CN111947559A - Position measuring device based on Hall sensor and solenoid valve - Google Patents

Position measuring device based on Hall sensor and solenoid valve Download PDF

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Publication number
CN111947559A
CN111947559A CN202010739109.2A CN202010739109A CN111947559A CN 111947559 A CN111947559 A CN 111947559A CN 202010739109 A CN202010739109 A CN 202010739109A CN 111947559 A CN111947559 A CN 111947559A
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China
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magnetic flux
magnetic
hall sensor
armature
piece
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CN202010739109.2A
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CN111947559B (en
Inventor
苏令
黄震
郝平
胡海勇
许耀午
许世壮
郭娟
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Beijing Space Technology Research and Test Center
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Beijing Space Technology Research and Test Center
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid

Abstract

The invention relates to a position measuring device and a solenoid valve based on a Hall sensor, wherein the position measuring device comprises: the magnetic flux sensor comprises a Hall sensor, magnetic steel arranged opposite to the Hall sensor, a magnetic conduction ring used for connecting the Hall sensor and the magnetic steel and conducting magnetic, first magnetic flux pieces which correspond to the Hall sensor and the magnetic steel one by one and are arranged oppositely, and a second magnetic flux piece positioned between two opposite first magnetic flux pieces; the Hall sensor and the magnetic steel are respectively abutted against one end of the first magnetic flux piece corresponding to the Hall sensor and the magnetic steel; at least one groove (151) is arranged on the outer side surface of the second magnetic flux piece (15); the second magnetic flux piece can linearly reciprocate along the direction perpendicular to the connecting line of the two first magnetic flux pieces. The position measuring device has simple and flexible structure and high measuring accuracy and sensitivity.

Description

Position measuring device based on Hall sensor and solenoid valve
Technical Field
The invention relates to the field of machinery, in particular to a position measuring device based on a Hall sensor and an electromagnetic valve.
Background
The bistable electromagnetic valve is an electric valve with a position self-holding function, has the characteristics of instantaneous energy consumption of opening/closing, passive holding, long service life and the like, is used for the isolation control of fluid media as a management valve, and is widely applied to the aspects of industrial and agricultural production, national defense, aerospace and the like. Aiming at the passive retention characteristic, due to vibration, acceleration, fault excitation and other reasons, the armature of the valve core of the electromagnetic valve jumps away from the steady-state position of the corresponding position, and if no corresponding valve core armature measuring means exists, a control system where the electromagnetic valve is located does not know the true state of the valve, and remedial measures cannot be taken in time.
At present, two methods of medium contact and non-contact are adopted for measuring the position of a valve core armature of a bistable electromagnetic valve. In general, a displacement sensor is arranged in a valve in a medium contact mode to directly measure the position change of the armature, or the position change of the armature is led out of a valve body through a mechanical transmission device and then is measured by the displacement sensor to indirectly measure the position change of the armature. The method needs the sensor to contact working media or design dynamic seal, and is not applicable to the fields of aerospace, chemical engineering, biology and the like with higher requirements on the management of the working media with toxicity, flammability, explosiveness and the like. The non-contact type magnetic valve obtains the armature position change indirectly by measuring the magnetic path characteristic change of the electromagnetic valve, and the measuring sensor and the measuring circuit of the non-contact type magnetic valve do not contact with a valve medium directly, and the adopted modes are mainly an inductance measurement comparison method and a current change time comparison method. In both methods, a measurement comparison circuit is required to be constructed for measuring inductance or current, the system is complex, the electromagnetic valve is coupled with an original electromagnetic coil, and the fault isolation is not strong. And because the movement displacement of the valve core armature of the bistable electromagnetic valve is very small, generally about 1-2mm, the magnetic path characteristic change of the electromagnetic valve is very small, namely the inductance and current comparison quantity is very small, if the external temperature environment of the valve changes, deviation is easily generated, and the measurement error is increased, so that the position measurement of the valve core armature is wrong.
Disclosure of Invention
The invention aims to provide a position measuring device based on a Hall sensor and an electromagnetic valve, and solves the problem of large measuring error.
