CN111939733A - Harmful gas treatment apparatus and method using plasma - Google Patents
Harmful gas treatment apparatus and method using plasma Download PDFInfo
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- CN111939733A CN111939733A CN202010413442.4A CN202010413442A CN111939733A CN 111939733 A CN111939733 A CN 111939733A CN 202010413442 A CN202010413442 A CN 202010413442A CN 111939733 A CN111939733 A CN 111939733A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/54—Nitrogen compounds
- B01D53/58—Ammonia
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/76—Gas phase processes, e.g. by using aerosols
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/14—Methods for preparing oxides or hydroxides in general
- C01B13/20—Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state
- C01B13/22—Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides
- C01B13/28—Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides using a plasma or an electric discharge
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/104—Ozone
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
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Abstract
Embodiments of the present invention are directed to providing a harmful gas treatment apparatus and method using plasma, which can gradually improve the efficiency of ammonia removal by generating a first ammonia removing substance through a reaction of plasma and ammonia, generating a second ammonia removing substance through a re-reaction of the first ammonia removing substance and ammonia in a first ammonia removal, and removing ammonia in a second ammonia removal.
Description
Technical Field
The present invention relates to a harmful gas treatment apparatus and method using plasma.
Background
Generally, the state of matter is divided into solids, liquids and gases. The plasma may be generated by applying high energy to the gas. The plasma is a gas state in which negatively charged electrons and positively charged ions are separated, and the negatively charged electrons are separated from atoms or molecules by mutual collision of gas molecules having high kinetic energy at ultrahigh temperature. The plasma can be classified into a high temperature plasma, which is an arc or the like having a high temperature, and a low temperature plasma, which is an arc or the like having a high electron energy but a low ion energy, and thus the temperature actually sensed is close to the normal temperature.
Such plasma may vary in its generation technique and application depending on the pressure conditions. For example, under a vacuum condition with a low pressure, plasma can be stably generated, and thus the plasma can be applied to chemical reaction, deposition, and the like in a semiconductor process or a new material synthesis process. In addition, the plasma in an atmospheric pressure state can be applied to the treatment of gases harmful to the environment or the manufacture of new materials.
Recently, many techniques have been developed to treat harmful gases emitted from industrial production. In addition, there is a need to develop a technology for easily removing ammonia contained in harmful gases.
Disclosure of Invention
Technical problem
Embodiments of the present invention are directed to providing a harmful gas treatment apparatus and method using plasma, which can gradually improve the efficiency of ammonia removal by generating a first ammonia removing substance through a reaction of plasma and ammonia to remove ammonia for a first time, and generating a second ammonia removing substance through a re-reaction of the first ammonia removing substance and ammonia to remove ammonia for a second time.
Technical scheme
The harmful gas treatment apparatus using plasma according to an embodiment of the present invention includes: a first reaction unit disposed on the harmful gas path for generating a first ammonia removing substance by performing a first reaction of plasma ozone generated by the plasma reaction and ammonia contained in the harmful gas to remove the ammonia contained in the harmful gas for a first time; and a second reaction unit for generating a second ammonia-removed substance by performing a second reaction of the first ammonia-removed substance generated in the first reaction unit and the unreacted ammonia in the first reaction unit to remove ammonia for a second time.
The first reaction unit may include: a reaction chamber including an inlet and an outlet through which the harmful gas passes on the harmful gas path, and including a reaction space of the harmful gas and the plasma reaction gas; a plasma electrode disposed inside the reaction chamber and including a discharge space for generating a plasma discharge; and an injection unit disposed at a position connecting the inside of the reaction chamber and a supply path of the plasma reaction gas corresponding to the circumference of the plasma electrode, for guiding the plasma reaction gas to be supplied to the inside of the reaction chamber.
The first ammonia removal species may include one or more of nitrogen dioxide or sulfur dioxide. Additionally, the second deaminating substance can comprise one or more of ammonium nitrate or ammonium sulfate.
The harmful gas treatment apparatus using plasma may further include a fertilizer refining apparatus for dissolving the second desmodium substance with water and receiving the dissolved second desmodium substance to perform treatment.
The harmful gas treatment method using plasma according to an embodiment of the present invention may include: a first ammonia removal step of generating a first ammonia removal substance by subjecting plasma ozone generated by the plasma reaction and ammonia contained in the harmful gas to a first reaction to remove the ammonia contained in the harmful gas for a first time; and a second ammonia removal step of performing a second reaction of the first ammonia removal substance produced in the first ammonia removal step and the unreacted ammonia in the first ammonia removal step to produce a second ammonia removal substance to remove ammonia for a second time.
