CN111941262A

CN111941262A - Chemical mechanical polishing equipment and use method

Info

Publication number: CN111941262A
Application number: CN202010642321.7A
Authority: CN
Inventors: 李伟伟; 陈蕾
Original assignee: Nanjing Lingque Intelligent Manufacturing Co Ltd
Current assignee: Nanjing Lingque Intelligent Manufacturing Co Ltd
Priority date: 2020-07-06
Filing date: 2020-07-06
Publication date: 2020-11-17

Abstract

The invention discloses chemical mechanical polishing equipment and a using method thereof, belonging to the technical field of mechanical polishing, the chemical mechanical polishing equipment comprises a first box body, a supporting cover and a part body, wherein the supporting cover is provided with a moving mechanism, the bottom of the moving mechanism is provided with a lifting mechanism, a second motor is arranged in the lifting mechanism, the output end of the second motor is provided with a polishing disk matched with the part body, the side wall of the supporting cover is rotatably connected with a first rotating shaft, one end of the first rotating shaft, far away from the supporting cover, is fixedly connected with a second supporting plate, and the side wall of the supporting cover is also fixedly connected with a second air cylinder; the polishing device is simple in structure and convenient and fast to operate, polishing efficiency is improved, the spraying amount of polishing liquid is automatically changed along with the rotating speed of mechanical parts, and practicability is greatly improved.

Description

Chemical mechanical polishing equipment and use method

Technical Field

The invention relates to the technical field of mechanical polishing, in particular to chemical mechanical polishing equipment and a using method thereof.

Background

After a machine tool is machined, particularly shaft parts of a rotary body, in order to meet design requirements, polishing treatment is needed, namely, the roughness of the surface of a workpiece is reduced by utilizing the mechanical, chemical or electrochemical action to obtain a bright and flat surface.

Disclosure of Invention

The invention aims to solve the problems that polishing liquid with low polishing efficiency cannot automatically change the spraying amount along with the rotation speed of mechanical parts and the like in the prior art, and provides chemical mechanical polishing equipment and a using method thereof.

In order to achieve the purpose, the invention adopts the following technical scheme:

a chemical mechanical polishing device comprises a first box body, a supporting cover and a part body, wherein a moving mechanism is arranged on the supporting cover, a lifting mechanism is arranged at the bottom of the moving mechanism, a second motor is arranged in the lifting mechanism, a polishing disc matched with the part body is arranged at the output end of the second motor, a first rotating shaft is rotatably connected on the side wall of the supporting cover, a second supporting plate is fixedly connected at one end, away from the supporting cover, of the first rotating shaft, a second air cylinder is also fixedly connected on the side wall of the supporting cover, a third supporting plate is connected at the output end of the second air cylinder, a rotating plate is rotatably connected on the third supporting plate, the part body is fixed between the rotating plate and the second supporting plate, a second rotating shaft is rotatably connected on the inner wall of the first box body, a transmission mechanism is connected between the second rotating shaft and the first rotating shaft, and a cam is fixedly connected on the, the bottom of first box is equipped with the piston cylinder, sliding connection has the piston board in the piston cylinder, fixedly connected with connecting rod on the piston board, fixedly connected with movable plate on the connecting rod, the movable plate pastes with the cam mutually, first box top is equipped with the filter screen, be equipped with the shower nozzle on the filter screen, be connected with the second hollow tube between shower nozzle and the piston cylinder bottom, be equipped with the funnel of intaking on the second hollow tube, be equipped with the water tank in the first box, the funnel of intaking is located the water tank.

Preferably, moving mechanism includes first motor, threaded rod and thread piece, first motor is fixed and is being supported the cover lateral wall, threaded rod fixed connection is at the output of first motor, thread piece threaded connection is on the threaded rod, the first backup pad of thread piece bottom fixedly connected with.

Preferably, the side wall of the supporting cover is fixedly connected with a protective cover, and the first motor is located in the protective cover.

Preferably, elevating system includes first cylinder and second box, first cylinder fixed connection is in first backup pad bottom, second box fixed connection is at the output of first cylinder, second motor fixed connection is at second box top inner wall.