In order to achieve the above object, the present invention provides a position measuring device based on a hall sensor, comprising: the magnetic flux sensor comprises a Hall sensor, magnetic steel arranged opposite to the Hall sensor, a magnetic conduction ring used for connecting the Hall sensor and the magnetic steel and conducting magnetic, first magnetic flux pieces which correspond to the Hall sensor and the magnetic steel one by one and are arranged oppositely, and a second magnetic flux piece positioned between two opposite first magnetic flux pieces;
the Hall sensor and the magnetic steel are respectively abutted against one end of the first magnetic flux piece corresponding to the Hall sensor and the magnetic steel;
at least one groove is formed in the outer side face of the second magnetic flux piece;
the second magnetic flux piece can linearly reciprocate along the direction perpendicular to the connecting line of the two first magnetic flux pieces.
According to one aspect of the invention, a non-recessed portion of the second flux piece adjacent the recess forms a magnetic conductive path of the second flux piece;
and the width of the magnetic conduction channel is the same as that of one end of the first magnetic flux piece adjacent to the second magnetic flux piece along the moving direction of the second magnetic flux piece.
According to one aspect of the present invention, the second flux member has a space from an end of the first flux member, and the space is smaller than a width of the groove.
According to an aspect of the invention, a width of the groove is at least 2 times a space between the second flux member and the end of the first flux member.
According to one aspect of the invention, the first magnetic flux member is a columnar structure.
According to one aspect of the invention, the second magnetic flux member is of an annular or plate-like configuration.
To achieve the above object, the present invention provides a solenoid valve comprising: a position measuring device, a valve body, a coil and an armature;
the valve body is provided with a coil cavity for mounting the coil and an armature cavity for mounting the armature;
the Hall sensor, the magnetic steel and the magnetic conductive ring are arranged on the outer side of the cavity wall of the armature cavity;
the first magnetic flux piece is embedded in the cavity wall of the armature cavity and penetrates through the cavity wall;
the second flux piece is disposed on the armature.
According to one aspect of the invention, the wall portion of the armature cavity is made of a wall of a magnetically insulating material, and the first magnetic flux element is embedded in the wall of the magnetically insulating material.
According to one aspect of the invention, the width of the groove on the outer side of the second flux piece is greater than the stroke of the armature.
According to one aspect of the invention, the connection position of the first magnetic flux piece and the wall of the armature cavity is arranged in a sealing mode;
the second magnetic flux piece is integrally disposed with or detachably connected to the armature.
According to one scheme of the invention, the position measuring device has a simple and flexible structure and high measuring accuracy and sensitivity.
According to one scheme of the invention, the magnetic steel and the Hall sensor are completely not contacted with the second magnetic flux piece through the magnetic flux path which is arranged and constructed, so that the space for installing the second magnetic flux piece is completely closed, other media in the closed space are not contacted in the whole measuring process, the sealing performance of the installed space is favorably ensured, and the magnetic steel and the Hall sensor are ensured to have excellent working environment (namely not contacted with the media).
According to one scheme of the invention, the magnetic path with the air gap of the corresponding magnetic path changed along with the position change of the valve core armature of the electromagnetic valve is established, and then the magnetic flux change of the magnetic path is measured through the Hall sensor to generate the Hall voltage for judging the position of the valve core armature of the electromagnetic valve, so that the simple and reliable measurement of the position of the valve core armature of the electromagnetic valve can be realized, and the magnetic valve has a beneficial application value and can be applied to the control of electromagnetic valves in the fields of aerospace, chemical engineering, biology and the like.
Drawings
FIG. 1 is a block diagram schematically illustrating a solenoid valve according to an embodiment of the present invention;
FIG. 2 is a side view schematically illustrating a solenoid valve according to an embodiment of the present invention;
FIG. 3 is a magnetic circuit diagram schematically illustrating a solenoid valve according to an embodiment of the present invention;
fig. 4 is a diagram schematically showing a state of opening and closing of a solenoid valve according to an embodiment of the present invention.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
In describing embodiments of the present invention, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship that is based on the orientation or positional relationship shown in the associated drawings, which is for convenience and simplicity of description only, and does not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, the above-described terms should not be construed as limiting the present invention.