The harmful gas treatment method using plasma may further include: and a dissolving step of dissolving the second ammonia removal substance generated in the second ammonia removal step with water and discharging the dissolved second ammonia removal substance.
The harmful gas treatment method using plasma may further include: a fertilizer treatment step of supplying the second ammonia removing substance dissolved in the dissolving step.
Effects of the invention
According to the embodiment of the present invention, ammonia contained in the harmful gas is removed for the first time through a plasma reaction, and then unreacted ammonia and the first ammonia removing substance are subjected to a second reaction again to remove ammonia for the second time, so that the ammonia contained in the harmful gas is doubly treated, whereby the ammonia removing efficiency can be improved.
Drawings
Fig. 1 is a schematic view of a harmful gas treatment apparatus using plasma according to an embodiment of the present invention.
Fig. 2 is a schematic view of a plasma electrode according to an embodiment of the present invention.
Fig. 3 is a schematic view of a plasma electrode according to an embodiment of the present invention.
Detailed Description
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. The use of "including" or "comprising" in the specification is intended to specify the presence of stated features, integers, steps, actions, elements, and/or components, but does not preclude the presence or addition of other features, integers, steps, actions, elements, components, and/or groups thereof.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terms used in the present invention should be interpreted as having a meaning that is consistent with their meaning in the context of this specification and the relevant art and should not be interpreted in an idealized or overly formal sense.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present invention pertains can easily practice the present invention. However, the present invention can be implemented in various different ways, and is not limited to the following examples.
Fig. 1 is a schematic view of a harmful gas treatment apparatus using plasma according to an embodiment of the present invention, and fig. 2 is a schematic view of a plasma electrode according to an embodiment of the present invention. Referring to fig. 1 and 2, a harmful gas treatment apparatus using plasma according to an embodiment of the present invention may include a first reaction unit 100 and a second reaction unit 110. The first reaction unit 100 and the second reaction unit 110 may be integrally formed on the harmful gas path 10 in a harmful gas flow direction.
The first reaction unit 100 is disposed on the harmful gas path 10, and can remove ammonia a contained in the harmful gas for the first time by generating the first ammonia removal substance R1 by performing the first reaction between plasma ozone P generated by the plasma reaction and ammonia a contained in the harmful gas.
In the first reaction unit 100, the plasma reaction may oxidize all or part of Nitric Oxide (NO) into nitrogen dioxide (NO) using plasma arc (arc) discharge2). The plasma reaction may be performed before the ammonia a supplying step. Further, the plasma reaction may be performed after the ammonia a is supplied. In addition, the plasma ozone P and ammonia a can be subjected to the first reaction by arc discharge.
For example, nitrogen dioxide (NO) of the first ammonia removal substance R12) Can be produced by the following reaction formula: o is3+NH3->NO2+H20. In the first reaction unit 100, ammonia a may be oxidized into nitrogen dioxide (NO), which is more easily decomposed than nitrogen monoxide (NO), by a plasma reaction2). The first ammonia removal species R1 generated in the first reaction unit 100 may comprise nitrogen dioxide (NO)2) Or sulfur dioxide (SO)2) More than one of them. In addition, a part of ammonia a is changed into NH by the plasma reaction in the first reaction unit 1002And thus the amount of ammonia a can be reduced. Ammonia A is converted into NH by plasma reaction2Is produced by the following reaction: NH (NH)3+ e- (contained in plasma)>NH2 +。
The first reaction unit 100 may include a reaction chamber 102, a plasma electrode 104, and an injection unit 102 a. The first reaction unit 100 generates nitrogen dioxide (NO) of the first ammonia removing substance R1 by reacting plasma ozone P generated by arc discharge with ammonia a contained in the harmful gas2) Or sulfur dioxide (SO)2) Ammonia a can be removed from the harmful gas for the first time.
The reaction chamber 102 includes an inlet and an outlet through which the harmful gas passes on the harmful gas path 10, and may include a reaction space of the harmful gas and the plasma reaction gas. The reaction chamber 102 may be formed in a cylindrical shape or the like. In addition, the reaction chamber 102 and the plasma electrode 104 may have shapes that easily form arc discharge on the plasma electrode 104 inside the reaction chamber 102 and minimize abrasion of the plasma electrode 104, respectively.