Preferably, a first gear is fixedly connected to the threaded rod, a second gear meshed with the first gear is rotatably connected to the side wall of the supporting cover, and a third gear meshed with the second gear is fixedly connected to the first rotating shaft.

Preferably, drive mechanism includes driven pulley, driving pulley and belt, driven pulley fixed connection is in the second pivot, driving pulley fixed connection is in first pivot, the belt is connected between driven pulley and driving pulley.

Preferably, an air inlet is formed in the piston plate, a first one-way valve is arranged in the air inlet, a second one-way valve is arranged in the second hollow tube, a third one-way valve is arranged in the water inlet funnel, and a spring is arranged between the movable plate and the inner wall of the bottom of the first box body.

Preferably, the water tank lateral wall is equipped with the water inlet, the filter screen bottom is equipped with the recovery board, it is equipped with first hollow tube to retrieve the board bottom, the one end that the board was retrieved in keeping away from to first hollow tube is linked together with the water tank.

Preferably, the rotating plate and the second supporting plate are both provided with a rubber gasket and a positioning block, and a telescopic plate is connected between the third supporting plate and the supporting cover.

The use method of the chemical mechanical polishing equipment comprises the following steps:

s1, starting the second cylinder to fix the part body;

s2, starting a first motor, wherein the first motor drives a threaded rod to rotate, the threaded rod drives a part body to rotate, and meanwhile, a first rotating shaft drives a second rotating shaft to rotate;

s3, the second rotating shaft drives the piston plate to reciprocate through the cam, and the air in the piston cylinder retracts into the second hollow pipe, so that the polishing solution in the second hollow pipe is sprayed out from the spray head;

and S4, starting the first air cylinder and the second motor to enable the polishing disc to be in contact with the part body, and polishing and grinding the part body.

Compared with the prior art, the invention has the following beneficial effects:

when the chemical mechanical polishing equipment is used, the second air cylinder is started, the second air cylinder drives the third supporting plate to fix the part body between the second supporting plate and the third supporting plate, the first motor is started, the first motor drives the threaded rod to rotate, the threaded rod drives the first rotating shaft to rotate through the first gear, the second gear and the third gear, the first rotating shaft drives the part body to rotate, the first air cylinder and the second motor are started to enable the polishing disc to be in contact with the part body, the part body is polished and polished under the action of the moving mechanism, the first rotating shaft drives the second rotating shaft to rotate through the transmission mechanism in the polishing and polishing process, the second rotating shaft drives the moving plate to reciprocate through the cam, the piston plate is driven to reciprocate in the piston cylinder through the connecting rod, the air in the piston cylinder of the moving plate is compressed into the second hollow pipe, meanwhile, polishing liquid in the water tank enters the second hollow pipe through the water inlet funnel, under compressed gas's effect, spout from the shower nozzle, increase polishing efficiency, when first pivot accelerates the rotational speed, the second pivot also can accelerate the rotational speed under drive mechanism's effect, and reciprocating motion is also accelerated to the piston board for compress the air in the piston cylinder, increase the blowout volume of polishing solution.

The device has the advantages that the structure is simple, the operation is convenient, the polishing efficiency is improved, the ejection amount of the polishing solution is automatically changed along with the rotation speed of mechanical parts through the mutual matching of the cam and the piston plate, and the practicability is greatly improved.

Drawings

FIG. 1 is a schematic structural diagram of a chemical mechanical polishing apparatus according to the present invention;

FIG. 2 is an enlarged view of a portion A of FIG. 1 of a chemical mechanical polishing apparatus according to the present invention;

FIG. 3 is an enlarged view of a portion B of the chemical mechanical polishing apparatus of FIG. 1 according to the present invention;

fig. 4 is a side view of a cam of a chemical mechanical polishing apparatus according to the present invention.