The present invention is described in detail below with reference to the drawings and the specific embodiments, which are not repeated herein, but the embodiments of the present invention are not limited to the following embodiments.
Referring to fig. 1 and 2, according to an embodiment of the present invention, a hall sensor based position measuring apparatus includes: the magnetic sensor comprises a Hall sensor 11, magnetic steel 12 arranged opposite to the Hall sensor 11, a magnetic conductive ring 13 used for connecting the Hall sensor 11 and the magnetic steel 12 and conducting magnetism, first magnetic flux pieces 14 which correspond to the Hall sensor 11 and the magnetic steel 12 one by one and are arranged oppositely, and a second magnetic flux piece 15 positioned between the two opposite first magnetic flux pieces 14. In this embodiment, the magnetic conductive ring 13 is an integral ring structure, the hall sensor 11 and the magnetic steel 12 are oppositely disposed on the inner side of the magnetic conductive ring 13, and the hall sensor 11 and the magnetic steel 12 respectively abut against the magnetic conductive ring 13, so that the S pole (or N pole) of one pole connected to the magnetic steel 12 and the magnetic conductive ring 13 is communicated with the measuring surface connected to the hall sensor 11 and the magnetic conductive ring 13.
In the present embodiment, the hall sensor 11 and the magnetic steel 12 are respectively abutted against one end of the first magnetic flux member 14 corresponding thereto. The measuring surface of the hall sensor 11 on the other side away from the magnetic conductive ring 13 is closely attached to one end of the corresponding first magnetic flux piece 14, and the N pole (or S pole) of the other pole of the magnetic steel 12 is closely attached to one end of the corresponding first magnetic flux piece 14. In the present embodiment, the material structures of the two first magnetic flux members 14 are the same. In the present embodiment, the material of the first magnetic flux element 14 is a soft magnetic alloy.
In the present embodiment, at least one groove 151 is provided on the outer side surface of the second magnetic flux member 15. In the present embodiment, two grooves 151 are provided. Of course, the number of the grooves 151 may be set as desired. For example one, three or more.
In the present embodiment, the second magnetic flux member 15 is linearly and reciprocally movable in a direction perpendicular to a line connecting the two first magnetic flux members 14. Through the arrangement, when the position detection is carried out by adopting the invention, the position can be measured according to the position of the groove 151 on the second magnetic flux piece 15, so that the difficulty of position measurement is effectively reduced.
As shown in fig. 3, in the present embodiment, two first magnetic flux elements 14 are oppositely disposed and respectively communicated with the hall sensor 11 and the magnetic steel 12, and the hall sensor 11 is communicated with the magnetic steel 12 by using the magnetic conductive ring 13, and the second magnetic flux element 15 is further disposed between the two opposite first magnetic flux elements 14, so as to realize a complete closed-loop magnetic path, that is, the N pole (or the N pole) of the magnetic steel 12, i.e., the first magnetic flux element 14, i.e., the second magnetic flux element 15, i.e., the first magnetic flux element 14, i.e., the hall sensor 11, i.e., the magnetic conductive ring 13, i.e., the S pole (or the N pole) of the magnetic steel 12.
The magnetic circuit which is arranged and constructed through the above method realizes that the magnetic steel and the Hall sensor are not contacted with the second magnetic flux piece completely, so that the space for installing the second magnetic flux piece is completely closed, and other media in the closed space are not contacted in the whole measuring process, thereby being beneficial to ensuring the sealing performance of the installed space and ensuring that the magnetic steel and the Hall sensor have excellent working environment (namely are not contacted with the media).