The plasma electrode 104 may be plural, which is disposed inside the reaction chamber 102 and includes a discharge space, and may generate a plasma discharge. For example, the discharge space includes between the reaction chamber 102 and the plasma electrode 104, between the plurality of plasma electrodes, or both. In a state where the plasma reaction gas is supplied to the discharge space, when the reaction chamber 102 is grounded and a driving voltage is supplied to the plasma electrode 104, a plasma arc is generated in the discharge space by using the plasma reaction gas as a medium. The plasma arc may be conducted in the flow direction of the plasma reaction gas.
The plasma electrode 104 may be disposed on an inflow path into which the harmful gas flows. In addition, the plasma electrode 104 may include a cylindrical first electrode 1042 and a second electrode 1044 disposed inside the first electrode 1042. For plasma, in a discharge space between the first electrode 1042 and the second electrode 1044, plasma may be generated by a high voltage difference. The second electrode 1044 may be disposed at the center of the first electrode 1042. A discharge gas may be supplied to a discharge space between the first electrode 1042 and the second electrode 1044. The first electrode 1042 and the second electrode 1044 may be made of metal, and plasma reaction gas rises along between the first electrode 1042 and the second electrode 1044, and plasma may be generated by plasma discharge.
Referring to fig. 2, the second electrode 1044 may be formed in a shape in which a portion supplying the discharge gas has a cylindrical shape and a shape in which an end portion of the cylindrical shape and an extended portion are gradually widened upward and then narrowed in a conical shape. For example, the second electrode 1044 may have a candle lamp shape. Due to the shape of the second electrode 1044, plasma discharge can be efficiently performed, and mixing of plasma ozone and harmful gas can also be efficiently performed.
As shown in fig. 3, the second electrode 1044a may be provided in plural, and may be arranged at uniform intervals on the inner circumference of the first electrode 1042 a. As shown in fig. 3, the plasma electrode 104a can uniformly inject a lot of harmful gas into the first reaction unit 100 by providing the plurality of second electrodes 1044a, and thus can effectively perform mixing of plasma ozone and harmful gas. In addition, the time during which the harmful gas stays in the first reaction unit 100 is increased, so that it is possible to improve the decomposition rate and to realize the decomposition treatment with a large capacity.
The injection unit 102a is disposed at a position connecting the inside of the reaction chamber 102 and a supply path of the plasma reaction gas corresponding to the circumference of the plasma electrode 104, and may guide the plasma reaction gas to be supplied to the inside of the reaction chamber 102. The injection unit 102a may be provided to be coupled to the reaction chamber 102 and to supply a plasma reaction gas to the plasma arc. The plasma reaction gas may comprise one or more of argon, nitrogen, air, and oxygen. The plasma reaction gas may be supplied by being swirled on the inner surface of the reaction chamber 102 as needed. In this case, the injection unit 102a may be configured to supply the plasma reaction gas in the form of a vortex (spiral). For example, the injection units 102a may be disposed to be arranged at equal intervals in the circumferential direction of the reaction chamber 102 to uniformly distribute the plasma reaction gas to the circumference of the plasma electrode 104.
As described above, the first deamination substance R1 generated by the first reaction between ozone and ammonia a generated by the plasma reaction in the first reaction unit 100 is supplied to the second reaction unit 110 to react the unreacted ammonia a1 and the first deamination substance R1 a second time to generate the second deamination substance R2, thereby removing the unreacted ammonia a1 a second time, and thus the deamination efficiency can be more reliably improved.
The second reaction unit 110 may perform a second reaction of the first deamination substance R1 generated in the first reaction unit 100 and the unreacted ammonia a1 in the first reaction unit 100 to generate a second deamination substance R2, thereby performing a second deamination. The second ammonia removal species R2 may comprise ammonium Nitrate (NH)4NO3) Or ammonium sulfate ((NH)4)2SO4) More than one of them. For example, ammonium Nitrate (NH) of the second ammoniated substance R24NO3) Can be produced by the following reaction formula: NO2+NH3->NH4NO3. In addition, ammonium sulfate (NH) of the second ammonia removing substance R24)2SO4) Can be produced by the following reaction formula: SO (SO)2+NH3->(NH4)2SO4)。
The nitrogen dioxide (NO) of the first deaminating substance R1 generated by the plasma reaction in the first reaction unit 100 is not used in the second reaction unit 1102) Or sulfur dioxide (SO)2) And reacts again with the unreacted ammonia a1 supplied from the first reaction unit 100 to the second reaction unit 110 to generate a second ammonia removal substance R2, so that ammonia can be removed for a second time.