In the figure: 1. a first case; 101. a support housing; 2. a first motor; 201. a protective cover; 202. a threaded rod; 3. a thread block; 301. a first support plate; 302. a first cylinder; 4. a second case; 401. a second motor; 402. a polishing disk; 5. a first gear; 501. a second gear; 502. a first rotating shaft; 503. a third gear; 6. a second support plate; 601. a rubber gasket; 602. positioning blocks; 7. a second cylinder; 701. a third support plate; 702. a rotating plate; 703. a retractable plate; 704. a part body; 8. a water tank; 801. a water inlet; 802. filtering with a screen; 803. recovering the plate; 804. a first hollow tube; 9. a second rotating shaft; 901. a driven pulley; 902. a driving pulley; 903. a belt; 10. a cam; 1001. moving the plate; 11. a spring; 12. a connecting rod; 1201. a piston plate; 1202. an air inlet; 1203. a first check valve; 1204. a piston cylinder; 13. a second hollow tube; 1301. a second one-way valve; 1302. a spray head; 14. a water inlet funnel; 1401. and a third one-way valve.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

Example 1:

referring to fig. 1-4, a chemical mechanical polishing apparatus comprises a first box 1, a supporting cover 101 and a component body 704, wherein a moving mechanism is arranged on the supporting cover 101, a lifting mechanism is arranged at the bottom of the moving mechanism, a second motor 401 is arranged in the lifting mechanism, a polishing disc 402 matched with the component body 704 is arranged at the output end of the second motor 401, a first rotating shaft 502 is rotatably connected to the side wall of the supporting cover 101, a second supporting plate 6 is fixedly connected to one end of the first rotating shaft 502 far away from the supporting cover 101, a second cylinder 7 is also fixedly connected to the side wall of the supporting cover 101, a third supporting plate 701 is connected to the output end of the second cylinder 7, a rotating plate 702 is rotatably connected to the third supporting plate 701, the component body 704 is fixed between the rotating plate 702 and the second supporting plate 6, a second rotating shaft 9 is rotatably connected to the inner wall of the first box 1, a transmission mechanism is connected between, fixedly connected with cam 10 on the second pivot 9, the bottom of first box 1 is equipped with piston cylinder 1204, sliding connection has piston plate 1201 in piston cylinder 1204, fixedly connected with connecting rod 12 on the piston plate 1201, fixedly connected with movable plate 1001 on the connecting rod 12, movable plate 1001 pastes with cam 10 mutually, first box 1 top is equipped with filter screen 802, be equipped with shower nozzle 1302 on the filter screen 802, be connected with second hollow tube 13 between shower nozzle 1302 and the piston cylinder 1204 bottom, be equipped with into water funnel 14 on the second hollow tube 13, be equipped with water tank 8 in the first box 1, it is located water tank 8 to intake water funnel 14.

The moving mechanism comprises a first motor 2, a threaded rod 202 and a threaded block 3, the first motor 2 is fixed on the side wall of the supporting cover 101, the threaded rod 202 is fixedly connected to the output end of the first motor 2, the threaded block 3 is in threaded connection with the threaded rod 202, and the bottom of the threaded block 3 is fixedly connected with a first supporting plate 301.

The side wall of the supporting cover 101 is fixedly connected with a protecting cover 201, and the first motor 2 is positioned in the protecting cover 201.

The lifting mechanism comprises a first cylinder 302 and a second box 4, the first cylinder 302 is fixedly connected to the bottom of the first supporting plate 301, the second box 4 is fixedly connected to the output end of the first cylinder 302, and a second motor 401 is fixedly connected to the inner wall of the top of the second box 4.

A first gear 5 is fixedly connected to the threaded rod 202, a second gear 501 meshed with the first gear 5 is rotatably connected to the side wall of the support cover 101, and a third gear 503 meshed with the second gear 501 is fixedly connected to the first rotating shaft 502.

The transmission mechanism comprises a driven pulley 901, a driving pulley 902 and a belt 903, wherein the driven pulley 901 is fixedly connected to the second rotating shaft 9, the driving pulley 902 is fixedly connected to the first rotating shaft 502, and the belt 903 is connected between the driven pulley 901 and the driving pulley 902.

An air inlet hole 1202 is formed in the piston plate 1201, a first one-way valve 1203 is arranged in the air inlet hole 1202, a second one-way valve 1301 is arranged in the second hollow pipe 13, a third one-way valve 1401 is arranged in the water inlet funnel 14, and a spring 11 is arranged between the moving plate 1001 and the inner wall of the bottom of the first box body 1.

