634 is fixedly connected with the right side of the sliding block 633 through the elastic member 635, so that the first sealing pad 637 can reliably seal the left side of the second fixing block 66 by the acting force exerted on the first sealing pad 637 by the sliding block 633, and the acting force of the elastic member 635 is detected by the pressure sensor 5, thereby avoiding that the first sealing pad 637 is not tightly sealed due to too small acting force of the elastic member 635 on the first sealing pad 637, or the first sealing pad 637 is easily damaged due to too large acting force, and ensuring that the first sealing pad 637 is reliably sealed;
in the working process of the digermane collecting and purifying equipment, a gas sensor 5 detects the gas concentration in the sealed accommodating space in real time, when the concentration value of toxic and harmful gas in the sealed accommodating space exceeds a corresponding threshold value, the controller controls the electromagnetic valve to be opened and controls the driving motor 67 to rotate, the nozzle ring sprays the first pipe body 64 or the second pipe body 65 to the pipe joint circumferentially, the toxic and harmful gas is treated in time by spraying absorption reaction liquid, the safety risk caused by leakage is avoided, and meanwhile, the controller controls an alarm connected with the controller to alarm to remind leakage; and the circumferential rotation sprays to pass the spraying efficiency; according to the technical scheme, through the safety protection, the reliable monitoring of the leakage at the joint of the pipe can be ensured, and the safety of the invention is improved.
Further, the present invention also provides a safety control method, based on the digermane collecting and purifying apparatus, as shown in fig. 2, the method includes the following steps:
s1: acquiring safety influence parameters in the process of purifying the digermane, wherein the safety influence parameters can be temperature, whether gas leaks or not, fire hazard and the like;
s2: if the safety influence parameter is judged to exceed a safety threshold value, an early warning instruction is sent out; for example, in the working process, when the current temperature is acquired to be too high, factors influencing the reaction progress may occur, and at this time, an alarm or a power-off instruction may be issued to directly cut off the relevant equipment and stop the power supply of the purification equipment, so as to avoid the occurrence of an invalid reaction. Further, when the temperature is further increased, for example, the instantaneous temperature of a certain detection point reaches more than 800 ℃, a possible fire is prompted, at the moment, the equipment can synchronously trigger a fire alarm when sending an alarm instruction and cutting off the power supply of the equipment, and a fire alarm call is automatically dialed to strive for the fire extinguishing speed and reduce the loss. And, this purification equipment also can include spray assembly, and spray assembly passes through the ooff valve and water source intercommunication, when triggering the fire alarm early warning, can realize the spraying of very first time and put out a fire through opening the ooff valve.
S3: sending out an early warning signal according to the early warning instruction; specifically, the early warning signal may be an audible and visual warning signal or a push of warning information.
Further, obtain the safety influence parameter in the digermane purification process, judge that the safety influence parameter surpasss the safety threshold value, then send out the early warning instruction, specifically include:
acquiring the current temperature of the cold trap and the volume of the digermane filled in the filling device;
and judging that the current temperature in the cold trap is higher than a high-temperature threshold, the current temperature is lower than a low-temperature threshold or the volume of digermane exceeds a threshold, and sending an early warning instruction.
The method further comprises the following steps:
and acquiring digermane gas at each valve position, and sending an early warning instruction if the digermane gas concentration at the valve position is judged to exceed a preset value. Whether digermane gas leaks from the valve is sensed, so that toxic gas leakage is avoided, and safety is guaranteed.
In the above specific embodiment, in the recovery and purification process, the safety control method provided by the invention can send out early warning in time by setting the early warning device when the temperature of the condensing device is too high or too low or the tail gas recovery reaches the volume threshold, or when the digermane gas leaks, so as to avoid production accidents and improve the production safety.
The invention also provides a safety control device for implementing the method as described above, which, in one embodiment, comprises:
the parameter acquisition unit is used for acquiring safety influence parameters in the process of purifying the digermane;
the safety judgment unit is used for judging that the safety influence parameters exceed a safety threshold value and sending out an early warning instruction;
and the early warning output unit is used for sending out an early warning signal according to the early warning instruction.
Specifically, the parameter obtaining unit is used for obtaining the current temperature of the cold trap, the volume of digermane filled in the filling device, and digermane gas at each valve position;
and judging that the current temperature in the cold trap is higher than a high-temperature threshold, the current temperature is lower than a low-temperature threshold or the digermane volume exceeds a threshold, or judging that the digermane gas concentration at the position of the valve exceeds a preset value, and sending an early warning instruction.