Referring to fig. 1, 2 and 4, according to an embodiment of the present invention, the non-recessed portion of the second flux member 15 adjacent to the recessed groove 151 forms a magnetic conductive path of the second flux member 15. In this embodiment, the plurality of grooves 151 are provided, and the space (i.e. non-groove portion) between adjacent grooves 151 forms a magnetic conduction channel a on the second magnetic flux component 15, and the magnetic conduction channel and the adjacent groove structure are beneficial to ensure that a larger working air gap can be generated during the movement of the second magnetic flux component, which is beneficial to improving the measurement sensitivity and the measurement accuracy of the present invention. In addition, the arrangement is favorable for eliminating or reducing the influence of the interval (non-working air gap) between the second magnetic flux piece and the first magnetic flux piece on the measurement result, and is further favorable for improving the measurement precision of the invention. Of course, if there is one groove 151, the non-groove portion of the second magnetic flux material 15 adjacent to the groove 151 may constitute the magnetic conduction path a.
As shown in fig. 1, 2 and 4, according to an embodiment of the present invention, the interval between the adjacent grooves 151 (i.e., the magnetic conductive path a) is the same as the width of the end of the first magnetic flux member 14 adjacent to the second magnetic flux member 15 in the moving direction of the second magnetic flux member 15. Through the arrangement, the accurate alignment of the interval between the adjacent grooves 151 and the end part of the first magnetic flux piece 14 can be realized, and the second magnetic flux piece can be detected in time when moving, so that the detection efficiency and the detection speed of the invention are ensured, meanwhile, the second magnetic flux piece 15 can still be effectively detected under the condition of small movement, and the improvement of the detection accuracy of the whole device is more favorable.
Referring to fig. 1, 2 and 4, according to an embodiment of the present invention, the second flux member 15 has a space from the end of the first flux member 14, and the space is smaller than the width of the groove 151. In the present embodiment, the width of the groove 151 is at least 2 times the interval between the end portions of the first magnetic flux member 14 and the second magnetic flux member 15. With the above arrangement, in the case where the mounting convenience of the present invention is easily ensured, it is also possible to effectively suppress or eliminate the influence of the gap (non-working air gap) between the second magnetic flux member 15 and the end of the first magnetic flux member 14 on the measurement result, which is advantageous in ensuring the measurement accuracy of the entire apparatus.
As shown in fig. 1, according to one embodiment of the present invention, the first magnetic flux member 14 has a columnar structure. In the present embodiment, the first magnetic flux member 14 is a cylindrical body or a stepped cylindrical body. Through the arrangement, the processing tool is easy to process, is favorable for ensuring the processing precision, and is favorable for ensuring the precise matching of the mounting position.
According to one embodiment of the present invention, the second magnetic flux member 15 has a ring-shaped or plate-shaped structure. Through the arrangement, the installation of the device and other structures is facilitated, and the device is convenient to use.
Referring to fig. 1, 2, 3 and 4, according to an embodiment of the present invention, a solenoid valve includes: position measuring device 1, valve body 2, coil 3 and armature 4. In the present embodiment, the valve body 2 has a coil chamber 21 for mounting the coil 3, and an armature chamber 22 for mounting the armature 4. In the present embodiment, the hall sensor 11, the magnetic steel 12, and the magnetic conductive ring 13 are disposed outside the cavity wall of the armature cavity 22; first flux piece 14 is embedded in and extends through the wall of armature chamber 22. In the present embodiment, the second magnetic flux member 15 is provided on the armature 4.
Referring to fig. 1 and 2, according to one embodiment of the present invention, the wall portion of the armature cavity 22 is made of a wall of magnetic insulating material, and the first magnetic flux element 14 is embedded in the wall of magnetic insulating material. In this embodiment, embedding the first flux piece 14 in the wall of the magnetic shield material effectively prevents the wall of the armature cavity 22 from affecting the entire magnetic path, which is advantageous in ensuring accurate and stable measurement according to the present invention.