The side wall of the water tank 8 is provided with a water inlet 801, the bottom of the filter screen 802 is provided with a recovery plate 803, the bottom of the recovery plate 803 is provided with a first hollow pipe 804, and one end of the first hollow pipe 804 far away from the recovery plate 803 is communicated with the water tank 8.

The rotating plate 702 and the second supporting plate 6 are both provided with a rubber gasket 601 and a positioning block 602, and a telescopic plate 703 is connected between the third supporting plate 701 and the supporting cover 101.

When the polishing machine is used, the second air cylinder 7 is started, the second air cylinder 7 drives the third supporting plate 701 to fix the part body 704 between the second supporting plate 6 and the third supporting plate 701, the first motor 2 is started, the first motor 2 drives the threaded rod 202 to rotate, the threaded rod 202 drives the first rotating shaft 502 to rotate through the first gear 5, the second gear 501 and the third gear 503, the first rotating shaft 502 drives the part body 704 to rotate, the first air cylinder 302 and the second motor 401 are started to enable the polishing disc 402 to be in contact with the part body 704, and the part body 704 is polished under the action of the moving mechanism.

Example 2:

On the basis of embodiment 1, further, in the polishing and grinding process of the part body 704, the first rotating shaft 502 drives the second rotating shaft 9 to rotate through the transmission mechanism, the second rotating shaft 9 drives the moving plate 1001 to reciprocate through the cam 10, the moving plate 1001 drives the piston plate 1201 to reciprocate in the piston cylinder 1204 through the connecting rod 12, air in the piston cylinder 1204 is compressed into the second hollow tube 13, meanwhile, polishing liquid in the water tank 8 enters the second hollow tube 13 through the water inlet funnel 14, and is sprayed out from the spray head 1302 under the action of compressed gas, so that the polishing efficiency is increased, when the rotating speed of the first rotating shaft 502 is increased, the rotating speed of the second rotating shaft 9 is also increased under the action of the transmission mechanism, the piston plate 1201 also accelerates the reciprocating movement, the air in the piston cylinder 1204 is compressed, and the spraying amount of the polishing liquid is increased.

Example 3:

s1, starting the second air cylinder 7 to fix the part body 704;

s2, starting the first motor 2, the first motor 2 driving the threaded rod 202 to rotate, the threaded rod 202 driving the part body 704 to rotate, and at the same time, the first rotating shaft 502 driving the second rotating shaft 9 to rotate;

s3, the second rotating shaft 9 drives the piston plate 1201 to reciprocate through the cam 10, and the air in the piston cylinder 1204 retracts into the second hollow tube 13, so that the polishing liquid in the second hollow tube 13 is sprayed out from the spray head 1302;

s4, the first cylinder 302 and the second motor 401 are activated to make the polishing disc 402 contact with the part body 704, and the part body 704 is polished.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims

1. The utility model provides a chemical mechanical polishing equipment, includes first box (1), cage (101) and part body (704), its characterized in that, be equipped with moving mechanism on cage (101), the moving mechanism bottom is equipped with elevating system, be equipped with second motor (401) in the elevating system, the output of second motor (401) is equipped with polishing dish (402) of mutually supporting with part body (704), cage (101) lateral wall rotates and is connected with first pivot (502), the one end fixedly connected with second backup pad (6) of cage (101) are kept away from in first pivot (502), cage (101) lateral wall still fixedly connected with second cylinder (7) support.

2. The chemical mechanical polishing device of claim 1, wherein the output end of the second cylinder (7) is connected with a third support plate (701), the third support plate (701) is rotatably connected with a rotating plate (702), the part body (704) is fixed between the rotating plate (702) and the second support plate (6), the inner wall of the first box body (1) is rotatably connected with a second rotating shaft (9), a transmission mechanism is connected between the second rotating shaft (9) and the first rotating shaft (502), a cam (10) is fixedly connected with the second rotating shaft (9), the bottom of the first box body (1) is provided with a piston cylinder (1204), the piston cylinder (1204) is slidably connected with a piston plate (1201), a connecting rod (12) is fixedly connected with the piston plate (1201), and a moving plate (1001) is fixedly connected with the connecting rod (12), the movable plate (1001) is attached to the cam (10), a filter screen (802) is arranged at the top of the first box body (1), a spray head (1302) is arranged on the filter screen (802), a second hollow pipe (13) is connected between the spray head (1302) and the bottom of the piston cylinder (1204), a water inlet funnel (14) is arranged on the second hollow pipe (13), a water tank (8) is arranged in the first box body (1), and the water inlet funnel (14) is located in the water tank (8).