In one embodiment, the safety control device further comprises a safety reaction device, the safety reaction device comprising:
the first determining module is connected with the parameter acquiring unit and used for determining each current first grade corresponding to each current safety influence parameter acquired by the parameter acquiring unit according to a preset first grading rule, wherein each safety influence parameter corresponds to the first grading rule;
the calculation module is connected with the first determination module and used for calculating the current superposition value after each current first-level superposition according to a preset level superposition calculation rule;
the second determination module is connected with the calculation module and used for determining the current superposition grade corresponding to the current superposition value according to a preset superposition value grading rule;
the environment information acquisition device is used for acquiring the information of the current environment where the digermane collecting and purifying equipment is located;
the third determining module is connected with the environmental information acquiring device and used for determining the current environmental risk level corresponding to the information of the current environment according to a preset environmental risk grading rule;
a second memory storing a plurality of different safety processing rules or safety control models, the parameters of which include: a reference first level, a reference superposition level and a reference environmental risk level corresponding to each safety influence parameter;
the third determining module is connected with the first determining module, the calculating module, the second memory and the third determining module, and is used for comparing the current superposition grade, each current first grade determined by the first determining module, the current environmental risk grade corresponding to the current environmental information with a reference first grade, a reference superposition grade and a reference environmental risk grade corresponding to different safety processing rules or safety control models to obtain a target safety processing rule with the highest difference value accumulated value of each first grade and the environmental risk reference grade determined by the current superposition grade and the first determining module; the accumulated difference value is obtained by adding the accumulated difference value, such as the current superposition grade, each current first grade determined by the first determination module and the current environmental danger grade corresponding to the current environmental information, comparing the benchmark first grade, the benchmark superposition grade and the benchmark environmental danger grade corresponding to the first safety processing rule or the safety control model, by calculating the difference between the current superposition level and the reference superposition level corresponding to the first safety processing rule or the safety control model, the difference between the current environmental risk level and the reference environmental risk level corresponding to the first safety processing rule or the safety control model, and the difference between each current first level and each first level corresponding to the first safety processing rule or the safety control model, then accumulating the three difference values corresponding to the first safety processing rule or the safety control model to obtain a difference value accumulated value corresponding to the first safety processing rule or the safety control model;
and the control unit is connected with the first determining module, the calculating module, the second determining module, the second memory and the third determining module, and is also connected with a control terminal and used for sending the target safety processing rule to the control terminal.
The working principle and the beneficial effects of the technical scheme are as follows:
according to the technical scheme, firstly, a first determining module is used for confirming each current first grade corresponding to each current (real-time) safety influence parameter acquired by a parameter acquiring unit; then calculating the current superposition value of each current first-level superposition through a calculation module according to a preset level superposition calculation rule; then, determining a current superposition grade corresponding to the current superposition value according to a preset superposition value grading rule through a second determination module;
meanwhile, an environment information acquisition device acquires the information of the current environment where the digermane collecting and purifying equipment is located; determining a current environmental risk level corresponding to the information of the current environment according to a predetermined environmental risk classification rule through a third determination module;
in addition, the second memory stores a plurality of different safety processing rules or safety control models, and the parameters of the safety processing rules or safety control models include: a reference first level, a reference superposition level and a reference environmental risk level corresponding to each safety influence parameter;
finally, comparing the current superposition grade, each current first grade determined by the first determination module, the current environment danger grade corresponding to the current environment information with a reference first grade, a reference superposition grade and a reference environment danger grade corresponding to different safety processing rules or safety control models through a third determination module, obtaining a target safety processing rule with the highest difference accumulated value of the current superposition grade, each first grade determined by the first determination module and the environment danger reference grade, and sending the target safety processing rule to the control terminal through a control unit;
(1) according to the technical scheme, different safety processing rules/measures are adopted according to different parameter ranges by grading each safety influence parameter; (2) meanwhile, current grades corresponding to all safety parameters are superposed to comprehensively consider factors of the comprehensive and interaction of all safety influence parameters, and grading is carried out to realize that different safety processing rules/measures are adopted for different superposed grades after comprehensive consideration; (3) in addition, environmental influence factors are also considered, the environmental risk level is determined, and different safety processing rules/measures are adopted aiming at different environmental risk levels; meanwhile, the above are all converted into grades and converted into the same dimension, so that calculation, accumulation and subsequent comparison are facilitated; meanwhile, a plurality of different safety processing rules or safety control models are stored in a second memory, and each full processing rule or safety control model corresponds to different safety processing rules/measures; the parameters of the safety processing rule or the safety control model comprise reference levels corresponding to the actual safety influence parameter levels, the superposition levels of the safety influence parameters and the environment levels, so that the appropriate safety processing rule/measure is determined by comprehensively considering the factors (1) to (3) and is sent to the control terminal, managers can take relevant measures in time conveniently, and the safety of the invention is improved.