As shown in fig. 1, 2, 3, and 4, according to one embodiment of the present invention, the width of the groove 151 on the outer side surface of the second flux piece 15 is greater than the stroke of the armature 4. In the present embodiment, the stroke L of the armature 4 (L is generally about 1mm to 2 mm). Referring to fig. 4, further, in the initial closed state (or open state) of the valve, the space between adjacent grooves 151 on the second flux piece 15 (i.e., the magnetic conduction path a) can be aligned with the end of the first flux piece 14; when the valve is moved to the open state (or the closed state), the magnetic conduction channel a can be just staggered with the first magnetic flux component 14, and the groove 151 is opposite to the first magnetic flux component 1. Therefore, the air gap difference between the two adjacent grooves 151 on the first magnetic flux piece 14 and the second magnetic flux piece 15 after the armature drives the second magnetic flux piece 15 to move is the largest, namely, the air gap variation of the magnetic path is the largest when the armature performs switching action.
As shown in fig. 1, the connection location of first flux piece 14 to the wall of armature chamber 22 is sealed according to one embodiment of the present invention. In this embodiment, the sealing may be performed by welding. Through the arrangement, the sealing performance of the working environment of the armature is effectively guaranteed, and the working stability and safety of the whole electromagnetic valve are guaranteed.
According to one embodiment of the invention, the second magnetic flux piece 15 is provided integrally with the armature 4 or detachably connected thereto. Through the arrangement, the second magnetic flux piece 15 is flexibly manufactured, is integrally manufactured with the armature, is convenient to process, omits the assembly step and enables the whole device to be simpler to assemble. Of course, the detachable alignment device is convenient to align and replace and is beneficial to reducing maintenance cost.
For further explanation of the present invention, the measurement principle of the present invention will be further explained with reference to the accompanying drawings.
As shown in fig. 4, when the valve is in the closed state, the magnetic conduction channel a of the magnetic conduction ring 13 is aligned with the first magnetic flux component 14, and the magnetic circuit working air gap1Minimum, basically zero, in this state, the magnetic flux generated by the magnetic steel 12 passes through the hall sensor 11 most (see fig. 3), and the hall voltage generated by the hall sensor is maximum; when the valve is in the open state, the magnetic conduction channel A of the magnetic conduction ring 13 is dislocated with the first magnetic flux piece 14, and the working air gap of the magnetic flux channel1At a maximum wherein1Related to width of magnetic conduction channel A, diameter of first magnetic flux member 14, armature stroke L and non-working air gap0And (4) coupling. In the present invention1The size is about L/2, the magnetic flux generated by the magnetic steel in the state is minimum through the Hall sensor, and the Hall voltage generated by the Hall sensor is minimum. The Hall voltage can be used for a control system where the electromagnetic valve is positioned to judge the position of the armature of the valve core of the electromagnetic valve after being amplified by a circuit.
In the magnetic path, under the condition that the magnetic force of the magnetic steel and the material of the magnetic path are fixed, the Hall voltage generated by the Hall sensor is mainly determined by an air gap, and the influence of the ambient temperature on the Hall voltage is small; furthermore, in the electromagnetic valve on-off state, the difference value between the maximum value and the minimum value of the Hall voltage generated by the Hall sensor is determined by the non-working air gap0Working air gap1Determining the working air gap in the present invention1About a non-working air gap03-5 times of the working air gap, under the condition of considering factors of machining error, assembly error, stress release and the like1Is still a non-working air gap0The difference between the maximum value and the minimum value of the Hall voltage generated by the Hall sensor is relatively large, so that a control system where the electromagnetic valve is located can set a judgment threshold value of the position of the armature of the valve core of the electromagnetic valve, and the reliability is good.
In the position measuring device, except the common valve core armature, the position measuring device is completely isolated from the electromagnetic valve switch control magnetic path and the coil, if the armature position measuring system has a fault, the performance of the electromagnetic valve switch and the valve is not influenced, and the fault isolation is good.
The foregoing is merely exemplary of particular aspects of the present invention and devices and structures not specifically described herein are understood to be those of ordinary skill in the art and are intended to be implemented in such conventional ways.