3. A chemical mechanical polishing device according to claim 2, wherein the moving mechanism comprises a first motor (2), a threaded rod (202) and a threaded block (3), the first motor (2) is fixed on the side wall of the support cover (101), the threaded rod (202) is fixedly connected to the output end of the first motor (2), the threaded block (3) is connected to the threaded rod (202) in a threaded manner, and the bottom of the threaded block (3) is fixedly connected with a first support plate (301);

support cover (101) lateral wall fixedly connected with safety cover (201), first motor (2) are located safety cover (201).

4. A chemical mechanical polishing apparatus according to claim 2, wherein the lifting mechanism comprises a first cylinder (302) and a second box (4), the first cylinder (302) is fixedly connected to the bottom of the first supporting plate (301), the second box (4) is fixedly connected to the output end of the first cylinder (302), and the second motor (401) is fixedly connected to the inner wall of the top of the second box (4).

5. A chemical mechanical polishing device according to claim 2, wherein a first gear (5) is fixedly connected to the threaded rod (202), a second gear (501) engaged with the first gear (5) is rotatably connected to the side wall of the supporting cover (101), and a third gear (503) engaged with the second gear (501) is fixedly connected to the first rotating shaft (502).

6. A chemical mechanical polishing apparatus according to claim 1, wherein the transmission mechanism comprises a driven pulley (901), a driving pulley (902), and a belt (903), the driven pulley (901) is fixedly connected to the second rotating shaft (9), the driving pulley (902) is fixedly connected to the first rotating shaft (502), and the belt (903) is connected between the driven pulley (901) and the driving pulley (902).

7. The chemical mechanical polishing device as claimed in claim 1, wherein the piston plate (1201) is provided with an air inlet hole (1202), a first one-way valve (1203) is arranged in the air inlet hole (1202), a second one-way valve (1301) is arranged in the second hollow tube (13), a third one-way valve (1401) is arranged in the water inlet funnel (14), and a spring (11) is arranged between the moving plate (1001) and the inner wall of the bottom of the first box body (1).

8. A chemical mechanical polishing device according to claim 1, characterized in that the side wall of the water tank (8) is provided with a water inlet (801), the bottom of the filter screen (802) is provided with a recovery plate (803), the bottom of the recovery plate (803) is provided with a first hollow pipe (804), and one end of the first hollow pipe (804) far away from the recovery plate (803) is communicated with the water tank (8).

9. A chemical mechanical polishing apparatus according to claim 1, wherein a rubber gasket (601) and a positioning block (602) are disposed on the rotating plate (702) and the second support plate (6), and a telescopic plate (703) is connected between the third support plate (701) and the supporting cover (101).

10. A method of using a chemical mechanical polishing apparatus comprising the chemical mechanical polishing apparatus of any one of claims 1 to 9, characterized by the steps of:

s1, starting the second air cylinder (7) to fix the part body (704);

s2, starting the first motor (2), wherein the first motor (2) drives the threaded rod (202) to rotate, the threaded rod (202) drives the part body (704) to rotate, and meanwhile, the first rotating shaft (502) drives the second rotating shaft (9) to rotate;

s3, the second rotating shaft (9) drives the piston plate (1201) to reciprocate through the cam (10), and air in the piston cylinder (1204) is compressed into the second hollow pipe (13) so that polishing liquid in the second hollow pipe (13) is sprayed out from the spray head (1302);

and S4, starting the first air cylinder (302) and the second motor (401), enabling the polishing disc (402) to be in contact with the part body (704), and polishing and grinding the part body (704).