In one embodiment, the condensing means further comprises:
the first temperature sensor is arranged at the cold trap air inlet;
the second temperature sensor is arranged in a condensate flow channel of the cold trap;
the first detection device is arranged at the cold trap air inlet and is used for detecting the air flow rate and the air pressure of the cold trap air inlet;
the third detection device is arranged in a condensate flow channel of the cold trap and used for detecting the flow rate and the hydraulic pressure of condensate at the position of the third detection device;
the second detection device is arranged at the tail gas outlet of the cold trap and is used for detecting the gas flow rate and the gas pressure at the tail gas outlet of the cold trap;
the controller, with the alarm first temperature sensor, second temperature sensor, first detection device, second detection device, third detection device electricity are connected, the controller is based on first temperature sensor, second temperature sensor, first detection device, second detection device, third detection device control valve and alarm work includes following step:
step 1: the controller calculates a comprehensive condensation coefficient k based on real-time detection values of the first temperature sensor, the second temperature sensor and the second detection device and a formula (1);
wherein, T0Is a preset target temperature, T, after digermane condensation1Is a second temperature sensorReal-time detection of value, T3Detecting the real-time value of the first temperature sensor; e is a natural constant and takes the value of 2.71828; s is an error coefficient, the value range is 0.2-1, L is the total length of the condensate flow channel, v0Mu being a flow rate sensor detection value1The heat absorption coefficient of the condensate, the heat exchange coefficient of a condensate flow channel material and the comprehensive value of the heat exchange of a material of a channel containing digermane gas in the cold trap (preferably, the three can be multiplied or superposed according to a preset rule), the condensate is output by the refrigerating machine, A is the safe refrigerating period of the refrigerating machine, mu2The heat exchange coefficient of the refrigerator is f is the average resistance coefficient of a channel of the digermane gas, and q is the impurity-containing coefficient in the digermane-containing gas, and the value is 0-1;
step 2: the controller calculates a target flow rate based on the step 1, the first detection device and the third detection device;
wherein α is the heat flux density of the digermane-containing gas; the condensate passage comprises N inflection points, wjIs the resistance coefficient corresponding to the jth inflection point of the condensate flow passage, sin is sine, thetajThe included angle between the tangent line corresponding to the jth inflection point of the condensate flow channel and the horizontal direction is P1Hydraulic pressure value, P, detected for the third detecting means2The air pressure detected by the first detection device;
and step 3: the controller controls the valve to work, so that the gas flow rate value detected by the first detection device is the target flow rate, and after the valve works for a first preset time, whether the gas flow rate and the gas pressure detected by the second detection device are larger than corresponding preset thresholds or not is compared, and when the gas flow rate and/or the gas pressure detected by the second detection device are larger than or equal to the corresponding preset thresholds, the controller controls the alarm to give an alarm and controls the valve to work to reduce the gas flow rate of the cold trap gas inlet; when the gas flow rate and the gas pressure detected by the second detection device are smaller than the corresponding preset threshold values, the controller controls the valve to work, so that the duration of the gas flow rate value detected by the first detection device lasting for a first preset time is the target flow rate.