Further, the harmful gas treatment apparatus using plasma may further include a fertilizer refining apparatus 120. The second ammonia removing substance R2 generated in the second reaction unit 110 is generated in a solid form and can be reused as a fertilizer by being dissolved with water. For example, ammonium nitrate or sulfate produced as the second ammonia removing substance R2 may be produced in a solid form that is readily soluble in water. Therefore, ammonium nitrate or ammonium sulfate in solid form can be dissolved in water and supplied to the fertilizer refining apparatus 120 to be used as a fertilizer. The second ammonia removal substance R2 in solid form may be supplied to a fertilizer-related facility such as a fertilizer production facility or a fertilizer refining facility 120 to be processed into fertilizer. In this case. A post-treatment unit for treating the second ammonia removal substance R2 generated in the second reaction unit 110 may also be included. The post-treatment unit may include a water storage unit that may store and discharge the second ammonia removal material R2 in the form of water and solids.
As described above, the second ammonia removing substance R2 is generated in the second reaction unit 110 using the first ammonia removing substance R1 generated in the first reaction unit 100, so that the ammonia removing efficiency can be improved. Further, the ammonium nitrate or the ammonium sulfate of the finally produced second deaminating substance R2 is easily dissolved in water and can be used as a fertilizer.
A harmful gas treatment method using plasma according to an embodiment of the present invention is described in detail below.
With the harmful gas treatment method using plasma according to the embodiment of the present invention, ammonia a contained in the harmful gas is first removed by the plasma reaction, and secondary ammonia removal is possible by allowing the unreacted ammonia a1, which has not been removed in the first ammonia removal step, to again undergo a second reaction with the first ammonia removal substance R1. In addition, the ammonia a contained in the harmful gas is removed by performing a double treatment, and the efficiency of removing ammonia can be improved.
Further, in the second removal step, ammonium Nitrate (NH) useful as a fertilizer is produced by reacting the nitrogen dioxide or sulfur dioxide produced in the first removal step with unreacted ammonia a14NO3) Or ammonium sulfate ((NH)4)2SO4) And thus can be connected to a fertilizer refining apparatus 120 or the like for reuse.
The harmful gas treatment method using plasma according to an embodiment of the present invention includes a first ammonia removal step and a second ammonia removal step.
First, in the first ammonia removal step, the plasma ozone P generated by the plasma reaction and the ammonia a contained in the harmful gas are subjected to the first reaction to generate the first ammonia removal substance R1, whereby the ammonia a contained in the harmful gas can be removed for the first time. The first ammonia removal species R1 may comprise nitrogen dioxide (NO)2) Or sulfur dioxide (SO)2) More than one of them.
For example, in the first ammonia removal step, a discharge is formed in the discharge space of the plasma electrode 104 by a high voltage supplied to the plasma electrode 104 in the first reaction unit 100 disposed on the harmful gas path 10. The plasma is generated when the plasma generating gas is supplied to the discharge space through the injection unit 102 a. The plasma generated in the discharge space becomes high-temperature thermal plasma, and the plasma ozone P generated by the plasma reaction and the ammonia a contained in the harmful gas are subjected to the first reaction, whereby the first ammonia removing substance R1 can be generated. The ammonia a contained in the harmful gas can be removed for the first time by using the first ammonia removing substance R1 generated in the first reaction unit 100.
Ammonia a1 which has not reacted with the first ammonia removing substance R1 is supplied to the second reaction unit 110. In the second reaction unit 110, the second ammonia removal substance R2 is generated by the second reaction of the first ammonia removal substance R1 with the unreacted ammonia a1 in the first reaction unit 100. The second ammonia removal is performed using the second ammonia removal substance R2 generated in the second reaction unit 110.
For the second ammonia removal step, the second ammonia removal substance R2 is generated by allowing the first ammonia removal substance R1 generated in the first ammonia removal step and the unreacted ammonia a1 in the first reaction unit 100 to undergo a second reaction in the second reaction unit 110, so that ammonia can be removed for a second time. The second ammonia removal species R2 may comprise ammonium Nitrate (NH)4NO3) Or ammonium sulfate ((NH)4)2SO4) More than one of them.
The second ammonia removal substance R2 generated in the second ammonia removal step may be formed in a solid form.
The harmful gas treatment method using plasma may further include a dissolving step of dissolving the second deamination substance R2 formed into a solid with water. Ammonium Nitrate (NH)4NO3) And ammonium sulfate ((NH)4)2SO4) The water-soluble organic acid compound has very high solubility in water, and thus is easily dissolved in water and can be removed by dissolving in water and discharging.