The above description is only one embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A position measuring device based on a Hall sensor, comprising: the magnetic flux sensor comprises a Hall sensor (11), magnetic steel (12) arranged opposite to the Hall sensor (11), a magnetic conductive ring (13) used for connecting the Hall sensor (11) and the magnetic steel (12) and conducting magnetism, first magnetic flux pieces (14) which correspond to the Hall sensor (11) and the magnetic steel (12) one by one and are arranged oppositely, and a second magnetic flux piece (15) positioned between the two opposite first magnetic flux pieces (14);
the Hall sensor (11) and the magnetic steel (12) are respectively abutted against one end of the first magnetic flux piece (14) corresponding to the Hall sensor and the magnetic steel;
at least one groove (151) is arranged on the outer side surface of the second magnetic flux piece (15);
the second magnetic flux member (15) is linearly and reciprocally movable in a direction perpendicular to a line connecting the two first magnetic flux members (14).
2. A position measuring device according to claim 1, characterized in that a non-recessed portion of the second flux member (15) adjacent to the recess (151) constitutes a magnetically conductive path in the second flux member (15);
and the width of the magnetic conduction channel is the same as that of one end of the first magnetic flux piece (14) adjacent to the second magnetic flux piece (15) along the moving direction of the second magnetic flux piece (15).
3. Position measuring device according to claim 1 or 2, characterized in that the second flux piece (15) has a spacing from the end of the first flux piece (14), which spacing is smaller than the width of the groove (151).
4. A position measuring device according to claim 3, characterized in that the width of the groove (151) is at least 2 times the spacing between the second flux piece (15) and the end of the first flux piece (14).
5. Position measuring device according to claim 1, characterized in that the first magnetic flux piece (14) is of a cylindrical structure.
6. Position measuring device according to claim 1, characterized in that the second flux piece (15) is of annular or plate-like construction.
7. A solenoid valve using the position measuring device according to any one of claims 1 to 6, characterized by comprising: the device comprises a position measuring device (1), a valve body (2), a coil (3) and an armature (4);
the valve body (2) is provided with a coil cavity (21) for mounting the coil (3) and an armature cavity (22) for mounting the armature (4);
the Hall sensor (11), the magnetic steel (12) and the magnetic conductive ring (13) are arranged on the outer side of the cavity wall of the armature cavity (22);
the first magnetic flux piece (14) is embedded on the cavity wall of the armature cavity (22) and penetrates through the cavity wall;
the second magnetic flux piece (15) is arranged on the armature (4).
8. The solenoid valve according to claim 7, characterized in that the wall portion of the armature chamber (22) is made of a wall of magnetically insulating material, the first magnetic flux element (14) being embedded in said wall of magnetically insulating material.
9. A solenoid valve according to claim 7 or 8, characterised in that the width of the groove (151) on the outer side of the second flux piece (15) is greater than the stroke of the armature (4).
10. The solenoid valve according to claim 7 or 8, characterized in that the connection position of the first magnetic flux piece (14) with the wall of the armature chamber (22) is sealed;
the second magnetic flux piece (15) is arranged integrally with the armature (4) or detachably connected thereto.
CN202010739109.2A 2020-07-28 2020-07-28 Position measuring device based on Hall sensor and solenoid valve Active CN111947559B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0665416A1 (en) * 1994-02-01 1995-08-02 Moving Magnet Technologies S.A. Magnetic position sensor with Hall-element
CN208567924U (en) * 2018-06-27 2019-03-01 南京中旭电子科技有限公司 A kind of small size Hall lock core position sensor
CN109695770A (en) * 2019-01-25 2019-04-30 北京控制工程研究所 A kind of simply highly reliable miniature self-locking valve of structure

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0665416A1 (en) * 1994-02-01 1995-08-02 Moving Magnet Technologies S.A. Magnetic position sensor with Hall-element
CN208567924U (en) * 2018-06-27 2019-03-01 南京中旭电子科技有限公司 A kind of small size Hall lock core position sensor
CN109695770A (en) * 2019-01-25 2019-04-30 北京控制工程研究所 A kind of simply highly reliable miniature self-locking valve of structure

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
袁月峰等: "基于STM32单片机的气动比例方向阀控制器", 《仪表技术与传感器》 *

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