The working principle and the beneficial effects of the technical scheme are as follows: the gas flow rate and the gas pressure of a tail gas outlet of the cold trap are detected by a second detection device, and the gas flow rate and the gas pressure of the tail gas outlet of the cold trap are detected by the controller based on the first temperature sensor, the second temperature sensor, the first detection device, the second detection device and the third detection device to control the work of the valve and the alarm;
firstly: the controller calculates a comprehensive condensation coefficient based on real-time detection values of a first temperature sensor, a second temperature sensor and a second detection device and a formula (1), wherein the formula (1) considers comparison factors of the temperature of the digermane gas sucked into the air inlet of the cold trap, the temperature of condensate in a condensate runner of the cold trap and a preset target temperature after digermane condensation, the total length of the condensate runner and the flow rate of the condensate, the heat absorption coefficient of the condensate, the heat exchange coefficient of the condensate runner material and the comprehensive value of the heat exchange of the material of the channel containing the digermane gas in the cold trap; the safe refrigeration period of the refrigerator, the heat exchange coefficient of the refrigerator, the average resistance coefficient of a passage of the digermane gas, the impurity-containing coefficient of the digermane-containing gas, and the like influence of multiple parameters on the condensation effect of the condensation device to obtain the comprehensive condensation coefficient, so that the calculation result is more reliable; the factors of the safety period and the heat exchange coefficient of the refrigerator are considered, so that the comprehensive heat exchange coefficient of the condenser is safely adapted to the refrigerator, and the whole device is safer; the influence of the channels containing the digermane gas on gas resistance and the influence of the digermane gas impurity-containing rate multi-condensation effect are considered, so that the calculation is more adaptive to the specific channels containing the digermane gas, and the condensation efficiency/effect is ensured;
then, the controller calculates a target flow rate based on the step 1, the first detection device and the third detection device; the heat flow density of the gas containing the digermane and flow rate loss factors (the condensate channel comprises N inflection points and resistance coefficients corresponding to j inflection points are accumulated to obtain an average resistance coefficient, and a tangent line corresponding to each inflection point and a horizontal included angle influence the flow rate of the fluid) are comprehensively considered in the formula (2), and the flow rate is corrected by comparison factors of the heat exchange liquid for heat exchange and the pressure of the gas containing the digermane, so that the calculation result is more reliable, and the target flow rate (namely the optimal flow rate adaptive to the multiple factors) is finally obtained;
finally, the controller controls the valve to work so that the gas flow rate value detected by the first detection device is the target flow rate, and after working for a first preset time, comparing whether the gas flow rate and the gas pressure detected by the second detection device are greater than corresponding preset thresholds or not, when the gas flow rate and/or the gas pressure detected by the second detection device is greater than or equal to the corresponding preset threshold tower, the controller controls the alarm to give an alarm and controls the valve to work to reduce the gas flow rate of the cold trap gas inlet, the flow velocity of the introduced digermane gas is adaptive to the condensation effect of the condensation device and the absorption effect of the tail gas absorption tower, so that the safety risk possibly caused by the fact that the digermane gas amount condensed by the condensation device is too small, a large amount of digermane gas pressure is discharged to the tail gas absorption tower and exceeds the processing capacity range of the tail gas absorption tower is avoided; when the gas flow rate and the gas pressure detected by the second detection device are smaller than the corresponding preset threshold values, the controller controls the valve to work, so that the duration of the gas flow rate value detected by the first detection device lasting for a first preset time is the target flow rate. The first preset time length is set to realize periodic detection and timely alarm in case of abnormity, so that the invention is safer.
In the above specific embodiment, in the recovery and purification process, the safety control method provided by the invention can send out early warning in time by setting the early warning device when the temperature of the condensing device is too high or too low or the tail gas recovery reaches the volume threshold, or when the digermane gas leaks, so as to avoid production accidents and improve the production safety.
According to a third aspect of the embodiments of the present invention, there is also provided a safety control system, including: a processor and a first memory;
the first memory is to store one or more program instructions;
the processor is configured to execute one or more program instructions to perform the method as described above.
In correspondence with the above embodiments, embodiments of the present invention also provide a computer storage medium containing one or more program instructions therein. Wherein the one or more program instructions are for execution by a safety control system to perform a method as described above.
It is to be noted that, unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which the invention pertains. Unless specifically stated otherwise, the relative steps, numerical expressions, and values of the components and steps set forth in these embodiments do not limit the scope of the present invention. In all examples shown and described herein, unless otherwise specified, any particular value should be construed as merely illustrative, and not restrictive, and thus other examples of example embodiments may have different values.
In the description of the present invention, it is to be understood that the terms "first", "second" and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In an embodiment of the invention, the processor may be an integrated circuit chip having signal processing capability. The Processor may be a general purpose Processor, a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field Programmable Gate Array (FPGA) or other programmable logic device, discrete Gate or transistor logic device, discrete hardware component.