The harmful gas treatment method using plasma may further include a fertilizer treatment step of supplying the second ammoniacal substance R2 dissolved in the dissolving step. For example, the fertilizer treatment step may be performed by the fertilizer refining apparatus 120. Ammonium nitrate or ammonium sulfate generated as the second deaminating substance R2 is formed in a solid form and can be supplied as a fertilizer to the fertilizer refining apparatus 120 as dissolved in water. The fertilizer refined in the fertilizer refining apparatus 120 can be used by necessary equipment.
As described above, the ammonia a contained in the harmful gas is primarily removed by the first ammonia removing substance R1 generated by plasma, and the second ammonia removing substance R2 is generated by reacting the unreacted ammonia a1 with the first ammonia removing substance R1 to remove ammonia for the second time, so that the ammonia removing efficiency can be improved. In addition, the second ammonia removal substance R2 produced can be used as a fertilizer.
The preferred embodiments of the present invention have been described through the above, but the present invention is not limited to the above, and various modifications can be made within the scope of the claims, the specification and the drawings, and these modifications also fall within the scope of the present invention.
Description of the symbols
10: harmful gas path 100: a first reaction unit
102: the reaction chamber 104: plasma electrode
110: second reaction unit 120: fertilizer refining device
Claims (10)
1. A harmful gas treatment apparatus using plasma, comprising:
a first reaction unit disposed on the harmful gas path for generating a first ammonia removing substance by performing a first reaction of plasma ozone generated by the plasma reaction and ammonia contained in the harmful gas to remove the ammonia contained in the harmful gas for a first time; and
a second reaction unit for generating a second ammonia-removed substance by performing a second reaction of the first ammonia-removed substance generated in the first reaction unit and the unreacted ammonia in the first reaction unit to remove ammonia for a second time.
2. The harmful gas treatment apparatus using plasma according to claim 1,
the first reaction unit includes:
a reaction chamber including an inlet and an outlet through which the harmful gas passes on the harmful gas path, and including a reaction space of the harmful gas and the plasma reaction gas;
a plasma electrode disposed inside the reaction chamber and including a discharge space for generating a plasma discharge; and
and an injection unit disposed at a position connecting the inside of the reaction chamber and a supply path of the plasma reaction gas corresponding to the circumference of the plasma electrode, for guiding the plasma reaction gas to be supplied to the inside of the reaction chamber.
3. The harmful gas treatment apparatus using plasma according to claim 1,
the first ammonia removing substance comprises nitrogen dioxide (NO)2) Or sulfur dioxide (SO)2) More than one of them.
4. The harmful gas treatment apparatus using plasma according to claim 1,
the second deaminating substance comprises ammonium Nitrate (NH)4NO3) Or ammonium sulfate ((NH)4)2SO4) More than one of them.
5. The harmful gas treatment apparatus using plasma according to claim 4, further comprising:
a fertilizer refining unit for dissolving the second ammoniated substance with water and receiving the dissolved second ammoniated substance for treatment.
6. A harmful gas treatment method using plasma, comprising:
a first ammonia removal step of generating a first ammonia removal substance by subjecting plasma ozone generated by the plasma reaction and ammonia contained in the harmful gas to a first reaction to remove the ammonia contained in the harmful gas for a first time; and
a second ammonia removal step of generating a second ammonia removal substance by subjecting the first ammonia removal substance generated in the first ammonia removal step and the ammonia that has not reacted in the first ammonia removal step to a second reaction, to remove ammonia for a second time.
7. The harmful gas treatment method using plasma according to claim 6,
the first ammonia removing substance comprises nitrogen dioxide (NO)2) Or sulfur dioxide (SO)2) More than one of them.
8. The harmful gas treatment method using plasma according to claim 6,
the second deaminating substance comprises ammonium Nitrate (NH)4NO3) Or ammonium sulfate ((NH)4)2SO4) More than one of them.
9. The harmful gas treatment method using plasma according to claim 8, further comprising:
and a dissolving step of dissolving the second ammonia removal substance produced in the second ammonia removal step with water and discharging the dissolved second ammonia removal substance.
10. The harmful gas treatment method using plasma according to claim 9, further comprising:
a fertilizer treatment step of supplying the second ammonia removing substance dissolved in the dissolving step.
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KR102628487B1 (en) * | 2021-07-27 | 2024-01-25 | (주)플라즈마텍 | System for complex treatment of acid exhaust gas and alkali exhaust gas of semiconductor manufacturing facility and method for complex treatment of acid exhaust gas and alkali exhaust gas using the same |
KR102708095B1 (en) * | 2021-11-23 | 2024-09-19 | 한국핵융합에너지연구원 | High-purity no2 gas generator and high-concentration activated water and fertilizer water manufacturing device based on nitrate using plasma |
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