The various methods, steps and logic blocks disclosed in the embodiments of the present invention may be implemented or performed. A general purpose processor may be a microprocessor or the processor may be any conventional processor or the like. The steps of the method disclosed in connection with the embodiments of the present invention may be directly implemented by a hardware decoding processor, or implemented by a combination of hardware and software modules in the decoding processor. The software module may be located in a random first memory, a flash memory, a read-only first memory, a programmable read-only first memory, or an electrically erasable programmable first memory, a register, etc. storage media that are well known in the art. The processor reads the information in the storage medium and completes the steps of the method in combination with the hardware.
The storage medium may be the first memory, which may be, for example, a volatile first memory or a non-volatile first memory, or may include both volatile and non-volatile first memories.
The nonvolatile first Memory may be a Read-Only Memory (ROM), a Programmable ROM (PROM), an Erasable PROM (EPROM), an Electrically Erasable PROM (EEPROM), or a flash Memory.
The volatile first Memory may be a Random Access Memory (RAM) which serves as an external cache. By way of example and not limitation, many forms of RAM are available, such as Static Random Access Memory (SRAM), Dynamic RAM (DRAM), Synchronous DRAM (SDRAM), Double Data Rate SDRAM (DDRSDRAM), Enhanced SDRAM (ESDRAM), SLDRAM (SLDRAM), and Direct Rambus RAM (DRRAM).
The storage media described in connection with the embodiments of the invention are intended to comprise, without being limited to, these and any other suitable types of memory.
Those skilled in the art will appreciate that the functionality described in the present invention may be implemented in a combination of hardware and software in one or more of the examples described above. When software is applied, the corresponding functionality may be stored on or transmitted over as one or more instructions or code on a computer-readable medium. Computer-readable media includes both computer storage media and communication media including any medium that facilitates transfer of a computer program from one place to another. A storage media may be any available media that can be accessed by a general purpose or special purpose computer.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (9)
1. The utility model provides a purification equipment is collected to digermane which characterized in that includes:
the condensing device comprises a cooling liquid storage container (1) and a cold trap (2) arranged in the cooling liquid storage container (1), and the gas containing the digermane enters the cold trap (2) through a valve and a pipeline;
the tail gas absorption tower (3), the tail gas absorption tower (3) is communicated with a tail gas outlet of the cold trap (2);
the filling device (4), the filling device (4) is communicated with the digermane outlet of the cold trap (2), and the digermane is filled into the steel cylinder;
the early warning device comprises a plurality of sensors (5) and a central processing unit which is in communication connection with the sensors (5), the sensors acquire safety influence parameters of the digermane collecting and purifying equipment and transmit the safety influence parameters to the central processing unit, and the central processing unit sends out an alarm signal when judging that the safety influence parameters are higher or lower than corresponding safety threshold values;
the coupling department that purification equipment carried hazardous gas is collected to second germane all sets up protector (6), the coupling includes: a first pipe body (64), a second pipe body (65) positioned at the right end of the first pipe body (64), and a pipe joint body connecting the first pipe body (64) and the second pipe body (65);
the guard (6) comprises:
the protection device comprises a protection shell (61), wherein a horizontal through hole is formed in the middle of the protection shell (61), the outer wall of the first pipe body (64) is fixedly connected into the horizontal through hole, and the right end of the protection shell (61) is opened;
the shape of the second shell (62) is matched with that of the protective shell (61), the left end and the right end of the second shell (62) are both opened, and the outer side of the second shell (62) is connected to the inner side of the protective shell (61) in a sealing and sliding mode;
at least one group of protection components (63) are arranged on two opposite sides in the protection shell (61);
the guard assembly (63) comprises: one end of the first fixing block (631) is fixedly connected with the outer side of the first pipe body (64), and the other end of the first fixing block is fixedly connected with the inner side of the protective shell (61); the threaded rod (632) is parallel to the first pipe body (64), and the threaded rod (632) is rotatably connected with the left side wall of the protective shell (61) and the first fixing block (631); the driving piece is arranged in the protective shell (61) or outside the protective shell (61) and is used for driving the threaded rod (632) to rotate; the inner side of the sliding block (633) is provided with a horizontal thread through hole, the horizontal thread through hole is in threaded connection with the outer wall of the threaded rod (632), and the sliding block (633) is positioned on the right side of the first fixing block (631); two fixing rods (634) parallel to the first tube (64), wherein one end of each fixing rod (634) is fixedly connected with the right side of the sliding block (633) through an elastic piece (635); the left end of the fixing plate (636) is fixedly connected with the other ends of the two fixing rods (634), and the upper end of the fixing plate (636) is also fixedly connected with the inner lower end of the second shell (62); the first sealing gasket (637) is fixedly connected to the right side of the fixing plate (636); the second sealing gasket is fixedly connected to one side, close to the second pipe body (65), of the lower end of the second shell (62);
the second fixing block (66) is fixedly connected to the second pipe body (65), the second sealing gasket is used for sealing one side, away from the second pipe body (65), of the second fixing block (66), and the first sealing gasket (637) is used for sealing the left side of the second fixing block (66);
a pressure sensor (5) disposed on the elastic member (635);
a gas sensor (5) disposed on the first fixing block (631);
the driving motor (67) is fixedly connected to the right side of the first fixing block (631) or the left side of the second fixing block (66), the driving motor (67) is parallel to the first pipe body (64), and the output end of the right side of the driving motor (67) is fixedly connected with a first gear (610);
the second gear (68) is positioned in the protective shell (61), the second gear (68) is rotationally connected to the first pipe body (64) through a bearing, and the second gear (68) is in meshing transmission with the first gear (610);
the liquid storage ring (69) is fixedly connected to the second gear (68), the liquid storage ring (69) is sleeved on the outer side of the first pipe body (64), the liquid storage ring (69) is used for storing and absorbing reaction liquid, a spray head is arranged on a liquid outlet pipe of the liquid storage ring (69), and an electromagnetic valve is further arranged on the liquid outlet pipe;
and the microcontroller is electrically connected with the electromagnetic valve, the driving motor (67), the pressure sensor (5) and the gas sensor (5).
2. The digermane collecting and purifying device according to claim 1, wherein the number of the cold traps is plural, each cold trap is arranged in parallel, and the digermane-containing gas enters each cold trap through a valve and a pipeline;
a pressure gauge is arranged on a filling pipeline between the filling device and the steel cylinder;
the cooling liquid in the cooling liquid storage container is liquid argon, liquid nitrogen or a mixture of dry ice and citric acid;
the early warning device also comprises an audible and visual alarm which is arranged outside the condensing device;
the security impact parameters include, but are not limited to: the temperature of the cold trap (2) and/or the gas volume of the filling device (5), and the central processor sends out an alarm signal when judging that the temperature is higher than a high-temperature threshold value, lower than a low-temperature threshold value or the gas volume exceeds a volume threshold value.
3. The digermane collecting and purifying apparatus according to claim 1, wherein the condensing means further comprises:
the first temperature sensor is arranged at the cold trap air inlet;
the second temperature sensor is arranged in a condensate flow channel of the cold trap;
the first detection device is arranged at the cold trap air inlet and is used for detecting the air flow rate and the air pressure of the cold trap air inlet;
the third detection device is arranged in a condensate flow channel of the cold trap and used for detecting the flow rate and the hydraulic pressure of condensate at the position of the third detection device;
the second detection device is arranged at the tail gas outlet of the cold trap and is used for detecting the gas flow rate and the gas pressure at the tail gas outlet of the cold trap;
the controller, with the alarm first temperature sensor, second temperature sensor, first detection device, second detection device, third detection device electricity are connected, the controller is based on first temperature sensor, second temperature sensor, first detection device, second detection device, third detection device control valve and alarm work includes following step:
step 1: the controller calculates a comprehensive condensation coefficient k based on real-time detection values of the first temperature sensor, the second temperature sensor and the second detection device and a formula (1);
wherein, T0Is the preset target temperature after the condensation of the digermane,T1for the real-time detection of the second temperature sensor, T3Detecting the real-time value of the first temperature sensor; e is a natural constant and takes the value of 2.71828; s is an error coefficient, the value range is 0.2-1, L is the total length of the condensate flow channel, v0Mu being a flow rate sensor detection value1The comprehensive value of the heat absorption coefficient of the condensate, the heat exchange coefficient of the condensate flow channel material and the heat exchange of the material of the channel containing the digermane gas in the cold trap is obtained, the condensate is output by the refrigerator, A is the safe refrigeration period of the refrigerator, mu2The heat exchange coefficient of the refrigerator is f is the average resistance coefficient of a channel of the digermane gas, and q is the impurity-containing coefficient in the digermane-containing gas, and the value is 0-1;
step 2: the controller calculates a target flow rate based on the step 1, the first detection device and the third detection device;
wherein α is the heat flux density of the digermane-containing gas; the condensate passage comprises N inflection points, wjIs the resistance coefficient corresponding to the jth inflection point of the condensate flow passage, sin is sine, thetajThe included angle between the tangent line corresponding to the jth inflection point of the condensate flow channel and the horizontal direction is P1Hydraulic pressure value, P, detected for the third detecting means2The air pressure detected by the first detection device;
and step 3: the controller controls the valve to work, so that the gas flow rate value detected by the first detection device is the target flow rate, and after the valve works for a first preset time, whether the gas flow rate and the gas pressure detected by the second detection device are larger than corresponding preset thresholds or not is compared, and when the gas flow rate and/or the gas pressure detected by the second detection device are larger than or equal to the corresponding preset thresholds, the controller controls the alarm to give an alarm and controls the valve to work to reduce the gas flow rate of the cold trap gas inlet; when the gas flow rate and the gas pressure detected by the second detection device are smaller than the corresponding preset threshold values, the controller controls the valve to work, so that the duration of the gas flow rate value detected by the first detection device lasting for a first preset time is the target flow rate.
4. A safety control method based on the digermane collecting and purifying apparatus according to any of claims 1 to 3, wherein the method comprises the steps of:
acquiring safety influence parameters in the process of purifying the digermane;
if the safety influence parameter is judged to exceed a safety threshold value, an early warning instruction is sent out;
and sending out an early warning signal according to the early warning instruction.
5. The safety control method according to claim 4, wherein a safety influence parameter in the digermane purification process is obtained, and if the safety influence parameter is judged to exceed a safety threshold, an early warning instruction is issued, specifically comprising:
acquiring the current temperature of the cold trap and the volume of the digermane filled in the filling device;
and judging that the current temperature in the cold trap is higher than a high-temperature threshold, the current temperature is lower than a low-temperature threshold or the volume of digermane exceeds a threshold, and sending an early warning instruction.
6. A safety control device for implementing the method according to claim 4 or 5, characterized in that it comprises:
the parameter acquisition unit is used for acquiring safety influence parameters in the process of purifying the digermane;
the safety judgment unit is used for judging that the safety influence parameters exceed a safety threshold value and sending out an early warning instruction;
and the early warning output unit is used for sending out an early warning signal according to the early warning instruction.
7. The safety control device of claim 6, further comprising a safety reaction device, the safety reaction device comprising:
the first determining module is connected with the parameter acquiring unit and used for determining each current first grade corresponding to each current safety influence parameter acquired by the parameter acquiring unit according to a preset first grading rule, wherein each safety influence parameter corresponds to the first grading rule;
the calculation module is connected with the first determination module and used for calculating the current superposition value after each current first-level superposition according to a preset level superposition calculation rule;
the second determination module is connected with the calculation module and used for determining the current superposition grade corresponding to the current superposition value according to a preset superposition value grading rule;
the environment information acquisition device is used for acquiring the information of the current environment where the digermane collecting and purifying equipment is located;
the third determining module is connected with the environmental information acquiring device and used for determining the current environmental risk level corresponding to the information of the current environment according to a preset environmental risk grading rule;
a second memory storing a plurality of different safety processing rules or safety control models, the parameters of which include: a reference first level, a reference superposition level and a reference environmental risk level corresponding to each safety influence parameter;
the third determining module is connected with the first determining module, the calculating module, the second memory and the third determining module, and is used for comparing the current superposition grade, each current first grade determined by the first determining module, the current environmental risk grade corresponding to the current environmental information with a reference first grade, a reference superposition grade and a reference environmental risk grade corresponding to different safety processing rules or safety control models to obtain a target safety processing rule with the highest difference value accumulated value of each first grade and the environmental risk reference grade determined by the current superposition grade and the first determining module;
and the control unit is connected with the first determining module, the calculating module, the second determining module, the second memory and the third determining module, and is also connected with a control terminal and used for sending the target safety processing rule to the control terminal.
8. A safety control system, characterized in that the system comprises: a processor and a first memory;
the first memory is to store one or more program instructions;
the processor, configured to execute one or more program instructions to perform the method according to claim 4 or 5.
9. A computer storage medium containing one or more program instructions for execution by a security control system of the method of claim 4 or 5.
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